Product family datasheet Microlithography lamps for Süss systems __ June 20, 2016, 06:27:10 Microlithography lamps for Süss systems © 2016, OSRAM GmbH. All rights reserved. Page 1 of 4 Product family datasheet Product line drawing Product line drawing Product line drawing __ June 20, 2016, 06:27:10 Microlithography lamps for Süss systems © 2016, OSRAM GmbH. All rights reserved. Page 2 of 4 Product family datasheet Technical data Electrical data Dimensions & weight Lifespan Additional product data Product description Nominal voltage Nominal current Type of current Diameter Length with base excl. base pins/connection Light center length (LCL) Electrode gap cold Lifespan Base anode (standard designation) HBO 350 W/S 68.0 V 5.15 A DC 20.0 mm 127.00 mm 52.5 mm 2) 3.0 mm 600 h SFcY10-4 37.7 V 26.5 A DC 40.0 mm 208.00 mm 89.5 mm 2) 3.0 mm 1500 h SFc15-6/25 50.0 V 100 A DC 80.0 mm 360.00 mm 143.5 mm 7.5 mm 2250 h SFa33.5-9.4/50 45.0 V 22.2 A HBO 1000 W/D HBO 5000 W/S 1) HBO 2) 3) 6) 8) 40.0 mm Capabilities __ Product description Base cathode (standard designation) HBO 350 W/S SFcY10-4 3) Burning position Convection 7) HBO 1000 W/D SFc15-6/25 HBO 5000 W/S 1) SFa33.5-7.85/50 HBO Cooling Convection Forced 9) 4) Vertical 5) Vertical 5) Vertical 10) Vertical 1) Lamp contains overpressure even in cold status - additional safety regulations, supplied with the lamps, have to be fulfilled. Please read Technical bulletin DO-SEM TB 004 carefully 2) Distance from end of base to tip of anode or cathode (cold) 3) With 8-32 UNC-3 B thread 4) Cooling fins on cathode base 5) Anode underneath 6) With thread (M 6) 7) With thread (M6) 8) With cable connection (M 10) 9) Maximum permissible base temperature: 200 °C 10) Anode on top June 20, 2016, 06:27:10 Microlithography lamps for Süss systems © 2016, OSRAM GmbH. All rights reserved. Page 3 of 4 Product family datasheet Application advice For more detailed application information and graphics please see product datasheet. Disclaimer Subject to change without notice. Errors and omission excepted. Always make sure to use the most recent release. __ June 20, 2016, 06:27:10 Microlithography lamps for Süss systems © 2016, OSRAM GmbH. All rights reserved. Page 4 of 4