PART NUMBER: ± 2g Tri-axis Accelerometer Specifications KXR94-1050 Rev. 2 Aug-2010 Product Description The KXR94-1050 is a Tri-axis, silicon micromachined accelerometer with a full-scale output range of +/-2g (19.6 m/s/s). The sense element is fabricated using Kionix’s proprietary plasma micromachining process technology. Acceleration sensing is based on the principle of a differential capacitance arising from acceleration-induced motion of the sense element, which further utilizes common mode cancellation to decrease errors from process variation, temperature, and environmental stress. The sense element is hermetically sealed at the wafer level by bonding a second silicon lid wafer to the device using a glass frit. A separate ASIC device packaged with the sense element provides signal conditioning and self-test. The accelerometer is delivered in a 5 x 5 x 1.2 mm DFN plastic package operating from a 2.5 – 5.25V DC supply. There are 4 factory programmable modes of operation for the KXR94: Mode 00 – The three outputs (X, Y, Z) are read through the digital SPI interface, which is also used to command Selftest and Standby Mode. The digital I/O pads are powered from a separate power pin, and will interface to 1.8V logic. Mode 01 – The three outputs (X, Y, Z) are provided on three analog output pins. The KXR94 also features an integrated 3-channel multiplexer (X, Y, Z). The Enable pin must be high for normal operation and low for power shutdown. Mode 10 – The three outputs (X, Y, Z) are provided on three analog output pins. The KXR94 also features an integrated 4-channel multiplexer (X, Y, Z, Aux In). The Enable pin must be high for normal operation and low for power shutdown. Mode 11 – The three outputs (X, Y, Z) are provided on three analog output pins. The KXR94 also features an integrated 4-channel multiplexer (X, Y, Z, Aux In). The Enable pin must be low for normal operation and high for power shutdown. The KXR94-1050 is factory programmed to be in MODE 10. 36 Thornwood Dr. – Ithaca, NY 14850 tel: 607-257-1080 – fax:607-257-1146 www.kionix.com - [email protected] © 2010 Kionix – All Rights Reserved 323-1672-1008100655 Page 1 of 12 PART NUMBER: ± 2g Tri-axis Accelerometer Specifications KXR94-1050 Rev. 2 Aug-2010 Functional Diagram X Sensor Charge Amplifier Self 10 Test Z Sensor C2 Charge Amplifier 32K 1kHz LPF Output Y 13 C3 Charge Amplifier 32K Output Z 14 C4 Oscillator GND 12 Mux 4 Aux In Logic GND 3 36 Thornwood Dr. – Ithaca, NY 14850 tel: 607-257-1080 – fax:607-257-1146 www.kionix.com - [email protected] Output X 2 Temp Sensor Y Sensor Vdd 8 32K 9 11 Enable NC 6 7 5 S0 S1 Vmux © 2010 Kionix – All Rights Reserved 323-1672-1008100655 Page 2 of 12 PART NUMBER: ± 2g Tri-axis Accelerometer Specifications KXR94-1050 Rev. 2 Aug-2010 Product Specifications Table 1. Mechanical (specifications are for operation at 2.8V and T = 25C unless stated otherwise) Parameters Units Min Typical Operating Temperature Range Zero-g Offset Zero-g Offset Variation from RT over Temp. Sensitivity ºC V mg/ºC mV/g Sensitivity Variation from RT over Temp. %/ºC Offset Ratiometric Error (Vdd = 2.8V ± 5%) mg Sensitivity Ratiometric Error (Vdd = 2.8V ± 5%) % Non-Linearity Cross Axis Sensitivity Self Test Output change on Activation 1 Bandwidth (-3dB) Noise Density (on filter pins) -40 1.358 549 % of FS % g Hz g / √Hz 640 1.4 0.2 560 0.01 (xy) 0.02 (z) 4 1.25 (xy) 0.2 (z) 0.1 2 1.3 (xy) 0.35 (z) 800 45 Max 85 1.442 571 960 Notes: 1. Internal 1 kHz low pass filter. Lower frequencies are user definable with external capacitors. 36 Thornwood Dr. – Ithaca, NY 14850 tel: 607-257-1080 – fax:607-257-1146 www.kionix.com - [email protected] © 2010 Kionix – All Rights Reserved 323-1672-1008100655 Page 3 of 12 PART NUMBER: ± 2g Tri-axis Accelerometer Specifications KXR94-1050 Rev. 2 Aug-2010 Table 2. Electrical (specifications are for operation at 2.8V and T = 25C unless stated otherwise) Parameters Units Min Typical Supply Voltage (Vdd) Operating Operating Current Consumption Standby Analog Output Resistance(Rout) Input Low Voltage Input High Voltage Multiplexer Response Time 1 Power Up Time V A A k V V s ms 2.5 500 24 0.8 * VIO 2.8 950 32 4.5 1 Max 5.25 1400 5 40 0.2 * VIO - Notes: 1. Power up time can also be determined by 5 times the RC time constant of the optional user defined low pass filter. 