KXD94 Series Accelerometers and Inclinometers FEATURES MARKETS Small Package - 5x5x1.2mm DFN Multiplexed Analog Output APPLICATIONS Automotive Internal 1KHz Low Pass Filter \\ Active Suspension Stability Control Telematics/GPS Low Noise Lead-free Solderability Excellent Temperature Performance High Shock Survivability Low Power Consumption User Definable Bandwidth Factory Programmable Offset and Sensitivity Industrial Platform Stabilization Drill Orientation Event Detection Vibration Analysis Appliance Monitoring Self-test Function PROPRIETARY TECHNOLOGY These high-performance silicon micromachined linear accelerometers and inclinometers consist of a sensor element and an ASIC packaged in a 5x5x1.2mm Dual Flat No-lead (DFN). The sensor element is fabricated from single-crystal silicon with proprietary Deep Reactive Ion Etching (DRIE) processes, and is protected from the environment by a hermetically-sealed silicon cap at the wafer level. The KXD94 series is designed to provide a high signal-to-noise ratio with excellent performance over temperature. These sensors can accept supply voltages between 2.5 – 5.25V. Sensitivity is factory programmable for applications requiring from ±5.0g to ±15.0g ranges. Sensor bandwidth is user-definable. The sensor element functions on the principle of differential capacitance. Acceleration causes displacement of a silicon structure resulting in a change in capacitance. An ASIC, using a standard CMOS manufacturing process, detects and transforms changes in capacitance into an analog output voltage, which is proportional to acceleration. The sense element design utilizes common mode cancellation to decrease errors from process variation, temperature, and environmental stress. 36 Thornwood Dr. - Ithaca, NY 14850 USA tel: 607-257-1080 - fax: 607-257-1146 - www.kionix.com - [email protected] “Kionix” is a registered trademark of Kionix, Inc. Products described herein are protected by patents issued or pending. Information provided in this document is believed to be accurate and reliable but is not guaranteed. Kionix does not assume responsibility for its use or distribution. No license is granted by implication or otherwise under any patent or other rights of Kionix. Kionix reserves the right to change product specifications or discontinue this product at any time without prior notice. © Kionix 2010 All Rights Reserved July 27, 2010 Rev. 1.2 Page 1 of 2 KXD94 Series Accelerometers and Inclinometers PERFORMANCE SPECIFICATIONS The performance parameters below are programmed and tested at 5.0 volts. PERFORMANCE SPECIFICATIONS PARAMETERS UNITS KXD94-2802 KXD94-7228 CONDITION g ±10 ±13 Factory programmable Range 0g Offset vs. Temp. mg/°C ±1.0 typical Sensitivity vs. Temp %/°C ±0.01 g / Hz 100 typical On filter pins Hz 800 typical -3dB % of FS 0.1 typical % of full scale output Noise Density Bandwidth 1 Non-Linearity Ratiometric Error % ±0.2 (XY) ±0.1 (Z) Cross-axis Sensitivity % 2.0 typical Power Supply V 5.0 typical mA ±0.5 typical 1.20 typical 5.0V ± 5% Standard 1.10 typical Operating Current Consumption µA 5 max Standby ENVIRONMENTAL SPECIFICATIONS PARAMETERS UNITS KXD94-2802 KXD94-7228 CONDITION Operating Temperature °C -40 to +85 (Consumer/ Industrial) -40 to +125 (Automotive) Powered Storage Temperature °C -55 to 150 Mechanical Shock g 5000 ESD V 3000 Unpowered Powered and unpowered, 0.5 msec halversine Human body model NOTE 1 Internal 1 KHz low pass filter. Lower frequencies are user definable with external capacitors. ORDERING GUIDE Axis(es) of Sensitivity Range (g) Sensitivity (mV/g) Offset (V) Operating Voltage (V) Temperature (°C) Package KXD94-2802 XYZ 10 200 2.5 5.0 -40 to +85 5x5x1.2 DFN KXD94-7044 X 13 150 2.5 5.0 -40 to +125 5x5x1.2 DFN KXD94-7138 X 5 400 2.5 5.0 -40 to +125 5x5x1.2 DFN KXD94-7228 XYZ 13 150 2.35 (X) 2.5 (Y, Z) 5.0 -40 to +125 5x5x1.2 DFN Product © Kionix 2010 All Rights Reserved July 27, 2010 Rev. 1.2 Page 2 of 2