MEMS Flow Sensors D6F series Catalog

MEMS Flow Sensors
D6F series
Series Catalog
Faster and more accurate than ever before
MEMS flow sensor : the ideal means for mass flow measurement
Omron flow sensor
so precise
even the flap of a butterfly’s
wings will not be missed.
Realizing a highly accurate flow measurement,
Omron’s MEMS flow sensor accurately detects minute airflow so much as a single flap of a butterfly’s wings.
A gas flow sensor capable of “measuring mass flow” independent of temperature and pressure.
D6F-A6/-N6
D6F-W
Mass Flow Measurement
Q1 There are two balloons; each having different volumes.
But these balloons have the same mass. Why is that?
A The volume increases/decreases according to the pressure and
temperature changes. The mass, on the other hand,
remains constant regardless of the environmental changes.
The mass flow measurement allows measurement performance
that is not affected by the changes in the environment.
Q2 Why is mass flow measurement required?
A An accurate measurement of the flow is required especially for
combustion control. Omron’s flow sensor enables measuring the
gas flow based on the mass flow measurement.
2
Principles of MEMS Flow
D6F Series
No airflow
Temperature distribution
Heater
Thermopile A
Thermopile B
Cross-sectional view of flow sensor chip
During the absence of airflow, the temperature
distribution around the heater is symmetrical.
When there is airflow, the temperature of the
upwind side cools down and the temperature
of the downwind side warms up, disrupting the
symmetry of the temperature distribution.
sensing even a single flap of a butterfly’s wings
Operating
characteristic
Error
Output voltage (V)
Standard lower limit
-4%
-6%
0
4
6
Magnified
5
view 1.04
4
3
1.02
2
1
1.00
0
-0.2 0.0 0.2 0.4 0.6 0.8 1.0
Flow rate(SLM)
Flow rate of 1L: Output corresponding to flow rate change below 1/1000 of full scale.
Compact
0%
-2%
Ambient temperature = 25degC (Model: D6F-20A7D-000-0)
High
Sensitivity
Standard upper limit
2%
Output voltage (V)
Omron’s unique MEMS
technology allows
detection of very low
air velocities
4%
Output voltage (V)
High
Accuracy
±3RD (25-100%F.S.) is realized by
linear temperature correction using
ASIC technology
6%
1SLM =1000sccm
8
12
Flow rate (L/min)
16
20
Output voltage characteristic
0.98
0.96
-3.2
-1.6
0.0
1.6
Flow rate (sccm)
3.2
The product size is reduced by using the
world-smallest class size MEMS sensor element
Dimension of D6F-V model: 24x8x14mm.
Sensor Measurement
Energy
saving
Airflow
Upwind
Flow of gas
Downwind
Cross-sectional view of flow sensor chip
By detecting this temperature difference appearing as a
difference in the electromotive forces developed by the
thermopiles, it allows the mass flow rate and mass flow
velocity to be measured without the influence of
temperature and pressure. Since the thermopile generates
the thermo-electromotive force, the power consumption is
much lower than when using the resistivity method.
Highly Resistant to Dust
Pattent
Built-in Dust Segregation System (cyclonic)
The sensor can be placed anywhere
thanks to its dust-resistant structure.
Omron’s unique design of 3D flow path
provides a high level of reliability by
separating dust particles to reduce its
effect on the sensor chip. Additionally,
Omron succeeded in reducing the
sensor size, allowing it to be used in
wider range of applications.
No.453 4 526
D6F-W/-V/-P
External flow
Centrifugal
separation
chambers
Dust vent
MEMS sensor
element
= leads the flow
of clean air in
here
Model : D6F-W
3
Applications
Omron flow sensors cover wide range of applications and can be used for different purposes.
Application Examples
Clogging
Detection
For monitoring the flow of the cooling air to
optimize the cooling efficiency and
avoid malfunctions.
Combustion
Control
Flow rate
Flow rate
Velocity
Differential
pressure
For controlling the air/
fuel ratio by accurately measuring
the mass flow rate
Differential
pressure
Fuel cell
Projector
PC
Server
Quiet, low maintenance cost
Flow
measurement
For recording the amount of air used,
detecting even the smallest leaks
Water heater
Optimizing combustion efficiency
Air volume
measurement
Flow rate
Velocity
Differential
pressure
Differential
pressure
Anesthesia apparatus
Oxygen concentrator
Ducts
20
Mounting machine
Flow visualization, real-time detection
4
Boiler
For measuring flow rate and
flow velocity of a space
Airflow analysis
(environment)
eco
Air conditioner
Monitoring the amount of ventilation,
controlling the amount of air at the required level
Selection of Products
Select the most suitable sensor from many variations.
Flow rate
Combustible gas
D6F-N2/-L2
D6F-N6/-N7/-L7
Natural gas, LP gas
Types of gas
Medical gas
D6F-A5/-A6/-A7/-A7D
D6F-AB71/-AB71D
O2, N2O
Air
D6F-P
N2, Air
D6F-P
(for bypass use)
D6F-A1
D6F-A3
Flow rate
1
2
3
5
10
20
50
100
Note: The pictures are representative examples of our sensors
Flow velocity
200
L / min
Differential pressure
Delivers high sensitivity even
at low flow rate, low differential pressure
Air
MEMS differential
pressure sensor
N2, Air
D6F-V
D6F-PH
High precision
Accurate measurement
Low piping effects
High impedance to reduce the influence of
piping variations
High reliability
D6F-W
Detect sensor anomaly
Flow velocity
1
2
3
4
5
10
m/ s
5
List of D6F series
MEMS Flow Sensor
Air
Minute flow
Analog
Air
Applicable gas
Items
Model
D6F-P0001A1
D6F-01A1-110
D6F-P0010A£
D6F-P0010AM2
D6F-02A1-110
D6F-03A3-000
Shape
5
4
3
Flow rate range
(L/mim)
2
1
0∼0.1L/min
0∼1L/min
25
8, 25
0∼2L/min
0∼3L/min
0
Page
Gas
Minute to middle flow
12
LP gas
Natural gas (13A)
D6F-02L2-000
D6F-02L7-000
D6F-05N2-000
D6F-05N6-000
D6F-05N7-000
Analog
Natural gas (13A)
Applicable gas
Items
8
Model
D6F-01N2-000
D6F-02N2-000
Shape
0∼5L/min
5
4
3
Flow rate range
(L/mim)
2
0∼1L/min
1
0∼2L/min
0∼2L/min
10
10, 18
0
10
Page
Air
Middle to high flow
Analog
Digital
Digital type only
Applicable gas
Items
Model
10, 16, 18
Air
D6F-10A5-000
D6F-10A6-000
D6F-10A7-000
D6F-10A7D-000
D6F-20A5-000
D6F-20A6-000
D6F-20A7D-000
D6F-30A7-000
D6F-30AB71-000
D6F-50A5-000
D6F-50A6-000
D6F-50A7D-000
D6F-70AB71-000
D6F-70AB71D-000
Shape
0∼70L/min
70
60
0∼50L/min
50
Flow rate range
(L/mim)
40
30
20
10
0∼10L/min
0∼20L/min
0∼30L/min
0
Page
6
14, 16, 18, 20
14, 16, 20
18, 23
14, 16, 20
20, 23
MEMS 2-axis flow sensor/ MEMS flow sensor
Air
Flow velocity
Analog
Digital type only
Digital
Applicable gas
Items
Air
Model
D6F-D
D6F-W01A1
D6F-V03A1
D6F-W04A1
D6F-W10A1
Shape
0∼10m/s
10
8
Flow velocity range
(m/s)
6
4
2
-1∼1m/s
0∼1m/s
35
31
0∼3m/s
0∼4m/s
33
31
0
-2
Page
31
MEMS differential pressure sensor
Air
Differential pressure
Digital
Digital type only
Applicable gas
Items
Model
Air
D6F-PH0505AD3
D6F-PH0025AD1
D6F-PH5050AD3
Shape
500
250
Differential pressure
range (Pa)
50
-50∼50Pa
0∼250Pa
-500∼500Pa
0
-50
-250
-500
Page
28
7
D6F-A1
MEMS Flow Sensor
A Compact, High-accuracy Sensor
That Measures Low Flow Rates.
• High accuracy of ±3% FS.
• Flow rates can be measured without being affected by
temperature or pressure.
RoHS Compliant
Refer to the Common Precautions for the D6F Series on page 40.
Ordering Information
Output Voltage Characteristics
MEMS Flow Sensor
D6F-01A1-110
0 to 1 L/min
Air
0 to 2 L/min
6.0
6.0
D6F-01A1-110
5.0
5.0
D6F-02A1-110
Accessory (included)
Type
Model
Cable
D6F-02A1-110
Model
D6F-CABLE1
Output voltage (V)
Flow rate range
Output voltage (V)
Applicable fluid
4.0
3.0
2.0
1.0
0.0
0.0
0.2
0.4
0.6
Flow rate (L/min)
0.8
1.0
4.0
3.0
2.0
1.0
0.0
0.0
0.4
0.8
1.2
Flow rate (L/min)
1.6
2.0
D6F-01A1-110
Connections
D6F-01A1-110
D6F-02A1-110
Pin No.
Connector
1: Vcc
2: Vout
3: GND
53398 (Made by Molex Japan)
Use the following connectors for connections to the D6F:
Housing
51021 (Made by Molex Japan)
Terminals
50079 (Made by Molex Japan)
Wires
AWG28 to AWG26
Tubes
Install tubes made of materials such as rubber or urethane so
that they will not come out.
For urethane tubes, tubes with an outer diameter of 12 mm and
an inner diameter of 8 mm are recommended.
2: Vout
1: Vcc
3: GND
Enlarged View
8
Flow rate
L/min (normal)
Output voltage
V
0
1.00
±0.12
0.2
0.4
0.6
0.8
1.0
2.31
±0.12
3.21
±0.12
3.93
±0.12
4.51
±0.12
5.00
±0.12
0.4
0.8
1.2
1.6
2.0
2.59
±0.12
3.53
±0.12
4.18
±0.12
4.65
±0.12
5.00
±0.12
D6F-02A1-110
Flow rate
L/min (normal)
Output voltage
V
0
1.00
±0.12
Measurement conditions: Power supply voltage of 12±0.1 VDC, ambient temperature of 25±5°C, and ambient humidity of 35% to 75%.
D6F-A1
MEMS Flow Sensor
Characteristics/Performance
Model
D6F-01A1-110
Flow Range (See note 1.)
D6F-02A1-110
0 to 1 L/min
0 to 2 L/min.
Calibration Gas (See note 2.)
Air
Flow Port Type
Bamboo joint
Maximum outside diameter: 8.6 mm, Minimum outside diameter: 7.4 mm
Electrical Connection
Three-pin connector
Power Supply
10.8 to 26.4 VDC
Current Consumption
15 mA max with no load, with a Vcc of 12 to 24 VDC, and at 25°C
Output Voltage
1 to 5 VDC (non-linear output, load resistance of 10 kΩ)
Accuracy
±3% FS (25°C characteristic)
Repeatability (See note 3.)
±0.3% FS
Output Voltage (Max.)
5.7 VDC (Load resistance: 10 kΩ)
Output Voltage (Min.)
0 VDC (Load resistance: 10 kΩ)
Rated Power Supply Voltage
26.4 VDC
Rated Output Voltage
6 VDC
Case
PPS
Degree of Protection
IEC IP40 (Excluding tubing sections.)
Withstand Pressure
200 kPa
Pressure Drop (See note 3.)
0.42 kPa
Operating Temperature (See note 4.)
−10 to 60°C
1.06 kPa
Operating Humidity (See note 4.)
35% to 85%
Storage Temperature (See note 4.)
−40 to 80°C
Storage Humidity (See note 4.)
35% to 85%
Temperature Characteristics
±3% FS for 25°C characteristic at an ambient temperature of −10 to 60°C
Insulation Resistance
Between Sensor outer cover and lead terminals: 20 MΩ min. (at 500 VDC)
Dielectric Strength
Between Sensor outer cover and lead terminals: 500 VAC, 50/60 Hz min. for 1 min (leakage current: 1 mA max.)
Weight
12.8 g
Note: 1.
Note: 2.
Note: 3.
Note: 4.
Volumetric flow rate at 0°C, 101.3 kPa.
Dry gas. (must not contain large particles, e.g., dust, oil, or mist.)
Reference (typical)
With no condensation or icing.
Dimensions (Unit: mm)
D6F-01A1-110
D6F-02A1-110
8.6 dia.
7.4 dia.
3.5-dia. through hole
15.1
4
Mounting Hole Dimensions
R4
Two, M3 screws
8
66
30±0.1
41
30±0.05
(3.7)
R1.75
4.5
(7.45)
9.5
28±0.05
R4.25
3.5
4
Through hole
(6)
20
28±0.1
Cable (included): D6F-CABLE1
200±35
20
100±15
Brown wire
Black wire
0.5
1. Vcc
2. Vout
4.5
6.5
Blue wire
3. GND
9
D6F-N2/-L2
MEMS Flow Sensor
A Compact, High-accuracy Sensor
That Measures Low Flow Rates.
• High accuracy of ±3% FS.
• Flow rates can be measured without being affected by
temperature or pressure.
RoHS Compliant
Refer to the Common Precautions for the D6F Series on page 40.
Ordering Information
Output Voltage Characteristics
MEMS Flow Sensor
D6F-01N2-000
Natural gas (13A)
LP gas
Model
0 to 1 L/min
D6F-01N2-000
0 to 2 L/min
D6F-02N2-000
0 to 5 L/min
D6F-05N2-000
0 to 2 L/min
D6F-02L2-000
D6F-05N2-000
6.0
6.0
5.0
5.0
Output voltage (V)
Flow rate range
Output voltage (V)
Applicable fluid
4.0
3.0
2.0
1.0
0.0
0.0
0.2
0.4
0.6
Flow rate (L/min)
0.8
4.0
3.0
2.0
1.0
0.0
0.0
1.0
1.0
2.0
3.0
Flow rate (L/min)
4.0
5.0
1.6
2.0
Accessory (included)
Cable
D6F-CABLE1
Connections
D6F-01N2-000
D6F-02N2-000
D6F-05N2-000
D6F-02L2-000
Pin No.
