INTERSEMA MS767

MS767
PRESSURE SENSOR DIE (0-7 BAR)
• 0 to 700 kPa range (7 bar or 102 PSI)
• Absolute pressure sensors
• RoHS-compatible & Pb-free1
DESCRIPTION
The sensor element of the MS767 consists of a silicon micro-machined membrane with a Pyrex glass mounted
under vacuum. Implanted resistors make use of the piezo-resistive effect. The MS767 is available as an
absolute sensor (MS767A) where a sealed vacuum cavity underneath the membrane is used as reference
pressure.
FEATURES
•
•
•
•
•
•
Uncompensated pressure sensor die
Output Span 392mV @ 5V
Temperature Range -40°…+125°C
Linearity 0.15% (typical)
Die Size 1.72 x 1.58mm
Low Cost, High reliability
APPLICATION
•
•
•
For absolute pressure sensor systems
Tire pressure measurements
Electronic scales
ELECTRICAL CONNECTIONS
Positive output for pressure applied topside
Vs+
EPI
Vs+ : Supply voltage of Wheatstone bridge
Epi : Connection of epitaxial layer (membrane)
Out+
Out-
Out- : Negative output
Out+ : Positive output
GND1 : Ground
GND2 : Ground
GND1
GND2
1
The European RoHS directive 2002/95/EC (Restriction of the use of certain Hazardous Substances in electrical and electronic equipment) bans
the use of lead, mercury, cadmium, hexavalent chromium and polybrominated biphenyls (PBB) or polybrominated diphenyl ethers (PBDE).
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PAD OUT
Vs+
Epi
Out-
Important remarks:
MS767
As the sensing elements are diffused resistances, the voltage
applied on the ground pads (GND1 and GND2) has to be lower
than the voltage applied on supply voltage pad (Vs+).
The epitaxial layer is connected to the Vs+ pin on the die
Out+
GND1
GND2
LAYOUT
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FULL SCALE PRESSURE
kPa
bar
mbar
PSI
atm
mm Hg
m H2O
Inches
H2O
700
7
7000
102
6.9
5250
71
2810
ABSOLUTE MAXIMUM RATINGS
Parameter
Supply voltage
Storage temperature
Pressure overload
Symbol
Conditions
Min
Max
Unit
-40
20
+150
35
V
C
Bar
o
VS+
TS
Ta = 25 C
o
ELECTRICAL CHARACTERISTICS
(Reference conditions: Supply Voltage VS+ = 5 Vdc; Ambient Temperature Ta = 25°C )
Parameter
Min
Operating Pressure Range
Typ
Max
Unit
0
7
Bar
Operating Temperature Range
-40
125
°C
Bridge Resistance
3.0
3.4
3.8
kΩ
Full-scale span (FS)
322
392
462
mV
Zero Pressure Offset
-40
0
40
mV
± 0.15
± 0.4
Linearity
Notes
% FS
1
2
Temperature Coefficient of Resistance
+ 2400
+ 2800
+ 3300
ppm/°C
Span
- 1500
- 1900
- 2300
ppm/°C
Offset
- 80
+ 80
µV/°C
Pressure Hysteresis
± 0.05
± 0.15
% FS
3
Repeatability
± 0.1
± 0.2
% FS
4
0.3
% FS
5
Temperature Hysteresis
NOTES
1) Deviation at one half full-scale pressure from the least squares best line fit over pressure range (0 to 7 bar).
2) Slope of the endpoint straight line from 25°C to 60°C.
3) Output deviation at any pressure within the specified range, when this pressure is cycled to and from the minimum or
maximum rated pressure, at 25°C.
4) Same as 3) after 10 pressure cycles
5) Maximum difference in offset after one thermal cycle from -40°C to +125°C.
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PICKING TOOLS
The MS767 sensors have a sensitive membrane (0.5 x 0.5 mm) the sensor dice outer diameter is:
1.62 x 1.48 mm. The pick and place tool has to be of a soft material as rubber (Hardness 78-97 Shore A). Its
external size must fit the sensor and the vacuum cavity must be as large as the membrane itself. Successful
test where done with some tools of SPT (see SPT drawing and references bellow).
SPT references
External dimension
Internal dimensions
RTR-A1-060x060
TL & TW: 0.06 inch /1.52 mm
∅H: 0.035 inch / 0.89 mm
ORDERING INFORMATION
Product Code
Product
Art.-Nr.
MS767A-0.5
700 kPa Absolute Pressure Sensor with Pyrex™ 0.5 mm thick (standard)
76710025
MS767A-0.2
700 kPa Absolute Pressure Sensor with Pyrex™ 0.2 mm thick
76710022
The MS767 dice are supplied sawn on blue foil, mounted on plastic rings
FACTORY CONTACTS
Intersema Sensoric SA
Ch. Chapons-des-Prés 11
CH-2022 BEVAIX
SWITZERLAND
Tel. 032 847 9550
Tel. Int. +41 32 847 9550
Telefax +41 32 847 9569
e-mail:
http://www.intersema.ch
NOTICE
Intersema reserves the right to make changes to the products contained in this data sheet in order to improve the design or performance and to
supply the best possible products. Intersema assumes no responsibility for the use of any circuits shown in this data sheet, conveys no license
under any patent or other rights unless otherwise specified in this data sheet, and makes no claim that the circuits are free from patent
infringement. Applications for any devices shown in this data sheet are for illustration only and Intersema makes no claim or warranty that such
applications will be suitable for the use specified without further testing or modification.
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