C Smart Sensor Wide Laser Beam CCD Measurement Sensor ZX-GT 10-µm Accuracy by 500-mm Range Safety Precautions for Laser Equipment CAUTION Do not expose your eyes to laser radiation either directly or reflected from a mirrored surface. The emitted laser beams have a high power density and direct exposure may result in loss of eyesight. The warning and explanatory label on the side of the Sensor Head in the ZX-GT Series is in Japanese. Replace it with the English label that comes with the product. This document provides information mainly for selecting suitable models. Please read the User's Manual carefully for information that the user must understand and accept before purchase, including information on warranty, limitations of liability, and precautions. Cat. No. Q154-E1 Printed in Japan C M Y K New Standards for Dimension Measurement CCD and TRIO algorithm Sensing distance Original collimator lens Class-1 laser 500mm Maximum 500-mm area Accurate! Measurable at any position 10-µm by non-contact method The usual limitations, such as the 'measurement area being confined to the center' or 'large errors due to positioning', that used to plague laser measuring sensors have now been overcome. Measurements can be consistently taken within a 500 mm area, whatever stage the work is at or whichever way it is inserted. It can now be set to positions without interference from the work feed and without limitations of size of work area. ZX-GT is the only sensor with the ability to measure and locate position to an accuracy of 10 µm without contact. Unlike conventional through-beam laser sensors, the ZX-GT ’s unique algorithm has the flexibility to meet a wide variety of applications, including the ability to accurately measure glass and mirror surfaces. New concept TRIO structure Fast! What does "10-micron by 500-mm" mean? An example of 10-mircon by 500-mm accuracy. (Two-thirds actual size) 1/7 in speed compared with conventional products 500mm 10-micro meters With OMRONS unique TRIO (Triple parallel processing) algorithm, it is possible to take 2000 high-speed samples per second, 7 times greater than previously possible, greatly reducing tact time. Previous product ZX-GT 3.3ms 0.5ms 1/7 of the previous speed FPGA CPU CPU 100 times It is like measuring the gap between a 50-meter long airplaine and the runway when it is just 1mm off the ground. About 50m Small! Compact like palm-top 1mm The controller, a continuation of the ZX series, is the smallest in its class. Combined with its compact sensor head, it is ideal for integration into various equipments. Runway Compact sensor head that can be set in the gap between equipment. Its compact controller is a continuation of the ZX series. (Class definition as of May 5th, 2007, according to our investigations.) 2 3 C M Y K New Standards for Dimension Measurement CCD and TRIO algorithm Sensing distance Original collimator lens Class-1 laser 500mm Maximum 500-mm area Accurate! Measurable at any position 10-µm by non-contact method The usual limitations, such as the 'measurement area being confined to the center' or 'large errors due to positioning', that used to plague laser measuring sensors have now been overcome. Measurements can be consistently taken within a 500 mm area, whatever stage the work is at or whichever way it is inserted. It can now be set to positions without interference from the work feed and without limitations of size of work area. ZX-GT is the only sensor with the ability to measure and locate position to an accuracy of 10 µm without contact. Unlike conventional through-beam laser sensors, the ZX-GT ’s unique algorithm has the flexibility to meet a wide variety of applications, including the ability to accurately measure glass and mirror surfaces. New concept TRIO structure Fast! What does "10-micron by 500-mm" mean? An example of 10-mircon by 500-mm accuracy. (Two-thirds actual size) 1/7 in speed