TDI-CCD area image sensor S8658-01/01F Image sensor with a long, narrow photosensitive area for X-ray imaging The S8658-01 is an front-illuminated FFT-CCD image sensor developed for X-ray imaging. A FOS (Fiber Optic plate with Scintillator) sensitive to X-rays is directly coupled to the CCD chips, allowing X-ray imaging with high precision. Three CCD chips are arranged in close proximity to configure a long photosensitive area (approx. 220 mm). The S8658-01 CCD image sensor features TDI operation that allows capturing clear, sharp X-ray images of objects moving on a belt conveyor, making it ideal for non-destructive X-ray inspection. FOP type not coated with scintillator material is also provided (S8658-01F). Features Applications 1536 × 128 pixel (× 3 chips) General X-ray imaging Pixel size: 48 × 48 μm Non-destructive inspection Slit-like image of 220 mm long by aligning 3 CCD chips together Dental panorama, cephalo TDI (time delay integration) operation 100% fill factor Wide dynamic range Low dark current MPP operation Specifications Parameter CCD structure Window Photosensitive area (H × V) X-ray photosensitive area Pixel size (H × V) Number of total pixels (H × V) Number of effective pixels (H × V) Fill factor Vertical clock phase Horizontal clock phase Output circuit X-ray resolution Total dose irradiation Package Cooling S8658-01 S8658-01F Full frame transfer or TDI FOS (fiber optic plate with scintillator) FOP (fiber optic plate)*1 73.728 × 6.144 mm (× 3 chips) 220 × 6 mm 48 × 48 μm 1536 × 128 pixel (× 3 chips) 1536 × 128 (× 3 chips) 100% 2 phases and 2 lines 2 phases and 2 lines Two-stage MOSFET source follower with load resistance 4 to 6 Lp/mm at 60 kVp, 20 μGy 50 Gy max. 60-pin ceramic Non-cooled *1: When using this product for X-ray detection, the user must affix a phosphor sheet to the photosensitive area. www.hamamatsu.com 1 TDI-CCD area image sensor S8658-01/-01F Absolute maximum ratings (Ta=25 °C) Parameter Storage temperature Operating temperature OD voltage RD voltage ISV voltage IGV voltage IGH voltage SG voltage OG voltage RG voltage TG voltage Symbol Tstg Topr VOD VRD VISV VIGV VIGH VSG VOG VRG VTG VP1AV, VP2AV Vertical clock voltage VP1BV, VP2BV VP1AH, VP2AH Horizontal clock voltage VP1BH, VP2BH Note: Exceeding the absolute maximum ratings even momentarily may product within the absolute maximum ratings. Min. -20 0 -0.5 -0.5 -0.5 -15 -15 -15 -15 -15 -15 Typ. - Max. +70 +40 +20 +18 +18 +15 +15 +15 +15 +15 +15 Unit °C °C V V V V V V V V V -15 - +15 V -15 - +15 V cause a drop in product quality. Always be sure to use the Operating conditions (MPP mode, Ta=25 °C) Parameter Output transistor drain voltage Reset drain voltage Output gate voltage Output transistor ground voltage Substrate voltage Vertical input source Vertical input gate Test point Horizontal input gate High Vertical shift register clock voltage Low High Horizontal shift register clock voltage Low Summing gate voltage Reset gate voltage Transfer gate voltage High Low High Low High Low Symbol VOD VRD VOG VSSA VSSD VISV VIGV VIGH VP1AVH, VP2AVH VP1BVH, VP2BVH VP1AVL, VP2AVL VP1BVL, VP2BVL VP1AHH, VP2AHH VP1BHH, VP2BHH VP1AHL, VP2AHL VP1BHL, VP2BHL VSGH VSGL VRGH VRGL VTGH VTGL Min. 12 12 -0.5 -5 -8 -8 Typ. 15 13 2 0 0 VRD 0 0 Max. 18 14 5 - 0 3 6 -9 -8 -7 0 3 6 -9 -8 -7 0 -9 0 -9 0 -9 3 -8 3 -8 3 -8 6 -7 6 -7 6 -7 Unit V V V V V V V V V V V Electrical characteristics (Ta=25 °C) Parameter Signal output frequency Reset clock frequency Vertical shift register capacitance Horizontal shift register capacitance Summing gate capacitance Reset gate