±250°/sec Yaw Rate Gyro ADXRS652 FEATURES GENERAL DESCRIPTION Complete rate gyroscope on a single chip Z-axis (yaw rate) response High vibration rejection over wide frequency 2000 g powered shock survivability Ratiometric to referenced supply 5 V single-supply operation −40°C to +85°C operation Self-test on digital command Ultrasmall and light (<0.15 cc, <0.5 gram) Temperature sensor output RoHS compliant The ADXRS652 is a complete angular rate sensor (gyroscope) that uses the Analog Devices, Inc,. surface-micromachining process to make a functionally complete and low cost angular rate sensor integrated with all of the required electronics on one chip. The manufacturing technique for this device is a patented high volume BiMOS process with years of proven field reliability. The output signal, RATEOUT (1B, 2A), is a voltage proportional to angular rate about the axis normal to the top surface of the package. The output is ratiometric with respect to a provided reference supply. An external capacitor is used to set the bandwidth. Other external capacitors are required for operation. APPLICATIONS Industrial applications Inertial measurement units Platform stabilization A temperature output is provided for compensation techniques. Two digital self-test inputs electromechanically excite the sensor to test proper operation of both the sensor and the signal conditioning circuits. The ADXRS652 is available in a 7 mm × 7 mm × 3 mm BGA chip-scale package. FUNCTIONAL BLOCK DIAGRAM 5V (ADC REF) 100nF 5V ST2 ST1 TEMP AVCC 100nF SELF-TEST 25kΩ @ 25°C VRATIO ADXRS652 25kΩ AGND DEMOD MECHANICAL SENSOR DRIVE AMP 5V AC AMP VGA 180kΩ ±1% VDD CHARGE PUMP AND VOLTAGE REGULATOR 100nF PGND SUMJ RATEOUT 100nF 22nF 22nF COUT 08820-001 CP1 CP2 CP3 CP4 CP5 Figure 1. Rev. 0 Information furnished by Analog Devices is believed to be accurate and reliable. However, no responsibility is assumed by Analog Devices for its use, nor for any infringements of patents or other rights of third parties that may result from its use. Specifications subject to change without notice. No license is granted by implication or otherwise under any patent or patent rights of Analog Devices. Trademarks and registered trademarks are the property of their respective owners. One Technology Way, P.O. Box 9106, Norwood, MA 02062-9106, U.S.A. Tel: 781.329.4700 www.analog.com Fax: 781.461.3113 ©2010 Analog Devices, Inc. All rights reserved. ADXRS652 TABLE OF CONTENTS Features .............................................................................................. 1 Theory of Operation .........................................................................9 Applications ....................................................................................... 1 Setting Bandwidth .........................................................................9 General Description ......................................................................... 1 Temperature Output and Calibration .........................................9 Functional Block Diagram .............................................................. 1 Calibrated Performance................................................................9 Revision History ............................................................................... 2 ADXRS652 and Supply Ratiometricity ................................... 10 Specifications..................................................................................... 3 Null Adjustment ......................................................................... 10 Absolute Maximum Ratings............................................................ 4 Self-Test Function ...................................................................... 10 Rate Sensitive Axis ....................................................................... 4 Continuous Self-Test.................................................................. 10 ESD Caution .................................................................................. 