KXR94-1050 Specifications Rev 2

PART NUMBER:
± 2g Tri-axis Accelerometer
Specifications
KXR94-1050
Rev. 2
Aug-2010
Product Description
The KXR94-1050 is a Tri-axis, silicon micromachined accelerometer with a full-scale output
range of +/-2g (19.6 m/s/s). The sense element is fabricated using Kionix’s proprietary plasma
micromachining process technology. Acceleration sensing is based on the principle of a
differential capacitance arising from acceleration-induced motion of the sense element, which
further utilizes common mode cancellation to decrease errors from process variation,
temperature, and environmental stress. The sense element is hermetically sealed at the wafer
level by bonding a second silicon lid wafer to the device using a glass frit. A separate ASIC
device packaged with the sense element provides signal conditioning and self-test. The
accelerometer is delivered in a 5 x 5 x 1.2 mm DFN plastic package operating from a 2.5 –
5.25V DC supply.
There are 4 factory programmable modes of operation for the KXR94:
Mode 00 – The three outputs (X, Y, Z) are read through the digital SPI interface, which is also
used to command Selftest and Standby Mode. The digital I/O pads are powered
from a separate power pin, and will interface to 1.8V logic.
Mode 01 – The three outputs (X, Y, Z) are provided on three analog output pins. The KXR94
also features an integrated 3-channel multiplexer (X, Y, Z). The Enable pin must
be high for normal operation and low for power shutdown.
Mode 10 – The three outputs (X, Y, Z) are provided on three analog output pins. The KXR94
also features an integrated 4-channel multiplexer (X, Y, Z, Aux In). The Enable
pin must be high for normal operation and low for power shutdown.
Mode 11 – The three outputs (X, Y, Z) are provided on three analog output pins. The KXR94
also features an integrated 4-channel multiplexer (X, Y, Z, Aux In). The Enable
pin must be low for normal operation and high for power shutdown.
The KXR94-1050 is factory programmed to be in MODE 10.
36 Thornwood Dr. – Ithaca, NY 14850
tel: 607-257-1080 – fax:607-257-1146
www.kionix.com - [email protected]
© 2010 Kionix – All Rights Reserved
323-1672-1008100655
Page 1 of 12
PART NUMBER:
± 2g Tri-axis Accelerometer
Specifications
KXR94-1050
Rev. 2
Aug-2010
Functional Diagram
X
Sensor
Charge
Amplifier
Self
10
Test
Z
Sensor
C2
Charge
Amplifier
32K
1kHz
LPF
Output Y
13
C3
Charge
Amplifier
32K
Output Z
14
C4
Oscillator
GND 12
Mux
4 Aux In
Logic
GND 3
36 Thornwood Dr. – Ithaca, NY 14850
tel: 607-257-1080 – fax:607-257-1146
www.kionix.com - [email protected]
Output X
2
Temp
Sensor
Y
Sensor
Vdd 8
32K
9
11
Enable
NC
6
7
5
S0 S1 Vmux
© 2010 Kionix – All Rights Reserved
323-1672-1008100655
Page 2 of 12
PART NUMBER:
± 2g Tri-axis Accelerometer
Specifications
KXR94-1050
Rev. 2
Aug-2010
Product Specifications
Table 1. Mechanical
(specifications are for operation at 2.8V and T = 25C unless stated otherwise)
Parameters
Units
Min
Typical
Operating Temperature Range
Zero-g Offset
Zero-g Offset Variation from RT over Temp.
Sensitivity
ºC
V
mg/ºC
mV/g
Sensitivity Variation from RT over Temp.