compared with conventional products 500mm 10-micro meters With OMRONS unique TRIO (Triple parallel processing) algorithm, it is possible to take 2000 high-speed samples per second, 7 times greater than previously possible, greatly reducing tact time. Previous product ZX-GT 3.3ms 0.5ms 1/7 of the previous speed FPGA CPU CPU 100 times It is like measuring the gap between a 50-meter long airplaine and the runway when it is just 1mm off the ground. About 50m Small! Compact like palm-top 1mm The controller, a continuation of the ZX series, is the smallest in its class. Combined with its compact sensor head, it is ideal for integration into various equipments. Runway Compact sensor head that can be set in the gap between equipment. Its compact controller is a continuation of the ZX series. (Class definition as of May 5th, 2007, according to our investigations.) 2 3 Cutting-edge laser technology Strong temperature compensation *This is a representative case. Please see the specifications table for the details of the relevant conditions. Fluctuation in measurement values Measurement It is important to eliminate the influence of temperature to ensure the accuracy of a measurement. However, the temperature in the field environment changes according to the time and the season. With the ZX-GT, which employs CCD method, the influence on the resolution from temperature changes is greatly reduced leading to an error rate as low as 0.01% (2.8 micro-meters*). PD method (legacy method) CCD method Consistent measurement achieved even with variation in temperature Hot Dedicated glass-detection function Cold Integrated MRC filter Patent pending The detection of edges has been a problem for transparent objects with traditional transmission type sensors. However, ZX-GT adopts OMRON's unique MRC filter (Mirror Reflection Cut Filter) and CCD methodology. It can accurately detect work that reflects light such as mirror-finished surface or work that allows light to pass through such as glass (including coated glass). *MRC Filter:OMRON's proprietary optical filter. Glass Edge CCD Even effective with mirror finished surfaces Glass-edge measurement CCD elements detects a slight shadow created when a laser light hits the edge of the glass to determine the position of the edge. Collimate optical technology Sub-pixel processing Super parallel-beam CCD processing algorithm With OMRON's unique collimate optical technology, the closest to ideal parallel beam is created. Errors are controlled in the measurement area and the longest and most accurate measurement is achieved. CCD detects the shadow made from measurement objects and by performing sub-pixel calculation, it achieves 10 micrometer level accuracy. Collimator lens Mirror Laser *Collimate optical technology Collimate optical technology allows laser lights to stay parallel using mirror reflection and lens refraction effects, to take advantage of the laser light's high-level of directivity. 4 Measurement accuracy is within 10 micrometers CCD pixel pitch Applications by industry Automotive & Automotive-components LCD & PDP <Outer diameter measurement> <Glass-edge measurement> Diameter measurement of metal objects Glass alignment for the FPD industry Semiconductor <Insertion-amount measurement> Diameter measurement of large-scale pipe Notch position detection of glass wafer Electronic components <Lead-pitch and diameter measurement> Diameter measurement of crank shaft Width and spacing inspection of leadframe 5 Longer, but Easy-to-use New Concept "Smart Recipe" Using the PC software 'Smart-monitor GT', set up is easy with simply clicking the icons. This is OMRON's Smart Recipe methodology. Easy to set-up Interface Unit Different features are organized by tabs,to allow the user to understand and change the settings easily. Measurement conditions can be saved on PCs. Controller By connecting it to the controller,RS-232C communication and binary output is possible. Strong support tool The measurement data is gathered in the PCs in real time so it is easy to ascertain and analyse the current conditions at any time. Grasp the data trend and prevent defective parts Time The trend of the measurement data and sudden change can be checked in the timedependent graph, so that the appropriate action can be taken before defective goods are produced. 