ETC PIEZO_SYSTEMS_PRODUCT_CATALOG

P IEZO S YSTEMS , I NC .
186 Massachusetts Avenue Cambridge, MA 02139 • Tel: (617) 547-1777 • Fax: (617) 354-2200 •
Web: www.piezo.com • E-mail: [email protected]
TABLE OF CONTENTS
CUSTOM DESIGN AND ENGINEERING
PRODUCT DEVELOPMENT
2
PRODUCTS
ELECTRONICS
Piezo Linear Amplifier
Piezo Switching Amplifier
Proportional Voltage Booster
DC to AC Inverter Drive Circuit
MOTION INSTRUMENTS
4
6
8
9
LINEAR MOTION
Heavy Duty Piezo Vibration Table
2 - Axis, Linear Positioner, ± 200 µm
2 - Axis, Linear Positioner, ± 1 µm
10
12
14
ANGULAR MOTION
1 - Axis, Mirror Tilter, ± 0.75°
2 - Axis, Mirror Tilter, ± 1.5°
16
18
ULTRASONIC ROTARY MOTION
Ultrasonic Rotary Motor & Driver
ACOUSTIC SOURCES
Lightweight Acoustic Source
FANS AND RESONATORS
Piezoelectric Fan
Piezoelectric Resonant Blade Element
Piezoelectric Chopper
DESIGN AND PROTOTYPING
Piezoelectric Motor/Actuator Kit
Piezoelectric Generator/Sensor Kit
Piezo Design Aid Software Diskette
TRANSDUCER ELEMENTS
Low Voltage Piezoelectric Stacks
Piezoceramic Bending Elements
Piezoceramic Single Sheets
Solder / Flux Kit
20
22
24
25
26
27
28
29
30
32
42
46
PIEZOCERAMIC APPLICATION DATA
Introduction to Piezoelectricity
Motor Transducer Relationships
Generator Transducer Relationships
Typical Thermal Properties of Piezoceramic
47
50
51
52
SERVICE AND WARRANTY: All Piezo Systems, Inc. products are warranted against defective materials and workmanship. This warranty
applies for a period of time of one year from the date of delivery to the original purchaser. Any instrument or part that is found within the
one year period not to meet these standards, will be repaired or replaced. No other warranty is expressed or implied.
NOTE: Prices and specifications subject to change without notice.
1
CATALOG #3, 1998
CUSTOM DESIGN AND
ENGINEERING
P IEZO S YSTEMS , I NC .
186 Massachusetts Avenue Cambridge, MA 02139 • Tel: (617) 547-1777 • Fax: (617) 354-2200 •
Web: www.piezo.com • E-mail: [email protected]
PRODUCT DEVELOPMENT
CUSTOMER SPECIFICATIONS
Piezoceramic actuator design is based on customer specifications which include as a minimum:
■
■
■
■
■
■
■
Motion and force requirements
Space available
Voltage available
Stability
Thermal operating range
Frequency operating range
Response time
ACTUATOR & SYSTEM DESIGN
Using extensive computer software and experience, Piezo
Systems Inc. can move directly from your specifications to
a complete optimized design.The actuator geometry, electroactive material, internal lamination, polarization, electrode configuration, mount, power take-off, and production process is designed to ensure repeatable and reliable
performance.
HIGH FREQUENCY TUNING FORK
Piezo Systems Inc. can also design and build the electronic
system which drives the actuator and fabricate (or mold)
the structure to which the piezo actuator is mounted.
PHASED DEVELOPMENT PROGRAM
Piezo Systems Inc. offers a phased development program
for custom device and product development. Our experience allows the elimination of potential design flaws
which plague those unfamiliar with piezoceramic technology, especially in the areas of lamination bonding, flexure
design, ceramic stress and fatigue criteria, thermal stability, mounting, power take-off attachments, electronic drive,
testing, and evaluation. This service reduces the customer’s
need to dedicate highly qualified personnel during the
development period, and development time is typically
reduced from years to months. Financial and technical risks
are minimized. The following phases are quoted on a fixed
price basis:
2 - AXIS ROTATIONAL POSITIONER
■
■
■
■
FEA MODELING
CATALOG #3, 1998
2
Analysis and Design Phase: Communication of specifications, analysis, and optimized design of actuator.
Prototype Phase: Samples built to specification.
Pre-production Phase: Pre-production samples for
exhaustive testing.
Production Phase: Production pieces at desired volume.
CUSTOM DESIGN AND
ENGINEERING
A R E A S O F E X P E RT I S E
BENDING ACTUATORS & SENSORS
Piezo Systems’ proprietary bonding process and ceramic
quality testing program leads to consistent performance,
high-strength, thermally stable, void free laminations. Our
advanced cutting techniques produce actuators with
dimensional tolerances within ±.001 inch if necessary;
widths as narrow as .020 inch; chip free edges; non-linear
shapes; and contamination free surfaces. Piezo Systems
ships parts to performance specifications, not merely to
dimensional tolerance. Our bending actuators are
employed in piezo valves, choppers, modulators, fans,
tunneling microscopes, and soil testers. Our bending sensors are used in implantable pacemakers and industrial
equipment.
BENDING ELEMENTS
RESONANT
DEVICES
RESONANT DEVICES
Resonant devices are an effective way of achieving high
periodic motion at low voltage and power. Products
designed to operate at a single frequency require special
attention be paid to shape uniformity, material consistency, and process control. A careful balance is sought
between minimizing strain on the piezoceramic and maximizing the dynamic amplitude. Energy losses due to internal dissipation, external attachments, and output loading
are addressed.
RESONANT DEVICES
ULTRASONIC
DEVICES
Ultrasonics, a special portion of the resonant spectrum,
find extensive use over a wide range of application areas.
These devices are designed according to the same principles guiding resonant devices. However, additional consideration is given to amplitude stability, power consumption,
over-heating, resonance tracking, and electronic drive.
RESONATORS
Piezo Systems has developed a monolithic construction
which eliminates many of the problems associated with
precompressed bolt together systems.
CONSULTING & ANALYSIS
Piezo Systems offers consultation on an hourly, daily,
weekly, and monthly basis.
PRODUCTION
Combined with proprietary processing techniques, Piezo
Systems works closely with a network of highly specialized
vendors. As a result Piezo Systems is capable of supplying
highly sophisticated single parts or hundreds of thousands
of parts per year.
ULTRASONICS
3
CATALOG #3, 1998
ELECTRONICS
P IEZO S YSTEMS , I NC .
186 Massachusetts Avenue Cambridge, MA 02139 • Tel: (617) 547-1777 • Fax: (617) 354-2200 •
Web: www.piezo.com • E-mail: [email protected]
PIEZO LINEAR AMPLIFIER
DESCRIPTION
Piezo Systems offers a single channel high frequency amplifier for driving a variety of piezo actuators, including
stacks, bimorphs, and single sheets.
The ability of an amplifier to drive a piezo device statically is determined primarily by the voltage level and stability. Its ability to drive a piezo device dynamically is determined by the capacitance of the actuator, the voltage to
which it must be charged, and the number of times it must
be charged and discharged per second.These establish the
current, voltage, and frequency requirements of the amplifier.
The EPA-102 is a high voltage (± 200 Vp), high current (±
200 mA), and high frequency (DC to 300 KHz) amplifier
designed to drive higher capacitive (low impedance) loads,
such as low voltage stacks, at moderate frequencies or
lower capacitive loads, such as ultrasonic devices, at high
frequencies.
Low Electrical Noise, Low Distortion: The amplifier is
made with a high quality Apex® High Voltage Hybrid
Operational Amplifier, and utilizes high regulation linear
power supplies. They are housed in a heavy high conductivity aluminum case which provides an excellent shield
from external electromagnetic interference.
12
(305)
SQ
Input and Output Protection: Piezo loads present special
problems to electronic drivers. The EPA-102 provides
heavy input and output protection to take care of all
shorting, turn-on, turn-off, and load generated voltage
occurrences which can damage either the amp or your
actuator.
PIEZO SYSTEMS, INC.
CAMBRIDGE, MA
Manual Bias Controls (Polarity and DC offset): Useful for
making manual adjustments of drive voltage to verify piezo
actuator static motion, for static setting, or for applying
DC bias to dynamically driven piezo actuators such as
piezo stacks.
PIEZO AMPLIFIER MODEL 80.102
DC OFFSET
VOLTAGE
OUPUT
± 200 VOLT
200 mA
5
(127)
POWER
OFF
External Control (via analog signal to the BNC input connector): Accepts up to ± 10 Vp signal waveforms from
external signal generators, computer controllers, or feedback networks from DC to rated frequency. The combined AC plus DC offset voltage is adjustable from zero to
the maximum rated voltage.
0
ON
—
+
INPUT
± 10 V MAX
CAUTION
HIGH VOLTAGE
DC POLARITY
ORDERING INFORMATION
Piezo Linear Amplifier, ± 200 Vp/200mA (115 VAC, 60 Hz)
Piezo Linear Amplifier, ± 200 Vp/200mA (230 VAC, 50 Hz)
CATALOG #3, 1998
4
PART NO.
EPA-102-115
EPA-102-230
PRICE
$2,399
$2,399
ELECTRONICS
SPECIFICATIONS
EPA-102 PIEZO LINEAR AMPLIFIER
ELECTRICAL
Maximum Voltage
Maximum Current
Output Power
Frequency Range
Bandwidth
±200 volts peak
±200 mA peak
40.0 watts peak
DC to 300 KHz
Into 1 KΩ resistive load . . . .
Flat: DC to 275 KHz
3db roll-off: 350 KHz
See chart below
Into capacitive load . . . . . .
Fixed at X20
180 volts / µsec
±10 volts peak
±10 volts DC
Direct DC coupling only
10K ohm
DC coupling
Normally zero volts. Adjustable to ± volts peak
Capable of driving any load within the voltage and
current limitations of the amplifier.
1 to 0, leading or lagging
115/120VAC, 50/60 Hz or 230/240VAC, 50/60 Hz
Overload Short Circuit
Voltage Gain
Slew Rate (No Load)
Maximum Input Voltage
Maximum DC Component
Input Coupling
Input Impedance
Output Coupling
Variable DC Offset
Load Impedance
Load Power Factor
AC Power Source
Circuit Protection
MECHANICAL
Controls
Terminals
Weight
Dimensions
C = 10 µF
Power Switch; DC Polarity (+,0,-); DC Offset Level
BNC for Input; Binding posts for Output
16 lbs.
12” L x 12” D x 5” H
C = .1 µF
C = 1 µF
C = .01 µF
C = .001 µF
200
175
150
Volts Peak
125
100
75
50
25
0
10
0
10
1
10
2
10
3
10
4
10
5
10
6
Frequency (Hertz)
Peak Voltage Delivered to Capacitive Load at Peak Current Rating as a Function of Operating Frequency
(Steady State Sinusoidal Waveforms; Temperature = 25 °C)
5
CATALOG #3, 1998
ELECTRONICS
P IEZO S YSTEMS , I NC .
186 Massachusetts Avenue Cambridge, MA 02139 • Tel: (617) 547-1777 • Fax: (617) 354-2200 •
Web: www.piezo.com • E-mail: [email protected]
PIEZO SWITCHING AMPLIFIER
LIGHTWEIGHT -
E N E R G Y E F F I C I E N T - C O M PA C T
DESCRIPTION
The ESA-208 achieves its flat response and wide bandwidth by employing a unique technology which is patent
pending. It is the first of its kind to be offered for sale,
and demonstrates concretely a future trend in miniaturization for high voltage power circuitry that will open up
new practical applications for piezo actuators.
The ESA-208 is a lightweight (3 lbs.), compact (7.4”W x
2.7”H x 9.6”D), high voltage (± 180 Vp), high current (±
500 mA), and audio frequency (DC to 5 KHz) amplifier
designed to drive high capacitive loads, such as low voltage stacks, at moderate frequencies or low capacitive
loads, such as acoustic sources, at high frequencies.
9.6"
(244)
Principle of Operation: The input signal to the amplifier
is converted into a train of width modulated pulses. The
polarity and duration of these pulses alternately control
the turn on and turn off of two (high and low) high voltage power switches operating at 200 KHz. The high frequency carrier is filtered out to pass the audio signal.
A typical linear amplifier
High Current Capability:
achieves voltage control by intelligently adjusting the
resistance value of the output stage which is in series with
the load. If the load draws .5 amps, all that current must
flow through the output stage resistance and be turned
into heat. By contrast, the switching amplifier has an output stage which is either fully on of fully off (never in
between), and so is capable of metering out far higher
currents for the same size circuit with a minimum of heat
loss.
DC OFFSET
PIEZO SYSTEMS INC.
OVER CURRENT
POWER
2.7"
(69)
INPUT
OUT
0
–
GND
+
RESET
POLARITY
MODEL ESA-203
7.4"
(188)
Input and Output Protection: Piezo loads present special
problems to electronic drivers. The ESA-208 provides
input and output protection to take care of turn-on, turnoff, and load generated voltage occurrences which can
damage either the amp or your actuator.
Manual Bias Controls (Polarity and DC offset): Useful for
making manual adjustments of drive voltage to verify
piezo actuator static motion, for static setting, or for
applying DC bias to dynamically driven piezo actuators
such as piezo stacks.
External Control (via analog signal to the BNC input connector): Accepts up to ± 10 Vp signal waveforms from
external signal generators, computer controllers, or feedback networks from DC to rated frequency. The combined AC plus DC offset voltage is adjustable from zero
to the maximum rated voltage.
Piezo Systems offers a single channel audio frequency
switching amplifier for driving a variety of piezo actuators,
including stacks, bimorphs, and single sheets.
ORDERING INFORMATION
Piezo Switching Amplifier, ± 180 Vp/±500mA (115 VAC, 60 Hz)
CATALOG #3, 1998
6
PART NO.
ESA-208-115
PRICE
$1,799
ELECTRONICS
SPECIFICATIONS
ESA-208 PIEZO SWITCHING AMPLIFIER
MECHANICAL
Dimensions
Weight
Controls
Terminals
7.4” W x 9.6” D x 2.7” H (188 x 244 x 69)
3 lbs. (1.6 Kg)
Power Switch; DC Polarity (+, zero, -); DC Offset
BNC for Input; Binding posts for Output
ELECTRICAL
Maximum Output Voltage
Maximum Output Current
Variable DC Offset
Frequency Range
Voltage Gain
Maximum Input Voltage
Maximum Input, DC Component
Input Coupling
Input Impedance
Output Coupling
Load Impedance
AC Power Source
Circuit Protection
± 180 volts peak
± 500 mA peak (see graph below)
± 180 volts peak, Adjustable
DC to 5 KHz
x 20, +10% / -5%
±10 volts peak
±10 volts DC
DC coupled
47K ohm
DC coupled
Any capacitive loads and resistive loads above 500 Ω
115-125VAC, 50-60 Hz
Current limit, short circuit, and thermal protection
with manual reset.
• This is a new technology and specifications are subject to change.
C=100 µF
210
C=1 µF
C=10 µF
C=0.1 µF
180
Voltage
150
120
90
60
30
0
1
10
100
1,000
5,000
Frequency (Hz)
ESA-208 Peak Output Voltage versus Frequency for various capacitive loads (sinusoidal waveform).
7
CATALOG #3, 1998
ELECTRONICS
P IEZO S YSTEMS , I NC .