capacitance Transfer gate capacitance Transfer efficiency DC output level Output impedance Power dissipation Symbol fc frg CP1AV, CP2AV CP1BV, CP2BV CP1AH, CP2AH CP1BH, CP2BH CSG CRG CTG CTE Vout Zo P Remark *2 *3 *3 *3 *4 Min. - Typ. 2 2 Max. 4 4 Unit MHz MHz - 15000 - pF - 500 - pF 0.99995 5 - 15 10 500 0.99999 8 500 60 11 - pF pF pF V Ω mW *2: Measured at half of the full well capacity. CTE is defined per pixel. *3: VOD=15 V *4: Power dissipation of the on-chip amplifier (each chip) 2 TDI-CCD area image sensor S8658-01/-01F Electrical and optical characteristics (Ta=25 °C unless otherwise noted) Parameter Saturation output voltage Symbol Vsat Vertical Horizontal Summing Full well capacity Fw CCD node sensitivity Dark current (MPP mode) Ta=25 °C Ta=-40 °C Readout noise Remark Dynamic range X-ray response nonuniformity (S8658-01) Photo response nonuniformity (S8658-01F) White spots Point defects*11 Black spots Blemish Cluster defects Column defects X-ray resolution (S8658-01) Sv DS *5 *6 Nr *7 DR XRNU PRNU *8 *9 *10 - *12 *13 Min. 600 600 600 0.45 5000 Typ. Fw × Sv 1200 1200 1200 0.6 8 90 60 20000 Max. 24 120 - - ±10 ±30 4 6 10 10 0 0 - ΔR VOD=15 V Dark current doubles for every 5 to 7 °C. Operating frequency=2 MHz Dynamic range = Full well capacity / Readout noise X-ray irradiation of 60kVp, measured at half of the full well capacity Measuring region that is within 146.0 mm (H) × 6.0 mm (V) (refer to dimensional outline) Fixed pattern noise (peak to peak) XRNU [%] = × 100 Signal *10: Measured at one-half of the saturation output (full well capacity) using LED light (peak emission wavelength: 565 nm) Fixed pattern noise (peak to peak) PRNU [%] = × 100 Signal *11: White spots > 20 times of typ. dark signal (8 ke-/pixel/s) Black spots > 50% reduction in response relative to adjacent pixels, measured at half of the full well capacity *12: continuous 2 to 9 point defects *13: continuous >10 point defects Unit V keμV/eke-/pixel/s e-rms % Lp/mm *5: *6: *7: *8: *9: Resolution (S8658-01) Output voltage vs. X-ray exposure (S8658-01) (X-ray source: 60 kVp) 1.0 (X-ray source: 70 kVp, filter: aluminum 4 mmt) 1000 0.9 Output voltage (mV) 0.8 0.7 CTF 0.6 0.5 0.4 0.3 500 0.2 0.1 0 0 1 2 3 4 5 6 7 8 9 10 0 0 10 20 30 40 X-ray exposure (μGy) Spatial frequency (Line pair/mm) KMPDB0248EA KMPDB0249EB 3 TDI-CCD area image sensor S8658-01/-01F Device structure Left chip (chip A), Center chip (chip B) Right chip (chip C) C20 ISV C19 IGV ...... ...... 6 5 4 3 2 1 2 3 4 ...... 125 126 127 128 ...... SSA A3, B3 OS A4, B4 OD A5, B5 C17 P2BV C16 P1AV C15 P2AV C14 TG C12 RD C11 SSA C10 OS C9 OD OG A6, B6 SG A7, B7 C18 P1BV C13 RG S6 S5 S4 S3 S2 S1 RD A2, B2 ...... 1536 1535 1534 1533 1532 1531 TG A20, B20 RG A1, B1 S1536 S1535 S1534 S1533 S1532 S1531 P2AV A19, B19 1531 1532 1533 1534 1535 1536 P1AV A18, B18 S1531 S1532 S1533 S1534 S1535 S1536 P2BV A17, B17 1 2 3 4 ...... 125 126 127 128 2 3 4 5 6 P1BV A16, B16 S1 S2 S3 S4 S5 S6 ISV A14, B14 IGV A15, B15 A8, B8 P2AH A9, B9 P1AH A10, B10 SSD A11, B11 P2BH A12, B12 A13, B13 P1BH IGH C1 C2 IGH P1BH S1, ... , S1536: ACTIVE ELEMENTS C3 P2BH C4 SSD C5 P1AH C6 P2AH C8 OG C7 SG S1, ... , S1536: ACTIVE ELEMENTS KMPDC0143EA Pixel format Blank 0 Optical black 0 ← Left Horizontal Direction → Right Isolation Effective Isolation 0 1536 0 Optical black 0 Blank 0 Top ← Horizontal Direction → Right Isolation Effective Isolation 0 128 0 Timing chart (TDI operation) Tpwv P1AV, P1BV P2AV, P2BV TG P1AH, P1BH P2AH, P2BH SG RG OS Enlarged view Tovr Tpwh, Tpws TG P1AH, P1BH P2AH, P2BH SG RG Tpwr OS S1 S2 S3 S4 S5 S1535 S1536 