4 Outline Dimensions ....................................................................... 11 Pin Configuration and Function Descriptions ............................. 5 Ordering Guide .......................................................................... 11 Typical Performance Characteristics ............................................. 6 REVISION HISTORY 4/10—Revision 0: Initial Version Rev. 0 | Page 2 of 12 ADXRS652 SPECIFICATIONS All minimum and maximum specifications are guaranteed. Typical specifications are not guaranteed. TA = −40°C to +85°C, VS = AVCC = VDD = 5 V, VRATIO = AVCC, angular rate = 0°/sec, bandwidth = 80 Hz (COUT = 0.01 μF), IOUT = 100 μA, ±1 g, unless otherwise noted. Table 1. Parameter SENSITIVITY 1 Measurement Range 2 Initial and Over Temperature Temperature Drift 3 Nonlinearity NULL1 Null Linear Acceleration Effect NOISE PERFORMANCE Rate Noise Density FREQUENCY RESPONSE Bandwidth 4 Sensor Resonant Frequency SELF-TEST1 ST1 RATEOUT Response ST2 RATEOUT Response ST1 to ST2 Mismatch 5 Logic 1 Input Voltage Logic 0 Input Voltage Input Impedance TEMPERATURE SENSOR1 VOUT at 25°C Scale Factor 6 Load to VS Load to Common TURN-ON TIME OUTPUT DRIVE CAPABILITY Current Drive Capacitive Load Drive POWER SUPPLY Operating Voltage (VS) Quiescent Supply Current TEMPERATURE RANGE Specified Performance Conditions Clockwise rotation is positive output Full-scale range over specifications range −40°C to +85°C Min Typ ±250 Best fit straight line ±300 7.0 ±2 0.1 °/sec mV/°/sec % % of FS −40°C to +85°C Any axis 2.5 0.1 V °/sec/g TA ≤ 25°C 0.06 °/sec/√Hz 0.01 Max 2500 14.5 ST1 pin from Logic 0 to Logic 1 ST2 pin from Logic 0 to Logic 1 −525 525 Unit Hz kHz 1.7 100 mV mV % V V kΩ Power on to ±½°/sec of final 50 V mV/°C kΩ kΩ ms For rated specifications 200 1000 μA pF 5.25 4.5 V mA +85 °C −5 3.3 To common 40 Load = 10 MΩ 25°C, VRATIO = 5 V +5 50 2.5 9 25 25 4.75 −40 1 5.00 3.5 Parameter is linearly ratiometric with VRATIO. Measurement range is the maximum range possible, including output swing range, initial offset, sensitivity, offset drift, and sensitivity drift at 5 V supplies. From +25°C to −40°C or +25°C to +85°C. 4 Adjusted by external capacitor, COUT. Reducing bandwidth below 0.01 Hz does not result in further noise improvement. 5 Self-test mismatch is described as (ST2 + ST1)/((ST2 − ST1)/2). 6 Scale factor for a change in temperature from 25°C to 26°C. VTEMP is ratiometric to VRATIO. See the Temperature Output and Calibration section for more information. 2 3 Rev. 0 | Page 3 of 12 ADXRS652 ABSOLUTE MAXIMUM RATINGS RATE SENSITIVE AXIS Table 2. This is a Z-axis rate-sensing device (also called a yaw ratesensing device). It produces a positive going output voltage for clockwise rotation about the axis normal to the package top, that is, clockwise when looking down at the package lid. Rating 2000 g 2000 g −0.3 V to +6.0 V AVCC AVCC Indefinite RATE AXIS RATE OUT VCC = 5V −55°C to +125°C −65°C to +150°C Stresses above those listed under the Absolute Maximum Ratings may cause permanent damage to the device. This is a stress rating only; functional operation of the device at these or any other conditions above those indicated in the operational section of this specification is not implied. Exposure to absolute maximum rating conditions for extended periods may affect device reliability. LONGITUDINAL AXIS 4.75V + VRATIO/2 7 RATE IN 1 A1 0.25V ABCDE FG LATERAL AXIS GND Figure 2. RATEOUT Signal Increases with Clockwise Rotation ESD CAUTION Drops onto hard surfaces can cause shocks of greater than 2000 g and can exceed the absolute maximum rating of the device. Care should be exercised in handling to avoid damage. Rev. 0 | Page 4 of 12 08820-002 Parameter Acceleration (Any Axis, 0.5 ms) Unpowered Powered VDD, AVCC VRATIO ST1, ST2 Output Short-Circuit Duration (Any Pin to Common) Operating Temperature Range Storage Temperature Range ADXRS652 PIN CONFIGURATION AND FUNCTION