186 Massachusetts Avenue Cambridge, MA 02139 • Tel: (617) 547-1777 • Fax: (617) 354-2200 •
Web: www.piezo.com • E-mail: [email protected]
P R O P O R T I O N A L V O LTA G E B O O S T E R
DESCRIPTION
The Proportional Voltage Booster is a simple means for
obtaining the higher voltage used for driving piezo
devices, such as sheets, benders and stacks, at static or
quasi static frequency. It requires only a low voltage DC
supply (such as the output of an op-amp), commonly available in the laboratory.
The booster is small in size, PC board mountable, and
suited for low current / high voltage applications. Output
voltage is proportional to the input voltage and is linear
from ~ 10% to the maximum output voltage. Output ripple is low. Floating output enables the user to choose
either positive or negative drive. And, it is short circuit
and reverse polarity protected.
BOOSTER SPECIFICATIONS
Input Voltage:
Input Current:
Output Voltage:
Output Current:
Load Regulation:
Ripple:
Insulation Resistance:
Weight:
Temperature Range:
.125
(3.2)
.80
(20.3)
_
+
.60
(15.2)
IN
OUT
_
.325
(8.3)
1.25
(31.8)
1.00
(25.4)
+
.125
(3.2)
1.25 (31.7)
ad
300
Bottom View
No
Output Voltage (VDC)
.04 (1.0)
Dia. Typical
0 - 12 VDC
85 mA Nominal
0 - 250 VDC Nominal
2 mA
5% (1/2 to full load)
< 0.5% p-p
3500 VDC
~1.5 oz
-20°C to +70°C
.55
(14.0)
Typical
.63
(1.6)
Max
Lo
250
ad
200
0K
Ω
Lo
12
150
100
Ω
0K
ad
Lo
5
50
0
0
1
2
3
4
5
6
7
8
9
10 11 12
Input Voltage (VDC)
ORDERING INFORMATION
Proportional Voltage Booster
CATALOG #3, 1998
PART NO.
EVB-304
8
PRICE
$299
ELECTRONICS
P IEZO S YSTEMS , I NC .
186 Massachusetts Avenue Cambridge, MA 02139 • Tel: (617) 547-1777 • Fax: (617) 354-2200 •
Web: www.piezo.com • E-mail: [email protected]
D C TO AC I N V E RT E R D R I V E C I R C U I T
DESCRIPTION
The inverter drive circuit converts a DC voltage input into
an oscillating AC output. The inverter circuit is provided
for driving low voltage (up to 56 Vp-p), low frequency
( 75 Hz - 400 Hz) resonant piezo devices such as fans,
choppers, and vibrators. The output frequency is adjusted
manually by turning the trimmer pot on the PCB.
Optimum tuning is accomplished by visual observation of
the device motion or inspection of the output waveform
on an oscilloscope during operation.
DRIVING PIEZO RESONATORS
12VDC Piezo Fan: The 12 VDC fan (see page 24) can be
bolted directly to the EIN-406. Two wires from terminal
“A” connect to the two solder dots on the piezo fan, and
the metal spacer bolts directly to terminal “B”.
INPUT / OUTPUT WAVEFORM
Piezo Resonant Element: The resonant blade element (see
page 25) may be driven using the EIN-406.
+
Input
Voltage
(VDC) 0
Piezo Chopper. The piezo chopper (see page 26) may be
driven using the EIN-405.
+
Piezo Benders: Bending elements (see pages 32 - 37) may
be driven at resonance using the appropriate inverter
Circuit.
.125
(3.2)
Time
Output
Voltage 0
(±Vpeak)
-
1.25 (31.8)
Time
+12
60
1.50
(38.1)
B
B
Output Voltage (Vpeak-peak)
1.00
(25.4)
A
A
#2-56 tapped
2 plcs.
GND
INVERTER SPECIFICATIONS
Input Voltage Range
Output Voltage Range
Frequency Range
Temperature Range
VDC
Vp-p
Hz
°C
EIN-405
EIN-406
3 - 30
0 - 56
50 - 200
0 -60
3 - 30
0 - 56
150 - 400
0 - 60
50
40
30
20
10
0
0
5
10
15
20
25
30
Input Voltage (VDC)
ORDERING INFORMATION
Inverter Drive Circuit ( 75 Hz - 200 Hz)
Inverter Drive Circuit (150 Hz - 400 Hz)
PART NO.
EIN-405
EIN-406
9
PRICE
$129
$129
CATALOG #3, 1998
MOTION
INSTRUMENTS
P IEZO S YSTEMS , I NC .
186 Massachusetts Avenue Cambridge, MA 02139 • Tel: (617) 547-1777 • Fax: (617) 354-2200 •
Web: www.piezo.com • E-mail: [email protected]
H E A V Y D U T Y P I E Z O V I B R AT I O N TA B L E
L O W V O LTA G E ,
L A R G E L O A D C A PA C I T Y & N O N - MAGNETIC
DESCRIPTION
The heavy duty piezoelectric Vibration Table requires only
15 Vrms to deliver a peak to peak amplitude of 9 µM from
DC to 200 Hertz. The system consists of a low frequency vibration table and electronic driver.
The Vibration Table is driven by piezoelectric stacks located symmetrically about the outer diameter of the table
top. Piezoelectric stacks provide a means of generating
oscillations electrostatically rather than magnetically. A
spring-plate assembly provides stack compression, torsional resistance, and moment compensation.
Both english and metric bolt patterns are available. The
base plate bolts to ground using 1/4" (or M6) hardware
on 6" (or 150 mm) centers. A load up to 150 lbs. may be
bolted to the table top using the 1/4-28 UNF (or M6)
tapped holes located on the 1.0" (or 25 mm) centers.
#1/4-20 or M6 Clr. hole
on a 6.0" (or 150 mm) BCD
45° apart, 8 plcs.
NOTE: The shake table can be driven statically from 0 to
+100 VDC and achieve a motion range of 0 to + 30µm.
#1/4-28 or M6 tapped hole
on a 2.0" (50 mm) BCD
90° apart, 4 plcs.
plus center
DRIVER
The Vibration Table Driver accepts 0 to ±10 Vp input signals from a frequency generator, computer, or feedback
network and delivers 0 to 15 Vrms to the Vibration Table,
allowing the operator to scan through an operating frequency range from 0 to 200 Hz.
1.00
(or 25)
Since the stack motors cannot tolerate appreciable voltage in the antipoling direction, the electronic package provides both an AC drive voltage and a DC bias voltage. The
bias voltage superimposes a positive DC voltage greater
than the peak negative swing introduced during maximum
AC operation.
3.00
(75)
3.5
(88.9)
The driver protects the table from excessive voltage, current, and frequency.
3.4
(86)
FEATURES
■
1.0
(25.4)
■
■
■
6.5
(165)
ORDERING INFORMATION
Piezo Vibration Table (English version)
Piezo Vibration Table (Metric version)
Vibration Table Electronic Driver
CATALOG #3, 1998
No magnetic field generation.
All non-magnetic materials
Safe operating voltage, 15 Vrms
High load capacity
PART NO.
IVB1-003-E
IVB1-003-M
IVB1-003-C01
10
PRICE
$4,500
$4,500
$3,250
MOTION
INSTRUMENTS
SPECIFICATIONS
PIEZO VIBRATION TABLE
DIMENSIONS
Dimensions (H x OD)
inches
mm
inches
mm
N
English
Metric
English
Metric
Table Top Diameter
Weight
Mounting, Base Plate
Mounting, Table Top
3.43 x Ø 6.50
87 x Ø 165
Ø 3.00
Ø 76
22
1/4 clearance holes on 6.0” BCD
M6 clearance holes on 150mm BCD
1/4-28 tapped holes, 1.0” centers, 9 places
M6 tapped holes, 50mm centers, 9 places
ELECTRICAL
Rated Input Voltage (at 200 Hz with 30 VDC bias voltage applied)
Vrms
15
Input Capacitance
Farad
45 x 10-6
Bleed Resistance
Ω
10K
Power Cable
RG 174/U, 10 Feet (3 m), 4 pin connector
THERMAL
Operating Temperature Range
Storage Temperature Range
°C
°C
10 to 40
0 to 50
µm peak
±4.5
µm peak
Hz
N
N
0 - 28
0 - 200
660
4,400
PERFORMANCE
Dynamic Deflection
(150 lb. load, 200 Hz, 15Vrms)
Static Deflection
(150 lb. load, 0 Hz, 0 - 100VDC)
Frequency Range
Rated Load
Maximum Compressive Load
VIBRATION TABLE ELECTRONIC DRIVER
115VAC, 60 Hz or 230VAC, 50/60Hz
INPUT POWER SOURCE
DIMENSIONS
Inches
12 x 12 x 5
mm
305 x 305 x 127
Vp
± 10
VDC
Vrms
Arms
Hz
30
0-15
1.25
DC - 200
INPUT SIGNAL
Maximum Input Voltage
OUTPUT SIGNAL
DC Offset Voltage
AC Drive Voltage
Output Current
Frequency Range
Output terminal protected from back EMF.
Power amplifier thermally protected.
Input voltage and current protection
Frequency protection.
PROTECTION
11
CATALOG #3, 1998
MOTION
INSTRUMENTS
P IEZO S YSTEMS , I NC .
186 Massachusetts Avenue Cambridge, MA 02139 • Tel: (617) 547-1777 • Fax: (617) 354-2200 •
Web: www.piezo.com • E-mail: [email protected]
2-AXIS LINEAR POSITIONER, ± 200 µm
DESCRIPTION
The piezoelectric 2-axis linear positioner is a low frequency device designed for delicate manipulations of relatively light loads. The piezoelectric motors are configured
to provide linear motion along the x and y axis without
rotation and shortening commonly associated with standard cantilever devices. The design leads to higher displacements than normally associated with piezoelectric
devices, while delivering the fine resolution generally
sought. The positioner produces displacements of ± 200
µm with no time lag, vibration, or backlash. When used
under a microscope, voltage may be reversed to compensate for inverted optics. The motors produce no magnetic fields and are clean room compatible.
The positioner may be electronically driven with the EPA102 Piezo Amplifier . Two hole patterns are available for
mounting: 1/4-20 on 1 inch centers or M6-1.0 on 25 mm
centers.
1/4-20 or M6
Clearance Hole
6 Plcs.
1/4-20 or M6
Tapped Hole
4 Plcs.
2.0 or
(50.8)
Custom Configurations: Other piezo linear positioner
features are available in custom configurations, including:
single axis, higher and lower motions, totally non-magnetic constructions, and custom sizes.
1.25 or
(31.8)
.50 or
(12.5)
APPLICATIONS
■
.50 or
(12.5)
■
1.50 or
(37.5)
■
■
■
(46.3)
1.82
Scientific Research: Invitro fertilization
Biology: Micro dissection, Gene splicing
Precision Engineering: Robotics
Electronics: Microchip circuitry testing
Microscopy: Slide manipulation
(6.4)
.25
1.29
(32.8)
2.0
(50.8)
.25
(6.4)
3.5
(88.9)
Scale: x1/2
ORDERING INFORMATION
PART NO.
PRICE
2-Axis Linear Positioner (1/4-20 on 1 inch centers)
2-Axis Linear Positioner (M6-1.0 on 25mm centers)
ILN2-001-E
ILN2-001-M
$2,499
$2,499
CATALOG #3, 1998
12
MOTION
INSTRUMENTS
SPECIFICATIONS
2 - AXIS LINEAR POSITIONER, ±200 µm
MECHANICAL
Dimensions (L x W x H)
Weight
(without platform)
(with platform)
Mounting
Inches
mm
grams
grams
English
Metric
3.5 x 2.0 x 1.5
89 x 51 x 46
140
175
1/4-20 clr. holes on 3” centers, 6 plcs.
M6 clr. holes on 75mm centers, 6 plcs.
Vp
nF
± 180
35
2.1 meters (7 feet)
6 Pin, RJ12 Modular Plug
°C
°C
10 - 60
0 - 70
µm
nm
grams
Hz
± 200
25
50
DC - 10
ELECTRICAL
Rated Input Voltage
Capacitance / Channel
Input Cable
Input Connector
THERMAL
Operating Temperature Range
Storage Temperature Range
PERFORMANCE
Free Deflection @ ± 180 Vp
Resolution
Load Capacity
Frequency Range (No load)
13
CATALOG #3, 1998
MOTION
INSTRUMENTS
P IEZO S YSTEMS , I NC .
186 Massachusetts Avenue Cambridge, MA 02139 • Tel: (617) 547-1777 • Fax: (617) 354-2200 •
Web: www.piezo.com • E-mail: [email protected]
2-AXIS LINEAR POSITIONER, ± 1µm
DESCRIPTION
The 2-Axis Linear Positioner is a solid state high frequency device designed for optical fiber alignment or general
micropositioning. The power take-off block is driven by
piezoelectric motors configured to provide linear motion
along the x and y axes. The positioner delivers extremely
fine displacements (in the nm range) by adjusting the
applied voltage. The piezoelectric motors produce no
contamination or magnetic fields and show no wear over
time.
The positioner can be mounted to ground using mounting
holes on the bottom or sides. Power take-off can be
accessed from the top or side. A power cable exits from
the rear edge.
The positioner may be electronically driven with the EPA102 Piezo Amplifier.
.01 (.25)
#4-40 Tapped
0.2" Deep, 4 Plcs.
1.24
(31.5)
1.375
(34.9)
#4-40 Tapped
0.3" Deep
One side, 4 plcs.
2.20
(55.9)
Wire
Exit
.38
(9.5)
.95 (24.1)
1.00
(25.4)
.50
(12.7)
.225
(5.7)
.50
(12.7)
Axis-1
1.25
(31.8)
.25
(6.4)
Custom Configurations: Other piezo linear positioner
features are available in custom configurations, including:
single axis, higher and lower motions, totally non-magnetic constructions, custom sizes and hole patterns.
.50 (12.7)
.90 (22.9)
Axis-2
1.48
(37.6)
#4-40 Tapped
0.3" Deep
Both sides, 6 Plcs.
1.75 (44.5)
.25 (6.4)
#4-40 Tapped
0.3" Deep, 2 Plcs.
.95
(24.1)
.475
(12.1)
.75
(19.1)
.75
(19.1)
2.50 (63.5)
ORDERING INFORMATION
PART NO.
PRICE
2-Axis Linear Positioner, ±1µm (English Version)
ILN2-002-E
$2,999
CATALOG #3, 1998
14
MOTION
INSTRUMENTS
SPECIFICATIONS
2 - AXIS LINEAR POSITIONER, ± 1µm
MECHANICAL
Dimensions (L x W x H)
Weight
Inches (mm)
grams
2.5 x 1.0 x 2.2
153
Vp
nF
MΩ
± 70
82
10
°C
°C
10-40 °C
0 - 50 °C
µm
µm
nm
Hz
grams
±1
±1
±1
5,000
200
(63.5 x 24.1 x 55.9)
ELECTRICAL
Rated Input Voltage
Input Capacitance (per axis)
Input Resistance (per axis)
ENVIRONMENTAL
Operating Temperature
Storage Temperature Range
PERFORMANCE
Motion (X Direction)
Motion (Z Direction)
Resolution
Frequency Limit (no load)
Load Capacity
15
CATALOG #3, 1998
MOTION
INSTRUMENTS
P IEZO S YSTEMS , I NC .