6 Measurement result can be logged at appropriate times The logged data can be sent to Excel . It is useful for traceability management and for preparing quality assurance reports. First in the industry Patent pending 3-way optical axis adjustment Three optical axis adjustment functions are integrated for the industry's longest measurement. This function provides the optimal adjustment when the sensor head is installed on-site. With the sensor-head With the controller With the PC LED on the light-receiving device is lit up to indicate when the light axis is matched. The CCD light reception balance is displayed in the upper display and the amount of light received can be confirmed with numerical values underneath. The direction of the sensor head's adjustment is graphically displayed. The adjustment conditions can be confirmed through the shapes of the light reception waveforms. Longest in the industry 30-m cable extension The emitter and receiver do not need to be connected with each other. Each cable can be extended up to 30 m. It is perfectly suited for installation into large-scale production line. 30m to DC24V maximum length 30 m Controller (using the special extension cables) Receiver Emitter maximum length 30 m to DC24V 7 Ordering Information Sensor Optical system Appearance Measuring width Sensing distance Resolution Output type Model Separate type NPN ZX-GT28S11 PNP ZX-GT28S41 NPN ZX-GT2840S11 PNP ZX-GT2840S41 0 to 500mm Through-beam 28mm 10µm Integrated type 40mm Controller Appearance Power supply Output type Model NPN ZX-GTC11 PNP ZX-GTC41 DC Accessories(Order Separately) Set of Interface Unit and Setup software PCs Output type Model NPN ZX-GIF11A PNP ZX-GIF41A Interface Unit(RS-232C/Binary output) Appearance Power supply Output type Model NPN ZX-GIF11 PNP ZX-GIF41 DC Setup software PCs Name Model Smart Monitor GT ZX-GSW11 Calculating Units Appearance Model ZX-CAL2 Receiver-Controller Extension Cable Model Cable length Quantity Standard cable Flexible cable 1m ZX-XGC1A ZX-XGC1R 2m ZX-XGC2A ZX-XGC2R 5m ZX-XGC5A ZX-XGC5R 8m ZX-XGC8A ZX-XGC8R 20m ZX-XGC20A ZX-XGC20R 1 Up to two extension cables can be connected. However, be sure to limit the total extension cable length between the receiver and the Controller to 30 meters (including the receiver cable). 8 Ordering Information Specifications Sensor Sensor Optical system Appearance Measuring width Sensing distance Resolution Output type Model Separate type NPN ZX-GT28S11 0 to 500mm PNP Through-beam 28mm ZX-GT28S41 10µm Integrated type NPN ZX-GT2840S11 40mm PNP Controller Appearance Power supply Output type ZX-GT28S11 Item ZX-GT2840S11 ZX-GT28S41 ZX-GT2840S41 Output type NPN Appearance Separate type Light source Visible semiconductor laser diode (wavelength 650 nm, CLASS 1 of EN60825-1/IEC60825-1, CLASS Measuring width 28mm Sensing distance 0 to 500mm 40mm 0 to 500mm 40mm Minimum sensing object 0.5mm dia.(*1) 0.2mm dia. 0.5mm dia.(*1) 0.2mm dia. Linearity ±0.1%F.S.