RMO Series Precision compensated pressure sensors FEATURES · 0...10 mbar to 0...10 bar, 0...4 inch H2O to 0...150 psi, absolute, gage or differential pressure · Precision temperature compensated · Calibrated offset and span · Sensortechnics PRO services MEDIA COMPATIBILITY Non-corrosive, non-ionic working fluids such as clean dry air, dry gases and the like. The media wetted materials are: port 1: front side of silicon sensor chip, glass filled nylon, RTV, silgel (for devices from 5 psi), ceramic (Al2O3) port 2: silicon sensor chip, glass filled nylon, RTV, ceramic (Al2O3) EQUIVALENT CIRCUIT SPECIFICATIONS Maximum ratings Supply voltage Temperature limits Compensated Operating Storage Lead temperature (soldering 5 seconds) Humidity limits (non-condensing) Common mode pressure E / 11711 / A +Vs 3 3 to 16 V 0 to 70 °C -25 to 85°C -40 to 125 °C 315°C -Vout +Vout 4 2 0 to 95 %RH 50 psig 1 -Vs 1/10 www.sensortechnics.com RMO Series Precision compensated pressure sensors PRESSURE SENSOR CHARACTERISTICS (VS = 12 V, TA = 25°C, pressure applied to port P1) RMO...P devices (Prime Grade) Full scale span3 Part no. Operating pressure Proof pressure1 Burst pressure2 Min. Typ. Max. RMOM020... RMOM025... RMOM050... RMOM100... RMOM250... RMOB001... RMOB002... RMOB005... RMOB010... RMOH010... RMOP001... RMOP005... RMOP015... RMOP030... RMOP060... RMOP100... RMOP150... 20 mbar 25 mbar 50 mbar 100 mbar 250 mbar 1 bar 2 bar 5 bar 10 bar 10 inch H2O 1 p si 5 p si 1 5 p si 3 0 p si 6 0 p si 1 0 0 p si 1 5 0 p si 200 mbar 200 mbar 200 mbar 200 mbar 1 bar 3 bar 6 bar 17 bar 17 bar 3 p si 3 p si 1 5 p si 4 5 p si 9 0 p si 1 8 0 p si 2 5 0 p si 2 5 0 p si 350 mbar 350 mbar 350 mbar 350 mbar 1,7 bar 5 bar 10 bar 27 bar 27 bar 5 p si 5 p si 2 5 p si 7 5 p si 1 5 0 p si 3 0 0 p si 4 0 0 p si 4 0 0 p si 18.8 mV 19.6 mV 12.9 mV 25.8 mV 42.8 mV 86.1 mV 86.1 mV 71.8 mV 86.1 mV 19.5 mV 17.8 mV 59 mV 89 mV 89 mV 89 mV 99 mV 89 mV 19.3 mV 20.1 mV 13.05 mV 26.1 mV 43.5 mV 87.0 mV 87.0 mV 72.5 mV 87.0 mV 20 mV 18 mV 60 mV 90 mV 90 mV 90 mV 100 mV 90 mV 19.8 mV 20.6 mV 13.2 mV 26.4 mV 44.2 mV 88.0 mV 88.0 mV 73.2 mV 88.0 mV 20.5 mV 18.2 mV 61 mV 91 mV 91 mV 91 mV 101 mV 91 mV RMO...H devices (High Grade) Full scale span3 Part no. Operating pressure Proof pressure1 Burst pressure2 Min. Typ. Max. RMOM010... RMOM025... RMOM050... RMOM100... RMOM250... RMOB001... RMOB002... RMOB005... RMOB010... RMOH004... RMOH010... RMOP001... RMOP005... RMOP015... RMOP030... RMOP060... RMOP100... RMOP150... 