Connector
D6F-02N2-000
D6F-02L2-000
6.0
6.0
5.0
5.0
Output voltage (V)
Model
Output voltage (V)
Type
4.0
3.0
2.0
1.0
0.0
0.0
0.4
0.8
1.2
Flow rate (L/min)
1.6
2.0
4.0
3.0
2.0
1.0
0.0
0.0
0.4
0.8
1.2
Flow rate (L/min)
D6F-01N2-000
1: Vcc
2: Vout
3: GND
53398 (Made by Molex Japan)
Use the following connectors for connections to the D6F:
Housing
51021 (Made by Molex Japan)
Terminals
50079 (Made by Molex Japan)
Wires
AWG28 to AWG26
Flow rate
L/min (normal)
Output voltage
V
0
1.00
±0.12
0.2
0.4
0.6
0.8
1.0
1.90
±0.12
2.81
±0.12
3.64
±0.12
4.37
±0.12
5.00
±0.12
0.4
0.8
1.2
1.6
2.0
2.20
±0.12
3.20
±0.12
3.98
±0.12
4.55
±0.12
5.00
±0.12
1.0
2.0
3.0
4.0
5.0
2.91
±0.12
3.92
±0.12
4.47
±0.12
4.79
±0.12
5.00
±0.12
0.4
0.8
1.2
1.6
2.0
3.02
±0.08
3.95
±0.08
4.47
±0.08
4.79
±0.08
5.00
±0.12
D6F-02N2-000
Flow rate
L/min (normal)
Output voltage
V
0
1.00
±0.12
D6F-05N2-000
2: Vout
1: Vcc
3: GND
Flow rate
L/min (normal)
Output voltage
V
0
1.00
±0.12
D6F-02L2-000
Enlarged View
Flow rate
L/min (normal)
Output voltage
V
0
1.00
±0.30
Measurement conditions: Power supply voltage of 12±0.1 VDC, ambient temperature of 25±5°C, and ambient humidity of 35% to 75%.
10
D6F-N2/-L2
MEMS Flow Sensor
Characteristics/Performance
Model
D6F-01N2-000
Flow Range (See note 1.)
0 to 1 L/min
Calibration Gas (See note 2.)
Natural gas (13A)
Flow Port Type
Rc 1/4 thread
Electrical Connection
Three-pin connector
Power Supply
10.8 to 26.4 VDC
D6F-02N2-000
D6F-05N2-000
0 to 2 L/min.
0 to 5 L/min
Propane gas
Current Consumption
15 mA max. with no load, with a Vcc of 12 to 24 VDC, and at 25°C
Output Voltage
1 to 5 VDC (non-linear output, load resistance of 10 kΩ)
Accuracy
±3% FS (25°C characteristic)
Repeatability (See note 3.)
±0.2% FS
Output Voltage (Max.)
5.7 VDC (Load resistance: 10 kΩ)
±2% to ±7.5% F.S. (25°C
characteristic)
±0.3% FS
Output Voltage (Min.)
0 VDC (Load resistance: 10 kΩ)
Rated Power Supply Voltage
26.4 VDC
Rated Output Voltage
6 VDC
Case
Aluminum alloy
Degree of Protection
IEC IP40 (Excluding tubing sections.)
Withstand Pressure
200 kPa
Pressure Drop (See note 3.)
0.017 kPa
Operating Temperature (See note 4.)
−10 to 60°C
D6F-02L2-000
0 to 2 L/min.
0.033 kPa
0.10 kPa
0.14 kPa
Operating Humidity (See note 4.)
35% to 85%
Storage Temperature (See note 4.)
−40 to 80°C
Storage Humidity (See note 4.)
35% to 85%
Temperature Characteristics
±3% FS for 25°C characteristic at −10 to 60°C
Insulation Resistance
Between Sensor outer cover and lead terminals: 20 MΩ min. (at 500 VDC)
±4% FS for 25°C
characteristic at −10 to 60°C
Dielectric Strength
Between Sensor outer cover and lead terminals: 500 VAC, 50/60 Hz min. for 1 min (leakage current: 1 mA max.)
Weight
35.3 g
Note: 1.
Note: 2.
Note: 3.
Note: 4.
Volumetric flow rate at 0°C, 101.3 kPa.
Dry gas. (must not contain large particles, e.g., dust, oil, or mist.)
Reference (typical)
With no condensation or icing.
Dimensions (Unit: mm)
D6F-01N2-000
D6F-02N2-000
D6F-05N2-000
D6F-02L2-000
Two, M3 holes with a depth of at least 5 mm
16.2
Mounting Hole Dimensions
16.2±0.05
Two, 3.5 dia.
37
62±0.5
(3.7)
37±0.05
(6)
21.6±0.5
10
3-17
10
Cable (included): D6F-CABLE1
200±35
22.1±0.5
100±15
Brown wire
Black wire
8.85
1. Vcc
2. Vout
Two, tapped threads 0.35
for Rc 1/4 pipe
Blue wire
3. GND
11
D6F-A3
MEMS Flow Sensor
High-accuracy Sensing with a Thin,
Compact Body.
• A thin, lightweight flow sensor.
• Unique flow path structure provides high precision and fast
response.
RoHS Compliant
Refer to the Common Precautions for the D6F Series on page 40.
Ordering Information
Output Voltage Characteristics
MEMS Flow Sensor
D6F-03A3-000
Flow rate range
Air
0 to 3 L/min
Model
D6F-03A3-000
Accessory (Sold separately)
Type
Model
Cable
D6F-CABLE2
6.0
5.0
Output voltage (V)
Applicable fluid
4.0
3.0
2.0
1.0
0.0
0.0
0.6
1.2
1.8
Flow rate (L/min)
2.4
3.0
D6F-03A3-000
Connections
D6F-03A3-000
1: GND
Output voltage
V
2: Vout
3: Vcc
Enlarged View
Pin No.
1: GND
2: Vout
3: Vcc
Connector
SM03B-SRSS-TB (Made by J.S.T. Mfg. Co.)
Use the following connectors made by J.S.T. Mfg. Co. for
connections to the Sensor:
• Pressure-welded Connector
Socket: 03SR-3S
Wires: AWG30
Or
• Crimp Connector
Contacts: SSH-003T-P0.2
Housing: SHR-03V-S or SHR-03V-S-B
Wires: AWG32 to AWG28
12
Flow rate
L/min (normal)
0
1.00
±0.2
0.6
2.83
±0.2
1.2
3.77
±0.2
1.8
4.34
±0.2
2.4
4.72
±0.2
3.0
5.00
±0.2
Measurement conditions: Power supply voltage of 12±0.1 VDC, ambient
temperature of 25±5°C, and ambient humidity of 35% to 75%.
D6F-A3
MEMS Flow Sensor
Characteristics/Performance
Model
D6F-03A3-000
Flow Range (See note 1.)
0 to 3 L/min
Calibration Gas (See note 2.)
Air
Flow Port Type
M5 thread
Electrical Connection
Three-pin connector
Power Supply
10.8 to 26.4 VDC
Current Consumption
15 mA max. with no load, with a Vcc of 12 to 24 VDC, and at 25°C
Output Voltage
1 to 5 VDC (non-linear output, load resistance of 10 kΩ)
Accuracy
±5% FS (25°C characteristic)
Repeatability (See note 3.)
±0.7% FS
Output Voltage (Max.)
5.7 VDC (Load resistance: 10 kΩ)
Output Voltage (Min.)
0 VDC (Load resistance: 10 kΩ)
Rated Power Supply Voltage
26.4 VDC
Rated Output Voltage
6 VDC
Case
PPS
Degree of Protection
IEC IP40 (Excluding tubing sections.)
Withstand Pressure
200 kPa
Pressure Drop (See note 3.)
0.45 kPa
Operating Temperature (See note 4.)
0 to 50°C
Operating Humidity (See note 4.)
35% to 85%
Storage Temperature (See note 4.)
−10 to 60°C
Storage Humidity (See note 4.)
35% to 85%
Temperature Characteristics
±5% FS for 25°C characteristic at an ambient temperature of 0 to 50°C
Insulation Resistance
Between Sensor outer cover and lead terminals: 20 MΩ min. (at 500 VDC)
Dielectric Strength
Between Sensor outer cover and lead terminals: 500 VAC, 50/60 Hz min. for 1 min (leakage current: 1 mA max.)
Weight
5.3 g
Note: 1.
Note: 2.
Note: 3.
Note: 4.
Volumetric flow rate at 0°C, 101.3 kPa.
Dry gas. (must not contain large particles, e.g., dust, oil, or mist.)
Reference (typical)
With no condensation or icing.
Dimensions (Unit: mm)
● MEMS Flow Sensors
D6F-03A3-000
Mounting Hole Dimensions
OUT side
D6F
-03A3-000
MADE IN JAPAN
IN side
8
M5 threads
(Effective thread depth: 3.1)
+0.15
Two,
18±0.05
M3 screw holes
14
16.8
3.1−0.05
6.8
3.4-dia.
3.1
18±0.15
36.6
+0.15
−0.05
dia. through hole
● Cable (Sold separately)
D6F-CABLE2
White wire
Black wire
3: GND
Red wire
180±10
1: Vcc
2: Vout
15±3
(5)
13
D6F-A5
MEMS Flow Sensor
High-accuracy Sensing with a Compact
Body for Flow Rates Up to 50 L/min.
• Accurately detects a mass flow rate of 10 to 50 L/min.
• A compact size of 30 × 78 × 30 mm (H × W × D).
RoHS Compliant
Refer to the Common Precautions for the D6F Series on page 40.
Ordering Information
Output Voltage Characteristics
MEMS Flow Sensor
D6F-10A5-000
Manifold
Air
Flow rate range
Model
0 to 10 L/min
D6F-10A5-000
0 to 20 L/min
D6F-20A5-000
0 to 50 L/min
D6F-50A5-000
Accessory (Sold separately)
Type
D6F-20A5-000
6.0
6.0
5.0
5.0
Output voltage (V)
Applicable fluid
Output voltage (V)
Flow Port Type
4.0
3.0
2.0
1.0
0.0
0.0
2.0
4.0
6.0
Flow rate (L/min)
8.0
10.0
40.0
50.0
4.0
3.0
2.0
1.0
0.0
0.0
4.0
8.0
12.0
Flow rate (L/min)
16.0
20.0
Model
Cable
D6F-CABLE1
D6F-50A5-000
6.0
D6F-10A5-000
D6F-20A5-000
D6F-50A5-000
Pin No.
Connector
1: Vcc
2: Vout
3: GND
53398 (Made by Molex Japan)
Use the following connectors for connections to the D6F:
Housing
51021 (Made by Molex Japan)
Terminals
50079 (Made by Molex Japan)
Wires
AWG28 to AWG26
1: Vcc 2: Vout 3: GND
5.0
Output voltage (V)
Connections
4.0
3.0
2.0
1.0
0.0
0.0
10.0
20.0
30.0
Flow rate (L/min)
D6F-10A5-000
Flow rate
L/min (normal)
Output voltage
V
0
1.00
±0.12
2.0
4.0
6.0
8.0
10.0
1.75
±0.12
2.60
±0.12
3.45
±0.12
4.25
±0.12
5.00
±0.12
4.0
8.0
12.0
16.0
20.0
1.93
±0.12
2.87
±0.12
3.70
±0.12
4.41
±0.12
5.00
±0.12
10
20
30
40
50
2.45
±0.12
3.51
±0.12
4.20
±0.12
4.66
±0.12
5.00
±0.12
D6F-20A5-000
Flow rate
L/min (normal)
Output voltage
V
0
1.00
±0.12
D6F-50A5-000
Enlarged View
Flow rate
L/min (normal)
Output voltage
V
0
1.00
±0.12
Measurement conditions: Power supply voltage of 12±0.1 VDC, ambient
temperature of 25±5°C, and ambient humidity of 35% to 75%.
14
D6F-A5
MEMS Flow Sensor
Characteristics/Performance
Model
D6F-10A5-000
Flow Range (See note 1.)
D6F-20A5-000
0 to 10 L/min
0 to 20 L/min
Calibration Gas (See note 2.)
Air
Flow Port Type
Manifold
Electrical Connection
Three-pin connector
Power Supply
10.8 to 26.4 VDC
Current Consumption
15 mA max. with no load, with a Vcc of 12 to 24 VDC, and at 25°C
Output Voltage
1 to 5 VDC (non-linear output, load resistance of 10 kΩ)
Accuracy
±3% FS (25°C characteristic)
Repeatability (See note 3.)
±0.3% FS
Output Voltage (Max.)
5.7 VDC (Load resistance: 10 kΩ)
Output Voltage (Min.)
0 VDC (Load resistance: 10 kΩ)
Rated Power Supply Voltage
26.4 VDC
Rated Output Voltage
6 VDC
Case
PPS/aluminum alloy
Degree of Protection
IEC IP40 (Excluding tubing sections.)
Withstand Pressure
500 kPa
Pressure Drop (See note 3.)
0.8 kPa
Operating Temperature (See note 4.)
−10 to 60°C
2.9 kPa
Operating Humidity (See note 4.)
35% to 85%
Storage Temperature (See note 4.)
−30 to 80°C
Storage Humidity (See note 4.)
35% to 85%
Temperature Characteristics
±3% FS for 25°C characteristic at an ambient temperature of −10 to 60°C
Insulation Resistance
Between Sensor outer cover and lead terminals: 20 MΩ min. (at 500 VDC)
D6F-50A5-000
0 to 50 L/min
17.2 kPa
Dielectric Strength
Between Sensor outer cover and lead terminals: 500 VAC, 50/60 Hz min. for 1 min (leakage current: 1 mA max.)
