Power Device Catalog Vol.4 April 1st, 2016 No.58P6934E-A 04.2016 5000SG The Industry's First Mass-Produced SiC"Trench" MOSFET ROHM now offers SiC power devices featuring a number of characteristics, including: high breakdown voltage, low power consumption, and high-speed switching operation not provided by conventional silicon devices. ROHM, has quickly ramped up full-scale mass production of SiC products for variety of fields. ROHM expends SiC power devices as a pioneer in the development of SiC. Wafer Discrete "Full SiC" Power Modules 01 Power Device Power Device 02 The Industry's First Mass-Produced SiC"Trench" MOSFET ROHM now offers SiC power devices featuring a number of characteristics, including: high breakdown voltage, low power consumption, and high-speed switching operation not provided by conventional silicon devices. ROHM, has quickly ramped up full-scale mass production of SiC products for variety of fields. ROHM expends SiC power devices as a pioneer in the development of SiC. Wafer Discrete "Full SiC" Power Modules 01 Power Device Power Device 02 ■ Performance Comparison: SiC vs. Si Lower power loss and high temperature operation in a smaller form factor Breakdown Electric Field (MV/cm) Bandgap (eV) Si 0.3 / SiC Si 1.1 / SiC In the power device field for power conversion and High voltage Low ON-resistance High-speed switching control, SiC (Silicon Carbide) is garnering increased SiC - the next generation of compact, energy-saving Eco Devices material due to its superior characteristics compared The demand for power is increasing on a global scale every year while fossil fuels switching speeds, and higher temperature operation. 3.0 Thermal Conductivity (W/cm° C) 3.2 Si 1.5 / SiC High temperature operation (over 250°C) 4.9 High heat dissipation attention as a next-generation semiconductor ・Higher voltages & currents ・Low conduction loss ・Reduced switching loss with silicon, including lower ON-resistance, faster continue to be depleted and global warming is growing at an alarming rate. This ・Smaller cooling systems ・Higher power density ・System miniaturization requires better solutions and more effective use of power and resources. ROHM provides Eco Devices designed for lower power consumption and high efficiency Implementing SiC devices in a variety of fields, including the power, automotive, railway, industrial, and consumer sectors operation. These include highly integrated circuits utilizing sophisticated, low power ICs, passive components, opto electronics and modules that save energy and reduce CO² emissions. Included are next-generation SiC devices that promise even lower power consumption and higher efficiency. SiC devices allow for smaller products with lower ■ Power Loss Comparison Power Loss per Arm (W) 900 800 power consumption that make mounting possible even 700 in tight spaces. Additional advantages include high 600 voltage and high temperature operation, enabling 500 stable operation under harsh conditions-impossible 400 with silicon-based products. In hybrid vehicles and EVs 300 SiC power solutions contribute to increased fuel 200 economy and a larger cabin area, while in solar power generation applications they improve power loss by 100 Power loss reduced by 47%, Switching loss decreased by 85% Conduction Loss [w] Measurement Conditions Tj=125° C 600V 100A Turn off loss [w] Turn on loss [w] 0 Si (IGBT+FRD) SiC (MOSFET+SBD) approximately 50%, contributing to reduced global warming. SiC Wefer "Full SiC" Power Modules Discrete Power transmission systems Industrial equipment Reduces power lossand size Consumer electronics Energy-saving air conditioners and IC cooktops Reduce power loss Servers Reduce data center power consumption by minimizing sever power loss Railway Reduce inverter size and weight EV (i.e. hybrid/electric vehicles) Photovoltaics Increase power conditioner efficiency 03 Power Device Reduce cooling system size, decrease weight, and increase fuel economy Power Device 04 ■ Performance Comparison: SiC vs. Si Lower power loss and high temperature operation in a smaller form factor Breakdown Electric Field (MV/cm) Bandgap (eV) Si 0.3 / SiC Si 1.1 / SiC In the power device field for power conversion and High voltage Low ON-resistance High-speed switching control, SiC (Silicon Carbide) is garnering increased SiC - the next generation of compact, energy-saving Eco Devices material due to its superior characteristics compared The demand for power is increasing on a global scale every year while fossil fuels switching speeds, and higher temperature operation. 3.0 Thermal Conductivity (W/cm° C) 3.2 Si 1.5 / SiC High temperature operation (over 250°C) 4.9 High heat dissipation attention as a next-generation semiconductor ・Higher voltages & currents ・Low conduction loss ・Reduced switching loss with silicon, including lower ON-resistance, faster continue to be depleted and global warming is growing at an alarming rate. This ・Smaller cooling systems ・Higher power density ・System miniaturization requires better solutions and more effective use of power and resources. ROHM provides Eco Devices designed for lower power consumption and high efficiency Implementing SiC devices in a variety of fields, including the power, automotive, railway, industrial, and consumer sectors operation. These include highly integrated circuits utilizing sophisticated, low power ICs, passive components, opto electronics and modules that save energy and reduce CO² emissions. Included are next-generation SiC devices that promise even lower power consumption and higher efficiency. SiC devices allow for smaller products with lower ■ Power Loss Comparison Power Loss per Arm (W) 900 800 power consumption that make mounting possible even 700 in tight spaces. Additional advantages include high 600 voltage and high temperature operation, enabling 500 stable operation under harsh conditions-impossible 400 with silicon-based products. In hybrid vehicles and EVs 300 SiC power solutions contribute to increased fuel 200 economy and a larger cabin area, while in solar power generation applications they improve power loss by 100 Power loss reduced by 47%, Switching loss decreased by 85% Conduction Loss [w] Measurement Conditions Tj=125° C 600V 100A Turn off loss [w] Turn on loss [w] 0 Si (IGBT+FRD) SiC (MOSFET+SBD) approximately 50%, contributing to reduced global warming. SiC Wefer "Full SiC" Power Modules Discrete Power transmission systems Industrial equipment Reduces power lossand size Consumer electronics Energy-saving air conditioners and IC cooktops Reduce power loss Servers Reduce data center power consumption by minimizing sever power loss Railway Reduce inverter size and weight EV (i.e. hybrid/electric vehicles) Photovoltaics Increase power conditioner efficiency 03 Power Device Reduce cooling system size, decrease weight, and increase fuel economy Power Device 04 The industry's first mass-produced SiC makes the previously impossible "possible" SiC Power Device SiC MOSFET TO-247 Evolution to the next generation, 3rd-Generation SiC MOSFET High speed switching with low ON-resistance ROHM's 3rd-Generation SiC MOSFET realize the reduction of loss in several kind of application by SiC enables simultaneous high speed switching with low it's superior characteristics, lower on-resistans and high speed switching performance. ON-resistance - normally impossible with silicone-based products. Additional features include superior electric characteristics at high temperatures and significantly lower switching loss, allowing smaller peripheral [Planar Structure] [Trench Structure] (2nd-Generation) (3rd-Generation) Metal Metal components to be used. TO-220AB N+ P P+ N+ P+ Turn OFF Characteristics (Compared with 1200V-Class Products) 12 Switching loss reduced by 90% (Max.) 10 Si IGBT 5 0 -5 0 50 100 150 200 250 Time (nsec) 300 350 400 Source MOSFET 4 0 SiC MOSFET Performance Comparison: Planar vs. Trench Si Super Junction MOSFET 50 Drain Source MOSFET SBD 650V RDS (on) 120mΩ ■ Full SiC Power Module VDSS 1200V Comparison of the same-size chip SiC MOSFET 0 100 Temperature (°C) 150 200 Reduced by 50% ON Resistance ID 180A Planar MOSFET 80mΩ Reduced by 35% C type Good 0 1700V 80mΩ 160mΩ 280mΩ 