HME Series Amplified pressure sensors FEATURES · 100 mbar to 10 bar, 1 to 150 psi, gage or differential pressure · Increased media compatibility1 · Digital SPI bus output · Precision ASIC signal conditioning · Calibrated and temperature compensated2 · DIP housings · RoHS compliant · Quality Management System according to ISO 13485:2003 and ISO 9001:2008 MEDIA COMPATIBILITY1,2 High pressure port: To be used with gases and liquids which are compatible with the wetted materials (high temperature polyamide, ceramic AL2O3, epoxy, fluorosilicone, glass, silicon). Low pressure port: To be used with non-corrosive, non-ionic working fluids such as clean dry air, dry gases and the like. SPECIFICATIONS Maximum ratings Supply voltage VS HME...3 HME...5 Output current Sink Source Environmental Temperature ranges Compensated Operating Storage3 Humidity limits (non-condensing) ELECTRICAL CONNECTION 2.7 ... 4.2 VDC 4.2 ... 5.5 VDC max. 6.5 VDC 1 mA 1 mA -20 ... +85 °C -20 ... +85 °C -40 ... +125 °C ...95 %RH10 max. 10 g, 10...2000 Hz, random (EN 60068-2-64) Mechanical shock max. 50 g, 11 ms (EN 60068-2-27) Lead solder temperature max. 270 °C (JESD22-B106D) E / 11814 / B 1 3 4 (100 % condensing or direct liquid media on high pressure port1) Vibration +Vs HME 5 6 2 8 C MISO CLK SS MOSI GND 100 nF 100 nF 1/9 www.first-sensor.com www.sensortechnics.com HME Series Amplified pressure sensors PRESSURE SENSOR CHARACTERISTICS (TA=25 °C, RH=50 %) Part no. Proof pressure4 Operating pressure HMEM100U... HMEM100B... HMEM250U... HMEM250B... HMEB001U... HMEB001B... HMEB2x5U... HMEB005U... HMEB010U... HMEP001U... HMEP001B... HMEP100U... 0...100 mbar 0...±100 mbar 0...250 mbar 0...±250 mbar 0...1 bar 0...±1 bar 0...2.5 bar 0...5 bar 0...10 bar 0...1 psi 0...±1 psi 0...100 psi 2 bar 2 bar 2 bar 2 bar 5 bar 5 bar 10 bar 14 bar 14 bar 3 0 p si 3 0 p si 2 0 0 p si Other pressure ranges (e.g. 500 mbar, 5 psi, 150 psi) are available on request. Please contact First Sensor. PERFORMANCE CHARACTERISTICS2 (TA=25 °C, RH=50 %, for HME...3 devices (VS=3.0 VDC) digital output signal is non-ratiometric to VS in the range of VS =2.7...4.2 V, for HME...5 devices (VS=5.0 VDC) digital output signal is non-ratiometric to VS in the range of VS =4.2...5.5 V) Characteristics Non-linearity (-20...85 °C)6 Accuracy7 Total accuracy (-20...85 °C)8 Response delay9 A/D resolution Current consumption Min. Typ. Max. ±0.25 ±0.25 ±1.5 0.5 12 4.5 5.3 HME...3 HME...5 Units %FSS ms bi t mA All HME...U... (unidirectional devices) Characteristics Zero pressure offset Full scale span (FSS)5 Full scale output Min. 2595 29595 Typ. 3000 27000 30000 Max. 3405 Units counts 30405 All HME...B... (bidirectional devices) Characteristics Zero pressure offset Full scale span (FSS)5 Output at max. specified pressure at min. specified pressure E / 11814 / B Min. 16095 29595 2595 Typ. 16500 27000 30000 3000 Max. 16905 30405 3405 Units counts 2/9 www.first-sensor.com www.sensortechnics.com HME Series Amplified pressure sensors SPI - SERIAL PERIPHERAL INTERFACE In general the HME series supports all combinations of clock phase (CPHA) and polarity (CPOL). By default it is programmed to CPHA = 0 and CPOL = 0, which means that data transmission starts with the rising first clock edge (see Fig 1). Introduction The HME is capable to generate a digital output signal. The device runs a cyclic program, which will store a corrected sensor value with 12 bit resolution about every 500 µs within the output registers of the internal ASIC. This cyclic program runs independent from the bus