D6F-P MEMS Flow Sensor A Compact, High-accuracy Flow Sensor with Superior Resistance to Environments. • Anti-dust performance is improved using the Cyclon method. • A full lineup of models with different connector types: barb joints, lead terminals for direct mounting on-board, and manifolds. • High accuracy of ±5% FS. RoHS Compliant Refer to the Safety Precautions on page 4. Ordering Information Model Applicable fluid (See note 1.) Flow rate range D6F-P0001A1 (Lead terminals) 0 to 0.1 L/min. D6F-P0010A1 (Lead terminals) 25 Air (See note 2.) D6F-P0010A2 (Connector) Minimum order 25 25 0 to 1 L/min. D6F-P0010AM2 (Connector manifold mount) 25 D6F-CABLE2 (Optional) (A2 and AM2) − − 25 D6F-P Note: 1. The Sensor be calibrated for different gas types. Consult your Omron representative. Note: 2. Dry gas must not contain large particles, e.g., dust, oil, or mist. Output Voltage Characteristics D6F-P0010A1/-P0010A2/-P0010AM2 3.0 3.0 2.5 2.5 Output voltage (V) Output voltage (V) D6F-P0001A1 2.0 1.5 1.0 0.5 0.0 2.0 1.5 1.0 0.5 0.0 0 0.02 0.04 0.06 Flow rate (L/min) 0.08 0.10 0 0.25 1 Flow rate L/min (normal) 0 Output voltage 0.50 0.90 1.30 1.70 2.10 2.50 Output voltage 0.50 1.60 2.10 2.31 2.50 V ±0.10 ±0.10 ±0.10 ±0.10 ±0.10 ±0.10 V ±0.10 ±0.10 ±0.10 ±0.10 ±0.10 0.02 0.04 0.06 0.08 0.10 Measurement conditions: Power supply voltage of 12 ±0.1 VDC, ambient temperature of 25±5°C, and ambient humidity of 35% to 75%. Flow rate L/min (normal) 0.5 0.75 Flow rate (L/min) 0 0.25 0.50 0.75 1.00 Measurement conditions: Power supply voltage of 1±0.1 VDC, ambient temperature of 25±5°C, and ambient humidity of 35% to 75%. 1 D6F-P MEMS Flow Sensor Characteristics/Performance Model D6F-0001A1 Flow Range (See note 1.) 0 to 0.1 L/min Calibration Gas (See note 2.) Air Flow Port Type D6F-P0010A1 D6F-P0010A2 Barb joint Manifold Maximum outside diameter: 4.9 mm Electrical Connection Lead terminals Power Supply 4.75 to 5.25 VDC Lead terminal Current Consumption 15 mA max. with no load and a Vcc of 5.0 V Output Voltage 0.5 to 2.5 VDC (Load resistance: 10 kΩ) Accuracy ±5% FS (25°C characteristic) Repeatability (See note 3.) ±1.0% FS Output Voltage (Max.) 3.1 VDC (Load resistance: 10 kΩ) Output Voltage (Min.) 0 VDC (Load resistance: 10 kΩ) Rated Power Supply Voltage 10 VDC Rated Output Voltage 4 VDC Case PBT Degree of Protection IEC IP40 Withstand Pressure 50 kPa D6F-P0010AM2 0 to 1 L/min Three-pin connector ±0.4% FS Pressure Drop (See note 3.) 0.005 kPa Operating Temperature −10 to 60°C (with no condensation or icing) 0.19 kPa Operating Humidity 35% to 85% (with no condensation or icing) Storage Temperature −40 to 80°C (with no condensation or icing) Storage Humidity 35% to 85% (with no condensation or icing) Temperature Characteristics ±5% FS for 25°C characteristic at an ambient temperature of -10 to 60°C 0.67 kPa Insulation Resistance Between Sensor outer cover and lead terminals: 20 MΩ min. (at 500 VDC) Dielectric Strength Between Sensor outer cover and lead terminals: 500 VAC, 50/60 Hz min. for 1 min (leakage current: 1 mA max.) Weight 8.5 g D6F-P Note: 1. A 0 to 1 L/min. (normal) volumetric flow rate at 0°C, 101.3 kPa. Note: 2. Dry gas. (must not contain large particles, e.g., dust, oil, or mist.) Note: 3. Reference (typical) 2 8.0 g D6F-P MEMS Flow Sensor Connections/Dimensions (Unit: mm) ■ PCB Terminals D6F-P0001A1/D6F-P0010A1 Label: Gives model and lot numbers. 