6.24MB

Total support for materializing the ideal cleanroom
CLEANROOM TOTAL SOLUTION
2012
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http://www.fujielectric.co.jp/products/cleanroom/
Safety notes
Use the system properly by reading the Operation Manual and the Specifications carefully or consulting the dealer where you purchased the system.
Only qualified personnel with the appropriate expertise and knowledge in the relevant fields should operate the system.
Printed on recycled paper.
Gate City Ohsaki East Tower
1-11-2, Osaki, Shinagawa, Tokyo 141-0032, Japan
Phone :+81-3-5435-7111
Website
URL http://www.fujielectric.co.jp
Information in this catalog is subject to change without notice.
2012-8 Printed in Japan
EK613
S o l u t i o n
FPD
Semi-conductor
Pharmaceutical/Food
FFU Monitoring System・・・・・・・p31
We are capable of offering optimum solutions, such as the state-ofthe-art local unit cleanroom, indispensable for cleanness at low cost.
How to choose
the FFU monitoring system
Function List
F-SITE-FMR500
ARGE SCALE
2
L
F-SITE-FMC500
F i e l d
OST PERFORMANCE
How to choose FFU
Standard Type［WLFA］
Large air volume Type［WLFB］
1-phase Type［WLFC］
AC motor Type［WLFD］
Stand-alone Type［WLFE］
Thin Type［WLFF］
Controller Specifications
How to choose FFU for
manufacturing equipment
F-Stage［WLFG］
F-Cube-N［WLFH］
Heat-resisting FFU［WLFI WLFJ］
Chemical FFU［WLFK］
1
C
FFU・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・p11
F i e l d
For cleanroom technology, Fuji Electric started development of
cleanroom equipment at the beginning of the 1970s and constructed
our own semiconductor plant cleanroom in the 1980s.
Since then, we have accumulated extensive know-how for cleanroom through improvement of the production environment jointly
promoted with customers operating large-scale cleanrooms.
To solve various problems, we have developed high-performance
products based on our wide range of element technologies as an
electrical equipment manufacturer and materialized various solutions.
Automobile/
Precision components/
Lithium-ion battery
S o l u t i o n
Solution examples・・・・・・・・・・・・・・・・p7
F-SITE-FMV300
We can provide prompt support for large-scale cleanrooms
with our industry-leading production system and experience.
F-SITE-FMC200
F-SITE-FMC100
LSI
LCI
COLOGY
Lineups
Our FFU materializes the highest efficiency in the industry by
diverting the hydroelectric turbine technology that we have developed
and improved for many years into air cleaning and by applying our
power electronics technology to flexible operation of electricity supply.
Lighting panel/Blank panel
CCURACY
Joinery (Doors, Windows)
Interior and partion panel
Maintenance hatch,
Maintenance passage
Free access floor
Power distribution equipment
Energy saving measures・・・・・・・p57
Proposal for energy saving/
replacement
Materialization of energy saving/
replacement
N
1
CLEANROOM
EW TECHNOLOGY
With our comprehensive capability as a
manufacturer, we have been improving
various state-of-the-art technologies, such
as FFU Active Control with the particle
sensor, the wind direction/velocity sensor and
the ultra-precise temperature control etc.
History of development for
the cleanroom at Fuji Electric
Engineering tools
CLEANROOM
Re p l ac em e n t
We can provide accurate cleanroom design materializing a clean environment by using our engineering
capability in airflow analysis as much as possible.
Bypass panel (Filter)
3
A
Ceiling grid frame
F i e l d
E
Cleanroom materials・・・・・・・・・・・p47
2
S o l u t i o n
Industrial sectors requiring the cleanroom and levels
What is the cleanroom?
A floor area or space, usually not well defined, operating at
a lower airborne contamination level than the general surrounding environment
Cleanroom is a specially constructed enclosed area which is environmentally controlled, with respect to airborne
particulates, temperature, humidity, air pressure, air flow patterns, air motion, static charges, and lighting.
To secure high-quality and reliability of products, it is very important to prevent adhesion of particles.
This technology is applied to prevention of hospital-acquired infection, bacterial contamination in
pharmaceutical plants, and food alteration in food plants. The industrial sectors requiring a cleanroom are
constantly expanding.
Class 4
0.3μm
Class 1
Class 6
Class 7
0.5μm
0.5μm
Class 8
0.5μm
Class 10
0.1μm
Class 5
Class 100
0.3μm
0.3μm
Class 10 Class 100
Class 1000 Class 10000
LSI manufacturing wafer process
LSI assembly/test process
Semiconductor/FPD
Silicon single crystal
Photo mask
Photoresist
Printed circuit board
Liquid crystal for display
Organic EL
Solve by introducing
the cleanroom
Foreign material contamination
Food spoilage
Chemicals for manufacturing LSI
Solar panel
Precision electronic components
Magnetic head
Precision machinery
Bacterial contamination
Class 3
Semiconductor manufacturing equipment
Food sector
Hospital-acquired infection
Class 2
Class 1
Increase of failures and defectives
Medical and Pharmaceutical
sector
Class 1
0.1μm
Cleanliness
(Conventional expression, piece/ft 3 )
Industrial sector
Reduction in yield rate
Cleanliness (ISO class)
Various kinds of
failures caused by
air pollution
Disk
Photographic film
Optical fiber
Miniature bearing
Lens
Precision measuring instrument manufacturing
Antibiotic
Cleanliness of the cleanroom is generally expressed in the
number of particles contained in the unit volume of air.
Therefore, the smaller the numbers of the cleanliness
Standard
Standard
particle size
Cleanliness conventionally
FS-209D FS-209E
used (pieces/ft3)
0.1μm
0.3μm
0.5μm
0.5μm
1.5
Standards (FS-209D E) were used generally but has been
2
abolished when ISO14644 has been enacted (2000).
10
1
widely used in actual cleanrooms.
100
This expresses the fine-particulate concentration as the
10
number of particles in 1 cubic foot (pieces/ft3).
altered to 0.3 μm or 0.1 μm at the actual sites. Thus, it is
necessary to pay attention to the subject particle size
and the unit volume (m3/ft3) to confirm the class.
10
Cleanliness
class
1,000
100
100
10,000
1,000
1,000
100,000
10,000
10,000
100,000
100,000
3
CLEANROOM
M1
2.5
M1.5
3
M2
3.5
M2.5
4
M3
4.5
M3.5
5
M4
5.5
M4.5
6
M5
6.5
M5.5
7
M6
7.5
M6.5
8
Preparation packaging line
Medical equipment and disposals
Sterile hospital room
Operating room
Milk and milk products
Meat and meat processing
Brew
Confectionery and bakery
Barrier system
Others
However, the cleanliness class based on FS 209D is still
1
Injection drug
Prescription laboratory
Foods
1
For the standard of cleanliness, the U. S. Federal
FS-209D standard, the standard particle sizes are often
0.1μm
1
class, the higher the grade (less dust) of the cleanroom.
Although the standard particle size is 0.5 μm in the
JIS/ISO
Medical and
Pharmaceutical
Expression of the cleanliness level
Isolator
Mushroom cultivation
Cosmetics
Recommended method
FFU-method cleanroom
Clean cooling equipment
CLEANROOM
4
S o l u t i o n
Components of FFU-method cleanroom
In response to current requirements and future demand,
it is possible to construct an ideal cleanroom.
System ceiling materials
The FFU-method cleanroom is a method of cleaning a space by constructing a grid-shaped ceiling
with aluminum frames and by installing the necessary number of
FFUs (fan filter units) for materializing the required cleanliness.
This is suitable for a cleanroom requiring high cleanliness with single airflow and
adopted widely to large-scale cleanrooms in the semiconductor and flat panel industries.
In order to improve performance and maintenance
efficiency of the cleanroom, all materials required
such as grid ceiling frames, lighting panels, blank
panels and interior panels are provided.
Temperature control equipment
A wide range of lineups covering from the large
air-volume type for system ceilings to the thin type
of stockers with limited spaces is provided.
Various kinds of FFUs for manufacturing equipment,
which you can select in accordance with functions
and air volume, are available.
Environmental sensor
Concept catalog
In order to improve quality and shorten the processing time,
various kinds of temperature control equipment covering
from the highly accurate temperature/humidity environment
control to the temperature control for wafers and glass
substrates are provided.
Custom made production is available upon request.
P.11
FFU
P.47
Cleanroom component equipment
Concept catalog
Various kinds of cleanroom component equipment
considering high efficiency, power saving and low
noise are lined up, covering from an air shower to
a garment stocker.
Concept catalog
Various kinds of environmental sensors such as F-Planet, a
cleanroom environmental sensor, a wind direction/velocity
sensor are provided, so that you can quickly support trend
analysis and environment alteration.
Airflow control equipment
Concept catalog
Various kinds of equipment controlling airflow,
such as air curtains, FFU with louvers, draft
chambers, and exhaust units, are provided.
FFU monitoring system
P.31
Special environment booth
This system provides real-time monitoring capable of
stable manufacturing and improvement of yield rate.
Our monitoring system, the F-SITE series, is a lineup
which can at will materialize the visualization of
the cleanroom covering from a large-scale to a
small-scale cleanrooms.
Concept catalog
Various kinds of clean booths satisfying wide
requirements, such as high cleanliness support,
chemical pollution measures, and prevention of
radiation exposure, are available.
We do custom-made for necessary places,
necessary sizes, and necessary performance.
Best choice from Solution examples for respective purposes and use
P.7
1
Merits
5
CLEANROOM
Energy saving effects
The equipment consumes less energy
than the pressure chamber method
requiring a large-sized air conditioner.
Furthermore, you can operate the cleanroom with economy since ON / OFF
switching and air velocity adjustment can
be made for each FFU independently.
［kW］
100
90
80
70
60
50
40
30
20
10
0
Difference in Enery Required
(estimates of Fuji Electric)
78.7
Pressure chamber
method
19.3
FFU-method
2
Redundancy
Even if several units of FFU
fail, performance as a cleanroom can be maintained.
It can be said that the system has high resistance to
failures.
3
Flexibility
Cleanliness in an area is
adjustable by adding or
changing the position of
FFUs.
It is possible to flexibly
handle alteration of production lines.
4
No leakage
Above the system ceiling
5
Easy maintenance
With the no-leakage method,
there is no risk of cleanliness
deterioration in the cleanroom
since maintenance service can
be executed while operating
the cleanroom.
There is no risk of particle
leakage to the cleanroom side
since the space above the
system ceiling achieves negative pressure compared to the
inside of the cleanroom.
Inside of the cleanroom
CLEANROOM
6
S o l u t i o n
Solution examples
FPD
Solution examples
Semiconductor
areas having different
2 Separate
levels of cleanliness
air velocity required
3 Securing
for a large area
Cleanliness of 1,000 to 100,000 in a
wide area can simply be cleaned without constructing a system ceiling.
Areas having different levels of cleanliness, which used to be separated with
panels, can be separated with highspeed air blowers.
Even in a space with a high ceiling more
than 10 m such as a stocker area, high
speed flow of 0.8 m/s secures the wind
velocity required for pass lines
Cleaning inside of the equipment in accordance with the shape
and the specifications suitable for the equipment installed.
Chemical pollution of wafers can be reduced by applying
improved materials/structures and incorporating chemical filters.
The unit can be installed in a small space with increasing temperature by employing the small-sized heat-resisting motor.
Flexibility of installation positions will be expanded.
Clean cooling equipment
Air curtain
Large air volume FFU
Chemical FFU
Heat-resisting FFU
of inspection areas,
1 Cleaning
dry areas
Concept catalog
Prevention of foreign substance
4 adhesion in a stocker
Cleaning a stocker area efficiently with
thick body and large air volume
Maintenance/Production area
Concept catalog
of chemical
5 Removal
constituents
Chemical pollutants that are problem in
the FPD manufacturing process, such
as NH3, SOx, NOx, are removed
Maintenance/Production area
P.11
6 Quick cooling of
Photo Process
2 Cleaning of thermal oxidation units
P.12
P.12
temperature/humidity control
4 Precise
for the resist-coating part
3 Cleaning of EFEM
glass substrates
Deposition process
S o l u t i o n
Maintenance area
1 Cleaning of coater/developers
Substrates after being baked can be
cooled quickly by applying cold air to the
glass efficiently with the special nozzle.
Particle adhesion can be reduced on EFEM by adjusting pressure between an FFU and FOUP or equipment.
Atmosphere of some parts requiring precise temperature/
humidity management, such as the resist-coating part can be
controlled at high accuracy of +/-0.01 ℃ and +/-0.3% with our
unique controlling method.
Homogenization of resist film quality can be materialized.
Substrate quick cooling unit
FFU for manufacturing equipment
Precise temperature/humidity control unit
External air
Cleaned air
Thin type FFU
Chemical washer
P.11
Stocker area
7 Air cooling of glass substrates
Substrates after being baked are cooled
with air at the cassette by the cassette. It
is possible to cool the surface temperature uniformly in a short time.
Glass substrate cooling equipment
Photo process
Concept catalog
Large-sized clean booth for G10
Concept catalog
homogenization of
8 Temperature
substrate before photo process
Surface temperature of substrates
before entering the stepper is uniform
and highly accurate. Dispersion of
pattern transfer
caused by uneven
temperature can
be reduced.
