HRO Series Precision compensated pressure sensors FEATURES · 10 mbar to 10 bar, 4 inH2O to 150 psi, differential pressure · Precision temperature compensated · Calibrated offset and span · RoHS compliant · Quality Management System according to ISO 13485:2003 and ISO 9001:2008 MEDIA COMPATIBILITY Non-corrosive, non-ionic working fluids such as clean dry air, dry gases and the like. The media wetted materials are: port 1: front side of silicon sensor chip, glass filled polyamide, RTV, silgel (for devices from 5 psi), ceramic (Al2O3) port 2: silicon sensor chip, glass filled nylon, RTV, ceramic (Al2O3) SPECIFICATIONS EQUIVALENT CIRCUIT Maximum ratings Supply voltage Temperature limits Compensated HROM010..., HROH004... all others Operating Storage Lead temperature (soldering 5 seconds) Humidity limits (non-condensing) Common mode pressure 3 to 16 V 0 ... 50 °C 0 ... 70 °C -25 ... 85 °C -40 ... 125 °C 315 °C +Vs 3 -Vout +Vout 4 2 0 ... 95 %RH 50 psig 1 -Vs E / 11813 / B 1/5 www.first-sensor.com www.sensortechnics.com HRO Series Precision compensated pressure sensors PRESSURE SENSOR CHARACTERISTICS (VS = 12 V, TA = 25°C, pressure applied to port P1) HRO...P devices (Prime Grade) Full scale span3 Part no. Operating pressure Proof pressure1 Burst pressure2 Min. Typ. Max. HROM025...P HROM050...P HROM100...P HROM250...P HROB001...P HROB002...P HROB005...P HROB010...P HROH010...P HROP001...P HROP005...P HROP015...P HROP030...P HROP060...P HROP100...P HROP150...P 25 mbar 50 mbar 100 mbar 250 mbar 1 bar 2 bar 5 bar 10 bar 10 inH2O 1 p si 5 p si 1 5 p si 3 0 p si 6 0 p si 1 0 0 p si 1 5 0 p si 200 mbar 250 mbar 500 mbar 1 bar 3 bar 6 bar 17 bar 17 bar 3 p si 3 p si 1 5 p si 4 5 p si 9 0 p si 1 8 0 p si 2 5 0 p si 2 5 0 p si 350 mbar 750 mbar 1.5 bar 1.7 bar 5 bar 10 bar 27 bar 27 bar 5 p si 5 p si 2 5 p si 7 5 p si 1 5 0 p si 3 0 0 p si 4 0 0 p si 4 0 0 p si 19.6 mV 12.9 mV 25.8 mV 42.8 mV 86.1 mV 86.1 mV 71.8 mV 86.1 mV 19.5 mV 17.8 mV 59 mV 89 mV 89 mV 89 mV 99 mV 89 mV 20.1 mV 13.05 mV 26.1 mV 43.5 mV 87.0 mV 87.0 mV 72.5 mV 87.0 mV 20 mV 18 mV 60 mV 90 mV 90 mV 90 mV 100 mV 90 mV 20.6 mV 13.2 mV 26.4 mV 44.2 mV 88.0 mV 88.0 mV 73.2 mV 88.0 mV 20.5 mV 18.2 mV 61 mV 91 mV 91 mV 91 mV 101 mV 91 mV HRO...H devices (High Grade) Full scale span3 Part no. Operating pressure Proof pressure1 Burst pressure2 Min. Typ. Max. HROM010...H HROM025...H HROM050...H HROM100...H HROM250...H HROB001...H HROB002...H HROB005...H HROB010...H HROH004...H HROH010...H HROP001...H HROP005...H HROP015...H HROP030...H HROP060...H HROP100...H HROP150...H 10 mbar 25 mbar 50 mbar 100 mbar 250 mbar 1 bar 2 bar 5 bar 10 bar 4 inH2O 10 inH2O 1 p si 5 p si 1 5 p si 3 0 p si 6 0 p si 1 0 0 p si 1 5 0 p si 200 mbar 200 mbar 250 mbar 500 mbar 1 bar 3 bar 6 bar 17 bar 17 bar 3 p si 3 p si 3 p si 1 5 p si 4 5 p si 9 0 p si 1 8 0 p si 2 5 0 p si 2 5 0 p si 350 mbar 350 mbar 750 mbar 1.5 bar 1.7 bar 5 bar 10 bar 27 bar 27 bar 5 p si 5 p si 5 p si 2 5 p si 7 5 p si 1 5 0 p si 3 0 0 p si 4 0 0 p si 4 0 0 p si 23.1 mV 19.1 mV 12.3 mV 24.6 mV 41.3 mV 82.2 mV 82.2 mV 68.9 mV 82.2 mV 23 mV 19 mV 17 mV 57 mV 85 mV 85 mV 85 mV 95 mV 85 mV 25.1 mV 20.1 mV 13.05 mV 26.1 mV 43.5 mV 87.0 