10 mbar 25 mbar 50 mbar 100 mbar 250 mbar 1 bar 2 bar 5 bar 10 bar 4 inch H2O 10 inch H2O 1 p si 5 p si 1 5 p si 3 0 p si 6 0 p si 1 0 0 p si 1 5 0 p si 200 mbar 200 mbar 200 mbar 200 mbar 1 bar 3 bar 6 bar 17 bar 17 bar 3 p si 3 p si 3 p si 1 5 p si 4 5 p si 9 0 p si 1 8 0 p si 2 5 0 p si 2 5 0 p si 350 mbar 350 mbar 350 mbar 350 mbar 1.7 bar 5 bar 10 bar 27 bar 27 bar 5 p si 5 p si 5 p si 2 5 p si 7 5 p si 1 5 0 p si 3 0 0 p si 4 0 0 p si 4 0 0 p si 23.1 mV 19.1 mV 12.3 mV 24.6 mV 41.3 mV 82.2 mV 82.2 mV 68.9 mV 82.2 mV 23 mV 19 mV 17 mV 57 mV 85 mV 85 mV 85 mV 95 mV 85 mV 25.1 mV 20.1 mV 13.05 mV 26.1 mV 43.5 mV 87.0 mV 87.0 mV 72.5 mV 87.0 mV 25 mV 20 mV 18 mV 60 mV 90 mV 90 mV 90 mV 100 mV 90 mV 27.1 mV 21.1 mV 13.8 mV 27.6 mV 45.7 mV 91.9 mV 91.9 mV 76.1 mV 91.9 mV 27 mV 21 mV 19 mV 63 mV 95 mV 95 mV 95 mV 105 mV 95 mV E / 11711 / A 2/10 www.sensortechnics.com RMO Series Precision compensated pressure sensors PERFORMANCE CHARACTERISTICS (VS = 12 V, TA = 25°C, pressure applied to port P1) RMO...P devices (Prime Grade) Characteristics Zero pressure offset Combined non-linearity and hysteresis 5 Temperature effects (0 to 70°C) Min. Typ. Max. Unit -0.5 0 +0.5 mV ±0.25 ±0.5 4 Span ±1.0 Offset ±0.5 Input resistance 5 Output resistance Response time (10 to 90 %FSS) 500 All other devices 100 Common mode voltage6 mV kΩ 3 all 25 mbar/10 "H2O devices %FSS µs 6 V RMO...H devices (High Grade) Characteristics Zero pressure offset RMOP030ANDH, ...P030ATMH RMOB002ANDH, ...B002ATMH All other devices Combined non-linearity and hysteresis4 Temperature effects (0 to 70°C)5 Max. Unit -1.0 0 +1.0 mV -0.5 0 +0.5 ±0.25 ±1.0 ±2.0 Offset ±1.0 5 Output resistance Common mode voltage6 Typ. Span Input resistance Response time (10 to 90 %FSS) Min. 3 all devices up to 25 mbar/10 "H2O 500 All other devices 100 6 %FSS mV kΩ µs V Specification notes: 1. Proof pressure is the maximum pressure which may be applied without causing durable shifts of the electrical parameters of the sensing element. 2. Burst pressure is the maximum pressure which may be applied without causing damage to the sensing element or leaks from the housing. 3. Full scale span is the algebraic difference between the output voltage at full-scale pressure and the output at zero pressure. The span is ratiometric to the supply voltage. 4. Non-linearity refers to the Best Straight Line fit measured for offset pressure, full-scale pressure and ½ full-scale pressure. 5. Shift is relative to 25°C. The RMOM010.../RMOH004... have a compensated temperature range from 0 to 50°C. 6. This is the common-mode voltage of the output arms (pins 2 and 4) for VS = 12 V. E / 11711 / A 3/10 www.sensortechnics.com RMO Series Precision compensated pressure sensors OUTLINE DRAWING AND ELECTRICAL CONNECTION 9.9 (0.39) RMO...GND... and RMO...AND... Pin 1 2 3 4 Connection -Vs +Vout +Vs -Vout 8.9 (0.35) P1 7.6 (0.30) 0.6 (0.03) Vent hole (P2) (G version only) 4.1 (0.16) 5.8 7.4 (0.23) (0.29) 9.9 (0.39) 15.5 (0.61) 2.8 (0.11) 6.1 (0.24) 1.1 (0.04) DIA 0.8 (0.03) 1 2 3 4 third angle projection 2.5 (0.10) mass: approx. 