186 Massachusetts Avenue Cambridge, MA 02139 • Tel: (617) 547-1777 • Fax: (617) 354-2200 •
Web: www.piezo.com • E-mail: [email protected]
1 - A X I S M I R R O R T I LT E R , ± 0 . 7 5 °
DESCRIPTION
The piezoelectric 1-Axis Mirror Tilter is a high frequency
device designed to produce angular motion at high speed
and low power. Because of its small size, this device is
capable of being directly bolted to a gimbal mount and
replaces bulky galvanometer systems. The piezoelectric
motors provide reasonable displacement while delivering
the fine resolution associated with piezoelectric devices.
The motors produce no magnetic fields and are clean
room compatible.
A 5mm x 5mm x 1mm crown glass mirror with a protective gold coating is directly attached to the motor assembly. The tilter may be electronically driven using the EPA102 Piezo Linear Amplifier .Two hole patterns are available
for mounting: 1/4-20 on 1 inch centers, or M6-1.0 on 25
mm centers.
Custom Tilter Configurations: Other piezo single axis
tilter features are available in custom configurations,
including: different angles and frequencies, custom mirror
attachment, high temperature operation (up to 150°C),
low temperature / low vacuum operation, totally nonmagnetic constructions, and custom sizes.
Mirror
5mm Sq.
.38
(9.7)
± Angle
.43
(10.9)
.50
(12.7)
.50 or
(12.9)
1.00 or
(25)
.50 or
(12.9)
.25 or
(6.5)
1.00
(25.4)
#1/4-20 or M6 Tapped
3/8 (9.5) deep, 4 plcs.
.50 or
(12.5)
ORDERING INFORMATION
PART NO.
1 pc.
5 pc.
25 pc.
100 pc.
1 - Axis Mirror Tilter (English version)
1 - Axis Mirror Tilter (Metric version)
ΙAG1-004-E
ΙAG1-004-M
$2,000
$2,000
$1,250
$1,250
$750
$750
$400
$400
CATALOG #3, 1998
16
MOTION
INSTRUMENTS
SPECIFICATIONS
1- AXIS PIEZOELECTRIC MIRROR TILTER, ±0.75°
MECHANICAL
Dimensions (L x W x H)
Inches
mm
2.0 x 1.0 x 0.5
50 x 25 x 12.5
Mirror
Material
Dimensions (L x W x T)
Flatness
Weight
Mounting
Grams
English
Metric
Crown Glass, Protective Gold Coating
5x5x1
3 l per 25 mm
30
#1/4-20 tapped holes, 4 places, .5” x 1.0”
M6 tapped holes, 4 places, 12.5mm x 25mm
V peak
nF
±180
22
Degrees
Hz
Hz
°C
°C
± .72
0 - 1,500
2,200
-20 to 60
-30 to 70
mm
ELECTRICAL
Maximum Input Voltage (Vp)
Capacitance
PERFORMANCE
Angular Range (@ ± 180 Vp)
Broadband Operating Range
Resonant Frequency
Thermal Operating Range
Thermal Storage Range
Angle versus Voltage
Amplitude versus Frequency
0.8
.7
0.7
.6
Angle (Relative Amplitude)
± Angle (Degrees)
0.6
0.5
0.4
0.3
.5
.4
.3
.2
0.2
.1
0.1
0
0
20
40
60
80
100
120
0
140
0
1
2
3
Frequency (KHz)
Voltage (Vrms)
17
CATALOG #3, 1998
MOTION
INSTRUMENTS
P IEZO S YSTEMS , I NC .
186 Massachusetts Avenue Cambridge, MA 02139 • Tel: (617) 547-1777 • Fax: (617) 354-2200 •
Web: www.piezo.com • E-mail: [email protected]
2 - A X I S M I R R O R T I LT E R , ± 1 . 5 °
U LT R A T H I N P R O F I L E
DESCRIPTION
The piezoelectric 2-axis mirror tilter is a low profile
device designed for insertion between closely spaced
components in an optical path. It may be used for either
reflective or refractive optical elements. The tilter delivers precise angular motions for dynamic beam steering,
adjustment, or stabilization. Large angular deflections ≥
±25 milliradians and resolution better than 5 µradians are
obtained. Mirror elements may be provided separately for
individual application needs.
Drive Electronics: Each axis my be driven using the EPA102 linear amplifier described on page 4 and 5.
Custom Tilter Configurations: Other piezo double axis
tilter features are available in custom configurations,
including: different angles and frequencies, mirror attachments, high temperature operation (up to 150°C), low
temperature / low vacuum operation, non-magnetic, and
custom sizes.
Axis-1
1.50
(38.1)
1.41
(35.9)
Axis-2
Mirror Diameter
.984 (25.0)
Mirror Diameter
.984 (25.0)
1.414
(35.9)
1.50
(38.1)
.10
(2.5)
3.50 (88.9) Square
.06
(1.6)
ORDERING INFORMATION
PART NO.
1 pc.
5 pc.
25 pc.
100 pc.
2 - Axis Mirror Tilter (English version)
2 - Axis Mirror Tilter (Metric version)
IAG2-005-E
IAG2-005-M
$2,999
$2,999
$1,999
$1,999
$999
$999
$599
$599
CATALOG #3, 1998
18
MOTION
INSTRUMENTS
SPECIFICATIONS
2 - AXIS PIEZOELECTRIC MIRROR TILTER, ±1.5°
MECHANICAL
Dimensions (L x W x H)
Round Flat Mirror
Material
Dimensions (Dia. x T)
Flatness
Weight
Mounting
inches
3.5 x 3.5 x .090
(89 x 89 x 2.3)
grams
English
Metric
Crown Glass, Aluminum Coating
Ø.984 x .039 (Ø25.0 x 1.0)
3 λ per 25 mm
28
#1/4-20 Clr holes on 3” centers (and 4”)
M6 Clr holes on 75mm centers (and 100mm)
Vp
nF
± 180
35
°C
°C
-20 to +60
-30 to +70
degrees
radians
µradians
Hz
Hz
± 1.5
± .026
± 25
0 - 200
~400
inches
ELECTRICAL
Rated Input Voltage (Vp)
Capacitance (per axis)
ENVIRONMENTAL
Thermal Operating Range
Thermal Storage Range
PERFORMANCE
Angular Range (@ ± 180 Vp)
Resolution
Broadband Operating Range
Resonant Frequency
±Angle versus Voltage
Amplitude versus Frequency
1.75
2.00
1.75
1.50
Input Frequency = 100 Hz
Input Voltage = 2 Vrms
1.25
± Angle (Degrees)
± Angle (Degrees)
1.50
1.25
1.00
0.75
1.00
.75
.50
0.50
.25
0.25
0
0
20
40
60
80
100
120
0
140
0
100
200
300
400
500
Frequency (Hz)
Voltage (Vrms)
19
CATALOG #3, 1998
MOTION
INSTRUMENTS
P IEZO S YSTEMS , I NC .
186 Massachusetts Avenue Cambridge, MA 02139 • Tel: (617) 547-1777 • Fax: (617) 354-2200 •
Web: www.piezo.com • E-mail: [email protected]
U LT R A S O N I C R O TA R Y M O T O R
DESCRIPTION
Phased excitation of a piezoelectric ring produces progressive elastic oscillations (travelling waves) along its surface. This wave induces rotational motion to the rotor
pressed against it. When excitation is stopped, the shaft
is held in place by friction force. By reversing electrical
excitation, the rotor turns in the opposite direction.
Unique features of the ultrasonic motor are: compact
size, low rpm without the need for gear reduction, quick
response, quiet operation, holding torque greater than
driving torque, and lack of magnetic field generation.
The ultrasonic motor / electronic driver require a ±24
VDC power supply, switches and wiring.
ULTRASONIC MOTOR KIT
The ultrasonic motor kit is intended primarily as a convenient demonstration device. It consists of an ultrasonic
motor mounted to a stand, an electronic driver, and a
controller. The controller houses the electronic driver,
power supply, on-off switching, direction switch, and
speed control.
0.98
(25)
.27
(6.9)
.63
(16)
.55
(14)
.31
(8)
.08
(2.0)
M2 tapped mounting
hole, .551" (14) BCD
4 plcs., 90° Apart
.02
(0.5)
Ø1.19
(Ø 30.3)
MOTOR PERFORMANCE
Ø1.13
(Ø 28.7)
Motor Speed versus Output Torque
Ø.16
(Ø4)
.98
(25)
Ø.43
(Ø11)
4 - Ø .031
(4 - Ø 0.8)
Speed (rpm)
300
3 - 0.98 pitch
(3 - 2.5 pitch)
.47
(12)
200
Continuous
Operating Range
Short-time
Operating Range
(during acceleration
& deceleration
100
0
0.05
Torque (N-m)
0
ORDERING INFORMATION
Ultrasonic Motor
Electronic Driver Circuit
Ultrasonic Motor Kit
CATALOG #3, 1998
PART NO.
RU30-001
RU30-001-C01
RU30K-001
20
1 pc.
$499
$349
$1,499
5 pc.
$399
$249
25 pc.
$329
$179
0.10
100 pc.
$249
$99
MOTION
INSTRUMENTS
SPECIFICATIONS
ULTRASONIC MOTOR & DRIVER
MOTOR
Motor Size
Shaft Size
Mounting Holes
Rated Torque
Holding Torque
30.3 mm Dia., 11 mm Thick,
4 mm Dia., 14 mm Long
M2-3 on a 14 mm BCD, 90° Apart
0.05 Nm
0.1 Nm
Response (no load)
Starting Response Ttime
Stopping Response Time
Direction Reversl Response Time
Direction of Rotation
Continuous Operation
Steady State Operating Range
No Load
0.05 Nm
Transient Operating Range
0.1 Nm
Operating Temperature Range
Allowable Temperature Rise
Storage Temperature Range
Humidity
Weight
30 - 150 rpm
-10 to 55 °C
65° C at stator surface
-20 - 80°C
≤ 75%
20 grams
Required Input Power
Driver Output
Operating Temperature Range
Storage Temperature Range
Size
Weight
24 VDC, 0.7 Amps
110 VAC, 2 Phase, ~50 Khz
-10 - 55 °C
-20 - 80°C
71mm x 56mm x 22mm
240 gram
~ 50 ms
~ 1 ms
~ 10 ms
CW, CCW
2,000 Hrs.
30 - 300 rpm
30 - 250 rpm
DRIVER
CONTROLLER (Kit only)
Required Input Power
Driver Output
Power Switch
Start / Stop Control
Speed control
Operating Temperature Range
Storage Temperature Range
115 VAC, 60 Hz
24 VDC, 0.7 Amps
On / Off
CW, OFF, CCW
Variable, B10KΩ , 0.1W potentiometer
-10 - 55 °C
-20 - 80°C
21
CATALOG #3, 1998
ACOUSTICS
P IEZO S YSTEMS , I NC .
186 Massachusetts Avenue Cambridge, MA 02139 • Tel: (617) 547-1777 • Fax: (617) 354-2200 •
Web: www.piezo.com • E-mail: [email protected]
LIGHTWEIGHT ACOUSTIC SOURCE
DESCRIPTION
The Lightweight Acoustic Source is a rugged, high output,
low mass acoustic source. It is a ceramic-metal composite structure. Unlike conventional speakers, it has no fragile cone or moving coils.
The front face of the ABS mounting ring allows attachment
and electrical isolation from the structure to which it is
mounted. Twelve #6-32 tapped metal inserts located 30°
apart on a 4.15” bolt circle are provided for this purpose.
FEATURES
Useful output band of one octave starting at 1 KHz.
■
30°
■ Precision manufacturing method ensures close phase
response matching from one unit to the next for large
array noise cancellation experiments.
#6-32 Tapped
mounting holes on a
4.15" (105.4) BCD.
0.45" (11.4) deep.
30° apart. 12 plcs.
Shallow mechanical envelope for tight spaces.
■
■ Light weight and rigid metal diaphragm makes the
acoustic source impervious to air buffeting and frame
vibrations that compromise plastic and paper cone
speaker outputs.
■ Exposure to repetitive high “G” forces will not
change speaker properties or shorten life.
Ø4.40
(111.8)
1.12
(28.4)
■ Plastic ring mount electrically isolates piezo actuator
from mechanical ground, giving flexibility and safety to
electronic drive schemes.
1.25
(31.8)
■ Can be driven with Piezo Systems’ small light weight
switching amplifier (2 lbs).
Custom Acoustic Source Configurations: Other Acoustic
Source features are available in custom configurations,
including: different sound levels and frequencies, high
temperature operation (up to 150°C), low temperature
/ low vacuum operation, non-magnetic, and custom
sizes.
APPLICATIONS
■
■
■
■
Noise Cancellation
High Intensity Sound Experimentation
High “G” Environment Acoustic Experimentation
Warning Speaker
ORDERING INFORMATION
PART NO.
1 pc.
5 pc.
25 pc.
Piezoelectric Lightweight Acoustic Source
DAS-001
$799
$499
$299
CATALOG #3, 1998
22
100 pc.
$199
ACOUSTICS
SPECIFICATIONS
LIGHTWEIGHT ACOUSTIC SOURCE
MECHANICAL
Dimensions
Dia. x Thickness
Weight
Mounting
inches (mm)
grams
4.50 x 1.25 (114 x 32)
241
#4-40 screws, front mounted
12 places, 30° apart
Vp
nF
±100
132
°C
°C
0 to +70
-10 to +70
dB
See graph below
125 (70 Vrms, 6 inches from source)
ELECTRICAL
Rated Input Voltage
Capacitance
ENVIRONMENTAL
Thermal Operating Range
Thermal Storage Range
PERFORMANCE
Operating Frequency Range
Nominal Output, SPL
120
10 Vrms
6" from source, on axis
Sound Pressure Level (dB)
110
100
90
80
70
0.8
1.0
1.2
1.4
1.6
1.8
2.0
2.2
2.4
2.6
Frequency (KHz)
23
CATALOG #3, 1998
FANS &
RESONATORS
P IEZO S YSTEMS , I NC .
186 Massachusetts Avenue Cambridge, MA 02139 • Tel: (617) 547-1777 • Fax: (617) 354-2200 •
P I E Z O FA N B L A D E ,
Web: www.piezo.com • E-mail: [email protected]
115 V / 60 HZ
VERSION
DESCRIPTION OF PIEZO FAN
Piezo fans are solid state devices without wearing parts.
Their oscillating mylar blade is driven at resonance by a
piezo bending element. In free air, high amplitude resonant
vibration of the plastic blade causes formation of high
velocity unidirectional flow stream. Maximum airflow
occurs on axes of the fan’s centerline, relative to both
width and height dimensions. Air intake is above and
below the swept out plane of the blade. Its’ simple design
lends itself to low cost in high volume production.
Piezo fans offer advantages over conventional fan technology. These include: instant starting with no power surge,
making them especially desirable for spot cooling; ultralight weight; thin profile; and extremely low magnetic permeability. They produce almost no heat dissipation making them ideal for sealed enclosures. The 115 V / 60 Hz
version piezo fan requires no drive circuit and can be driven directly off the power bus.
