D6F-P MEMS Flow Sensor A Compact, High-accuracy Flow Sensor with Superior Resistance to Environments. • Anti-dust performance is improved using the Cyclon method. • A full lineup of models with different connector types: bamboo joints, lead terminals for direct mounting on-board, and manifolds. • High accuracy of ±5% FS. RoHS Compliant Refer to the Common Precautions for the D6F Series on page 40. Ordering Information MEMS Flow Sensor Flow Port Type Connection Applicable fluid Lead terminals Bamboo joint Model D6F-P0001A1 D6F-P0010A1 Air 0 to 1 L/min Connector Manifold Flow rate range 0 to 0.1 L/min D6F-P0010A2 D6F-P0010AM2 Accessory (Sold separately) Type Model Cable D6F-CABLE2 Output Voltage Characteristics D6F-P0010A1/-P0010A2/-P0010AM2 3.0 3.0 2.5 2.5 Output voltage (V) Output voltage (V) D6F-P0001A1 2.0 1.5 1.0 0.5 0.0 2.0 1.5 1.0 0.5 0.0 0 0.02 0.04 0.06 Flow rate (L/min) 0.08 0.10 0 0.25 1 Flow rate L/min (normal) 0 Output voltage 0.50 0.90 1.30 1.70 2.10 2.50 Output voltage 0.50 1.60 2.10 2.31 2.50 V ±0.10 ±0.10 ±0.10 ±0.10 ±0.10 ±0.10 V ±0.10 ±0.10 ±0.10 ±0.10 ±0.10 0.02 0.04 0.06 0.08 0.10 Measurement conditions: Power supply voltage of 5.0±0.1 VDC, ambient temperature of 25±5°C, and ambient humidity of 35% to 75%. Flow rate L/min (normal) 0.5 0.75 Flow rate (L/min) 0 0.25 0.50 0.75 1.00 Measurement conditions: Power supply voltage of 5.0±0.1 VDC, ambient temperature of 25±5°C, and ambient humidity of 35% to 75%. 25 D6F-P MEMS Flow Sensor Characteristics/Performance Model D6F-P0001A1 Flow Range (See note 1.) 0 to 0.1 L/min Calibration Gas (See note 2.) Air D6F-P0010A1 D6F-P0010A2 Bamboo joint Flow Port Type Maximum outside diameter: 4.9 mm, minimum outside diameter: 4.0 mm Electrical Connection Lead terminals Power Supply 4.75 to 5.25 VDC Current Consumption 15 mA max. with no load and a Vcc of 5.0 V 0.5 to 2.5 VDC (Load resistance: 10 kΩ) Accuracy ±5% FS (25°C characteristic) Repeatability (See note 3.) ±1.0% FS Output Voltage (Max.) 3.1 VDC (Load resistance: 10 kΩ) ±0.4% FS Output Voltage (Min.) 0 VDC (Load resistance: 10 kΩ) Rated Power Supply Voltage 10 VDC 4 VDC Case PBT Manifold Three-pin connector Output Voltage Rated Output Voltage D6F-P0010AM2 0 to 1 L/min Degree of Protection IEC IP40 (Excluding tubing sections.) Withstand Pressure (See note 3.) 50 kPa Pressure Drop (See note 3.) 0.005 kPa 0.19 kPa 0.67 kPa Operating Temperature (See note 4.) −10 to +60°C Operating Humidity (See note 4.) 35% to 85% Storage Temperature (See note 4.) −40 to +80°C Storage Humidity (See note 4.) 35% to 85% Temperature Characteristics ±5% FS for 25°C characteristic at an ambient temperature of -10 to +60°C Insulation Resistance Between Sensor outer cover and lead terminals: 20 MΩ min. (at 500 VDC) Dielectric Strength Between Sensor outer cover and lead terminals: 500 VAC, 50/60 Hz min. for 1 min (leakage current: 1 mA max.) Weight 8.5 g Note: 1. Note: 2. Note: 3. Note: 4. Volumetric flow rate at 0°C, 101.3 kPa. Dry gas. (must not contain large particles, e.g., dust, oil, or mist.) Reference (typical) With no condensation or icing. 8.0 g Tubing You can measure large flows by mounting the Sensor on a bypass. D6F-P Flow Sensor P1 P2 Resistance to flow Mounting Direction PCB-mounting Sensor 26 Manifold-type Sensor D6F-P MEMS Flow Sensor Connections/Dimensions (Unit: mm) ● Lead Terminals Label: Gives model and lot numbers. D6F-P0001A1/D6F-P0010A1 Two, 3-dia. through hole 10 23.3 Two, 4.9 dia. 2.6 dia. 11.7 7.2 Two, 1.1 dia. 4.76 Three, 1.3-dia. lands Label 2.54 MADE IN JAPAN D6F 27.2 7.3 13.5 Three, 0.8-dia. through holes 5.04 7.6±0.2 14 Recommended Dimensions for Connector Mounting Holes (Bottom view) 16.2 6 1.2 1.7 17.2 13.5 1.5 Two, R: 1.4 Connector XG8V-0344 (manufactured by OMRON) A 9.8 6 2.8 dia. 3. GND 7.2 2.54 13.2 1. Vcc 5.08 2. Vout Detailed View of A 4.76 ● Connectors D6F-P0010A2 Label: Gives model and lot numbers. 10 23.3 11.7 Two, 4.9 dia. 2.6 dia. MADE IN JAPAN D6F 27.2 A 7.3 Two, 1.1 dia. 1.Vcc 7.6±0.2 14 Label 2.Vout 16.2 8.5 6 3.GND 1.2 Detailed View of A 1.7 8.5 13.5 1.5 Two, R: 1.4 17.2 2.8 dia. 13.2 D6F-P0010AM2 1±0.1 dia., Depth: 2.4±0.1 Pin No. 1: Vcc 2: Vout 3: GND Connector SM03B-SRSS-TB (made by J.S.T. Mfg. Co.) 22 18 6.7±0.1 *1 8 2 0 Two, 4−0.05 dia. B 3.5 dia. 1+0.1 0 27.2 14±0.05 22.1 A Note: 1) Pressure welding connector Socket: 03SR-3S Wire: AWG#30 Or 2) Crimp type connector Contact: SSH-003T-P0.2 Housing: SHR-03V-S Wire: AWG#32 to #28 6.4 9.6 2-R6 Two, C0.3 (entire circumference) 6 3.GND 2.Vout 1.Vcc 2.7±0.1 0.3±0.1 0.3±0.1 Detailed View of A Detailed View of B Grooves to stop rotation Connector Details Lot number label *1. Recommended Installation Dimensions O-ring Installation Hole Dimensions Depth: 2.6 to 3.0 6.7±0.1 C0.4 (entire circumference) Two, 7 +0.5 dia. 0 M3 threaded 7 +0.5 0 14±0.05 ● Cable (Optional) D6F-CABLE2 The recommended O-ring is JIS B 2401, nominal number P4. Use one of the following connectors from JST Mfg. Co., Ltd. to connect to the D6F. Tubes Install tubes made of materials such as rubber or urethane so that they will not come out. For urethane tubes, tubes with an outer diameter of 6 mm and an inner diameter of 4 mm are recommended. Soldering Conditions Use a soldering iron for 5 s at 350°C with a pressure of 100 gf max. (This applies only to PCB-mounting Sensors.) White wire Black wire 3: GND Red wire 180±10 1: Vcc 2: Vout 15±3 (5) 27