23.3 10 11.7 MADE IN JAPAN D6F 27.2 7.3 2.6 dia. Two, 4.9 dia. Two, 1.1 dia. 14 7.6±0.2 Connector XG8V-0344 (manufactured by OMRON) Label 16.2 6 3. GND 2.54 1.7 6 Two, 3-dia. through hole 1.2 9.8 A 17.2 13.5 Two, R: 1.4 1. Vcc 5.08 2. Vout Detailed View of A 2.8 dia. 1.5 13.2 7.2 13.5 Three, 1.3-dia. lands 4.76 Three, 0.8-dia. through holes 2.54 5.04 Recommended Dimensions for Connector Mounting Holes 7.2 4.76 ■ Connectors D6F-P0010A2 23.3 10 7.3 11.7 2.6 dia. MADE IN JAPAN A 8.5 14 17.2 7.6±0.2 16.2 6 8.5 Label: Gives model and lot numbers. Label D6F 27.2 Two, 1.1 dia. Two, 4.9 dia. 1.2 1.7 Two, R: 1.4 13.5 1.5 1.Vcc 2.8 dia. 2.Vout 13.2 3.GND Detailed View of A D6F-P0010AM2 Use one of the following connectors from JST Mfg. Co., Ltd. to connect to the D6F. D6F-P Note: *1. Recommended Installation Dimensions 1) Pressure welding connector Socket: 03SR-3S Wire: AWG#30 or 6.7±0.1 Two, 7 +0.5 dia. 0 M3 threaded 14±0.05 2) Crimp type connector Contact: SSH-003T-P0.2 Wire: AWG#32 to #28 Housing: SHR-03V-S 22 18 6.7±0.1 *1 8 2 0 Two, 4 −0.05 dia. B 27.2 1+0.1 0 14±0.05 A D6F 22.1 MADE IN JAPAN 3.5 dia. 6.4 9.6 Two, 0.3 (entire circumference) 3. GND 2.7±0.1 2.Vout 0.3±0.1 1.Vcc 0.3±0.1 Lot number label Detailed View of A Detailed View of B Grooves to stop rotation Connector Details ■ Cable (Optional) D6F-CABLE2 White wire Black wire 3: GND 2: Vout 15±3 (5) Red wire 180±10 1: Vcc 3 D6F-P MEMS Flow Sensor Safety Precautions WARNING The D6F is built for use with general-purpose devices. In cases such as those described below, where safety is required, implement measures to ensure the safety of the system and all devices, such as fail-safe designs, redundancy designs, and regular maintenance. • Safety devices for ensuring safety for persons • Transportation equipment control (such as applications to stop operation) • Aviation and space equipment • Nuclear power equipment Do not use the D6F for applications in which D6F operation would directly affect human life. Caution Make sure that the power to all equipment is turned OFF before you install the Sensor. Installing the Sensor while the power supply is ON may result in electrical shock or abnormal operation. Precautions for Correct Use ● Fluids,Tubes, and Sensor Installation D6F-P All Models (1) Use clean fluids. Dust and mist can affect the characteristics of the Sensor or damage the Sensor. Install a filter and mist separator on the upstream tube. (Not required for the D6F-W@A1 or D6F-P.) (2) Do not use combustible gases (e.g., hydrogen), corrosive gases (e.g., chlorine, sulfur, acidic, or alkali gas), or other non-approved fluids. They may damage the Sensor. (3) The performance specifications that are given for the G6F do not apply if any fluids other than the specified applicable fluid are used. (4) Foreign matter in the tubes that are connected to the Sensor may damage the Sensor. Prevent any foreign matter from entering the tubes after the Sensor is removed from its packaging. (5) Attach the tubes so that fluid flows only in the direction designated by the arrows on the Sensor. Correct measurements cannot be obtained if the fluid flows in the wrong direction. (6) We recommend that you install the tubes horizontally. If the tubes are not installed horizontally, an error of ±1% FS or higher may result. (This does not apply to the D6F-03A3.) (7) Install the Sensor on a flat surface. Incorrect installation may damage the Sensor and make it impossible to obtain correct measurements. (8) After the Sensor is installed, check to confirm that it operates correctly. (9) Do not drop the Sensor, remove the cover, or attempt to disassemble the Sensor in any way. D6F-P0001A1, D6F-P0010A1, and D6F-P0010A2 (1) Depending on the ambient environment and installation location, dust, dirt, and other foreign matter may come in inside the Sensor and block a part or all of the flow path or accumulate on internal components. This may result in the Sensor not being able to perform to the specifications given above. Always perform a pre-evaluation on your actual equipment and be aware of the possible problems that may occur before you use the Sensor with the actual equipment. 