Weight
103 g
Note: 1.
Note: 2.
Note: 3.
Note: 4.
Volumetric flow rate at 0°C, 101.3 kPa.
Dry gas. (must not contain large particles, e.g., dust, oil, or mist.)
Reference (typical)
With no condensation or icing.
Dimensions (Unit: mm)
● MEMS Flow Sensors
D6F-10A5-000
D6F-20A5-000
D6F-50A5-000
Mounting Hole
Dimensions
Lot number label
Two, 1.4±0.1
Four, 3.2-dia. through holes
Four, M3 holes
(3.7)
78±0.5
66±0.1
66±0.05
(6)
(30.05)
Two, 5 dia.
14±0.05
6
30±0.5
30±0.5
● Cable (Sold separately)
D6F-CABLE1
200±35
100±15
Brown wire
Black wire
1. Vcc
2. Vout
Blue wire
3. GND
15
D6F-A6/-N6
MEMS Flow Sensor
High-accuracy Sensing with a Compact
Body for Flow Rates up to 50 L/min.
• Accurately detects a mass flow rate of 10 to 50 L/min.
• A compact size of 30 × 78 × 30 mm (H × W × D).
RoHS Compliant
Refer to the Common Precautions for the D6F Series on page 40.
Ordering Information
Output Voltage Characteristics
MEMS Flow Sensor
Natural gas (13A) 0 to 5 L/min
0 to 10 L/min
Rc 1/4 thread
Air
NPT 1/8 thread
NPT 1/2 thread
D6F-05N6-000
D6F-10A6-000
D6F-20A6-000
D6F-50A6-000
D6F-50A62-000
5.0
D6F-50A6-000
0 to 10 L/min
D6F-10A61-000
0 to 20 L/min
D6F-20A61-000
0 to 50 L/min
D6F-50A61-000
0 to 50 L/min
D6F-50A62-000
4.0
3.0
2.0
1.0
0.0
0.0
D6F-10A61-000
D6F-20A61-000
D6F-50A61-000
1: Vcc
2: Vout
3: GND
53398 (Made by Molex Japan)
AWG28 to AWG26
1: Vcc 2: Vout 3: GND
2.0
4.0
6.0
Flow rate (L/min)
8.0
Output voltage (V)
4.0
3.0
2.0
1.0
0.0
0.0
10.0
D6F-50A6-000
D6F-50A61-000
D6F-50A62-000
6.0
5.0
5.0
4.0
3.0
2.0
1.0
10.0
4.0
8.0
12.0
Flow rate (L/min)
16.0
20.0
4.0
5.0
D6F-05N6-000
6.0
0.0
0.0
Use the following connectors for connections to the D6F:
Housing
51021 (Made by Molex Japan)
Terminals
50079 (Made by Molex Japan)
Wires
6.0
5.0
0 to 50 L/min
Connections
Connector
6.0
D6F-20A6-000
D6F-CABLE1
D6F-20A6-000
D6F-20A61-000
D6F-05N6-000
Model
Cable
Pin No.
D6F-10A6-000
D6F-10A61-000
D6F-10A6-000
0 to 20 L/min
Accessory (Sold separately)
Type
Model
Output voltage (V)
Flow rate range
Output voltage (V)
Applicable fluid
Output voltage (V)
Flow Port Type
20.0
30.0
Flow rate (L/min)
40.0
4.0
3.0
2.0
1.0
0.0
0.0
50.0
1.0
2.0
3.0
Flow rate (L/min)
D6F-05N6-000
Flow rate
L/min (normal)
Output voltage
V
0
1.00
±0.12
1.0
2.0
3.0
4.0
5.0
1.71
±0.12
2.53
±0.12
3.40
±0.12
4.22
±0.12
5.00
±0.12
D6F-10A6-000/D6F-10A61-000
Flow rate
L/min (normal)
Output voltage
V
0
1.00
±0.12
2.0
4.0
6.0
8.0
10.0
1.75
±0.12
2.60
±0.12
3.45
±0.12
4.25
±0.12
5.00
±0.12
12
16
20
3.70
±0.12
4.41
±0.12
5.00
±0.12
D6F-20A6-000/D6F-20A61-000
Flow rate
L/min (normal)
Output voltage
V
0
1.00
±0.12
4
1.93
±0.12
8
2.87
±0.12
D6F-50A6-000/D6F-50A61-000/D6F-50A62-000
Enlarged View
Flow rate
L/min (normal)
Output voltage
V
0
1.00
±0.12
10
20
30
40
50
2.45
±0.12
3.51
±0.12
4.20
±0.12
4.66
±0.12
5.00
±0.12
Measurement conditions: Power supply voltage of 12±0.1 VDC, ambient
temperature of 25±5°C, and ambient humidity of 35% to 75%.
16
D6F-A6/-N6
MEMS Flow Sensor
Characteristics/Performance
Model
D6F-05N6-000 D6F-10A6-000 D6F-20A6-000 D6F-50A6-000 D6F-10A61-000 D6F-20A61-000 D6F-50A61-000 D6F-50A62-000
Flow Range (See note 1.)
0 to 5 L/min
0 to 10 L/min
Natural gas
Calibration Gas (See note 2.)
0 to 20 L/min
0 to 50 L/min
0 to 10 L/min
Flow Port Type
Rc 1/4 thread
Electrical Connection
Three-pin connector
10.8 to 26.4 VDC
Current Consumption
15 mA max. with no load, with a Vcc of 12 to 24 VDC, and at 25°C
Output Voltage
1 to 5 VDC (non-linear output, load resistance of 10kΩ min.)
Accuracy
±3% FS (25°C characteristic)
Repeatability (See note 3.)
±0.3% FS
Output Voltage (Max.)
5.7 VDC (Load resistance: 10 kΩ)
Output Voltage (Min.)
0 VDC (Load resistance: 10 kΩ)
Rated Power Supply Voltage
26.4 VDC
Rated Output Voltage
6 VDC
Case
PPS/aluminum alloy
Degree of Protection
IEC IP40 (Excluding tubing sections.)
Withstand Pressure
500 kPa
0.68 kPa
−10 to 60°C
Operating Humidity (See note 4.)
35% to 85%
Storage Temperature (See note 4.) −10 to 80°C
0.10 kPa
0.28 kPa
1.44 kPa
0.15 kPa
thread
0.52 kPa
2.31 kPa
2.16 kPa
−30 to 80°C
Storage Humidity (See note 4.)
35% to 85%
Temperature Characteristics
±3% FS for 25°C characteristic at an ambient temperature of −10 to 60°C
Insulation Resistance
Between Sensor outer cover and lead terminals: 20 MΩ min. (at 500 VDC)
Dielectric Strength
Between Sensor outer cover and lead terminals: 500 VAC, 50/60 Hz min. for 1 min (leakage current: 1 mA max.)
Weight
103 g
Note: 1.
Note: 2.
Note: 3.
Note: 4.
0 to 50 L/min
NPT 1/2
NPT 1/8 thread
Power Supply
Operating Temperature (See note 4.)
0 to 50 L/min
Air
(13A)
Pressure Drop (See note 3.)
0 to 20 L/min
Volumetric flow rate at 0°C, 101.3 kPa.
Dry gas. (must not contain large particles, e.g., dust, oil, or mist.)
Reference (typical)
With no condensation or icing.
Dimensions (Unit: mm)
● MEMS Flow Sensors
[Models Other Than D6F-50A62 Models]
Lot number label
12±0.2
Mounting Hole
Dimensions
[D6F-50A62]
Lot number label
12
Two, 3.2-dia. Holes
(3.7)
78±0.5
66±0.2
66±0.05
(3.7)
92
66
(6)
(6)
(30.4)
(37.05)
D6F-05N6-000
D6F-10A6-000
D6F-20A6-000
D6F-50A6-000
D6F-10A61-000
D6F-20A61-000
D6F-50A61-000
Two, tapped threads
for Rc 1/4 pipes
6
Two, M3 holes,
Effective screw depth: 4.5
12±0.05
13
Two, tapped threads
for NPT 1/2 pipes
30±0.5
Two, M3 holes,
Effective screw depth: 2.5
D6F-50A62-000
30±0.5
30±0.5
Two, tapped threads
for NPT 1/8 pipes
30±0.5
30±0.5
30±0.5
● Cable (Sold separately)
D6F-CABLE1
200±35
100±15
Brown wire
Black wire
1. Vcc
2. Vout
Blue wire
3. GND
17
D6F-A7/-L7/-N7
MEMS Flow Sensor
Reduction of Piping time by quick joint
connection
• Low -flow rate of natural gas and LP gas can be measured.
• 10 L/min and 30 L/min of Air can be measured.
• Compact size of 30 × 84.6 × 30 mm (H × W × D).
RoHS Compliant
Refer to the Common Precautions for the D6F Series on page 40.
Ordering Information
Output Voltage Characteristics
MEMS Flow Sensor
Flow rate range
Model
Natural gas (13A) 0 to 5 L/min
D6F-05N7-000
LP gas
0 to 2 L/min
D6F-02L7-000
0 to 10 L/min
D6F-10A7-000
Air
0 to 30 L/min
D6F-30A7-000
D6F-02L7-000
6.0
6.0
5.0
5.0
Output voltage (V)
Quick joint P10
D6F-05N7-000
Applicable fluid
Output voltage (V)
Flow Port Type
4.0
3.0
2.0
1.0
0.0
0.0
1.0
2.0
3.0
4.0
4.0
3.0
2.0
1.0
0.0
0.0
5.0
0.4
D6F-10A7-000
Model
Cable
D6F-CABLE1
Quick fastener
D6F-FASTENER-P10
Connections
Output voltage (V)
Type
1.2
1.6
2.0
24
30
D6F-30A7-000
6.0
6.0
5.0
5.0
Output voltage (V)
Accessories (Sold separately)
0.8
Flow rate (L/min)
Flow rate (L/min)
4.0
3.0
2.0
1.0
0.0
4.0
3.0
2.0
1.0
0.0
0
2
4
6
8
10
0
Flow rate (L/min)
6
12
18
Flow rate (L/min)
D6F-05N7-000 D6F-02L7-000
D6F-10A7-000 D6F-30A7-000
Pin No.
Connector
1: Vcc
2: Vout
3: GND
53398 (Made by Molex Japan)
Use the following connectors for connections to the D6F:
Housing
51021 (Made by Molex Japan)
Terminals
50079 (Made by Molex Japan)
Wires
AWG28 to AWG26
1:Vcc 2:Vout
3:GND
D6F-05N7-000
Flow rate
L/min (normal)
0
1.0
2.0
3.0
4.0
5.0
Output voltage
V
1.00
±0.12
1.68
±0.12
2.47
±0.12
3.31
±0.12
4.15
±0.12
5.00
±0.12
Flow rate
L/min (normal)
0
0.4
0.8
1.2
1.6
2.0
Output voltage
V
1.00
±0.12
1.96
±0.12
2.89
±0.12
3.72
±0.12
4.43
±0.12
5.00
±0.12
Flow rate
L/min (normal)
0
2.0
4.0
6.0
8.0
10.0
Output voltage
V
1.00
±0.12
1.75
±0.12
2.60
±0.12
3.45
±0.12
4.25
±0.12
5.00
±0.12
Flow rate
L/min (normal)
0
6
12
18
24
30
Output voltage
V
1.00
±0.12
2.11
±0.12
3.12
±0.12
3.91
±0.12
4.53
±0.12
5.00
±0.12
D6F-02L7-000
D6F-10A7-000
Enlarged View
D6F-30A7-000
Measurement conditions: Power-supply voltage 12±0.1 VDC, ambient temperature 25±5°C and ambient humidity 35 to 75%RH.
18
D6F-A7/-L7/-N7
MEMS Flow Sensor
Characteristics/Performance
Model
D6F-05N7-000
D6F-02L7-000
D6F-10A7-000
Flow Range (See note 1.)
0 to 5 L/min
0 to 2 L/min
0 to 10 L/min
Calibration Gas (See note 2.)
Natural gas (13A)
LP gas
Air
Flow Port Type
Quick joint P10
Electrical Connection
Three-pin connector
Power Supply
10.8 to 26.4 VDC
Current Consumption
15 mA max. with no load and Vcc of 12 to 24 VDC, GND = 0 VDC, 25°C
Output Voltage
1 to 5 VDC (non-linear output, load resistance of 10 kΩ min.)
Accuracy
±3%F.S. (25°C characteristic)
Repeatability (See note 3.)
±0.3%F.S.
Output Voltage (Max.)
5.7 VDC (Load resistance: 10 kΩ)
Output Voltage (Min.)
0 VDC (Load resistance: 10 kΩ)
Rated Power Supply Voltage
26.4 VDC
Rated Output Voltage
6 VDC
Case
PPS
Degree of Protection
IEC IP40 (Excluding tubing sections.)
Withstand Pressure
500 kPa
Pressure Drop (See note 3.)
0.06 kPa
Operating Temperature (See note 4.)
–10 to +60°C
Operating Humidity (See note 4.)
35 to 85%RH
Storage Temperature (See note 4.)
–10 to +80°C
Storage Humidity (See note 4.)
35 to 85%RH
0.03 kPa
D6F-30A7-000
0 to 30 L/min
0.32 kPa
2.19 kPa
–30 to +80°C
Temperature Characteristics
±3%F.S. for 25°C characteristic at an ambient temperature of –10 to +60°C
Insulation Resistance
Between sensor outer cover and lead terminals: 20 MΩ min. (at 500 VDC)
Dielectric Strength
Between sensor outer cover and lead terminals: 500 VAC, 50/60 Hz min. for 1 min (leakage current: 1 mA max.)
