SILICON MICROSTRUCTURES INCORPORATED • • SM5420 Low-Cost, SO-8 Packaged Pressure Sensor For High-Volume Applications Ultra-Small, Low Cost OEM Pressure Package DESCRIPTION The SM5420 is a small outline SO-8 packaged pressure sensor. The sensor uses SMI’s SM5108 micromachined, piezoresistive pressure sensing chip that has been optimized to provide the highest possible accuracy for a package of this size. This performance is achieved through careful resistor placement and mechanical configuration along with advanced MEMS processing. This sensor is intended for high volume applications where cost is a critical factor, such as consumer tire pressure gauges or automotive tire pressure monitoring. The SM5420 is available as an absolute pressure sensor in full-scale ranges of 15 PSI, 30 PSI, 60 PSI, and 100 PSI. It is designed to be surface-mounted on ceramic or PC board substrates by high-volume OEM manufacturers. The SM5420 is available in a ported configuration to allow positive positioning of a pressure source over the inlet or in a nonported configuration to be used for sensing general environmental pressures or with an oring seal. The port position has been chosen to minimize the chance of pressure pulses directly impacting the face of the sensor die for added long-term reliability in hostile environments. The part comes with gel over the die as standard; the part can be ordered without gel in high volumes where the maximum stability is required, such as in barometric, weather station sensing applications. Please contact SMI for more information. The SM5420 is shipped either in IC tubes or in tape-and-reel. FEATURES • • • • • • • Available in 15 PSI, 30 PSI, 60 PSI, and 100 PSI ranges o Wide Temperature range (-40 to +125 C) Suitable for Automated Assembly Extremely Low Cost Small foot-print (0.16 in X 0.20 in) package Constant Current or Constant Voltage Drive High millivolt Output APPLICATIONS • • • • • • • Automotive Tire Pressure Monitoring Engine Control Barometric Sensing Altitude Correction Detection Pneumatic Gauges Hand-held Meters Home Appliances Custom pressure ranges are available in highvolume applications. Minimum order quantities apply to this product. Rev 1.2 4_05 2004 - 2005 Silicon Microstructures, Inc. ♦ 1701 McCarthy Blvd. ♦ Milpitas, CA 95035 USA Tel: 408-577-0100 ♦ Fax: 408-577-0123 ♦ [email protected] ♦ www.si-micro.com SM5420 CHARACTERISTICS FOR SM5420 - SPECIFICATIONS All parameters are measured at 5.000V supply at room temperature, unless otherwise specified. Excitation Voltage Excitation Current Span (FS Range), PSI (kPa) 15 (103) 30 (207) 60 (414) 100 (689) Offset TC Span TC Offset TC Resistance Linearity Bridge Impedance Input Capacitance Proof Pressure Burst Pressure Operating Temperature Storage Temperature 1 2 3 4 Min. Typ. Max. Units Notes 0 0 5.0 1.5 15 2.5 V mA 1 1 2 65 65 65 65 -35 -24 -7 +24 -0.20 4 100 100 100 100 135 135 135 135 35 -15.5 +7 +33 +0.20 6 mV mV mV mV mV %FS/100°C %FS/100°C %/100°C %FS kΩ pF Rated FS Rated FS °C °C -19 -1 +27.5 -0.07 5 <2 3X 5X -40 -55 +125 +150 2 3 3 3 4 Notes: 1. Bridge may be driven with positive or negative excitation; positive output for positive pressure applied to circuit side of die when bridge is driven with positive voltage. 2. Measured at 5V constant voltage excitation. 3. Measured from 0 to 70 C 4. Defined as best straight line. 5. All parts are gelled unless custom ordered. Consult factory for details. PIN OUT 8 NC 8 +IN Out+ 7 NC NC 6 Out2 -IN1 5 -IN2 6 ORDERING INFORMATION: Pressure Shipping Type Model Number H configuration 4 SM5420 - XXX - A - P - T Pressure Range 5 SM5420 Pin-out Cap Type Pressure Range = 015, 030, 060, or 100 for 15, 30, 60, or 100 PSI respectively Pressure Type = A (absolute only) Cap Type = H (hole) or P (port) Shipping = T (tape) or S (IC stick) Pressure Ranges PSI 15 30 60 100 5420 015 030 060 100 P configuration Notice: Silicon Microstructures, Inc. reserves the right to make changes to the product contained in this publication. Silicon Microstructures, Inc. assumes no responsibility for the use of any circuits described herein, conveys no license under any patent or other right, and makes no representation that the circuits are free of patent infringement. While the information in this publication has been checked, no responsibility, however, is assumed for inaccuracies. Silicon Microstructures, Inc. does not recommend the use of any of its products in life support applications where the failure or malfunction of the product can reasonably be expected to cause failure of a life-support system or to significantly affect its safety or effectiveness. Products are not authorized for use in such applications. Rev 1.2 4_05 2004 - 2005 Silicon Microstructures, Inc. ♦ 1701 McCarthy Blvd. ♦ Milpitas, CA 95035 USA Tel: 408-577-0100 ♦ Fax: 408-577-0123 ♦ [email protected] ♦ www.si-micro.com