STMICROELECTRONICS LIS3L06AL

LIS3L06AL
MEMS INERTIAL SENSOR:
3-axis - +/-2g/6g ULTRACOMPACT LINEAR ACCELEROMETER
Features
■
2.4V TO 3.6V SINGLE SUPPLY OPERATION
■
LOW POWER CONSUMPTION
■
±2g/±6g USER SELECTABLE FULL-SCALE
■
0.5mg RESOLUTION OVER 100Hz
BANDWIDTH
■
EMBEDDED SELF TEST
■
OUTPUT VOLTAGE, OFFSET AND
SENSITIVITY RATIOMETRIC TO THE
SUPPLY VOLTAGE
■
HIGH SHOCK SURVIVABILITY
■
ECO-PACK COMPLIANT
LGA-8
to design a dedicated circuit which is trimmed to
better match the sensing element characteristics.
Description
The LIS3L06AL is a low-power 3-axis linear
capacitive accelerometer that includes a sensing
element and an IC interface able to take the
information from the sensing element and to
provide an analog signal to the external world.
The sensing element, capable of detecting the
acceleration, is manufactured using a dedicated
process developed by ST to produce inertial
sensors and actuators in silicon.
The IC interface is manufactured using a standard
CMOS process that allows high level of integration
The LIS3L06AL has a dynamically selectable full
scale of ±2g/±6g and it is capable of measuring
accelerations over a bandwidth of 1.5 kHz for all
axes. The device bandwidth may be reduced by
using external capacitances. A self-test capability
allows to check the mechanical and electrical
signal path of the sensor.
The LIS3L06AL is available in plastic SMD
package and it is guaranteed to operate over an
extended temperature range of -40°C to +85°C.
The LIS3L06AL belongs to a family of products
suitable for a variety of applications:
– Mobile terminals
– Gaming and Virtual Reality input devices
– Free-fall detection for data protection
– Antitheft systems and Inertial Navigation
– Appliance and Robotics.
Order codes
Part number
Temp range, °C
Package
Packing
LIS3L06AL
-40°C to +85°C
LGA-8
Tray
LIS3L06ALTR
-40°C to +85°C
LGA-8
Tape & Reel
September 2005
CD00068498
Rev 1
1/17
www.st.com
17
LIS3L06AL
Contents
1
2
3
4
5
Block Diagram & Pins Description . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3
1.1
Block diagram . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3
1.2
Pin Description . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3
Mechanical and Electrical Specifications . . . . . . . . . . . . . . . . . . . . . . . . . . 5
2.1
Mechanical Characteristics . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5
2.2
Electrical Characteristics . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6
2.3
Absolute maximum ratings . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7
2.4
Terminology . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7
Functionality . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 9
3.1
Sensing element . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 9
3.2
IC Interface . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 9
3.3
Factory calibration . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 9
Application hints . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 10
4.1
Soldering information . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 11
4.2
Output Response vs Orientation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 11
Typical performance characteristics . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 12
5.1
Mechanical Characteristics at 25°C . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 12
5.2
Mechanical Characteristics derived from measurement in the
-40°C to +85°C temperature range . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 13
5.3
Electrical characteristics at 25°C . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 14
6
Package Information . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 15
7
Revision history . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 16
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LIS3L06AL
1 Block Diagram & Pins Description
1
Block Diagram & Pins Description
1.1
Block diagram
Figure 1.
Block Diagram
Routx Voutx
X+
CHARGE
AMPLIFIER
Y+
Z+
a
MUX
S/H
DEMUX
Routy Vouty
S/H
ZYX-
Routz Voutz
S/H
REFERENCE
SELF TEST
1.2
CLOCK
TRIMMING CIRCUIT
Pin Description
Figure 2.
Pin Connection
LIS3L06AL
Z
Vdd
X
1
Voutx
ST
Vouty
Voutz
FS
GND
Y
DIRECTION OF THE
DETECTABLE
ACCELERATIONS
Reserved
BOTTOM VIEW
CD00068498
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LIS3L06AL
1 Block Diagram & Pins Description
Table 1.