450mΩ — — — — TO-220AB SCT2120AF TO-247 — TO-268-2L — — — — — TO-3PFM — — — — — SCH2080KE SCT2160KE SCT2280KE SCT2450KE SCT2080KE Low 750mΩ 1150mΩ — — — — ☆SCT2750NY ☆SCT2H12NY — BSM180D12P3C007 Input Capacitance Trench MOSFET 40mΩ 1200V RDS (on) 10mΩ Package 20 40 60 80 100 120 140 160 ■ Discrete Lineup (3rd-Generation) ON Resistance at 25°C (mΩ) VDSS Package Gate Gate 0.22 to 0.24 ohms even at 120°C 6 SCH Series Drain SiC sub Metal Si MOSFET ■ Lineup (2nd-Generation) ■ Internal Circuit Diagram SCT Series 450 SiC N- Drift layer SiC sub Metal 8 2 SiC MOSFET SiC N- Drift layer Input Capacitance (pF) ON-Resistance (Ω) Current (A) 10 Switching Performance Vdd=400V Rg=5.6Ω 15 P ON-Resistance Temperature Characteristics (Compared with 650V-Class Products) 25 20 Enables the development of devices featuring lower conduction loss and superior switching performance. Conduction Loss 2nd-Generation SiC Planar MOSFET VDSS Package 3rd-Generation SiC Trench MOSFET TO-247N 1200V 650V RDS (on) 30mΩ 22mΩ ☆SCT3030AL ☆SCT3022KL 30mΩ 40mΩ ☆SCT3030KL ☆SCT3040KL ☆Under development SCT2H12HZ ☆Under development 05 Power Device Power Device 06 The industry's first mass-produced SiC makes the previously impossible "possible" SiC Power Device SiC MOSFET TO-247 Evolution to the next generation, 3rd-Generation SiC MOSFET High speed switching with low ON-resistance ROHM's 3rd-Generation SiC MOSFET realize the reduction of loss in several kind of application by SiC enables simultaneous high speed switching with low it's superior characteristics, lower on-resistans and high speed switching performance. ON-resistance - normally impossible with silicone-based products. Additional features include superior electric characteristics at high temperatures and significantly lower switching loss, allowing smaller peripheral [Planar Structure] [Trench Structure] (2nd-Generation) (3rd-Generation) Metal Metal components to be used. TO-220AB N+ P P+ N+ P+ Turn OFF Characteristics (Compared with 1200V-Class Products) 12 Switching loss reduced by 90% (Max.) 10 Si IGBT 5 0 -5 0 50 100 150 200 250 Time (nsec) 300 350 400 Source MOSFET 4 0 SiC MOSFET Performance Comparison: Planar vs. Trench Si Super Junction MOSFET 50 Drain Source MOSFET SBD 650V RDS (on) 120mΩ ■ Full SiC Power Module VDSS 1200V Comparison of the same-size chip SiC MOSFET 0 100 Temperature (°C) 150 200 Reduced by 50% ON Resistance ID 180A Planar MOSFET 80mΩ Reduced by 35% C type Good 0 1700V 80mΩ 160mΩ 280mΩ 450mΩ — — — — TO-220AB SCT2120AF TO-247 — TO-268-2L — — — — — TO-3PFM — — — — — SCH2080KE SCT2160KE SCT2280KE SCT2450KE SCT2080KE Low 750mΩ 1150mΩ — — — — ☆SCT2750NY ☆SCT2H12NY — BSM180D12P3C007 Input Capacitance Trench MOSFET 40mΩ 1200V RDS (on) 10mΩ Package 20 40 60 80 100 120 140 160 ■ Discrete Lineup (3rd-Generation) ON Resistance at 25°C (mΩ) VDSS Package Gate Gate 0.22 to 0.24 ohms even at 120°C 6 SCH Series Drain SiC sub Metal Si MOSFET ■ Lineup (2nd-Generation) ■ Internal Circuit Diagram SCT Series 450 SiC N- Drift layer SiC sub Metal 8 2 SiC MOSFET SiC N- Drift layer Input Capacitance (pF) ON-Resistance (Ω) Current (A) 10 Switching Performance Vdd=400V Rg=5.6Ω 15 P ON-Resistance Temperature Characteristics (Compared with 650V-Class Products) 25 20 Enables the development of devices featuring lower conduction loss and superior switching performance. Conduction Loss 2nd-Generation SiC Planar MOSFET VDSS Package 3rd-Generation SiC Trench MOSFET TO-247N 1200V 650V RDS (on) 30mΩ 22mΩ ☆SCT3030AL ☆SCT3022KL 30mΩ 40mΩ ☆SCT3030KL ☆SCT3040KL ☆Under development SCT2H12HZ ☆Under development 05 Power Device Power Device 06 SiC SBD (Schottky Barrier Diodes) "Full SiC" Power Modules Switching loss reduced by 85% (Max.) Significantly lower switching loss TO-220AC SBDs were developed utilizing SiC, making them ideal for PFC circuits and inverters. ROHM has developed low-surge-noise power modules Ultra-small reverse recovery time (impossible to achieve with silicon FRDs) enables integrating SiC devices produced in-house, maximizing high-speed switching. This minimizes reverse recovery charge (Qrr), reducing high-speed performance. The result is significantly reduced TO-247 Dual-Chip switching loss considerably and contributes to end-product miniaturization. switching loss compared with conventional Si IGBTs. 12 10 8 6 4 2 0 -2 -4 -6 SiC SBD C type Features 1 High-speed switching Switching loss reduced by 60% 2 Low switching loss VR=400V di/dt=350A/μsec Si FRD ROHM offers automotive-grade (AEC-Q101 qualified) products. 3 Fast recovery LPTL 200 100 Time (nsec) ■ Example: Automotive Charging Circuit Secondary side rectification SiC SBD 1200V ■ Lineup Package VRM 650V 12A 15A IF 6A 8A 10A TO-220AC SCS206AG SCS208AG SCS210AG SCS212AG SCS215AG SCS220AG 30A — 40A — TO-220FM SCS206AM SCS208AM SCS210AM SCS212AM SCS215AM SCS220AM — — TO-247 — — — — SCS215AE LPTL SCS206AJ SCS208AJ SCS210AJ SCS212AJ SCS215AJ 20A 5A 10A SCS205KG SCS210KG 1200V 15A 20A SCS215KG — — — SCS220AE SCS230AE2 SCS240AE2 SCS220AE2 — SCS210KE2 — — — — — SCS220AJ Carrier Frequency = 20kHz SiC SBD 650V circuits in electric/hybrid vehicle. — 200 30A — 40A — — — — SCS220KE2 SCS230KE2 SCS240KE2 — Switching loss 100 Package TO-220AC TO-247 LPTL ☆Under development IF 6A 8A 10A 20A SCS206AGHR SCS208AGHR SCS210AGHR SCS212AGHR SCS215AGHR SCS220AGHR — — — — — 30A — 40A — 5A 10A SCS205KGHR SCS210KGHR SCS215KGHR SCS220KGHR SCS220AE2HR SCS230AE2HR SCS240AE2HR — SCS210KE2HR — — — — — SCS206AJHR SCS208AJHR SCS210AJHR SCS212AJHR SCS215AJHR SCS220AJHR — 30A — 40A — SCS220KE2HR ☆SCS230KE2HR ☆SCS240KE2HR — — SS1 S1D2 Conduction loss Thermistor for temperature monitoring (BSM300D12P2E001 only) G2 IGBT 1200V 100A SS2 Full SiC 1200V 100A SiC MOSFET S2 SiC SBD ■ Lineup — Automotive grade (AEC-Q101) 1200V 15A 20A G1 50 Parameter VRM 650V 12A 15A Compared to Si IGBT, Switching lossreduced by 80% 150 SiC SBD D1 SiC MOSFET 0 SCS220KG — ■ Internal Circuit Diagram (Half Bridge Circuit) Switching Loss Comparison PFC Boost Diode ROHM SiC SBD have been adopted in a variety of charging 07 Power Device E type TO-220FM Dissipation per Arm (W) Current (A) Switching Waveforms (600V10A) — Symbol Ratings ☆BSM080D12P2C008 BSM120D12P2C005 BSM300D12P2E001 BSM180D12P3C007 Unit Switching Device — 3rd-Generation SiC MOSFET — Drain-Source Voltage V DSS 1200 1200 1200 1200 V Drain Current *1 80 120 300 180 A Junction Temperature ID Tj -40 to +175 -40 to +150 -40 to +175 -40 to +175 °C R DS (on) typ. — 34 7.3 10 Package — E Type C Type mΩ — ☆Under development 2nd-Generation SiC MOSFET 20 C Type *1 Measurement of Tc is to be done at the point just under the chip. Tc=60°C Power Device 08 SiC SBD (Schottky Barrier Diodes) "Full SiC" Power Modules Switching loss reduced by 85% (Max.) Significantly lower switching loss TO-220AC SBDs were developed utilizing SiC, making them ideal for PFC circuits and inverters. ROHM has developed low-surge-noise power modules Ultra-small reverse recovery time (impossible to achieve with silicon FRDs) enables integrating SiC devices produced in-house, maximizing high-speed switching. This minimizes reverse recovery charge (Qrr), reducing high-speed performance. The result is significantly reduced TO-247 Dual-Chip switching loss considerably and contributes to end-product miniaturization. switching loss compared with conventional Si IGBTs. 12 10 8 6 4 2 0 -2 -4 -6 SiC SBD C type Features 1 High-speed switching Switching loss reduced by 60% 2 Low switching loss VR=400V di/dt=350A/μsec Si FRD ROHM offers automotive-grade (AEC-Q101 qualified) products. 