D6F-W MEMS Flow Sensor A Compact Sensor That Uses OMRON’s Unique Flow Path Structure for High-performance Flow Rate Measurement. • Anti-dust performance enhanced by OMRON’s unique three-dimensional flow path structure. • High accuracy of ±5% FS. RoHS Compliant Refer to the Common Precautions for the D6F Series on page 40. Ordering Information Output Voltage Characteristics MEMS Flow Sensor D6F-W01A1 0 to 1 m/s Air Model D6F-W01A1 0 to 4 m/s D6F-W04A1 0 to 10 m/s D6F-W10A1 Type Model Cable D6F-W CABLE 6.0 5.0 5.0 4.0 3.0 2.0 1.0 0.0 0.00 Accessory (Sold separately) D6F-W04A1 6.0 Output voltage (V) Flow rate range Output voltage (V) Applicable fluid 4.0 3.0 2.0 1.0 0.0 0.25 0.50 0.75 Flow velocity (m/s) 0.0 1.00 1.0 2.0 3.0 Flow velocity (m/s) 4.0 D6F-W10A1 6.0 Output voltage (V) 5.0 Connections D6F-W01A1 D6F-W04A1 D6F-W10A1 2. Vout. 4.0 3.0 2.0 1.0 0.0 0 3. GND. 2 4 6 Flow velocity (m/s) Output voltage V Pin No. 1: Vcc 2: Vout Enlarged View 3: GND Connector S3B-ZR-SM2-TF (made by J.S.T. Mfg. Co.) Use the following connectors from J.S.T. Mfg. Co. Ltd. to connect the D6F: Housing: ZHR-3 10 D6F-W01A1 Flow velocity m/s 1. Vcc. 8 0 1.00±0.2 0.25 0.50 1.35±0.2 0.75 2.01±0.2 3.27±0.2 1.00 5.00±0.2 D6F-W04A1 Flow velocity m/s Output voltage V 0 1.00±0.2 1.0 2.0 1.58±0.2 3.0 2.88±0.2 4.11±0.2 4.0 5.00±0.2 The flow velocity is the value calculated from the mass flow rate in OMRON’s specified 48-mm-dia. wind tunnel. It does not indicate the flow velocity determined by the Measurement Law of Japan. The wind tunnel conditions are shown in Figure 1, below. Flow velocity measurement position Figure 1: Wind Tunnel Air volume sensor Contacts: SZH-002T-P0.5 Wires: AWG28 to AWG26 Or Contacts: SZH-003T-P0.5 Wires: AWG32 to AWG28 48 dia. 20.8 60 Measurement conditions: Power supply voltage of 12 VDC, ambient temperature of 25°C, and ambient humidity of 35% to 75%. D6F-W10A1 Flow velocity m/s Output voltage V 0 2.0 4.0 6.0 8.0 10.0 1.00±0.24 1.94±0.24 3.23±0.24 4.25±0.24 4.73±0.24 5.00±0.24 The flow velocity is the value calculated from the mass flow rate in OMRON’s specified 155-mm-dia. wind tunnel. It does not indicate the flow velocity determined by the Measurement Law of Japan. The wind tunnel conditions are shown in Figure 2, below. Figure 2: Wind Tunnel Air volume sensor Honeycomb flow grate 155 dia. 18 Flow velocity measurement position 10 100 Measurement conditions: Power supply voltage of 12 VDC and ambient temperature of 25°C 31 D6F-W MEMS Flow Sensor Characteristics/Performance Model D6F-W01A1 Flow Range (See note 1.) 0 to 1 m/s Calibration Gas (See note 2.) Air Electrical Connection Three-pin connector D6F-W04A1 D6F-W10A1 0 to 4 m/s 0 to 10 m/s Power Supply 10.8 to 26.4 VDC Current Consumption 15 mA max. with no load, with a Vcc of 12 to 24 VDC, and at 25°C Output Voltage 1 to 5 VDC (non-linear output, load resistance of 10 kΩ) Accuracy ±5% FS (25°C characteristic) Repeatability (See note 3.) ±0.4% FS Output Voltage (Max.) 5.7 VDC (Load resistance: 10 kΩ) Output Voltage (Min.) 0 VDC (Load resistance: 10 kΩ) Rated Power Supply Voltage 26.4 VDC ±6% FS (25°C characteristic) Rated Output Voltage 6 VDC Case PPS Degree of Protection IEC IP40 (except for flow inlet and outlet) Operating Temperature (See note 4.) −10 to 60°C Operating Humidity (See note 4.) 35% to 85% Storage Temperature (See note 4.) −40 to 80°C Storage Humidity (See note 4.) 35% to 85% Temperature Characteristics ±5% FS for 25°C characteristic at an ambient temperature of −10 to 60°C Insulation Resistance Between Sensor outer cover and lead terminals: 20 MΩ min. (at 500 VDC) Dielectric Strength Between Sensor outer cover and lead terminals: 500 VAC, 50/60 Hz min. for 1 min (leakage current: 1 mA max.) Weight 6.3 g Note: 1. Note: 2. Note: 3. Note: 4. Volumetric flow rate at 25°C, 101.3 kPa. Dry gas. (must not contain large particles, e.g., dust, oil, or mist.) Reference (typical) With no condensation or icing. Dimensions (Unit: mm) ● MEMS Flow Sensors D6F-W01A1 D6F-W04A1 D6F-W10A1 9 Mounting Hole Dimensions 20 3.2±0.2 1.2 2.6 8 Two, R: 1.6 2.6 1.2 R4 Two, M3 screws 8 4.2±0.2 Flow inlet Flow outlet MADE IN JAPAN 19.5 Flow outlet 2 dia., Depth: 2.5 4 7 R4 3.2 ±0.2 dia. Lot number label ● Cable (Optional) D6F-W CABLE 5±1 GND: Blue Vout: Black 15±3 32 30.5±0.05 5 39 24 5 30.5±0.2 30±10 100±10 50±10 Vcc: Brown