KMPDC0142EB 4 TDI-CCD area image sensor S8658-01/-01F Timing chart (TDI operation, 2 × 2 pixel binning) Tpwv P1AV, P1BV P2AV, P2BV TG P1AH, P1BH P2AH, P2BH SG RG OS Enlarged view Tovr Tpwh, Tpws TG P1AH, P1BH P2AH, P2BH SG RG Tpwr OS S1 + S2 S3 + S4 S1535 + S1536 KMPDC0111EC Parameter Pulse width P1AV, P1BV, P2AV, P2BV, TG Rise and fall times Pulse width P1AH, P1BH, P2AH, P2BH Rise and fall times Duty ratio Pulse width SG Rise and fall times Duty ratio Pulse width RG Rise and fall times TG-P1AH, P1BH Overlap time Symbol tpwv tprv, tpfv tpwh tprh, tpfh tpws tprs, tpfs tpwr tprr, tpfr tovr Remark *16 *17 *17 Min. 30 200 125 10 125 10 10 5 10 Typ. 60 250 50 250 50 50 20 Max. - Unit μs ns ns ns % ns ns % ns ns μs *16: TG terminal can be short-circuited to P2AV terminal. *17: Symmetrical clock pulses should be overlapped at 50% of maximum pulse amplitude. 5 TDI-CCD area image sensor S8658-01/-01F Dimensional outline (unit: mm) S8658-01 X-ray photosensitive area 220.0 (H) × 6.0 (V) 5.6 FOP 228.0 ± 0.3 FOP 3.0 A20 ← A14 28.0 ± 0.3 TDI direction 60.96 ± 0.2 B20 *1 Left chip → A1 15.24 ± 0.2 A13 45.72 ± 0.2 ← 60.96 ± 0.2 1.6 C20 ← C14 B14 *2 Center chip Right chip B1 → B13 30.48 ± 0.2 45.72 ± 0.2 C1 → 25.4 FOP 7.2 ± 0.2 223.0 ± 0.5 C13 3.4 Scintillator 0.45 ± 0.1 Center chip Center chip Edge pixel Edge pixel Dead space 1 250 μm min. 350 μm max. Dead space 2 130 μm min. 200 μm max. ±50 μm max. Left chip *2 details ±50 μm max. *1 details 2.54 ± 0.1 Right chip Tolerance (unless otherwise noted) <1 mm : ±0.2 mm 1≤ to <5 mm : ±0.5 mm 5mm ≤ : ±1.0 mm KMPDA0149EF 6 TDI-CCD area image sensor S8658-01/-01F S8658-01F 5.2 FOP 228.0 ± 0.3 FOP 3.0 FOP 7.2 ± 0.2 223.0 ± 0.5 A20 ← A14 15.24 ± 0.2 B20 ← 1.6 60.96 ± 0.2 C20 ← C14 B14 *1 *2 25.4 28.0 ± 0.3 TDI direction 60.96 ± 0.2 Left chip A1 → A13 45.72 ± 0.2 Center chip Right chip B1 → B13 30.48 ± 0.2 45.72 ± 0.2 C1 → C13 3.4 0.45 ± 0.1 Center chip Center chip Edge pixel Edge pixel Dead space 1 250 μm min. 350 μm max. Dead space 2 130 μm min. 200 μm max. ±50 μm max. Left chip *2 details ±50 μm max. *1 details 2.54 ± 0.1 Right chip Tolerance (unless otherwise noted) <1 mm : ±0.2 mm 1≤ to <5 mm : ±0.5 mm 5 mm ≤ : ±1.0 mm KMPDA0288EC 7 TDI-CCD area image sensor S8658-01/-01F Pin connections Pin no. A1, B1 A2, B2 A3, B3 A4, B4 A5, B5 A6, B6 A7, B7 A8, B8 A9, B9 A10, B10 A11, B11 A12, B12 A13, B13 A14, B14 A15, B15 A16, B16 A17, B17 A18, B18 A19, B19 A20, B20 C1 C2 C3 C4 C5 C6 C7 C8 C9 C10 C11 C12 C13 C14 C15 C16 C17 C18 C19 C20 Symbol RG RD SSA OS OD OG SG P2AH P1AH SSD P2BH P1BH IGH ISV IGV P1BV P2BV P1AV P2AV TG IGH P1BH P2BH SSD P1AH P2AH SG OG OD OS SSA RD RG TG P2AV P1AV P2BV P1BV IGV ISV Description Reset gate Reset drain Analog ground Output transistor source Output transistor drain Output gate Summing gate CCD horizontal register clock A-2 CCD horizontal register clock A-1 Digital ground CCD horizontal register clock B-2 CCD horizontal register clock B-1 Test point (horizontal input gate) Test point (vertical input source) Test point (vertical input gate) CCD vertical register clock B-1 CCD vertical register clock B-2 CCD vertical register clock A-1 CCD vertical register clock A-2 Transfer gate Test point (horizontal input gate) CCD horizontal register clock B-1 CCD horizontal register clock B-2 Digital ground CCD horizontal register clock A-1 CCD horizontal register clock A-2 Summing gate Output gate Output transistor drain Output transistor source Analog ground Reset drain Reset gate Transfer gate CCD vertical register clock A-2 CCD vertical register clock A-1 CCD vertical register clock B-2 CCD