MMA6700EG Rev 0, 09/2008 Freescale Semiconductor Technical Data High Accuracy Low g Inertial Sensor MMA6700EG MMA6701EG MEMS Sensing, State Machine ASIC The MMA6700EG series is a dual axis, Low g, XY-axis sensor based on Freescale’s HARMEMS technology with an embedded DSP ASIC allowing for additional processing of the digital or analog signals. DUAL AXIS LOW g INERTIAL SENSOR Features RY NA IMI • • • • • • • • • • • • • • XY-axis of sensitivity in one device 10- or 11-bit digital data output ±3.5 g or ±5 g full-scale range per axis - MMA6700EG: ±3.5 g (11-bit data sensitivity = 3.43 mg/digit typical at 25º C) - MMA6701EG: ±5 g (11-bit data sensitivity = 4.91 mg/digit typical at 25ºC) SPI-compatible serial interface Bidirectional internal self-test On-chip temperature sensor and voltage regulator Support for signed or unsigned output data Selection of integrated signal conditioning low-pass filters Capture/hold input for system-wide synchronization support 3.3 V or 5 V single supply operation Ratiometric analog voltage output Traceability through programmable registers, 3 8-bit. Customer-assigned one-time-programmable Registers (2 8-bit Registration) Minimal external component requirements Wide operating temperature range from -40ºC to +125ºC 20-pin SOIC wide-body RoHS-compliant package Minimum external components, 4 capacitors Typical Applications • • With a +3.5 g or +5 g full scale range, the newly designed, high accuracy sensor enables electronic stability control (ESC) designers to accommodate higher original signal noise level without sacrificing resolution. Tilt Measurement EL • • • EG SUFFIX (Pb-free) 20-LEAD SOIC CASE 475A-02 PIN CONNECTIONS N/C 1 20 N/C N/C 2 19 XOUT 3 18 N/C CREGA VSSA 4 17 CREGA YOUT 5 16 CREF CAP/HOLD 6 15 CREF DIN 7 14 VCC VPP/TEST 8 13 VSS CREG 9 12 DOUT 10 11 SCLK CS/RESET 20-PIN SOIC PACKAGE N/C: NO INTERNAL CONNECTION ORDERING INFORMATION Temp. Range Case No. Package MMA6700EGR2 – 40 to +125°C 475A-02 SOIC-20, Tape and Reel MMA6700AEGR2 – 40 to +125°C 475A-02 SOIC-20, Tape and Reel MMA6701EGR2 – 40 to +125°C 475A-02 SOIC-20, Tape and Reel MMA6701AEGR2 – 40 to +125°C 475A-02 SOIC-20, Tape and Reel PR Device X = 0g Y = 1g X = -1g Y = 0g X = 1g Y = 0g X = 0g Y = -1g This document contains a product under development. Freescale Semiconductor reserves the right to change or discontinue this product without notice. © Freescale Semiconductor, Inc., 2008. All rights reserved. BLOCK DIAGRAM VPP/TEST Unit Programmable Data Array VCC CREG CREGA CREGA Oscillator Reference Clock Monitor Primary Voltage Regulator Internal Clock RY CREF CREF VSS Control Logic SELF-TEST INTERFACE SIGNAL CONVERTER IN 1 TEMP SENSOR SIGNAL CONVERTER SCLK CS CAP/HOLD DSP BLOCK STATUS OUT DIGITAL OUT TEMP Y OUT X OUT DAC DAC YOUT XOUT IN 2 EL GCELL (X) CONTROL IN IMI GCELL (Y) DOUT /STATUS SPI NA VSSA DIN /ST PR Figure 1. Block Diagram MMA6700EG Preliminary 2 Sensors Freescale Semiconductor MAXIMUM RATINGS Rating Symbol Value Unit Supply Voltage VCC -0.3 to 7.0 Vdc CREG, CREGA , VREF VREG -0.3 to 3.0 Vdc VPP/TEST VPP -0.3 to 11.0 Vdc SCLK, CS, DIN/ST,CAP/HOLD VIN -0.3 to VCC + 0.3 Vdc DOUT/STATUS (high impedance state) VOUT -0.3 to VCC + 0.3 Vdc XOUT,YOUT (DACEN=0) VDAC -0.3 to VCC + 0.3 Vdc I 10 mAmps gpms +1500 g gshock +2000 g hdrop 1.2 m VESD VESD VESD +2000 +500 +200 V V V Tstg -40°C to +125°C °C RY Current Drain Per Pin Excluding VCC and VSS Powered Shock (six sides, 0.5 ms duration) Unpowered Shock (six sides, 0.5 ms duration) Drop Shock (to concrete surface NA Electrostatic Discharge Human Body Model (HBM) Charge Device Model (CDM) Machine Model (MM PR EL IMI Storage Temperature Range MMA6700EG Sensors Freescale Semiconductor Preliminary 3 PERFORMANCE CHARACTERISTICS Parameter Symbol Min Typ MAX UNITS VCC VCC VL +3.15 +4.75 +3.3 +5.0 VH +3.45 +5.25 V V TA TL -40 - TH +125 °C Idd - - +9.5 mAmp Programming Voltage Applied to VPP/TEST VPP +7.5 +8.0 +8.5 V Programming Current Applied to VPP/TEST IPP - - 160 mAmp Test Mode Activation