FMD2 1. ...................................................................................................... 1-1 2. ................................................................................................ 2-1 2.1 2.2 2.3 2.4 3. .................................................................................................... 3-1 3.1 3.2 3.3 3.4 4. ................................................................................. 4 - 1 ............................................................................................. 4 - 5 ....................................................................................... 4 - 5 ........................................................................................... 4 - 6 ....................................................................................................... 4 - 7 ...................................................................................................... 4-9 .......................................................................... 4-9 .................................................................................... 4-10 FMG ...................................................................... 4-11 .................................................................................................... 4-12 ................................................................................................... 5-1 5.1 5.2 INF-TN1 FMD2 ........................................................................................................ 3 - 1 ................................................................................ 3 - 4 ........................................................................................................ 3 - 5 .................................................................................................... 3 - 6 .................................................................................................... 4-1 4.1 4.2 4.2.1 4.2.2 4.2.3 4.3 4.3.1 4.3.2 4.3.3 4.3.4 5. ......................................................................................... 2 - 1 ................................................................................................. 2 - 2 ............................................................................. 2 - 2 ..................................................................... 2 - 2 ................................................................................................... 5 - 1 ........................................................................................................... 5 - 1 i 1. 1. FMD2 (1) (2) INF-TN1 FMD2 1-1 1. (3) (a) (b) (c) (d) (e) (f) 1-2 INF-TN1 FMD2 1. INF-TN1 FMD2 1-3 2. 2. , , , , , , 2.1 3.1 (L H) (FMG) (TYPE) (SER.NO.) 2.1 INF-TN1 FMD2 2-1 2. 2.2 , (1) 1 (2) IDF , 1 2.3 , (1) , , , (2) , (a) (b) (c) , ( (25 (d) : (e) : 5 30 , 65% ) ) 60 80%RH ( , ) 2.4 , (1) , , (2) , , , 2-2 INF-TN1 FMD2 3. 3. 3.1 JIS C0920 : ( ) : ( 2.5Y8.4/1.2 : ( (1) 0.6GY3.1/2.0 ) / SUS PFA (2) SUS316L (3) (4) SUS304 INF-TN1 FMD2 3-1 ) 3. JIS G 1/2 (PF 1/2 ) ANSI 1/2 NPT DIN Pg13.5 3 ( 3-2 (100 ) ) : INF-TN1 FMD2 3. : ( ) 28W (FMG ) , INF-TN1 FMD2 3-3 3. 3.2 1 2 3 4 5 6 7 8 9 10 11 12 13 1 - F MD YY 2 2 4 5 8 1 25mm 40mm 50mm 80mm 100mm FPA P C IDF SUS316L W G1/2 1/2NPT Pg13.5 M20 1 J A D M 0 2 3 1 8 120 3-4 INF-TN1 FMD2 3. 3.3 1/2 NPT , ( ANSI,DIN G 1/2 ) SUS304 120 INF-TN1 FMD2 3-5 3. 3.4 25mm 100mm A φ86 (M4) 48 108 36 H φD H1 φD1 H2 L2 1.7 1.7 L2 L 3-6 INF-TN1 FMD2 4. 4. 4.1 1 2 3 4.1.1 INF-TN1 FMD2 4-1 4. 4 ( ) ( ) 4.1.2 5 6 7 ( ( ) ( ) ) h ( ) h>0 h h>0 4.1.3 4-2 INF-TN1 FMD2 4. ( ) ( ) ( ) 4.1.4 4.1.5 INF-TN1 FMD2 4-3 4. 8 4-4 INF-TN1 FMD2 4. 4.2 4.2.1 1 2 3 INF-TN1 FMD2 4-5 4. 4 : : 4.2.2 (1) (2) 4-6 INF-TN1 FMD2 4. 4.2.3 (a) 4.2.1 (b) IDF 4.2.2 INF-TN1 FMD2 4-7 4. (C) 4.2.3 IDF 4-8 INF-TN1 FMD2 4. 4.3 , ( ) , , , 4.3.1 , INF-TN1 FMD2 4-9 4. 4.3.2 (1) (2 2 , 10.5mm) 4.3.1 (2) ( CVV JIS C3401 10.5, 1.25 2mm 2 CVV JIS 3312) 4.3.2 4-10 INF-TN1 FMD2 4. 4.3.3 FMG C SA A B SB EX1 EX2 A EX1 B SA A B SB C EX1 C EX1 EX2 EX2 A B EX2 C 4.3.3 INF-TN1 FMD2 4-11 4. 4.3.4 (1) G 1/2 (PF 1/2 ) (2) 4.3.4 4-12 INF-TN1 FMD2 3. 5. 5.1 (1) (2) (3) : 1 / : 2 / 5.2 , , COIL OPEN (1) EX1 , EX2 , 150 (2) , INF-TN1 FMD2 , 5-1