3 Fast recovery LPTL 200 100 Time (nsec) ■ Example: Automotive Charging Circuit Secondary side rectification SiC SBD 1200V ■ Lineup Package VRM 650V 12A 15A IF 6A 8A 10A TO-220AC SCS206AG SCS208AG SCS210AG SCS212AG SCS215AG SCS220AG 30A — 40A — TO-220FM SCS206AM SCS208AM SCS210AM SCS212AM SCS215AM SCS220AM — — TO-247 — — — — SCS215AE LPTL SCS206AJ SCS208AJ SCS210AJ SCS212AJ SCS215AJ 20A 5A 10A SCS205KG SCS210KG 1200V 15A 20A SCS215KG — — — SCS220AE SCS230AE2 SCS240AE2 SCS220AE2 — SCS210KE2 — — — — — SCS220AJ Carrier Frequency = 20kHz SiC SBD 650V circuits in electric/hybrid vehicle. — 200 30A — 40A — — — — SCS220KE2 SCS230KE2 SCS240KE2 — Switching loss 100 Package TO-220AC TO-247 LPTL ☆Under development IF 6A 8A 10A 20A SCS206AGHR SCS208AGHR SCS210AGHR SCS212AGHR SCS215AGHR SCS220AGHR — — — — — 30A — 40A — 5A 10A SCS205KGHR SCS210KGHR SCS215KGHR SCS220KGHR SCS220AE2HR SCS230AE2HR SCS240AE2HR — SCS210KE2HR — — — — — SCS206AJHR SCS208AJHR SCS210AJHR SCS212AJHR SCS215AJHR SCS220AJHR — 30A — 40A — SCS220KE2HR ☆SCS230KE2HR ☆SCS240KE2HR — — SS1 S1D2 Conduction loss — Thermistor for temperature monitoring (BSM300D12P2E001 only) G2 IGBT 1200V 100A SS2 Full SiC 1200V 100A SiC MOSFET S2 SiC SBD ■ Lineup — Automotive grade (AEC-Q101) 1200V 15A 20A G1 50 Parameter VRM 650V 12A 15A Compared to Si IGBT, Switching lossreduced by 80% 150 SiC SBD D1 SiC MOSFET 0 SCS220KG — ■ Internal Circuit Diagram (Half Bridge Circuit) Switching Loss Comparison PFC Boost Diode ROHM SiC SBD have been adopted in a variety of charging 07 Power Device E type TO-220FM Dissipation per Arm (W) Current (A) Switching Waveforms (600V10A) Symbol Ratings ☆BSM080D12P2C008 BSM120D12P2C005 BSM300D12P2E001 BSM180D12P3C007 Unit Switching Device — 3rd-Generation SiC MOSFET — Drain-Source Voltage V DSS 1200 1200 1200 1200 V Drain Current *1 80 120 300 180 A Junction Temperature ID Tj -40 to +175 -40 to +150 -40 to +175 -40 to +175 °C R DS (on) typ. — 34 7.3 10 Package — E Type C Type mΩ — ☆Under development 2nd-Generation SiC MOSFET 20 C Type *1 Measurement of Tc is to be done at the point just under the chip. Tc=60°C Power Device 08 ROHM offers intelligent products ideal for motor control IPM (Intelligent Power Module) IGBT-IPM 600V/15A IPM with built-in PrestoMOSTM Motor control is integrated into a single package Contributes to higher efficiency in motor drive devices All components required for motor control, including the power device control IC and peripheral circuitry, High-efficiency IPM products utilizing ROHM’s PrestoMOSTM. are incorporated into a single package. ROHM utilizes Compared to IGBT IPM, loss during normal AC operation is an IGBT-optimized design customized for a range of reduced significantly. applications. HSDIP25 HSDIP25 HSDIP25-VC HSDIP25-VC VDS-ID Features Features Adopting an application-specific IGBT results in high-efficiency drive operation speed switching) featuring an IGBT-optimized design that supports a variety or requirements 2 An IGBT, FWD (Free Wheeling Diode), bootstrap diode, and gate driver are integrated into a single package 3 Multiple protection circuits (short-circuit current protection, power supply UVLO and thermal shutdown circuits) along with a FAULT signal output function that activates during protection operation Switching Loss Eoff (μJ) 1 The lineup consists of two series (low-speed/high- ★ Higher Efficiency VBV 3 ・Fast recovery diode VBW 4 HINU HINV HINW HVCC GND 5 6 7 8 9 LINU LINV LINW LVCC 10 11 12 13 FO 14 CIN 15 GND 16 24 P High Side Gate Driver (HVIC) 23 U 22 V 21 W Low Side Gate Driver (LVIC) 20 NU 19 NV 18 NW Protection Circuit UVLO : Under Voltage Lock Out SCP : Short Circuit Protection TSD : Thermal Shut Down 09 Power Device MOSTM, and gate driver 3 Multiple protection circuits (short-circuit current protection, power supply UVLO and thermal shutdown circuits) along with a FAULT signal output function that activates during protection operation ★ Power Loss Comparison with IGBT-IPM Reduced approx. 43% HVIC (High-side Gate Driver) ・Bootstrap diode current limiting function ・Floating power supply UVLO Inverter Part (IGBT and FWD) ・Low loss field stop trench IGBT ・Ultra-low VF fast recovery diode Condition Tj=25°C APF : Annual Performance Factor IPLV : Integrated Part Value Load SEER : Seasonal Energy Efficiency Ratio IGBT-IPM BM65364S-VA Reduced approx. Reduces loss during steady-state operation Improves AC energy-saving indexes (i.e. APF, IPLV and SEER). 76% 0 0.5 1 1.5 2 VDS (V) Gen.2:2nd Generation fc:Carrier Frequency (PWM frequency) Part No. BM63363S-VA / -VC Rating Application 600V / 10A Loss (w) Bootstrap Diodes ・UVLO, SCP, TSD ・Fault signal output Gen.2 IGBT-IPM for high speed switching drive (fc = to 20kHz) Priority to switching loss 2 Integrates a bootstrap diode, Presto ■ Lineup VBU 2 LVIC (Low-side Gate Driver) efficiency during steady state operation Gen.2 IGBT-IPM for low speed switching drive (fc = to 6kHz) Priority to conduction loss Saturation Voltage VCE (sat) (V) ■ Circuit Diagram 1 Using a MOSFET device helps improve I D (A) Features 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 600V / 15A BM63763S-VA / -VC 600V / 10A BM63764S-VA / -VC 600V / 15A ☆BM63767A-VA / -VC 600V / 30A ☆Under development IGB T-IPM High speed switching fc = to 20kHz Diode recovery loss Switching loss (OFF) Switching loss (ON) Diode conduction loss MOS_IGBT conduction loss Bootstrap Diodes ・Fast Recovery Diodes LVIC (Low-side Gate Driver) Condition Ta=25°C P=400V, Vcc=15V fc=5kHz, 2Arms cos φ=0.8 modulation ratio=1 3-phase modulation Low speed switching fc = to 6kHz BM63364S-VA / -VC ■ Circuit Diagram ・UVLO, SCP, TSD ・Fault signal output 24 P VBU 2 VBV 3 VBW 4 HINU HINV HINW HVCC GND 5 6 7 8 9 LINU LINV LINW LVCC 10 11 12 13 FO CIN GND TEST 14 15 16 17 High Side Gate Driver (HVIC) 23 U 22 V HVIC (High-side Gate Driver) ・Bootstrap diode current limiting function ・Floating power supply UVLO 21 W Inverter Part (PrestoMOS™) Low Side Gate Driver (LVIC) 20 NU 19 NV ・High-speed trr super junction MOSFET ・Ultra-low VF body diode 18 NW Protection Circuits UVLO : Under Voltage Lock Out SCP : Short Circuit Protection TSD : Thermal Shut Down BM65364S- VA ■ Lineup Part No. Power Device Rating Recommended switching frequency BM65364S-VA / -VC MOSFET 600V / 15A fc=to20kHz Power Device 10 ROHM offers intelligent products ideal for motor control IPM (Intelligent Power Module) IGBT-IPM 600V/15A IPM with built-in PrestoMOSTM Motor control is integrated into a single package Contributes to higher efficiency in motor drive devices All components required for motor control, including the power device control IC and peripheral circuitry, High-efficiency IPM products utilizing ROHM’s PrestoMOSTM. are incorporated into a single package. ROHM utilizes Compared to IGBT IPM, loss during normal AC operation is an IGBT-optimized design customized for a range of reduced significantly. applications. HSDIP25 HSDIP25 HSDIP25-VC HSDIP25-VC VDS-ID Features Features Adopting an application-specific IGBT results in high-efficiency drive operation speed switching) featuring an IGBT-optimized design that supports a variety or requirements 2 An IGBT, FWD (Free Wheeling Diode), bootstrap diode, and gate driver are integrated into a single package 3 Multiple protection circuits (short-circuit current protection, power supply UVLO and thermal shutdown circuits) along with a FAULT signal output function that activates during protection operation Switching Loss Eoff (μJ) 1 The lineup consists of two series (low-speed/high- ★ Higher Efficiency VBV 3 ・Fast recovery diode VBW 4 HINU HINV HINW HVCC GND 5 6 7 8 9 LINU LINV LINW LVCC 10 11 12 13 FO 14 CIN 15 GND 16 24 P High Side Gate Driver (HVIC) 23 U 22 V 21 W Low Side Gate Driver (LVIC) 20 NU 19 NV 18 NW Protection Circuit UVLO : Under Voltage Lock Out SCP : Short Circuit Protection TSD : Thermal Shut Down 09 Power Device MOSTM, and gate driver 3 Multiple protection circuits (short-circuit current protection, power supply UVLO and thermal shutdown circuits) along with a FAULT signal output function that activates during protection operation ★ Power Loss Comparison with IGBT-IPM Reduced approx. 43% HVIC (High-side Gate Driver) ・Bootstrap diode current limiting function ・Floating power supply UVLO Inverter Part (IGBT and FWD) ・Low loss field stop trench IGBT ・Ultra-low VF fast recovery diode Condition Tj=25°C APF : Annual Performance Factor IPLV : Integrated Part Value Load SEER : Seasonal Energy Efficiency Ratio IGBT-IPM BM65364S-VA Reduced approx. Reduces loss during steady-state operation Improves AC energy-saving indexes (i.e. APF, IPLV and SEER). 