%/ºC
Offset Ratiometric Error (Vdd = 2.8V ± 5%)
mg
Sensitivity Ratiometric Error (Vdd = 2.8V ± 5%)
%
Non-Linearity
Cross Axis Sensitivity
Self Test Output change on Activation
1
Bandwidth (-3dB)
Noise Density (on filter pins)
-40
1.358
549
% of FS
%
g
Hz
g / √Hz
640
1.4
0.2
560
0.01 (xy)
0.02 (z)
4
1.25 (xy)
0.2 (z)
0.1
2
1.3 (xy)
0.35 (z)
800
45
Max
85
1.442
571
960
Notes:
1. Internal 1 kHz low pass filter. Lower frequencies are user definable with external capacitors.
36 Thornwood Dr. – Ithaca, NY 14850
tel: 607-257-1080 – fax:607-257-1146
www.kionix.com - [email protected]
© 2010 Kionix – All Rights Reserved
323-1672-1008100655
Page 3 of 12
PART NUMBER:
± 2g Tri-axis Accelerometer
Specifications
KXR94-1050
Rev. 2
Aug-2010
Table 2. Electrical
(specifications are for operation at 2.8V and T = 25C unless stated otherwise)
Parameters
Units
Min
Typical
Supply Voltage (Vdd)
Operating
Operating
Current Consumption
Standby
Analog Output Resistance(Rout)
Input Low Voltage
Input High Voltage
Multiplexer Response Time
1
Power Up Time
V
A
A
k
V
V
s
ms
2.5
500
24
0.8 * VIO
2.8
950
32
4.5
1
Max
5.25
1400
5
40
0.2 * VIO
-
Notes:
1. Power up time can also be determined by 5 times the RC time constant of the optional user
defined low pass filter.
36 Thornwood Dr. – Ithaca, NY 14850
tel: 607-257-1080 – fax:607-257-1146
www.kionix.com - [email protected]
© 2010 Kionix – All Rights Reserved
323-1672-1008100655
Page 4 of 12
PART NUMBER:
± 2g Tri-axis Accelerometer
Specifications
KXR94-1050
Rev. 2
Aug-2010
Table 3. Environmental
Parameters
Units
Min
Target
Max
Supply Voltage (Vdd)
Absolute Limits
Maximum Operating Temperature Range
Storage Temperature Range
Mech. Shock (powered and unpowered)
V
ºC
ºC
g
-0.3
-40
-55
-
-
7.0
125
150
5000 for 0.5ms
ESD
V
-
-
3000
HBM
Caution: ESD Sensitive and Mechanical Shock Sensitive Component, improper handling
can cause permanent damage to the device.
This product conforms to Directive 2002/95/EC of the European Parliament and of the
Council of the European Union (RoHS). Specifically, this product does not contain lead,
mercury, cadmium, hexavalent chromium, polybrominated biphenyls (PBB), or
polybrominated diphenyl ethers (PBDE) above the maximum concentration values (MCV)
by weight in any of its homogenous materials. Homogenous materials are "of uniform
composition throughout."
HF
This product is halogen-free per IEC 61249-2-21. Specifically, the materials used in this
product contain a maximum total halogen content of 1500 ppm with less than 900-ppm
bromine and less than 900-ppm chlorine.
Soldering
Soldering recommendations available upon request or from www.kionix.com.
36 Thornwood Dr. – Ithaca, NY 14850
tel: 607-257-1080 – fax:607-257-1146
www.kionix.com - [email protected]
© 2010 Kionix – All Rights Reserved
323-1672-1008100655
Page 5 of 12
PART NUMBER:
± 2g Tri-axis Accelerometer
Specifications
KXR94-1050
Rev. 2
Aug-2010
Application Schematic
X
C2
Aux In
Vmux
S0
S1
1
14
2
13
3
12
4
11
KXR94
5
10
6
9
7
8
Z
Y
C3
C4
ST
Enable
Vdd
C1
Table 4. KXR94 Pad Descriptions
Pad
Name
1
NC
2
X output
3
4
5
6
7
8
9
10
11
12
GND
Aux In
Vmux
S0
S1
Vdd
Enable
ST
NC
GND
13
Y Output
14
Z Output
Center pad
Description
Not Connected Internally (can be connected to Vdd or Gnd)
Analog output of the x-channel. Optionally, a capacitor (C2) placed between this pin and ground will form a
low pass filter.
Ground
Auxiliary input for multiplexer. Connect to Vdd or Ground if not used.
