PART NUMBER: ± 2g Tri-Axis Accelerometer Specifications Rev. A Oct 09 APPROVED BY 36 Thornwood Drive KXR94-2050 DATE J. Bergstrom 8/6/07 TEST MGR. J. Chong 8/6/07 VP ENG. T. Davis 8/6/07 DATE REV'D BY Ithaca, New York 14850 PROD. MGR. Tel: 607-257-1080 Fax: 607-257-1146 www.kionix.com ECN # PCN # REV PG # 09-171 09-171 A REVISION DESCRIPTION Initial Release Update tables to add Special Characteristics. Adjusted current tolerances. 8/6/07 10/19/09 J. Bergstrom "Kionix" is a registered trademark of Kionix, Inc. Products described herein are protected by patents issued or pending. No license is granted by implication or otherwise under any patent or other rights of Kionix. The information contained herein is believed to be accurate and reliable but is not guaranteed. Kionix does not assume responsibility for its use or distribution. Kionix also reserves the right to change product specifications or discontinue this product at any time without prior notice. This publication supersedes and replaces all information previously supplied. © 2007 Kionix, Inc. – All rights reserved Page 1 of 10 PART NUMBER: ± 2g Tri-Axis Accelerometer KXR94-2050 Specifications Rev. A Oct 09 Product Description The KXR94-2050 is a tri-axis, silicon micromachined accelerometer with a full-scale output range of ±2g (19.6m/s2). The sense element is fabricated using Kionix’s proprietary plasma micromachining process technology. Acceleration sensing is based on the principle of a differential capacitance arising from acceleration-induced motion of the sense element, which further utilizes common mode cancellation to decrease errors from process variation, temperature, and environmental stress. The sense element is hermetically sealed at the wafer level by bonding a second silicon lid wafer to the device using a glass frit. A separate ASIC device packaged with the sense element provides signal conditioning and self-test. The accelerometer is delivered in a 5 x 5 x 1.2 mm DFN plastic package operating from a 2.5 – 5.25V DC supply. The three outputs (X, Y, Z) are provided on three analog output pins. The KXR94 also features an integrated 4-channel multiplexer (X, Y, Z, Aux In). The Enable pin must be high for normal operation and low for power shutdown. Functional Diagram X Sensor Charge Amplifier Self 10 Test Z Sensor C2 Charge Amplifier 32K 1kHz LPF Output Y 13 C3 Charge Amplifier 32K Output Z 14 C4 Oscillator GND 12 Mux 4 Aux In Logic GND 3 Page 2 of 10 Output X 2 Temp Sensor Y Sensor Vdd 8 32K 9 11 Enable NC 6 7 5 S0 S1 Vmux PART NUMBER: ± 2g Tri-Axis Accelerometer KXR94-2050 Specifications Rev. A Oct 09 Product Specifications Table 1. Mechanical (specifications are for operation at Vdd = 3.3 V and T = 25ºC unless stated otherwise) Parameters Operating Temperature Range Zero-g Offset Zero-g Offset Variation from RT over Temp. Sensitivity ! ! Units Min Typical Max ºC V mg/ºC mV/g -40 1.600 1.650 ±0.2 660 ±0.01 (xy) ±0.02 (z) ±4 ±1.25 (xy) ±0.20 (z) 0.1 2.0 1.9 (xy) 0.5 (z) 800 45 85 1.700 Sensitivity Variation from RT over Temp. 647 %/ºC Offset Ratiometric Error (Vdd = 3.3V ± 5%) mg Sensitivity Ratiometric Error (Vdd = 3.3V ± 5%) % Non-Linearity Cross Axis Sensitivity % of FS % Self Test Output change on Activation g 1 Bandwidth (-3dB) Noise Density (on filter pins) Hz µg / √Hz 673 ! Special Characteristics Notes: 1. Internal 1 