Glass substrate temperature
stabilizing equipment
Photo process
Concept catalog
control for
11 Temperature
entire CR
Photo process
Concept catalog
9 Large-sized air shower for G10
Transportation
P.12
Photo Process
Concept catalog
sensitive difference of pressures between
6 Detecting
the inside and outside of the manufacturing equipment
5 Cleaning of the cleaning equipment
This is a large-sized air shower for large
glass substrates of G10 size
Entire height of the equipment can be minimized by applying
design suitable for the equipment structure.
Pressure in the equipment can be controlled properly by detecting slight air velocity with the ultrasonic method.
Preventing penetration of chemicals and particles.
Large-sized air shower
FFU for equipment
Wind direction/velocity sensor
Acceptance
Concept catalog
Cleaning process
P.12
monitoring of
7 Real-time
manufacturing environment
Manufacturing equipment
Concept catalog
8 Energy saving operation of the cleanroom
Class 10 of G10-sized inspection equipment can be materialized in a large-sized
clean booth of W8000 x D6000 x H3500.
Temperature of an entire cleanroom is
controlled by the cold water coil.
Causes of fluctuation of yield rate can be determined by
executing real-time monitoring of cleanliness, temperature
and humidity in important processes.
Energy saving operation with eliminating waste can be materialized through optimization of the air volume of an FFU in combination with the environment sensor.
Large-sized clean booth
Cold water coil
F-Planet
Cleanroom monitoring system
Inspection
7
External air processing
CLEANROOM
Concept catalog
Entire cleanroom
Concept catalog
Production line
Concept catalog
Cleanroom
P.31
CLEANROOM
8
S o l u t i o n
Solution examples
Medicine/Foods
and dehydration of
2 Sterilization
medical equipment
1 Radiation shielding
Automobile, Precision components, Lithium ion battery
1 Preventing adhesion of dust in the coating line
accurate temperature control for
2 Highly
the lens inspection process
It is possible to dry products requiring sterilization such as syringes of injectors efficiently with thermal insulation from outside.
Since the heat-resisting
filter is incorporated, it is
not necessary to worry
about contamination due
to hot air.
Winding up of dust in the pre-coating line of automobiles can be
prevented efficiently with the FFU with the special diffuser
expanding the blast area.
Environmental temperature in
processes requiring highly accurate temperature control such
as lens production of optical
equipment can be controlled
with accuracy of +/-0.005 ℃by
applying our unique multi-step
controlling method.
Radiation shielding lead booth
Hot air dehydration sterilization bench
FFU with diffuser
Highly accurate thermal chamber
Concept catalog
3 Stabilizing quality of medical equipment
Sterilization and dehydration
Concept catalog
equipment supporting
4 Cleanroom
the explosion-proof areas
Coating
Concept catalog
3 Environmental management of the production line
Inspection
S o l u t i o n
Human bodies can be protected from the radiation emitted from
a reagent, such as cancer drugs with the protective plate
incorporating lead.
Product filling
Concept catalog
4 Local cleaning of the production line
For the environment of processes being influenced by humidity,
such as contact lens production, dehumidification and temperature control can be provided with the freezer method.
For hazardous areas requiring
the explosion proof structure,
such as pharmaceutical factories and chemical factories, we
can provide designs considering
safety.
With the trend for monitoring of the respective processes, the
production environment such as temperature, humidity and
cleanliness can be controlled constantly.
It is possible to clean processes containing a lot of processing
dust and problems of dust adhesion easily.
Dehumidification thermal booth
Explosion-proof air shower
F-Planet
Clean booth
Low humidity
Explosion proof
Concept catalog
5 Clean dehydration of the pharmaceutical solution
Concept catalog
prevent food contamination with
6 To
foreign substances
Production line
Concept catalog
5 LED, Solar battery, Lithium ion battery
A general area and a clean area in a food factory can be
separated without providing a shutter.
Dust in a room can be removed quickly by balancing air intake
and exhaust.
Humidity of environments of processes where humidity in the air
must be avoided, such as lithium ion battery production can be
reduced with the desiccant method.
Hot air dehydration booth
Air curtain
Low dew point dry room
Concept catalog
7 Safety air conditioning for toxic reagents
Cleanroom
Concept catalog
It is easy to construct a clean area with Cleanliness Class
100,000 degrees, which is often used in pharmaceutical plants
and food plants.
Draft chamber
Clean cooling equipment
Testing laboratory
CLEANROOM
Concept catalog
Dust can be collected efficiently by
connecting to the suction hose.
Dust collection unit
Concept catalog
Cleanroom
Concept catalog
8 Easy construction of a clean area
Hazardous substances and harmful microorganisms can be
cleaned and exhausted without diffusing them in the room.
Explosion-proof specifications are supported, too.
Concept catalog
Electrolyte filling process
Production line
6 Removal of dust in the cleanroom
Dehydration of solution, which took some time previously, can
be executed in a short time by blowing hot air at high speed.
Dehydration
9
Solution examples
Cleanroom
Concept catalog
CLEANROOM
10
F F U
FFU
By use, by functions and features, and by air volume
Full lineups you can choose the best from various angles.
FFU
Various types for the system ceiling are provided for cleaning up the entire room
WLFB
As conforming to the global standards, best performance is materialized in a limited installation space
WLFC
WLFG
F i e l d
WLFA
FFU for manufacturing equipment
WLFH
1
Standard type
Large-air volume type
1-phase type
■
■
■
3 Φ 200 V
■ Full communication functions
P.15
Large air volume of 50 CMM
WLFD
■
P.25
WLFF
WLFI
Heat-resisting FFU (Super thin type)
AC motor type
Stand-alone type
■
■
■
Simple structure
Easy operation
P.18
11
CLEANROOM
■
Clean booth etc.
Optimum for sole use
P.19
Optimum for installing on
the side panel of stockers
■
P.20
P.27
WLFJ
Heat-resisting FFU
(High air velocity type)
The system can be used in high
temperature environment (50℃).
■ Thin type with height of 105 to 120 mm
The system can be used in high
temperature environment (50℃).
■ Air volume 0.65 m/s of the high
static pressure fan
P.29
P.29
■
Thin type
Supporting 1 Φ 100 V ordinary outlet
Filter-integrated type
■ Communication functions
■
Discontinued
P.17
WLFE
F-Cube-N
■
1 Φ 200 V / 3 Φ 200 V
■ Super thin
■ Supporting RoHS
1 Φ 200 V
P.16
F-Stage
■
WLFK
Chemical FFU
Optimum for chemical contamination
measures for the manufacturing
equipment such as coaters and developers
■ Easily replaceable chemical filters
■
P.30
CLEANROOM
12
F F U
Field 1 F F U
Features of Fuji FFU
Reliable performance
You can accurately select a system suitable for the respective use.
We have abundant experience for more than 40 years as a supplier of the clean equipment and have supplied
more than 500,000 units of FFUs.
Select for use
3-phase
Power supply
specifications
1-phase
Number of large-scale systems:
100 to several 10,000 units
3-phase
Available
Available
P.16
1-phase type
WLFC
P.17
Dedicated
design
Available
AC motor type
WLFD
P.18
Stand-alone type
WLFE
P.19
Standard type WLFA
Clean booth
Dedicated
design
Not available
Not available
Available
Installed on the
manufacturing equipment
F-Cube-N
WLFH
P.23
Chemical
WLFK
Thin type
WLFF
The standard material for casing is the coated steel sheet having superior corrosion resistance and cost performance.
However, various kinds of materials such as stainless steel are selectable according to the purpose of use.
Size variation
Various sizes of FFUs can be manufactured according to the grid dimensions and the available installation space.
Reducing the work load
By using the multiple operation controller, the number of cable connection points can be reduced (1/4 comparison
with conventional) and the installation cost can be saved, while the launching time of the cleanroom can be
shortened by shortening the installation period.
Occurrence of communication errors due to defective connection of cables and external noises can be reduced.
Feature
Custom type for equipment
Heat-resisting
WLFI WLFJ
Selectable materials
Improvement of reliability
Standard type for equipment
F-Stage
WLFG
Various types of FFUs such as the large air volume type that is the highest in the industry and the thin type
optimum for installing on the side panel of the stocker are available.
1
Not available
Variable
air volume
Large-air volume type
WLFB
Power supply 1-phase
specifications
Not available
Number of small-scale systems:
10 to several 100 units
P.15
P.23
1
P.20
Industry highest energy-saving motor
The brushless DC motor having superior efficiency
in comparison with the induction motor is adopted
as standard.
Industry highest energysaving performance has
been materialized.
Feature
FFU specifications
Type
(the production range is shown in the brackets)
Grid size
Power supply
specifications
Standard type
WLFA
D750×W1500
（D:500∼）
（ W:∼1800）
3Φ200V
Large-air volume type
WLFB
D750×W1500
（D:500∼）
（ W:∼1800）
3Φ200V
DC600W
Available
BFFU750
CAN
1-phase type
WLFC
D610×W1220
（D:500∼）
（ W:∼1800）
1Φ200V
DC210W
Available
BFFU250-1P
CAN
AC motor type
WLFD
D610×W1220
（D:500∼）
（ W:∼1800）
3Φ200V
AC200W
Not available*
−
−
Stand-alone type
WLFE
D610×W1220
（D:500∼）
（ W:∼1800）
3Φ200V
DC170W
Not available*
BDR170T
−
Thin type
WLFF
D1200×W1500
（D:500∼）
（ W:∼1800）
3Φ200V
Motor
Upper side
communication
DC210W
Available
DC100W
×2
Available
Adaptable controller
Communication
method
SDR3204-2R-TD
（4C4M）
RS485
BFFU250（ 1C1M） BFFU500（ 1C2M）
BFFU1000（ 1C4M）BFFU1000（ 4C4M）
SDR3204-2R-TD
（4C4M）
3
CAN
RS485
Feature
5
Adjustable air volume to the optimum
By using our core technology, power electronics
technology, highly accurate speed control becomes possible.
You can set the optimum air volume for your use
environment.
The large-air volume type of the industry highest
class is also included in our lineups.
The waterwheel designing know-how
of the hydro power generation engineering, our traditional business field,
is applied to fan designing.
By adopting the airfoil section in the fan shape, the efficiency has been improved.
*In 1980, we had adopted the turbo fan to the FFU for the first time in the world.
F-Stage［WLFG］
1Φ200 V / 3Φ200 V
HEPA, ULPA selectable
Not available
115 mm *1
RoHS (Supporting CE optionally) *2
F-Cube-N［WLFH ］
1Φ100 V General outlet / 1Φ200 V (Optional) / DC 24 V (Optional)
ULPA is incorporated as standard (HEPA selectable for specific sizes only)
The remote air volume adjustment and the failure monitoring are available optionally
150 mm
RoHS (Optional) /CE (Optional)
*1 Thickness of the main unit when 40 mm filter is used. *2 F-Stage 61, F-Cube 122 only
Feature
4
Surprising quietness
The lowest level of noise in the class has been materialized by implementing the inlet of the fan making smooth
flow and the rectifier structure in the unit
The system does not affect to the surrounding environment with the design considering prevention of vibration.
This is our unique control system capable of operating multiple FFUs with a single controller.
Since installation can be simplified, it is optimum for a cleanroom system using many FFUs.
Patented
Multiple operation controller
Controller (1C4M)
* 1 controller: 4 motors
Comparison of FFU for equipment
CLEANROOM
2
Airfoil high efficiency fan
Multiple operation controller
*It is optionally possible to output abnormal signals externally
13
Feature
The turbo fan type becomes currently the mainstream in the world.
For mounting on
the side panel of the stocker
Power supply
Filter
Communication functions
Thickness
Standard
F i e l d
Variable
air volume
Abundant lineups
Standard type
WLFA
Main FFU
Sub FFU
FFU controller
The controller controlling
FFU is our core technology
evolved from our inverter
technology.
Major features
SDR3204-2R-TD
Highly efficient conversion (AC-DC-AC)
Controllability (built-in PWM control circuit)
Remote operability (CAN/RS485 communication system)
Sub FFU
Sub FFU
Current limit circuit
Connection cable between
Communication cable
Power supply cable
Low-voltage protection circuit
Main FFU and Sub FFU
Rotational speed detection in BLDC sensorless motor
Various kinds of DC-FFU are equipped with the controller. For details, refer to P. 21 to P. 22.