DESCRIPTIONS VDD PGND CP5 CP3 CP4 7 6 ST1 CP1 5 ST2 CP2 4 AVCC 3 TEMP 2 AGND G F VRATIO NC SUMJ E D C RATEOUT B A 08820-023 1 Figure 3. Pin Configuration Table 3. Pin Function Descriptions Pin No. 6D, 7D 6A, 7B 6C, 7C 5A, 5B 4A, 4B 3A, 3B 1B, 2A 1C, 2C 1D, 2D 1E, 2E 1F, 2G 3F, 3G 4F, 4G 5F, 5G 6G, 7F 6E, 7E Mnemonic CP5 CP4 CP3 CP1 CP2 AVCC RATEOUT SUMJ NC VRATIO AGND TEMP ST2 ST1 PGND VDD Description HV Filter Capacitor, 0.1 μF. Charge Pump Capacitor, 22 nF. Charge Pump Capacitor, 22 nF. Charge Pump Capacitor, 22 nF. Charge Pump Capacitor, 22 nF. Positive Analog Supply. Rate Signal Output. Output Amp Summing Junction. No Connection. Reference Supply for Ratiometric Output. Analog Supply Return. Temperature Voltage Output. Self-Test for Sensor 2. Self-Test for Sensor 1. Charge Pump Supply Return. Positive Charge Pump Supply. Rev. 0 | Page 5 of 12 ADXRS652 TYPICAL PERFORMANCE CHARACTERISTICS N > 1000 for all typical performance plots, unless otherwise noted. 35 20 PERCENTAGE OF POPULATION (%) PERCENTAGE OF POPULATION (%) 18 16 14 12 10 8 6 4 30 25 20 15 10 5 2 10 08820-007 8 6 4 2 0 –2 Figure 7. Sensitivity Drift over Temperature 40 70 60 PERCENTAGE OF POPULATION (%) 50 40 30 20 10 35 30 25 20 15 10 5 –375 ST1 Δ (mV) 08820-008 –400 –425 –450 –475 –500 –525 –550 –575 –600 –625 –675 08820-005 400 350 300 250 200 150 100 0 50 –50 –100 –150 –200 –250 –300 –350 –400 mV DRIFT FROM 25°C –650 0 0 Figure 8. ST1 Output Change at 25°C (VRATIO = 5 V) Figure 5. Null Drift over Temperature (VRATIO = 5 V) 30 PERCENTAGE OF POPULATION (%) 40 25 20 15 10 5 0 35 30 25 20 15 10 5 ST2 Δ (mV) Figure 9. ST2 Output Change at 25°C (VRATIO = 5 V) Figure 6. Sensitivity at 25°C (VRATIO = 5 V) Rev. 0 | Page 6 of 12 675 08820-009 650 625 600 575 550 525 500 475 450 425 375 7.8 7.7 08820-006 (mV/°/sec) 7.6 7.5 7.4 7.3 7.2 7.1 7.0 6.9 6.8 6.7 6.6 6.5 6.4 6.3 0 400 PERCENTAGE OF POPULATION (%) –4 PERCENT CHANGE FROM 25°C Figure 4. Null Output at 25°C (VRATIO = 5 V) PERCENTAGE OF POPULATION (%) –6 –10 2.80 08820-004 2.75 2.70 2.60 2.65 2.50 2.55 2.45 2.40 2.35 2.30 2.20 2.25 RATE OUT (V) –8 0 0 ADXRS652 30 60 PERCENTAGE OF POPULATION (%) 50 40 30 20 10 0 25 20 15 10 5 2.55 VOLTAGE (V) 08820-013 2.53 2.51 2.49 2.47 2.45 2.43 2.41 2.39 2.35 5 PERCENT MISMATCH (%) 08820-010 4 3 2 1 0 –1 –2 –3 –4 –5 0 2.37 PERCENTAGE OF POPULATION (%) 70 Figure 13. VTEMP Output at 25°C (VRATIO = 5 V) Figure 10. Self-Test Mismatch at 25°C (VRATIO = 5 V) 3.3 600 3.1 400 2.9 2.7 200 VOLTAGE (V) SELF-TEST Δ (mV) ST2 0 2.5 2.3 2.1 200 ST1 1.9 400 –30 –10 10 30 50 TEMPERATURE (°C) 70 90 110 1.5 –50 08820-011 600 –50 Figure 11. Typical Self-Test Change over Temperature –25 0 25 50 TEMPERATURE (°C) 75 08820-114 1.7 100 Figure 14. VTEMP Output over Temperature, 256 Parts (VRATIO = 5 V) 30 60 25 Y X 40 +45° 20 g OR °/sec –45° 15 30 20 10 10 0 5 CURRENT CONSUMPTION (m A) 4.5 –20 750 08820-012 4.3 4.1 3.9 3.7 3.5 3.3 3.1 2.9 2.7 0 770 790 810 830 TIME (ms) Figure 12. Current Consumption at 25°C (VRATIO = 5 V) Figure 15. g and g × g Sensitivity for a 50 g, 10 ms Pulse Rev. 0 | Page 7 of 12 850 08820-014 –10 2.5 PERCENTAGE OF POPULATION (%) REF 50 ADXRS652 0.10 2.0 LAT LONG RATE 1.8 RATE OF ROTATION (°/sec) PEAK RATEOUT (°/s) 1.6 1.4 1.2 1.0 0.8 0.6 0.05 0 –0.05 0.4 1k FREQUENCY (Hz) 10k –0.10 08820-116 0 100 0 20 40 60 80 100 120 140 TIME (Hours) Figure 16. Typical Response to 10 g Sinusoidal Vibration (Sensor Bandwidth = 40 Hz) 08820-018 0.2 Figure 19. Typical Shift in 90 sec Null Averages Accumulated over 140 Hours 400 0.10 DUT1 OFFSET BY +200°/sec RATE OF ROTATION (°/sec) RATE OF ROTATION (°/sec) 300 200 100 0 –100 DUT2 OFFSET BY –200°/sec –200 0.05 0 –0.05 0 50 100 150 200 250 TIME (ms) –0.10 08820-016 –400 0 1800 2400 3000 3600 Figure 20. Typical Shift in Short Term Null (Bandwidth = 1 Hz) 1 0.1 0.01 0.1 1 10 100 1k 10k 100k AVERAGING TIME (Seconds) 0.01 0.001 0.0001 10 100 1k 10k 100k FREQUENCY (Hz) Figure 21. Typical Noise Spectral Density (Bandwidth = 40 Hz) Figure 