4/17
Pin description
Pin #
Pin Name
Function
1
ST
2
Voutz
Output Voltage Z channel
3
GND
0V supply
4
Reserved
5
FS
6
Vouty
Output Voltage Y channel
7
Voutx
Output Voltage X channel
8
Vdd
Self Test (Logic 0: normal mode; Logic 1: Self-test)
Leave unconnected
Full Scale (Logic 0:2g Full scale; Logic1: 6g Full Scale)
Power supply
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LIS3L06AL
2 Mechanical and Electrical Specifications
2
Mechanical and Electrical Specifications
2.1
Mechanical Characteristics.
Table 2.
Symbol
Ar
So
Mechanical Characteristics1
(Temperature range -40°C to +85°C) All the parameters are specified @ Vdd =3.3V,
T = 25°C unless otherwise noted
Parameter
Acceleration Range3
Sensitivity4
Min.
Typ.2
Full-scale = 2g
±1.8
±2.0
g
Full-scale = 6g
±5.4
±6.0
g
Full-scale = 2g
Vdd/5–10%
Vdd/5
Vdd/5+10%
V/g
Full-scale = 6g
Vdd/15–10%
Vdd/15
Vdd/15+10%
V/g
Test Condition
Max.
Unit
SoDr
Sensitivity Change Vs
Temperature
Delta from +25°C
Voff
Zero-g Level4
T = 25°C
Zero-g level Change Vs
Temperature
Delta from +25°C
±0.5
Best fit straight line
Full-scale = 2g
X, Y axis
±0.3
±1.5
%
Best fit straight line
Full-scale = 2g
Z axis
±0.5
±1.5
%
±2
±4
%
OffDr
NL
Non Linearity5
±0.01
Vdd/2-6%
CrossAx Cross-Axis6
An
Vt
Fres
Acceleration Noise
Density
Self test Output Voltage
Change7,8,9
Sensing Element
Resonance Frequency9
Vdd=3.3V;
Full-scale = 2g
Vdd/2
%/°C
Vdd/2+6%
V
mg/°C
µg/
50
Hz
T = 25°C
Vdd=3.3V
Full-scale = 2g
X axis
-20
-50
-100
mV
T = 25°C
Vdd=3.3V
Full-scale = 2g
Y axis
20
50
100
mV
T = 25°C
Vdd=3.3V
Full-scale = 2g
Z axis
20
50
100
mV
all axes
1.5
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kHz
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LIS3L06AL
2 Mechanical and Electrical Specifications
Mechanical Characteristics1 (continued)
(Temperature range -40°C to +85°C) All the parameters are specified @ Vdd =3.3V,
T = 25°C unless otherwise noted
Table 2.
Symbol
Parameter
Top
Operating Temperature
Range
Wh
Product Weight
Test Condition
Typ.2
Min.
-40
Max.
Unit
+85
°C
0.08
gram
Note: 1 The product is factory calibrated at 3.3V. The device can be powered from 2.4V to 3.6V. Voff, So
and Vt parameters will vary with supply voltage.
2 Typical specifications are not guaranteed
3 Guaranteed by wafer level test and measurement of initial offset and sensitivity
4 Zero-g level and sensitivity are essentially ratiometric to supply voltage
5 Guaranteed by design
6 Contribution to the measuring output of the inclination/acceleration along any perpendicular axis
7 Self test “output voltage change” is defined as Vout(Vst=Logic1)-Vout(Vst=Logic0)
8 Self test “output voltage change” varies cubically with supply voltage
9 When Full Scale is set to ±6g, “self test output change” is one third of the corresponding ±2g range.
10 Minimum resonance frequency Fres=1.5kHz. Sensor bandwidth=1/(2*π*110kΩ*Cload) with
Cload>1nF.
2.2
Electrical Characteristics
Table 3.
Symbol
Electrical Characteristics1
(Temperature range -40°C to +85°C) All the parameters are specified @ Vdd =3.3V, T=25°C
unless otherwise noted
Parameter
Vdd
Supply Voltage
Idd
Supply Current
Vst
Self Test Input
Vfs
Test Condition
Min.