CLEANROOM
14
F F U
Standard type WLFA
Large-air volume type WLFB
Outline dimensional drawing
Outline dimensional drawing
Control box
Power supply cable
VCTF 2.0Sq 4 cores 2 m 2 sets
(Including the rivet head 1469.6)
Outline dimensional drawing
270
Communication cable
Shield 0.2Sq 2 cores RS485 2 m 2 sets
1464 ±1
47.4
259
245
255
714 ±1
Loader connection port (Modular)
91
1464
(30)
F i e l d
(Including the rivet head 719.6)
714 ±1
Rating plate
1464
Rotating direction
18
1
365
220
220
(1)
Power supply Sw
1464
Power/Operation/Abnormality indicator lamp
② Fan maintenance direction ①
10
10
63 210
1460 (Filter size)
(2)
1467
(1.5)
1467
1464 ±1 1.6(1.2)
Rivet
FFU
120
8
(Filter size: 1460 x 710)
(1460)
(2)
Filter
Performance curve
450
1400rpm
350
1300rpm
300
1200rpm
250
1100rpm
200
150
50
5
10
15
20
25
35
900rpm
800rpm
40
45
Input power
Current
1.0
600
0.9
0.6
0.5
0.4
0.3
0.2
5
10
15
20
25
30
Air volume [m3/min]
35
40
45
50
0.0
400
1200rpm
300
1000rpm
1100rpm
200
61
58 60
55 59
100
10
20
30
40
0
5
10
15
20
25
30
Air volume [m3/min]
35
40
45
50
Input power
50
60
70
Current
2.0
1.5
400
300
200
0
0
900rpm
66dB(A)
Air volume [m3/min]
1.0
0.5
100
0.1
0
1300rpm
Current [A]
100
Input power [W]
0.7
150
1400rpm
500
0.8
200
Air volume/Static pressure
500
0
0
50
Air volume [m3/min]
Current [A]
Input power [W]
CLEANROOM
30
1000rpm
58dB(A)
55 57
51 53
48
43 46
100
50
15
Total static pressure
(Static pressure of the blower) [Pa]
Total static pressure
(Static pressure of the blower) [Pa]
1450rpm
250
0
600
400
0
0
300
Performance curve
Air volume/Static pressure
10
20
30
40
Air volume [m3/min]
50
60
0.0
0
10
20
30
40
50
60
Air volume [m3/min]
CLEANROOM
16
F F U
AC motor
type WLFD
WLF0170W
1-phase
type
WLFC
WLF00
単相
Communication cable
Shield 0.2Sq 2 cores RS485 2 m 2 sets
Power supply cable
VCTF 2.0Sq 3 cores 2 m 2 sets
Outline dimensional drawing
Outline dimensional drawing
(Including the rivet head 1229.6)
1224 ±1
Electric wire fixture
M4 terminal block
614
614 ±1
(Including the rivet head 619.6)
F i e l d
Rating plate
1224
Loader connection port (Modular)
1
1224
Terminal block cover
(30)
Power/Operation/Abnormality indication lamp
Power supply Sw
18
1224
220
(1)
220
63
800rpm
55dB(A)
100
47
50
0
5
10
15
52
54
20
25
30
35
40
45
Air volume [m3/min]
Current
0.9
140
0.8
120
0.7
40
0.4
0.3
0.2
0
0.0
5
10
15
20
25
30
Air volume [m3/min]
35
40
45
51dB(A)
100
47
50
0
0
5
10
15
20
25
30
35
40
Air volume [m3/min]
Current
0.8
150
0.5
0.1
150
160
0.6
20
AC200V50Hz
200
140
130
Current [A]
Current [A]
60
AC200V60Hz
250
Input power
170
Input power [W]
Input power [W]
80
10
Total static pressure
(Static pressure of the blower) [Pa]
Total static pressure
(Static pressure of the blower) [Pa]
900rpm
150
Air volume/Static pressure
300
1000rpm
100
CLEANROOM
1227
Performance curve
200
(1.5)
(2)
1227
(2)
1100rpm
Input power
0
1220 (filter size)
8
Filter
250
0
17
Rivet
Air volume/Static pressure
300
160
FFU
(1220)
(Filter size: 1220 x 610)
Performance curve
1.6(1.2)
(10)
210
120
1224 ±1
120
110
0.7
100
90
80
0
5
10
15
20
25
30
Air volume [m3/min]
35
40
45
70
0
5
10
15
20
25
Air volume [m3/min]
30
35
40
0.6
0
5
10
15
20
25
Air volume [m3/min]
30
35
40
CLEANROOM
18
F F U
Stand-alone type WLFE
Thin type WLFF
Outline dimensional drawing
Outline dimensional drawing
1493
1445
300
18 nut sert (for filter connection)
300
300
300
300
614
300
1145
1193
FF
ie
i elldd
300
Rating plate
1224
Sub FFU motor cable 2
(L＝400)
Flange (1.6t)
1224
(30)
Sub FFU motor cable 1
(L=400)
Handl
220
220
(1)
1
18
Terminal block cover
Rating plate
150
FFU fixture
(To be provided by the contractor)
900
1460 (Filter size)
16.5
6
120
10
(10)
1220 (filter size)
(1.5)
(2)
1227
1423
1227
4
Performance curve
400
90％
300
80％
250
70％
200
150
100
50
43
37
0
5
10
15
47
20
25
Input power
35
40
50％
45
Current
0.7
0.5
15
20
25
30
Air volume [m3/min]
35
40
45
50
0.0
1100rpm
1200rpm
1000rpm
100
50
44
0
5
10
Input power
15
20
25
30
Air volume [m3/min]
5
10
15
20
25
30
Air volume [m3/min]
35
40
45
50
0
0
35
800rpm
40
45
Current
1.0
0.8
50
0
900rpm
59dB(A)
56 57
52 54
54
46
Current [A]
10
150
100
0.3
0.1
5
1300rpm
150
0.4
0.2
0
200
Input power [W]
100
1400rpm
200
0.6
150
250
1500rpm
250
0
50
0.8
Current [A]
Input power [W]
CLEANROOM
30
60％
55dB(A)
Air volume [m3/min]
50
19
54
51
200
0
Total static pressure
(Static pressure of the blower) [Pa]
Total static pressure
(Static pressure of the blower) [Pa]
100％
M4 nut sert
Air volume/Static pressure
300
350
0
250
Performance curve
Air volume/Static pressure
35
0.6
0.4
0.2
5
10
15
20
25
30
Air volume [m3/min]
35
40
45
0.0
0
5
10
15
20
25
30
Air volume [m3/min]
35
40
45
CLEANROOM
20
F F U
Controller specifications
RS485 communication type
Type
Applicable motor type
SDR3204-2R-TD
BDR170-T
GCG21155-TL8FE21
GCG2954-T8TD17B-c
Motor rated output
210 W / 1450 min
Number of motors connected
Tolerable motor wire length
Rated current
170 W / 1350 min
-1
1 - 4 units
1 unit
Max 12 m
-
3-phase 200 V (Nominal)
3-phase 200 V (Nominal)
0.9 A (per 1 motor)
0.87 A
Allowable overload current 110%-30s of the rated current
130%-30s of the rated current
3-phase 200 to 230 V, 50/60 Hz
Voltage/Frequency variation
Voltage: +/-10% Frequency: +/-5%
Rated input current
Within 3%
310 VA
500 to 1450 min -1
250 to 1350 min -1
+/-3% for the set value of the maximum speed
+/-4% for the set value of the maximum speed
About 15 kHz
About 16 kHz
Speed setting method
Upper side communication command or handy loader
Internal variable resister, external variable resister or the externally set voltage
Speed setting resolution
Upper side communication command: 1 min -1
Handy loader: 10 min -1
1/256 for the set value of the maximum speed
Controlling method
Sine wave PWM control, without the magnetic pole position
detection sensor, V/F speed constant control, individual
operation control for four units
Sine wave PWM control
Speed accuracy
Carrier frequency
Rotating direction
Only normal rotating direction
Instantaneous voltage
drop capacity
If the voltage drops from the continuous operation rated voltage state 165 V or more to less than 165 V,
the operation will continue for 15 ms. (Equivalent to 85% load)
The start from the stopping state shall be within 60s (when
Acceleration/Deceleration time actual units are combined), while the stop from the operating
state shall be free*run stop
Communication method
Synchronization scheme
Communication rate
EIA RS-485
-
2-wire half-duplex communication
-
Asynchronous communication
-
38,400 bps
-
Number of controllers to be connected Max. 31 units (Motor max. 124 units)
This can be used as the failure indication lamp by connecting
LED to the external I/O connector.
Status indication
-
C contact of the relay
Charge lamp (Power supply base board) Red: LED 1 (To be turned on when the DC intermediate voltage is about 50V or more) Red: LED5 (To be turned on when the DC intermediate voltage is about 50 V or more)
Communication response
Green: LED 1 (Receiving: On, No receiving signal: Off)
-
Green: LED 2 (Transmitting: On, No transmitting signal: Off)
-
Communication established Red: LED 3 (Normal: Off, Abnormal: On)
Processing inspection
Power supply
Operation
Failure reset switch
Protection
Orange: LED 9 (Normal: Off, Abnormal: Flashing )
Orange: LED 2 to 4 (Normal: Flashing, Abnormal: On )
Green: LED 8 (Auto mode: On, Manual mode: Flashing)
Red: LED 5 (Energized: On)
Green: LED 4 to 7 (Inverter outputting: On, Inverter stopping:
Off, Failure: Flashing)
SW2 Push switch
Overcurrent, Overvoltage, Low voltage, Controller overheating,
Overload, Power open phase, Motor step-out, Communication
failure, Memory failure, CPU failure
Overcurrent, Overvoltage, Low voltage, Controller overheating,
Overload, Hall effect sensor failure, Abnormal speed, Memory
failure, CPU failure
Built-in
RoHS
Support
THD: 35% or less (Power supply voltage 200 V, at the time of the rated output operation, Harmonic order within 40)
Controller efficiency
Controller calculation life
Inrush current
Weight
Green: LED 1 (Normal: On, Abnormal: Off)
SW1 Push switch
EMC filter
Relative harmonic content
-
95% (Power supply voltage 200 V, at the time of the rated output operation)
100,000 hours or more (at surrounding temperature 30oC)
10 years or more (at surrounding temperature 40oC)
6A0-peak or less
7A0-peak or less
About 2.1 kg
About 0.9 kg
Reliability
Control base board
Display/Operation
Communication request
Orange: LED 2 to 4 (Normal: Indicating the rotation speed,
Abnormal: indicating the abnormal contents)
Operation
Failure output (External I/O)
-
Voltage unbalance
Rated input current
Loss
1 unit
−
Single unit
operation
BFFU1000 (1C4M)
UGBTEF-12MKMK05A UGBTEF-12SKMK07 / GCG21155-TL8FE21
1 unit
Max 9 m
-
Max 12 m
500 W (250 W x 2 unit)
750 W
1000 W (250 W x 4 units)
1 - 4 units (Switchable)
3-phase 200 V (Nominal)
3.3 Arms
1.0 Arms x 4 units
150% of the rated current – 1 minute
3-phase 200/220 V, 50/60 Hz
Voltage: +/-10% Frequency: +/-5%
Within 2%
2.14 Arms or less
4.3 Arms or less
3.51 Arms or less
6% or less (When rated operation)
Rated speed (Revolution)
1100 min -1
Speed control range 500 ∼ 1100 min -1
Speed accuracy
Carrier frequency
Less than 165 V – within 15 msec (Operation continues at 165 V or more)
1450 min -1
1260 min -1
500 ∼ 1260 min
500 ∼ 1450 min
-1
Set speed (Revolution) +/-1%
1260 min -1
500 ∼ 1300 min -1
-1
Maximum revolution +/-1% or less
10 kHz
Upper side communications
command handy loader speed
Speed setting method adjustment volume*
High/Low speed switch *
Available (Speed detection
with the hall effect sensor)
BFFU1000 (4C4M)
4 units
4 units
synchronized operation individual operation
1 - 2 units (Switchable)
1.0 Arms x 2 unit
1.0 Arms
1.17 Arms or less
1.07 Arms or less
BFFU750 (1C1M)
2 units
synchronized operation
UGBTEF-12SKMK07 / GCG21155-TL8FE21
Instantaneous voltage
drop capacity
Speed setting resolution
Speed detection
Upper side
Display
communication
Communication
specifications
Electrical specifications
Set with parameters (Factory default: 20 seconds)
Voltage/Frequency
tolerable variation
BFFU500 (1C2M)
1
1.1 kVA
Required power capacity
Speed control range
Operation control
Operation control
0.9 A
Single unit
operation
Tolerable motor wire length
Rated electric power
250 W
Rated voltage
1.0 Arms
Rated current
Allowable overload current
Main power supply 1-phase 200/220 V, 50/60 Hz
Speed control
Speed control
3.1 A (Reference value)
Single unit
operation
FF
ie
i elldd
Unbalance between voltage phases Within 2%
Applicable motor type
BFFU250-1P (1C1M) BFFU250 (1C1M)
Number of electric motor connected
Rated input
Input
power supply
Main power supply
-1
Type
Rated
output
Output
rating
Rated voltage
Controller specifications
CAN communication type
Upper side communications command handy loader
Highest rotational speed: 1 min -1
Rotational speed control: 1%
Available (Speed detection with the sensor-less method)
3-phase 120 degrees
– Square wave
Controlling method energized
PWM control speed at a 3-phase 120 degrees energized – Square wave PWM control speed constant control Sensor-less method
Rotational direction
Stopping brake
constant ratl
Counterclockwise when viewed from the shaft end
Not available
Start-up characteristics
Acceleration: 60 sec. to the set value (from the stopping state)
(Acceleration and deceleration)
Communication standards
Communication method
Synchronization method
Communication rate
Power supply (energized)
Operation (Operation/Stop)
Failure (Error)
Deceleration: Free run
CAN ( ISO 11898) Ver. 2.0B Active
2-wire differential voltage method
Asynchronous
125 kbps
Available (LED: Yellow light)
Available (LED: Green light/Off)
Available (LED: Red light)
Direct operation
ON-OFF switch speed
control volume *
ON-OFF switch handy loader
Remote operation
Operation with the
communication between
upper side devices (CAN)
High/Low speed switch *
Operation with the communication between upper side devices (CAN)
Harmonic content
Leak current
Shaft voltage
Withstand voltage
35% or less
0.5 mA or less (For 1 unit of motor)
3.5 V peak or less (Expected value)
AC1800V for 1 second
Protection
Inrush current control function
Operation information memory function
RoHS
CE
Dimensions (W x D x H) mm
Weight
2.0 mA or less (For 4 units of motor)
3.5 V peak or less (Expected value)
AC1500V for 1 minute
Input: 2 kV Conforming with IEC 61000-4-5
Standard: EN 61000-6-2 Table-4, Between line and ground: 2 kV, Between line and line: 1 kV
Surge breakdown voltage
Insulation resistance
EMC
Life expectancy
5.0 V peak or less
(Expected value)
10 MΩ or more (DC500V megger)
Immunity: EN 61800-3: 2004 2nd
Env/Emission: EN 61800-3:2004 C3
100,000 hours or more (Electrolytic capacitor life @ 30oC)
Overcurrent, Overvoltage, Low-voltage, IGBT overheating, IGBT internal short-circuit, Overload, Power open phase, Motor cable
disconnection, Abnormal speed , Start-up failure, Motor ground, DSP failure, Set parameter failure
Time differential start by the base board ID
Power outage >> Automatic restoration to the operating state before the power outage
-
240 x 145 x 50
About 0.8 kg
Supported
Supported
240 x 145 x 63
About 0.8 kg
260 x 190 x 63
About 1.5 kg
240 x 145 x 50
About 1.9 kg
340 x 190 x 65
260 x 220 x 65
About 1.8 kg
* Separate module components are required
21
CLEANROOM
CLEANROOM
22
FFU for equipment
F i e l d 1 FFU for equipment
You can find the optimum answer with functions, features, and air volume.