76% 0 0.5 1 1.5 2 VDS (V) Gen.2:2nd Generation fc:Carrier Frequency (PWM frequency) Part No. BM63363S-VA / -VC Rating Application 600V / 10A Loss (w) Bootstrap Diodes ・UVLO, SCP, TSD ・Fault signal output Gen.2 IGBT-IPM for high speed switching drive (fc = to 20kHz) Priority to switching loss 2 Integrates a bootstrap diode, Presto ■ Lineup VBU 2 LVIC (Low-side Gate Driver) efficiency during steady state operation Gen.2 IGBT-IPM for low speed switching drive (fc = to 6kHz) Priority to conduction loss Saturation Voltage VCE (sat) (V) ■ Circuit Diagram 1 Using a MOSFET device helps improve I D (A) Features 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 600V / 15A BM63763S-VA / -VC 600V / 10A BM63764S-VA / -VC 600V / 15A ☆BM63767A-VA / -VC 600V / 30A ☆Under development IGB T-IPM High speed switching fc = to 20kHz Diode recovery loss Switching loss (OFF) Switching loss (ON) Diode conduction loss MOS_IGBT conduction loss Bootstrap Diodes ・Fast Recovery Diodes LVIC (Low-side Gate Driver) Condition Ta=25°C P=400V, Vcc=15V fc=5kHz, 2Arms cos φ=0.8 modulation ratio=1 3-phase modulation Low speed switching fc = to 6kHz BM63364S-VA / -VC ■ Circuit Diagram ・UVLO, SCP, TSD ・Fault signal output 24 P VBU 2 VBV 3 VBW 4 HINU HINV HINW HVCC GND 5 6 7 8 9 LINU LINV LINW LVCC 10 11 12 13 FO CIN GND TEST 14 15 16 17 High Side Gate Driver (HVIC) 23 U 22 V HVIC (High-side Gate Driver) ・Bootstrap diode current limiting function ・Floating power supply UVLO 21 W Inverter Part (PrestoMOS™) Low Side Gate Driver (LVIC) 20 NU 19 NV ・High-speed trr super junction MOSFET ・Ultra-low VF body diode 18 NW Protection Circuits UVLO : Under Voltage Lock Out SCP : Short Circuit Protection TSD : Thermal Shut Down BM65364S- VA ■ Lineup Part No. Power Device Rating Recommended switching frequency BM65364S-VA / -VC MOSFET 600V / 15A fc=to20kHz Power Device 10 Supports SiC power semiconductors and contributes to increased adoption High Withstand Voltage IC Isolated Gate Driver AC/DC Converter High-speed operation supports SiC World’s first* AC/DC converter control ICs for SiC drive ・High-speed operation with a Max. I/O delay time of 150ns These ICs make it easy to configure an AC/DC converter ・Core-less transformer utilized for 2,500Vrms isolation with built-in SiC MOSFET that up to now has only been ・Original noise cancelling technology results in high CMR (Common Mode Rejection). possible using discrete configurations. ・Supporting high VGS/negative voltage power supplies* *BM6101FV-C, BM6104FV-C The increased proliferation of SiC power devices is expected ・Compact package (6.5×8.1×2.01 mm) to provide added value to the AC/DC converter market, which demands increased power savings and miniaturization. ■ Recommended Operating Range (BM6101FV-C) Symbol Min. Max. Unit VCC1 4.5 5.5 V Output Supply Voltage VCC2 14 24 V Output VEE Voltage VEE2 -12 0 V Operating Temperature Range Ta -40 125 SSOP-B20W °C ■ IPM Operating Waveforms (BM6101FV-C) IN g 5V 2μs/div. Stable operation ensured up to 800V/400A output d IN(10V/div.) s 18V and contributes to dramatically reduced power consumption allows for greater miniaturization 800V SiC MOSFET Gate Driver 1 Maximizes SiC MOSFET performance 2 Enabling SiC MOSFET drive <Conditions> ROHM SiC IPM VCC1=5.0 VCC2=18V VEE2=-5V VPN=800V Ta=25°C P 3 Multiple protection functions enable V SiC FET Drain(500V/div.) SiC SBD A Id(500A/div.) ■ Lineup Features Rated Output Negative Power Isolation Voltage Current (Peak) Supply Compatibility 2,500Vrms BM6102FV-C 3.0A 2,500Vrms BM6104FV-C 3.0A 2,500Vrms 11 Power Device Si MOSFET SiC MOSFET 6% Max. 80 Si MOSFET 75 *Assuming equivalent control IC performance (ROHM study) 0 10 20 30 40 50 Output Power [W] 60 70 80 ■ Lineup Suppry Voltage MOSFET Control Method Maximum Frequency (kHz) FBOLP BD7682FJ-LB 15.0 to 27.5 External QR 120 BD7683FJ-LB 15.0 to 27.5 External QR BD7684FJ-LB 15.0 to 27.5 External BD7685FJ-LB 15.0 to 27.5 External Part No. 3.0A SiC MOSFET It is possible to improve 6% of conversion efficiency by changing to SiC from Si 85 70 high voltage operation up to 690V AC N BM6101FV-C 90 SiC FET Gate(20V/div.) 5V Part No. AC/DC Converter Efficiency Comparison: Si vs SiC Features Power Conversion Efficiency [%] Parameter Input Supply Voltage SOP-J8 * January 2016 ROHM study I/O Delay Time 350ns — Over current Detection DESAT Mirror Clamp Function Soft Turn OFF Function Error Status Output VCC OVP Package Self-restart Latch SOP-J8S 120 Latch Latch SOP-J8S QR 120 Self-restart Self-restart SOP-J8S QR 120 Latch Self-restart SOP-J8S Brown Out 200ns 150ns Power Device 12 Supports SiC power semiconductors and contributes to increased adoption High Withstand Voltage IC Isolated Gate Driver AC/DC Converter High-speed operation supports SiC World’s first* AC/DC converter control ICs for SiC drive ・High-speed operation with a Max. I/O delay time of 150ns These ICs make it easy to configure an AC/DC converter ・Core-less transformer utilized for 2,500Vrms isolation with built-in SiC MOSFET that up to now has only been ・Original noise cancelling technology results in high CMR (Common Mode Rejection). possible using discrete configurations. ・Supporting high VGS/negative voltage power supplies* *BM6101FV-C, BM6104FV-C The increased proliferation of SiC power devices is expected ・Compact package (6.5×8.1×2.01 mm) to provide added value to the AC/DC converter market, which demands increased power savings and miniaturization. ■ Recommended Operating Range (BM6101FV-C) Symbol Min. Max. Unit VCC1 4.5 5.5 V Output Supply Voltage VCC2 14 24 V Output VEE Voltage VEE2 -12 0 V Operating Temperature Range Ta -40 125 SSOP-B20W °C ■ IPM Operating Waveforms (BM6101FV-C) IN g 5V 2μs/div. Stable operation ensured up to 800V/400A output d IN(10V/div.) s 18V and contributes to dramatically reduced power consumption allows for greater miniaturization 800V SiC MOSFET Gate Driver 1 Maximizes SiC MOSFET performance 2 Enabling SiC MOSFET drive <Conditions> ROHM SiC IPM VCC1=5.0 VCC2=18V VEE2=-5V VPN=800V Ta=25°C P 3 Multiple protection functions enable V SiC FET Drain(500V/div.) SiC SBD A Id(500A/div.) ■ Lineup Features Rated Output Negative Power Isolation Voltage Current (Peak) Supply Compatibility 2,500Vrms BM6102FV-C 3.0A 2,500Vrms BM6104FV-C 3.0A 2,500Vrms 11 Power Device Si MOSFET SiC MOSFET 6% Max. 80 Si MOSFET 75 *Assuming equivalent control IC performance (ROHM study) 0 10 20 30 40 50 Output Power [W] 60 70 80 ■ Lineup Suppry Voltage MOSFET Control Method Maximum Frequency (kHz) FBOLP BD7682FJ-LB 15.0 to 27.5 External QR 120 BD7683FJ-LB 15.0 to 27.5 External QR BD7684FJ-LB 15.0 to 27.5 External BD7685FJ-LB 15.0 to 27.5 External Part No. 3.0A SiC MOSFET It is possible to improve 6% of conversion efficiency by changing to SiC from Si 85 70 high voltage operation up to 690V AC N BM6101FV-C 90 SiC FET Gate(20V/div.) 5V Part No. AC/DC Converter Efficiency Comparison: Si vs SiC Features Power Conversion Efficiency [%] Parameter Input Supply Voltage SOP-J8 * January 2016 ROHM study I/O Delay Time 350ns — Over current Detection DESAT Mirror Clamp Function Soft Turn OFF Function Error Status Output VCC OVP Package Self-restart Latch SOP-J8S 120 Latch Latch SOP-J8S QR 120 Self-restart Self-restart SOP-J8S QR 120 Latch Self-restart SOP-J8S Brown Out 200ns 150ns Power Device 12 Supports high withstand voltage, high surge circuits High withstand voltage discretes Super Junction MOSFET Fast Recovery Diodes Achieves low noise with low ON resistance Provides optimized characteristics for each application ・Ideal for PFC (Power Factor Correction) ・Improved characteristics ・Industry-leading A・Ron TO-220FM High efficiency / low VF ・Extremely low noise reduces noise countermeasures and makes it easy to replace planar type products SOT-428 (DPAK) TO-252 (DPAK) LPTS (D2-PAK) Low radiation noise 100 Achieves significantly lower noise compared with conventional models Radiated Emission Comparison(H)(dBμV) 80 60.0 [%] 60 80% 50.0 DOWN 100 1st-Generation AN Series 2nd-Generation EN Series RFV Series 0 35 Conventional Products (Planar Type) 1st-Generation 2nd-Generation AN Series EN Series 10.0 10 100 MHz 1,000 ■ Lineup Qg (nC) Package Part No. BVDSS (V) ID (A) RDS(on) (Ω) EN Series KN Series R6002ENx/☆R6002KNx 600 1.7 2.8 6.5 4.5 TO252☆ TO252 R6004ENx/☆R6004KNx 600 4 0.9 15 10 TO252☆/LPT/TO220FM TO252/LPT/TO220FM R6007ENx/☆R6007KNx 600 7 0.57 20 14 TO252☆/LPT/TO220FM TO252/LPT/TO220FM R6009ENx/☆R6009KNx 600 9 0.5 23 16 TO252☆/LPT/TO220FM TO252/LPT/TO220FM R6011ENx/☆R6011KNx 