MS7310D LOW PRESSURE SENSOR DIE (0 to 10 kPa) • • • • • • 0 to 10 kPa (100 mbar or 1.45 PSI) Uncompensated differential pressure sensor die Piezoresistive silicon micromachined sensor High output signal 110 mV Small size RoHS-compatible & Pb-free1 DESCRIPTION The MS7310D pressure sensor die is designed for low pressure sensor systems with the highest demands on resolution and accuracy. Its sensor element consists of a silicon micro-machined membrane bonded on a Pyrex™ glass support. The sensor signal is proportional to the pressure difference between back and front side of the membrane. The pressure is sensed by four implanted piezoresistors, giving a large output signal. FEATURES • • • • Uncompensated differential pressure sensor die Output span 110 mV @ 5 V Temperature range -40°C to +125 °C Typical linearity 0.35% (10kPa) or 0.1% (2kPa) • • • Die size 2.45 mm x 2.45 mm Low cost, high reliability, low drift High pressure burst capability (600 kPa) • • Industrial controls Leak detection APPLICATION • • Washing machines Level indicators ELECTRICAL CONNECTIONS Positive output for pressure applied topside Vs+ EPI Vs+ : Supply voltage of Wheatstone bridge Epi : Connection of epitaxial layer (membrane) Out- Out+ Out- : Negative output Out+ : Positive output GND1 : Ground GND2 : Ground GND1 GND2 1 The European RoHS directive 2002/95/EC (Restriction of the use of certain Hazardous Substances in electrical and electronic equipment) bans the use of lead, mercury, cadmium, hexavalent chromium and polybrominated biphenyls (PBB) or polybrominated diphenyl ethers (PBDE). DA7310D_004.doc 00007310559 ECN836 March 10, 2006 1/4 PAD OUT Vs+ Epi OutImportant remarks: MS7310 As the sensing elements are diffused resistances, the voltage applied on the ground pads (GND1 and GND2) has to be lower than the voltage applied on supply voltage pad (Vs+). The epitaxial layer is connected to the Vs+ pin on the die Out+ GND1 GND2 LAYOUT DA7310D_004.doc 00007310559 ECN836 March 10, 2006 2/4 FULL SCALE PRESSURE kPa 10 bar 0.1 mbar 100 PSI 1.45 atm 0.0987 mm H2O 1019.7 mm Hg 75.01 Inches H2O 40.1 ABSOLUTE MAXIMUM RATINGS Parameter Symbol Supply voltage Storage temperature Pressure overload VS+ TS Conditions Min Max Unit -40 12 +150 600 V C kPa o Ta = 25 C o ELECTRICAL CHARACTERISTICS (Reference conditions: Supply Voltage VS+ = 5 Vdc; Ambient Temperature Ta = 25°C ) Parameter Operating Pressure Range Operating Temperature Range Bridge Resistance Zero Pressure Offset Span (Full scale range) Linearity (Full scale range) 10 kPa 5 kPa 2 kPa Min Typ Max 0 - 10 Notes kPa -40 +125 o 3000 3800 Ω C -40 0 40 mV 85 43 17 110 55 22 130 65 26 mV mV mV ±0.35 ±0.25 ±0.1 ±0.5 ±0.4 ±0.2 %FS %FS %FS 1 2 3 + 2900 - 1900 -40 + 3400 - 2200 0 0.1 ppm/°C ppm/°C µV/°C % FS 4 10 kPa 5 kPa 2 kPa Temperature Coefficient of Resistance Span Offset Pressure hysteresis Unit + 2500 - 1600 -80 -0.1 5 Repeatability -0.1 0.1 % FS 6 Temperature hysteresis -0.15 0.15 % FS 7 0 0.15 % FS 8 ms s 9 10 Position sensitivity Response time Warm-up time 1.0 1 NOTES 1) Deviation at one half full-scale pressure from least squares best line fit over pressure range 0 to 10 kPa. 2) Deviation at 2.5 kPa from least squares best line fit over pressure range 0 to 5 kPa. 3) Deviation at 1 kPa from least squares best line fit over pressure range 0 to 2 kPa. 4) Slope of the endpoint straight line from 25°C to 60°C. 5) Output deviation at any pressure within the specified range, when this pressure is cycled to and from the minimum or maximum rated pressure, at 25°C. 6) Same as 5) after 10 pressure cycles. 7) Maximum difference in offset after one thermal cycle from -40°C to 125°C. 8) Maximum difference in output at any pressure within the specified pressure range between the sensor being in upright position and in upside-down position. 9) 10% to 90% signal rise time for a 0 to 10 kPa pressure step change. 10) Time to reach an offset accuracy of 0.2% after switching on a supply voltage of 5V. DA7310D_004.doc 00007310559 ECN836 March 10, 2006 3/4 PICKING TOOLS The MS7310D sensors have a sensitive membrane (1.5x1.5 mm) the sensor dice outer diameter is: 2.45x2.45 mm. The pick and place tool has to be of a soft material as rubber (Hardness 78-97 Shore A). Its external size must fit the sensor and the vacuum cavity must be as large as the membrane itself. Successful test where done with a tool of SPT (see SPT drawing and references bellow). SPT reference External dimension Internal dimension PCTR-A-100 ∅F: 0.1 inch / 2.54 mm ∅H: 0.08 inch / 2.04 mm ORDERING INFORMATION Product Code MS7310D Product 10 kPa Differential Low Pressure Sensor Art.-Nr. 731025121 The MS7310D dice are supplied sawn on blue foil, mounted on plastic rings FACTORY CONTACTS Intersema Sensoric SA Ch. Chapons-des-Prés 11 CH-2022 BEVAIX SWITZERLAND Tel. (032) 847 9550 Tel. Int. +41 32 847 9550 Telefax +41 32 847 9569 e-mail: http://www.intersema.ch NOTICE Intersema reserves the right to make changes to the products contained in this data sheet in order to improve the design or performance and to supply the best possible products. Intersema assumes no responsibility for the use of any circuits shown in this data sheet, conveys no license under any patent or other rights unless otherwise specified in this data sheet, and makes no claim that the circuits are free from patent infringement. Applications for any devices shown in this data sheet are for illustration only and Intersema makes no claim or warranty that such applications will be suitable for the use specified without further testing or modification. DA7310D_004.doc 00007310559 ECN836 March 10, 2006 4/4