Since the FFU for equipment is attached to the manufacturing equipment,
various functions are required as a part of the manufacturing equipment.
Our FFU for equipment is capable of materializing the customersʼ various requirements.
Select with functions/features
Series
Functions/Features
You can choose with air volume and air velocity
Thickness
Standards
WLFG
1φ200V・3φ200V
supporting immediate delivery*1
Filter selectable
RoHS
CE *3
115mm*2
P.25
0.9
F i e l d
Discontinued
0.8
F-Stage
0.7
RoHS (Optional)
CE (Optional)
150mm
P.27
F-Cube-N
Air velocity [m/s]
1φ100V
supporting immediate delivery*1
Communication function
WLFI
Hot environment (50℃)
Outgassing measure
1
WLFH
0.6
0.5
0.4
0.3
0.2
105mm
RoHS
P.29
0.1
Heat-resisting FFU
0
(Ultra thin type)
0
1.2
2.4
3.6
4.4
5.6
6.8
8.0
WLFJ
Heat-resisting FFU
Chemical FFU
10.4
11.6
12.8
14.0
15.2
16.4
17.6
18.8
20
21.2
Air volume [CMM]
Hot environment (50℃)
Outgassing measure
wind speed 0.65 m/s
190mm
RoHS
P.29
(High air velocity type)
WLFK
9.2
Outgassing measure
communication function
equipped with the
chemical filter
-
230mm
P.30
Heat-resisting (Ultra thin)
F-Stage
（HEPA t=50mm）
F-Cube-N
（ULPA）
Heat-resisting (High air velocity)
F-Stage
（HEPA t=40mm）
F-Cube-N
（HEPA）
Chemical
*1 Immediate delivery means about one week after receiving the order.
*2 When the filter of 40 mm is used
*3 F-Stage 61 and F-Stage 122 support 3φ200V only
Features of FFU for
manufacturing equipment
Feature
1
23
CLEANROOM
Thin type
The highest level of thinness in
the industry is materialized in
consideration of installation in a
limited space (Min 115 mm)
Feature
2
Feature
3
Energy-saving/air volume variable
As adopting DC brushless motor to all series, energy-saving
operation is possible at the optimum air volume with variable
speed of the motor. In comparison with the conventional FFU,
the power consumption has been reduced by about 30%.
(Compared with our conventional type product)
Conformance to RoHS, CE, SEMI
To export to overseas, the system conforms to various
standards. It is possible to issue the parameter sheet of the
export trade control order.
Feature
4
Feature
5
Outgassing measures
Outgassing is reduced by strictly selecting
constituent materials for the main unit,
the outlet, the filter and the sealing
materials.
Communication function
To maximize excellent controllability of
brushless DC motor, the air volume can
be controlled by varying the motor speed
through the communication function.
CLEANROOM
24
FFU for equipment
F-Stage
Specifications
Ultra thin FFU with 115 mm thickness
WLFG
F-Stage50
F-Stage61
F-Stage122
G01D□4□□□□0-0
G11D□5□□□□0-0
G21D□6□□□□0-0
G31D□1□□□□0-0
400
500
610
1220
400
500
610
610
F-Stage40
Name
Type (WLF-)
D
Dimensions [mm] W
Discontinued
*4
H
125 (115) * Main unit 75 mm + Filter thickness
Power supply
1Φ200V ／3Φ200V
Motor
DC brushless motor
*1
Air velocity [m/s]
6.3
（4.4）
3.8
（2.7）
0.5
（0.35）
0.5
（0.35）
52
（51）
51
（50）
38
（31）
44
（38）
8.5
9.6
Weight [kg]
Low noise
The thickness of 115 mm is materialized by
combining with the filter newly developed.
In comparison with the conventional
product, the noise has been reduced
by about 10 dB.
* When the HEPA filter (Thickness 40 mm) is used
77
（73）
65
（45）
16.5
11.6
Environmental regulations
Surprising thickness
54
（54）
53
（49）
1
*3
0.37
（0.3）
Volume knob (0 to 100%)
Speed controlling method
Power consumption [W]
15.1
（122）
0.5
（0.35）
ZAM／SUS430
Main unit materials
Noise [dB (A)] *2
9.4
（6.6）
FFie
i elldd
Air volume [m3/min]
RoHS supported
HEPA
（t=40mm／50mm）
99.99%
（0.3μm）
Filter
ULPA
（t=50mm）
99.999%
（0.1μm）
*1 This air volume value is an indication in case of the HEPA filter and the external static pressure of 0 Pa.
*4 For F-Stage 40, the control box shall be installed separately. (Attached cable length: 2 m)
*2 This noise value is a value in case of the HEPA filter and the external static pressure of 0 Pa at 1.5 m directly under the filter. ●Values in ( ) indicate the case of HEPA (t = 40 mm) .
*3 This power consumption value is in case of the HEPA filter, the external static pressure of 0 Pa and 3Φ200V power supply. ●If the general atmosphere is taken from the suction side, the filter of t = 50 mm of which retaining amount is large shall be selected.
(In comparison with our product of the biggest model)
In comparison with the conventional
products, the energy consumption has been
saved by about 34%
(In comparison with our product of the biggest model)
Response to regulations
RoHS command is supported as standard
CE marking is supported optionally.
Main unit size
G1 500×500×75
Power supply
G2 610×610×75
CE support
AC 200V
G3 1220×610×75
H51
H52
H61
H62
H11
H12
500×500
610×610
1220×610
Thickness ULPA
40
50
40
50
40
50
40
50
-
U42
U52
U62
U12
Size
-
400×400
500×500
610×610
1220×610
Thickness
-
50
50
50
50
*40 mm thickness is HEPA filter only
25
CLEANROOM
G21D□6□□□□1-0
G31D□1□□□□1-0
3Φ200V
CE marking
Supporting
W
4-φ7
x
35
50
35
H
（115） 75
（40）
■ Main unit (with the power supply, Abnormal signal output terminal block,
RUN/STOP switch, Speed adjustment volume)
■ Filter
■ 2 m connection cable between the main unit and the controller box
(F-Stage 40 only)
■Mounting bracket
■ Pre-filter
Y
50
D
W
X
Y
F-Stage40 F-Stage50 F-Stage61 F-Stage122
400
400
370
370
500
500
470
470
610
610
580
580
1220
610
580
1190
*For F-Stage 40, the control box shall be installed separately.
Differential pressure gauge set
DC brushless motor
Filter
H42
Type (WLF-)
Power supply
0 : Not available
1 : Available
Motor type
400×400
F-Stage122（CE）
Standard accessory
Product revision number
G0 400×400×75
Size
F-Stage61（CE）
25
WLF G2 1 D H61 1 0 0 0 - 0
H41
Name
Aperture dimensions
D
*1 Only F-Stage 61 and F-Stage 122 are supporting
*2 Other specifications are same as the above-mentioned standard product.
Type explanation example
HEPA
Outline dimensional drawing
CE support (Optional)
Energy saving
0 : Not available
1 : Available
Abnormality indication lamp
Optional
■ Differential pressure gauge ■ Tube (3 m)
■ Pitot tube
■ Abnormality indication lamp
(If the indication lamp is mounted, abnormal signals are not outputted.)
0 : Not available
1 : Available
Casing materials
1：ZAM
2：SUS430
■ 4 m extension cable between the main unit and the controller box (F-Stage 40 only)
*The cable length between the main unit and the controller box must be within 6 m in total.
■ CE marking support (F-Stage 61/F-Stage 122)
CLEANROOM
26
FFU for equipment
F-Cube-N
Compact FFU available with the ordinary
1Φ100V power outlet
Specifications
WLFH
Name
F-Cube-N-30U
F-Cube-N-40U
F-Cube-N-50U
Type
WLFH-30U□
WLFH-40U□
WLFH-50U□
Filter
500
610
610
610
610
W
300
400
500
610
1220
610
1220
H
Installation/
X
Aperture dimensions
[mm]
Y
270
370
470
580
580
580
580
270
370
470
580
1190
580
1190
150
1Φ100V 50/60 Hz/1 Φ200V (Optional) / DC24V (Optional)
Power supply
DC brushless motor 100 W
DC brushless motor 87 W
Motor
Air volume [m3/min]
2.2
4.1
6.6
10.1
16.6
10.1
16.6
Air verociy [m/s]
0.5
0.5
0.5
0.5
0.5
0.5
0.5
Power consumption [W]
24
37
63
87
103
68
76
Noise [dB (A) ]
50
55
55
58
59
51
57
13.5
20.5
Aluminum (Side panel) ‒ SUS (Inlet part)
5
Available (optional)
RoHS (optional) /CE (optional)
Environmental regulations/CE marking
F-Cube-N-30∼61
(Individual control, Group control, High-speed/low-speed switching, Collective fault output)
Power supply SW
Air volume adjustment knob
External signal terminals
Power socket
D
By combining the small FFU monitoring systems, the FFU air
volume becomes variable and the failure monitoring is available.
W
Captive mounting
(Floor-installation type or Hanging type)
* The communication function is not available in F-Cube-N-30 and 40.
In case of abnormal
×
In case of normal
○
Y
Y
X
7
Number of FMC100 to be connected: Max 100 units (1 port)
●Installation/Aperture dimensions
30
H
4- ×
Captive mounting
(Floor-installation type or Hanging type)
150 7.5
Power Off
H
30
Number of FMC200 to be connected: Max 254 units (4 ports)
X
W
30
Output
30
D
Power supply SW
Air volume adjustment knob
External signal terminals
Power socket
40
40
State
●Installation/Aperture dimensions
F-Cube-N-122
40
Failure signals can be outputted
by using the abnormal signal
output cable (optional).
150 7.5
Abnormal signal output
FFU monitoring system
FMC100/200
20.5
13.5
11.5
6.4
Not available
Communication functions
Outline dimensional drawing
Communication function
CAN
1
(It is optionally possible to install the adjustment dial externally.)
99.99% or more
（0.3μm）
99.999% or more
（0.1μm）
400
Weight [kg]
The air volume can be adjusted continuously with
the adjustment dial. The operating status can be
confirmed with the indication lamp.
WLFH-122H□
HEPA
300
Main unit materials
Air volume simple adjustment
(operatable with 1φ200V or DC24V at option.)
F-Cube-N-122H
WLFH-61H□
FF
ie
i elldd
Highly accurate clean environment
can be materialized with the builtin high-performance ULPA filter.
Since the protective screen is
attached to the surface, the filter
may not be damaged at the time of
installation.
The equipment can be operated
with the ordinary power outlet
(1φ100V) and any troublesome
power construction is not required. Operation is very simple
such that connecting to the ordinary outlet for power supply and
turning on the equipment only.
F-Cube-N-61H
D
Dimensions
[mm]
Filter built-in structure
WLFH-122U□
WLFH-61U□
ULPA
Dust collection efficiency
Power construction is not required
F-Cube-N-61U F-Cube-N-122U
4- 7
40
[○: Conductive. ×: Nonconductive]
Identification
30
40
50
61
122
-
300×300
P
400×400
D
500×500
610×1220
K
Symbol
U
H
A
Filter
ULPA (Standard)
HEPA
*1
*1 The HEPA specifications are supported in
Size 61 and 122 only.
27
CLEANROOM
■ Main unit
Symbol
Size
610×610
Standard accessory
WLF H 40 U D
Type explanation example
C
H
T
Optional
(Optional ID numbers are shown in the brackets.)
■ Pre-filter (P)
■ Abnormal signal output (A)
■ Differential pressure gauge +
Pitot tube (D)
■ Ceiling bracket (C)
■ FFU monitoring system FMC100/200 (T)
Optional *2
Not available
Pre-filter
Differential pressure tube + Pitot tube
Pitot tube only
Abnormal signal output
Ceiling bracket (4 pieces)
Horizontal bracket
■ Power supply cable
(2.0 m)
■ Fixing bracket
(4 pcs.)