36 Thornwood Dr. – Ithaca, NY 14850 tel: 607-257-1080 – fax:607-257-1146 www.kionix.com - [email protected] © 2010 Kionix – All Rights Reserved 323-1672-1008100655 Page 4 of 12 PART NUMBER: ± 2g Tri-axis Accelerometer Specifications KXR94-1050 Rev. 2 Aug-2010 Table 3. Environmental Parameters Units Min Target Max Supply Voltage (Vdd) Absolute Limits Maximum Operating Temperature Range Storage Temperature Range Mech. Shock (powered and unpowered) V ºC ºC g -0.3 -40 -55 - - 7.0 125 150 5000 for 0.5ms ESD V - - 3000 HBM Caution: ESD Sensitive and Mechanical Shock Sensitive Component, improper handling can cause permanent damage to the device. This product conforms to Directive 2002/95/EC of the European Parliament and of the Council of the European Union (RoHS). Specifically, this product does not contain lead, mercury, cadmium, hexavalent chromium, polybrominated biphenyls (PBB), or polybrominated diphenyl ethers (PBDE) above the maximum concentration values (MCV) by weight in any of its homogenous materials. Homogenous materials are "of uniform composition throughout." HF This product is halogen-free per IEC 61249-2-21. Specifically, the materials used in this product contain a maximum total halogen content of 1500 ppm with less than 900-ppm bromine and less than 900-ppm chlorine. Soldering Soldering recommendations available upon request or from www.kionix.com. 36 Thornwood Dr. – Ithaca, NY 14850 tel: 607-257-1080 – fax:607-257-1146 www.kionix.com - [email protected] © 2010 Kionix – All Rights Reserved 323-1672-1008100655 Page 5 of 12 PART NUMBER: ± 2g Tri-axis Accelerometer Specifications KXR94-1050 Rev. 2 Aug-2010 Application Schematic X C2 Aux In Vmux S0 S1 1 14 2 13 3 12 4 11 KXR94 5 10 6 9 7 8 Z Y C3 C4 ST Enable Vdd C1 Table 4. KXR94 Pad Descriptions Pad Name 1 NC 2 X output 3 4 5 6 7 8 9 10 11 12 GND Aux In Vmux S0 S1 Vdd Enable ST NC GND 13 Y Output 14 Z Output Center pad Description Not Connected Internally (can be connected to Vdd or Gnd) Analog output of the x-channel. Optionally, a capacitor (C2) placed between this pin and ground will form a low pass filter. Ground Auxiliary input for multiplexer. Connect to Vdd or Ground if not used. Multiplexed analog output. Do not connect if multiplexer is not used. MUX selector 0 (See Output Select Table). Connect to Vdd or Ground if not used. MUX selector 1 (See Output Select Table). Connect to Vdd or Ground if not used. The power supply input. Decouple this pin to ground with a 0.1uF ceramic capacitor (C 1). Enable: High - Normal operation; Low - Device is in standby, power down mode Self Test: Low – Normal operation; High – Device is in self-test mode Not Connected Internally (can be connected to Vdd or Gnd) Ground Analog output of y-channel. Optionally, a capacitor (C3) placed between this pin and ground will form a low pass filter. Analog output of z-channel. Optionally, a capacitor (C4) placed between this pin and ground will form a low pass filter. Ground 36 Thornwood Dr. – Ithaca, NY 14850 tel: 607-257-1080 – fax:607-257-1146 www.kionix.com - [email protected] © 2010 Kionix – All Rights Reserved 323-1672-1008100655 Page 6 of 12 PART NUMBER: ± 2g Tri-axis Accelerometer Specifications KXR94-1050 Rev. 2 Aug-2010 Application Design Equations 1. The bandwidth is determined by the internal 1kHz low pass filter. The user can lower the bandwidth by placing filter capacitors connected from pins 2, 13 and 14 to ground. The response is single pole. Given a desired bandwidth, fBW, the filter capacitors are determined by: C2 C3 C4 4.97 x106 f BW 2. When using not using the multiplexer, the KXR94 is a pin-compatible replacement for Kionix’s KXM52 series of accelerometers. The following application schematic should be used: Pin 4 (Aux in) = Ground Pin 5 (Vmux) = Do Not Connect Pin 6 (S0) = Ground Pin 7 (S1) = Ground X C2 1 14 2 13 3 12 4 KXR94 11 5 10 6 9 7 8 Z Y C3 C4 ST Enable Vdd C1 3. When not connecting the self test pin to a digital I/O port of a microcontroller, Kionix recommends connecting the self test pin to ground. 