Weight
72 g
Note: 1.
Note: 2.
Note: 3.
Note: 4.
Volumetric flow rate at 0°C, 101.3 kPa.
Dry gas (must not contain large particles, e.g., dust, oil, or mist.)
Reference (typical)
With no condensation or icing.
Dimensions (Unit: mm)
● MEMS Flow Sensors
Note.
D6F-05N7-000
D6F-02L7-000
D6F-10A7-000
D6F-30A7-000
The Port type of pipe fitting based on “Quick Joint P10 Type”.
* P10 shows the name of an O-ring prescribed by JIS B 2401.
* The port of O-ring ditch is based on P10 of JIS B 2406.
● Quick fastener (Sold separately)
D6F-FASTENER-P10
Return direction
Rolling direction
16.5±2
11.5±1
A
Lot No. Display
3.3
1
A
4-R1.5
2-R2
R8.5
R8.5
14
64.5
84.6±0.5
66.6
60.6
1
11
2-R2
(3.7)
8-R2.5
“10” is engraved
here.
(6)
6±0.15
3
(33.4)
12±0.15
30°
20 dia.
17 dia.
13 +0.1
-0.05 dia.
30±0.5
Note
30±0.5
8±0.3
3±0.15
15±1
2-R1
t=0.8±0.04
0.9
C0.5 (circumference)
R2 (circumference)
C0.5 (circumference)
6±0.3
3±0.15
CROSS A-A
● Cable (Sold separately)
D6F-CABLE1
200±35
100±15
Brown wire
Black wire
1. Vcc
2. Vout
Blue wire
3. GND
19
D6F-A7D/-AB71D
MEMS Flow Sensor
Digital Compensation for High
Accuracy
• Temperature compensation and linear compensation produce
high accuracy (±3% RD (25% to 100% FS)).
• Compact models for 10 to 70 L/min.
• Reduced piping work with quick-fastening feature.
RoHS Compliant
Refer to the Common Precautions for the D6F Series on page 40.
Ordering Information
Output Characteristics
MEMS Flow Sensor
D6F-10A7D-000-0
Quick joint P10
Air
Quick joint P14
Flow rate range
Model
0 to 10 L/min
D6F-10A7D-000-0
0 to 20 L/min
D6F-20A7D-000-0
0 to 50 L/min
D6F-50A7D-000-0
0 to 70 L/min
D6F-70AB71D-000-0
70000
60000
60000
50000
40000
30000
20000
10000
0
Quick fastener
D6F-FASTENER-P10
Connections
Connector
30000
20000
10
0
5
10
15
20
Flow rate (L/min)
D6F-70AB71D-000-0
50000
60000
50000
40000
30000
20000
40000
30000
20000
10000
0
10
20
30
40
0
50
10
20
30
40
50
60
70
Flow rate (L/min)
Flow rate (L/min)
D6F-10A7D-000-0
Use the following connectors for connections to the D6F:
Housing
GHR-04V-S (made by J.S.T. Mfg. Co.)
Terminals
SSHL-002T-P0.2 (made by J.S.T. Mfg. Co.)
Wires
AWG26 to AWG30
3: SCL
8
70000
0
1: Vcc
2: SDA
3: SCL
4: GND
GHR-04V-S (made by J.S.T. Mfg. Co.)
4: GND
6
10000
0
D6F-10A7D-000-0
D6F-20A7D-000-0
D6F-50A7D-000-0
D6F-70AB71D-000-0
Pin No.
4
Output (Count)
D6F-CABLE3
2
D6F-50A7D-000-0
Model
Cable
40000
Flow rate (L/min)
Output (Count)
Type
50000
10000
0
0
Accessories (Sold separately)
D6F-20A7D-000-0
70000
Output (Count)
Applicable fluid
Output (Count)
Joint
2: SDA
1: Vcc
Flow rate
L/min (normal)
0
2
4
6
8
10
Output voltage
(HEX)
1024
(0400)
13024
(32E0)
25024
(61C0)
37024
(90A0)
49024
(BF80)
61024
(EE60)
Measurement conditions: Power-supply voltage 3.3±0.1 VDC, ambient temperature 25±5 C and ambient humidity 35 to 75%RH.
Flow rate = (Output value - 1,024)/60,000 x 10
D6F-20A7D-000-0
Flow rate
L/min (normal)
0
4
8
12
16
20
Output voltage
(HEX)
1024
(0400)
13024
(32E0)
25024
(61C0)
37024
(90A0)
49024
(BF80)
61024
(EE60)
Measurement conditions: Power-supply voltage 3.3±0.1 VDC, ambient temperature 25±5 C and ambient humidity 35 to 75%RH.
Flow rate = (Output value - 1,024)/60,000 x 20
D6F-50A7D-000-0
Enlarged View
Flow rate
L/min (normal)
0
10
20
30
40
50
Output voltage
(HEX)
1024
(0400)
13024
(32E0)
25024
(61C0)
37024
(90A0)
49024
(BF80)
61024
(EE60)
Measurement conditions: Power-supply voltage 3.3±0.1 VDC, ambient temperature 25±5 C and ambient humidity 35 to 75%RH.
Flow rate = (Output value - 1,024)/60,000 x 50
D6F-70AB71D-000-0
Flow rate
L/min (normal)
0
20
40
60
70
Output voltage
(HEX)
1024
(0400)
13024
(32E0)
25024
(61C0)
37024
(90A0)
43024
(A810)
Measurement conditions: Power-supply voltage 3.3±0.1 VDC, ambient temperature 25±5 C and ambient humidity 35 to 75%RH.
Flow rate = (Output value - 1,024)/60,000 x 100
20
D6F-A7D/-AB71D
MEMS Flow Sensor
Characteristics/Performance
Model
D6F-10A7D-000-0
Flow Range (See note 1.)
0 to 10L/min
D6F-20A7D-000-0
0 to 20 L/min
D6F-50A7D-000-0
0 to 50 L/min
Calibration Gas (See note 2.)
Air
Flow Port Type
Quick joint P10
Electrical Connection
Four-pin connector
Power Supply
3.0 to 3.6 VDC
Current Consumption
10 mA max. with no load, Vcc = 3.3 VDC, GND = 0 VDC, 25°C
Quick joint P14
Resolution
15 bit
Accuracy (See note 3.)
±5%RD (10%F.S. ≤ Flow rate < 25%F.S.)
±3%RD (25%F.S. ≤ Flow rate ≤ 100%F.S.)
Response time
90 ms max.
Repeatability (See note 4.)
0.3 %RD
Interface (See note 5.)
I2C
0.3%RD
Case
PPS
Degree of Protection
IEC IP40 (Excluding tubing sections.)
Withstand Pressure
100 kPa
Pressure Drop (See note 4.)
0.034 kPa
Operating Temperature (See note 6.)
–10 to +60°C
Operating Humidity (See note 6.)
35 to 85%RH
Storage Temperature (See note 6.)
–30 to +80°C
D6F-70AB71D-000-0
0 to 70 L/min
0.083 kPa
±5%RD (10L/min ≤ Flow rate < 20L/min)
±3%RD (20L/min ≤ Flow rate ≤ 70L/min)
0.5%RD
1.3%RD
0.28 kPa
0.57 kPa
Storage Humidity (See note 6.)
35 to 85%RH
Insulation Resistance
Between sensor outer cover and lead terminals: 20 MΩ min. (at 500 VDC)
Dielectric Strength
Between sensor outer cover and lead terminals: 500 VAC, 50/60 Hz min. for 1 min (leakage current: 1 mA max.)
Weight
57.3 g
Note: 1.
Note: 2.
Note: 3.
Note: 4.
Note: 5.
Note: 6.
Note: 7.
64.4 g
Volumetric flow rate at 0°C, 101.3 kPa.
Dry gas (must not contain large particles, e.g., dust, oil, or mist.)
-10 ≤ Operating Temperature ≤ 60 C
Reference (typical)
Refer to the D6F-@@@@D-000-@ Application Notes for details.
With no condensation or icing.
The following custom options are available.
Ask your OMRON representative for details.
- Temperature measurement
- Address settings (up to four addresses)
- Fault detection
- Threshold setting
Communication
Serial Interface
Master/Slave
Speed mode
I2C
Slave / Address:
HEX : 0x6C
BIN : 110_1100 (7bit)
Fast Mode 400kHz
Signal
SCL
Serial Clock
SDA
Data Signal
21
D6F-A7D/-AB71D
MEMS Flow Sensor
Dimensions (Unit: mm)
● MEMS Flow Sensors
D6F-10A7D-000-0
D6F-20A7D-000-0
D6F-50A7D-000-0
Lot No. Display
A
A
(4.4)
84.6±0.5
(60.6)
(66.6)
(34.9)
B
B
(7.9)
30°
20±0.5 dia.
Note 1. Note . The Port type of pipe fitting based on “Quick Joint P10 Type”.
* P10 shows the name of an O-ring prescribed by JIS B 2401.
* The port of O-ring ditch is based on P10 of JIS B 2406.
30±0.5
17±0.5 dia.
+0.1
13 -0.05 dia.
3±0.15
6
0.9±0.5
Note
C0.5 (circumference)
R2 (circumference)
Note 2. Use the following connectors to connect to the Sensor.
Connector
:GHR-04V-S (JST)
Terminals
:SSHL-002T-P0.2 (JST)
Wires
:AWG26 to AWG30
Circuit numbers :1.Vcc, 2.SDA, 3.SCL, 4.GND
30±0.5
C0.5 (circumference)
CROSS A-A (B-B)
D6F-70AB71D-000-0
Lot No. Display
20.5±0.2
A
2-2.6 dia. Depth 6.5
A
20.5±0.2
25.8±0.2
(4.4)
84.6±0.5 (64.5)
(66.6) (60.6)
25.8±0.2
Two, 4±0.1 dia.
30.9±0.5
(34.8)
Recommended
Installation
Dimensions
from back side
(See note 2.)
B
B
30°
26±0.5 dia.
30±0.5
22±0.5 dia.
+0.1
18 -0.05dia.
3±0.15
Note 1. The Port type of pipe fitting based on “Quick Joint P14 Type”.
* P14 shows the name of an O-ring prescribed by JIS B 2401.
* The port of O-ring ditch is based on P14 of JIS B 2406.
(7.9)
0.9±0.5
Note 1
C0.5 (circumference)
32±0.5
30±0.5
R2 (circumference)
C0.5 (circumference)
6
CROSS A-A (B-B)
● Cable (Sold separately)
D6F-CABLE3
Blue wire
15±3
(5)
Note 3. Use the following connectors to connect to the Sensor.
Connector
:GHR-04V-S (JST)
Terminals
:SSHL-002T-P0.2 (JST)
Wires
:AWG26 to AWG30
Circuit numbers :1.Vcc, 2.SDA, 3.SCL, 4.GND
● Quick fastener (Sold separately)
D6F-FASTENER-P10
Black wire
Red wire
660±10
Note 2. To mount the Sensor with 2.6-dia. holes, use P-type
self-tapping screws with a nominal diameter of 3 mm and
tighten them to a torque of 1.2 N·m max.
The screw threads must engage for 5.5 mm min.
Return direction
1. Vcc
2. SDA
3. SCL
4. GND
16.5±2
11.5±1
Rolling direction
3.3
1
Yellow wire
4-R1.5
2-R2
730±10
750±35
R8.5
R8.5
14
1
11
2-R2
8-R2.5
“10” is engraved
here.
6±0.15
3
12±0.15
22
8±0.3
3±0.15
15±1
2-R1
t=0.8±0.04
D6F-AB71
MEMS Flow Sensor
Reduction of Piping time by quick joint
connection
• Reduce the influence of pulsation flow by bypass flow path
• 30 L/min and 70 L/min of Air can be measured.
• Compact size of 30 × 84.6 × 32 mm (H × W × D).
RoHS Compliant
Refer to the Common Precautions for the D6F Series on page 40.
Ordering Information
Output Voltage Characteristics
MEMS Flow Sensor
Quick joint P14
D6F-30AB71-000
Applicable fluid
Air
Flow rate range
0 to 30 L/min
D6F-30AB71-000
0 to 70 L/min
D6F-70AB71-000
Accessory (Sold separately)
Type
6.0
Model
Output voltage (V)
Flow Port Type
D6F-CABLE1
4.0
3.0
2.0
1.0
0.0
Model
Cable
5.0
0
6
12
18
24
30
56
70
Flow rate (L/min)
D6F-70AB71-000
6.0
Output voltage (V)
Connections
D6F-30AB71-000
D6F-70AB71-000
Pin No.
Connector
1: Vcc
2: Vout
3: GND
53398 (Made by Molex Japan)
Use the following connectors for connections to the D6F:
Housing
51021 (Made by Molex Japan)
Terminals
50079 (Made by Molex Japan)
Wires
AWG28 to AWG26
1:Vcc 2:Vout
3:GND
5.0
4.0
3.0
2.0
1.0
0.0
0
14
28
42
Flow rate (L/min)
D6F-30AB71-000
Flow rate
L/min (normal)
0
6
12
18
24
30
Output voltage
V
1.00
±0.12
1.25
±0.12
1.91
±0.12
2.75
±0.12
3.78
±0.12
5.00
±0.12
D6F-70AB71-000
Enlarged View
Flow rate
L/min (normal)
0
14
28
42
56
70
Output voltage
V
1.00
±0.12
1.43
±0.12
2.25
±0.12
3.14
±0.12
4.06
±0.12
5.00
±0.12
Measurement conditions: Power-supply voltage 12±0.1 VDC, ambient temperature 25±5°C and ambient humidity 35 to 75%RH.
23
D6F-AB71
MEMS Flow Sensor
Characteristics/Performance
Model
D6F-30AB71-000
Flow Range (See note 1.)
D6F-70AB71-000
0 to 30 L/min
0 to 70 L/min
Calibration Gas (See note 2.)