mV 87.0 mV 72.5 mV 87.0 mV 25 mV 20 mV 18 mV 60 mV 90 mV 90 mV 90 mV 100 mV 90 mV 27.1 mV 21.1 mV 13.8 mV 27.6 mV 45.7 mV 91.9 mV 91.9 mV 76.1 mV 91.9 mV 27 mV 21 mV 19 mV 63 mV 95 mV 95 mV 95 mV 105 mV 95 mV E / 11813 / B 2/5 www.first-sensor.com www.sensortechnics.com HRO Series Precision compensated pressure sensors PERFORMANCE CHARACTERISTICS (VS = 12 V, TA = 25°C, pressure applied to port P1) HRO...P devices (Prime Grade) Characteristics Zero pressure offset Combined non-linearity and hysteresis 5 Temperature effects (0...70 °C) Min. Typ. Max. Unit -0.5 0 +0.5 mV ±0.25 ±0.5 4 Span ±1.0 Offset Input resistance ±0.5 5 Output resistance Response time (10 to 90 %FSS) 500 all other devices 100 Common mode voltage6 mV kΩ 3 25 mbar/10 inH2O devices %FSS µs 6 V HRO...H devices (High Grade) Characteristics Zero pressure offset 10 mbar/4 inH2O devices all other devices Combined non-linearity and hysteresis4 5 Temperature effects (0...70 °C) Max. Unit -1.0 0 +1.0 mV 0 +0.5 ±0.25 ±1.0 -0.5 ±2.0 Offset ±1.0 5 Output resistance Common mode voltage6 Typ. Span Input resistance Response time (10 to 90 %FSS) Min. 3 devices up to 25 mbar/10 inH2O 500 all other devices 100 6 %FSS mV kΩ µs V Specification notes: 1. Proof pressure is the maximum pressure which may be applied without causing durable shifts of the electrical parameters of the sensing element. 2. Burst pressure is the maximum pressure which may be applied without causing damage to the sensing element or leaks from the housing. 3. Full scale span is the algebraic difference between the output voltage at full-scale pressure and the output at zero pressure. The span is ratiometric to the supply voltage. 4. Non-linearity refers to the Best Straight Line fit measured for offset pressure, full-scale pressure and ½ full-scale pressure. 5. Shift is relative to 25 °C. The HROM010.../HROH004... have a compensated temperature range from 0...50 °C. 6. This is the common-mode voltage of the output arms (pins 2 and 4) for VS = 12 V. E / 11813 / B 3/5 www.first-sensor.com www.sensortechnics.com HRO Series Precision compensated pressure sensors OUTLINE DRAWING AND ELECTRICAL CONNECTION P2 P1 Pin 1 marking 1 2 3 4 Pin 1 2 3 4 Connection -Vs +Vout +Vs -Vout first angle projection mass: approx. 5 g E / 11813 / B dimensions in mm 4/5 www.first-sensor.com www.sensortechnics.com HRO Series Precision compensated pressure sensors ORDERING INFORMATION Series Options HRO Pressure range M010* M025 M050 M100 M250 B 001 B 002 B 005 B 010 H 004* H 010 P 001 P 005 P 015 P 030 P 060 P 100 P 150 10 25 50 100 250 mbar mbar mbar mbar mbar 1 bar 2 bar 5 bar 10 bar 4 inH2O 10 inH2O 1 p si 5 p si 1 5 p si 3 0 p si 6 0 p si 1 0 0 p si 1 5 0 p si Pressure mode Housing Grade D Differential TM SIL, 2 ports top side H High P Prime D TM P * only available as H-grade Example: HRO M100 First Sensor reserves the right to make changes to any products herein. First Sensor does not assume any liability arising out of the application or use of any product or circuit described herein, neither does it convey any license under its patent rights nor the rights of others. E / 11813 / B 5/5 www.first-sensor.com www.sensortechnics.com