kHz low pass filter. Lower frequencies are user definable with external capacitors. Table 2. Electrical (specifications are for operation at Vdd = 3.3 V and T = 25ºC unless stated otherwise) Parameters Supply Voltage (Vdd) Operating 1 Operating Current Consumption Standby Analog Output Resistance(Rout) Input Low Voltage Input High Voltage Multiplexer Response Time 2 Power Up Time ! Units Min Typical Max V mA 2.5 0.8 24 0.8 * VIO 3.3 1.03 32 4.5 1 5.25 1.25 5 40 0.2 * VIO - µA kΩ V V µs ms ! Special Characteristics Notes: 1. Tolerances for operating current are for Vdd=3.3V 2. Power up time can also be determined by 5 times the RC time constant of the optional user defined low pass filter. Page 3 of 10 PART NUMBER: ± 2g Tri-Axis Accelerometer KXR94-2050 Specifications Rev. A Oct 09 Table 3. Environmental Units Min Target Max Supply Voltage (Vdd) Absolute Limits Maximum Operating Temperature Range Storage Temperature Range Mech. Shock (powered and unpowered) Parameters V ºC ºC g -0.3 -40 -55 - - 7.0 125 150 5000 for 0.5ms ESD V - - 3000 HBM Caution: ESD Sensitive and Mechanical Shock Sensitive Component, improper handling can cause permanent damage to the device. The LGA plastic package conforms to European Union Directive 2002/95/EC on the restriction of the use of certain hazardous substances in electrical and electronic equipment (RoHS). Soldering Soldering recommendations available upon request or from www.kionix.com. Page 4 of 10 PART NUMBER: ± 2g Tri-Axis Accelerometer KXR94-2050 Specifications Rev. A Oct 09 Application Schematic X C2 Aux In Vmux S0 S1 1 14 2 13 3 12 4 11 KXR94 5 10 6 9 7 8 Z Y C3 C4 ST Enable Vdd C1 Table 4. KXR94 Pad Descriptions Pad 1 2 3 4 5 6 7 8 9 10 11 12 13 14 Name Description NC X output GND Aux In Vmux S0 S1 Vdd Enable ST NC GND Y Output Z Output Center pad Not Connected Internally (can be connected to Vdd or Gnd) Analog output of the x-channel. Optionally, a capacitor (C2) placed between this pin and ground will form a low pass filter. Ground Auxiliary input for multiplexer. Connect to Vdd or Ground if not used. Multiplexed analog output. Do not connect if multiplexer is not used. MUX selector 0 (See Output Select Table). Connect to Vdd or Ground if not used. MUX selector 1 (See Output Select Table). Connect to Vdd or Ground if not used. The power supply input. Decouple this pin to ground with a 0.1uF ceramic capacitor (C1). Enable: High - Normal operation; Low - Device is in standby, power down mode Self Test: Low – Normal operation; High – Device is in self-test mode Not Connected Internally (can be connected to Vdd or Gnd) Ground Analog output of y-channel. Optionally, a capacitor (C3)placed between this pin and ground will form a low pass filter. Analog output of z-channel. Optionally, a capacitor (C4) placed between this pin and ground will form a low pass filter. Ground Page 5 of 10 PART NUMBER: ± 2g Tri-Axis Accelerometer KXR94-2050 Specifications Rev. A Oct 09 Application Design Equations 1. The bandwidth is determined by the internal 1kHz low pass filter. The user can lower the bandwidth by placing filter capacitors connected from pins 2, 13 and 14 to ground. The response is single pole. Given a desired bandwidth, fBW, the filter capacitors are determined by: C2 = C3 = C4 = 4.97 x10 −6 f BW 2. When using not using the multiplexer, the KXR94 is a pin-compatible