600 11 0.34 32 22 TO252☆/LPT/TO220FM TO252/LPT/TO220FM R6015ENx/☆R6015KNx 600 15 0.26 40 27 LPT/TO220FM/TO3PF LPT/TO220FM/TO3PF R6020ENx/☆R6020KNx 600 20 0.17 60 39 LPT/TO220FM/TO3PF/TO247 LPT/TO220FM/TO3PF/TO247 R6024ENx/☆R6024KNx 600 24 0.15 70 47 LPT/TO220FM/TO3PF/TO247 LPT/TO220FM/TO3PF/TO247 R6030ENx/☆R6030KNx 600 30 0.115 85 57 LPT/TO220FM/TO3PF/TO247 R6035ENx/☆R6035KNx 600 35 0.095 110 74 TO3PF/TO247 R6047ENx/☆R6047KNx 600 47 0.07 145 97 TO247 R6076ENx/☆R6076KNx 600 76 0.04 260 174 TO247 EN Series KN Series 16% lower VF 0 500 1,000 1,500 2,000 2,500 VF[mV] 3,000 3,500 RFUH Series 5A Tj=25°C Tj=25°C 50ns 4,000 4,500 Absolute Maximum Ratings(Ta=25°C) Electrical Characteristics(Tj=25°C) VR(V) IO(A) VF(V)Max. IF(A) trr(ns)Max. RFNL5BM6S 600 5 1.3 5 60 RFNL5TJ6S 600 5 1.3 5 60 8 10 65 RFNL10TJ6S 600 10 1.25 1.3 RFNL15TJ6S 600 15 1.3 15 65 RFNL20TJ6S 600 20 1.3 20 70 Equivalent Circuit Diagram Package TO-252(DPAK) TO-220ACFP ■ RFV Series Ultra-fast trr hard recovery type Part No. Absolute Maximum Ratings(Ta=25°C) Electrical Characteristics(Tj=25°C) VR(V) IO(A) VF(V)Max. IF(A) trr(ns)Max. RFVS8TJ6S 600 8 3.0 8 20 RFV8TJ6S 600 8 2.8 8 25 RFV12TJ6S 600 12 2.8 12 25 LPT/TO220FM/TO3PF/TO247 RFV15TJ6S 600 15 2.8 15 30 TO3PF/TO247 RFVS8TG6S 600 8 3.0 8 20 TO247 RFV8TG6S 600 8 2.8 8 25 TO247 RFV12TG6S 600 12 2.8 12 25 RFV15TG6S 600 15 2.8 15 30 The last (8th) character represents the package type D : CPT3(D-Pak), J : LPT(D2-Pak), X : TO220FM, Z : TO3PF, Z1 : TO247, D3 : TO252, D3 : TO252 EN:Low noise type, KN:Fast switching type ☆ : Under Development 13 Power Device 40% than RFN Series Part No. 20.0 20 by RFV Series RFNL Series is RFN Series 30.0 20 Reverse recovery time reduced ■ RFNL Series Ultra-low VF type 40.0 40 RFUH Series RFUH Series 1 0.01 New processes utilized to achieve ultra-high-speed trr Current Conventional Product (Planar Type) The proprietary structure suppresses noise – a drawback of SJ MOSFETs to achieve lower noise than even planar types. High-speed trr characteristics RFNL Series 0.1 70.0 TO-252(DPAK) TO-220AC VF - IF CHARACTERISTICS 100 IF[A] *40% lower compared with the 1st-generation AN Series 65% DOWN Lower VF contributes to greater energy savings 10 ■ Towards lower ON resistance and low noise ON-resistance significantly reduced TO-220ACFP High-speed trr models TO-247 TO-3PF ・Broad package lineup, from DPAK to TO-247 Higher efficiency ・Ultra-low VF units / ・Broad lineup (40% lower than conventional products) ・Lineup includes low noise types and fast switching types Equivalent Circuit Diagram Package TO-220ACFP TO-220AC Power Device 14 Supports high withstand voltage, high surge circuits High withstand voltage discretes Super Junction MOSFET Fast Recovery Diodes Achieves low noise with low ON resistance Provides optimized characteristics for each application ・Ideal for PFC (Power Factor Correction) ・Improved characteristics ・Industry-leading A・Ron TO-220FM High efficiency / low VF ・Extremely low noise reduces noise countermeasures and makes it easy to replace planar type products SOT-428 (DPAK) TO-252 (DPAK) LPTS (D2-PAK) Low radiation noise 100 Achieves significantly lower noise compared with conventional models Radiated Emission Comparison(H)(dBμV) 80 60.0 [%] 60 80% 50.0 DOWN 100 1st-Generation AN Series 2nd-Generation EN Series RFV Series 0 35 Conventional Products (Planar Type) 1st-Generation 2nd-Generation AN Series EN Series 10.0 10 100 MHz 1,000 ■ Lineup Qg (nC) Package Part No. BVDSS (V) ID (A) RDS(on) (Ω) EN Series KN Series R6002ENx/☆R6002KNx 600 1.7 2.8 6.5 4.5 TO252☆ TO252 R6004ENx/☆R6004KNx 600 4 0.9 15 10 TO252☆/LPT/TO220FM TO252/LPT/TO220FM R6007ENx/☆R6007KNx 600 7 0.57 20 14 TO252☆/LPT/TO220FM TO252/LPT/TO220FM R6009ENx/☆R6009KNx 600 9 0.5 23 16 TO252☆/LPT/TO220FM TO252/LPT/TO220FM R6011ENx/☆R6011KNx 600 11 0.34 32 22 TO252☆/LPT/TO220FM TO252/LPT/TO220FM R6015ENx/☆R6015KNx 600 15 0.26 40 27 LPT/TO220FM/TO3PF LPT/TO220FM/TO3PF R6020ENx/☆R6020KNx 600 20 0.17 60 39 LPT/TO220FM/TO3PF/TO247 LPT/TO220FM/TO3PF/TO247 R6024ENx/☆R6024KNx 600 24 0.15 70 47 LPT/TO220FM/TO3PF/TO247 LPT/TO220FM/TO3PF/TO247 R6030ENx/☆R6030KNx 600 30 0.115 85 57 LPT/TO220FM/TO3PF/TO247 R6035ENx/☆R6035KNx 600 35 0.095 110 74 TO3PF/TO247 R6047ENx/☆R6047KNx 600 47 0.07 145 97 TO247 R6076ENx/☆R6076KNx 600 76 0.04 260 174 TO247 EN Series KN Series 16% lower VF 0 500 1,000 1,500 2,000 2,500 VF[mV] 3,000 3,500 RFUH Series 5A Tj=25°C Tj=25°C 50ns 4,000 4,500 Absolute Maximum Ratings(Ta=25°C) Electrical Characteristics(Tj=25°C) VR(V) IO(A) VF(V)Max. IF(A) trr(ns)Max. RFNL5BM6S 600 5 1.3 5 60 RFNL5TJ6S 600 5 1.3 5 60 8 10 65 RFNL10TJ6S 600 10 1.25 1.3 RFNL15TJ6S 600 15 1.3 15 65 RFNL20TJ6S 600 20 1.3 20 70 Equivalent Circuit Diagram Package TO-252(DPAK) TO-220ACFP ■ RFV Series Ultra-fast trr hard recovery type Part No. Absolute Maximum Ratings(Ta=25°C) Electrical Characteristics(Tj=25°C) VR(V) IO(A) VF(V)Max. IF(A) trr(ns)Max. RFVS8TJ6S 600 8 3.0 8 20 RFV8TJ6S 600 8 2.8 8 25 RFV12TJ6S 600 12 2.8 12 25 LPT/TO220FM/TO3PF/TO247 RFV15TJ6S 600 15 2.8 15 30 TO3PF/TO247 RFVS8TG6S 600 8 3.0 8 20 TO247 RFV8TG6S 600 8 2.8 8 25 TO247 RFV12TG6S 600 12 2.8 12 25 RFV15TG6S 600 15 2.8 15 30 The last (8th) character represents the package type D : CPT3(D-Pak), J : LPT(D2-Pak), X : TO220FM, Z : TO3PF, Z1 : TO247, D3 : TO252, D3 : TO252 EN:Low noise type, KN:Fast switching type ☆ : Under Development 13 Power Device 40% than RFN Series Part No. 20.0 20 by RFV Series RFNL Series is RFN Series 30.0 20 Reverse recovery time reduced ■ RFNL Series Ultra-low VF type 40.0 40 RFUH Series RFUH Series 1 0.01 New processes utilized to achieve ultra-high-speed trr Current Conventional Product (Planar Type) The proprietary structure suppresses noise – a drawback of SJ MOSFETs to achieve lower noise than even planar types. High-speed trr characteristics RFNL Series 0.1 70.0 TO-252(DPAK) TO-220AC VF - IF CHARACTERISTICS 100 IF[A] *40% lower compared with the 1st-generation AN Series 65% DOWN Lower VF contributes to greater energy savings 10 ■ Towards lower ON resistance and low noise ON-resistance significantly reduced TO-220ACFP High-speed trr models TO-247 TO-3PF ・Broad package lineup, from DPAK to TO-247 Higher efficiency ・Ultra-low VF units / ・Broad lineup (40% lower than conventional products) ・Lineup includes low noise types and fast switching types Equivalent Circuit Diagram Package TO-220ACFP TO-220AC Power Device 14 Contributes to greater efficiency and energy savings in a variety of high voltage, large current applications IGBT (Insulated Gate Bipolar Transistor) Field Stop Trench IGBT Ignition IGBT ROHM utilizes original trench gate and thin wafer technologies High reliability products optimized for automotive ignition to achieve low VCE (sat) and reduced switching loss. applications featuring both low VCE (sat) and high avalanche TO-252 (D-PAK) tolerance. Features TO-252 (D-PAK) 1 Low VCE (sat) & switching loss TO-263 (D2-PAK) ■ Internal Circuit Diagram Features 2 A broad lineup is offered, making it Ex. Automotive Ignition Coil Drive possible to select the ideal solution based on set requirements 1 Class-leading efficiency achieved through Boost coil an optimized tradeoff between VCE(sat) and avalanche tolerance. 3 Automotive-grade (AEC-Q101 qualified) TO-247N RGS Series (Under development) TO-3PFM Battery 2 Built-in Gate protection diode Spark plug 3 Gate resistance/Gate-emitter resistance (optional) ■ Application & Lineup Standard SCSOA (tsc 5μs min) RGT series — Low VCE (sat) Series RGCL series — High speed switching type RGTH series — SCSOA (tsc 8μs min) ☆RGS series ☆Under development AEC-Q101 VCE (sat) (Recommend) Lineup — (Recommend) 5μs 650V 4 to 50A@100°C — — 600V 18 to 40A@100°C — 650V 20 to 50A@100°C (Recommend) 8μs 650V 30 to 50A@100°C — IGBT 4 AEC-Q101 qualified SC SOA Switching performance Ignition timing signal ECU ■ Lineup RGPZ10BM40FH RGPR10BM40FH ☆RGPZ20BM56FH VCES 430 ± 30 430 ± 30 560 ± 30 VGE ±10 ±10 ±10 Collector Current (A) IC 20 20 20 Junction Temperature (°C) Tj 175 175 175 Eas 250 250 300 Collector-Emitter Voltage (V) Gate-Emitter Voltage (V) Avalanche Energy (Single Pulse) (mJ) Collector Collector Internal Circuit Gate Gate Emitter Collector Gate Emitter Emitter ☆Under development 15 Power Device Power Device 16 Contributes to greater efficiency and energy savings in a variety of high voltage, large current applications IGBT (Insulated Gate Bipolar Transistor) Field Stop Trench IGBT Ignition IGBT ROHM utilizes original trench gate and thin wafer technologies High reliability products optimized for automotive ignition to achieve low VCE (sat) and reduced switching loss. applications featuring both low VCE (sat) and high avalanche TO-252 (D-PAK) tolerance. Features TO-252 (D-PAK) 1 Low VCE (sat) & switching loss TO-263 (D2-PAK) ■ Internal Circuit Diagram Features 2 A broad lineup is offered, making it Ex. Automotive Ignition Coil Drive possible to select the ideal solution based on set requirements 1 Class-leading efficiency achieved through Boost coil an optimized tradeoff between VCE(sat) and avalanche tolerance. 