communication. In order to use the pressure sensor for digital signal readout, it should be connected to a SPI Master device. Slave select The falling edge of the SS line indicates the beginning of the transfer. Additionally the SS line must not be negated and reasserted between the three bytes to be transmitted. SPI specifies four signals: The clock (CLK) is generated by the master and input to all slaves. MOSI carries data from master to slave. MISO carries data from slave back to master. A slave select line (SS) allows individual selection of a slave device. Data operation The MOSI line should always be set to high level. So there is no data transmission from master to slave. Because of internal configuration the slave will answer the first byte with an FFxh. The second and third byte contain the 15 bit pressure information (see Fig. 2). SPI Modes A pair of parameters called clock polarity (CPOL) and clock phase (CPHA) determine the edges of the clock signal on which the data are driven and sampled. Each of the two parameters has two possible states, which allows for four possible combinations, all of which are incompatible with one another. SCK cycle 1 2 3 For further information please refer to First Sensor's SPI bus application note 4 5 6 7 8 SCK (CPOL=0) MOSI MSB MISO LSB MSB LSB SS Sampling Fig. 1: Example of a standard 1 byte SPI data transfer for CPHA=0 and CPOL=0 Data Byte 1 Data Byte 2 1 1 1 1 1 Data Byte 3 MOSI 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 MISO X X X X X X X X X P14 P13 P12 P11 P10 P9 P8 P7 P6 P5 P4 P3 P2 P1 P0 Relevant data Fig. 2: 3 byte data stream between HME sensor and master containing the pressure value as a 15 bit information E / 11814 / B 3/9 www.first-sensor.com www.sensortechnics.com HME Series Amplified pressure sensors SPI - SERIAL PERIPHERAL INTERFACE (cont.) Interface parameters Parameter Symbol Min. Typ. Max. Input high level 90 100 Input low level 0 10 Output low level Unit % of V s 10 Pull-up resistor 1 5 Load capacitance @ MISO CMISO 400 Input capacitance @ each pin CSPI_IN 10 fSCK 100* MISO hold time after SCK sample slope tSPI_HD_MISO 200 MOSI setup time before SCK sample slope tSPI_SU_MOSI 2/fCLK tSPI_SU_SS 10 tSPI_HD_SS 1/fCLK Signal clock frequency /SS setup time before SCK sample slope /SS hold time after SCK sample slope * recommended 640 kΩ pF kHz ns ns Note: First Sensor recommends communication speeds of at least 100 kHz (max. 640 kHz). Please contact us for further information. t t SPI_SU_SS SPI_HD_SS t SPI_SU_MOSI t SCK (CPOL=0) SPI_HD_MISO MOSI MISO SS Fig. 3: Timing characteristics E / 11814 / B 4/9 www.first-sensor.com www.sensortechnics.com HME Series Amplified pressure sensors PHYSICAL DIMENSIONS AND ELECTRICAL CONNECTION HME...W1... (DIP, axial no ports) 5 4 6 3 7 2 8 1 Pin Connection 1 +Vs 2 GND 3 C 4 MISO 5 C LK 6 SS 7 I / C* 8 MOSI * Internal connection. Do not connect for any reason first angle projection High pressure E / 11814 / B dimensions in mm 5/9 www.first-sensor.com www.sensortechnics.com HME Series Amplified pressure sensors PHYSICAL DIMENSIONS AND ELECTRICAL CONNECTION (cont.) HME...Z7... (DIP, 1 port axial, barbed) 5 4 6 3 7 2 8 1 Pin Connection 1 +Vs 2 GND 3 C 4 MISO 5 C LK 6 SS 7 I / C* 8 MOSI * Internal connection. Do not connect for any reason High pressure port first angle projection dimensions in mm E / 11814 / B 6/9 www.first-sensor.com www.sensortechnics.com HME Series Amplified pressure sensors PHYSICAL DIMENSIONS AND ELECTRICAL CONNECTION (cont.) HME...Z6... (DIP, 1 port axial, straight big) 5 4 6 3 