2 g RMO...GFD... and RMO...AFD... 0.5 (0.02) 0.3 (0.01) dimensions in mm (inches) 9.9 (0.39) 10.4 (0.41) 2.8 (0.11) 8.9 (0.35) Pin 1 2 3 4 Connection -Vs +Vout +Vs -Vout P1 7.6 (0.30) 0.6 (0.03) Vent hole (P2) (GF version only) 4.1 (0.16) 5.8 7.4 (0.23) (0.29) 9.9 (0.39) 6.1 (0.24) DIA 3.8 (0.15) 15.5 (0.61) DIA 2.0 (0.08) 1.1 (0.04) DIA 4.8 (0.19) third angle projection mass: approx. 2 g E / 11711 / A 1 2 3 4 2.5 (0.10) 0.5 (0.02) 0.3 (0.01) dimensions in mm (inches) 4/10 www.sensortechnics.com RMO Series Precision compensated pressure sensors OUTLINE DRAWING AND ELECTRICAL CONNECTION (cont.) RMO...DND... Pin 1 2 3 4 9.9 (0.39) Connection -Vs +Vout +Vs -Vout 8.9 (0.35) 7.6 (0.30) 2.5 (0.10) 2.5 (0.10) P1 0.5 (0.02) Vent hole (P2) 4.1 (0.16) 5.8 (0.23) 9.9 (0.39) 15.5 (0.61) 7.4 (0.29) 6.1 (0.24) DIA 0.8 (0.03) 1.1 (0.04) 1 2 3 4 third angle projection mass: approx. 2 g 0.3 (0.01) 0.5 (0.02) 2.5 (0.10) dimensions in mm (inches) 19.8 (0.78) RMO...DFD... Pin 1 2 3 4 9.9 (0.39) Connection -Vs +Vout +Vs -Vout 10,4 (0.41) 8.9 (0.35) 2.8 (0.11) P1 7.6 (0.30) 0.6 (0.03) Vent (P2) 4.1 (0.16) 5.8 (0.23) 9.9 (0.39) 7.4 (0.29) 6.1 (0.24) DIA 3.8 (0.15) 15.5 (0.61) DIA 2.0 (0.08) 1.1 (0.04) DIA 4.8 (0.19) 1 2 3 4 third angle projection mass: approx. 2 g E / 11711 / A 2.5 (0.10) 0.5 (0.02) 0.3 (0.01) dimensions in mm (inches) 5/10 www.sensortechnics.com RMO Series Precision compensated pressure sensors OUTLINE DRAWING AND ELECTRICAL CONNECTION (cont.) RMO...ATM... and RMO...GTM... Pin 1 2 3 4 4.1 (0.16) 29.5 (1.16) 23.1 (0.91) P1 Connection -Vs +Vout +Vs -Vout Ø 4.8 (0.19) 10.9 (0.43) Vent (P 2) (GT only) 17.8 (0.70) Ø 3.9 (0.16) 20.0 (0.8) 1 2 3 4 Engraved "1" denotes Pin 1 0.3 (0.01) 0.5 (0.02) third angle projection 8.1 (0.32) 2.5 (0.10) mass: approx. 2 g dimensions in mm (inches) 29.5 (1.16) 23.1 (0.91) RMO...AFM... and RMO...GFM... Pin 1 2 3 4 Connection -Vs +Vout +Vs -Vout P1 mass: approx. 2 g E / 11711 / A 8.1 (0.32) Vent (P 2) (GF only) 17.8 Ø 4.8 (0.70) (0.19) Ø 3.9 (0.16) 20.0 (0.8) 1 2 3 4 Engraved "1" denotes Pin 1 0.5 (0.02) third angle projection 16.5 (0.65) 0.3 (0.01) 2.5 (0.10) dimensions in mm (inches) 6/10 www.sensortechnics.com RMO Series Precision compensated pressure sensors OUTLINE DRAWING AND ELECTRICAL CONNECTION (cont.) 27.9 (1.10) 21.6 (0.85) RMO...ASM... and RMO...GSM... 16.5 (0.65) P1 8.1 (0.32) 1.9 (0.08) Pin 1 2 3 4 Connection -Vs +Vout +Vs -Vout Vent (P 2) (GFS only) 19.1 Ø 4.8 (0.75) (0.19) Ø 3.9 (0.16) 20.0 (0.8) 1 2 3 4 Engraved "1" denotes Pin 1 0.3 (0.01) 0.5 (0.02) 2.5 (0.10) third angle projection mass: approx. 