■ Horizontal bracket (H)
■ Pitot tube (K)
FFU monitoring system *3
*2 Please list all optionals you need if any.
*3 F-Cube-N-30 and 40 do not have communication function.
CLEANROOM
28
FFU for equipment
Chemical FFU
Heat-resisting FFU
WLFI
WLFK
WLFJ
This can be used in hot environments (50℃)
Thin type considering storage in the device (Main unit: H = 230 mm + Chemical H = 150 mm)
Applicable standard RoHS/SEMI (Conformance)
Optimum to chemical contamination measures of manufacturing devices such as coaters and developers
Measures against outgassing
Measures against outgassing
With the variable air volume with the volume knob and the failure output relay
Variable air volume and failure monitoring with communication function are available
1
For the chemical filter removing
chemical contaminants, the waffle
cooker structure is employed for
easy and quick replacement.
Development of the thin type fan
materialized 230 mm height.
FFie
i elldd
Chemical filter
Thin type 230 mm
Waffle cooker structure
230mm
Ultra thin type
Measures against outgassing
High air velocity type (0.65 m/s)
This can be used in hot environments
Supporting RoHS/SEMI
(Conformance)
Design withstanding hot environments such as
a diffusion furnace (50℃)
Supporting RoHS standards in consideration
of the exports to the EU region
The manufacturing equipment also conforms
to SEMI of the standards for production devices.
Main unit materials: SUS 430BA
Filter: Boron-free filter (PTFE)
Sealing materials: Low siloxane type
Communication function
(Individual control, Group control, High-speed/low-speed switching, Collective fault output)
By combining the small FFU monitoring systems, the FFU air volume becomes
variable and the failure monitoring is available.
CAN
Ultra thin type
FFU monitoring system
FMC100/200
Ultra thin type of 105 to 120 mm is
materialized by adopting the high
static pressure fan.
Number of FMC200 to be connected: Max 254 units (4 ports)
Measures against outgassing
Main unit: Polyester resin coating
Outlet: SUS 304 BA (Punching board)
Filter: Boron-free filter (PTFE)
Sealing materials: Low siloxane type
Specifications
Item
Name
Type
Filter
Particle collection efficiency
FFU dimensions [mm]
Power supply
Air volume [m3/min]
External static pressure [Pa]
Noise [dB (A) ]
Main unit materials
Weight [kg]
29
CLEANROOM
Number of FMC100 to be connected: Max 100 units (1 port)
High air velocity type
The outlet air velocity of 0.65 m/s is materialized by using multiple units of the high static
pressure fan.
Description
Heat-resisting FFU (High air velocity type)
Heat-resisting FFU (Ultra thin type)
WLFJ
WLFI
ULPA filter Filter element: PTFE
ULPA filter Filter element: PTFE
99.9999% or more 0.1 μm
99.9999% or more 0.1 μm
1453W × 481D × 105H
1000W × 350D × 190H
(Fan part 160 mm)
1φ115V 50/60Hz
1φ115V 50/60Hz
6.0（0.32m/s）
11.3（0.65m/s)
0
0
70
73
Steel plate (Polyester resin coating)
Steel plate (Polyester resin coating)
38
24
Chemical FFU P-Q properties
200.00
180.00
160.00
Specifications
140.00
120.00
100.00
80.00
60.00
40.00
20.00
0.00
0.00
5.00
10.00
15.00
Air volume (CMM)
20.00
25.00
N=1420rpm N=1300rpm N=1200rpm N=1100rpm N=1000rpm N=900rpm
N=800rpm N=700rpm N=600rpm N=500rpm N= Chemical filter pressure loss
Item
Description
Name
Chemical FFU
Type
WLFK
Filter
ULPA filter Filter material: PTFE
Particle collection efficiency 99.9999% or more 0.1 μm
FFU dimensions [mm]
1050W × 750D × 230H
Power supply
3φ200V 50/60Hz
Air volume [m 3 /min]
16.0 (0.45m/s)
Total static pressure [Pa]
160
Maximum power consumption [W]
140
Noise [dB (A) ]
65±2
Main unit materials
SUS430BA
Weight [kg]
65
CLEANROOM
30
FFU monitoring system
FFU monitoring system
F-SITE series
You can choose any type of the monitoring system as you like,
covering from large-scale complex demands to small-scale specific demands.
F-SITE series
Select the FFU monitoring system from the series
Wide monitoring
system
Spot monitoring
system
(Large scale)
(Small scale)
Ｆ−Ｓ
ＩＴＥ−ＦＭＶ３００
Ｆ−Ｓ
ＩＴＥ−ＦＭＣ２００
Ｆ−Ｓ
ＩＴＥ−ＦＭＣ１００
Clean equipment integrated
monitoring system
FFU monitoring system
FANET
Small-scale
FFU display/operation unit
F-MONITOR
Small-scale
FFU monitoring system
ICIU
Small-scale
FFU monitoring system
S-ICIU
2
Ｆ−Ｓ
ＩＴＥ−ＦＭＣ５００
F i e l d
Ｆ−Ｓ
ＩＴＥ−ＦＭＲ５００
FFU monitoring PC with Windows 7
Monitoring of the environmental sensor
(F-PLANET)
Connection with the wind direction/
wind velocity sensor
Connection with the temperature/
humidity sensor
Connection with PLC
Supporting any I/F with various applications
P.37
31
CLEANROOM
FFU monitoring PC with Windows 7
Connection with PLC
P.39
Software-less FFU monitoring unit
standardizing our MONITOUCH
FFU monitoring system with
our unique CAN interface
FFU monitoring system with
our unique CAN interface
RS-485 communication port is
provided as standard
CAN communication port is
provided as standard
CAN communication port is
provided as standard
P.41
P.43
P.43
CLEANROOM
32
FFU monitoring system
F i e l d 2 FFU monitoring system
You can choose the optimum system by connection size and communication type.
This is an integrated monitoring system handling measurement values of various kinds of sensors
such as the operating status of an FFU, temperature, humidity, cleanliness, wind direction, and wind velocity.
Visualization of the cleanroom is materialized so that the optimum manufacturing environment can be
produced as saving energy.
P.37
(Large scale)
Custom
P.43
Spot monitoring
system
(Small scale)
Ｆ−Ｓ
Ｉ
ＴＥ−ＦＭＣ２００
Ｆ−Ｓ
Ｉ
ＴＥ−ＦＭＣ１００
Ｆ−Ｓ
Ｉ
ＴＥ−ＦＭＲ５００
Ｆ−Ｓ
Ｉ
ＴＥ−ＦＭＣ５００
Ｆ−Ｓ
Ｉ
ＴＥ−ＦＭＶ３００
P.41
P.37
P.39
60,000 units
370 units
FFU size (unit)
FMV300
Spot monitoring system
Up to 327 units
ＲＳ４８５
Wide monitoring system
FMR500 Up to 65,000 units Communication ＣＡＮ＆ＲＳ４８５
type
FMC500 Up to 65,000 units
ＣＡＮ
Maximum number
Communication
Up to 254 units
FMC 200
ＣＡＮ
of FFU to be
type
connected
Up to 100 units
FMC 100
ＣＡＮ
Concept
RS-485 communication and the direct connection without the CAN communication converter ・Large-scale system
Ｆ-SITE-FMC500
Ｆ-SITE-FMR500
Wide monitoring
system
Functions
Simple type
P.39
Widemonitoring
system
(Large scale)
You can choose by the connection size and the communication type
・Custom support
Environmental monitoring
sensing system
Max31
RS485
・Supporting
Ｆ−ＰＬＡＮＥＴ
・Supporting
・The respective types of sensors are
monitored through the browser.
Concept catalog
Cleanroom sensor
2
Ethernet
Concept catalog
Wind direction/velocity sensor
Concept catalog
temperature control
・Supporting F-SITE
F i e l d
Environmental monitoring system F-SITE
temperature control
・Supporting F-SITE
Ethernet
P.45
P.46
LSI
・RS-485 communication is
(Small scale)
LCI
converted to LAN.
・CAN communication is
31 x 4 x 2 system
converted to LAN.
RS485
ＰＬＣ
MICREX-SX
Spot monitoring
system
CAN
Information
acquisition unit
FFU
・Temperature control
・Energy-saving control
・Smoke exhasut control
P.11
FFU
Max. 254 units (4 ports)
31 x 4 x 3 system
RS485
Temperature controller
Ｆ-SITE-FMC100
Ｆ-SITE-FMC200
Ｆ-SITE-FMV300
P.41
CAN
Max. 100 units
(1 port)
P.43
P.43
CAN
・Transmission to other systems
For details, refer to Fuji integrated controller
series SPH 3000 catalog (LH992a)
http://www.fujielectric.co.jp/products/plc/lineup/sph/index.html
Concept catalog
P.11
Ethernet
33
CLEANROOM
RS485
CAN
CLEANROOM
34
FFU monitoring system
FFU monitoring system functions
Series
FFU monitoring system functions
Logging
Security
Others
Windows version
It is possible to support for the FFU temperature
controlling system for saving energy
If you want to provide integrated monitoring with
the control system PC for manufacturing equipment
If you want to connect to the
upper side system more easily
If you want to remember the FFU revolution and
use it arbitrarily after adjusting the revolution
Duplex
Multiple-motor
operation/Independent operation
Trend function
Connection of the
environmental sensor etc.
Transmission to
upper side systems
Storage
Password
Parallel system with 2 units
or more is configurable
Electric output such
as alarms
Log-on
Operating privileges
Operation history
Alarm history
XP/Windows7
Optional
XP/Windows7
F i e l d
Optional
2
Optional
Optional
Optional
4 units independent
Optional
Optional
Optional
4 units independent
Optional
Optional
Optional
Optional
Optional
4 units independent
Optional
Optional
Optional
Optional
Latest alarm indication
Fire control
Optional
Optional
Optional
Smoke exhaust control
Emergency stop
Control from PLC of
other facilities
Scheduled
operation/stop
Operation/stop control
by floor
Operation/stop control
by area
Operation/stop control
by group
Individual
operation/Stop control
Forced operation
System condition screen
Overcurrent
Overvoltage
Cooling heating value
Memory failure
CPU failure
Motor sensor disconnection
Revolution failure
Communication equipment
failure (G/W)
Model No.: BFFU250
* Others (Refer to FFU series
controller specifications)
Power supply voltage: 3φ 200 V to
230 V 50/60Hz
Power consumption: 200 W (Max)
Motor: GCG2954-T8FF
Controlling method: PWM control
Protection circuit
Control
PLC failure *1
Output short circuit
Motor step-out
Communication failure
Memory failure
CPU failure
Retry function
FFU failure
Overcurrent
Overvoltage
Low voltage
Controller overheat
Overload
Voltage open phase
Motor ground
Communication failure
Model No.: SDR-3204-2R-TD
Power supply voltage: 3φ 200 V
to 230 V 50/60 Hz
Motor rated output: 210 W/330 W
Applicable motor: GCG21155-TL8FE21
GCG21155-TL8FE33
Contolling method: Sine wave PWM control
Protection circuit:
FFU monitoring
Output short circuit
Motor step-out
Communication failure
Memory failure
CPU failure
Retry function
Controlling status
Overcurrent
Overvoltage
Low voltage
Controller overheat
Overload
Voltage open phase
Motor ground
Measurement value indication, FFU
base board current, Temperature
Model No.: SDR3204-2R-TD
Power supply voltage: 3φ 200 V
to 230 V 50/60 Hz
Motor rated output: 210 W/330 W
Applicable motor: GCG21155-TL8FE21
GCG21155-TL8FE33
Controlling method: Sine wave PWM control
Protection circuit
FFU monitoring system functions
Monitoring
Operation speed
DCBL motor controller
base board
specifications
Not possible
FFU 254 units
Not possible
FFU 100 units
CAN ~ S-ICIU
CAN
CAN
CAN protocol method (ISO11898)
Data frame 64-bit
Variable speed output:
255 steps
Communication rate:Between FFU
125 kbps
Transmission distance
300 m (RS-485)
Not possible
FFU 65,000 units
CAN ~ ICIU
CAN
CAN
CAN protocol method (ISO11898)
Data frame 64-bit
Variable speed output:
255 steps
Communication rate:Between FFU
125 kbps
Transmission distance
300 m (RS-485)
Not possible
FFU 372 units/F-MONITOR
LCI (LAN-CAN-Interface) to S.W.
