Model 96 UltraStable™ 316L SS Pressure Sensor High Performance 0-100 mV Output Absolute and Gage Low Pressure þ Hydraulic Controls þ Process Control þ Oceanography þ Refrigeration/Compressors þ Pressure Transmitters þ Level Systems DESCRIPTION The Model 96 is a small profile, media compatible, piezoresistive silicon pressure sensor packaged in a 316L stainless steel housing. The Model 96 is available with a standard ¼ NPT fitting. The sensing package utilizes silicone oil to transfer pressure from the 316L stainless steel diaphragm to the sensing element. The Model 96 is designed for high performance, low pressure applications. A ceramic substrate is attached to the package that contains laser-trimmed resistors for temperature compensation and offset correction. An additional lasertrimmed resistor is included which can be used to adjust an external differential amplifier and provide span interchangeability to within ±1%. Sensors with O-ring fittings, and high pressure sensors are FEATURES also available. Please contact factory for more information. þ 1/4 NPT Thread, 5/8" Hex þ –20°C to +85°C Compensated Temperature Range þ ±0.1% Pressure Non-linearity þ ±1.0% Interchangeable Span (provided by gain set resistor) þ Solid State Reliability þ Low Power DIMENSIONS STANDARD RANGES Range 1-72 psig psia 0 to 15 ● ● 0 to 30 ● ● 0 to 50 ● ● 0 to 100 ● ● 0 to 300 ● ● 0 to 500 ● ● ISO – Wide Temperature Range Model 96 UltraStable™ 316L SS Pressure Sensor PERFORMANCE SPECIFICATIONS All parameters specified at 1.5mA and at 25°C, after 10 second warm up, unless otherwise indicated. Unless specifically indicated, only those parameters indicated as tested are verified on each part. Parameters are specified for the compensated version only. PARAMETERS MIN TYP MAX UNITS NOTES Full Scale Output Span 75 100 125 mV 1 Zero Pressure Output (Offset) –1 0 1 mV 2 0.10 ±% Span 3 +0.05 ±% Span Pressure Non Linearity –0.10 Pressure Hysteresis –0.05 0.02 Repeatability 0.02 Ω –0.75 +0.75 % Span 4 –0.5 +0.5 % Span 4, 5 2000 Temperature Error - Span (–20°C to +85°C) Temperature Error - Offset (–20°C to +85°C) ±% Span 4500 Input and Output Resistance 3500 Thermal Hysteresis - Span 0.05 % Span 4 Thermal Hysteresis - Offset 0.05 % Span 4 Long Term Stability - Span 0.1 ±% Span/year Long Term Stability - Offset 0.1 Supply Current 0.5 Output Load Resistance Insulation Resistance (50 VDC) 1.5 ±% Span/year mA 6 5 MΩ 7 50 MΩ 8 Pressure Overload 2.0 3X Rated Compensated Temperature Range –20°C to +85°C 9 Operating Temperature Range –40°C to +125°C 9 Storage Temperature Range –50°C to +125°C 9 Media - Pressure Port Liquids and Gases compatible with 316L Stainless Steel Media - Reference Port Compatible with Silicon, Pyrex, Gold, Fluorosilicone Rubber and 316L Stainless Steel Weight 27 g 10 Notes 1. For amplified output circuits see application note TN-003. 6. Guarantees output/input ratiometricity. 2. Measured at vacuum for absolute (A), ambient for gage (G). 7. Load resistance to reduce measurement errors due to output loading. 3. Best fit straight line. 8. Between case and sensing element. 4. Over the temperature range –20°C to +85°C with respect to +25°C. 9. 5. 15 psi range sensors have an offset temperature error of ±0.75% (Max) from –20°C to +85°C. Maximum temperature range for product with standard cable and connector is –20°C to +105°C. 10. Weight depends upon configuration (cable, connector, pressure fitting). ORDERING INFORMATION APPLICATION SCHEMATIC 96 - 050 G - 4 C T T = Vent Tube, Blank is standard = No tube Electrical (C = Ribbon Cable with Connector, Electrical (P = Solder Pads, R = Ribbon Cable, Electrical (L = Lead, Uncompensated) Pressure Port (4 = 1/4 NPT) Type (A = Absolute, G = Gage) Pressure Range (15 to 500 psi, 050 = 50 psi) Model For other pressure ranges, process fittings and electrical connections contact factory. CONNECTIONS PAD / CONDUCTOR NO FUNCTION 1 +OUT 2 -EX 3 +EX 4 -OUT 5 GAIN 6 GAIN April 2000 ISO – Wide Temperature Range 1-73