Product family datasheet Microlithography lamps for ASML i-line systems __ June 24, 2016, 10:14:42 Microlithography lamps for ASML i-line systems © 2016, OSRAM GmbH. All rights reserved. Page 1 of 5 Product family datasheet Product line drawing Product line drawing Product line drawing Product line drawing Product line drawing Product line drawing __ Product line drawing June 24, 2016, 10:14:42 Microlithography lamps for ASML i-line systems © 2016, OSRAM GmbH. All rights reserved. Page 2 of 5 Product family datasheet Technical data Electrical data __ Dimensions & weight Lifespan Product description Nominal voltage Nominal current Type of current Diameter Length with base excl. base pins/connection Light center length (LCL) Electrode gap cold HBO 1003 W/PIL 27.1 V 25.8 A DC 29.0 mm 167.50 mm 85.0 mm 2) 3.0 mm 2250 h HBO 1500 W/PIL 23.0 V 65.0 A DC 46.0 mm 240.00 mm 118.0 mm 4.0 mm 1500 h HBO 2100 W/PIL 24.0 V 78.0 A HBO 2500 W/PIL 30.0 V 83.3 A DC 62.0 mm 312.50 mm 149.0 mm 7.0 mm 1500 h HBO 3500 W/PIL 23.0 V 148 A DC 77.0 mm 320.00 mm 154.0 mm 4.5 mm 3000 h HBO 5500 W/PIL 27.0 V 204 A DC 85.0 mm 355.00 mm 154.0 mm 5.5 mm 2250 h HBO 5510 W/PIH 1) 27.0 V 204 A 85.0 mm 850 h 11) HBO 5510 W/PIHL 1) 29.0 V 190 A 85.0 mm 1500 h HBO 3500 W/PI 23.0 V 148 A HBO 6500 W/PIH 1) 29.0 V 225 A 52.0 mm Base anode (standard designation) HBO 1003 W/PIL SFcX14-6/25 3) SFc30-6/25 7) HBO 2500 W/PIL SFa30-6/50 8) HBO 3500 W/PIL SFaX40-6/50 HBO 1500 W/PIL 240.0 mm 92.0 mm Base cathode (standard designation) 4) SFcX42.5-6/50 June 24, 2016, 10:14:42 Microlithography lamps for ASML i-line systems 1500 h 850 h 372.50 mm Cooling 174.0 mm 1000 h 2) Burning position 5) Vertical 6) Forced 5) Vertical 6) Vertical 6) SFc30-6.5/50 Forced 5) Vertical 9) SFc32.5-6.7/50 Forced 5) Vertical 9) Forced 5) Vertical 9) HBO 2100 W/PIL HBO 5500 W/PIL 2) Forced SFc27-10/35 10) 2) Lifespan Capabilities SFc15-6/25 8) 2) 77.0 mm DC Additional product data Product description 2) Mountin g length SFa37.5-9/50 © 2016, OSRAM GmbH. All rights reserved. Page 3 of 5 Product family datasheet Additional product data Product description Base anode (standard designation) Capabilities Base cathode (standard designation) Cooling Burning position HBO 5510 W/PIH 1) HBO 5510 W/PIHL 1) HBO 3500 W/PI HBO 6500 W/PIH 1) SFaX45-6/42 10) SFa45-11/70 Forced 5) Vertical 9) Vertical 9) Vertical 9) Vertical 9) 1) Lamp contains overpressure even in cold status - additional safety regulations, supplied with the lamps, have to be fulfilled. Please read Technical bulletin DO-SEM TB 004 carefully 2) Distance from end of base to tip of anode or cathode (cold) 3) With cooling fins 4) With thread (M6) 5) Maximum permissible base temperature: 200 °C 6) Anode underneath 7) Cooling fins and cable connection (M 8) __ 8) With cooling fins and cable connection (M 10) 9) Anode on top 10) With cable connection (M 10) 11) To be determined June 24, 2016, 10:14:42 Microlithography lamps for ASML i-line systems © 2016, OSRAM GmbH. All rights reserved. Page 4 of 5 Product family datasheet Safety advice Because of their high luminance, UV radiation and high internal pressure (when hot) HBO lamps may only be operated in enclosed lamp casings specially constructed for the purpose. Mercury is released if the lamp breaks. Special safety precautions must be taken. More information is available on request or can be found in the leaflet included with the lamp or in the operating instructions. Application advice For more detailed application information and graphics please see product datasheet. Disclaimer Subject to change without notice. Errors and omission excepted. Always make sure to use the most recent release. __ June 24, 2016, 10:14:42 Microlithography lamps for ASML i-line systems © 2016, OSRAM GmbH. All rights reserved. Page 5 of 5