36 Thornwood Dr. – Ithaca, NY 14850 tel: 607-257-1080 – fax:607-257-1146 www.kionix.com - [email protected] © 2010 Kionix – All Rights Reserved 323-1672-1008100655 Page 7 of 12 PART NUMBER: ± 2g Tri-axis Accelerometer Specifications KXR94-1050 Rev. 2 Aug-2010 USING THE MULTIPLEXED OUTPUT OF THE KXR94 Multiplexer Data Select The KXR94 features an integrated 4-channel multiplexer. This feature reduces system MCU requirements to only 1 ADC and 2 digital I/O’s. The KXR94 uses two select inputs (S0, S1) to control the data flow from Vmux. When a microprocessor toggles the select inputs, the desired output is attained based on the select table. Note that logic 0 is GND and logic 1 is Vdd. S1 0 0 1 1 S0 0 1 0 1 Vmux X Output Z Output Y Output Aux. In Output Select Table Data Sampling Rate When operating in its multiplexed mode, the KXR94 has the ability to achieve very high data sampling rates. Internally, the sensor elements (X, Y, and Z) are sequentially sampled in a “round robin” fashion at a rate of 32kHz per axis. Note that this is a differential capacitance sampling of each sensor element, which stores an analog voltage on the filter cap for each axis. Combine this high sensor element sampling rate with the short 5µs settling time of the integrated multiplexer, and the user can achieve a performance very close to that of the 3 separate analog outputs. This is more than sufficient to eliminate any aliasing in the final application since the KXR94 will be operating with a typical bandwidth of ~50Hz and a maximum of 1000Hz. 36 Thornwood Dr. – Ithaca, NY 14850 tel: 607-257-1080 – fax:607-257-1146 www.kionix.com - [email protected] © 2010 Kionix – All Rights Reserved 323-1672-1008100655 Page 8 of 12 PART NUMBER: ± 2g Tri-axis Accelerometer Specifications KXR94-1050 Rev. 2 Aug-2010 Test Specifications ! Special Characteristics: These characteristics have been identified as being critical to the customer. Every part is tested to verify its conformance to specification prior to shipment. Table 5. Test Specifications Parameter Zero-g Offset @ RT Sensitivity @ RT Current Consumption -- Operating 36 Thornwood Dr. – Ithaca, NY 14850 tel: 607-257-1080 – fax:607-257-1146 www.kionix.com - [email protected] Specification 1.4 +/- 0.042 V 560 +/- 11 mV/g 500 <= Idd <= 1400 uA Test Conditions 25C, Vdd = 2.8 V 25C, Vdd = 2.8 V 25C, Vdd = 2.8 V © 2010 Kionix – All Rights Reserved 323-1672-1008100655 Page 9 of 12 PART NUMBER: ± 2g Tri-axis Accelerometer Specifications KXR94-1050 Rev. 2 Aug-2010 Package Dimensions and Orientation 5 x 5 x 1.2 mm DFN +Y +X +Z +Z +X Dimension A B C D E F G H Min 1.10 0.18 0.35 3.50 4.20 mm Nom 5.00 5.00 1.20 0.23 0.50 0.40 3.60 4.30 Max Min 1.30 0.28 0.043 0.007 0.45 3.70 4.40 0.014 0.138 0.165 inch Nom 0.197 0.197 0.047 0.009 0.020 0.016 0.142 0.169 Max 0.051 0.011 0.018 0.146 0.173 All dimensions and tolerances conform to ASME Y14.5M-1994 36 Thornwood Dr. – Ithaca, NY 14850 tel: 607-257-1080 – fax:607-257-1146 www.kionix.com - [email protected] © 2010 Kionix – All Rights Reserved 323-1672-1008100655 Page 10 of 12 PART NUMBER: ± 2g Tri-axis Accelerometer Specifications KXR94-1050 Rev. 2 Aug-2010 Static X/Y/Z Output Response versus Orientation to Earth’s surface (1g): Position Diagram 1 2 3 4 5 Top 6 Bottom Bottom Top X Y Z 1.4 V 1.96 V 1.4 V 1.96 V 1.4 V 1.4 V 1.4 V 0.84 V 1.4 V 0.84 V 1.4 V 1.4 V 1.4 V 1.4 V 1.96 V 1.4 V 1.4 V 0.84 V X-Polarity Y-Polarity Z-Polarity 0 + 0 + 0 0 0 0 0 0 0 0 + 0 0 - (1g) Earth’s Surface 36 Thornwood Dr. – Ithaca, NY 14850 tel: 607-257-1080 – fax:607-257-1146 www.kionix.com - [email protected] © 2010 Kionix – All Rights Reserved 323-1672-1008100655 Page 11 of 12 PART NUMBER: ± 2g Tri-axis Accelerometer Specifications KXR94-1050 Rev. 2 Aug-2010 Revision History REVISION DESCRIPTION 1 Initial release 2 Corrected typographic error in Table 2 (Typical operating voltage changed from 3.3 to 2.8V) DATE 06-Aug2007 10-Aug2010 "Kionix" is a registered trademark of Kionix, Inc. Products described herein are protected by patents issued or pending. No license is granted by implication or otherwise under any patent or other rights of Kionix. The information contained herein is believed to be accurate and reliable but is not guaranteed. Kionix does not assume responsibility for its use or distribution. Kionix also reserves the right to change product specifications or discontinue this product at any time without prior notice. This publication supersedes and replaces all information previously supplied. 36 Thornwood Dr. – Ithaca, NY 14850 tel: 607-257-1080 – fax:607-257-1146 www.kionix.com - [email protected] © 2010 Kionix – All Rights Reserved 323-1672-1008100655 Page 12 of 12