(*2) Resolution 10µm(number of process values to average: 16)(*3) Temperature characteristic 0.01%F.S/C(*4) Indicators (emitter) Laser ON indicator (green), laser alarm indicator (red) Indicator (receiver) Optical axis setting indicator (green) Laser OFF input/sync input ON: Short-circuited with 0 V or 1.5 V max. OFF:Open (leakage current: 0.1 mA max.) ON: Short-circuited with power supply voltage or power supply voltage -1.5 V max. OFF:Open (leakage current: 0.1 mA max.) PNP open-collector output 30 VDC 20 mA max. Residual voltage 2 V max. ZX-GT2840S41 PNP Integrated type Separate type Integrated type of FDA(21CFR 1040.10 and 1040.11) Model NPN ZX-GTC11 Laser deterioration alarm output NPN open-collector output 30 VDC 20 mA max. Residual voltage 1.2 V max. PNP ZX-GTC41 Power consumption (emitter) 30 mA max. Power supply voltage (emitter) 24 VDC +10%, -15% ripple (p-p) 10% max. Dielectric strength 1,000 VAC, 50/60 Hz for 1 min Insulation resistance 20 MΩ (at 500 VDC megger) Operating ambient illumination (emitter) 3000 lx (incandescent light) Operating ambient illumination (receiver) 1000 lx (incandescent light)(*5) DC Accessories(Order Separately) Set of Interface Unit and Setup software PCs Output type Model NPN ZX-GIF11A Ambient temperature Operating: 0 to +40 C Storage: -15 to +50 C(with no icing or condensation) PNP ZX-GIF41A Ambient humidity Operating and storage: 35 to 85% (with no condensation) Vibration resistance (durability) 10 to 150 Hz Single-amplitude: 0.75 mm for 80 min each in X, Y and Z directions Shock resistance (durability) 300 m/s2 3 times each in six directions (up/down, left/right, forward/backward) Degree of protection IEC60529 IP40 Cable length 2m Material Case: aluminum die-cast, Lens: glass Weight (packed state) Approx.550g Accessories Laser warning labels, Instruction Sheet Interface Unit(RS-232C/Binary output) Appearance Power supply Output type NPN Model ZX-GIF11 DC PNP Setup software PCs Name Approx.570g Approx.550g Approx.570g F.S.: 28 mm measuring range of receiver Model Smart Monitor GT ZX-GIF41 *1: Distance between emitter and receiver: 500 mm, measurement object at 250 mm from receiver. Glass ends of chamfer 0.1 mm or more can be detected in glass edge measurement mode. (at binary level 70%) ZX-GSW11 *2: Linearity is given to be a typical error with respect to an ideal straight line when the distance between the emitter and receiver is 100 mm and light is blocked at a distance of 50 mm from the receiver. (On the ZX-GT2840__, the measurement object is measured at a distance of 20 mm from the receiver.) *3: The amount of fluctuation (±3σ) in the analog output when the distance between the emitter and receiver is 100 mm and a ZX-GTC__ is connected Calculating Units Appearance *4: Change in the light cutoff value on one side when the distance between the emitter and receiver is 100 mm and the light is half-cutoff at a distance of 50 mm from the receiver (On the ZX-GT2840__, the measurement object is measured at a distance of 20 mm from the receiver.) Model *5:Standard mode(NORM) used ZX-CAL2 Receiver-Controller Extension Cable Model Cable length Quantity Standard cable Flexible cable 1m ZX-XGC1A ZX-XGC1R 2m ZX-XGC2A ZX-XGC2R 5m ZX-XGC5A ZX-XGC5R 8m ZX-XGC8A ZX-XGC8R 20m ZX-XGC20A ZX-XGC20R 1 Up to two extension cables can be connected. However, be sure to limit the total extension cable length between the receiver and the Controller to 30 meters (including the receiver cable). 8 9 Specifications Controller Item ZX-GTC11 ZX-GTC41 Output type NPN PNP Measurement cycle(*1) 1.5ms(standard mode(NORM)) 0.5ms(high-speed mode(FAST)) (*2) Samples to average 1/2/4/8/16/32/64/128/256/512/1024/2048/4096 Analog output(*3) For current output: 4 to 20mA/F.S., max. load resistance 300 Ω For voltage output: ±4V, (±5 V, 1 to 5 V (*4)), output impedance 100 Ω Timing input, bank switching input, zero reset input, reset input ON: short-circuited with 0V or 1.5V max. OFF: Open (leakage current: 0.1 mA max.) ON: short-circuited with power supply voltage or power supply voltage -1.5V max. OFF: Open (leakage current: 0.1 mA max.) HIGH/PASS/LOW Judgment output (*5) Sync output(*6) NPN open-collector output 30 VDC 50 mA max. Residual voltage 1.2 V max. PNP open-collector output 30 VDC 50 mA max. Residual voltage 2V max. Indicator Judgment output indicator: HIGH (orange), PASS (green), LOW (orange) Main display (red) Sub-display (yellow) Bank 1/2 (orange), zero