HUB to Monitoring PC
CAN protocol method (ISO11898)
Data frame 64-bit
Variable speed output:
255 steps
Communication rate:Between FFU
125 kbps
Transmission distance
300 m (RS-485)
Possible
FFU 65,000 units
Electrical specifications:
EIA RS-485
Communication method:
2-wire half-duplex communication
Synchronization method:
Asynchronous communication
Communication rate:Between FFU
38400 bps
Transmission distance
300 m (RS-485)
AC FFU
Communication base board
Number of unit that
can be connected
Electric specifications:
EIA RS-485
Communication method:
2-wire half-duplex communication
Synchronization method:
Asynchronous communication
Communication rate:Between FFU
38400 bps
Transmission distance
300 m (RS-485)
RS-485 ~ F-MONITER
Spot monitoring system
CAN is converted to Ethernet
Spot monitoring system
FMC100
CAN
Wide monitoring system
FMC200
From LSI (LAN Serial Interface) to
the monitoring PC
RS-485
RS-485
FMC500
Equipment configurations
CAN
RS-485 is converted to Ethernet
Spot monitoring system
FMV300
RS-485
Wide monitoring system
FMR500
Form
Communication method
FFU monitoring system
Specifications
Model No.: BFFU250
* Refer to FFU series controller
specifications
Power supply voltage: 3φ 200 V to
230 V 50/60Hz
Power consumption: 200 W (Max)
Motor: GCG2954-T8FF
Controlling method: PWM control
Protection circuit
Overcurrent
Overvoltage
Cooling heating value
Memory failure
CPU failure
Motor sensor disconnection
Revolution failure
Model No.: BFFU250
* Refer to FFU series controller
specifications
Power supply voltage: 3φ 200 V to
230 V 50/60Hz
Power consumption: 200 W (Max)
Motor: GCG2954-T8FF
Controlling method: PWM control
Protection circuit
Overcurrent
Overvoltage
Cooling heating value
Memory failure
CPU failure
Motor sensor disconnection
Revolution failure
*1 If PLC is optionally connected
35
CLEANROOM
CLEANROOM
36
FFU monitoring system
Features of F-SITE-FMC500
Clean equipment integrated monitoring system
Materializing the visualization
Wide monitoring
system
This is an integrated monitoring system handling measurement values of various kinds of sensors such as the operating status of
an FFU, temperature, humidity, cleanliness, wind direction, and wind velocity.
Visualization of the cleanroom is materialized so that the optimum manufacturing environment can be produced as saving energy.
(Large scale)
Feature
1
Monitoring screen indicating various
parameters simultaneously
The energy can be saved as securing the optimum
cleanliness by controlling the revolution of DC-FFU.
System diagram
Floor monitoring
Feature
2
FFU floor drawing
Since the FFU arrangement is indicated on the
construction CAD drawing, it is possible to monitor
and operate at the indications of actual positions.
FFU list indication
Switchable by floor
Alarm history
Operation history
To the maintenance system screen
You can zoom in/out from the entire floor
display with the zoomed display.
You can operate the system as if operating
CAD such as vertical and horizontal scrolling.
System stop
User registration
Sound setting
Password revision
Feature
System configuration
Ｆ-SITE-FMR500
System diagram drawing
The revolution of the FFU is indicated with five colors, and FFU symbols, such
as failures, communication failures, are indicated with different colors.
Feature
This monitors communication status between PC and
FFU interface or PC and PLC, and total number of
operating FFUs.
4
Weekly schedule
LSI
The total number of FFUs, the total number
of operating FFUs, and the total number of
failures are indicated.
LCI
RS485
CAN
Operation patterns currently
applied to the group
The communication status of interfaces of DC-FFU, the
number of registered FFU, the number of operating FFU,
and the number of failures are indicated.
Manual control group
The communication status of the PLC for control, the
number of registered FFUs, the number operating FFUs, the
number of failures and contents of PLC failures are indicated.
Cleanroom temperature adjustment control
This is the system for executing remote
monitoring control of the temperature controller through the RS485 communication.
On the upper side computer, the temperature indicator controller network system is
constructed to
monitor and
configure various parameters
Feature
■
Four-unit
operating FFU
5
Alarm monitoring screen
Failure history of FFUs and communication units is
indicated. You can narrow down the relevant data with
the search function.
The control history of the selected
group (Latest 1000 items)
Feature
6
Temperature controller
The power for the temperature
controller is supplied separately.
Operation history management
Operation history of max. 3,000 items can be saved
automatically. The history can be searched with
conditions, so that maintenance management can be
executed easily.
Max. 30 units
AC100V∼240V
You can search the alarm history from max 10,000
items of data with conditions of FFU ID or Group etc.
Depending on the severity, alarms are classified into
Heavy failure , Medium failure , and Light failure .
The Serious failure is subject to FFU stop.
CLEANROOM
With the efficient operation of facilities (CR scheduled
operation), it is possible to reduce the power consumption to the adequate contracted power level.
You can register with drag
& drop operation.
Ethernet
37
Schedule function
2
3
For the FFU revolution operation, you can operate
individually, by group, by floor, for any area range.
To the operation
system screen
F i e l d
FFU monitoring
Monitoring the environmental sensor (F-PLANET)
Connection with the wind direction/velocity sensor
Connection with the temperature/humidity sensor
Connection with PLC
You can search the operation history from max
3,000 items of data with the search criteria of FFU
ID or Group etc.
The history can be recorded up to max. 3000 items.
If the number of record exceeds 3,000 items, the oldest are deleted.
CLEANROOM
38
FFU monitoring system
Features of F-SITE-FMC500
FFU monitoring system (FANET)
Flexible operability
Wide monitoring
system
With this application, you can easily design and revise the screen by yourself.
Any complicated knowledge about software and PLC is not required.
(Large scale)
Feature
1
FFU layout screen
The FFU layout drawing exactly the same as the actual
installation can be provided easily.
With this application, you can revise and add layouts
by yourself after completion of the layout drawing.
(Knowledge of software is not required.)
Feature
2
Floor monitoring screen
It is possible to monitor the respective floors of the
cleanrooms.
If there is any failed FFU, the symbol of the tree indication screen
of the applicable floor is displayed in red.
Feature
Simple operation
You can operate simply with icons.
2
3
F i e l d
FFU monitoring
Connection with PLC
System configuration
Ｆ-SITE-FMC500
Ethernet
■ Data of FFU (Operation/Stop, revolution set value) is stored on the hard disk.
LCI
LCI
CAN
CAN
LCI
CAN
■ To lock the start/stop and the revolution setting operation of the FFU.
If the operation is locked, release the lock. (A password must be entered.)
■ To operate the FFU
■ To stop the FFU
■ In the event of any abnormal conditions on the FFU, recover from the abnormality,
and then press the Reset button to make the device ready for operation again.
■ To read the FFU data in the hard disk
■ To Change the revolution of the FFU
■ To display the communication status of LCI (Lan Can Interface).
As the contents, the IP number, port, and connection status with PC are displayed.
One-unit
operating type FFU
39
CLEANROOM
Two-unit
operating type FFU
Four-unit
operating type FFU
■ To display the status of the FFU in the area selected with “FFU Parameters”
As the contents, the revolution, the control current value, and the status are displayed.
CLEANROOM
40
FFU monitoring system
Features of F-SITE-FMV300
FFU monitoring system
Excellent operability
Spot monitoring
system
Our POD MONITOUCH series are adopted and the monitoring/operation screen for FFU is mounted.
With the touch panel method, it has excellent operability and visibility, and is ready for immediate operation without software.
(Small scale)
Functions
Item
Abnormal status list
Operating revolution
list is displayed
Numerical values of the revolution of the individual FFU are displayed by system
Disconnected FFU is not displayed
Multi-step operation
revolution setting
F-MONITOR
FFU monitoring
System configuration
Outline dimensional drawing
F1
231
RS-485 direct
F3
F4
215.2
F2
MJ2
Entire system
The revolution of the five-step operation is set by entering a numerical value
With the set value initialization function
Entire control
Operation command Five-step operation
Specified revolution operation
Stop order
Reset command
System control
(by A/B/C systems)
Operation command Five-step operation
Specified revolution operation
Stop order
Reset command
Group control
(Main FFU /Sub FFU
1 group)
Revolution indication
Operating status indication
Operation command Five-step operation
Specified revolution operation
Stop order
Reset command
Individual control
Revolution indication
Operating status indication
Operation command Specified revolution operation
Stop order
MJ1
System
Individual
A System
（max.300m）
FFU A-01
FFU A-31
B System
（max.300m）
C System
FFU B-01
FFU B-31
FFU C-01
FFU C-31
（max.300m）
2
Ｆ-SITE-FMV300
CN1
FF
ie
i elldd
69
7
303.8
Contents
Status list of total number of FFU is displayed
Connection (normal): Indication in blue
Abnormal: Abnormal items are indicated in orange
You can move to the group directive screen by touching on the display
Disconnected FFU is not displayed
F5
F6
■
F7
31.47
RS485
RS485
Main screen :
To move to the respective operation screens
■
Status/setting screen :
To move to abnormality list
■
Abnormality list screen :
To comprehend abnormal status of the FFU
288
Four-unit
operating type FFU
■
System control screen :
To move to the respective systems (circuits)
■
Overall control screen :
To operate FFUs of all circuits collectively
■
Operating revolution list screen :
To comprehend revolution of the FFU
Specifications
Unit form
Item
Main unit to be used
Applicable FFU
Communication method
Communication cable length
System
Connection port shape
41
CLEANROOM
Contents
WLZCNS-SSS
Type: V810C
10.4-inch TFT color LC touch panel
Power supply AC 100 to 240 V 60 VA
DCBL-FFU made by Fuji Electric
Controller type: SDR3204-2R-TD
*Address setting is required previously.
Item
Number of units to be connected
to the respective systems
F1: Move to the main screen
F2: Move to the state selection screen
Global function switch
RS485
Max. 300 m /port
3 system
A-system connection port: MJ1 (RJ45)
B-system connection port: MJ2 (RJ45)
C-system connection port: CN1 (D-SUB 9-pin)
Contents
Each system Main FFU 31 units
(31 groups x 4 units = 124 units)
Max. 124 units x 3 systems = 372 units
■
System control screen :
To operate FFU of A-circuit collectively
■
Individual control screen :
FFUs connected to the respective circuits
■
Individual control screen :
To operate a single FFU
F3: Move to the overall control screen
F4: Move to the system control selection screen
F5: Move to the group control selection screen
F6: Move to the individual control selection screen
F7: Turn off the backlight
Buzzer
2 types (Intermittent single tone, Intermittent long tone)
Backlight
Automatic turn-off the light 180 sec.
CLEANROOM
42
FFU monitoring system
FFU monitoring system
Spot monitoring
system
(Small scale)
ICIU
You can control and monitor the FFU individually
or by group with simple operation without software.
Furthermore, this is an operating/monitoring unit
that can be connected easily through the CAN
direct communication.
Functions
Simple LCD
Various kinds of control information of the registered FFU are displayed in the LCD.
The FFU can be controlled by selecting the mode.
ICIU
Mode
STATE MONITOR
GROUP MONITOR
FFU monitoring system
FAULT MONITOR
FFU SETTING
GROUP SETTING
HIGH/LOW SWITCH SET
SUMMARY
Spot monitoring
system
(Small scale)
Contents
This is the function displaying status of the registered
FFU and controlling them individually.
This is the function displaying status of the respective
groups individually and controlling them by group.
This function displays the contents of the abnormal conditions in the FFU.
This is the function setting for enabling/disabling control of the FFU.
This is the function assigning the FFU by group.
This is the function setting values of high/low speed operation.
This is the function confirming the registered FFU.
S-ICIU
Mode
STATE MONITOR
GROUP MONITOR
FAULT MONITOR
FFU SETTING
GROUP SETTING
SUMMARY
Contents
This is the function displaying status of the registered
FFU and controlling them individually.
This is the function displaying status of the respective
groups individually and controlling them by group.
This function displays the contents of the abnormal conditions in the FFU.
This is the function setting for enabling/disabling control of the FFU.
This is the function assigning the FFU by group.
This is the function confirming the registered FFU.
S-ICIU
ICIU
Simple operation button
All operations on this unit (setting of FFU etc.) shall be made with the buttons.
Item
POWER
Conditions for turning on the LED
When any abnormal conditions generated on the
FFU connected to this unit or the registered FFU.
When this unit is energized
Outline dimensional drawing
ICIU
S-ICIU
140
320
4.05
33.80
110
XXXXXX
XXXX
Standard format
max. 300 m
10
300
20
250
φ
XXXXXX
Independent CAN
Interface Unit
OFF
SET / ESC
DC IN
POWER
FAULT
Page Change
ON
Next
RUN
Previous
STOP
140
XXX
146.60
XXX
1.75×7 15 62.50
170
XXXXXX
Remarks
*1: AWM2919 VW-1 80oC 30V 24AWG * 1PR SHIELDED LOW VOLTAGE COMPUTER CABLE: made by KDC (Korea)
CLEANROOM
FAULT
Button name
Contents
Page Change To move the screen
To select the function and finalize the respective set values
SET/ESC
To move to the next item on the menu screen, while counting up
Next
on the screen for setting values such as speed
To move to the previous item on the menu screen, while
Previous
counting down on the screen for setting values such as speed
To use for starting the FFU operation and others
RUN
STOP
To use for stopping the FFU operation and others
128
61.20
Contents
CAN (ISO 11898) Ver. 2.0B Active
125 kbps (High Speed)
CAN protocol
Dedicated connector
AWM2919 VW-1 5P * 24AWG (11/0.16TA) is recommended.*1
Item (main unit indication)
25
CAN communication port specifications
Abnormal LED to be identified at a glance
120
F-SITE-FMC200
F-SITE-FMC100
WLF-ICIU
WLF-S-ICIU
Type
AC80 ~ 250 V 50/60 Hz
DC 5V Adapter (AC100 ~ 240V 50/60Hz)
Rated input
5W
2W
Power consumption
Communication I/F Communication standard
CAN (ISO 11898) Ver. 2.0B Active
Communication rate
125kbps
Number of ports
4
1
Form of port
Dedicated connector
Number of FFU to be connected Max. 254 units (Number of FFU to be connected for a single ICIU) Max. 100 units (Number of FFU to be connected for a single ICIU)
Communication cable length
Max. 300 m/port
ICIU power supply (Energized)
Display
LED-Green
FFU abnormality detection
LED-Red
FFU status information
LCD-4Line. 20Character
Operation
Power switch (ON/OFF)
Various operation buttons
FFU collective control
Speed control
Possible
FFU individual control
Possible
Operating environment
Environment
Indoor (Without sunlight, heat sources such as radiators, and excessive vibration etc.)