18. Typical Root Allan Deviation at 25°C vs. Averaging Time Rev. 0 | Page 8 of 12 08820-020 NOISE SPECTRAL DENSITY (°/sec/ Hz rms) 0.1 08820-017 ROOT ALLAN DEVIATION (°/sec rms) 1200 TIME (Seconds) Figure 17. Typical High g (2500 g) Shock Response (Sensor Bandwidth = 40 Hz) 0.001 0.01 600 08820-019 –300 ADXRS652 THEORY OF OPERATION SETTING BANDWIDTH External Capacitor COUT is used in combination with the onchip ROUT resistor to create a low-pass filter to limit the bandwidth of the ADXRS652 rate response. The −3 dB frequency set by ROUT and COUT is f OUT = 1/(2 × π × ROUT × COUT ) 0.001 0.0001 100 10k 1k 100k FREQUENCY (Hz) 08820-021 0.00001 0.000001 10 Figure 22. Noise Spectral Density with Additional 250 Hz Filter TEMPERATURE OUTPUT AND CALIBRATION It is common practice to temperature-calibrate gyros to improve their overall accuracy. The ADXRS652 has a temperature proportional voltage output that provides input to such a calibration method. The temperature sensor structure is shown in Figure 23. The temperature output is characteristically nonlinear, and any load resistance connected to the TEMP output results in decreasing the TEMP output and its temperature coefficient. Therefore, buffering the output is recommended. The voltage at TEMP (3F, 3G) is nominally 2.5 V at 25°C, and VRATIO = 5 V. The temperature coefficient is ~9 mV/°C at 25°C. Although the TEMP output is highly repeatable, it has only modest absolute accuracy. and can be well controlled because ROUT has been trimmed during manufacturing to be 180 kΩ ± 1%. Any external resistor applied between the RATEOUT pin (1B, 2A) and SUMJ pin (1C, 2C) results in ROUT = (180 kΩ × REXT )/(180 kΩ + REXT ) 0.01 VRATIO RFIXED VTEMP RTEMP 08820-022 The electrostatic resonator requires 18 V to 20 V for operation. Because only 5 V are typically available in most applications, a charge pump is included on chip. If an external 18 V to 20 V supply is available, the two capacitors on CP1 to CP4 can be omitted, and this supply can be connected to CP5 (Pin 6D, Pin 7D). CP5 should not be grounded when power is applied to the ADXRS652. No damage occurs, but under certain conditions, the charge pump may fail to start up after the ground is removed without first removing power from the ADXRS652. 0.1 NOISE SPECTRAL DENSITY (°/sec/ Hz rms) The ADXRS652 operates on the principle of a resonator gyro. Two polysilicon sensing structures each contain a dither frame that is electrostatically driven to resonance, producing the necessary velocity element to produce a Coriolis force during angular rate. At two of the outer extremes of each frame, orthogonal to the dither motion, are movable fingers that are placed between fixed pickoff fingers to form a capacitive pickoff structure that senses Coriolis motion. The resulting signal is fed to a series of gain and demodulation stages that produce the electrical rate signal output. The dual-sensor design rejects external g-forces and vibration. Fabricating the sensor with the signal conditioning electronics preserves signal integrity in noisy environments. Figure 23. Temperature Sensor Structure CALIBRATED PERFORMANCE In general, an additional filter (in either hardware or software) is added to attenuate high frequency noise arising from demodulation spikes at the 14 kHz resonant frequency of the gyro. The noise spikes at 14 kHz can be clearly seen in the power spectral density curve, shown in Figure 21. Normally, this additional filter corner frequency is set to greater than five times the required bandwidth to preserve good phase response. Using a three-point calibration technique, it is possible to calibrate the ADXRS652 null and sensitivity drift to an overall accuracy of nearly 200°/hour. An overall accuracy of 40°/hour or better is possible using more points. Limiting the bandwidth of the device reduces the flat-band noise during the calibration process, improving the measurement accuracy at each calibration point. Figure 22 shows the effect