4 (2) Attach all tubes so that the fluid flows only in the direction from the positive side (+) to the negative side (−). (3) For PCB-mounting, perform terminal soldering only after the Sensor is secured into place on the PCB. (4) Use M2.6 panhead screws or equivalent tapping screws to mount the Sensor, and tighten the screws to a maximum torque of 0.59 N·m. D6F-P0010AM2 (1) Depending on the ambient environment and installation location, dust, dirt, and other foreign matter may come in inside the Sensor and block a part or all of the flow path or accumulate on internal components. This may result in the Sensor not being able to perform to the specifications given above. Always perform a pre-evaluation on your actual equipment and be aware of the possible problems that may occur before you use the Sensor with the actual equipment. (2) Attach all tubes so that the fluid flows only in the direction from the positive side (+) to the negative side (−). (3) Use M3 panhead screws or equivalent tapping screws to mount the Sensor, and tighten the screws to a maximum torque of 0.59 N·m. (4) Install O-rings to seal the fluid inlet and outlet points. The recommended O-ring is JIS B 2401, nominal number P4. Installation Example M3 panhead screw or a tapping screw with the same diameter O-ring ● Operating Environment Do not use the Sensor in the following locations: • Locations directly subject to heat radiated from heating equipment • Locations subject to water or oil • Locations subject to direct sunlight • Locations subject to intense temperature changes • Locations subject to icing or condensation • Locations subject to excessive vibration or shock ● Countermeasures against Noise Noise may make it impossible to obtain correct measurements. Consider the following countermeasures. • Allow as much space as possible between the Sensor and devices that generates high frequencies (such as high-frequency welders and high-frequency sewing machines) or surges. • Attach surge absorbers or noise filters to noise-generating devices that are near the Sensor (in particular, equipment with inductance, such as motors, transformers, solenoids, and magnetic coils). (It also helps to separate pipes and ducts, and to use shielded cables.) ● Power Supply • Do not directly solder power supply leads to the connector terminals. Use only the appropriate connectors. • Wire with the correct terminal names and polarities. Incorrect wiring will cause failure of internal components. • When using a commercially available switching regulator, ground the FG (frame ground) and G (ground) terminals. D6F-P MEMS Flow Sensor RoHS Directive The RoHS mark is displayed on the packing of products for which the six substances banned by the RoHS Directive have been abolished (both in processing and in the electronic components mounted to the PCBs). * RoHS marking may be terminated if it is later determined that parts that were previously treated as RoHS compliant are not compliant due to circumstances at the supplier of the parts. ● RoHS Compliance Criteria The following standards are used to determine RoHS compliance for the six banned substances. (Items to which the RoHS Directive is not applicable are not given.) • Lead: 1,000 ppm max. • Hexavalent chromium: 1,000 ppm max. • Mercury: 1,000 ppm max. • PBB: 1,000 ppm max. • Cadmium: 100 ppm max. D6F-P • PBDE: 1,000 ppm max. 5 MEMS Flow Sensor D6F-P D6F-P • Application examples provided in this document are for reference only. In actual applications, confirm equipment functions and safety before using the product. • Consult your OMRON representative before using the product under conditions which are not described in the manual or applying the product to nuclear control systems, railroad systems, aviation systems, vehicles, combustion systems, medical equipment, amusement machines, safety equipment, and other systems or equipment that may have a serious influence on lives and property if used improperly. Make sure that the ratings and performance characteristics of the product provide a margin of safety for the system or equipment, and be sure to provide the system or equipment with double safety mechanisms. OMRON Corporation ELECTRONIC AND MECHANICAL COMPONENTS COMPANY 6 Contact: www.omron.com/ecb Cat. No. A183-E1-01 0812