Air
Flow Port Type
Quick joint P14
Electrical Connection
Three-pin connector
Power Supply
10.8 to 26.4 VDC
Current Consumption
15 mA max. with no load and Vcc of 12 to 24 VDC, GND = 0 VDC, 25°C
Output Voltage
1 to 5 VDC (non-linear output, load resistance of 10 kΩ min.)
Accuracy
±3%F.S. (25°C characteristic)
Repeatability (See note 3.)
±0.3%F.S.
Output Voltage (Max.)
5.7 VDC (Load resistance: 10 kΩ)
Output Voltage (Min.)
0 VDC (Load resistance: 10 kΩ)
Rated Power Supply Voltage
26.4 VDC
Rated Output Voltage
6 VDC
Case
PPS
Degree of Protection
IEC IP40 (Excluding tubing sections.)
Withstand Pressure
100 kPa
Pressure Drop (See note 3.)
0.88 kPa
Operating Temperature (See note 4.)
–10 to +60°C
Operating Humidity (See note 4.)
35 to 85%RH
Storage Temperature (See note 4.)
–30 to +80°C
Storage Humidity (See note 4.)
35 to 85%RH
3.49 kPa
Temperature Characteristics
±3%F.S. for 25°C characteristic at an ambient temperature of –10 to +60°C
Insulation Resistance
Between sensor outer cover and lead terminals: 20 MΩ min. (at 500 VDC)
Dielectric Strength
Between sensor outer cover and lead terminals: 500 VAC, 50/60 Hz min. for 1 min (leakage current: 1 mA max.)
Weight
75 g
Note: 1.
Note: 2.
Note: 3.
Note: 4.
Volumetric flow rate at 0°C, 101.3 kPa.
Dry gas (must not contain large particles, e.g., dust, oil, or mist.)
Reference (typical)
With no condensation or icing.
Dimensions (Unit: mm)
● MEMS Flow Sensors
D6F-30AB71-000
D6F-70AB71-000
Lot No. Display
20.5
A
A
84.6
25.8
(64.5)
(66.6)
(60.6)
(3.7)
B
(6)
(33.4)
30.9
2-2.6 dia Depth 6.5 (See note 2.)
30
30°
26 dia.
22 dia.
18 +0.1
-0.05 dia.
See note 1.
0.9 C0.5 (circumference)
3±0.15
30
R2 (circumference)
C0.5 (circumference)
6
Note 3: Use the following connectors to connect to the Sensor.
Connector
: GHR-04V-S (JST)
Terminals
: SSHL-002T-P0.2 (JST)
Wires
: AWG26 to AWG30
Circuit numbers : 1. Vcc, 2. SDA, 3. SCL, and 4. GND.
CROSS A-A
● Cable (Sold separately)
D6F-CABLE1
200±35
100±15
Brown wire
Black wire
1. Vcc
2. Vout
Blue wire
24
32
Note 1. The flow path inlet and outlet ports conform to P14-type female
quick-connect joints.
(The tube inlet and outlet ports have the same shape.)
* P14 is the number of an O-ring specified in JIS B 2401.
* The O-ring groove in the male joint must conform to P14 in JIS B 2406.
Note 2. To mount the Sensor with 2.6-dia. holes, use P-type self-tapping screws with
a nominal diameter of 3 mm and tighten them to a torque of 1.2 N·m max.
The screw threads must engage for 5.5 mm min.
3. GND
D6F-P
MEMS Flow Sensor
A Compact, High-accuracy Flow
Sensor with Superior Resistance
to Environments.
• Anti-dust performance is improved using the Cyclon method.
• A full lineup of models with different connector types: bamboo
joints, lead terminals for direct mounting on-board, and manifolds.
• High accuracy of ±5% FS.
RoHS Compliant
Refer to the Common Precautions for the D6F Series on page 40.
Ordering Information
MEMS Flow Sensor
Flow Port Type
Connection
Applicable fluid
Lead terminals
Bamboo joint
Model
D6F-P0001A1
D6F-P0010A1
Air
0 to 1 L/min
Connector
Manifold
Flow rate range
0 to 0.1 L/min
D6F-P0010A2
D6F-P0010AM2
Accessory (Sold separately)
Type
Model
Cable
D6F-CABLE2
Output Voltage Characteristics
D6F-P0010A1/-P0010A2/-P0010AM2
3.0
3.0
2.5
2.5
Output voltage (V)
Output voltage (V)
D6F-P0001A1
2.0
1.5
1.0
0.5
0.0
2.0
1.5
1.0
0.5
0.0
0
0.02
0.04
0.06
Flow rate (L/min)
0.08
0.10
0
0.25
1
Flow rate
L/min (normal)
0
Output voltage
0.50
0.90
1.30
1.70
2.10
2.50
Output voltage
0.50
1.60
2.10
2.31
2.50
V
±0.10
±0.10
±0.10
±0.10
±0.10
±0.10
V
±0.10
±0.10
±0.10
±0.10
±0.10
0.02
0.04
0.06
0.08
0.10
Measurement conditions: Power supply voltage of 5.0±0.1 VDC, ambient temperature of 25±5°C, and ambient humidity of 35% to 75%.
Flow rate
L/min (normal)
0.5
0.75
Flow rate (L/min)
0
0.25
0.50
0.75
1.00
Measurement conditions: Power supply voltage of 5.0±0.1 VDC, ambient temperature of 25±5°C, and ambient humidity of 35% to 75%.
25
D6F-P
MEMS Flow Sensor
Characteristics/Performance
Model
D6F-P0001A1
Flow Range (See note 1.)
0 to 0.1 L/min
Calibration Gas (See note 2.)
Air
D6F-P0010A1
D6F-P0010A2
Bamboo joint
Flow Port Type
Maximum outside diameter: 4.9 mm, minimum outside diameter: 4.0 mm
Electrical Connection
Lead terminals
Power Supply
4.75 to 5.25 VDC
Current Consumption
15 mA max. with no load and a Vcc of 5.0 V
0.5 to 2.5 VDC (Load resistance: 10 kΩ)
Accuracy
±5% FS (25°C characteristic)
Repeatability (See note 3.)
±1.0% FS
Output Voltage (Max.)
3.1 VDC (Load resistance: 10 kΩ)
±0.4% FS
Output Voltage (Min.)
0 VDC (Load resistance: 10 kΩ)
Rated Power Supply Voltage
10 VDC
4 VDC
Case
PBT
Manifold
Three-pin connector
Output Voltage
Rated Output Voltage
D6F-P0010AM2
0 to 1 L/min
Degree of Protection
IEC IP40 (Excluding tubing sections.)
Withstand Pressure (See note 3.)
50 kPa
Pressure Drop (See note 3.)
0.005 kPa
0.19 kPa
0.67 kPa
Operating Temperature (See note 4.) −10 to +60°C
Operating Humidity (See note 4.)
35% to 85%
Storage Temperature (See note 4.)
−40 to +80°C
Storage Humidity (See note 4.)
35% to 85%
Temperature Characteristics
±5% FS for 25°C characteristic at an ambient temperature of -10 to +60°C
Insulation Resistance
Between Sensor outer cover and lead terminals: 20 MΩ min. (at 500 VDC)
Dielectric Strength
Between Sensor outer cover and lead terminals: 500 VAC, 50/60 Hz min. for 1 min (leakage current: 1 mA max.)
Weight
8.5 g
Note: 1.
Note: 2.
Note: 3.
Note: 4.
Volumetric flow rate at 0°C, 101.3 kPa.
Dry gas. (must not contain large particles, e.g., dust, oil, or mist.)
Reference (typical)
With no condensation or icing.
8.0 g
Tubing
You can measure large flows by mounting the Sensor on a bypass.
D6F-P
Flow Sensor
P1
P2
Resistance to flow
Mounting Direction
PCB-mounting Sensor
26
Manifold-type Sensor
D6F-P
MEMS Flow Sensor
Connections/Dimensions (Unit: mm)
● Lead Terminals
Label: Gives model and lot numbers.
D6F-P0001A1/D6F-P0010A1
Two, 3-dia.
through hole
10
23.3
Two, 4.9 dia.
2.6 dia.
11.7
7.2
Two, 1.1 dia.
4.76
Three, 1.3-dia. lands
Label
2.54
MADE IN JAPAN
D6F
27.2
7.3
13.5
Three, 0.8-dia.
through holes
5.04
7.6±0.2
14
Recommended Dimensions for
Connector Mounting Holes
(Bottom view)
16.2
6
1.2
1.7
17.2
13.5
1.5
Two, R: 1.4
Connector
XG8V-0344
(manufactured
by OMRON)
A
9.8
6
2.8 dia.
3. GND
7.2
2.54
13.2
1. Vcc
5.08
2. Vout
Detailed View of A
4.76
● Connectors
D6F-P0010A2
Label: Gives model and lot numbers.
10
23.3
11.7
Two, 4.9 dia.
2.6 dia.
MADE IN JAPAN
D6F
27.2
A
7.3
Two, 1.1 dia.
1.Vcc
7.6±0.2
14
Label
2.Vout
16.2
8.5
6
3.GND
1.2
Detailed View of A
1.7
8.5
13.5
1.5
Two, R: 1.4
17.2
2.8 dia.
13.2
D6F-P0010AM2
1±0.1 dia.,
Depth: 2.4±0.1
Pin No.
1: Vcc
2: Vout
3: GND
Connector SM03B-SRSS-TB (made by J.S.T. Mfg. Co.)
22
18
6.7±0.1 *1
8
2
0
Two, 4−0.05
dia.
B
3.5 dia.
1+0.1
0
27.2 14±0.05
22.1
A
Note:
1) Pressure welding connector
Socket: 03SR-3S
Wire: AWG#30
Or
2) Crimp type connector
Contact: SSH-003T-P0.2
Housing: SHR-03V-S
Wire: AWG#32 to #28
6.4 9.6
2-R6
Two, C0.3
(entire circumference)
6
3.GND
2.Vout
1.Vcc
2.7±0.1
0.3±0.1
0.3±0.1
Detailed View of A
Detailed View of B
Grooves to stop rotation
Connector Details
Lot number label
*1. Recommended Installation Dimensions
O-ring Installation Hole Dimensions
Depth: 2.6 to 3.0
6.7±0.1
C0.4 (entire circumference)
Two, 7 +0.5
dia.
0
M3 threaded
7 +0.5
0
14±0.05
● Cable (Optional)
D6F-CABLE2
The recommended
O-ring is JIS B 2401,
nominal number P4.
Use one of the following connectors from JST Mfg.
Co., Ltd. to connect to the D6F.
Tubes
Install tubes made of materials such as rubber or urethane
so that they will not come out.
For urethane tubes, tubes with an outer diameter of 6 mm
and an inner diameter of 4 mm are recommended.
Soldering Conditions
Use a soldering iron for 5 s at 350°C with a pressure of 100
gf max.
(This applies only to PCB-mounting Sensors.)
White wire
Black wire
3: GND
Red wire
180±10
1: Vcc
2: Vout
15±3
(5)
27
D6F-PH
MEMS Differential pressure Sensor
A Compact, High-accuracy Differential
Pressure Sensor with Superior
Resistance to Environments.
• High accuracy of ±3% RD
• Linearized and temperature compensated
• Digital output (I2C communication)
• High flow impedance to reduce the influence of bypass configuration
RoHS Compliant
Refer to the Common Precautions for the D6F Series on page 40.
Ordering Information
Applicable fluid (See note 1.)
Measurement range (See note 3.)
Air (See note 2.)
Model
0 to 250 Pa (0 to 1 in. H2O)
D6F-PH0025AD1
-50 to +50 Pa (±0.2 in. H2O)
D6F-PH0505AD3
-500 to +500 Pa (±2 in. H2O)
D6F-PH5050AD3
Note: 1. The Sensor be calibrated for different gas types. Consult your Omron representative.
Note: 2. Dry gas must not contain large particles, e.g., dust, oil, or mist.
Note: 3. At standard atmospheric pressure (1013.25 hPa)
Output Characteristics
D6F-PH0505AD3
70000
70000
60000
60000
Output (count)
Output (count)
D6F-PH0025AD1
50000
40000
30000
20000
10000
0
0
50
100
150
200
50000
40000
30000
20000
10000
0
-50
250
-30
Differential pressure (Pa)
-10
10
30
50
Differential pressure (Pa)
Differential
pressure (Pa)
0
50
100
150
200
250
Differential
pressure (Pa)
Output
(HEX)
1024
(0400)
13024
(32E0)
25024
(61C0)
37024
(90A0)
49024
(BF80)
61024
(EE60)
Output
(HEX)
Measurement conditions: Power supply voltage of 3.3 ±0.1 VDC, ambient temperature of 25±5°C, and ambient humidity of 35% to 75%.
Differential pressure conversion formula: Dp = (Op - 1024) / 60000 × 250
Dp = Differential pressure, Op = Output
-50
-30
-10
0
10
30
50
1024 13024 25024 31024 37024 49024 61024
(0400) (32E0) (61C0) (7930) (90A0) (BF80) (EE60)
Measurement conditions: Power supply voltage of 3.3 ±0.1 VDC, ambient temperature of 25±5°C, and ambient humidity of 35% to 75%.
Differential pressure conversion formula: Dp = (Op - 1024) / 60000 × 100 - 50
Dp = Differential pressure, Op = Output
D6F-PH5050AD3
70000
Output (count)
60000
50000
40000
30000
20000
10000
0
-500
-300
-100
100
300
500
Differential pressure (Pa)
Differential
pressure (Pa)
Output
(HEX)
-500
-300
-100
0
100
300
500
1024 13024 25024 31024 37024 49024 61024
(0400) (32E0) (61C0) (7930) (90A0) (BF80) (EE60)
Measurement conditions: Power supply voltage of 3.3 ±0.1 VDC, ambient temperature of 25±5°C, and ambient humidity of 35% to 75%.