Operating temperature range
0 ~ 40°C
Operating humidity range
90% RH or less (No condensation)
Fixing method
Others
Fixing of the main unit with the side brackets (Screw to be used: M3)
Dimensions
170 x 320 x 62 mm
147 x 140 x 34 mm
Weight
2.5 kg
1 kg
43
2
S-ICIU
Specifications
Item
Communication standards
Communication rate
Communication protocol
Connector
Connection cable
F i e l d
This is our lightest FFU operating/monitoring unit.
You can control and monitor individually or by group.
Furthermore, this is an operating/monitoring unit
that can be connected easily through the CAN direct
communication.
CLEANROOM
44
FFU monitoring system
LCI Lan Can Interface
LSI Lan Sereal Interface
LSI outlines
LCI outlines
LSI is connected to a PC for the upper side monitoring control through Ethernet, communicates with
the FFU controller in the cleanroom through RS-485, controls the speed of the FFU, and monitors the
operating status. This is required as the G/W for FMR500 (FFU monitoring system).
Quick cooperation between the control systems can be executed converting CAN
(Controller Area Network) supporting the automotive LAN to Ethernet.
This is required as the G/W of th FMR500/FMC500 (FFU monitoring system)
System configuration
FMR500
Four-unit
operation type
LCI
1 to 4 units
operation type
170
First circuit
CAN
RS485
FFU #2
FFU #1
Second circuit
Third circuit
180
FFU #2
TIA 568A category Five cables (Recommended)
With shield
RJ45 (shield)
TIA 568A category five cables
(Cable size: 24AWG 4P single-line Shield)
Specifications: Impedance 100 ohms
RJ45 (shield)
Item
Type
Operating temperature
Operating humidity
Storage temperature
Storage humidity
Dielectric strength voltage
Noise resistance (test conditions)
Vibration resistance (test conditions)
Shock resistance (test conditions)
Atmosphere
Cooling method
Installation location
RAM
Surrounding I/F
Operation Operation
indication Communication indication
Power supply voltage
Dimensions
Weight
45
CLEANROOM
Contents
LSI
0°C to 50°C (Main unit)
20 to 90% RH (Non condensing)
-20°C to 70°C
20 to 90% RH (Non condensing)
AC500 V，1 minute: Ethernet part
1500 V rising edge 1 ns, 5 minutes (noise simulator)
Conform to JIS C0040
Conform to JIS C0041
Without corrosive gas
Natural air cooling
Indoor
Flash memory 1 MB system/for application
RS-485, Ethernet
In operation/error indication
Link and transmission/reception
AC 100 ~ 230 V 50 ~ 60 Hz
180 x 170 x 36 [mm]
735 g
FFU
FFU
FFU
FFU
2
Connector specification
Specifications
FFU
FFU #31
* Terminal resistance: 100 ohms is incorporated at the LSI side. The connector with
terminal resister is connected to the final FFU.
Cable specifications
FFU
F i e l d
140
FFU #1
FFU
36
FFU #31
254 IDs in total
309
S.W.HUB
First circuit
FFU #1
Second circuit
171
30
45
Ethernet
62 IDs in total
Outline dimensional drawing
319
S.W.HUB
The equipment can be connected to 254 units in total
of the controller handling one to four circuits.
FMR500
FMC500
Outline dimensional drawing
LSI
Ethernet
System configuration
RS-485 is mounted to two ports at maximum. Each port can be connected to 31
units of the controller, and it can be connected to 62 units of the controller in total.
Since the controller can control four FFUs, it is possible to monitor and control a
maximum of 248 FFUs.
Fourth circuit
Specification of Pin
⑧：Blown ■ ⑦：White/Brown □/■
⑥：Orange ■
⑤：White/Blue □/■
④：Blue ■ ③：White/Orange □/■
②：Green ■ ①：White/Green □/■
1st Pair
2nd Pair
3rd Pair
4th Pair
:
:
:
:
④&⑤
③&⑥
①&②
⑦&⑧
Specifications of the RS-485 communication part
1st Pair
2nd Pair
3rd Pair
4th Pair
:
:
:
:
④&⑤
③&⑥
①&②
⑦&⑧
Item
Contents
Communication mode RS-485
Communication method Half duplex, asynchronous communication
Transfer rate
38,400 bps
Date bit: 8 bits
Character configuration Parity bit: Even
Stop bit: 1 bit
Flow control
Flow control: Not available
Live-line desorption
Impossible
Connector
Modular jack RJ-45 type 1 channel
Terminal No. Signal name Direction
Function
Not connected yet
1
N.C.
Not connected yet
2
N.C.
Not connected yet
3
N.C.
Input/output Transmission/reception data (-)
4
RSInput/output Transmission/reception data (+)
5
RS+
8
1
Not connected yet
6
N.C.
Not connected yet
7
N.C.
Not connected yet
8
N.C.
Terminal resistance
100 ohms resister is incorporated
FFU
Specifications
Specification of Pin
⑧：Blown ■ ⑦：White/Brown □/■
⑥：Orange ■
⑤：White/Blue □/■
④：Blue ■ ③：White/Orange □/■
②：Green ■ ①：White/Green □/■
FFU
Item
Type
Rated input
Consumption current
Communication I/F Communication standard
upper side
Communication rate
[Monitoring PC] Number of ports
Form of port
Number of units to be connected
Communication cable length
Communication I/F Communication standard
lower side
Communication rate
[FFU]
Number of ports
Form of port
Number of units to be connected
Communication cable length
Power supply (Energized)
Indication
LAN cable connection
Communication status indication
Operation
Operating environment
Environment
Operating temperature range
Operating humidity range
MAC address setting
Others
Fixing method
Dimensions
Weight
FFU
FFU #254
Cable specifications
Contents
LCI
1-phase 100/200 V 50/60 Hz
Max. 200 mA (when 220 V power supply is used)
10BASE-T / 100BASE-TX (Auto Detect)
10 Mbps / 100 Mbps
1
RJ-45
Max. 254 units (Number of LCI to be connected for a single unit of the monitoring PC)
Max. 100m
CAN (ISO 11898) Ver. 2.0B Active
125 kbps
4
Dedicated connector
Max. 254 units (Number of FFU to be connected for a single unit of LCI)
Max. 300 m/port
Available (LED)
Available (LED)
Available (LED)
Power supply switch (ON/OFF)
Indoor (Without sunlight, heat sources such as radiators, and excessive vibration etc.)
5°C to 40°C
85 %RH or less (No condensation)
Set by connecting the dedicated PC
Fixing of the main unit with the side brackets (Screw to be used: M4)
319 x 171x 45 [mm]
1.6 kg
Heat shrinkable tube
5051-04
5557-04R
0.3 sq 2 core shield RS485 * 1500 mm cabtyre (Gray)
5559-04P
Heat shrinkable tube
5051-03
0.3 sq 2 core shield RS485 * 1500 mm cabtyre (Gray)
Connector specification
Connector
Pin
5051-04
5159
5051-03
5159
1 2 3 4
1 2 3
Connector
layout
1
2
3
4
Blue White Shield Blue: Blue base,
White: White base
1
2
3
Blue White Shield
Blue: Blue base,
White: White base
5557-04R
5556
5559-04P
5558
4
3
2
1
3
2
3
1
4
Blue White Shield Blue: Blue base,
White: White base
1
1
4
2
3
2
4
Blue White Shield Blue: Blue base,
White: White base
* Made by Molex
CLEANROOM
46
Cleanroom materials
Cleanroom materials
Materials required for providing total solution of
the cleanroom are lined up.
Materials improving performance and maintenance efficiency of the cleanroom.
Field
Grid ceiling frame
P.51
Lighting panel / Blank panel
P.52
Bypass panel (Filter)
P.53
Free access floor
P.56
Power distribution equipment
P.56
F i e l d
3
Joinery (Door, Window)
Interior panel
Maintenance hatch
Maintenance passage
P.53
47
CLEANROOM
P.54
P.55
CLEANROOM
48
Cleanroom materials
F i e l d 3 Cleanroom materials
High performance equipment functioning in the cleanroom
more richly and safely is lined up.
With our abundant experience in system construction for large-scale factories,
we have commercialized various kinds of building materials under the keywords of outgas-less,
short construction period, and safety.
We can respond to your requirements with the total solution covering
from design to construction of the cleanroom using high performance equipment.
P.56
Power distribution equipment
FFU
P.11
It is possible to manufacture various
sizes of FFU in accordance with the
grid dimensions and the available
installation spaces.
Maintenance hatch
P.55
This is the ceiling access panel door to ensure airtightness.
P.51
Grid ceiling frame
This is a frame having both flexibility
and functionality in consideration of
the earthquake-resistant structure.
P.52
Lighting panel / Blank panel
Lighting integrated with ceiling panels.
Also, it is possible to access from the ceiling for maintenance.
Dry coil
Concept catalog
P.54
Interior panel
F i e l d
Low outgas materials are used for non-seal type
airtight materials in consideration of the outgas pollution.
3
Door / Window
This air volume adjustment panel is designed to
have sufficient strength for walking on the panel.
Maintenance passage
Free access floor
P.53
Bypass panel (Filter)
P.53
P.56
P.55
This panel is dedicated to passages
in consideration of safety.
This has excellent aperture ratio adjustment
performance and flexibility of layout, and it is
easy to make utility connections to devices
installed in the upper part.
49
CLEANROOM
CLEANROOM
50
Cleanroom materials
To prepare against any emergency cases with the frame of
which earthquake resistance is enhanced
Easy maintenance. Providing bright, wide and comfortable spaces
Grid ceiling frame
◆ Lighting time / luminance
Lighting panel/Blank panel
110
100
Luminance [%]
Lighting panel
Joint part summary
Main frame
Joint sleeve
Luminance [%]
105
95
90
85
80
75
* Test condition/current: 0.7 A
Surrounding temperature: 85℃
Semiconductor connection temperature: 125℃
70
65
60
Number of lamps [Unit]
100
90
80
70
60
50
40
30
20
10
0
100
Frame edge
Main frame surface joint
Joint sleeve
LED lamp fittings details
Specifications
Hanging bolt
Item
Main frame
Sub frame
Materials
Aluminum drawing material
Aluminum drawing material
Standard length
6000mm
0∼6000mm
Withstand load
90kg/㎡
90kg/㎡
10000
Lighting time [Hr]
100000
◆ Luminance / number of lamps
LED lighting panel
Sub frame
1000
Hf fluorescent lamp (65W)
LED（64W）
* Calculation conditions
W = 25 m D = 10 ｍ H = 5 m,
Reflectance Ceiling 50％ Wall 30％ Flor 10％, Calculation height H = 0 m
200
300
400
500
Luminance [lx]
600
700
800
Features
The ceiling can be constructed flatly. For the fluorescent lamp type, it is possible to replace the lamp from
the ceiling so that access for maintenance is easy.
The environmentally friendly LED type requires no maintenance and does not contain mercury.
System ceiling inside
It is possible to walk
on the panel.
Main frame
Sub frame
Cleanroom inside
It has excellent load bearing on the top of the lighting,
so that it is possible to walk on it.
Maintenance for the fluorescent lamp type can be executed
from the inside of the bench.
Outline dimensional drawing
Specifications
Light source/Lamp
LED
LED ×48
Total flux
4800 lm
7040 lm
Hf fluorescent lamp FHF32EX-N-H*2 units
（9900 lm）
Power
consumption
Power supply
64W
AC100∼240V
50/60Hz
65W
（88W）
AC100∼242V
50/60Hz
748.00±1
Type
* Figures in ( ) are for high-efficiency models.
1798.00±1
Blank panel
You can choose either steel or aluminum composite panel
according to the purpose of use.
Aluminum
(Surface resincoating)
Polyethylene core
Aluminum composite panel type
51
CLEANROOM
3
This is a frame having both flexibility and functionality in
consideration of the earthquake-resistant structure.
Bracket
M6 bolt
(Securing the room cleanliness.)
F i e l d
Features
Maintenance can be executed
from the top side.
Galvalume steel
Steel folding type
Specifications
Materials
Basic size
Withstand load
Workability
Composite panel
750×1500
Ordinary
Good
Steel
750×1500
Good
Ordinary
CLEANROOM
52
Cleanroom materials
Air volume of the aperture can be controlled, while the structure is strong and safe.
Thorough measures against outgassing. You can choose any one out of three types.
Bypass panel (Filter)
Interior panel
Features
特 長
Upper frame (Split type)
Non-seal specifications in consideration of the outgassing contamination
The low outgassing material is used for the airtight material.