3 Automotive-grade (AEC-Q101 qualified) TO-247N RGS Series (Under development) TO-3PFM Battery 2 Built-in Gate protection diode Spark plug 3 Gate resistance/Gate-emitter resistance (optional) ■ Application & Lineup Standard SCSOA (tsc 5μs min) RGT series — Low VCE (sat) Series RGCL series — High speed switching type RGTH series — SCSOA (tsc 8μs min) ☆RGS series ☆Under development AEC-Q101 VCE (sat) (Recommend) Lineup — (Recommend) 5μs 650V 4 to 50A@100°C — — 600V 18 to 40A@100°C — 650V 20 to 50A@100°C (Recommend) 8μs 650V 30 to 50A@100°C — IGBT 4 AEC-Q101 qualified SC SOA Switching performance Ignition timing signal ECU ■ Lineup RGPZ10BM40FH RGPR10BM40FH ☆RGPZ20BM56FH VCES 430 ± 30 430 ± 30 560 ± 30 VGE ±10 ±10 ±10 Collector Current (A) IC 20 20 20 Junction Temperature (°C) Tj 175 175 175 Eas 250 250 300 Collector-Emitter Voltage (V) Gate-Emitter Voltage (V) Avalanche Energy (Single Pulse) (mJ) Collector Collector Internal Circuit Gate Gate Emitter Collector Gate Emitter Emitter ☆Under development 15 Power Device Power Device 16 A vertically integrated production system ensures high quality and stable supply Nürnberg SiCrystal AG, the largest SiC monocrystal wafer manufacturer in Europe, became a member of the ROHM Group in 2009. SiCrystal was established in 1997 in Germany based on a SiC A ‘Quality First’ objective allows ROHM to establish a vertically integrated manufacturing system monocrystal growth technology development project launched in 1994. for SiC production. In addition to acquiring SiCrystal, a German wafer fabrication company in Mass production and supply of SiC wafers began in 2001. 2009, the ROHM Group continues to implement activities to improve quality throughout the In 2012, SiCrystal relocated to a new plant in Nüremberg to increase production capacity. entire manufacturing process, from wafers to packages. World-class manufacturing With the corporate philosophy "Stable Quality", SiCrystal has adopted technologies and stable production capacity provide increased cost competitiveness and an integrated wafer production system from raw SiC material to crystal growth, ensures a stable, long-term supply of new products. State-of-the-art package ROHM provides the latest assembling technologies such as CSP, BGA, COF and stacked package wafer processing, and inspection, and in 1999 was granted ISO9001 certification. ■ Manufactured Product: SiC Wafers In-house manufactured dies and lead frames In-house production system To enhance quality, ROHM manufactures ROHM utilizes an integrated production system developed completely in-house dies to punch lead frames and molding dies to precisely meet customer needs. All production equipment are developed in-house 3inch 2inch within the company. 150mm (6inch) 100mm (4inch) Acquired ISO9001 Certification ■ SiC Wafer Production Stringent material requirements Advanced Crystallization Technology Complete wafer production, from silicon ingot pulling Packaging Silicon ore Assembly Line CAD Frame & Dies Photo Mask Insulating Material Low inductance moduleA Seed Crystal A low inductance module utilizing SiC’s high-speed characteristics was developed Silicon Ingot Wafer Process SiC Powder In-house production equipment Silicon Si SiC ingots are produced via a crystal growth process utilizing a sublimation method called "Rayleigh's method" that sublimates SiC powder and recrystallizes it under cold temperatures. Compared with conventional Si ingots which are crystalized in the liquid phase from Si melt, the growth rate using the sublimation method is slow, making crystal defects likely to occur, and therefore requires precision technology for crystal control. SiCrystal utilizes advanced crystallization technology to produce stable quality wafers. Wafer Silicon carbide SiC Water-Cooled Coils Crucible For SiC: For Si: Temperature: 2,000 to 2,400°C Temperature: 1,230 to 1,260°C Principle: Transports sublimated gas to the surface of the seed crystal by a heat gradient in order to recrystallize it. Crystal control is difficult and the growth rate is slow compared with liquid phase growth. Principle: Liquid-phase growth during which Si melt is solidified on the seed crystal. This method is characterized by fast crystal growth. High quality, high volume, and stable manufacturing are guaranteed utilizing in-house production equipment. In-house manufactured photomask Engineers who know well of devices and processes are in charge of quality control covering from chip design layout to photomask manufacturing consistently to pursue the highest quality products. SiC processes High quality lines integrating SiC’s unique processes are utilized 1. Crystal growth 2. External polishing 3. Flat formation 4. Slicing 5. Sanding / Edge polishing / Cleaning SiC Wafer SiCrystal is a German SiC single crystal wafer manufacturer who joined the ROHM Group in 2009. 17 Power Device Power Device 18 A vertically integrated production system ensures high quality and stable supply Nürnberg SiCrystal AG, the largest SiC monocrystal wafer manufacturer in Europe, became a member of the ROHM Group in 2009. SiCrystal was established in 1997 in Germany based on a SiC A ‘Quality First’ objective allows ROHM to establish a vertically integrated manufacturing system monocrystal growth technology development project launched in 1994. for SiC production. In addition to acquiring SiCrystal, a German wafer fabrication company in Mass production and supply of SiC wafers began in 2001. 2009, the ROHM Group continues to implement activities to improve quality throughout the In 2012, SiCrystal relocated to a new plant in Nüremberg to increase production capacity. entire manufacturing process, from wafers to packages. World-class manufacturing With the corporate philosophy "Stable Quality", SiCrystal has adopted technologies and stable production capacity provide increased cost competitiveness and an integrated wafer production system from raw SiC material to crystal growth, ensures a stable, long-term supply of new products. State-of-the-art package ROHM provides the latest assembling technologies such as CSP, BGA, COF and stacked package wafer processing, and inspection, and in 1999 was granted ISO9001 certification. ■ Manufactured Product: SiC Wafers In-house manufactured dies and lead frames In-house production system To enhance quality, ROHM manufactures ROHM utilizes an integrated production system developed completely in-house dies to punch lead frames and molding dies to precisely meet customer needs. All production equipment are developed in-house 3inch 2inch within the company. 