7 2 8 1 Pin Connection 1 +Vs 2 GND 3 C 4 MISO 5 C LK 6 SS 7 I / C* 8 MOSI * Internal connection. Do not connect for any reason High pressure port first angle projection dimensions in mm E / 11814 / B 7/9 www.first-sensor.com www.sensortechnics.com HME Series Amplified pressure sensors PHYSICAL DIMENSIONS AND ELECTRICAL CONNECTION (cont.) HME...Z5... (DIP, 1 port axial, needle big) 5 4 6 3 7 2 8 1 High pressure port Pin Connection 1 +Vs 2 GND 3 C 4 MISO 5 C LK 6 SS 7 I / C* 8 MOSI * Internal connection. Do not connect for any reason dimensions in mm E / 11814 / B 8/9 www.first-sensor.com www.sensortechnics.com HME Series Amplified pressure sensors Specification notes: 1. All wetted materials are selected to give a high level of media compatibility. Media compatibility refers to media inside the pressure port and lid. Improved media compatibility on high pressure port (backward side of sensor chip) since media has no contact to electronic components. Nevertheless tests with the media used in the specific application are recommended. 2. Sensor is calibrated in air, changes in sensor behaviour based on physical effects caused by the specific media can occur. Weight of the media and wetting forces can influence the sensor characteristics. 3. Storage temperature of the sensor without package. 4. Proof pressure is the maximum pressure which may be applied without causing durable shifts of the electrical parameters of the sensing element. 5. Full Scale Span (FSS) is the algebraic difference between the output signal for the highest and lowest specified pressure. 6. Non-linearity is the measured deviation based on Best Fit Straight Line (BFSL). 7. Accuracy is the combined error from non-linearity and hysteresis. Hysteresis is the maximum output difference at any point within the operating pressure range for increasing and decreasing pressure. 8. Total accuracy is the combined error from offset and span calibration, non-linearity, pressure hysteresis, and temperature effects. Calibration errors include the deviation of offset and full scale from nominal values. 9. Max. delay time between pressure change at the pressure die and signal change at the output. 10. Tested 1h, up to 85 °C. Sensors are electronic components and should be handled only in ESD save environments. NOMENCLATURE Series Pressure range Options HME Calibration M100 100 mbar B Bidirectional M250 250 mbar U Unidirectional B 001 1 bar B 2x5 2.5 bar B 005 5 bar B 010 10 bar P 001 1 p si P 100 1 0 0 p si Housing Porting (W) DIP, 2 ports axial opposite side Z DIP, 1 port axial (1) no port Grade Voltage H High (3) 3 V 5 5V 7 Barbed (5) Needle big (6) Straight big ( ) available on request. Please contact First Sensor. Example: HME M100 U Z 7 H 5 LABEL INFORMATION Digit 1 2 3 4 Series C h ar 5 Pressure range M E - HME 6 1 p si 7 100 mbar 8 250 mbar A 1 bar B 2.5 bar C 5 bar L 1 0 0 p si M 10 bar 6 7 8 Pressure unit / Housing Porting pressure mode / calibration U bar, W DIP, 1 no port gage/differential, 2 ports axial unidirectional opposite side 7 Barbed B bar, Z DIP, 5 Needle big gage/differential, 1 port axial 6 Straight big bidirectional 9 10 11 12 13 14 Grade/ voltage Production code - High, 5 V / High, 3 V First Sensor reserves the right to make changes to any products herein. First Sensor does not assume any liability arising out of the application or use of any product or circuit described herein, neither does it convey any license under its patent rights nor the rights of others. E / 11814 / B 9/9 www.first-sensor.com www.sensortechnics.com