Typ.2
Max.
Unit
2.4
3.3
3.6
V
0.95
1.5
mA
mean value
Logic 0 level
0
0.3*Vdd
V
Logic 1 level
0.7*Vdd
Vdd
V
Logic 0 level
0
0.3*Vdd
V
Logic 1 level
0.7*Vdd
Vdd
V
140
kΩ
Full Scale Input
Rout
Output Impedance
80
Cload
Capacitive Load Drive3
1
Top
Operating Temperature
Range
-40
110
nF
+85
°C
Note: 1 The product is factory calibrated at 3.3V
2 Typical specifications are not guaranteed
3 Minimum resonance frequency Fres=1.5KHz. Sensor bandwidth=1/(2*π*110kΩ*Cload) with
Cload>1nF
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LIS3L06AL
2.3
2 Mechanical and Electrical Specifications
Absolute maximum ratings
Stresses above those listed as “absolute maximum ratings” may cause permanent damage to
the device. This is a stress rating only and functional operation of the device under these
conditions is not implied. Exposure to maximum rating conditions for extended periods may
affect device reliability.
Table 4.
Absolute maximum ratings
Symbol
Ratings
Vdd
Supply voltage
Vin
Input Voltage on Any Control pin (ST, FS)
Maximum Value
Unit
-0.3 to 7
V
-0.3 to Vdd +0.3
V
3000g for 0.5 ms
APOW
Acceleration (Any axis, Powered, Vdd=3.3V)
AUNP
Acceleration (Any axis, Not powered)
TSTG
Storage Temperature Range
10000g for 0.1 ms
3000g for 0.5 ms
10000g for 0.1 ms
-40 to +125
°C
2kV HBM
ESD
Electrostatic Discharge Protection
200V MM
1500V CDM
This is a Mechanical Shock sensitive device, improper handling can cause
permanent damages to the part
This is an ESD sensitive device, improper handling can cause permanent damages
to the part
2.4
Terminology
Sensitivity describes the gain of the sensor and can be determined by applying 1g
acceleration to it. As the sensor can measure DC accelerations this can be done easily by
pointing the axis of interest towards the center of the earth, note the output value, rotate the
sensor by 180 degrees (point to the sky) and note the output value again thus applying ±1g
acceleration to the sensor. Subtracting the larger output value from the smaller one and dividing
the result by 2 will give the actual sensitivity of the sensor. This value changes very little over
temperature (see sensitivity change vs. temperature) and also very little over time. The
Sensitivity Tolerance describes the range of Sensitivities of a large population of sensors.
Zero-g level describes the actual output signal if there is no acceleration present. A sensor in a
steady state on a horizontal surface will measure 0g in X axis and 0g in Y axis. The output is
ideally for a 3.3V powered sensor Vdd/2 = 1650mV. A deviation from ideal 0-g level (1650mV in
this case) is called Zero-g offset. Offset of precise MEMS sensors is to some extend a result of
stress to the sensor and therefore the offset can slightly change after mounting the sensor onto
a printed circuit board or exposing it to extensive mechanical stress. Offset changes little over
temperature - see “Zero-g level change vs. temperature” - the Zero-g level of an individual
sensor is very stable over lifetime. The Zero-g level tolerance describes the range of Zero-g
levels of a population of sensors.
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LIS3L06AL
2 Mechanical and Electrical Specifications
Self Test allows to test the mechanical and electric part of the sensor, allowing the seismic
mass to be moved by means of an electrostatic test-force. The Self Test function is off when the
ST pin is connected to GND. When the ST pin is tied at Vdd an actuation force is applied to the
sensor, simulating a definite input acceleration. In this case the sensor outputs will exhibit a
voltage change in their DC levels which is related to the selected full scale and depending on
the Supply Voltage through the device sensitivity. When ST is activated, the device output level
is given by the algebraic sum of the signals produced by the acceleration acting on the sensor
and by the electrostatic test-force. If the output signals change within the amplitude specified
inside Table 2, than the sensor is working properly and the parameters of the interface chip are
within the defined specification.