of adding a 250 Hz filter to the output of an ADXRS652 set to 40 Hz bandwidth (as shown in Figure 21). High frequency demodulation artifacts are attenuated by approximately 18 dB. Rev. 0 | Page 9 of 12 ADXRS652 ADXRS652 AND SUPPLY RATIOMETRICITY SELF-TEST FUNCTION The ADXRS652 RATEOUT and TEMP signals are ratiometric to the VRATIO voltage; that is, the null voltage, rate sensitivity, and temperature outputs are proportional to VRATIO. So the ADXRS652 is most easily used with a supply-ratiometric analog-to-digital converter, which results in self-cancellation of errors due to minor supply variations. There is some small error due to nonratiometric behavior. Typical ratiometricity error for null, sensitivity, self-test, and temperature output is outlined in Table 4. The ADXRS652 includes a self-test feature that actuates each of the sensing structures and associated electronics in the same manner, as if subjected to angular rate. It is activated by standard logic high levels applied to Input ST1 (5F, 5G), Input ST2 (4F, 4G), or both. ST1 causes the voltage at RATEOUT to change about −0.5 V, and ST2 causes an opposite change of +0.5 V. The self-test response follows the viscosity temperature dependence of the package atmosphere, approximately 0.25%/°C. Note that VRATIO must never be greater than AVCC. Activating both ST1 and ST2 simultaneously is not damaging. ST1 and ST2 are fairly closely matched (±5%), but actuating both simultaneously may result in a small apparent null bias shift proportional to the degree of self-test mismatch. Table 4. Ratiometricity Error for Various Parameters Parameter ST1 Mean Sigma ST2 Mean Sigma Null Mean Sigma Sensitivity Mean Sigma VTEMP Mean Sigma VS = VRATIO = 4.85 V VS = VRATIO = 5.15 V 0.3% 0.21% 0.09% 0.19% −0.15% 0.22% −0.2% 0.2% −0.3% 0.2% −0.05% 0.08% 0.003% 0.06% −0.25% 0.06% −0.2% 0.05% −0.04% 0.06% ST1 and ST2 are activated by applying a voltage equal to VRATIO to the ST1 pin and the ST2 pin. The voltage applied to ST1 and ST2 must never be greater than AVCC. CONTINUOUS SELF-TEST The on-chip integration of the ADXRS652 gives it higher reliability than is obtainable with any other high volume manufacturing method. Also, it is manufactured under a mature BiMOS process that has field-proven reliability. As an additional failure detection measure, power-on self-test can be performed. However, some applications may warrant continuous self-test while sensing rate. Details outlining continuous self-test techniques are also available in the AN-768 at www.analog.com. NULL ADJUSTMENT The nominal 2.5 V null is for a symmetrical swing range at RATEOUT (1B, 2A). However, a nonsymmetric output swing may be suitable in some applications. Null adjustment is possible by injecting a suitable current to SUMJ (1C, 2C). Note that supply disturbances may reflect some null instability. Digital supply noise should be avoided, particularly in this case. Rev. 0 | Page 10 of 12 ADXRS652 OUTLINE DIMENSIONS A1 BALL CORNER 7.05 6.85 SQ 6.70 *A1 CORNER INDEX AREA 7 6 5 4 3 2 1 A B 4.80 BSC SQ 0.80 BSC C D E F G TOP VIEW BOTTOM VIEW DETAIL A 3.80 MAX 0.60 0.55 0.50 SEATING PLANE 3.20 MAX 2.50 MIN COPLANARITY 0.15 BALL DIAMETER *BALL A1 IDENTIFIER IS GOLD PLATED AND CONNECTED TO THE D/A PAD INTERNALLY VIA HOLES. 10-26-2009-B DETAIL A 0.60 MAX 0.25 MIN Figure 24. 32-Lead Ceramic Ball Grid Array [CBGA] (BC-32-3) Dimensions shown in millimeters ORDERING GUIDE Model 1 ADXRS652BBGZ ADXRS652BBGZ-RL ADXRS652BBGZ-RL7 EVAL-ADXRS652Z 1 Temperature Range –40°C to +85°C –40°C to +85°C –40°C to +85°C Package Description 32-Lead Ceramic Ball Grid Array [CBGA] 32-Lead Ceramic Ball Grid Array [CBGA] 32-Lead Ceramic Ball Grid Array [CBGA] Evaluation Board Z = RoHS Compliant Part. Rev. 0 | Page 11 of 12 Package Option BC-32-3 BC-32-3 BC-32-3 ADXRS652 NOTES ©2010 Analog Devices, Inc. All rights reserved. Trademarks and registered trademarks are the property of their respective owners. D08820-0-4/10(0) Rev. 0 | Page 12 of 12