Differential pressure conversion formula: Dp = (Op - 1024) / 60000 × 1000 - 500
Dp = Differential pressure, Op = Output
28
Note. Change of gas density affects the sensor output.
Change of atmospheric pressure is compensated by the following formula.
Dpeff = Dp × (Pstd / Pamb)
Dpeff: Effective differential pressure
Dp: Differential pressure of the sensor output
Pstd: Standard atmospheric pressure (1013.25 hPa)
Pamb: Actual ambient atmospheric pressure (hPa)
D6F-PH
MEMS Differential pressure Sensor
Characteristics/Performance
Model
D6F-PH0025AD1
Differential pressure range (See note 1) 0 to 250 Pa
D6F-PH0505AD3
±50 Pa
D6F-PH5050AD3
±500 Pa
Calibration Gas (See note 2.)
Air
Port Type
Bamboo joint, Maximum outside diameter: 4.9 mm, minimum outside diameter: 4.0 mm
Power Supply
2.3 to 3.6 VDC
Current Consumption
6 mA max. with no load and Vcc of 3.3 VDC, GND = 0 VDC, 25°C
Resolution
12 bit
Zero point tolerance (See note 4.)
±0.2 Pa
Span tolerance (See note 4.)
±3% RD
Span shift due to temperature variation
< 0.5% RD per 10°C
33 ms typical at 12 bit resolution (50 ms max.)
Response time
The processing time is 6 ms typical at 12 bit resolution.
Gas flow through sensor (See note 3.)
63 mL/min
Interface
I2C
Case material
PPS
Degree of Protection
IEC IP40 (Excluding tubing sections.)
Withstand Pressure
10 kPa
Operating temperature (See note 5.)
-20 to +80°C
Operating humidity (See note 5.)
35 to 85 %RH
Storage temperature (See note 5.)
-40 to +80°C
23 mL/min
Storage humidity (See note 5.)
35 to 85 %RH
Insulation Resistance
Between Sensor outer cover and lead terminals: 20 MΩ min. (at 500 VDC)
100 mL/min
Dielectric Strength
Between Sensor outer cover and lead terminals: 500 VAC, 50/60 Hz min. for 1 min (leakage current: 1 mA max.)
Weight
5.2 g
Note: 1. At standard atmospheric pressure (1013.25 hPa)
Note: 2. Dry gas must not contain large particles, e.g., dust, oil, or mist.
Note: 3. Type D6F-PH is based on thermal flow principle. Air flow is needed to measure the differential pressure.
Typical characteristic of air flow by differential pressure is below.
Note: 4. The zero point tolerance and span tolerance are independent uncertainties and add according to the principles of error propagation.
Note: 5. With no condensation or icing.
Note: 6. Please call us about functions, such as fault detection, temperature check, Vdd check, threshold value setup.
Relation between pressure and flow rate
Flow rate (mL/min)
60
40
20
0
-20
-40
0
-500
-300
-100
100
300
500
Differential pressure (Pa)
29
D6F-PH
MEMS Differential pressure Sensor
Connections/Dimensions (Unit: mm)
3.1
1.2
4:SCL
3:VCC
7.2
2:GND
1:SDA
Mounting Direction
Install the Sensor so
that the joints are
facing upward.
22
Two, 4 dia.
12 10.5
6.5
Recommendation size for pin header installation
(tolerrances: ±0.1)
Two, 4.9 dia
Two, 4 dia.
Two, through hole 2.2 dia
4
16.5
Two, through hole 2 dia.
10
5
Two, R2
3.37
Pin Header
3.7
Four, 0.48 dia.
Three, 2
5.25
Four, through hole 0.8 dia.
Three, 2
18
7.05
High pressure side
26
20
16.5
10
Low pressure side
Two, through hole 2 dia
Electrical connection
Vcc
pull-up resister 2.2 kΩ
SDA
GND
Sensor
(slave)
Vcc 3.3 V
Master
SCL
pull-up resister 2.2 kΩ
Vcc
Communication
Serial Interface
Master/Slave
Speed mode
I2C
Slave / Address:
Fast Mode 400kHz
Signal
30
SCL
Serial Clock
SDA
Data Signal
HEX : 0x6C
BIN : 110_1100 (7bit)
Tubes
Install tubes made of materials such as rubber or urethane
so that they will not come out.
For urethane tubes, tubes with an outer diameter of 6 mm
and an inner diameter of 4 mm are recommended.
Soldering Conditions
Use a soldering iron for 5 s at 350°C with a pressure of 100
gf max.
D6F-W
MEMS Flow Sensor
A Compact Sensor That Uses
OMRON’s Unique Flow Path Structure for
High-performance Flow Rate Measurement.
• Anti-dust performance enhanced by OMRON’s unique three-dimensional
flow path structure.
• High accuracy of ±5% FS.
RoHS Compliant
Refer to the Common Precautions for the D6F Series on page 40.
Ordering Information
Output Voltage Characteristics
MEMS Flow Sensor
D6F-W01A1
0 to 1 m/s
Air
Model
D6F-W01A1
0 to 4 m/s
D6F-W04A1
0 to 10 m/s
D6F-W10A1
Type
Model
Cable
D6F-W CABLE
6.0
5.0
5.0
4.0
3.0
2.0
1.0
0.0
0.00
Accessory (Sold separately)
D6F-W04A1
6.0
Output voltage (V)
Flow rate range
Output voltage (V)
Applicable fluid
4.0
3.0
2.0
1.0
0.0
0.25
0.50
0.75
Flow velocity (m/s)
0.0
1.00
1.0
2.0
3.0
Flow velocity (m/s)
4.0
D6F-W10A1
6.0
Output voltage (V)
5.0
Connections
D6F-W01A1
D6F-W04A1
D6F-W10A1
2. Vout.
4.0
3.0
2.0
1.0
0.0
0
3. GND.
2
4
6
Flow velocity (m/s)
Output voltage V
Pin No.
1: Vcc
2: Vout
Enlarged View
3: GND
Connector S3B-ZR-SM2-TF
(made by J.S.T. Mfg. Co.)
Use the following connectors from
J.S.T. Mfg. Co. Ltd. to connect the D6F:
Housing: ZHR-3
10
D6F-W01A1
Flow velocity
m/s
1. Vcc.
8
0
1.00±0.2
0.25
0.50
1.35±0.2
0.75
2.01±0.2
3.27±0.2
1.00
5.00±0.2
D6F-W04A1
Flow velocity
m/s
Output voltage V
0
1.00±0.2
1.0
2.0
1.58±0.2
3.0
2.88±0.2
4.11±0.2
4.0
5.00±0.2
The flow velocity is the value calculated from the mass flow rate in OMRON’s specified
48-mm-dia. wind tunnel. It does not indicate the flow velocity determined by the Measurement Law of Japan. The wind tunnel conditions are shown in Figure 1, below.
Flow velocity measurement
position
Figure 1: Wind Tunnel
Air volume sensor
Contacts: SZH-002T-P0.5
Wires:
AWG28 to AWG26
Or
Contacts: SZH-003T-P0.5
Wires:
AWG32 to AWG28
48 dia.
20.8
60
Measurement conditions: Power supply voltage of 12 VDC, ambient temperature of 25°C, and ambient humidity of 35% to 75%.
D6F-W10A1
Flow velocity
m/s
Output voltage V
0
2.0
4.0
6.0
8.0
10.0
1.00±0.24 1.94±0.24 3.23±0.24 4.25±0.24 4.73±0.24 5.00±0.24
The flow velocity is the value calculated from the mass flow rate in OMRON’s specified
155-mm-dia. wind tunnel. It does not indicate the flow velocity determined by the Measurement Law of Japan. The wind tunnel conditions are shown in Figure 2, below.
Figure 2: Wind Tunnel
Air volume sensor Honeycomb flow grate
155 dia.
18
Flow velocity measurement position
10
100
Measurement conditions: Power supply voltage of 12 VDC and ambient temperature of 25°C
31
D6F-W
MEMS Flow Sensor
Characteristics/Performance
Model
D6F-W01A1
Flow Range (See note 1.)
0 to 1 m/s
Calibration Gas (See note 2.)
Air
Electrical Connection
Three-pin connector
D6F-W04A1
D6F-W10A1
0 to 4 m/s
0 to 10 m/s
Power Supply
10.8 to 26.4 VDC
Current Consumption
15 mA max. with no load, with a Vcc of 12 to 24 VDC, and at 25°C
Output Voltage
1 to 5 VDC (non-linear output, load resistance of 10 kΩ)
Accuracy
±5% FS (25°C characteristic)
Repeatability (See note 3.)
±0.4% FS
Output Voltage (Max.)
5.7 VDC (Load resistance: 10 kΩ)
Output Voltage (Min.)
0 VDC (Load resistance: 10 kΩ)
Rated Power Supply Voltage
26.4 VDC
±6% FS (25°C characteristic)
Rated Output Voltage
6 VDC
Case
PPS
Degree of Protection
IEC IP40 (except for flow inlet and outlet)
Operating Temperature (See note 4.) −10 to 60°C
Operating Humidity (See note 4.)
35% to 85%
Storage Temperature (See note 4.)
−40 to 80°C
Storage Humidity (See note 4.)
35% to 85%
Temperature Characteristics
±5% FS for 25°C characteristic at an ambient temperature of −10 to 60°C
Insulation Resistance
Between Sensor outer cover and lead terminals: 20 MΩ min. (at 500 VDC)
Dielectric Strength
Between Sensor outer cover and lead terminals: 500 VAC, 50/60 Hz min. for 1 min (leakage current: 1 mA max.)
Weight
6.3 g
Note: 1.
Note: 2.
Note: 3.
Note: 4.
Volumetric flow rate at 25°C, 101.3 kPa.
Dry gas. (must not contain large particles, e.g., dust, oil, or mist.)
Reference (typical)
With no condensation or icing.
Dimensions (Unit: mm)
● MEMS Flow Sensors
D6F-W01A1
D6F-W04A1
D6F-W10A1
9
Mounting Hole Dimensions
20
3.2±0.2
1.2
2.6
8
Two, R: 1.6
2.6
1.2
R4
Two, M3 screws
8
4.2±0.2
Flow inlet
Flow outlet
MADE IN JAPAN
19.5
Flow outlet
2 dia., Depth: 2.5
4
7
R4
3.2 ±0.2 dia.
Lot number label
● Cable (Optional)
D6F-W CABLE
5±1
GND: Blue
Vout: Black
15±3
32
30.5±0.05
5
39 24
5
30.5±0.2
30±10
100±10
50±10
Vcc: Brown
D6F-V
MEMS Flow Sensor
A Compact Sensor That Uses
OMRON’s Unique Flow Path Structure
for High-performance Flow Rate
Measurement.
• Anti-dust performance enhanced by OMRON’s unique
three-dimensional flow path structure.
• Extremely compact, measuring only 24 × 14 × 8 mm.
RoHS Compliant
Refer to the Common Precautions for the D6F Series on page 40.
Ordering Information
Output Voltage Characteristics
MEMS Flow Sensor
D6F-V03A1
Flow velocity range
Air
0 to 3 m/s
D6F-V03A1
Accessory (Sold separately)
Type
Model
Cable
D6F-CABLE2
Connections
D6F-V03A1
2. Vout.
2.5
Model
1. Vcc.
3. GND.
Output voltage (V)
Applicable fluid
2.0
1.5
1.0
0.5
0.0
0.0
0.75
1.5
2.25
Flow velocity (m/s)
3.0
D6F-V03A1
Flow velocity
m/s
0
0.75
Output voltage
V
0.5±0.15
0.7±0.15
1.5
2.25
1.11±0.15 1.58±0.15
3
2±0.15
The flow velocity is the value calculated from the mass flow rate in OMRON’s
specified 48-mm-dia. wind tunnel. It does not indicate the flow velocity determined by the Measurement Law of Japan. The wind tunnel conditions are
shown in Figure 1 below.
Figure 1: Wind Tunnel
Enlarged View
Pin No.
1: Vcc
2: Vout
Flow velocity
Air volume sensor measurement position
Mesh
48 dia.
3: GND
Connector
SM03B-SRSS-TB (made by J.S.T. Mfg. Co.)
Use the following connectors from J.S.T. Mfg. Co. Ltd. to connect
23.6
60
Measurement conditions: Power supply voltage of 3.3 VDC, ambient temperature of 25°C, and dry air.
the D6F:
• Pressure-welded Connectors
Socket: 03SR-3S
Wires: AWG30
Or
• Crimp Connectors
Contact: SSH-003T-P0.2
Housing: SHR-03V-S
• Wires: AWG32 to AWG28
33
D6F-V
MEMS Flow Sensor
Characteristics/Performance
Model
D6F-V03A1
Flow Range (See note 1.)
0 to 3 m/s
Calibration Gas (See note 2.)
Air
Electrical Connection
Three-pin connector
Power Supply
3.15 to 3.45 VDC
Current Consumption
15 mA max. with no load, with a Vcc of 3.3 VDC, and at 25°C
Output Voltage
0.5 to 2 VDC (non-linear output, load resistance of 10 kΩ)
Accuracy
±10% FS (25°C characteristic)
Repeatability (See note 3.)
±1.5% FS
Output Voltage (Max.)
2.7 VDC (Load resistance: 10 kΩ)
Output Voltage (Min.)
0 VDC (Load resistance: 10 kΩ)
Rated Power Supply Voltage
12 VDC
Rated Output Voltage
3 VDC
Case
PBT
Degree of Protection
IEC IP40 (except for flow inlet and outlet)
Operating Temperature (See note 4.) −10 to 60°C
Operating Humidity (See note 4.)
35% to 85%
Storage Temperature (See note 4.)
−40 to 80°C
Storage Humidity (See note 4.)