Output impedance describes the resistor inside the output stage of each channel. This
resistor is part of a filter consisting of an external capacitor of at least 1nF and the internal
resistor. Due to the high resistor level only small, inexpensive external capacitors are needed to
generate low corner frequencies. When interfacing with an ADC it is important to use high input
impedance input circuitries to avoid measurement errors. Note that the minimum load
capacitance forms a corner frequency beyond the resonance frequency of the sensor. For a flat
frequency response a corner frequency well below the resonance frequency is recommended.
In general the smallest possible bandwidth for an particular application should be chosen to get
the best results.
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LIS3L06AL
3
3 Functionality
Functionality
The LIS3L06AL is a high performance, low-power, analog output 3-axis linear accelerometer
packaged in a LGA package. The complete device includes a sensing element and an IC
interface able to take the information from the sensing element and to provide an analog signal
to the external world.
3.1
Sensing element
A proprietary process is used to create a surface micro-machined accelerometer. The
technology allows to carry out suspended silicon structures which are attached to the substrate
in a few points called anchors and are free to move in the direction of the sensed acceleration.
To be compatible with the traditional packaging techniques a cap is placed on top of the
sensing element to avoid blocking the moving parts during the moulding phase of the plastic
encapsulation.
When an acceleration is applied to the sensor the proof mass displaces from its nominal
position, causing an imbalance in the capacitive half-bridge. This imbalance is measured using
charge integration in response to a voltage pulse applied to the sense capacitor.
At steady state the nominal value of the capacitors are few pF and when an acceleration is
applied the maximum variation of the capacitive load is up to 100fF.
3.2
IC Interface
In order to increase robustness and immunity against external disturbances the complete signal
processing chain uses a fully differential structure. The final stage converts the differential
signal into a single-ended one to be compatible with the external world.
The signals of the sensing element are multiplexed and fed into a low-noise capacitive charge
amplifier that implements a Correlated Double Sampling system (CDS) at its output to cancel
the offset and the 1/f noise. The output signal is de-multiplexed and transferred to three
different S&Hs, one for each channel and made available to the outside.
The low noise input amplifier operates at 200 kHz while the three S&Hs operate at a sampling
frequency of 66 kHz. This allows a large oversampling ratio, which leads to in-band noise
reduction and to an accurate output waveform.
All the analog parameters (Zero-g level, sensitivity and self-test) are ratiometric to the supply
voltage. Increasing or decreasing the supply voltage, the sensitivity and the offset will increase
or decrease almost linearly. The self test voltage change varies cubically with the supply
voltage.
3.3
Factory calibration
The IC interface is factory calibrated for sensitivity (So) and Zero-g level (Voff).
The trimming values are stored inside the device by a non volatile structure. Any time the
device is turned on, the trimming parameters are downloaded into the registers to be employed
during the normal operation. This allows the user to employ the device without further
calibration.
CD00068498
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LIS3L06AL
4 Application hints
4
Application hints
Figure 3.
LIS3L06AL Electrical Connection
Vdd
10µF
GND
100nF
Z
GND
ST
X
Optional
1
Vout Y
LIS3L06AL
Cload y
(top view)
GND
FS
Optional
Vout X
Y
Cload x
DIRECTION OF THE
DETECTABLE
ACCELERATIONS
Optional
Vout Z
Cload z
Digital signals
Power supply decoupling capacitors (100nF ceramic or polyester + 10µF Aluminum) should be
placed as near as possible to the device (common design practice).
The LIS3L06AL allows to band limit Voutx, Vouty and Voutz through the use of external
capacitors. The re-commended frequency range spans from DC up to 1.5 KHz. In particular,
capacitors must be added at output pins to implement low-pass filtering for antialiasing and
noise reduction. The equation for the cut-off frequency (ft) of the external filters is:
1
f t = --------------------------------------------------------------2π ⋅ R o ut ⋅ C loa d ( x, y, z )
Taking in account that the internal filtering resistor (Rout) has a nominal value equal to 110kΩ,
the equation for the external filter cut-off frequency may be simplified as follows:
1.45µF
ft = ----------------------------------- [ Hz ]
C loa d ( x, y, z )
The tolerance of the internal resistor can vary typically of ±20% within its nominal value of
110kΩ; thus the cut-off frequency will vary accordingly. A minimum capacitance of 1nF for
Cload(x, y, z) is required in any case.