replacement for Kionix’s KXM52 series of accelerometers. The following application schematic should be used: Pin 4 (Aux in) = Ground Pin 5 (Vmux) = Do Not Connect Pin 6 (S0) = Ground Pin 7 (S1) = Ground X C2 1 14 2 13 3 12 4 11 KXR94 5 10 6 9 7 8 Z Y C3 C4 ST Enable Vdd C1 3. When not connecting the self test pin to a digital I/O port of a microcontroller, Kionix recommends connecting the self test pin to ground. Page 6 of 10 PART NUMBER: ± 2g Tri-Axis Accelerometer Specifications KXR94-2050 Rev. A Oct 09 USING THE MULTIPLEXED OUTPUT OF THE KXR94 Multiplexer Data Select The KXR94 features an integrated 4-channel multiplexer. This feature reduces system MCU requirements to only 1 ADC and 2 digital I/O’s. The KXR94 uses two select inputs (S0, S1) to control the data flow from Vmux. When a microprocessor toggles the select inputs, the desired output is attained based on the select table. Note that logic 0 is GND and logic 1 is Vdd. S1 0 0 1 1 S0 0 1 0 1 Vmux X Output Z Output Y Output Aux. In Output Select Table Data Sampling Rate When operating in its multiplexed mode, the KXR94 has the ability to achieve very high data sampling rates. Internally, the sensor elements (X, Y, and Z) are sequentially sampled in a “round robin” fashion at a rate of 32KHz per axis. Note that this is a differential capacitance sampling of each sensor element, which stores an analog voltage on the filter cap for each axis. Combine this high sensor element sampling rate with the short 5µS settling time of the integrated multiplexer, and the user can achieve a performance very close to that of the 3 separate analog outputs. This is more than sufficient to eliminate any aliasing in the final application since the KXR94 will be operating with a typical bandwidth of ~50Hz and a maximum of 1000Hz. Page 7 of 10 PART NUMBER: ± 2g Tri-Axis Accelerometer KXR94-2050 Specifications Rev. A Oct 09 Test Specifications ! Special Characteristics: These characteristics have been identified as being critical to the customer. Every part is tested to verify its conformance to specification prior to shipment. Table 5. Test Specifications Parameter Specification Test Conditions Zero-g Offset @ RT Sensitivity @ RT 1.650 ± 0.050 V 660 ± 13 mV/g 25ºC, Vdd = 3.3V 25ºC, Vdd = 3.3V 0.5 <= Idd <= 1.4 mA 25ºC, Vdd = 3.3V Current Consumption Operating Page 8 of 10 PART NUMBER: ± 2g Tri-Axis Accelerometer KXR94-2050 Specifications Rev. A Oct 09 Package Dimensions and Orientation 5 x 5 x 1.2 mm DFN +Y +X +Z +Z +X Dimension A B C D E F G H Min 1.10 0.18 0.35 3.50 4.20 mm Nom 5.00 5.00 1.20 0.23 0.50 0.40 3.60 4.30 Max Min 1.30 0.28 0.043 0.007 0.45 3.70 4.40 0.014 0.138 0.165 All dimensions and tolerances conform to ASME Y14.5M-1994 When device is accelerated in +X, +Y or +Z direction, the corresponding output will increase. Page 9 of 10 inch Nom 0.197 0.197 0.047 0.009 0.020 0.016 0.142 0.169 Max 0.051 0.011 0.018 0.146 0.173 PART NUMBER: ± 2g Tri-Axis Accelerometer KXR94-2050 Specifications Rev. A Oct 09 Static X/Y/Z Output Response versus Orientation to Earth’s surface (1g): Position Diagram X Y Z X-Polarity Y-Polarity Z-Polarity 1 2 3 4 Page 10 of 10 6 Bottom Bottom Top 1.65 V 2.31 V 1.65 V 2.31 V 1.65 V 1.65 V 1.65 V 0.99 V 1.65 V 0.99 V 1.65 V 1.65 V 1.65 V 1.65 V 2.31 V 1.65 V 1.65 V 0.99 V 0 + 0 + 0 0 0 0 0 0 0 0 + 0 0 - (1g) Earth’s Surface 5 Top