2 g dimensions in mm (inches) 5.3 (0.21) P1 Ø 15.2 (0.60) RMO...ANM... and RMO...DNM... Pin 1 2 3 4 Connection -Vs +Vout +Vs -Vout 0.3 (0.01) Ø 0.8 (0.03) 20.0 (0.8) Denotes interface between pins 1 and 2 1 2 3 4 Vent (P 2) (D only) Ø 13.1 (0.52) Ø 11.2 (0.44) 0.5 (0.02) 0.3 (0.01) 2.5 (0.10) third angle projection mass: approx. 2 g E / 11711 / A dimensions in mm (inches) 7/10 www.sensortechnics.com RMO Series Precision compensated pressure sensors OUTLINE DRAWING AND ELECTRICAL CONNECTION (cont.) RMO...DFM... Pin 1 2 3 4 Connection -Vs +Vout +Vs -Vout 29.5 (1.16) 23.1 (0.91) P1 26.9 (1.06) 10.2 (0.40) 8.4 (0.33) 17.8 Ø 4.8 (0.70) (0.19) Ø 3.9 (0.16) P2 20.0 (0.8) 1 2 3 4 Engraved "1" denotes Pin 1 2.5 (0.10) mass: approx. 2 g RMO...DTM... P2 Pin 1 2 3 4 0.3 (0.01) 0.5 (0.02) third angle projection Connection -Vs +Vout +Vs -Vout dimensions in mm (inches) 29.5 (1.16) 23.1 (0.91) 8.1 (0.32) 6.4 (0.25) P1 Ø 4.8 (0.19) P2 10.9 (0.43) 17.8 (0.70) Ø 3.9 (0.16) 20.0 (0.8) 1 2 3 4 third angle projection Engraved "1" denotes Pin 1 0.5 (0.02) mass: approx. 2 g 2.5 (0.10) 0.3 (0.01) 10.2 (0.40) dimensions in mm (inches) Colour codes for all square and RMO...NM... housing styles Colour dot 1 White Pink Yellow Green Light blue Purple Orange Dark blue Brown Red E / 11711 / A Pressure range 10 mbar, 4 "H2O 20 mbar 25 mbar, 10 "H2O 50 mbar, 100 mbar, 1 psi 250 mbar, 5 psi 1 bar, 15 psi 2 bar, 30 psi 6 0 p si 5 bar, 100 psi 10 bar, 150 psi Colour dot 2 Gold Silver Grade Prime High 8/10 www.sensortechnics.com RMO Series Precision compensated pressure sensors ORDERING INFORMATION - AVAILABLE LISTINGS Note: · Preferred listings are highlighted in grey · RMO...P = Prime Grade, RMO...H = High Grade A B S O L U T E D E V I C E S Pressure range No port, square housing (...AND...) Axial port, square housing (...AFD...) No port, round housing (...ANM...) Axial port, round housing (...AFM...) Offset axial port, round housing (...ASM...) Radial port, round housing (...ATM...) 1 bar 2 bar 5 bar 10 bar 1 5 p si 3 0 p si 6 0 p si 1 0 0 p si 1 5 0 p si RMOB001AND(P,H) - RMOB001AFD(P,H) RMOB002AFD(P,H) RMOB005AFD(P,H) RMOB010AFD(P,H) RMOP015AFD(P,H) RMOP030AFD(P,H) RMOP100AFD(P,H) RMOP150AFD(P,H) - RMOB001AFM(P,H) RMOP015AFMP - - RMOB001ATM(P,H) RMOP015ATMH RMOP030ATMH - RMOP015AND(P,H) - G A G E D E V I C E S Pressure range No port, square housing (...GND...) Axial port, square housing (...GFD...) Axial port, round housing (...GFM...) Offset axial port, round housing (...GSM...) Radial port, round housing (...GTM...) 10 mbar 20 mbar 25 mbar 50 mbar 100 mbar 250 mbar 1 bar 2 bar 5 bar 