Voltage Applied to VPP/TEST VTEST +6.5 +7.2 +7.5 V Measurement Range, XY axis g -3.5 - +3.5 g Supply Voltage Standard Operating Voltage, 3.3 V Standard Operating Voltage, 5V Operating Temperature Range RY Supply Current Standard Operating Voltage, 5.0 V (Digital with Analog Enabled) SENS 3.43 mg/digit SENS 115 mV/V/g NA Digital Sensitivity (DOUT) Analog Sensitivity (XOUT, YOUT) Ratiometric to VCC Offset at 0g, SPI. 11-Bit unsigned data Analog Output Offset Error at 0g, SPI, 11-Bit Unsigned Data TA = +25°C -40°C < TA < +125°C Offset Error at 0g, analog output TA = +25°C -40°C < TA < +125°C -3.0 -4.0 -6.0 - +3.0 +4.0 +6.0 % % % DOUT AOUT - 1024 0.5VCC - Digit V DOUT DOUT -15 -22 - +15 +22 Digit Digit AOUT AOUT -3 -5 - +3 +5 Digit Digit 8.4 12.4 41.9 47.5 62.8 66.5 83.9 95 134 8.8 13.1 44.1 50.0 66.1 70.0 88.3 100 141 9.2 13.8 46.3 52.5 69.4 73.5 92.7 105 148 Hz Hz Hz Hz Hz Hz Hz Hz Hz -4.0 - +4.0 % tSCLK 8.33 - - MHz nSD - - 140 µg/Hz ZOUT COUT 47 - - 35 k pF Cross- Axis Sensitivity SPI Clock Rate Noise (1Hz – 1kHz) PR EL DSP Low-Pass Filter (2nd or 4th Order Selectable) Filter Option $00, $13 Filter Option $01, $14 Filter Option $03, $16 Filter Option $02, $15 Filter Option $04, $17 Filter Option $06, $19 Filter Option $05, $18 Filter Option $07 Filter Option $1A SENS SENS SENS IMI Sensitivity Error (DOUT) TA = +25°C -40°C < TA < +105°C +105°C < TA < +125°C Output Loading (DOUT/STATUS) Load Resistance Load Capacitance fC(LPF) fC(LPF) fC(LPF) fC(LPF) fC(LPF) fC(LPF) fC(LPF) fC(LPF) fC(LPF) MMA6700EG Preliminary 4 Sensors Freescale Semiconductor EXTERNAL COMPONENTS The MMA6700EG requires minimum external components. Aside from a supply bypass capacitor, two 1 μF capacitors provide filtering for the internal analog and digital power supply rails, while a third, 100 nF filter capacitor is required for the internal voltage reference. This circuit configuration is illustrated in Figure 2. Redundant pins are provided for the internal voltage reference and analog supply rails. In safety critical applications, these pins may be connected to separate external capacitors to guard against circuit malfunction in the event of a fault such as an open filter capacitor connection. An internal monitor detects an open digital supply rail filter capacitor condition, which puts the device into reset should this fault occur. MMA6700EG VCC RY VCC CREG 0.1uF CREGA 1uF CREGA 1uF CREF 1uF CREF 0.1uF NA 0.1uF VSSA VSS PR EL IMI Figure 2. Recommended External Component Configuration MMA6700EG Sensors Freescale Semiconductor Preliminary 5 PACKAGE DIMENSIONS PACKAGE DIMENSIONS MMA62XXEG Sensors Freescale Semiconductor Preliminary 6 PACKAGE DIMENSIONS MMA62XXEG Preliminary 7 Sensors Freescale Semiconductor How to Reach Us: Home Page: www.freescale.com Web Support: http://www.freescale.com/support USA/Europe or Locations Not Listed: Freescale Semiconductor, Inc. Technical Information Center, EL516 2100 East Elliot Road Tempe, Arizona 85284 1-800-521-6274 or +1-480-768-2130 www.freescale.com/support Europe, Middle East, and Africa: Freescale Halbleiter Deutschland GmbH Technical Information Center Schatzbogen 7 81829 Muenchen, Germany +44 1296 380 456 (English) +46 8 52200080 (English) +49 89 92103 559 (German) +33 1 69 35 48 48 (French) www.freescale.com/support Japan: Freescale Semiconductor Japan Ltd. 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Freescale™ and the Freescale logo are trademarks of Freescale Semiconductor, Inc. All other product or service names are the property of their respective owners. © Freescale Semiconductor, Inc., 2008. All rights reserved. RoHS-compliant and/or Pb-free versions of Freescale products have the functionality and electrical characteristics of their non-RoHS-compliant and/or non-Pb-free counterparts. For further information, see http:/www.freescale.com or contact your Freescale sales representative. For information on Freescale’s Environmental Products program, go to http://www.freescale.com/epp. MMA6700EG Rev. 0 09/2008