Product family datasheet Microlithography lamps for Nikon i-line systems __ May 27, 2016, 08:09:02 Microlithography lamps for Nikon i-line systems © 2016, OSRAM GmbH. All rights reserved. Page 1 of 5 Product family datasheet Product line drawing Product line drawing Product line drawing Product line drawing Product line drawing Product line drawing Product line drawing Product line drawing Product line drawing __ May 27, 2016, 08:09:02 Microlithography lamps for Nikon i-line systems © 2016, OSRAM GmbH. All rights reserved. Page 2 of 5 Product family datasheet Technical data Electrical data __ Dimensions & weight Product description Nominal voltage Nominal current HBO 1002 W/NIL 1) 27.1 V HBO 2000 W/NIL Diameter Mountin g length 25.8 A 29.0 mm 168.0 mm 1500 h 26.0 V 67.0 A 55.0 mm 219.0 mm 1500 h HBO 2001 W/NIEL 26.0 V 67.0 A HBO 2001 W/NIL 2) 26.0 V 67.0 A HBO 2002 W/NIL 26.0 V 67.0 A HBO 2011 W/NIL 23.5 V 85.0 A HBO 2011 W/NILH 3) 24.0 V 0.083 A HBO 2501 W/NIL 23.0 V 109 A HBO 2510 W/NIL 23.0 V 109 A DC 70.0 mm 325.00 mm 157.75 mm 4.5 mm 2250 h HBO 3500 W/NIL 3) 27.0 V 130 A DC 82.0 mm 335.00 mm 180.0 mm 5.5 mm 2250 h HBO 1000 W/NEL 4) 47.0 V 16.0 A 28.0 mm 2500 h HBO 1002 W/NEL 4) 47.0 V 16.0 A 28.0 mm 2500 h 35.5 V 205 A HBO 7500 W/NILH 3) Type of current Lifespan DC Burning position HBO 1002 W/NIL 1) Vertical 5) HBO 2000 W/NIL Vertical 6) May 27, 2016, 08:09:02 Microlithography lamps for Nikon i-line systems 229.00 mm Light center length (LCL) 112.0 mm 7) Electrode gap cold 4.5 mm Lifespan 2500 h 52.0 mm 2200 h DC 999.0 mm 2250 h DC 55.0 mm 234.00 mm 107.75 mm 7) 4.5 mm 55.0 mm DC 110.0 mm 2250 h 1500 h 70.0 mm Capabilities Product description 55.0 mm Length with base excl. base pins/connection 1500 h 445.00 mm 7) 7) 205.0 mm 7) 7.5 mm 1500 h Additional product data Cooling Base anode (standard designation) Base cathode (standard designation) © 2016, OSRAM GmbH. All rights reserved. Page 3 of 5 Product family datasheet Capabilities Product description Burning position HBO 2001 W/NIEL Vertical 5) Vertical 5) HBO 2002 W/NIL Vertical 6) HBO 2011 W/NIL Vertical 6) HBO 2001 W/NIL 2) Base anode (standard designation) Base cathode (standard designation) SFc27-7/35 Forced 9) SFc27-10/35 Forced 9) SFc27-7/35 10) 8) SFc27-12x1.5/35 Vertical HBO 2501 W/NIL Vertical 5) HBO 2510 W/NIL Vertical 6) Forced 9) SFc33.5-12/50 10) SFc33.5-14/50 HBO 3500 W/NIL 3) Vertical 6) Forced 9) SFc33.5-16/50 11) SFa33.5-12/50 HBO 1000 W/NEL 4) Vertical 5) HBO 1002 W/NEL 4) Vertical 5) Vertical 6) Forced 9) SFaX46-15/72 10) SFaX85-16/70 HBO 7500 W/NILH __ Cooling 6) HBO 2011 W/NILH 3) Additional product data 3) 8) 1) Lamp suitable for pulsed operation between 700…1000 W 2) Also available as Super Longlife version with 2,250 h lifespan: HBO 2001 W/NIEL (4050300538211) 3) Lamp contains overpressure even in cold status - additional safety regulations, supplied with the lamps, have to be fulfilled. Please read Technical bulletin DO-SEM TB 004 carefully 4) Lamp suitable for pulsed operation between 700…1000 W/Maximum permissible power 750 W for constant power operation 5) Anode underneath 6) Anode on top 7) Distance from end of base to tip of anode or cathode (cold) 8) With cable connection (M8) 9) Maximum permissible base temperature: 200 °C 10) With cable connection (M 8) 11) With thread (M 16) May 27, 2016, 08:09:02 Microlithography lamps for Nikon i-line systems © 2016, OSRAM GmbH. All rights reserved. Page 4 of 5 Product family datasheet Safety advice Because of their high luminance, UV radiation and high internal pressure (when hot) HBO lamps may only be operated in enclosed lamp casings specially constructed for the purpose. Mercury is released if the lamp breaks. Special safety precautions must be taken. More information is available on request or can be found in the leaflet included with the lamp or in the operating instructions. Application advice For more detailed application information and graphics please see product datasheet. References / Links For further information on HBO lamps and notes for manufacturers of control gear, please refer to the following publications, available on request from OSRAM: “Specifications for power supply units for dc operated HBO mercury short-arc lamps” “Specifications for power supply units for ac operated HBO mercury short-arc lamps” “Specifications for igniters for HBO mercury short-arc lamps” “Availability of power supplies and igniters” “Mercury short arc lamps HBO for microlithography, Technology and Application” Disclaimer __ Subject to change without notice. Errors and omission excepted. Always make sure to use the most recent release. May 27, 2016, 08:09:02 Microlithography lamps for Nikon i-line systems © 2016, OSRAM GmbH. All rights reserved. Page 5 of 5