35% to 85%
Temperature Characteristics
±20% FS for 25°C characteristic at an ambient temperature of −10 to 60°C
Insulation Resistance
Between Sensor outer cover and lead terminals: 20 MΩ min. (at 500 VDC)
Dielectric Strength
Between Sensor outer cover and lead terminals: 500 VAC, 50/60 Hz min. for 1 min (leakage current: 1 mA max.)
Weight
5.3 g
Note: 1.
Note: 2.
Note: 3.
Note: 4.
Volumetric flow rate at 25°C, 101.3 kPa.
Dry gas. (must not contain large particles, e.g., dust, oil, or mist.)
Reference (typical)
With no condensation or icing.
Dimensions (Unit: mm)
● MEMS Flow Sensors
D6F-V03A1
Lot number label
Three, R0.5
22
21
3.1 ±0.1 dia.
3.6 ±0.1 dia.
16
4
(3.7)
13
11
2
14
0.8
4.4
1.6
Flow inlet
15.2
18.2
24
Three, R1.8
● Cable (Sold separately)
D6F-CABLE2
White wire
Black wire
3: GND
Red wire
180±10
1: Vcc
2: Vout
15±3
34
(5)
8
Flow outlet
D6F-D
MEMS 2-Axis Flow Sensor
Save energy with airflow sensing.
Optimize air conditioning control
without sacrificing quality.
• Two-axis sensing to detect not only the airflow speed but also the
airflow direction.
• Link up to 32 Sensors to achieve visualization over a wide range.
• Compact package for greater installation flexibility.
RoHS Compliant
Refer to the Safety Precautions on page 39 and Common
Precautions for the D6F Series on page 40.
Ordering Information
Applicable Medium
Air (See note.)
Flow Range
Model
±1.0m/s
D6F-D010A32-00
Note: Dry gas must not contain large particles, eg dust, oil, mist.
Characteristics/Performance
Characteristics
Item
Rating
Power-supply Voltage
4.5 to 5.5 VDC
Storage Temperature
-10 to 55°C (without freezing and condensation)
Operating Temperature
0 to 40°C
Storage Humidity
30 to 85%
Operating Humidity
30 to 80%
Note: With no condensation or icing.
Performance
Item
Flow Velocity
Flow Direction
Characteristic
Range
±1.0m/s in each axis
Accuracy
±3%F.S. in each axis
Range
0 to 360°
Accuracy
±15° (at 0.3m/s)
Note: 1. Flow velocity is determined by our standard wind tunnel (300 mm
square), and this does not indicate the flow velocity specified in
Measurement law. (Fig.1 shows our standard wind tunnel)
Fig. 1. Wind Tunnel
Fan
Laminar Element
Flow velocity
measurement point
Laminar element
2-Axis Flow Sensor
@300
200
300
300
300
200
(Unit: mm)
2500
35
D6F-D
MEMS 2-Axis Flow Sensor
Connection
Fig. 2. Block Diagram
Sensing
Element
Signal
Processing
MCU
RS485
Interface
RJ-45
Connector
1. VCC
2. GND
3. NC
4. TRD(−)
5. TRD(+)
6. NC
7. GND
8. VCC
X-Axis
Flow Sensor
Y-Axis
Flow Sensor
1. VCC
2. GND
3. NC
4. TRD(−)
5. TRD(+)
6. NC
7. GND
8. VCC
Pin
Symbol
1
VCC
Function
2
GND
3
NC
Non-Connection
4
TRD(-)
Serial Interface
5
TRD(+)
Serial Interface
6
NC
Non-Connection
7
GND
Ground
8
VCC
Power Supply Voltage
Power Supply Voltage
Ground
The sensor has two port of RJ-45 connectors (8 pins), and all the pair of each pin is connected internally.
These connectors can be used for daisy chain wiring when using multiple devices on the same bus (multi-drop connection).
The standard CAT5e straight LAN cable can be used for the electrical connection.
Interface
Item
Interface
Specifications
RS-485
Wire Connection
Multi-drop connection with daisy chain wiring (32 devices max.)
Communication system
2 wires : Half duplex
Baud rate
9600bps or 38400bps : DIP switch* selectable
Protocol
Modbus-RTU
Transmission code
Binary
Data length
8 bit
Stop bit
1 bit
Parity
None
Response time
250 ms max.
Command interval
10 ms min. (Minimum wait time after receiving the response from the device to the consecutive command transmission)
Slave address
1 to 32 (0x01 to 0x20) : DIP switch* selectable
Termination resistor
Built-in termination resistor : DIP switch* selectable
* The communication settings of this device can be set by DIP switch configuration as shown in Fig. 3.
All bits are switched off before shipment.
36
D6F-D
MEMS 2-Axis Flow Sensor
Fig. 3. DIP Switches
Circuits
8
1
ON
OFF
Function
ON
OFF
Enable
Disable
38400bps
9600bps
8
Built-in termination resistor
7
Baud rate
6
None
-
-
5
Slave Address : bit 4
1
0
4
Slave Address : bit 3
1
0
3
Slave Address : bit 2
1
0
2
Slave Address : bit 1
1
0
1
Slave Address : bit 0
1
0
Note: Slave address of the device = 1 + (5 bit of integer consisting of circuit
number 1 to 5).
Fig. 4. Connection Example to Link Three Sensors
Fig. 4 shows an example of multi-drop connection when connecting three devices on the same bus.
In this case, slave address, baud rate and built-in termination resistor of each device must be set properly.
SlaveAddress 0x01
Termination: Disable
SlaveAddress 0x02
Termination: Disable
SlaveAddress 0x03
Termination: Enable
Master
37
D6F-D
MEMS 2-Axis Flow Sensor
Dimensions (Unit: mm)
D6F-D010A32-00
Y axis (−)
60 dia.
X axis (+)
X axis (−)
Y axis (+)
LED Display
Green: Power Indicator
Yellow: Lit when communication
A
Description A
34.7
Power switch Knob position
LEFT: ON (default)
Right: OFF
Cross B-B
30
7
B
3 dia.
Depth1.5
3.6
3.2
*
2.5
6.3 dia.
7
22
3.2
8
B
38
* When using the fixing hole, Please do not exceed
the depth (3.6 mm) of the shaded portion.
D6F-D
MEMS 2-Axis Flow Sensor
Safety Precautions
• Places where the device receives strong electric field effect or
Caution
The sensor is a precision device, and if large shock and load is
applied, it may cause a failure or characteristic change. Please
do not use the sensor which is added excessive shock to the terminals, discompose the cover, or has fallen.
magnetic field effect.
● Noise Countermeasures
• Please check electrical noise condition before actual use. The
device may not perform as intended by the effect from electrical noise.
• The voltage input that exceeds absolute maximum ratings
Precautions for Correct Use
● Applicable medium and Device mounting
• Depending on the mounting position and the ambient environment, the foreign object such as dust can adhere to the inside
of the device and can cause clogging of the part of flow path.
As a result, the device may not perform as intended. And, the
characteristic specified in this document may not be maintained. Please use the device after enough ex-ante evaluation
under the condition of actual use in order to confirm the performance and safety in the application.
• For the gasses other than the applicable medium, please use
the device in your responsibility after the confirmation of its
performance and safety.
However, do not use in the presence of inflammable gases,
such as hydrogen, methane, ethane, and a liquefied petroleum
gas. In addition, do not use with corrosive gases (such as chlorine, sulfur, acid, alkali, ammonia etc.)
must not be applied. This can damage the electrical circuit of
the device. Place the protection circuit as needed, so that the
voltage to the lines will not exceed absolute maximum ratings.
• Take particular care to install away from AC power transformers, live mains power lines and high power magnetic circuits.
• The device may not operate properly where the place with the
equipment that generates strong high-frequency wave or
surge.
• Please attach surge absorber or noise filter to the peripheral
equipment that generates noise.
• In order to prevent inductive noise, wiring of the device must
be separated from the power line with the high voltage and
large current.
• When using with a switching regulator or DC-DC convertor,
switching noise may affect the device operation.
● Handling
• Please handle with countermeasure against static electricity.
• The direction of the arrow on top of the body shows the posi-
• Do not make a direct solder connection to the integral termi-
tive direction of the device output in each axis. Please install
nals; this may result in damage, and possibly cause failure. It
the device in a correct direction corresponding to the direction
is recommended to use the standard straight CAT5e LAN
of the flow. With the wrong installation, the device cannot measure flow direction correctly.
• After installation, the device may not perform as intended by
the presence of a flow obstacle around the device.
• After Installation, the device operation and its performance
should be checked before actual use in the application.
cable and to ensure correct connection.
• Do not mix up the wiring. This can damage the device and
cause the failure.
• Power must be supplied from the single source. And, do not
apply different voltage to the device from each connector. This
may damage the device and also the host equipment (master).
• Horizontal device orientation (top cover side up) is recom-
• After wiring cables, please do not apply excessive pulling force
mended. If the device orientation is not horizontal, the output
to the connector. Tensile force of 12N or more can cause the
may shift as an offset more than +/3%F.S.. For more details of
offset compensation features, please refer to the communication specification.
• The device may not operate properly, if a foreign object or a
flow obstacle is placed around the entrance of the flow path.
failure.
• Changing DIP switch setting must be done when in power off
state.
● Communication
• When using the multiple devices on the same bus, please
● Use environment
make sure that there is no device that has the same slave
Please do not use the device in the following environments:
address, please refer to the communication specification
• Places where the device directly receives radiant heat from an
apparatus.
• Places where the device is exposed to water, salt water, water
droplets and oil splash.
• Places where the device is exposed to direct sunlight.
• Places with volatile gas, inflammable gas or corrosive gas
(such as chlorine, sulfur, acid, alkali, ammonia etc.)
(No.MDPE-12-0146).
• When using built-in termination resistor, please enable it only
to one device at the end of the bus.
• Please make sure that there are no multiple devices with termination resistors enabled.
• Please make sure that baud rate setting must be same for the
host equipment (master) on the same bus.
• Places where frequent temperature changes.
• Places where dusty condition.
• Places with the possibility of freezing and dew condensation.
• Places where the device receives large magnitudes of vibration and shock.
39
Common Precautions for the D6F Series
Safety Precautions
Precautions for Correct Use
● Sensor Applications
The D6F is built for use with general-purpose devices. In particular, when using the D6F for applications with the safety requirements described below, take steps to ensure system and device
safety through measures such as fail-safe designs, redundant
designs, and regular inspections.
•Safety devices for ensuring safety for persons
•Transportation equipment control (such as applications to
stop operation)
•Aviation and space equipment
•Nuclear power equipment
Do not use the D6F for applications in which D6F operation
would directly affect human life.
● Fluids, Pipe Mounting and Sensor Installation
All D6F Models
(1) Use clean fluids. Install a filter or mist separator on the
inflow pipe. Failure to do so may result in malfunction or
changes in characteristics due to dust or mist. This does not
apply to the D6F-W, D6F-V, D6F-P and D6F-PH.
(2) Do not use corrosive gases other than the specified applicable fluids (such as chlorine, sulfur, acid,or alkali) . Doing so
may cause product failure.
(3) The specified performance may not be obtained if the D6F is
used for fluids other than the specified applicable fluids.
(4) After removing the Sensor from the package, do not allow
foreign particles to enter the piping. Foreign particles in the
piping may cause product failure.
(5) Install the Sensor so that the fluid flows in the direction indicated by the arrow on the Sensor. Correct measurements
cannot be obtained if the fluid flows in the wrong direction.
This does not apply to the D6F-V, D6F-P and D6F-PH.
(6) It is recommended that the Sensor (except for the D6F-A3)
be mounted horizontally. If it is not mounted horizontally, an
error of ±1% FS or higher may result.
(7) Install the Sensor on a flat surface. Incorrect installation may
damage the Sensor and make it impossible to obtain correct
measurements.
(8) Make sure that the power to all equipment is turned OFF
before you install the Sensor. Installing the Sensor while the
power supply is ON may result in electrical shock or abnormal operation.
(9) Always check operation after installation.
(10) Do not drop the Sensor or disassemble the cover.
D6F-A1
(1) Make sure that pipes with bamboo joints are airtight. Correct
measurements cannot be obtained if there is leakage from
joints.
(2) Use M3 panhead screws to install the Sensor, and tighten
them to a maximum torque of 0.59 N•m.
40
D6F-N2/-L2
(1) Use the Rc 1/4 tapped threads for the pipes, and tighten the
threads to a maximum torque of 5 N•m. Tightening beyond
this value may result in fractures, which can cause leaks.
Apply a suitable amount of pipe sealer. Do not apply sealer
on the first two threads from the end of the threaded section.
When you tighten the pipes, do not allow foreign matter or
oil on the joint area.
(2) Use M3 panhead screws to install the Sensor, and tighten
them to a maximum torque of 0.59 N•m.
D6F-A3
(1) When installing the pipes, use M5 screws for the joints and
tighten to a torque of 1.5 N•m maximum. Use sealing tape to
make the joints airtight. Incorrect installation may make it
impossible to obtain correct measurements.
(2) It is recommended that the Sensor be mounted either horizontally or vertically. Mounting the Sensor at an angle may
make it impossible to obtain correct measurements.
(3) Use M3 panhead screws to install the Sensor, and tighten
them to a maximum torque of 0.59 N•m.
D6F-A5
(1) Use M3 panhead screws to install the Sensor, and tighten
them to a maximum torque of 0.59 N•m.
(2) Install O-rings to seal the fluid inlet and outlet points. The
recommended O-ring is JIS B 2401, nominal number P5.
