Models 36, 37 UltraStable™ þ Medical Instrumentation PC Board Mountable Pressure Sensor þ Calibration 0-100 mV Output þ Process Control Gage Pressure þ Factory Automation Wide Temperature Range þ Air Flow Management þ Leak Detection DESCRIPTION The Models 36 and 37 are high performance, temperature compensated, piezoresistive silicon pressure sensors packaged in a differential TO-8 configuration. They provide excellent performance and long-term stability. Differential pressure ranges from 0-15 PSI to 0-250 PSI are available. Integral temperature compensation is provided over a range of -20°C to +85°C using laser-trimmed resistors. An additional laser-trimmed resistor is included in the Model 37 to normalize pressure sensitivity variations by programming the gain of an external differential amplifier. This provides sensitivity interchangeability of ±1%. Please refer to the low pressure section for information on products with operating pressures less than 0-2 PSI. For an uncompensated sensor (Model 35) please contact the factory for FEATURES additional information. þ TO-8 Package þ -20°C to +85°C Compensated Temperature Range þ ±0.1% Non-linearity þ ±0.5% Temperature Performance þ 1.0% Interchangeable Span (provided by gain set resistor) þ Solid State Reliability þ Low Power DIMENSIONS STANDARD RANGES Range 1-42 psid 0 to 15 ● 0 to 30 ● 0 to 50 ● 0 to 100 ● 0 to 250 ● TO-8 – Wide Temperature Range Models 36, 37 UltraStable™ PC Board Mountable Pressure Sensor PERFORMANCE SPECIFICATIONS Supply Current: 1.5mA Ambient Temperature: 25°C (Unless otherwise specified) PARAMETERS Full Scale Output Span, (without gain set resistor) MIN TYP MAX UNITS NOTES 75 100 150 mV 1 2 ±mV 3 0.1 ±% Span 2 ±% Span Zero Pressure Output Pressure Non-linearity 0.05 Pressure Hysteresis 0.01 0.1 3500 4500 Ω Temperature Error – Span 0.3 0.5 ±% Span 3, 4 Temperature Error – Zero 0.1 0.5 ±% Span 3, 4 4 Input Resistance 2500 Temperature Coefficient - Resistance 0.145 %/°C Thermal Hysteresis – Zero 0.05 ±% Span 4 Short Term Stability of Offset 0.05 ±% Span 11 11 Short Term Stability of Span 0.05 ±% Span Long Term Stability of Offset 0.1 ±% Span 12 Long Term Stability of span 0.1 ±% Span 12 Supply Current 0.5 1.5 Response Time (10% to 90%) Output Noise Output Load Resistance mA 5 1.0 msec 6 1.0 µV p-p 7 MΩ 8 MΩ 13 Rated 9 5 Insulation Resistance (50 VDC) 50 Pressure Overload Operating Temperature 2.0 3X –40°C to +125°C Storage Temperature –50°C to +150°C Media Non-corrosive Gases Compatible with Wetted Materials Weight 3 Grams Notes 1. Output span of unamplified sensor. 2. Best Fit Straight Line. 3. For Models 36, 37, compensation resistors are an integral part of the sensor package; no additional external resistors are required. Pins 11 and 12 must be kept open. Model 37 is interchangeable only when used with a gain stage as shown in the Gain Set Circuit. 4. Temperature range: -20°C to +85°C in reference to 25°C. 5. Guarantees input/output ratiometricity. 6. For a zero-to-full scale pressure step change. CONNECTIONS Model 36 7. 8. 9. 10. 11. 12. 13. 10 10 Hz to 1 kHz. Prevents increase of TC-Span due to output loading. 3X or 500 psi maximum, whichever is less. 20 psi for 2 psi and 5 psi versions. Wetted materials are glass, ceramic, silicon, RTV, nickel, and aluminum. Normalized offset bridge voltage: 7 days. 1 year. Between case and sensing element. APPLICATION SCHEMATIC Model 37 ORDERING INFORMATION April 2000 TO-8 – Wide Temperature Range 1-43