10/17
CD00068498
LIS3L06AL
Table 5.
4.1
4 Application hints
Filter Capacitor Selection, Cload (x,y,z).
Cut-off frequency
Capacitor value
1 Hz
1500 nF
10 Hz
150 nF
20 Hz
68 nF
50 Hz
30 nF
100 Hz
15 nF
200 Hz
6.8 nF
500 Hz
3 nF
Soldering information
The LGA-8 package is compliant with the ECOPACK,RoHs and “Green” standard.It is qualified
for soldering heat resistance according to JEDEC J-STD-020C.
Pin 1 indicator is electrically connected to ST pin. Leave pin 1 indicator unconnected during
soldering.
Land pattern and soldering recommendations are available upon request.
4.2
Output Response vs Orientation
Figure 4.
Output response vs Orientation
X=1.65V(0g)
Y=0.99V (-1g)
Z=1.65V (0g)
Bottom
Top
X=1.65V (0g)
Y=1.65V (0g)
Z=0.99V (-1g)
Top
X=1.65V (0g)
Y=1.65V (0g)
Bottom Z=2.31V (+1g)
X=0.99V (-1g)
Y=1.65V (0g)
Z=1.65V (0g)
TOP VIEW
X=1.65V(0g)
Y=2.31V (+1g)
Z=1.65V (0g)
X=2.31V (+1g)
Y=1.65V (0g)
Z=1.65V (0g)
Earth’s Surface
Figure 4 refers to LIS3L06AL device powered at 3.3V.
CD00068498
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LIS3L06AL
5 Typical performance characteristics
5
Typical performance characteristics
5.1
Mechanical Characteristics at 25°C
Figure 5.
x-axis Zero-g level at 3.3V
Figure 6.
20
y-axis Zero-g level at 3.3V
25
18
20
14
Percent of parts (%)
Percent of parts (%)
16
12
10
8
6
15
10
4
5
2
0
1.55
Figure 7.
1.6
1.65
Zero−g Level (V)
1.7
0
1.55
1.75
z-axis Zero-g level at 3.3V
Figure 8.
20
1.6
1.65
Zero−g Level (V)
1.7
1.75
x-axis sensitivity at 3.3V
30
18
25
14
Percent of parts (%)
Percent of parts (%)
16
12
10
8
6
4
20
15
10
5
2
0
1.55
1.65
Zero−g Level (V)
1.7
0
0.62
1.75
y-axis sensitivity at 3.3V
25
25
20
20
15
10
5
0
0.62
12/17
0.63
0.64
0.65
0.66
0.67
Sensitivity (V/g)
0.68
0.69
0.7
0.69
0.7
Figure 10. z-axis sensitivity at 3.3V
Percent of parts (%)
Percent of parts (%)
Figure 9.