reset (green) Main Number of registered setups functions Measurement Mode 2 banks Interrupted beam width measurement, incident beam width measurement, outer diameter measurement, center position measurement, IC lead pitch, IC lead width judgment, specified edge measurement, wire position measurement, glass edge position measurement Display during measurement Measured value, resolution, threshold, voltage output value, current output value (number of display digits can be changed) Zero reset functions Offset setting of zero reset value, zero reset value memory Hold Sample hold, peak hold, bottom hold, peak-to-peak hold, average hold, delay hold Timer functions ON delay, OFF delay, one-shot Adjustment functions Optical Axis adjust mode/light intensityt writing mode, variable binary level, variable edge filter, analog output scaling Calculation 2Possible on up to two Controllers (Calculation Unit ZX-CAL2 is required for connecting Controllers to each other.) A-B, A+B, width Other Measurement cycle setting, threshold setting, hysteresis setting, initialization, key lock Temperature characteristic 0.005%F.S./°C Current consumption 150 mA max. with power supply voltage of 24 VDC (including receiver) (*7) Power supply voltage 24 VDC +10%, -15% ripple (p-p) 10% max. Dielectric strength 1,000 VAC, 50/60 Hz for 1 min Insulation resistance 20 MΩ (at 500 VDC megger) Ambient temperature Operating: 0 to +50°C Storage: -15 to +60°C (with no icing or condensation) Ambient humidity Operating and storage: 35 to 85% (with no condensation) Vibration resistance(durability) 10 to 150 Hz Single-amplitude: 0.35 mm for 80 min each in X, Y and Z directions Shock resistance (durability) 300 m/s2 3 times each in six directions (up/down, left/right, forward/backward) Degree of protection IEC60529 IP20 Cable length 2m Material Case: PBT (polybutylene terephthalate), Cover: Polycarbonate Weight (packed state) Approx.330g Accessories Instruction Sheet *1: A simple average is used in IC lead pitch judgment mode or IC lead width judgment mode. The measurement cycle time can be calculated as follows: Specified measurement cycle time x (Number of samples to average + 1) +1 ms max. In other measurement modes, a moving average is used. The first measurement cycle time can be calculated as follows: Specified measurement cycle time x (Number of samples to average + 1) +1 ms max. The second and later measurement cycle times will be equal to the specified measurement cycle time. *2: The response time in the high-speed mode (FAST) for the IC lead pitch and IC lead width judgment modes is 1 ms. *3: Current/voltage can be switched using the switch provided on the rear of the Controller. *4: Can be set by the analog output scaling function. *5: The error (ERR) state is displayed when all HIGH/PASS/LOW outputs turn OFF. *6: Normally, wire the sync output wire directly to the emitter's sync input wire and run the Controller in the standard mode. On an NPN type Controller, use an NPN type emitter, and on a PNP type Controller, use a PNP type emitter.Wiring of the sync wires is not required when the Controller is run in the high-speed mode. (Note, however,that the Controller becomes more susceptible to the influence of ambient light in this case.) *7: The value is 175 mA max. (including receiver) when current output is set. Interface Unit Item 10 ZX-GIF11/-GIF11A ZX-GIF41/-GIF41A Compatible Controller ZX-GTC11 Indicator Power ON (green), Controller communications (orange), Controller communications error (red), RS-232C communications (orange), RS-232C communications error (red), binary output (orange) ZX-GTC41 Communications port RS-232C (9-pin D-sub connector) 12-bit binary output (D11 toD0, GATE) NPN open-collector output 30 VDC 20mA max. Residual voltage 1.2 V max. Power supply voltage Supplied from Controller (power consumption: 60 mA max.) Dielectric strength 1,000 VAC, 50/60 Hz for 1 min