10 bar 4 "H2O 10 "H2O 0.3 psi 1 p si 5 p si 1 5 p si 3 0 p si 6 0 p si 1 0 0 p si 1 5 0 p si RMOM010GNDH RMOM050GND(P,H) RMOM100GND(P,H) RMOM250GND(P,H) RMOB005GNDH RMOM010GFDH RMOM025GFD(P,H) RMOM050GFD(P,H) RMOM100GFD(P,H) RMOM250GFD(P,H) RMOB001GFD(P,H) RMOB002GFD(P,H) RMOB005GFD(P,H) RMOB010GFD(P,H) RMOH004GFDH RMOH010GFD(P,H) - RMOM050GSM(P,H) - RMOM010GTMH RMOM050GTMP RMOM100GTM(P,H) RMOB001GTMH RMOB002GTMH RMOB005GTMH RMOB010GTM(P,H) RMOH004GTMH RMOP001GTM(P,H) RMOP015GTMH RMOP030GTMH RMOP060GTMH RMOP100GTMH RMOP150GTM(P,H) E / 11711 / A RMOH004GNDH RMOP001GND(P,H) RMOP005GND(P,H) RMOP100GNDH - RMOP001GFD(P,H) RMOP005GFD(P,H) RMOP015GFD(P,H) RMOP030GFD(P,H) RMOP060GFDP RMOP100GFD(P,H) RMOP150GFD(P,H) 9/10 www.sensortechnics.com RMO Series Precision compensated pressure sensors ORDERING INFORMATION - AVAILABLE LISTINGS (cont.) Note: · Preferred listings are highlighted in grey · RMO...P = Prime Grade, RMO...H = High Grade D I F F E R E N T I A L D E V I C E S Pressure range No port, square housing (...DND...) Axial port, square housing (...DFD...) No port, round housing (...DNM...) Axial port, round housing (...DFM...) Radial port, round housing (...DTM...) 10 mbar 20 mbar 25 mbar 50 mbar 100 mbar 250 mbar 1 bar 2 bar 5 bar 10 bar 4 "H2O 10 "H2O 0.3 psi 1 p si 5 p si 1 5 p si 3 0 p si 6 0 p si 1 0 0 p si 1 5 0 p si RMOM010DNDH RMOH004DNDH - RMOM010DFDH RMOM020DFDP RMOM025DFDH RMOM050DFDH RMOM100DFDH RMOM250DFDH RMOB001DFDH RMOB010DFDH RMOH004DFDH RMOH010DFDH RMOP005DFDH RMOP015DFDH RMOP150DFDH RMOM010DNMH RMOM050DNM(P,H) RMOM100DNM(P,H) RMOM250DNM(P,H) RMOB001DNM(P,H) RMOH004DNMH RMOP001DNMP RMOP005DNMP RMOP015DNM(P,H) - RMOM010DFMH RMOM250DFM(P,H) RMOH004DFMH RMOP005DFMP - RMOM010DTMH RMOM025DTM(P,H) RMOM050DTM(P,H) RMOM100DTM(P,H) RMOM250DTM(P,H) RMOB001DTM(P,H) RMOB002DTM(P,H) RMOH004DTMH RMOH010DTM(P,H) RMOP001DTM(P,H) RMOP005DTM(P,H) RMOP015DTM(P,H) RMOP030DTM(P,H) RMOP060DTM(P,H) - Sensortechnics PRO services: · Extended guarantee period of 2 years · Improved performance characteristics · Custom product modifications and adaptations even for small quantities · Advanced logistics models for supply inventory and short delivery times · Technical support through application engineers on the phone or at your site · Fastest possible technical response for design and QA engineers ... plus other services on request Sensortechnics reserves the right to make changes to any products herein. Sensortechnics does not assume any liability arising out of the application or use of any product or circuit described herein, neither does it convey any license under its patent rights nor the rights of others. E / 11711 / A 10/10 www.sensortechnics.com