Airflow
.50
(12.7)
Blade Swing
1.0
(25.4)
Custom Piezo Fan Configurations: Other piezo fan
features are available in custom configurations, including:
different flow rates and sizes, high temperature operation
(up to 150°C), low temperature / low vacuum operation,
totally non-magnetic versions, DC operation, flowthrough, and water-proof configurations.
2.52
(64.0)
3.02
(76.7)
#2-56 Clr.
2 plcs.
.25
(6.4)
FAN SPECIFICATIONS
Input Voltage:
Capacitance:
Power Consumption
Volume Flow Rate:
Peak Air Velocity:
Weight:
Mounting :
Temperature Range:
EMI / RFI:
.312
(7.9)
.085
(2.2)
Wires, 6" (152)
ORDERING INFORMATION
Piezo Fan Blade, 115 V / 60 Hz
CATALOG #3, 1998
PART NO.
RFN1-005
24
1 pc.
$149
115 VAC, 60 Hz
15 nF
30 mW
2 CFM, (0.9 l/s)
400 FPM, (2.0 m/s)
2.8 grams
#2-56 clr. holes, 2 places
-20° C to 70° C
None
5 pc.
$79
25 pc.
$49
100 pc.
$34
FANS &
RESONATORS
P IEZO S YSTEMS , I NC .
186 Massachusetts Avenue Cambridge, MA 02139 • Tel: (617) 547-1777 • Fax: (617) 354-2200 •
Web: www.piezo.com • E-mail: [email protected]
PIEZOELECTRIC RESONANT BLADE ELEMENT
DESCRIPTION OF RESONATOR
The piezoelectric resonant blade element can be used as
a single fan blade, a vibration source, a chopper, or modulator.
The resonant element is easy to use and install. Its low
profile, small size, low power consumption, low EMI, and
thermal operating range make it possible to install in
places forbidden to electro-magnetic devices.
The element resonates at approximately 185 Hz. Mass
may be added to the tip of the element. to increase amplitude and decrease resonant frequency, or, metal may be
trimmed from the tip to decrease amplitude and increase
resonant frequency. The elements are particularly useful
for establishing feasibility of a piezoelectric device for a
resonant application, such as a chopper.
PRINCIPLE OF OPERATION
The piezoelectric resonant element is powered electrostatically rather than magnetically. The metal portion of
the blade is driven at resonance by a piezoelectric bender
section at the base of the blade.
Custom Configurations: Other piezo resonator features
are available in custom configurations, including: different
amplitudes, frequencies, sizes , thermal operating ranges
(up to 150°C), low temperature / low vacuum operation,
and non-magnetic constructions.
SPECIFICATIONS
Performance measured while driving the resonant blade
element with Inverter Drive Circuit (PN: EIN-406).
Input Voltage (to Inverter):
Current:
Power Consumption:
Nominal Resonant Frequency:
Tip Amplitude (p-p):
Weight:
Mounting :
Temperature Range:
1.75
(44.5)
.50
(12.7)
.375
(9.5)
.75
(19.1)
1.50
(38.1)
.125
(3.2)
30 V
5.1 mA
153 mW
185 Hz
.2 inches
3.8 grams
#2-56 clr. holes
-40° C to 70° C
INVERTER DRIVE CIRCUIT
The resonant blade element requires an oscillating drive
signal matched to the resonant frequency of the blade.
This may be provided by a frequency generator / amplifier
or inverter circuit. Piezo Systems provides a simple
inverter circuit (PN: EIN-406 described on page 9).
Output frequency of the inverter is adjusted manually by
turning a trim pot on the PCB.
.075
(1.9)
#4-40 CLR
hole, 2 plcs.
RESONATOR EVALUATION KIT
The resonator evaluation kit includes one piezoelectric
resonant element and one inverter drive circuit.
ORDERING INFORMATION
Piezoelectric Resonant Blade Element
Piezoelectric Resonant Blade Evaluation Kit
PART NO.
RBL1-006
RBL1K-006
25
1 pc.
$149
$250
5 pc.
$99
25 pc.
$60
100 pc.
$35
CATALOG #3, 1998
FANS &
RESONATORS
P IEZO S YSTEMS , I NC .
186 Massachusetts Avenue Cambridge, MA 02139 • Tel: (617) 547-1777 • Fax: (617) 354-2200 •
Web: www.piezo.com • E-mail: [email protected]
PIEZOELECTRIC CHOPPER
CHOPPER DESCRIPTION
The piezoelectric chopper is a resonant device which
moves a shutter attached to the front tip of its blade.
Piezoceramic on one side of the blade can be used for
excitation while the piezoceramic on the other side can
be used for drive circuit feedback.
Compared to electro-magnetically driven wheels and tuning forks, the piezo chopper is lightweight, small, produces no EMI, operates over a wide temperature range,
low power, reliable, and cost effective.
Custom Configurations: Other piezo chopper features
are available in custom configurations, including: different
amplitudes and frequencies, high temperature operation
(up to 150°C), low temperature / low vacuum operation,
and non-magnetic constructions, and two bladed (tuning
fork configurations.
PRINCIPLE OF OPERATION
Piezoelectric choppers are powered electrostatically
rather than magnetically. The oscillating blade and shutter
is driven by a piezoelectric bending element operating at
resonance.
Drive Voltage:
60 Vp-p
Nominal Resonant Frequency:
100 Hz
Shutter Amplitude:
.42 Inches p-p
Feedback Voltage:
20 Vp-p
Weight:
4.8 grams
Mounting Holes:
#2-56 tapped holes, 3 plcs.
Temperature Range:
0° to 60° C
.66
(16.8)
.25
(6.4)
Shutter
Resonator
Mount
.130
(3.3)
#2-56 Tapped
3 plcs.
Shutter Displacement (Inches p-p)
.50
(12.7)
SPECIFICATIONS
.235
(6.0)
.25
(6.4)
.375
(9.5)
.125
(3.2)
.550
(14.0)
.125
(3.2)
2.52 (64.0)
0.5
0.4
0.3
0.2
0.1
INVERTER DRIVE CIRCUIT
0
0
When being driven sinusoidally, the 100 Hz piezo chopper requires an oscillating drive signal matched to the resonant frequency of the blade. This may be provided by a
frequency generator/amplifier or inverter circuit. Piezo
Systems provides a simple inverter circuit (PN: EIN-405
described on page 9). Output frequency is adjusted manually by turning a trim pot on the PCB.
ORDERING INFORMATION
Piezo Chopper
Piezo Chopper Evaluation Kit
CATALOG #3, 1998
10
20
30
40
50
60
Drive Voltage (Vp-p)
CHOPPER EVALUATION KIT
The evaluation kit includes a 100 Hz piezo chopper and an
inverter drive circuit.
PART NO.
RCH1-005
RCH1K-005
26
1 pc.
$249
$350
5 pc.
$199
25 pc.
$59
100 pc.
$39
DESIGN AND
PROTOTYPING
P IEZO S YSTEMS , I NC .
186 Massachusetts Avenue Cambridge, MA 02139 • Tel: (617) 547-1777 • Fax: (617) 354-2200 •
Web: www.piezo.com • E-mail: [email protected]
P I E Z O E L E C T R I C M O T O R / A C T U AT O R K I T
DESCRIPTION
The motor actuator kit is designed as a development tool
for those who wish to quickly verify the feasibility of a
piezoelectric approach to an idea or application. The
piezoelectric materials provided in this kit represent some
of the basic building blocks employed in constructing
bending motors, extension motors, and stack motors.
Emphasis is placed on designing and building bending actuators. Because the piezoelectric effect is reversible, the
same elements are used as sensors and generators. PSI5A-S4-ENH piezoceramic was chosen for the kit because
it offers the fewest voltage, temperature, and stress
restrictions. It is, by far, the most commonly used piezoceramic in the industry.
The manual is intended to help the user model, fabricate,
and test a prototype actuator as rapidly as possible. Quick
and simple techniques for cutting piezoceramic elements
to desired size are described, as well as, attaching leads to
the electrodes. Equations for free deflection, block force ,
resonant frequency, maximum stress, and capacitance
allow the user to scale experimental results to many actuator designs.
PIEZO MOTOR APPLICATIONS
■
■
■
■
■
Micro actuators and manipulators for optical, robotic,
fluidic, biomedical, electronic, and process engineering.
Vibrating shutters and dithering devices.
Acoustics and ultrasonics.
Micro-pumps for process control and medical instrumentation.
Small size, light weight, low power, solid state, actuators of all types for aerospace and battery powered
devices.
THE KIT INCLUDES
■
■
■
■
ORDERING INFORMATION
Piezoelectric Motor/Actuator Kit
Piezoceramic Single Sheets; PSI-5A-S4-ENH
2 pieces: 1.25" x 2.5" x .0075"
2– Layer Standard Brass Piezo Motor Elements
Poled for series operation
1 piece: 2.50" x 1.250" x .020"
1 piece: 1.25" x 0.500" x .020"
1 piece: 1.25" x 0.250" x .020"
1 piece: 1.25" x 0.125" x .020"
Poled for parallel operation
1 piece: 2.50" x 1.250" x .020"
1 piece: 1.25" x 0.500" x .020"
1 piece: 1.25" x 0.250" x .020"
1 piece: 1.25" x 0.125" x .020"
Piezoelectric Motor/Actuator Manual
Introduction to Piezoelectricity
Designing Piezoelectric Actuators
Building Piezoelectric Actuators
Wires, Solder and Flux
PART NO.
KMA--005
27
PRICE
$499
CATALOG #3, 1998
DESIGN AND
PROTOTYPING
P IEZO S YSTEMS , I NC .
186 Massachusetts Avenue Cambridge, MA 02139 • Tel: (617) 547-1777 • Fax: (617) 354-2200 •
Web: www.piezo.com • E-mail: [email protected]
P I E Z O E L E C T R I C G E N E R AT O R / S E N S O R K I T
DESCRIPTION
The generator / sensor kit is designed as a development
tool for those who wish to quickly verify the feasibility of
a piezoelectric approach to an idea or application. The
piezoelectric materials provided in this kit represent some
of the basic building blocks employed in constructing
bending generators, extension generators, and stack generators. Because the piezoelectric effect is reversible, the
same elements are used as motors and actuators. PSI-5AS4-ENH piezoceramic was chosen for the kit because it
offers the fewest voltage, temperature, and stress restrictions. It is, by far, the most commonly used piezoceramic
in the industry.
The manual is intended to help the user model, fabricate,
and test a prototype generator as rapidly as possible. For
example, quick and simple techniques for cutting ceramic
elements to desired size are described. Equations for open
circuit voltage, closed circuit current , resonant frequency,
maximum stress, and capacitance allow the user to scale
experimental results to many actuator designs.
THE KIT INCLUDES
■
■
■
■
Piezoceramic Single Sheets; PSI-5A-S4-ENH
2 pieces: 1.25" x 2.5" x .0075"
2– Layer Standard Brass Piezo Motor Elements
Poled for series operation
1 piece: 2.50" x 1.250" x .020"
1 piece: 1.25" x 0.500" x .020"
1 piece: 1.25" x 0.250" x .020"
1 piece: 1.25" x 0.125" x .020"
Poled for parallel operation
1 piece: 2.50" x 1.250" x .020"
1 piece: 1.25" x 0.500" x .020"
1 piece: 1.25" x 0.250" x .020"
1 piece: 1.25" x 0.125" x .020"
Piezoelectric Generator / Sensor Manual
Introduction to Piezoelectricity
Designing Piezoelectric Generators
Building Piezoelectric Generators
Wires, Solder and Flux
PIEZO GENERATOR APPLICATIONS
■
■
■
■
■
ORDERING INFORMATION
Piezoelectric Generator/Sensor Kit
CATALOG #3, 1998
Self energized accelerometers
Activity & rate response sensors
Vibration control & damping
Dynamic strain instrumentation
Small size, light weight, self-power, solid state sensors
PART NO.
KGS-006
28
PRICE
$499
DESIGN AND
PROTOTYPING
P IEZO S YSTEMS , I NC .
186 Massachusetts Avenue Cambridge, MA 02139 • Tel: (617) 547-1777 • Fax: (617) 354-2200 •
Web: www.piezo.com • E-mail: [email protected]
P I E Z O D E S I G N A I D S O F T WA R E D I S K E T T E
DESCRIPTION
The Piezo Design Aid ( PDA ) is an iterative, text based,
tutorial diskette for your IBM PC or any IBM compatible
computer. It allows the user to rapidly complete numerous
feasibility computations of basic piezoelectric actuator and
generator applications.
The PDA is a complete seminar that teaches piezoelectric
theory and concepts. An expandable materials data base
and application modules allow you to estimate performance for many variations on 8 basic ”motor“ and ”generator“ designs . Each application module is a full display
calculator showing all formulae, inputs and outputs clearly:
■ Type in the piezo material of your choice. The program
looks up all relevant material coefficients and displays
them.
■ Type in design parameters in any units.
■ The program displays the results of the indicated formula acting on your inputs.
■ Compare the computed performance with your design
goals.
■ Edit any inputs to achieve design goals or observe
parameter trade-offs.
■ Save calculations for later retrieval.
The menu driven piezo tutorial includes:
■ Historical Perspective
■ Evolution of Piezoelectric Applications
■ Piezoceramic Materials
Properties
Fundamental Behavior
Manufacturing Processes
■ Introduction to Piezoceramic Design
Design Fundamentals
■ Thinking Piezo
Familiarity with Piezo Properties and
Behavior
■ Symbol Explanations
■ Application Modules
Stacks: Motors and Generators
Benders: Motors and Generators
Extenders: Motors and Generators
Strain Gauges
■ Glossary
■ Bibliography
PIEZO APPLICATION MODULE MENU
MODULE
1 • EXTENDER-MOTOR
2 • EXTENDER-GENERATOR
3 • BIMORPH-MOTOR
4 • BIMORPH-GENERATOR
5 • MONOMORPH-MOTOR
6 • STRAIN GAGE
7 • STACK-MOTOR
8 • STACK-GENERATOR
9 • RETRIEVE PREVIOUS
INTEREST AREAS
“MICRO” POSITIONERS, OPTICS ROBOTICS
FORCE SENSORS, PUSH-BUTTONS ROBOTICS
“MILLI” POSITIONERS, SHUTTERS
MOTION SENSORS, CMOS POWER SUPPLIES
“MILLI” POSITIONERS, SHUTTERS, NOISEMAKER
VIBRATION AND IMPACT SENSING
“MICRO” POSITIONERS, OPTICS
IMPACT TRIGGERED POWER SUPPLIES
DISPLAY A PREVIOUS CALCULATION
SELECT YOUR CHOICE AND PRESS <ENTER> OR
PRESS <ESC> TO EXIT
BIMORPH MOTOR
CALCULATIONS
TIP DEFLECTION (Y) @ NO LOAD
Y = 1.5*E*d31*L^2/t
=
(M)
FORCE (F) AGAINST RESTRAINT
F = 1.5*E*(d31/s11)*w*tc^2/L
=
(N)
RESONANT FREQUENCY (f)
f = .318*(rho*s11E)^–.5*t/L^2
=
(Hz)
SCREEN 2.3.3
INPUTS (DEFAULT UNITS: M K S)
MATERIAL =
L = (M) CANTILEVER LENGTH
W = (M), WIDTH
tc = (M) LAYER THICKNESS
E = (V/M) ELECTRIC FIELD
d31 =CHARGE COEFF (M^2/V)
s11E = COMPLIANCE (M^2/N)
rho = CERAMIC DENSITY (Kg/M^3)
PLEASE TYPE THE NAME OF THE MATERIAL
OR USE THE ARROW KEYS FOR SELECTION
ORDERING INFORMATION
1
SCREEN 2.0
1
Piezo Design Aid (5 /4” or 3 /2” media)
29
PART NO.
