INTERSEMA MS7310D

MS7310D
LOW PRESSURE SENSOR DIE (0 to 10 kPa)
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0 to 10 kPa (100 mbar or 1.45 PSI)
Uncompensated differential pressure sensor die
Piezoresistive silicon micromachined sensor
High output signal 110 mV
Small size
RoHS-compatible & Pb-free1
DESCRIPTION
The MS7310D pressure sensor die is designed for low pressure sensor systems with the highest demands on
resolution and accuracy. Its sensor element consists of a silicon micro-machined membrane bonded on a
Pyrex™ glass support. The sensor signal is proportional to the pressure difference between back and front side
of the membrane. The pressure is sensed by four implanted piezoresistors, giving a large output signal.
FEATURES
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Uncompensated differential pressure sensor die
Output span 110 mV @ 5 V
Temperature range -40°C to +125 °C
Typical linearity 0.35% (10kPa) or 0.1% (2kPa)
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Die size 2.45 mm x 2.45 mm
Low cost, high reliability, low drift
High pressure burst capability (600 kPa)
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Industrial controls
Leak detection
APPLICATION
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Washing machines
Level indicators
ELECTRICAL CONNECTIONS
Positive output for pressure applied topside
Vs+
EPI
Vs+ : Supply voltage of Wheatstone bridge
Epi : Connection of epitaxial layer (membrane)
Out-
Out+
Out- : Negative output
Out+ : Positive output
GND1 : Ground
GND2 : Ground
GND1
GND2
1
The European RoHS directive 2002/95/EC (Restriction of the use of certain Hazardous Substances in electrical and electronic equipment)
bans the use of lead, mercury, cadmium, hexavalent chromium and polybrominated biphenyls (PBB) or polybrominated diphenyl ethers
(PBDE).
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PAD OUT
Vs+
Epi
OutImportant remarks:
MS7310
As the sensing elements are diffused resistances, the voltage
applied on the ground pads (GND1 and GND2) has to be lower
than the voltage applied on supply voltage pad (Vs+).
The epitaxial layer is connected to the Vs+ pin on the die
Out+
GND1
GND2
LAYOUT
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FULL SCALE PRESSURE
kPa
10
bar
0.1
mbar
100
PSI
1.45
atm
0.0987
mm H2O
1019.7
mm Hg
75.01
Inches H2O
40.1
ABSOLUTE MAXIMUM RATINGS
Parameter
Symbol
Supply voltage
Storage temperature
Pressure overload
VS+
TS
Conditions
Min
Max
Unit
-40
12
+150
600
V
C
kPa
o
Ta = 25 C
o
ELECTRICAL CHARACTERISTICS
(Reference conditions: Supply Voltage VS+ = 5 Vdc; Ambient Temperature Ta = 25°C )
Parameter
Operating Pressure Range
Operating Temperature Range
Bridge Resistance
Zero Pressure Offset
Span (Full scale range)
Linearity (Full scale range)
10 kPa
5 kPa
2 kPa
Min
Typ
Max
0
-
10
Notes
kPa
-40
+125
o
3000
3800
Ω
C
-40
0
40
mV
85
43
17
110
55
22
130
65
26
mV
mV
mV
±0.35
±0.25
±0.1
±0.5
±0.4
±0.2
%FS
%FS
%FS
1
2
3
+ 2900
- 1900
-40
+ 3400
- 2200
0
0.1
ppm/°C
ppm/°C
µV/°C
% FS
4
10 kPa
5 kPa
2 kPa
Temperature Coefficient of Resistance
Span
Offset
Pressure hysteresis
Unit
+ 2500
- 1600
-80
-0.1
5
Repeatability
-0.1
0.1
% FS
6
Temperature hysteresis
-0.15
0.15
% FS
7
0
0.15
% FS
8
ms
s
9
10
Position sensitivity
Response time
Warm-up time
1.0
1
NOTES
1) Deviation at one half full-scale pressure from least squares best line fit over pressure range 0 to 10 kPa.
2) Deviation at 2.5 kPa from least squares best line fit over pressure range 0 to 5 kPa.
3) Deviation at 1 kPa from least squares best line fit over pressure range 0 to 2 kPa.
4) Slope of the endpoint straight line from 25°C to 60°C.
5) Output deviation at any pressure within the specified range, when this pressure is cycled to and from the minimum or
maximum rated pressure, at 25°C.
6) Same as 5) after 10 pressure cycles.
7) Maximum difference in offset after one thermal cycle from -40°C to 125°C.
8) Maximum difference in output at any pressure within the specified pressure range between the sensor being in upright
position and in upside-down position.
9) 10% to 90% signal rise time for a 0 to 10 kPa pressure step change.
10) Time to reach an offset accuracy of 0.2% after switching on a supply voltage of 5V.
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PICKING TOOLS
The MS7310D sensors have a sensitive membrane (1.5x1.5 mm) the sensor dice outer diameter is: 2.45x2.45
mm. The pick and place tool has to be of a soft material as rubber (Hardness 78-97 Shore A). Its external size
must fit the sensor and the vacuum cavity must be as large as the membrane itself. Successful test where done
with a tool of SPT (see SPT drawing and references bellow).
SPT reference
External dimension
Internal dimension
PCTR-A-100
∅F: 0.1 inch / 2.54 mm
∅H: 0.08 inch / 2.04 mm
ORDERING INFORMATION
Product Code
MS7310D
Product
10 kPa Differential Low Pressure Sensor
Art.-Nr.
731025121
The MS7310D dice are supplied sawn on blue foil, mounted on plastic rings
FACTORY CONTACTS
Intersema Sensoric SA
Ch. Chapons-des-Prés 11
CH-2022 BEVAIX
SWITZERLAND
Tel. (032) 847 9550
Tel. Int. +41 32 847 9550
Telefax +41 32 847 9569
e-mail:
http://www.intersema.ch
NOTICE
Intersema reserves the right to make changes to the products contained in this data sheet in order to improve the design or performance
and to supply the best possible products. Intersema assumes no responsibility for the use of any circuits shown in this data sheet, conveys
no license under any patent or other rights unless otherwise specified in this data sheet, and makes no claim that the circuits are free from
patent infringement. Applications for any devices shown in this data sheet are for illustration only and Intersema makes no claim or
warranty that such applications will be suitable for the use specified without further testing or modification.
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