Insulation resistance 20 MΩ (at 500 VDC megger) Ambient temperature Operating: 0 to +50°C Storage: -15 to +60°C(with no icing or condensation) Ambient humidity Operating and storage: 35 to 85% (with no condensation) Vibration resistance(durability) 10 to 150 Hz Single-amplitude: 0.35 mm for 80 min each in X, Y and Z directions Shock resistance (durability) 300 m/s2 3 times each in six directions (up/down, left/right, forward/backward) Degree of protection IEC60529 IP20 Cable length RS-232C 0.5 m, binary output 2 m Material Case: PBT (polybutylene terephthalate), Cover: Polycarbonate Weight (packed state) ZX-GIF_1A:Approx.550g ZX-GIF_1:Approx.330g Accessories ZX-GIF_1A:Setup Software (CD-ROM), 2 clamps, Instruction Sheet ZX-GIF_1:2 clamps, Instruction Sheet PNP open-collector output 30 VDC 20 mA max. Residual voltage 2 V max. External Dimensions(Unit: mm) Sensor Separate type:ZX-GT28S11/-GT28S41 Integrated type:ZX-GT2840S11/-GT2840S41 2-M3 Optical axis setting Laser ON indicator (green) indicator (green) 54.1 Mounting hole dimensions 16.9 mm dia. 31 Round vinyl insulated cable 5 mm dia. (7/0.18 mm dia.) 4-core, standard length 2 m 15± 0.15 7.15 20 ±0.1 34 5 55 40 10 3 Connector 28 Round vinyl insulated cable 6.2 mm dia. (7/0.127 mm dia.) 15-core, standard length 2 m 2.5 1.7 1.7 5 17.8 8.1 6 13.3 31 Round vinyl insulated cable 6.2 mm dia. (7/0.127 mm dia.) 15-core, standard length 2 m 16 35 57.5 9 3-4.5 mm dia. Optical axis setting indicator (green) 54.1 Connector 1.7 13 4.5 38± 0.15 4.5 18.6 Optical axis 2-3.2 mm dia. holes Five, 6.5 mm dia. countersunk holes, depth 5 Optical axis Laser alarm indicator(red) 15.5 8.5 2.5 Laser ON indicator (green) 16.9 mm dia. Receiver 28 Beam 28 1.7 57.5 16 42.5 32.6 8.1 Emitter 55 24±0.15 5 7.15 Optical axis 49 ±0.15 Round vinyl insulated cable 5 mm dia. (7/0.18 mm dia.) 4-core, standard length 2 m 5 17.8 49 ±0.15 15.5 8.5 6 13.3 31 31 Laser alarm indicator(red) 20 Beam 2-4.5 mm dia. 4-M4, depth 4 11 Emitter Controller 35 57.5 16 4 18.9 0.3 4-M4, depth 4 57.5 42.5 32.9 3 21±0.15 11± 0.15 9.7 7 9.7 11± 0.15 38 ±0.15 28 16 Optical axis Receiver Interface Unit ZX-GIF11/-GIF41 Voltage/Current switch 4.2 3 136 64.3 12.25 Connector 4.2 4.2 3 64.3 4.2 336 51.5 16.9 mm dia. 6.55 3 5 11.7 2.2 29 Connector 30 11.7 33.1 11.7 30 11.7 4.3 ZX-GTC11/-GTC41 36.8 Round vinyl insulated cable 6.2 mm dia. (7/0.127 mm dia.) 15-core standard length 0.1 m Round vinyl insulated cable 5.2 mm dia. (19/0.08 mm dia.) 13-core standard length 2 m 13.2 13 15.8 6 13.2 15 31.5 16.8 31.5 46 13 36.8 Round vinyl insulated cable 5.4 mm dia. (19/0.08 mm dia.) 15-core standard length 2 m Round vinyl insulated cable 5.2 mm dia. (19/0.08 mm dia.) 10-core standard length 0.3 m Receiver-Controller Extension Cable Calculating Unit ZX-CAL2 ZX-XGC_A/-XGC_R 24.9 3 Operation indicators Connectors 19.5 54.9 12 8 51.5 16.9 mm dia. 57 15.1 L1 (Note 1) 16.9 mm dia. 54.1 44.05 9.5 30 15-pole connector (male) 15 26 14.4 3.4 5 36.7 Round vinyl insulated cable, 15-core (Note 2) 15-pole connector (female) Note 1: ZX-XGC1A/R : ZX-XGC2A/R : ZX-XGC5A/R : ZX-XGC8A/R : ZX-XGC20A/R : 1M 2M 5M 8M 20M Note 2: Standard cable: 6.2 mm dia. Flexible cable: 6.1 mm dia. 11 C M Y K Safety Precautions for Laser Equipment CAUTION Do not expose your eyes to laser radiation either directly or reflected from a mirrored surface. The emitted laser beams have a high power density and direct exposure may result in loss of eyesight. The warning and explanatory label on the side of the Sensor Head in the ZX-GT Series is in Japanese. Replace it with the English label that comes with the product. This document provides information mainly for selecting suitable models. Please read the User's Manual carefully for information that the user must understand and accept before purchase, including information on warranty, limitations of liability, and precautions. CSM_3_1_0616 Cat. No. Q154-E1 Printed in Japan