PRICE
KSF-002
$199
CATALOG #3, 1998
TRANSDUCER
ELEMENTS
P IEZO S YSTEMS , I NC .
186 Massachusetts Avenue Cambridge, MA 02139 • Tel: (617) 547-1777 • Fax: (617) 354-2200 •
Web: www.piezo.com • E-mail: [email protected]
L O W V O LTA G E P I E Z O E L E C T R I C S TA C K S
STACK PERFORMANCE
+ Force (Newtons)
4,000
3,000
TS
18
-H
5-
20
2
2,000
1,000
TS18
-H5-1
04
0
DESCRIPTION
0
2
4
6
8
10
12
14
16
+ Deflection (µm)
A low voltage piezoelectric stack is a monolithic ceramic
construction of many thin piezoceramic layers which are
connected in parallel electrically. The principal characteristics of the stack are: a high energy conversion efficiency,
low voltage operation, large force, low motion, fast
response, and no EMI.
TSI8-H5-104 & TSI8-H5-202
Displacement (µm)
15
Motion may be increased, at the expense of force, by
mechanical amplification. The stack offers a high energy
density in a small package. Due to its superior compressive strength, it provides a high load bearing capability.
However, it is relatively weak in tension.
Generally, excitation should be applied only in the direction of polarization.
10
5
0
0
Hysteresis is typically about 15% in static applications.
25
50
100
75
Voltage (VDC)
TSI8-H5-104
.71
(18)
.23 SQ.
(6) SQ.
.20 SQ.
(5) SQ.
Coating
Temperature Rise (°C)
80
.71
(18)
.44 SQ.
(11) SQ.
.39 SQ.
(10) SQ.
60
100 V
40
20
40 V
Coating
10
TS18-H5-104
TS18-H5-202
ORDERING INFORMATION
Low Voltage Piezoelectric Stack (small)
Low Voltage Piezoelectric Stack (large)
CATALOG #3, 1998
100
1000
Sine Wave Frequency (Hz)
PART NO.
TS18-H5-104
TS18-H5-202
30
1 pc.
$350
$499
5 pc.
$300
$425
25 pc.
$250
$350
100 pc.
$200
$275
SPECIFICATIONS
PIEZOELECTRIC STACKS
TS18-H5-104
TS18-H5-202
MECHANICAL
Dimensions (L x W x H)
Compressive Strength
Tensile Strength
Young’s Modulus
Poisson Ratio
Density
Weight
Wires
Inches
mm
N/m2
N/m2
N/m2
Kg/M3
Grams
0.2 x 0.2 x 0.72
0.4 x 0.4 x 0.72
5 x 5 x 18
10 x 10 x 18
8.8 x 108
8.8 x 108
4.9 x 106
4.9 x 106
4.4 x 1010
4.4 x 1010
0.34
0.34
7,900
7,900
4.5
16.
.002 x 50 Stranded, Red wire positive
ELECTRICAL
Rated Voltage (Positive Only)
Capacitance
nF
+100 VDC
1600
+100 VDC
6,500
µm
N
µs
+14.5
840
50
+14.5
3,388
50
°C
°C
%
-20° to +80°
-30° to +85°
< 50%
PERFORMANCE (@ =100 VDC)
Free Deflection
Blocked Force
Response Time
ENVIRONMENTAL
Thermal Operating Range
Thermal Storage Range
Humidity
31
CATALOG #3, 1998
TRANSDUCER
ELEMENTS
P IEZO S YSTEMS , I NC .
186 Massachusetts Avenue Cambridge, MA 02139 • Tel: (617) 547-1777 • Fax: (617) 354-2200 •
Web: www.piezo.com • E-mail: [email protected]
I N T R O D U C T I O N TO B E N D I N G T R A N S D U C E R S
BENDING MOTORS
BENDING GENERATORS
The piezoceramic bender is a versatile low power electromechanical transducer. As a motor, electrical excitation
(voltage and current) leads to a mechanical response
(motion and force).
As a generator (or sensor), mechanical excitation
(motion and force) leads to an electrical response (voltage and current).
When a piezoceramic bender is forced to flex, one layer
will be in tension while the other in compression. The
stresses in each layer will produce electrical outputs
which will simply be the summation of the outputs of each
layer.
The application of an electric field across the two layers of
a bender causes one layer to expand while the other contracts. The net result is a curvature much greater than the
length or thickness deformation of the individual layers.
A simple bender is actually a nine layer device consisting
of four electrode layers, two piezoceramic layers, two
adhesive layers, and a center shim. Crucial electromechanical properties of all individual sheets utilized for
bending motors (or generators) are monitored. Piezo
Systems proprietary bonding process leads to highstrength, uniform, void free laminations. Our advanced
cutting techniques produce actuators with dimensional
tolerances within ±.001 inch if necessary, widths as narrow as .020 inch, chip free edges, non-linear shapes, and
contamination free surfaces.
Benders may be used as strain gauges for easy and rapid
determination of the characteristics of dynamic strains in
structures. They exhibit extremely high sensitivities, in
the order of 50 times that of wire strain gauges and are
small enough that on most structures they will not materially affect the vibrational characteristics of the structure.
“SMART” DEVICES
Piezo devices are ideal for use as “smart” devices. That is,
part of the piezo volume is able to sense its surroundings
while the other portion is able to respond as necessary.
Each layer of a bender may be used for each purpose.
Piezo Systems provides design, engineering, and production capabilities to develop custom bimorph actuators
based on performance specifications rather than simple
part geometry.
CATALOG #3, 1998
32
TRANSDUCER
ELEMENTS
BENDING TRANSDUCER CHOICES
BENDING CONFIGURATIONS
PIEZOCERAMIC MATERIAL
The common bending configurations, piezoceramic materials, bender thicknesses, and methods of mounting are
shown below.
Typically PSI-5A piezoceramic is the first choice of most
designers. 5A is the most temperature insensitive and
offers the widest temperature range. PSI-5A achieves
motion similar to PSI-5H if higher voltage is available.
PSI-5H is recommended only when low voltage operation
is essential.
CANTILEVER CONFIGURATION
F
+
T
CENTER SHIM MATERIALS
∆X
Center shim materials are available for enhancing strength
(stainless steel), thermal range, non-magnetism (brass),
and economy (brass). Specially designed center shims
promote unique composite properties.
W
La
Standard Materials: PSI-5A type or PSI-5H type piezoceramic
Standard Thickness,T: .015” (.38 mm)
.020” (.50 mm),
.026” (.66 mm)
Characteristics: Right end moves along arc. Simplest to mount.
SERIES & PARALLEL OPERATION
Series operation refers to a bender with voltage applied
across both piezoceramic layers. It is a two wire device,
with one wire attached to each of the outside surfaces.
Parallel operation refers to a bender with voltage applied
across each piezoceramic layer individually. It is a three
wire device, with one wire attached to each of the outside
surfaces and a third wire attached to the center shim . For
the same motion, a bender polarized for series operation
requires twice as much voltage as a bender poled for parallel operation (see page 46). Polarization is depicted
graphically as an arrow pointing from the positive electrode to the negative electrode.
SIMPLE BEAM CONFIGURATION
+
F
W
T
∆X
La
To convert cantilever to simple beam performance:
Xf, Free Deflection = 1/4X cantilever motion
Fb, Blocked Force = 4X cantilever force
tr, Response Time ≈ 1/3X cantilever response
C, Capacitance
= same as cantilever capacitance
Characteristics: Center moves up and down.
NON-MAGNETIC
Totally non-magnetic piezo transducers are specially fabricated using non-magnetic electrode and center shim materials.
HIGH TEMPERATURE
“S” BEAM CONFIGURATION
T
+
High temperature piezo actuators are specially constructed to operate up to 150° C.
F
CRYOGENIC
∆X
Cryogenic piezo actuators are specially constructed to
operate below 4.2° C. Motor performance is reduced by
~1/5 at 77° K and ~1/7 at 4.2° K. However, much higher
voltages may be applied to the bender, thereby recovering
lost performance.
W
La
To convert cantilever to “S” beam performance:
Xf, Free Deflection = 1/2X cantilever motion
Fb, Blocked Force = 2X cantilever force
tr, Response Time ≈ 0.6X cantilever response
C, Capacitance
= same as cantilever capacitance
Characteristics: Right end moves ~ linearly.
VACUUM
Vacuum compatible piezo actuators are constructed to be
baked-out up to 150°C and have a low cross-section for
outgassing.
33
CATALOG #3, 1998
TRANSDUCER
ELEMENTS
P IEZO S YSTEMS , I NC .
186 Massachusetts Avenue Cambridge, MA 02139 • Phone: (617) 547-1777 • Fax: (617) 354-2200 • Web: www.piezo.com • E-mail: [email protected]
Q U I C K M O U N T B E N D I N G E L E M E N T,
±1300µM
VERSION
DESCRIPTION
The ±1300 µm version Quick Mount bending element
may be used as an actuator and / or sensor. It is ready to
be used immediately. The standard T220-A4-503 bending
element is wired for low voltage operation and the PCB to
which it has been mounted may be attached to mechanical
ground using the two #4-40 mounting holes provided. A
bleed resistor across the terminals protects the transducer from thermal transients. The user must provide the
mechanical connection between the transducer tip and
their load.
As an actuator, the transducer provides large deflection
and moderate force at low frequencies. It exhibits low
magnetic permeability and generates no magnetic fields.
Positioners constructed of 5A or 5H type piezoceramic
are stocked for “off-the-shelf” delivery. Custom sizes and
configurations are available on request.
.010
.40
1.25
(31.8)
_
.750
(19.1)
.125
(3.2)
± Force (Newtons)
+
(± Inches)
.030 .040
.050
.060
40.8
30.6
.30
5A Type
@ 90 V
20.4
.20
5H Type
@ 60 V
.10
2.25
(57.2)
.085
(2.2)
.020
(± Grams)
#4-40 Clr.
2 plcs.
Wires, 6" (152)
10.2
0
0
2.75
(69.9)
.25
.50
1.0 1.25
.75
± Deflection (mm)
1.50
SPECIFICATIONS & BENDING MOTOR PERFORMANCE (In the cantilever configuration)
PART NUMBER
PIEZO
MATERIAL
T220-A4-503-QM 5A-S4-ENH
T220-H4-503-QM 5H-S4-ENH
WEIGHT
CAPACITANCE
MAXIMUM
VOLTAGE
grams
nF
±Vp
Hz
9.4
9.4
290
480
±90
±60
70
70
ORDERING INFORMATION
Quick Mount Bending Element, ± 1325 µm, 5A type
Quick Mount Bending Element, ± 1240 µm, 5H type
CATALOG #3, 1998
RESONANT RESPONSE
FREQUENCY
TIME
FREE
DEFLECTION
BLOCKED
FORCE
ms
±µm
±N
5.0
5.0
± 1325
± 1240
± .33
± .31
PART NO.
1 pc.
5 pc.
25 pc.
100 pc.
T220-A4-503-QM
T220-H4-503-QM
$199
$199
$129
$129
$79
$79
$54
$54
34
TRANSDUCER
ELEMENTS
P IEZO S YSTEMS , I NC .
186 Massachusetts Avenue Cambridge, MA 02139 • Tel: (617) 547-1777 • Fax: (617) 354-2200 •
Web: www.piezo.com • E-mail: [email protected]
±300µM
QUICK MOUNT BENDING ELEMENT
VERSION
DESCRIPTION
The ±300 µm version Quick Mount bending element may
be used as an actuator and / or sensor. It is ready to be
used immediately. The standard T220-A4-303 bending element is wired for low voltage operation and the PCB to
which it has been mounted may be attached to mechanical ground using the two #2-56 mounting holes provided.
A bleed resistor across the terminals protects the transducer from thermal transients. The user must provide the
mechanical connection between the transducer and their
load.
As an actuator, the transducer provides medium range
deflection and force. It exhibits low magnetic permeability and generates no magnetic fields.
Positioners constructed of 5A or 5H type piezoceramic
are stocked for “off-the-shelf” delivery. Custom sizes and
configurations are available upon request.
#2-56 Clr.
2 plcs.
.002 .004
.50
(12.7)
.010
.012
25.5
± Force (Newtons)
.25
.312
(7.9)
.25
(6.4)
.085
(2.2)
(± Inches)
.006 .008
20.4
.20
5A Type
@ 90 V
.15
.10
15.3
10.2
5 H Type
@ 60 V
5.1
.05
1.125
(28.6)
(± Grams)
Wires, 6" (152)
0
1.625
(41.3)
0
.05
.10
.20
.25
.15
± Deflection (mm)
.30
SPECIFICATIONS & BENDING MOTOR PERFORMANCE (In the cantilever configuration)
PART NUMBER
T220-A4-303-QM
T220-H4-303-QM
PIEZO
MATERIAL
WEIGHT
CAPACITANCE
MAXIMUM
VOLTAGE
RESONANT
FREQUENCY
grams
nF
±Vp
Hz
ms
±µm
±N
2.5
2.5
58
96
±90
±60
280
280
1.2
1.2
±320
±300
± .27
± .25
5A-S4-ENH
5H-S4-ENH
ORDERING INFORMATION
Quick Mount Bending Element, ± 320 µm, 5A type
Quick Mount Bending Element, ± 300 µm, 5H type
RESPONSE
FREE
BLOCKED
TIME
DEFLECTION FORCE
PART NO.
1 pc.
5 pc.
25 pc.
100 pc.
T220-A4-303-QM
T220-H4-303-QM
$149
$149
$79
$79
$49
$49
$34
$34
35
CATALOG #3, 1998
TRANSDUCER
ELEMENTS
P IEZO S YSTEMS , I NC .
186 Massachusetts Avenue Cambridge, MA 02139 • Tel: (617) 547-1777 • Fax: (617) 354-2200 •
Web: www.piezo.com • E-mail: [email protected]
T215 BRASS SHIM BENDING ELEMENTS
S TA N D A R D S I Z E S
DESCRIPTION
The T215 Standard Brass Shim Bending Elements are .015” (0.38 mm) thick and sized to be produced economically. They
are general purpose actuators designed to produce high deflections and moderate forces at low voltage, and exhibit low magnetic permeability. The parts are stocked for “off-the-shelf” delivery. Custom sizes are available on request.