Multiplexed analog output. Do not connect if multiplexer is not used.
MUX selector 0 (See Output Select Table). Connect to Vdd or Ground if not used.
MUX selector 1 (See Output Select Table). Connect to Vdd or Ground if not used.
The power supply input. Decouple this pin to ground with a 0.1uF ceramic capacitor (C 1).
Enable: High - Normal operation; Low - Device is in standby, power down mode
Self Test: Low – Normal operation; High – Device is in self-test mode
Not Connected Internally (can be connected to Vdd or Gnd)
Ground
Analog output of y-channel. Optionally, a capacitor (C3) placed between this pin and ground will form a low
pass filter.
Analog output of z-channel. Optionally, a capacitor (C4) placed between this pin and ground will form a low
pass filter.
Ground
36 Thornwood Dr. – Ithaca, NY 14850
tel: 607-257-1080 – fax:607-257-1146
www.kionix.com - [email protected]
© 2010 Kionix – All Rights Reserved
323-1672-1008100655
Page 6 of 12
PART NUMBER:
± 2g Tri-axis Accelerometer
Specifications
KXR94-1050
Rev. 2
Aug-2010
Application Design Equations
1. The bandwidth is determined by the internal 1kHz low pass filter. The user can lower the
bandwidth by placing filter capacitors connected from pins 2, 13 and 14 to ground. The
response is single pole. Given a desired bandwidth, fBW, the filter capacitors are determined by:
C2  C3  C4 
4.97 x106
f BW
2. When using not using the multiplexer, the KXR94 is a pin-compatible replacement for Kionix’s
KXM52 series of accelerometers. The following application schematic should be used:
Pin 4 (Aux in) = Ground
Pin 5 (Vmux) = Do Not Connect
Pin 6 (S0)
= Ground
Pin 7 (S1)
= Ground
X
C2
1
14
2
13
3
12
4
KXR94
11
5
10
6
9
7
8
Z
Y
C3
C4
ST
Enable
Vdd
C1
3. When not connecting the self test pin to a digital I/O port of a microcontroller, Kionix
recommends connecting the self test pin to ground.
36 Thornwood Dr. – Ithaca, NY 14850
tel: 607-257-1080 – fax:607-257-1146
www.kionix.com - [email protected]
© 2010 Kionix – All Rights Reserved
323-1672-1008100655
Page 7 of 12
PART NUMBER:
± 2g Tri-axis Accelerometer
Specifications
KXR94-1050
Rev. 2
Aug-2010
USING THE MULTIPLEXED OUTPUT OF THE KXR94
Multiplexer Data Select
The KXR94 features an integrated 4-channel multiplexer. This feature reduces system MCU
requirements to only 1 ADC and 2 digital I/O’s. The KXR94 uses two select inputs (S0, S1) to
control the data flow from Vmux. When a microprocessor toggles the select inputs, the desired
output is attained based on the select table. Note that logic 0 is GND and logic 1 is Vdd.
S1
0
0
1
1
S0
0
1
0
1
Vmux
X Output
Z Output
Y Output
Aux. In
Output Select Table
Data Sampling Rate
When operating in its multiplexed mode, the KXR94 has the ability to achieve very high data
sampling rates. Internally, the sensor elements (X, Y, and Z) are sequentially sampled in a
“round robin” fashion at a rate of 32kHz per axis. Note that this is a differential capacitance
sampling of each sensor element, which stores an analog voltage on the filter cap for each axis.
Combine this high sensor element sampling rate with the short 5µs settling time of the
integrated multiplexer, and the user can achieve a performance very close to that of the 3
separate analog outputs. This is more than sufficient to eliminate any aliasing in the final
application since the KXR94 will be operating with a typical bandwidth of ~50Hz and a
maximum of 1000Hz.