Installation Example
OUTLET
O-ring
INLET
D6F-A6/-N6
(1) Use the appropriate threads (R1/4, NPT1/8 or NPT1/2) for
the pipes, and tighten the pipes to a maximum torque of 5
N•m. Tightening beyond this value may result in fractures,
which can cause leaks. When you tighten the pipes, do not
allow foreign matter or oil on the joint area. Use a spanner or
adjustable wrench to turn the connecting section (aluminum
alloy) and connect the pipe. Do not place the spanner or
wrench on the Sensor (PPS). Doing so may damage the
Sensor or result in leaks. Apply a suitable amount of pipe
sealer. Do not apply sealer on the first two threads from the
end of the threaded section. When you tighten the pipes, do
not allow foreign matter or oil on the joint area.
(2) Use M3 panhead screws to install the Sensor, and tighten
them to a maximum torque of 0.59 N•m.
Common Precautions for the D6F Series
D6F-A7/-L7/-N7/-A7D/-AB71/-AB71D
D6F-P0010AM2
(1) Use male quick couplings for the piping, and secure them
with the applicable quick fasteners.
(1) Depending on the ambient environment and installation
location, dust, dirt, and other foreign matter may come in
inside the Sensor and block a part or all of the flow path or
accumulate on internal components. This may result in the
Sensor not being able to perform to the specifications given
above. Always perform a pre-evaluation on your actual
equipment and be aware of the possible problems that may
occur before you use the Sensor with the actual equipment.
(2) Do not apply excessive force to the adapter section when
connecting the pipes. If strong force is applied to the connected pipes, or if strong force is applied directly to the
adapter section while holding the Sensor, it may damage the
Sensor or cause leakage.
Installation Example
Use male, P10-type quick-connect joints for the D6F-A7/-L7/N7/-A7D and P14-type quick-connect joints for the D6F-AB71/AB71D.
(2) Attach all tubes so that the fluid flows only in the direction
from the positive side (+) to the negative side (-). Install the
Sensor with the manifold facing downward. Refer to the figure on page 26 for the installation direction.
(3) Use M3 panhead screws or equivalent tapping screws to
mount the Sensor, and tighten the screws to a maximum
torque of 0.59 N•m.
Quick fastener
(4) Install O-rings to seal the fluid inlet and outlet points. The
recommended O-ring is JIS B 2401, nominal number P4.
Installation Example
Male quick couplings
M3 panhead screw or a tappin
screw with the same diameter
Applicable male quick coupling dimensions (Unit: mm)
X
Symbol
P10 model
P14 model
A
+0
10 -0.05 dia.
+0
14 -0.05 dia.
B
12.85 ±0.05 dia.
17.85 ±0.05 dia.
C
20 dia.
26 dia.
D
17 dia. max.
22 dia. max.
X
9 max.
1.6 max.
2.5±0.05
2 min.
2 min.
R0.4
C
D
A
R0.4
B
C0.1
Y
C0.3
2.5
+0.25
-0
C0.5
CROSS X-X
Description Y
Note. There is a possibility that leak damage or faulty of the body occurs when
static load of more than 40 N is applied to 300 mm from the center of
product as fulcrum point.
D6F-P0001A1/-P0010A1/-P0010A2
(1) Depending on the ambient environment and installation
location, dust, dirt, and other foreign matter may come in
inside the Sensor and block a part or all of the flow path or
accumulate on internal components. This may result in the
Sensor not being able to perform to the specifications given
above. Always perform a pre-evaluation on your actual
equipment and be aware of the possible problems that may
occur before you use the Sensor with the actual equipment.
(2) Attach all tubes so that the fluid flows only in the direction
from the positive side (+) to the negative side (-).
Refer to the figure on page 26 for the installation direction.
(3) For PCB-mounting Sensors, perform terminal soldering only
after the Sensor is secured into place on the PCB.
Use a soldering iron for 5 s at 350°C with a pressure of 100
gf max. (This applies only to PCB-mounting Sensors.)
O-ring
D6F-PH
(1) Depending on the ambient environment and installation
location, dust, dirt, and other foreign matter may come in
inside the Sensor and block a part or all of the flow path or
accumulate on internal components. This may result in the
Sensor not being able to perform to the specifications given
above. Always perform a pre-evaluation on your actual
equipment and be aware of the possible problems that may
occur before you use the Sensor with the actual equipment.
(2) Attach all tubes so that the fluid flows only in the direction
from the high pressure side (+) to the low pressure side (-).
(3) Use M1.8 panhead screws or equivalent tapping screws to
mount the Sensor, and tighten the screws to a maximum
torque of 0.36 N•m.
(4) The sensor output is affected with the length of a tube. The
error is less than 1% with a tube (ID:4mm) length up to
800mm.
(5) Connection
•Wire with the correct terminal names and polarities. Incorrect wiring will cause failure of internal components.
•Do not use flow soldering.
•Please solder after fixed on the circuit board by screw.
•Use a soldering iron:
Soldering condition Pressure Max.100gf
Temperature 350 degree C
Time Max. 5s
(4) Use M2.6 panhead screws or equivalent tapping screws to
mount the Sensor, and tighten the screws to a maximum
torque of 0.59 N•m.
41
Common Precautions for the D6F Series
D6F-W
● Countermeasures against Noise
(1) Depending on the ambient environment and installation
location, dust, dirt, and other foreign matter may come in
inside the Sensor and block a part or all of the flow path or
accumulate on internal components. This may result in the
Sensor not being able to perform to the specifications given
above. Always perform a pre-evaluation on your actual
equipment and be aware of the possible problems that may
occur before you use the Sensor with the actual equipment.
Noise may make it impossible to obtain correct measurements.
Consider the following countermeasures.
•Allow as much space as possible between the Sensor and
devices that generates high frequencies (such as high-frequency welders and high-frequency sewing machines) or
surges.
•Attach surge absorbers or noise filters to noise-generating
devices that are near the Sensor (in particular, equipment
with inductance, such as motors, transformers, solenoids,
and magnetic coils).
(It also helps to separate pipes and ducts, and to use
shielded cables.)
(2) Use M3 panhead screws to install the Sensor, and tighten
them to a maximum torque of 0.59 N•m.
D6F-V
(1) Depending on the ambient environment and installation
location, dust, dirt, and other foreign matter may come in
inside the Sensor and block a part or all of the flow path or
accumulate on internal components. This may result in the
Sensor not being able to perform to the specifications given
above. Always perform a pre-evaluation on your actual
equipment and be aware of the possible problems that may
occur before you use the Sensor with the actual equipment.
● Power Supply
•Force of connector terminal is 20 N max. Do not add
strength more than tension of wire bending to connector
at wiring. Install the connector coaxially to the fitting axis
with holding all wires. And pulling angle should be within
15 degrees.
•Use the applicable connectors. Directly soldering the connection terminals will cause product failure. (except for the
D6F-PH)
•Check the terminal names and polarity and wire the power
supply correctly. Incorrect wiring will cause failure of internal components.
•When using a commercially available switching regulator, ground
the FG (frame ground) and G (ground) terminals.
(2) Use M3 panhead screws to install the Sensor, and tighten
them to a maximum torque of 0.59 N•m.
(3) This Sensor does not contain any protective circuits. Never
allow the electrical load to exceed the maximum ratings.
Doing so may damage the circuits. Install protective circuits
if required.
(4) Mount the Sensor so that the flow inlet side (the side with
the logo) is perpendicular to the windward side and ensure
that the flow inlet and flow outlet are not blocked in any way.
If the Sensor is not mounted correctly, accurate measurements cannot be made.
Installation Example
● Handling
The sensor is a precision device, and if large shock and load is
applied, it may cause a failure or characteristic change. Please
do not use the sensor which is added excessive shock to the terminals, discompose the cover, or has fallen.
•The sensor shall only be handled in electrostatic discharge protected areas (EPA) under protected and controlled conditions
Downwind
RoHS Directive
The RoHS mark is displayed on the packing of products for
Upwind
which the six substances banned by the RoHS Directive have
been abolished (both in processing and in the electronic compo-
● Operating Environment
Do not use the Sensor in the following locations:
•Locations directly subject to heat radiated from heating
equipment
•Locations subject to water or oil
•Locations subject to direct sunlight
•Locations subject to intense temperature changes
•Locations subject to icing or condensation
•Locations subject to excessive vibration or shock
42
nents mounted to the PCBs).
*
RoHS marking may be terminated if it is later determined that parts that were
previously treated as RoHS compliant are not compliant due to circumstances at the supplier of the parts.
● RoHS Compliance Criteria
The following standards are used to determine RoHS compliance for the six banned substances.
(Items to which the RoHS Directive is not applicable are not
given.)
•Lead: 1,000 ppm max.
•Hexavalent chromium: 1,000 ppm max.
•Mercury: 1,000 ppm max.
•PBB: 1,000 ppm max.
•Cadmium: 100 ppm max.
•PBDE: 1,000 ppm max.
Terms and Conditions Agreement
Read and understand this catalog.
Please read and understand this catalog before purchasing the products. Please consult your OMRON representative if you have
any questions or comments.
Warranties.
(a) Exclusive Warranty. Omron’s exclusive warranty is that the Products will be free from defects in materials and workmanship
for a period of twelve months from the date of sale by Omron (or such other period expressed in writing
by Omron). Omron disclaims all other warranties, express or implied.
(b) Limitations. OMRON MAKES NO WARRANTY OR REPRESENTATION, EXPRESS OR IMPLIED, ABOUT
NON-INFRINGEMENT, MERCHANTABILITY OR FITNESS FOR A PARTICULAR PURPOSE OF THE
PRODUCTS. BUYER ACKNOWLEDGES THAT IT ALONE HAS DETERMINED THAT THE PRODUCTS WILL
SUITABLY MEET THE REQUIREMENTS OF THEIR INTENDED USE.
Omron further disclaims all warranties and responsibility of any type for claims or expenses based on infringement by the Products
or otherwise of any intellectual property right. (c) Buyer Remedy. Omron’s sole obligation hereunder shall be, at Omron’s election,
to (i) replace (in the form originally shipped with Buyer responsible for labor charges for removal or replacement thereof) the
non-complying Product, (ii) repair the non-complying Product, or (iii) repay or credit Buyer an amount equal to the purchase price
of the non-complying Product; provided that in no event shall Omron be responsible for warranty, repair, indemnity or any other
claims or expenses regarding the Products unless Omron’s analysis confirms that the Products were properly handled, stored,
installed and maintained and not subject to contamination, abuse, misuse or inappropriate modification. Return of any Products by
Buyer must be approved in writing by Omron before shipment. Omron Companies shall not be liable for the suitability or
unsuitability or the results from the use of Products in combination with any electrical or electronic components, circuits, system
assemblies or any other materials or substances or environments. Any advice, recommendations or information given orally or in
writing, are not to be construed as an amendment or addition to the above warranty.
See http://www.omron.com/global/ or contact your Omron representative for published information.
Limitation on Liability; Etc.
OMRON COMPANIES SHALL NOT BE LIABLE FOR SPECIAL, INDIRECT, INCIDENTAL, OR CONSEQUENTIAL DAMAGES,
LOSS OF PROFITS OR PRODUCTION OR COMMERCIAL LOSS IN ANY WAY CONNECTED WITH THE PRODUCTS,
WHETHER SUCH CLAIM IS BASED IN CONTRACT, WARRANTY, NEGLIGENCE OR STRICT LIABILITY.
Further, in no event shall liability of Omron Companies exceed the individual price of the Product on which liability is asserted.
Suitability of Use.
Omron Companies shall not be responsible for conformity with any standards, codes or regulations which apply to the
combination of the Product in the Buyer’s application or use of the Product. At Buyer’s request, Omron will provide applicable
third party certification documents identifying ratings and limitations of use which apply to the Product. This information by itself is
not sufficient for a complete determination of the suitability of the Product in combination with the end product, machine, system,
or other application or use. Buyer shall be solely responsible for determining appropriateness of the particular Product with
respect to Buyer’s application, product or system. Buyer shall take application responsibility in all cases.
NEVER USE THE PRODUCT FOR AN APPLICATION INVOLVING SERIOUS RISK TO LIFE OR PROPERTY OR IN LARGE
QUANTITIES WITHOUT ENSURING THAT THE SYSTEM AS A WHOLE HAS BEEN DESIGNED TO ADDRESS THE RISKS,
AND THAT THE OMRON PRODUCT(S) IS PROPERLY RATED AND INSTALLED FOR THE INTENDED USE WITHIN THE
OVERALL EQUIPMENT OR SYSTEM.
Programmable Products.
Omron Companies shall not be responsible for the user’s programming of a programmable Product, or any consequence thereof.
Performance Data.
Data presented in Omron Company websites, catalogs and other materials is provided as a guide for the user in determining
suitability and does not constitute a warranty. It may represent the result of Omron’s test conditions, and the user must correlate it
to actual application requirements. Actual performance is subject to the Omron’s Warranty and Limitations of Liability.
Change in Specifications.
Product specifications and accessories may be changed at any time based on improvements and other reasons. It is our practice
to change part numbers when published ratings or features are changed, or when significant construction changes are made.
However, some specifications of the Product may be changed without any notice. When in doubt, special part numbers may be
assigned to fix or establish key specifications for your application. Please consult with your Omron’s representative at any time to
confirm actual specifications of purchased Product.
Errors and Omissions.
Information presented by Omron Companies has been checked and is believed to be accurate; however, no responsibility is
assumed for clerical, typographical or proofreading errors or omissions.
• Application examples provided in this document are for reference only. In actual applications, confirm equipment functions and safety before using the product.
• Consult your OMRON representative before using the product under conditions which are not described in the manual or applying the product to nuclear control systems, railroad
systems, aviation systems, vehicles, combustion systems, medical equipment, amusement machines, safety equipment, and other systems or equipment that may have a serious
influence on lives and property if used improperly. Make sure that the ratings and performance characteristics of the product provide a margin of safety for the system or
equipment, and be sure to provide the system or equipment with double safety mechanisms.
Note: Do not use this document to operate the Unit.
OMRON Corporation
Electronic and Mechanical Components Company
Contact: www.omron.com/ecb
Cat. No. X211-E1-02
0616(0316)(O)