T215-A4-503 and T215-H4-503
PART NUMBER
WIDTH
LENGTH
Inches (mm)
Inches (mm)
Elements made with PSI-5A-S4 Piezoceramic
T215-A4-103
.125
(3.2)
1.250 (31.8)
T215-A4-203
.250
(6.4)
1.250 (31.8)
T215-A4-303
.500 (12.7)
1.250 (31.8)
T215-A4-503
1.250 (31.8)
2.500 (63.5)
Elements made with PSI-5H-S4 Piezoceramic
T215-H4-103
.125
(3.2)
1.250 (31.8)
T215-H4-203
.250
(6.4)
1.250 (31.8)
T215-H4-303
.500 (12.7)
1.250 (31.8)
T215-H4-503
1.250 (31.8)
2.500 (63.5)
T215-A4-303 and T215-H4-303
W
T215-A4-203 and T215-H4-203
T215-A4-103 and T215-H4-103
L
Top View (Scale: x1)
.005"
(0.13)
Nickel electrode
+
PSI-5A-S4 piezoceramic, or
PSI-5H-S4 piezoceramic
P
Adhesive bond layer
P
.015"
(0.38)
–
Brass center shim
Poled for series operation (standard)
Poled for parallel operation (on request)
Side View (Exaggerated)
SPECIFICATIONS & BENDING MOTOR PERFORMANCE (In the cantilever configuration)
PART NUMBER
WEIGHT
CAPACITANCE
RATED VOLTAGE
Series
Parallel
Series
Parallel
Operation Operation Operation Operation
T215-A4-103
T215-A4-203
T215-A4-303
T215-A4-503
T215-H4-103
T215-H4-203
T215-H4-303
T215-H4-503
CATALOG #3, 1998
grams
.30
.60
1.2
6.0
.30
.60
1.2
6.0
nF
5.
10.
20.
100.
8.
16.
32.
160.
nF
20.
40.
80.
400.
32.
64.
128.
640.
±Vp
±120
±120
±120
±120
±80
±80
±80
±80
±Vp
±60
±60
±60
±60
±40
±40
±40
±40
36
RESPONSE TIME
(FULL AMPLITUDE)
FREE
DEFLECTION
BLOCKED
FORCE
Active Cantilever Length, mm
25.4
ms
1.5
1.5
1.5
1.5
1.5
1.5
1.5
1.5
50.8
ms
6.0
6.0
25.4
±mm
±0.3
±0.3
±0.3
±0.3
±0.3
±0.3
±0.3
±0.3
50.8
±mm
±1.2
±1.2
25.4
±N
±.04
±.08
±.16
±.40
±.04
±.08
±.16
±.40
50.8
±N
±.20
±.20
TRANSDUCER
ELEMENTS
T215 BRASS SHIM BENDING ELEMENTS
S TA N D A R D S I Z E S
BENDING MOTOR PERFORMANCE (In the cantilever configuration)
T215-H4-103, -203, -303 BENDING ELEMENTS
Voltage: ±80 Vp (Series) or ±40 Vp (Parallel)
Active Cantilever Length: 1.0” (25.4mm)
(± Inches)
.006 .008
.010
20.4
15.3
15
-A4
-30
.10
3
10.2
T215
(± Grams)
T2
.15
± Force (Newtons)
La
.20
-A4-
203
T215-A4-1
03
0
0
.05
± Force (Newtons)
0.5
-30
.10
0.3
-H4-
0.2
0.1
5.1
03
0.6
50.9
0.5
20.4
T21
5
La = -A4-50
3
2.0"
(50.
8m
10.2
m)
203
T215-H4-1
61.0
30.6
3
10.2
T215
.05
.10
.20
.25
.15
± Deflection (mm)
(± Inches)
.008 .0016 .024 .031
0.7
40.8
T215-A4-503
La = 1.0" (25.4mm)
15.3
-H4
.30
T215-H4-503 BENDING ELEMENT
Voltage: ±80 Vp (Series) or ±40 Vp (Parallel)
Active Cantilever Length: 1.0” (25.4mm) & 2.0” (50.8mm)
.047
La
20.4
15
0
± Force (Newtons)
.039
0.6
0.4
T2
.15
.30
(± Grams)
0.7
La
.20
T215-A4-503 BENDING ELEMENT
Voltage: ±120 Vp (Series) or ±60 Vp (Parallel)
Active Cantilever Length: 1.0” (25.4mm) & 2.0” (50.8mm)
(± Inches)
.008 .0016 .024 .031
.012
25.5
0
.10
.20
.25
.15
± Deflection (mm)
.010
.05
5.1
.05
(± Inches)
.006 .008
.25
25.5
.25
± Force (Newtons)
.002 .004
.012
.039
.047
61.0
La
50.9
0.4
40.8
T215-H4-503
La = 1.0" (25.4mm)
0.3
30.6
0.2
20.4
T21
5
La = -H4-50
3
2.0"
(50.
8m
0.1
(± Grams)
.002 .004
(± Grams)
T215-A4-103, -203, -303 BENDING ELEMENTS
Voltage: ±120 Vp (Series) or ±60 Vp (Parallel)
Active Cantilever Length: 1.0” (25.4mm)
10.2
m)
0
0
0
0.2
0.6
0.4
0.8
1.0
± Deflection (mm)
0
1.2
ORDERING INFORMATION
T215 Brass Shim Bending Element (“103” size)
T215 Brass Shim Bending Element (“203” size)
T215 Brass Shim Bending Element (“303” size)
T215 Brass Shim Bending Element (“503” size)
PART NO.
T215 Brass
T215 Brass
T215 Brass
T215 Brass
Shim Bending Element (“103” size)
Shim Bending Element (“203” size)
Shim Bending Element (“303” size)
Shim Bending Element (“503” size)
0.2
0.6
0.4
0.8
1.0
± Deflection (mm)
1.2
T215-A4-103
T215-A4-203
T215-A4-303
T215-A4-503
1 pc.
$90
$90
$90
$125
5 pc.
$40
$45
$50
$90
25 pc.
$22
$25
$30
$60
100 pc.
$12
$15
$20
$40
T215-H4-103
T215-H4-203
T215-H4-303
T215-H4-503
$90
$90
$90
$125
$40
$45
$50
$90
$22
$25
$30
$60
$12
$15
$20
$40
37
CATALOG #3, 1998
TRANSDUCER
ELEMENTS
P IEZO S YSTEMS , I NC .
186 Massachusetts Avenue Cambridge, MA 02139 • Tel: (617) 547-1777 • Fax: (617) 354-2200 •
Web: www.piezo.com • E-mail: [email protected]
T220 BRASS SHIM BENDING ELEMENTS
S TA N D A R D S I Z E S
DESCRIPTION
The T220 Standard Brass Shim Bending Elements are .020” (0.5 mm) thick and sized to be produced economically. They are
general purpose actuators designed to produce moderate deflections and forces, and exhibit low magnetic permeability. The
parts are stocked for “off-the-shelf” delivery. Custom sizes are available on request.
T220-A4-503 and T220-H4-503
PART NUMBER
WIDTH
LENGTH
Inches (mm)
Inches (mm)
Elements made with PSI-5A-S4 Piezoceramic
T220-A4-103
.125
(3.2)
1.250 (31.8)
T220-A4-203
.250
(6.4)
1.250 (31.8)
T220-A4-303
.500 (12.7)
1.250 (31.8)
T220-A4-503
1.250 (31.8)
2.500 (63.5)
Elements made with PSI-5H-S4 Piezoceramic
T220-H4-103
.125
(3.2)
1.250 (31.8)
T220-H4-203
.250
(6.4)
1.250 (31.8)
T220-H4-303
.500 (12.7)
1.250 (31.8)
T220-H4-503
1.250 (31.8)
2.500 (63.5)
T220-A4-303 and T220-H4-303
W
T220-A4-203 and T220-H4-203
T220-A4-103 and T220-H4-103
L
Top View (Scale: x1)
.0075"
(0.19)
Nickel electrode
+
PSI-5A-S4 piezoceramic, or
PSI-5H-S4 piezoceramic
P
Adhesive bond layer
P
.020"
(0.51)
–
Brass center shim
Poled for series operation (standard)
Poled for parallel operation (on request)
Side View (Exaggerated)
SPECIFICATIONS & BENDING MOTOR PERFORMANCE (In the cantilever configuration)
PART NUMBER
WEIGHT
CAPACITANCE
RATED VOLTAGE
Series
Parallel
Series
Parallel
Operation Operation Operation Operation
T220-A4-103
T220-A4-203
T220-A4-303
T220-A4-503
T220-H4-103
T220-H4-203
T220-H4-303
T220-H4-503
CATALOG #3, 1998
grams
.40
.80
1.6
8.0
.40
.80
1.6
8.0
nF
3.6
7.4
14.5
72.5
6.0
12.0
24.
120.
nF
14.
29.
58.
290.
24.
48.
96.
480.
±Vp
±180
±180
±180
±180
±120
±120
±120
±120
±Vp
±90
±90
±90
±90
±60
±60
±60
±60
38
RESPONSE TIME
(FULL AMPLITUDE)
FREE
DEFLECTION
BLOCKED
FORCE
Active Cantilever Length, mm
25.4
ms
1.2
1.2
1.2
1.2
1.2
1.2
1.2
1.2
50.8
ms
4.8
4.8
25.4
±mm
±.25
±.25
±.25
±.25
±.25
±.25
±.25
±.25
50.8
±mm
±1.0
±1.0
25.4
±N
±.07
±.14
±.28
±.70
±07
±.14
±.28
±.70
50.8
±N
±.35
±.35
TRANSDUCER
ELEMENTS
T220 BRASS SHIM BENDING ELEMENTS
S TA N D A R D S I Z E S
BENDING MOTOR PERFORMANCE (In the cantilever configuration)
T220-H4-103, -203, -303 BENDING ELEMENTS
Voltage: ±120 Vp (Series) or ±60 Vp (Parallel)
Active Cantilever Length: 1.0” (25.4mm)
T220-A4-103, -203, -303 BENDING ELEMENTS
Voltage: ±180 Vp (Series) or ±90 Vp (Parallel)
Active Cantilever Length: 1.0” (25.4mm)
.010
25.5
± Force (Newtons)
4-2
10.2
03
.05
T220
(± Grams)
-A
.10
.15
20
-H
.10
4-2
10.2
03
T220
-A4-
103
5.1
-H4-
103
0
0
.05
.10
.20
.25
.15
± Deflection (mm)
0
.30
La
T220-A4-503
La = 1.0" (25.4mm)
0.5
0.4
61.0
0.6
50.9
0.5
40.8
0.3
30.6
T2
La 20-A
= 2 4.0" 503
(50
.8m
0.2
0.1
20.4
10.2
m)
0.2
0.6
0.4
0.8
1.0
± Deflection (mm)
T220 Brass Shim Bending Element (“103” size)
T220 Brass Shim Bending Element (“203” size)
T220 Brass Shim Bending Element (“303” size)
T220 Brass Shim Bending Element (“503” size)
.039
.047
61.0
La
T220-H4-503
La = 1.0" (25.4mm)
50.9
40.8
0.3
30.6
T2
La 20-H
= 2 4.0" 503
(50
.8m
0.2
0.1
20.4
10.2
m)
0
1.2
ORDERING INFORMATION
T220 Brass Shim Bending Element (“103” size)
T220 Brass Shim Bending Element (“203” size)
T220 Brass Shim Bending Element (“303” size)
T220 Brass Shim Bending Element (“503” size)
.30
0.4
0
0
(± Inches)
.008 .0016 .024 .031
0.7
± Force (Newtons)
0.6
.047
(± Grams)
0.7
.039
.10
.20
.25
.15
± Deflection (mm)
T220-H4-503 BENDING ELEMENT
Voltage: ±120 Vp (Series) or ±60 Vp (Parallel)
Active Cantilever Length: 1.0” (25.4mm) & 2.0” (50.8mm)
T215-A4-503 BENDING ELEMENT
Voltage: ±180 Vp (Series) or ±90 Vp (Parallel)
Active Cantilever Length: 1.0” (25.4mm) & 2.0” (50.8mm)
(± Inches)
.008 .0016 .024 .031
.05
(± Grams)
0
± Force (Newtons)
15.3
T2
.05
5.1
20.4
3
3
15.3
La
30
30
20
.20
4-
4-
T2
25.5
-H
20.4
-A
.15
.012
.25
20
20
.20
.010
T2
La
T2
± Force (Newtons)
.25
(± Inches)
.006 .008
.002 .004
.012
(± Grams)
(± Inches)
.006 .008
.002 .004
0
PART NO.
0.2
0.6
0.4
0.8
1.0
± Deflection (mm)
1.2
T220-A4-103
T220-A4-203
T220-A4-303
T220-A4-503
1 pc.
$75
$75
$75
$100
5 pc.
$30
$35
$40
$75
25 pc.
$18
$20
$25
$50
100 pc.
$10
$12
$15
$35
T220-H4-103
T220-H4-203
T220-H4-303
T220-H4-503
$75
$75
$75
$100
$30
$35
$40
$75
$18
$20
$25
$50
$10
$12
$15
$35
39
CATALOG #3, 1998
TRANSDUCER
ELEMENTS
P IEZO S YSTEMS , I NC .
186 Massachusetts Avenue Cambridge, MA 02139 • Phone: (617) 547-1777 • Fax: (617) 354-2200 • Web: www.piezo.com • E-mail: [email protected]
T220 BRASS SHIM BENDING ELEMENT
T O TA L LY N O N - M A G N E T I C V E R S I O N
DESCRIPTION
.004
(± Inches)
.012 .016 .020
.25
± Force (Newtons)
As an actuator, the transducer provides medium range
deflection, frequency, and force. It exhibits no magnetic
permeability and generates no magnetic fields. It is well
suited for use in high magnetic field environments such as
NMR machinery and particle accelerators
Positioners constructed of 5A or 5H type piezoceramic
are stocked for “off-the-shelf” delivery. Custom sizes and
configurations are available upon request. “Quick Mount”
configurations are also available.
.024
25.5
La
20.4
.20
5A Type
@ ± 180 V
.15
15.3
.10
10.2
5H Type
@ ± 120 V
.05
(± Grams)
The non-magnetic bending element may be used as either
an actuator or sensor.
.008
5.1
0
0
100
200 300 400 500
± Deflection (µm)
600
Active Length = 1.5" (38.1mm)
.500
(12.7)
1.75
(44.5)
Top View (Scale: x1)
.0075"
(0.19)
Silver electrode
+
PSI-5A-S3 piezoceramic, or
PSI-5H-S3 piezoceramic
P
Adhesive bond layer
P
.020"
(0.51)
Brass center shim
Poled for series operation (standard)
Poled for parallel operation (on request)
–
Side View (Exaggerated)
SPECIFICATIONS & BENDING MOTOR PERFORMANCE (cantilever configuration, la = 1.5”)
PART NUMBER
T220-A3BS-304
T220-H3BS-304
PIEZO
MATERIAL
5A-S3
5H-S3
WEIGHT
CAPACITANCE
MAXIMUM
VOLTAGE
RESONANT
FREQUENCY
RESPONSE
TIME
FREE
DEFLECTION
BLOCKED
FORCE
grams
nF
± Vp
Hz
ms
± µm
±N
2.3
2.3
17
30
± 180
± 120
150
150
2.5
2.5
± 635
± 595
± .22
± .21
5 pc.
$75
$75
25 pc.
$50
$50
100 pc.
$35
$35
ORDERING INFORMATION
Non-magnetic Bending Element, 5A type
Non-magnetic Bending Element, 5H type
CATALOG #3, 1998
PART NO.
T220-A3BS-304
T220-H3BS-304
40
1 pc.
$100
$100
TRANSDUCER
ELEMENTS
P IEZO S YSTEMS , I NC .