36 Thornwood Dr. – Ithaca, NY 14850
tel: 607-257-1080 – fax:607-257-1146
www.kionix.com - [email protected]
© 2010 Kionix – All Rights Reserved
323-1672-1008100655
Page 8 of 12
PART NUMBER:
± 2g Tri-axis Accelerometer
Specifications
KXR94-1050
Rev. 2
Aug-2010
Test Specifications
! Special Characteristics:
These characteristics have been identified as being critical to the customer. Every part is tested to
verify its conformance to specification prior to shipment.
Table 5. Test Specifications
Parameter
Zero-g Offset @ RT
Sensitivity @ RT
Current Consumption -- Operating
36 Thornwood Dr. – Ithaca, NY 14850
tel: 607-257-1080 – fax:607-257-1146
www.kionix.com - [email protected]
Specification
1.4 +/- 0.042 V
560 +/- 11 mV/g
500 <= Idd <= 1400 uA
Test Conditions
25C, Vdd = 2.8 V
25C, Vdd = 2.8 V
25C, Vdd = 2.8 V
© 2010 Kionix – All Rights Reserved
323-1672-1008100655
Page 9 of 12
PART NUMBER:
± 2g Tri-axis Accelerometer
Specifications
KXR94-1050
Rev. 2
Aug-2010
Package Dimensions and Orientation
5 x 5 x 1.2 mm DFN
+Y
+X
+Z
+Z
+X
Dimension
A
B
C
D
E
F
G
H
Min
1.10
0.18
0.35
3.50
4.20
mm
Nom
5.00
5.00
1.20
0.23
0.50
0.40
3.60
4.30
Max
Min
1.30
0.28
0.043
0.007
0.45
3.70
4.40
0.014
0.138
0.165
inch
Nom
0.197
0.197
0.047
0.009
0.020
0.016
0.142
0.169
Max
0.051
0.011
0.018
0.146
0.173
All dimensions and tolerances conform to ASME Y14.5M-1994
36 Thornwood Dr. – Ithaca, NY 14850
tel: 607-257-1080 – fax:607-257-1146
www.kionix.com - [email protected]
© 2010 Kionix – All Rights Reserved
323-1672-1008100655
Page 10 of 12
PART NUMBER:
± 2g Tri-axis Accelerometer
Specifications
KXR94-1050
Rev. 2
Aug-2010
Static X/Y/Z Output Response versus Orientation to Earth’s surface (1g):
Position
Diagram
1
2
3
4
5
Top
6
Bottom
Bottom
Top
X
Y
Z
1.4 V
1.96 V
1.4 V
1.96 V
1.4 V
1.4 V
1.4 V
0.84 V
1.4 V
0.84 V
1.4 V
1.4 V
1.4 V
1.4 V
1.96 V
1.4 V
1.4 V
0.84 V
X-Polarity
Y-Polarity
Z-Polarity
0
+
0
+
0
0
0
0
0
0
0
0
+
0
0
-
(1g)
Earth’s Surface
36 Thornwood Dr. – Ithaca, NY 14850
tel: 607-257-1080 – fax:607-257-1146
www.kionix.com - [email protected]
© 2010 Kionix – All Rights Reserved
323-1672-1008100655
Page 11 of 12
PART NUMBER:
± 2g Tri-axis Accelerometer
Specifications
KXR94-1050
Rev. 2
Aug-2010
Revision History
REVISION DESCRIPTION
1
Initial release
2
Corrected typographic error in Table 2 (Typical operating voltage changed from 3.3
to 2.8V)
DATE
06-Aug2007
10-Aug2010
"Kionix" is a registered trademark of Kionix, Inc. Products described herein are protected by patents issued or pending. No license is granted by implication or otherwise
under any patent or other rights of Kionix. The information contained herein is believed to be accurate and reliable but is not guaranteed. Kionix does not assume
responsibility for its use or distribution. Kionix also reserves the right to change product specifications or discontinue this product at any time without prior notice. This
publication supersedes and replaces all information previously supplied.
36 Thornwood Dr. – Ithaca, NY 14850
tel: 607-257-1080 – fax:607-257-1146
www.kionix.com - [email protected]
© 2010 Kionix – All Rights Reserved
323-1672-1008100655
Page 12 of 12