150mm (6inch) 100mm (4inch) Acquired ISO9001 Certification ■ SiC Wafer Production Stringent material requirements Advanced Crystallization Technology Complete wafer production, from silicon ingot pulling Packaging Silicon ore Assembly Line CAD Frame & Dies Photo Mask Insulating Material Low inductance moduleA Seed Crystal A low inductance module utilizing SiC’s high-speed characteristics was developed Silicon Ingot Wafer Process SiC Powder In-house production equipment Silicon Si SiC ingots are produced via a crystal growth process utilizing a sublimation method called "Rayleigh's method" that sublimates SiC powder and recrystallizes it under cold temperatures. Compared with conventional Si ingots which are crystalized in the liquid phase from Si melt, the growth rate using the sublimation method is slow, making crystal defects likely to occur, and therefore requires precision technology for crystal control. SiCrystal utilizes advanced crystallization technology to produce stable quality wafers. Wafer Silicon carbide SiC Water-Cooled Coils Crucible For SiC: For Si: Temperature: 2,000 to 2,400°C Temperature: 1,230 to 1,260°C Principle: Transports sublimated gas to the surface of the seed crystal by a heat gradient in order to recrystallize it. Crystal control is difficult and the growth rate is slow compared with liquid phase growth. Principle: Liquid-phase growth during which Si melt is solidified on the seed crystal. This method is characterized by fast crystal growth. High quality, high volume, and stable manufacturing are guaranteed utilizing in-house production equipment. In-house manufactured photomask Engineers who know well of devices and processes are in charge of quality control covering from chip design layout to photomask manufacturing consistently to pursue the highest quality products. SiC processes High quality lines integrating SiC’s unique processes are utilized 1. Crystal growth 2. External polishing 3. Flat formation 4. Slicing 5. Sanding / Edge polishing / Cleaning SiC Wafer SiCrystal is a German SiC single crystal wafer manufacturer who joined the ROHM Group in 2009. 17 Power Device Power Device 18 Research & Development High-temperature (Tj=225°C) packaging technology for transfer-molded modules ROHM has developed high-temperature SiC power modules for inverter driving in automotive systems and industrial devices. These transfer-molded modules are the first in the world that demonstrated the high temperature operation at 225°C. This enables the compact, low-cost packaging as commonly used in Si device modules, encouraging widely use of SiC module. Modules type is “Full Bridge” featuring 1,200V/300A with 225°C operation. ■ Future solutions for high temperature operation Gate drivers using SOI wafers are currently under development. They are expected to achieve higher speeds with lower power consumption. SiC with high temperature operation Operation at high temperatures above 200°C has been verified. Reliability evaluation is ongoing. High-temperature, high-voltage IPM. (Intelligent Power Module) ROHM’s high-temperature, High- temperature packaging technology. ROHM’s original technology is introduced to the high-temperature packaging for SiC devices. State-of-the-art industry-academia R&D collaboration New TOPICS ROHM is actively involved in partnerships with major universities in a variety of fields in order to share expertise, cultivate new technologies, and collaborate on breakthrough R&D. Development of mass-produced SiC epitaxialgrowth equipmentIn Kyot o Un ivers ity × Toky o Electron × ROH M High performance SiC MOSFET with High-k gate is currently under development Osaka University × Kyoto University × Tokyo Electron × ROHM 3-institution technological collaboration enables rapid development of high-quality SiC devices Characteristics improvement based on new materials, 1.5 times the breakdown voltage, 90% lower leakage current In 2007 ROHM, along with Kyoto University Developed the industry’s first and Tokyo Electron, developed mass SiC Trench MOSFET utilizing production SiC epitaxial growth equipment an aluminum oxynitride (AION) that can process multiple SiC wafers in a layer on the gate insulating single operation. Fast development was film. The result is 1.5x the made possible by efficiently sharing breakdown voltage and 90% technologies. These new equipment are lower leakage current vs. currently used for mass producing ROHM conventional thermally oxidized SiC devices. films (SiO2). These properties devices are inside with advanced high-temperature packaging Searching of new application using SiC power devices - High-voltage switching module for pulse generators Introduction of SiC devices to high-voltage switching module for pulse generators 4 times faster in operation speed, 10 times larger in rating current, over 100 times higher in operation frequency applications using SiC devices in order to widely spread SiC products in the society. As a part of Company these activities, high-voltage switching modules with SiC devices for pulse generators are proposed. 32kV rating switch modules (Voltage level can be adjusted depending on the number of modules connected in series.) compared to the conventional switching modules By applying SiC MOSFETs with high voltage, large current and high-speed response, dramatically Tokyo Electron improvement is expected in pulse generators and end products such as medical-purpose acceleration Osaka University technology. ROHM emphasizes search and introduction of new High performance SiC MOSFET is currently under development Kyoto University University hold promise for higher high-breakdown-voltage SiC Compact High temperature High power High efficiency High temperature SiC gate drivers systems in radiotherapy equipment. In September 2014, “Fukushima SiC Applied Engineering Inc.” was Various effects are expected for end products as follows; ・Downsizing of medical-purpose accelerators ・Decreasing radiation exposure in X-ray CT ・Reducing process time in plasma generators established to manufacturer and sell these SiC electronics products. ROHM joined the incorporation as a business partner to promote new market Establishment of a joint venture for manufacturing and sales of SiC electronics products development. ROHM reliability and lower loss. 19 Power Device Power Device 20 Research & Development High-temperature (Tj=225°C) packaging technology for transfer-molded modules ROHM has developed high-temperature SiC power modules for inverter driving in automotive systems and industrial devices. These transfer-molded modules are the first in the world that demonstrated the high temperature operation at 225°C. This enables the compact, low-cost packaging as commonly used in Si device modules, encouraging widely use of SiC module. Modules type is “Full Bridge” featuring 1,200V/300A with 225°C operation. ■ Future solutions for high temperature operation Gate drivers using SOI wafers are currently under development. They are expected to achieve higher speeds with lower power consumption. SiC with high temperature operation Operation at high temperatures above 200°C has been verified. Reliability evaluation is ongoing. High-temperature, high-voltage IPM. (Intelligent Power Module) ROHM’s high-temperature, High- temperature packaging technology. ROHM’s original technology is introduced to the high-temperature packaging for SiC devices. State-of-the-art industry-academia R&D collaboration New TOPICS ROHM is actively involved in partnerships with major universities in a variety of fields in order to share expertise, cultivate new technologies, and collaborate on breakthrough R&D. Development of mass-produced SiC epitaxialgrowth equipmentIn Kyot o Un ivers ity × Toky o Electron × ROH M High performance SiC MOSFET with High-k gate is currently under development Osaka University × Kyoto University × Tokyo Electron × ROHM 3-institution technological collaboration enables rapid development of high-quality SiC devices Characteristics improvement based on new materials, 1.5 times the breakdown voltage, 90% lower leakage current In 2007 ROHM, along with Kyoto University Developed the industry’s first and Tokyo Electron, developed mass SiC Trench MOSFET utilizing production SiC epitaxial growth equipment an aluminum oxynitride (AION) that can process multiple SiC wafers in a layer on the gate insulating single operation. Fast development was film. The result is 1.5x the made possible by efficiently sharing breakdown voltage and 90% technologies. These new equipment are lower leakage current vs. currently used for mass producing ROHM conventional thermally oxidized SiC devices. films (SiO2). These properties devices are inside with advanced high-temperature packaging Searching of new application using SiC power devices - High-voltage switching module for pulse generators Introduction of SiC devices to high-voltage switching module for pulse generators 4 times faster in operation speed, 10 times larger in rating current, over 100 times higher in operation frequency applications using SiC devices in order to widely spread SiC products in the society. As a part of Company these activities, high-voltage switching modules with SiC devices for pulse generators are proposed. 