186 Massachusetts Avenue Cambridge, MA 02139 • Phone: (617) 547-1777 • Fax: (617) 354-2200 • Web: www.piezo.com • E-mail: [email protected]
T 2 2 0 S TA I N L E S S S T E E L S H I M B E N D I N G E L E M E N T
NARROW WIDTH
DESCRIPTION
.001
(± Inches)
.002
.003
± Force (Newtons)
.05
These elements are used in activity sensors and as
rate response sensors in implantable pacemakers.
5
La
4
.04
5A Type
@ ± 180 V
.03
3
.02
2
.01
1
(± Grams)
The superior construction of the narrow stainless
steel shim bending element allows use as either a
motor or sensor in applications requiring high
strength and reliability at operating temperatures up
to 100° C.
0
0
75
25
50
± Deflection (µm)
Active Length = 0.5" (12.7mm)
.040"
.700"
Top View (Scale: x2)
.0075"
(0.19)
Nickel electrode
+
PSI-5A-S4 piezoceramic
P
Adhesive bond layer
P
.020"
(0.51)
Stainless steel shim
Poled for series operation (standard)
Poled for parallel operation (on request)
–
Side View (Exaggerated)
SPECIFICATIONS & BENDING MOTOR PERFORMANCE (cantilever configuration, la = 0.5”)
PART NUMBER
T220-A4-105
PIEZO
MATERIAL
PSI-5A-S4
WEIGHT
CAPACITANCE
MAXIMUM
VOLTAGE
RESONANT
FREQUENCY
RESPONSE
TIME
FREE
DEFLECTION
BLOCKED
FORCE
grams
nF
± Vp
Hz
ms
± µm
±N
.07
0.6
± 180
~1,250
0.3
± 75
± .04
PART NO.
1 pc.
5 pc.
25 pc.
100 pc.
T220-A4-105
$99
$50
$30
$25
ORDERING INFORMATION
T220 Stainless Steel Shim Bending Element
Narrow Width (.040”)
41
CATALOG #3, 1998
TRANSDUCER
ELEMENTS
P IEZO S YSTEMS , I NC .
186 Massachusetts Avenue Cambridge, MA 02139 • Tel: (617) 547-1777 • Fax: (617) 354-2200 •
PSI-5A-S4-ENH
Web: www.piezo.com • E-mail: [email protected]
PIEZOELECTRIC SINGLE SHEET
PART NUMBER
T105-A4E-602
T107-A4E-602
T110-A4E-602
T120-A4E-602
T140-A4E-602
T180-A4E-602
Nickel electrodes
both sides
2.85
(72.4)
THICKNESS CAPACITANCE
.005
.0075
.0105
.020
.040
.080
2.85 (72.4)
mm
nF (±10%)
.127
.191
.267
.508
1.02
2.03
650
430
315
162
80
40
± .0005 (.127 ± .013)
± .0005 (.191 ± .013)
± .0005 (.267 ± .013)
± .0005 (.508 ± .013)
± .0005 (1.016 ± .013)
± .0005 (2.032 ± .013)
PIEZOELECTRIC AND MATERIAL PROPERTIES
PIEZOELECTRIC SINGLE SHEET
PIEZOELECTRIC
Composition
Material Designation
Relative Dielectric Constant (@1KHz)
Piezoelectric Strain Coefficient
Piezoelectric Voltage Coefficient
Coupling Coefficient
Polarization Field
Initial Depolarization Field
KT33
d33
d31
g33
g31
k33
k31
Ep
Ec
Lead Zirconate Titanate
PSI-5A-S4-ENH
1800
390 x 10-12
Meters/Volt
-190 x 10-12
Meters/Volt
24.0 x 10-3
Volt Meters/Newton
-11.6 x 10-3
Volt Meters/Newton
0.72
0.32
2 x 106
Volts/Meter
5 x 105
Volts/Meter
Kg/Meter3
Y E3
YE1
7800
80
5.2 x 1010
6.6 x 1010
~4 x 10-6
350
Meters/Meter °C
°C
MECHANICAL
Density
Mechanical Q
Elastic Modulus
THERMAL
Thermal Expansion Coefficient
Curie Temperature
Newtons/Meter2
Newtons/Meter2
ORDERING INFORMATION
PART NO.
1 pc.
5 pc.
25 pc.
100 pc.
PSI-5A-S4-ENH
PSI-5A-S4-ENH
PSI-5A-S4-ENH
PSI-5A-S4-ENH
PSI-5A-S4-ENH
PSI-5A-S4-ENH
T105-A4E-602
T107-A4E-602
T110-A4E-602
T120-A4E-602
T140-A4E-602
T180-A4E-602
$100
$100
$100
$125
$150
$200
$70
$60
$70
$85
$115
$150
$50
$40
$50
$60
$80
$100
$35
$30
$35
$45
$60
$75
CATALOG #3, 1998
(2.85” Square x .005”T)
(2.85” Square x .0075”T)
(2.85” Square x .010”T)
(2.85” Square x .020”T)
(2.85” Square x .040”T)
(2.85” Square x .080”T)
42
TRANSDUCER
ELEMENTS
P IEZO S YSTEMS , I NC .
186 Massachusetts Avenue Cambridge, MA 02139 • Tel: (617) 547-1777 • Fax: (617) 354-2200 •
PSI-5H-S4-ENH
Web: www.piezo.com • E-mail: [email protected]
PIEZOELECTRIC SINGLE SHEET
PART NUMBER
T105-H4E-602
T107-H4E-602
T110-H4E-602
Nickel electrodes
both sides
2.85
(72.4)
THICKNESS CAPACITANCE
.005 ± .0005
.0075 ± .0005
.0105 ± .0005
2.85 (72.4)
mm
nF (±10%)
.127
.191
.267
1250
850
610
(.127 ± .013)
(.191 ± .013)
(.267 ± .013)
PIEZOELECTRIC AND MATERIAL PROPERTIES
PIEZOELECTRIC SINGLE SHEET
PIEZOELECTRIC
Composition
Material Designation
Relative Dielectric Constant (@1KHz)
Piezoelectric Strain Coefficient
Piezoelectric Voltage Coefficient
Coupling Coefficient
Polarization Field
Initial Depolarization Field
KT33
d33
d31
g33
g31
k33
k31
Ep
Ec
Lead Zirconate Titanate
PSI-5H-S4 ENH
3800
650 x 10-12
Meters/Volt
-320 x 10-12
Meters/Volt
19.0 x 10-3
Volt Meters/Newton
-9.5 x 10-3
Volt Meters/Newton
.75
.44
Volts/Meter
1.5 x 106
Volts/Meter
3.0 x 105
Kg/Meter3
Y E3
YE1
7800
30
5.0 x 1010
6.2 x 1010
~3 x 10-6
250
Meters/Meter °C
°C
MECHANICAL
Density
Mechanical Q
Elastic Modulus
Newtons/Meter2
Newtons/Meter2
THERMAL
Thermal Expansion Coefficient
Curie Temperature
ORDERING INFORMATION
PSI-5H-S4-ENH (2.85” Square x .005”T)
PSI-5H-S4-ENH (2.85” Square x .0075”T)
PSI-5H-S4-ENH (2.85” Square x .0105”T)
PART NO.
T105-H4E-602
T107-H4E-602
T110-H4E-602
43
1 pc.
$100
$100
$100
5 pc.
$70
$60
$70
25 pc.
$50
$40
$50
100 pc.
$35
$30
$35
CATALOG #3, 1998
TRANSDUCER
ELEMENTS
P IEZO S YSTEMS , I NC .
186 Massachusetts Avenue Cambridge, MA 02139 • Tel: (617) 547-1777 • Fax: (617) 354-2200 •
Web: www.piezo.com • E-mail: [email protected]
PSI-5A-S3 PIEZOELECTRIC SINGLE SHEET
PSI-5A-S3 piezoceramic
sheet with silver electrodes is suitable for totally non-magnetic devices.
Silver electrodes
both sides
Note: Silver electrodes are
not recommended for static high field DC applications.
2.15
(54.6)
(+) Polarity mark
R 0.18
(R4.6)
CAPACITANCE (±10%)
R 0.20
(R5.1)
190 nF
Border
.0075 ± .0005
(0.191 ± .013)
2.03 (51.6)
2.15 (54.6)
PIEZOELECTRIC AND MATERIAL PROPERTIES
PIEZOELECTRIC SINGLE SHEET
PIEZOELECTRIC
Composition
Material Designation
Relative Dielectric Constant
KT33
KT11
d33
d31
g33
g31
k33
k31
Ep
Ec
Piezoelectric Strain Coefficient
Piezoelectric Voltage Coefficient
Coupling Coefficient
Polarization Field
Initial Depolarization Field
Lead Zirconate Titanate
PSI-5A-S3
1800
1700
450 x 10-12
Meters/Volt
-180 x 10-12
Meters/Volt
25.0 x 10-3
Volt Meters/Newton
-11.5 x 10-3
Volt Meters/Newton
0.71
0.34
Volts/Meter
2 x 106
Volts/Meter
5 x 105
MECHANICAL
Density
Mechanical Q
Elastic Modulus
Kg/Meter3
Tensile Strength, Static
Tensile Strength, Dynamic
Compressive Strength
7700
70
5.0 x 1010
5.7 x 1010
6.3 x 107
2.1 x 107
5.2 x 108
Thermal Expansion Coefficient
Curie Temperature
~4 x 10-6
350
Meters/Meter °C
°C
Y E3
YE1
Newtons/Meter2
Newtons/Meter2
Newtons/Meter2
Newtons/Meter2
Newtons/Meter2
THERMAL
ORDERING INFORMATION
PSI-5A-S3 Single Sheet (0.0075" thick)
CATALOG #3, 1998
PART NO.
T107-A3-502
44
1 pc.
$70
5 pc.
$40
25 pc.
$25
100 pc.
$20
TRANSDUCER
ELEMENTS
P IEZO S YSTEMS , I NC .
186 Massachusetts Avenue Cambridge, MA 02139 • Tel: (617) 547-1777 • Fax: (617) 354-2200 •
Web: www.piezo.com • E-mail: [email protected]
PSI-5H-S3 PIEZOELECTRIC SINGLE SHEET
PSI-5A-S3 piezoceramic
sheet with silver electrodes
is suitable for totally nonmagnetic devices.
Silver electrodes
both sides
Note: Silver electrodes are
not recommended for static high field DC applications.
2.15
(54.6)
(+) Polarity mark
R 0.18
(R4.6)
CAPACITANCE (±10%)
R 0.20
(R5.1)
470 nF
Border
.0075 ± .0005
(0.191 ± .013)
2.03 (51.6)
2.15 (54.6)
PIEZOELECTRIC AND MATERIAL PROPERTIES
PIEZOELECTRIC SINGLE SHEET
PIEZOELECTRIC
Composition
Material Designation
Relative Dielectric Constant
KT33
KT11
d33
d31
g33
g31
k33
k31
Ep
Ec
Piezoelectric Strain Coefficient
Piezoelectric Voltage Coefficient
Coupling Coefficient
Polarization Field
Initial Depolarization Field
Lead Zirconate Titanate
PSI-5H-S3
3800
2550
380 x 10-12
Meters/Volt
-260 x 10-12
Meters/Volt
12.5 x 10-3
Volt Meters/Newton
-8.0 x 10-3
Volt Meters/Newton
0.52
0.34
Volts/Meter
1.9 x 106
Volts/Meter
3.0 x 105
MECHANICAL
Density
Mechanical Q
Elastic Modulus
Kg/Meter3
Tensile Strength, Static
Tensile Strength, Dynamic
Compressive Strength
7700
65
4.8 x 1010
6.1 x 1010
~4.8 x 107
~1.6 x 107
~3.9 x 108
Thermal Expansion Coefficient
Curie Temperature
~4 x 10-6
220
Meters/Meter °C
°C
YE3
YE1
Newtons/Meter2
Newtons/Meter2
Newtons/Meter2
Newtons/Meter2
Newtons/Meter2
THERMAL
ORDERING INFORMATION
PSI-5A-S3 Single Sheet (0.0075" thick)
PART NO.
T107-H3-502
45
1 pc.
$70
5 pc.
$40
25 pc.
$25
100 pc.
$20
CATALOG #3, 1998
DESIGN &
PROTOTYPING
P IEZO S YSTEMS , I NC .
186 Massachusetts Avenue Cambridge, MA 02139 • Tel: (617) 547-1777 • Fax: (617) 354-2200 •
Web: www.piezo.com • E-mail: [email protected]
SOLDER & FLUX KIT
DESCRIPTION OF ELECTRODES
Piezoceramic electrodes will be either fired silver or nickel. Silver electrodes are flat white in color while nickel
electrodes are grey.
Silver electrodes are not recommended for high electric
field DC applications where the silver is likely to migrate
and bridge the two electrodes. It is often used in nonmagnetic and AC applications. Silver used as an electrode
is in the form of flakes suspended in a glass frit. It is generally screened onto the ceramic and fired. The glass
makes the bond between the ceramic and the silver particles. Silver is soluble in tin and a silver loaded solder
should be used to prevent scavenging of silver in the electrode.
Nickel has good corrosion resistance and is a good choice
for both AC and DC applications. It can usually be soldered to easily with tin/lead solder. Electroless nickel,
used for plating piezoceramic, contains phosphor.
Sometimes the phosphor content in a plating run can
make it hard to solder. Vacuum deposited nickel electrodes are usually very thin, making soldering tricky.
BENDING
KIT INCLUDES:
MOTORS
Solder
Tin/Lead solder for nickel electrodes, or
Tin/Lead/Silver solder for silver electrodes,
12” length.
■ Liquid Flux for soldering to nickel or
Flux
silver electrodes, 7 ml.
■ Liquid Flux for soldering to stainless steel
& brass center shims , 7 ml.
Wires ■ Red wires, #30 Gauge, Stripped &
tinned, 6” length, 5 pieces.
■ Black wires, #30 Gauge, Stripped & tinned,
6” length, 5 pieces. Piezoceramic sheet
Small piezoceramic
■ sheet with nickel or silver
electrode to practice technique, 1 piece
■
Choice of the correct flux (to remove surface oxidation)
generally makes soldering to electrode surfaces easy even
under adverse conditions.
DESCRIPTION OF CENTER SHIMS
Generally, the center shim layer of a 2-Layer piezoelectric bending element is either brass or stainless steel. A
wire is attached to the center shim if the element is
used in parallel operation. Shims are soldered in the
same way as the nickel electrode. The proper liquid flux
choice must be made depending on the shim material.
PURPOSE
BENDINGOF
MOTORS
THE KIT
Soldering wires to the electrodes of piezoceramic sheet
and/or the center shim of a 2-layer bending element can
be difficult if the proper materials are not used. There is a
vast array materials to choose from. The solder & flux kit
offers the right materials to get started at once and provides information to procure materials directly from the
manufacturer later.
Recommended procedure is
described. Materials in the kit are for soldering to nickel
electrodes unless specifically requested for silver.
ORDERING INFORMATION
Solder & Flux Kit (For Nickel Electrodes)
Solder & Flux Kit (For Silver Electrodes)
CATALOG #3, 1998
PART NO.
MSF-003-NI
MSF-003-AG
46
1 pc.
$49
$59
P IEZO S YSTEMS , I NC .