vertical register clock B-1 Test point (vertical input gate) Test Point (vertical input source) Remark Same timing as P2AH Same timing as P1AH Shorted to RD Same timing as P1AV Same timing as P2AV Same timing as P1AH Same timing as P2AH Same timing as P2AV Same timing as P1AV Shorted to RD 8 TDI-CCD area image sensor S8658-01/-01F Precautions (electrostatic countermeasures) ∙ Handle these sensors with bare hands or wearing cotton gloves. In addition, wear anti-static clothing or use an anti-static wrist band, in order to prevent electrostatic damage due to electrical charges from friction. ∙ Avoid directly placing these sensors on a work-desk or work-bench that may carry an electrostatic charge. ∙ Provide ground lines or ground connection with the work-floor, work-desk and work-bench to allow static electricity to discharge. ∙ Ground the tools used to handle these sensors, such as tweezers and soldering irons. It is not always necessary to provide all the electrostatic measures stated above. Take these measures as needed to prevent electrostatic damage to the sensor. Information described in this material is current as of December, 2013. Product specifications are subject to change without prior notice due to improvements or other reasons. This document has been carefully prepared and the information contained is believed to be accurate. In rare cases, however, there may be inaccuracies such as text errors. Before using these products, always contact us for the delivery specification sheet to check the latest specifications. Type numbers of products listed in the delivery specification sheets or supplied as samples may have a suffix "(X)" which means preliminary specifications or a suffix "(Z)" which means developmental specifications. The product warranty is valid for one year after delivery and is limited to product repair or replacement for defects discovered and reported to us within that one year period. However, even if within the warranty period we accept absolutely no liability for any loss caused by natural disasters or improper product use. Copying or reprinting the contents described in this material in whole or in part is prohibited without our prior permission. www.hamamatsu.com HAMAMATSU PHOTONICS K.K., Solid State Division 1126-1 Ichino-cho, Higashi-ku, Hamamatsu City, 435-8558 Japan, Telephone: (81) 53-434-3311, Fax: (81) 53-434-5184 U.S.A.: Hamamatsu Corporation: 360 Foothill Road, P.O.Box 6910, Bridgewater, N.J. 08807-0910, U.S.A., Telephone: (1) 908-231-0960, Fax: (1) 908-231-1218 Germany: Hamamatsu Photonics Deutschland GmbH: Arzbergerstr. 10, D-82211 Herrsching am Ammersee, Germany, Telephone: (49) 8152-375-0, Fax: (49) 8152-265-8 France: Hamamatsu Photonics France S.A.R.L.: 19, Rue du Saule Trapu, Parc du Moulin de Massy, 91882 Massy Cedex, France, Telephone: 33-(1) 69 53 71 00, Fax: 33-(1) 69 53 71 10 United Kingdom: Hamamatsu Photonics UK Limited: 2 Howard Court, 10 Tewin Road, Welwyn Garden City, Hertfordshire AL7 1BW, United Kingdom, Telephone: (44) 1707-294888, Fax: (44) 1707-325777 North Europe: Hamamatsu Photonics Norden AB: Thorshamnsgatan 35 16440 Kista, Sweden, Telephone: (46) 8-509-031-00, Fax: (46) 8-509-031-01 Italy: Hamamatsu Photonics Italia S.R.L.: Strada della Moia, 1 int. 6, 20020 Arese, (Milano), Italy, Telephone: (39) 02-935-81-733, Fax: (39) 02-935-81-741 China: Hamamatsu Photonics (China) Co., Ltd.: 1201 Tower B, Jiaming Center, No.27 Dongsanhuan Beilu, Chaoyang District, Beijing 100020, China, Telephone: (86) 10-6586-6006, Fax: (86) 10-6586-2866 Cat. No. KMPD1078E10 Dec. 2013 DN 9