Models 12, 13 Medium Pressure þ Medical Instrumentation PC Board Mountable Pressure Sensor þ HVAC 0-100 mV Output þ Barometric Pressure Gage and Absolute Pressure þ Process Control Temperature Compensated þ Vacuum Measurement þ Air Flow Management DESCRIPTION The Models 12 and 13 are temperature compensated, piezoresistive silicon pressure sensors packaged in TO-8 configurations. They provide excellent performance and longterm stability. Gage and absolute pressure ranges from 0-2 PSI to 0-250 PSI are available. Integral temperature compensation is provided over a range of 0-50°C using laser-trimmed resistors. An additional laser-trimmed resistor is included in the Model 13 to normalize pressure sensitivity variations by programming the gain of an external differential amplifier. This provides sensitivity interchangeability of ±1%. Please refer to the low pressure section for information on products with operating pressures less than 0-2 PSI. For an uncompensated sensor (Model 10) please contact the factory for FEATURES additional information. þ TO-8 Package þ ±0.1% Non-linearity þ ±0.5% Temperature Performance þ Solid State Reliability þ Low Power DIMENSIONS STANDARD RANGES 1-30 Range psig psia 0 to 2 ● 0 to 5 ● 0 to 10 ● ● 0 to 15 ● ● 0 to 30 ● ● 0 to 50 ● 0 to 100 ● 0 to 250 ● TO-8 – Standard Models 12, 13 Medium Pressure PC Board Mountable Pressure Sensor PERFORMANCE SPECIFICATIONS Supply Current: 1.5mA Ambient Temperature: 25°C (Unless otherwise specified) PARAMETERS MIN TYP MAX UNITS Full Scale Output Span 75 100 150 mV Full Scale Output Span (2 psi version) 30 Zero Pressure Output 60 mV 2 ± V NOTES / Pressure Non-linearity 0.05 0.10 ±% Span Pressure Hysteresis 0.01 0.05 ±% Span 1 4400 6000 Ω Temperature Error – Span 0.3 0.5 ±% Span Temperature Error – Zero 0.1 0.5 ±% Span 2 Thermal Hysteresis – Span 0.1 ±% Span 2 Thermal Hysteresis – Zero 0.1 ±% Span 2 Supply Current 1.5 mA 3 Response Time 1.0 msec 4 Output Noise 1.0 µV p-p 5 2 MΩ 6 50 MΩ 7 Rated 8 Input & Output Resistance 2500 Output Load Resistance Insulation Resistance (50 VDC) 2.0 Pressure Overload 3X Operating Temperature –40°C to +125°C Storage Temperature –50°C to +150°C Acceleration 50g Max Shock 1000g Peak for 0.5mS Vibration 20g Peak at 10 to 2000 Hz Media Non-Corrosive Gases Weight 3 Grams Notes 1. Best Fit Straight Line. 2. Temperature range 0-50°C in reference to 25°C. 3. Guarantees input/output ratiometricity. 4. For a zero-to-full scale pressure step change. 5. 10 Hz to 1 kHz. 6. Prevents increase of TC Span due to output loading. CONNECTIONS M o de l 1 2 2 9 7. 8. 9. Between case and sensing element. 3X not to exceed 500 psi on ranges: 0-10 psi to 0-250 psi; 20 psi for 2 psi and 5 psi versions. For Top Entry versions, wetted materials are silicon, aluminum, gold, RTV, glass, and nickel. For Bottom Entry versions, wetted materials are silicon, RTV, gold, and glass. ORDERING INFORMATION 13A - 001 G Type (G = Gage) Pressure Range (001 or 10WC) (1 psi or 10" H2O) Model (13 or 12) (with or without gain set) APPLICATION SCHEMATIC M od e l 1 3 April 2000 TO-8 – Standard 1-31