186 Massachusetts Avenue Cambridge, MA 02139 • Tel: (617) 547-1777 • Fax: (617) 354-2200 •
PIEZOCERAMIC
APPLICATION DATA
Web: www.piezo.com • E-mail: [email protected]
I N T R O D U C T I O N TO P I E Z O E L E C T R I C I T Y
When a piezoceramic element is
stressed electrically by a voltage, its
dimensions change. When it is
stressed mechanically by a force, it
generates an electric charge. If the
electrodes are not short-circuited, a
voltage associated with the charge
appears.
A piezoceramic is therefore capable
of acting as either a sensing or transmitting element, or both. Since piezoceramic elements are capable of generating very high voltages, they are
compatible with today’s generation of
solid-state devices — rugged, compact, reliable, and efficient.
The following text describes the terminology of piezoceramics and the
relationship among variables for functional applications.
RELATIONSHIPS
Relationships between applied forces
and the resultant responses depend
upon: the piezoelectric properties of
the ceramic; the size and shape of the
piece; and the direction of the electrical and mechanical excitation.
To identify directions in a piezoceramic element, three axes are used.
These axes, termed 1, 2 and 3, are
analogous to X,Y and Z of the classical three dimensional orthogonal set
of axes (Figure 1a)
The polar or 3 axis is taken parallel to
the direction of polarization within
the ceramic. This direction is established during manufacturing by a high
DC voltage that is applied between a
pair of electroded faces to activate
the material. The polarization vector
“P” is represented by an arrow pointing from the positive to the negative
poling electrode. In shear operations,
these poling electrodes are later
removed and replaced by electrodes
deposited on a second pair of faces.
In this event, the 3 axis is not altered,
but is then parallel to the electroded
3
faces found on the finished element
(Figure 1b). When the mechanical
stress or strain is shear, the subscript
5 is used in the second place.
Piezoelectric coefficients with double
subscripts link electrical and mechanical quantities. The first subscript
gives the direction of the electrical
field associated with the voltage
applied, or the charge produced. The
second subscript gives the direction
of the mechanical stress or strain.
Several piezoceramic material constants may be written with a “superscript” which specifies either a
mechanical or electrical boundary
condition. The superscripts are T, E,
D and S, signifying:
+
P
–
2
1
Figure - 1a
3
+
–
P
2
1
Figure - 1b
T = constant stress
= mechanically free
E = constant field = short circuit
D = constant electrical displacement
= open circuit
S = constant strain
= mechanically clamped
As an example, KT3 expresses the
relative dielectric constant (K), measured in the polar direction (3) with
no mechanical clamping applied.
F
+
–
+
Q or V
–
P
Figure - 2a
"D" CONSTANT
The piezoelectric constants relating
the mechanical strain produced by an
applied electric field are termed the
strain constants, or the “d” coefficients. The units may then be
expressed as meters per meter, per
volts per meter (meters per volt).
d=
F
+
–
47
P
Figure - 2b
strain developed
applied electric field
It is useful to remember that large dij
constants relate to large mechanical
displacements which are usually
sought in motional transducer
devices. Conversely, the coefficient
may be viewed as relating the charge
collected on the electrodes, to the
applied mechanical stress. d33 applies
–
Q or V
+
+
Q or V
–
F
–
+
P
Figure - 2c
CATALOG #3, 1998
PIEZOCERAMIC
APPLICATION DATA
P IEZO S YSTEMS , I NC .
186 Massachusetts Avenue Cambridge, MA 02139 • Tel: (617) 547-1777 • Fax: (617) 354-2200 •
Web: www.piezo.com • E-mail: [email protected]
the thickness of ceramic between
electrodes. A “33” subscript indicates
that the electric field and the mechanical stress are both along the polarization axis. (Figure 2a.) A “31” subscript signifies that the pressure is
applied at right angles to the polarization axis, but the voltage appears on
the same electrodes as in the “33”
case. (Figure 2b.)
(e0= 8.9 x 10-12 farads/meter) and
electrode surface area, and then
dividing by the thickness separating
the electrodes. Units are expressed
in farads.
when the force is in the 3 direction
(along the polarization axis) and is
impressed on the same surface on
which the charge is collected (Figure
2a). d31 applies when the charge is
collected on the same surface as
before, but the force is applied at right
angles to the polarization axis (Figure
2b).
The subscripts in d15 indicate that the
charge is collected on electrodes
which are at right angles to the original poling electrodes and that the
applied mechanical stress is shear
(Figure 2c.)
The units for the dij coefficients
are commonly expressed as
coulombs/square meter per newton/square meter.
d=
short circuit charge density
applied mechanical stress
When the force that is applied is distributed over an area which is fully
covered by electrodes (even if that is
only a portion of the total electrode)
the units of area cancel from the
equation and the coefficient may be
expressed in terms of change per unit
force, coulombs per newton. To view
the dij coefficients in this manner is
useful when charge generators are
contemplated, e.g., accelerometers.
“G” CONSTANT
The piezoelectric constants relating
the electric field produced by a
mechanical stress are termed the voltage constants, or the “g” coefficients.
The units may then be expressed as
volts/meter per newton/square meter.
g=
open circuit electric field
applied mechanical stress
Output voltage is obtained by multiplying the calculated electric field by
CATALOG #3, 1998
A “15” subscript implies that the
applied stress is shear and that the
resulting electric field is perpendicular
to the polarization axis. (Figure 2c.)
High gij constants favor large voltage
output, and are sought after for sensors.
Although the g coefficient are called
voltage coefficients, it is also correct
to say the gij is the ratio of strain
developed over the applied charge
density with units of meters per
meter over coulombs per square
meter.
g=
C=
K e0 A
t
K3 is related to the capacitance
between the original poling electrodes. K1 is related to the capacitance between the second pair of
electrodes applied after removal of
the poling electrodes for the purposes of shear excitation.
At frequencies far below resonance,
piezoelectric ceramic transducers are fundamentally capacitors.
Consequently, the voltage coefficients
gij are related to the charge coefficients dij by the dielectric constant Ki
as, in a capacitor, the voltage V is
related to the charge Q by the
capacitance C.
The equations are:
Q = CV
d33 = KT33 e0 g33
d31 = KT33 e0 g31
d15 = KT11 e0 g15
strain developed
applied charge density
DIELECTRIC CONSTANTS
The relative dielectric constant is the
ratio of the permittivity of the material,
e, to the permittivity of free space, e0,
in the unconstrained condition, i.e., well
below the mechanical resonance of the
part.
K=
permittivity of material
permittivity of free space =
e
e0
CAPACITANCE
Whereas the relative dielectric constant is strictly a material property, the
capacitance is a quantity dependent on
the type of material and its dimensions. Capacitance is calculated by
multiplying the relative dielectric constant by the permittivity of free space
48
COUPLING COEFFICIENTS
Electromechanical coupling k33, k31,
kp, and k15 describe the conversion
of energy by the ceramic element
from electrical to mechanical form or
vice versa. The ratio of the stored
converted energy of one kind
(mechanical or electrical) to the
input energy of the second kind
(electrical or mechanical) is defined
as the square of the coupling coefficient.
k=
mechanical energy stored
electrical energy applied
or
k=
electrical energy stored
mechanical energy applied
186 Massachusetts Avenue Cambridge, MA 02139 • Tel: (617) 547-1777 • Fax: (617) 354-2200 •
Subscripts denote the relative directions of electrical and mechanical
quantities and the kind of motion
involved. They can be associated with
vibratory modes of certain simple
transducer shapes; k33 is appropriate
for a long thin bar, electroded on the
ends, and polarized along the length,
and vibrating in a simple length
expansion and contraction. k31
relates to a long thin bar, electroded
on a pair of long faces, polarized in
thickness, and vibrating in simple
length expansion and contraction. kp
signifies the coupling of electrical and
mechanical energy in a thin round
disc, polarized in thickness and vibrating in radial expansion and contraction. k15 describes the energy conversion in a thickness shear vibration.
Since these coefficients are energy
ratios, they are dimensionless.
stress to shear strain. Units are usually newtons/square meter.
It should be clearly understood that
the piezoceramic properties
described above are defined for ideal
shapes measured under ideal
mechanical and electrical boundary
conditions. When put to use under
practical device operating conditions, the predicted performance is
approached but seldom realized.
Non-ideal shapes and non-ideal
boundary conditions contribute to
transduction losses due to such
things as standing waves, interfering
vibrational modes, pseudo-clamping,
stray electric and dielectric resistances. Since the possibilities are
infinite, the designer must evaluate
each component under the use conditions for which it is intended.
DENSITY
YOUNG’S MODULUS
As with all solids, piezoelectric ceramics have mechanical stiffness properties described as Young’s Modulus.
Young’s Modulus is the ratio of stress
(force per unit area) to strain (change
in length per unit length).
stress
Y=
strain
r=
mass
volume
DISSIPATION FACTOR
A measure of the dielectric losses in
the material-defined as the tangent of
the loss angle or the ratio of parallel
resistance to the parallel reactance,
expressed in percent.
MECHANICAL (QM)
The ratio of reactance to resistance
in the equivalent series circuit representing the mechanical vibrating resonant system. The shape of the part
affects the value.
CURIE TEMPERATURE
The temperature at which the crystal
structure changes from a non-symmetrical (piezoelectric) to a symmetrical (non-piezoelectric) form,
expressed in degrees Celsius.
49
AGING RATE
Aging is the attempt of the ceramic to
change back to its original state prior
to polarization. Aging of piezoelectric
ceramics is a logarithmic function with
time. The aging rate defines change in
the material parameters per decade of
time, i.e., 1-10 days, 5-50 days, etc.
PERFORMANCE
Deflection and Force: Piezoelectric
actuators are usually specified in
terms of their free deflection and
blocked force. Free deflection, X(f),
refers to displacement at a given voltage level without the actuator working against any external load. Blocked
force, F(b), refers to the force exerted
at a given voltage level when the actuator is not allowed to move. Since the
force at maximum deflection is zero,
all other values of simultaneous displacement and force (for a given voltage level) are determined by a line
drawn between these points on a
force versus deflection diagram as
shown below. In practice, a bending
motor must move a specified amount
and exert a specified force, which
determines its operating point on the
force versus deflection diagram.Work
is maximized when the deflection performed permits one half the blocked
force to be developed. This occurs
when the deflection equals one half
the free deflection.
For cantilevered bending motors, X(f)
and F(b) are approximated by observing the tip deflection after energizing,
and by holding a force gauge against
the tip during energization.
Direction of
increasing voltage
Fb
V2
V1
Because mechanical stressing of the
ceramic produces an electrical
response which opposes the resultant
strain, the effective Young’s Modulus
with electrodes short circuited is
lower than with the electrodes open
circuited. In addition, the stiffness is
different in the 3 direction from that
in the 1 or 2 direction. Therefore, in
expressing such quantities both direction and electrical conditions must be
specified.YE33 is the ratio of stress to
strain in the 3 direction at constant
field E (electrodes shorted). YD33 is
the equivalent with the electrodes
open circuited.YE11 and YD11 are the
moduli in the 1 or 2 direction. YE55
and YD55 are the ratios of shear
The ratio of the mass to volume in
the material, expressed in kg/m3
Web: www.piezo.com • E-mail: [email protected]
FORCE
P IEZO S YSTEMS , I NC .
PIEZOCERAMIC
APPLICATION DATA
>
V1
Operating point
optimized to produce
maximum work
Xf
DEFLECTION
CATALOG #3, 1998
PIEZOCERAMIC
APPLICATION DATA
P IEZO S YSTEMS , I NC .
186 Massachusetts Avenue Cambridge, MA 02139 • Tel: (617) 547-1777 • Fax: (617) 354-2200 •
Web: www.piezo.com • E-mail: [email protected]
M O T O R T R A N S D U C E R R E L AT I O N S H I P S
PARALLEL EXPANSION & CONTRACTION MOTOR
∆T
–
L+ ∆L
–
+
P
T
P
+
T-∆T
+
–
W
L
Parallel Expansion
V
T+∆T
V
+
+
∆T
–
P
∆T = Vd33
–
L– ∆L
TRANSVERSE EXPANSION & CONTRACTION MOTOR
∆T
∆T
V
–
P
L+ ∆L
+
–
+
P
T
+
T-∆T
+
–
W
L
+
Transverse Expansion
–
∆L = ∆W = Vd31
L
W
T
V
T+∆T
–
P
L– ∆L
SHEAR MOTOR
∆x
–
–
V
–
+
+
P
+
–
P
+
V
–
+
P
X = Vd15
∆x
BENDING MOTOR
+
V
+
P
––
+
P
–
+
P
––
+
∆X
Series Connection
∆X
T
+
P
––
+
–
P
P
V
L
+
2
X = 2L V2 d31
T
–
Parallel Connection
V
+
+
– P
+
– P
–
V
+
CATALOG #3, 1998
T
+
– P
+
– P
+
– P
+
– P
L
50
2
X = 4L V2 d31
T
PIEZOCERAMIC
APPLICATION DATA
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186 Massachusetts Avenue Cambridge, MA 02139 • Tel: (617) 547-1777 • Fax: (617) 354-2200 •
Web: www.piezo.com • E-mail: [email protected]
G E N E R AT O R T R A N S D U C E R R E L AT I O N S H I P S
PARALLEL COMPRESSION OR TENSION GENERATOR
F
+
+
P
–
+
P
–
T
+
Q or V
–
F
L
W
–
–
Q or V
+
P
Q
=
Fd33
V
T
=
Fg33
LW
TRANSVERSE COMPRESSION OR TENSION GENERATOR
+
–
F
P
+
+
P
–
T
–
Q or V
+
L
W
–
F
P
+
Q or V
–
Q
=
LW
F d31
TW
V
T
=
F g31
TW
Q
=
Fd15
V
T
=
F g15
LW
Q
=
LW
F d15
TW
PARALLEL SHEAR GENERATOR
F
–
–
+
P
–
+
T
+
Q or V
–
P
L
W
–
Q or V
+
+
P
F
TRANSVERSE SHEAR GENERATOR
F
–
–
+
P
–
+
P
T
+
Q or V
–
L
W
+
P
–
Q or V
+
V
T
=
F g15
TW
F
BENDING GENERATOR
Series
Connection
F
W
T
+
P
––
+
P
+
Q or V
–
2
Q = 3FL 2 d31
2T
L
V =
Parallel
Connection
F
+
– P
+
– P
3FL g31
2WT
51
+
Q or V
–
2
Q = 3FL2 d31
T
V =
3FL g31
4WT
CATALOG #3, 1998
PIEZOCERAMIC
APPLICATION DATA
P IEZO S YSTEMS , I NC .
186 Massachusetts Avenue Cambridge, MA 02139 • Tel: (617) 547-1777 • Fax: (617) 354-2200 •
Web: www.piezo.com • E-mail: [email protected]
T Y P I C A L T H E R M A L P R O P E RT I E S O F P I E Z O C E R A M I C
Percent Deviation g31
Percent Deviation d31
75
50
5H
25
0
-20
5A
5A
0
-40
5H
-60
-25
-100
-50
0
50
100
150
200
-100
250
-50
0
50
100
150
200
250
Temperature (C)
Temperature (C)
5H
100
Percent Deviation
Mechanical Q
Percent Deviation
Relative Dielectric Constant (K)
300
200
100
50
5A
0
5A
5H
0
-50
-100
-100
-100
-50
0
50
100
150
200
-100
250
0
50
100
Temperature (C)
Temperature (C)
CATALOG #3, 1998
-50
52
150
200
250