32kV rating switch modules (Voltage level can be adjusted depending on the number of modules connected in series.) compared to the conventional switching modules By applying SiC MOSFETs with high voltage, large current and high-speed response, dramatically Tokyo Electron improvement is expected in pulse generators and end products such as medical-purpose acceleration Osaka University technology. ROHM emphasizes search and introduction of new High performance SiC MOSFET is currently under development Kyoto University University hold promise for higher high-breakdown-voltage SiC Compact High temperature High power High efficiency High temperature SiC gate drivers systems in radiotherapy equipment. In September 2014, “Fukushima SiC Applied Engineering Inc.” was Various effects are expected for end products as follows; ・Downsizing of medical-purpose accelerators ・Decreasing radiation exposure in X-ray CT ・Reducing process time in plasma generators established to manufacturer and sell these SiC electronics products. ROHM joined the incorporation as a business partner to promote new market Establishment of a joint venture for manufacturing and sales of SiC electronics products development. ROHM reliability and lower loss. 19 Power Device Power Device 20 Focusing on cutting-edge SiC technology and leading the industry through innovative R&D ROHM has been focused on developing SiC for use as a material for next-generation power devices for years, collaborating with universities and end-users in order to cultivate technological know-how and expertise. This culminated in Japan's first mass-produced Schottky barrier diodes in April 2010 and the industry’s first commercially available SiC transistors (MOSFET) in December. And in March 2012 ROHM unveiled the industry's first mass production of Full SiC Power Modules. History SiC Technology Breakthrough Max Temp = 250.8℃ 80% Duty Cycle 20% Duty Cycle ❷ ❶ 2002 Begin preliminary experiments with SiC MOSFETs (Jun 2002) Develop SiC MOSFET prototypes (Dec 2004) 2005 2007 2008 Ship SiC MOSFET samples (Nov 2005) ROHM, along with Kyoto University and Tokyo Electron, announce the development of SiC epi film mass-production technology (Jun 2007) Develop a new type of SiC diode with Nissan Motors (Apr 2008) Announce the development of SiC MOSFETs with the industry’s smallest ON-resistance(3.1mΩcm²) (Mar 2006) Trial manufacture of large current (300A) SiC MOSFETs and SBDs (Schottky Barrier Diodes) (Dec 2007) Release trench-type MOSFETs featuring the industry’s smallest ON-resistance: 1.7mΩcm² (Sep 2008) Nissan Motors conducts a driving experiment of a fuel-cell vehicle equipped with an inverter using ROHM's SiC diode (Sep 2008) 2009 Honda R&D Co., Ltd. and ROHM test prototype SiC power modules for hybrid vehicles ❶ (Sep 2008) ROHM tests prototype high temperature operation power modules that utilize SiC elements and introduces a demo capable of operation at 250 ºC ❷ (Oct 2008) The ROHM Group acquires SiCrystal, an SiC wafer manufacturer ❸ (Jul 2009) Develop the industry’s first high current low resistance SiC trench MOSFET (Oct 2009) SiC is ECO Device Reducing environmental load SiC power devices deliver superior energy savings. ROHM is expanding its lineup of SiC power devices with innovative new products that minimize power consumption in order to reduce greenhouse gas emissions and lessen environmental impact. ❸ 2010 Establish an integrated SiC device production system. Begin mass production of SiC SBDs ❹ (Apr 2010) Successfully develop the industry's first SiC power modules containing trench MOSFETs and SBDs that can be integrated into motors (Oct 2010) Begin mass production of SiC MOSFETs (Dec 2010) 21 Power Device ❺ ❹ ❻ 2011 2012 2013 2015 Develop the industry's first transfer mold SiC power modules capable of high temperature operation (up to 225°C) ❺ (Oct 2011) Launch the industry's first mass production of ''Full SiC'' power modules with SiC SBDs and SiC MOSFETs ❻ (Mar 2012) Mass-produced SiC-MOSFET using the trench structure first in the world. Released “Full SiC” power module products (In June 2015) APEI Inc. (Arkansas Power Electronics International) and ROHM develop high-speed, high-current (1000A-class) SiC trench MOS modules (Oct 2011) Begin mass production of SiC MOS Module (Dec 2012)History Performed a trial production of uninterruptible power supply equipment using full SiC power modules in cooperation with Enegate and Kansai Electric Power (In June 2013) Started mass production of automotive SiC SBD products (In September 2012) Power Device 22 Focusing on cutting-edge SiC technology and leading the industry through innovative R&D ROHM has been focused on developing SiC for use as a material for next-generation power devices for years, collaborating with universities and end-users in order to cultivate technological know-how and expertise. This culminated in Japan's first mass-produced Schottky barrier diodes in April 2010 and the industry’s first commercially available SiC transistors (MOSFET) in December. And in March 2012 ROHM unveiled the industry's first mass production of Full SiC Power Modules. History SiC Technology Breakthrough Max Temp = 250.8℃ 80% Duty Cycle 20% Duty Cycle ❷ ❶ 2002 Begin preliminary experiments with SiC MOSFETs (Jun 2002) Develop SiC MOSFET prototypes (Dec 2004) 2005 2007 2008 Ship SiC MOSFET samples (Nov 2005) ROHM, along with Kyoto University and Tokyo Electron, announce the development of SiC epi film mass-production technology (Jun 2007) Develop a new type of SiC diode with Nissan Motors (Apr 2008) Announce the development of SiC MOSFETs with the industry’s smallest ON-resistance(3.1mΩcm²) (Mar 2006) Trial manufacture of large current (300A) SiC MOSFETs and SBDs (Schottky Barrier Diodes) (Dec 2007) Release trench-type MOSFETs featuring the industry’s smallest ON-resistance: 1.7mΩcm² (Sep 2008) Nissan Motors conducts a driving experiment of a fuel-cell vehicle equipped with an inverter using ROHM's SiC diode (Sep 2008) 2009 Honda R&D Co., Ltd. and ROHM test prototype SiC power modules for hybrid vehicles ❶ (Sep 2008) ROHM tests prototype high temperature operation power modules that utilize SiC elements and introduces a demo capable of operation at 250 ºC ❷ (Oct 2008) The ROHM Group acquires SiCrystal, an SiC wafer manufacturer ❸ (Jul 2009) Develop the industry’s first high current low resistance SiC trench MOSFET (Oct 2009) SiC is ECO Device Reducing environmental load SiC power devices deliver superior energy savings. ROHM is expanding its lineup of SiC power devices with innovative new products that minimize power consumption in order to reduce greenhouse gas emissions and lessen environmental impact. ❸ 2010 Establish an integrated SiC device production system. Begin mass production of SiC SBDs ❹ (Apr 2010) Successfully develop the industry's first SiC power modules containing trench MOSFETs and SBDs that can be integrated into motors (Oct 2010) Begin mass production of SiC MOSFETs (Dec 2010) 21 Power Device ❺ ❹ ❻ 2011 2012 2013 2015 Develop the industry's first transfer mold SiC power modules capable of high temperature operation (up to 225°C) ❺ (Oct 2011) Launch the industry's first mass production of ''Full SiC'' power modules with SiC SBDs and SiC MOSFETs ❻ (Mar 2012) Mass-produced SiC-MOSFET using the trench structure first in the world. Released “Full SiC” power module products (In June 2015) APEI Inc. (Arkansas Power Electronics International) and ROHM develop high-speed, high-current (1000A-class) SiC trench MOS modules (Oct 2011) Begin mass production of SiC MOS Module (Dec 2012)History Performed a trial production of uninterruptible power supply equipment using full SiC power modules in cooperation with Enegate and Kansai Electric Power (In June 2013) Started mass production of automotive SiC SBD products (In September 2012) Power Device 22 April 1st, 2016 No.58P6934E-A 04.2016 PDF