1.6
15
10
5
0.63
0.64
0.65
0.66
0.67
Sensitivity (V/g)
0.68
0.69
0
0.62
0.7
CD00068498
0.63
0.64
0.65
0.66
0.67
Sensitivity (V/g)
0.68
LIS3L06AL
5.2
5 Typical performance characteristics
Mechanical Characteristics derived from measurement in the
-40°C to +85°C temperature range
Figure 11. x-axis Zero-g level change Vs
temperature
Figure 12. y-axis Zero-g level change Vs
temperature
35
30
25
25
Percent of parts (%)
Percent of parts (%)
30
20
15
10
−0.5
0
0.5
Zero−g level change (mg/deg. C)
30
30
25
25
20
15
10
5
0
−2
−0.5
0
0.5
Zero−g level change (mg/deg. C)
1
Figure 14. x-axis sensitivity change Vs
temperature
Percent of parts (%)
Percent of parts (%)
10
0
−1
1
Figure 13. z-axis Zero-g level change Vs
temperature
20
15
10
5
−1.5
−1
−0.5
Zero−g level change (mg/deg. C)
0
−0.05 −0.04 −0.03 −0.02 −0.01
0
0.01
Sensitivity Change(%/deg. C)
0
Figure 15. y-axis sensitivity change Vs
temperature
40
40
35
35
30
30
25
20
15
20
15
10
5
5
0.02
0.03
25
10
0
−0.05 −0.04 −0.03 −0.02 −0.01
0
0.01
Sensitivity Change (%/deg. C)
0.02
Figure 16. z-axis sensitivity change Vs
temperature
Percent of parts (%)
Percent of parts (%)
15
5
5
0
−1
20
0.03
CD00068498
0
−0.05 −0.04 −0.03 −0.02 −0.01
0
0.01
Sensitivity Change (%/deg. C)
0.02
0.03
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LIS3L06AL
5 Typical performance characteristics
5.3
Electrical characteristics at 25°C
Figure 17. Noise density at 3.3V (x,y axis)
Figure 18. Noise density at 3.3V (z axis)
35
25
30
Percent of parts (%)
Percent of parts (%)
20
25
20
15
10
15
10
5
5
0
18
20
22
24
26
28
Noise density (ug/sqrt(Hz))
30
0
20
32
Figure 19. Current Consumption at 3.3V
30
Percent of parts (%)
25
20
15
10
5
0
0.4
14/17
0.6
0.8
1
1.2
current consumption (mA)
1.4
1.6
CD00068498
30
40
50
60
Noise density (ug/sqrt(Hz))
70
80
LIS3L06AL
6
6 Package Information
Package Information
In order to meet environmental requirements, ST offers these devices in ECOPACK® packages.
These packages have a Lead-free second level interconnect. The category of second Level
Interconnect is marked on the package and on the inner box label, in compliance with JEDEC
Standard JESD97. The maximum ratings related to soldering conditions are also marked on
the inner box label.
ECOPACK is an ST trademark. ECOPACK specifications are available at: www.st.com.
Figure 20. LGA-8 Mechanical Data & Package Dimensions
DIM.
A1
mm
TYP.
MAX.
1.460
1.520
1.600 0.0574 0.0598 0.0629
0.180
0.220
A2
A3
inch
MIN.
MIN.
TYP.
1.330
0.0523
0.260
0.007 0.0086 0.0102
D1
4.850
5.000
5.150
0.190 0.1968 0.2027
E1
4.850
5.000
5.150
0.190 0.1968 0.2027
L
1.270
L1
2.540
0.1
M
1.225
0.0482
M1
0.875
0.900
0.05
0.925 0.0344 0.0354 0.0364
N
2.000
0.0787
N1
1.225
0.0482
N2
1.170
P1
1.300
P2
0.740
T1
0.046
1.350
1.400 0.0511 0.0531 0.0551
0.790
0.840 0.0291 0.0311 0.033
1.170
T2
0.615
R
1.200
0.640
OUTLINE AND
MECHANICAL DATA
MAX.
0.046
0.665 0.0242 0.0251 0.0261
1.600 0.0472
0.0629
h
0.150
0.0059
k
0.050
0.0019
j
0.100
0.0039
LGA8 (5x5x1.6mm)
Land Grid Array Package
E1
A3
E
A
M
K
M1
C
T1
K
(4x)
8
1
6
2
D
N1
T2
= =
L1
D1
L
7
N
R
D
3
5
K D
4
E
B
N2
K E
A2
A1
P1
h
Detail A
CA B
seating plane
K
P2
DETAIL A
h
j
METAL PAD
C A B
C A B
SOLDER MASK
OPENING
j
C A B
7669231 C
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LIS3L06AL
7 Revision history
7
16/17
Revision history
Date
Revision
28-Sep-2005
1
Changes
Initial release.
CD00068498
LIS3L06AL
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