Aluminum extrusion materials
6063-T5
Airtight seal
EPDM
Panel fitting material
Aluminum extrusion materials
6063-T5
Panel frame material
Air volume is secured while it is possible to walk on it.
Air volume can be adjusted by installing the filter.
Degrees of freedom for the bench layout can be expanded.
Airtight joint sealant
Removable joint sealant
TPO
Aluminum extrusion materials
6063-T5
Surface materials
Specifications
Features
As maintaining the required air volume, strength of the
panel is also secured so that you can walk on it safely.
Safety measures shall be provided at low costs.
Size
Various kinds
Materials
Core materials
Weight
ZAM
□750
Various kinds
9kg
* Size example
Pressure loss characteristics
Outline dimensional drawing
Pressure loss (Pa)
750
750
Lower frame
Aluminum extrusion materials
6063-T5
Specifications
Item
20
40
60
80
100
120
140
Air volume(CMM)
You can layout doors and windows as you like according to the aperture size and purpose of use.
Panel thickness
Panel width
Wall panel maximum length
Surface materials
Core materials
Jointing method
Furniture (Door, window)
Heat insulating performance (W/m2・K)
Noise barrier performance
Heat insulating
Non-combustible
900
-
-
40, 50
8400
Color steel sheet, Hot-dip galvanized steel sheet
Urethane foam
Fit angle
40, 50
4000
-
40, 50
80
-
4000
8000
-
Heat insulating urethane resin Metallic honeycomb
-
Fireproof
-
-
Rock wool
-
Ordinary
High
Ordinary
High
Ordinary
High
Ordinary
High
0.5
0.2
2.1
3
Breaking strength
Standard
F i e l d
* Size example
20
18
16
14
12
10
8
6
4
2
0
0.0
0.5
Features
Surface material specifications
For the door of the cleanroom, the single door, the family door,
and high airtight specifications are available.
Item
High corrosion-resistant galvanized steel sheet
Galvalume
Color steel sheet
Medium
Slightly high
High
Outline dimensional drawing
Valid H 4,200
Valid W 810
Valid H 2,060
Corrosion-resistance
Anti-fingerprint property
Medium
Price
Ordinary
Gassing
* Size example
CLEANROOM
Self-corrosion-resistant features
Chemical resistance
Valid W 3,510
53
Corrosion-resistance of the disconnected part
Medium
Non
Non
Medium
High
High
High
Medium
Slightly high
High
Non
Exist
We will provide the optimum size for your layout and purpose of use.
CLEANROOM
54
Cleanroom materials
Four types of the floor materials are provided so that you can choose one in accordance with
the purpose of use such as aperture ratio, layout, and withstanding load.
In the design stage, operability is considered. Easier maintenance has been materialized.
Maintenance hatch, Maintenance passage
Free access floor
Maintenance hatch
Features
特 長
The layout plan can be provided easily by
setting the appropriate size for the grid dimensions.
Features
This has a high degree of freedom for the aperture ratio adjustment and layout,
and it is easy to connect the device installed on it to the utility.
Outline dimensional drawing
600
Punching type
SUS type
Slit type
748
Specifications
600
1798
Ceiling maintenance hatch
Side maintenance hatch
Features
Punching type
Die-cast aluminum
□500∼□600
Medium
Bad
Light
16∼60%
Slit type
Die-cast aluminum
□500∼□600
High
Good
Medium
0%
SUS type
SUS304
□500∼□600
High
Bad
Heavy
50%
Slit type
Die-cast aluminum
□500∼□600
Low
Good
Light
17∼54%
Surface finishing materials
Ni-Cr coat
Epoxy coating
SUS plate
Ni-Cr coat
Epoxy coating
Non
Ni-Cr coat
Epoxy coating
Special specifications
Chemical resistance,
Whisker measures
Chemical resistance,
Whisker measures
-
Chemical resistance,
Whisker measures
F i e l d
Maintenance passage
Item
Materials
Size
Withstanding load
Workability
Weight
Aperture ratio
3
Instead of providing the maintenance passage separately with the cost,
you can execute maintenance more safely and easily by arranging the
blank panels for walking at the time of designing.
All power to be used in an area is supplied collectively with a single unit.
Outline dimensional drawing
Power distribution equipment
2890
785
785
535
785
Power distribution panel
1835
特 長
Features
Outline dimensional drawing
3670
This is the packaging power supply unit that is capable of
supplying the power in an area, such as the FFU, the lighting,
the flow control valve of the cooling coil, and the temperature
controller, with a single unit.
600
FFU
1835
Lighting
Power
board
55
CLEANROOM
Power
distribution
panel
Temperature
controller
Flow control
valve
Power distribution panel
1200
CLEANROOM
56
R e p l a c e m e n t
Do you have any problems with
energy-saving measures?
Another proposal / To save energy efficiently with replacement
It is possible to materialize energy savings by
replacing the high-efficiency equipment.
System flow for the pressure chamber
method system flow
System flow for the FFU method
System
revision
Example
You can save the energy of
annually by replacing 1,000 FFUs.
* Based on our estimation
OA
Filter
Device
Dry coil
Large blower
2,000 MWh equivalent to the cost saving
of 17 million yen
Equipment
replacement
OA
High efficiency FFU
Device
Dry coil
Re p l ac e m e nt
57
CLEANROOM
CLEANROOM
58
R e p l a c e m e n t
Another proposal
Replacement
Reason why the energy can be saved with the clean equipment
Three reasons why clean equipment is effective for saving energy
1 Ratio is high
If the power consumed in the
semiconductor/LCD panel plant
is classified by the purpose of
use, about 40% of them are
consumed in the air conditioning
facilities, and it is understandable
that implementation of clean
equipment must be very effective
for saving energy.
Pure water/Wastewater
4%
Lighting and so on
Reasons why the replacement is effective 1
Life of the equipment
A
The life of the clean equipment is about 10 years.
Configuration of FFU
4%
Various piping
12%
Production facility
Control base board
40%
Air conditioning facility
Fan
40%
Control base board
The control base board uses the aluminum electrolytic capacitor as the
smoothing filter. Generally, the life of the capacitor decides the life of the entire
base board. The life may vary with use conditions, for instance the higher
surrounding temperature, the shorter life. It is said that the estimated period for
replacement is five years.
2 The heat load is also reduced
It is possible to reduce the exhaust
heat by reviewing the cleanroom
method and using high efficiency
clean equipment. Then the heat load
in the entire factory can be reduced
and the power consumption of the
refrigerating machine can be
reduced.
* Reference
“Recommendation for periodic inspections for general-purpose inverter” The Japan Electrical Manufacturer’s Association
Comparison of the blower heat removing energy
by different cleanroom methods
Motor
[kW/m2]
Although the life of the motor may be determined with various elements, it
depends on the life of the bearing in most cases.
Although the life of the bearing can be expressed with the mechanical life and the
life of grease, we understand that the life of the motor is determined by the life of
the grease since the influences on the life of the grease are significant.
In general, the guaranteed life by the motor manufacturer shall be 20,000 hours.
0.12
0.1
0.08
0.06
0.04
0.089
0.02
0
0.021
FFU method
By replacing the FFU partially in several years, you can save the investment budget
required for a year and provide flexible energy-saving plans.
Since the temperature of the cleanroom is stable approximately at 23oC throughout the
year, and it is a good operational environment. The actual available period is longer than
the guaranteed life in the most cases. However, the life of electrical components is
generally two to five years, and it is ideal to replace the equipment at around ten years.
Reasons why the replacement is effective
2
Use of subsidies
A
CLEANROOM
Re p l ac e m e nt
Pressure chamber method
3 Investment can be divided
59
Motor
You can use the subsidies for replacing the clean equipment.
CLEANROOM
60
R e p l a c e m e n t
Fuji Electric can materialize more effective and smooth energy-saving 1
Cleanroom energy saving operation system
FFU efficiency comparison
Optimization of channel shape
Sirrocco fan
Low pressure inlet
By using the DC-FFU together with the FFU monitoring system (F-SITE series) developed by us,
operation/stop and revolution and alarm history of the FFU can be managed collectively at the
center, so that the cleanroom can be operated efficiently from the viewpoint of energy.
Graphical monitoring screen based on the architectural
drawings provided with AutoCAD
Operation/Stop/Failure/Speed are indicated in colors
High efficiency turbo fan
Induction motor
It is possible to operate, stop and control the revolution
from the FFU list collectively.
DC brushless motor
Total efficiency
Old type FFU
The latest type FFU
13 %
52%
Warning with alarm tone
Max. 10,000 items each of the operation history and the
alarm history can be stored.
FAN comparison
Vanes curved in various
rotational directions
Vanes curbed to backward for
the rotational direction
This can output larger
air volume among the
centrifugal blowers
It has excellent efficiency with
stable operation in a wide air
volume range
Relatively inexpensive
production cost
Sirrocco fan
△
Fan efficiency
Turbo fan
Efficiency has been improved
by adopting the airfoil section
◎
FFU monitoring system
(F-SITE series)
DC-FFU
DC-FFU
DC-FFU
DC-FFU
DC-FFU
DC-FFU
Furthermore, the feedback operation can be made in accordance with the
temperature, humidity and cleanliness by linking to our environmental sensor,
so that energy saving with optimum operation of FFU can be materialized.
Motor comparison
R ep l a c em e nt
Individual air volume control
DC-FFU
Induction motor
Loss comparison
Motor efficiency
61
CLEANROOM
The induced current flows in the rotor
due to the magnetic field. The resistive
losses may occur in the rotor at that time.
△
Feedback
DC brushless motor
(using the permanent magnet)
Since the permanent magnet is used in
the rotor, no copper loss may occur
due to induced current in the rotor.
◎
DC-FFU
FFU monitoring system
(F-SITE series)
Temperature/humidity
Cleanliness
Environmental information
Wind direction/wind velocity
Environmental sensor
CLEANROOM
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R e p l a c e m e n t
Fuji Electric can materialize more effective and smooth energy-saving 2
Flow of replacement
Energy saving effect example
Please leave everything such as the energy saving effect estimation, installation, adjustment
and test to Fuji Electric.
step
1
If you replace 1000 units of AC-FFU currently used with the
DC-FFU, the following amount of energy can be saved.
Site survey
In consideration of performance and efficiency, an AC-FFU with power consumption of 280 W
can be replaced with a DC-FFU with power consumption of 65 W.(* Our calculation)
Confirmation of the system configuration
Confirmation of the component equipment
Confirmation of utilities
(280 W – 65 W) x 24 hours x 365 days x 1,000 units
Design
System optimization design
Selection of equipment
Energy saving effect estimation
Provision of drawings
Annual saving of energy is about 1,900 MWh
step
2
Replacement example
In case of Company-A
step
3
Outlines
Installation on site
Intending the energy saving effect, FFU of the AC motor + Sirrocco fan type is replaced with
the DC motor + Turbo fan type
Number of units to be replaced: About 5,000 units
Equipment installation
Wiring
Operation confirmation
Commissioning test
Cleanliness test
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CLEANROOM
R ep l a c em e nt
Local adjustment
Energy saving effect
step
4
Planed value: 7,100 MWh (FFU saving energy amount)
Actual value: 7,150 MWh (FFU saving energy amount)
CLEANROOM
64
R e p l a c e m e n t
Fuji Electric can materialize more effective and smooth energy-saving 3
Fuji Electric’s cleanroom is always next to
the state-of-the-art technology
History of development of the cleanroom in Fuji Electric
Fuji Electric has always been the supplier of the most advanced cleanroom system for 40 years
and made uninterrupted efforts to innovate technology and safety.
1970s
1980s
Start development/manufacturing
of clean products
Fuji CR technical keyword
1500nm
Semiconductor process rule
1990s
2000s
System ceiling method CR
800nm
600nm
Non-seal method
interior panel
350nm
The 3rd generation
LC mother glass generation
Semiconductor factory CR system
Clean bench
Fuji CR actual results
Large air volume FFU
DC brushless FFU
AC type FFU
LCD factory CR system
Magnetic disk media
Cleanroom energy saving
factory CR system
promotion
Use of the airflow simulation
250nm
2010s
CR monitoring system
180nm
130nm
The 4th generation
90nm
The 6th generation
The 5
th generation
Chemical pollution measure CR system
Environmental monitoring system
Multiple operation FFU
65nm
45nm
The 7th and 8th generation
32nm
22nm
The 10th generation
Localized response system
PDP factory CR system
Organic EL factory clean system
CR system of carrier devices
Engineering tool
By using the full of unique engineering tools of Fuji Electric having abundant results and
experiences, we can solve any kinds of issues that the customers currently faced.
Cleanroom laboratory
65
CLEANROOM
Equipment to be evaluated
By using the wind tunnel test equipment
and the anechoic chamber, we can
execute various measurements and
evaluation such as properties, noises,
vibrations and radiated noise.
Analysis/evaluation technology
We can analyze and evaluate particles, airflow, temperature/humidity
and chemical gases in the customer’s
cleanroom, and then provide suggestions for improvement.
Airflow simulation
With the computer simulation, airflow
status in the equipment and the cleanroom, and the temperature distribution are estimated.
Particle behavior simulation
It makes possible to simulate particle behavior in dynamic state.
Behavior of dust at the time of equipment operation can be predicted,
and the results can be useful for equipment and system design.
R ep l a c e m en t
We have the cleanroom laboratory to
verify and evaluate the developed
products and verify the system design.
CLEANROOM
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