MEMS Differential Pressure Sensor D6F-PH A Compact, High-accuracy Differential Pressure Sensor with Superior Resistance to Environments. • High accuracy of ±3% R.D. • Linearized and temperature compensated • Digital output (I2C communication) • High flow impedance to reduce the influence of bypass configuration • RoHS Compliant Ordering Information Measurement Range 0 to 250 Pa (0 to 1 in. H2O) -50 to +50 Pa (± 0.2 in. H2O) -500 to +500 Pa (± 2 in. H2O) Applicable Fluid Air Model D6F-PH0025AD1 D6F-PH0505AD3 D6F-PH5050AD3 Note: The Sensor can be calibrated for different gas types. Consult Omron. Characteristics Model D6F-PH0025AD1 D6F-PH0505AD3 D6F-PH5050AD3 ± 50 Pa ± 500 Pa Measurement Range (See Note 1) 0 to 250 Pa Calibration Gas (See Note 2) Air Port Type Barb joint, Maximum outside diameter: 4.9mm Power Supply 2.3 to 3.6 VDC Current Consumption 6 mA max. with no load and VCC of 3.3 V, GND=0 VDC, 25°C Resolution 12 bit Zero Point Tolerance (See Note 4) ± 0.2 Pa Span Tolerance (See Note 4) ± 3% R.D. Temperature Compensation Yes Span shift due to Temperature Variation ± 0.5% R.D. per 10°C Response Time 25 ms typical at 12 bit resolution (50 ms max). The processing time is 6 ms typical at 12 bit resolution. Gas Flow through Sensor (See Note 3) ≤ 63 mL/min ≤ 23 mL/min ≤ 100 mL/min Interface I2C Case Material PPS Degree of Protection IEC IP40 Withstand Pressure 10 kPa Operating Temperature -20 to 80°C (with no condensation or icing) Operating Humidity 35 to 85% RH (with no condensation or icing) Storage Temperature -40 to 80°C (with no condensation or icing) Storage Humidity 35 to 85% RH (with no condensation or icing) Insulation Resistance Between Sensor outer cover and lead terminals: 20 MΩ min. (at 500 VDC) Dielectric Strength Between Sensor outer cover and lead terminals: 500 VAC, 50/60 Hz min. for 1 min (leakage current: 1 mA max.) Weight 5.2 g Note: 1. At standard atmospheric pressure (1013.25 hPa). 2. Dry gas must not contain large particles, e.g., dust, oil or mist. 3. Type D6F-PH is based on thermal flow principle. Air flow is needed to measure the differential pressure. Typical characteristic of air flow by differential pressure is shown in the “Engineering Data” section. 4. The zero point tolerance and span tolerance are independent uncertainties and add according to the principles of error propagation. MEMS Differential Pressure Sensor D6F-PH 1 Engineering Data ■ Output Characteristics D6F-PH0025AD1 70000 Output (count) 60000 50000 Differential pressure (Pa) 0 50 100 150 200 250 Output (Hex) 1024 (0x0400) 13024 (0x32E0) 25024 (0x61C0) 37024 (0x90A0) 49024 (0xBF80) 61024 (0xEE60) 40000 30000 Differential pressure conversion formula: DP = (Op - 1024) / 60000 x 250 DP = Differential pressure, OP = Output 20000 10000 0 0 50 100 150 200 Differential pressure (Pa) 250 D6F-PH0505AD3 70000 Output (count) 60000 50000 Differential pressure (Pa) -50 -30 -10 0 10 30 50 Output (Hex) 1024 (0x0400) 13024 (0x32E0) 25024 (0x61C0) 31024 (0x7930) 37024 (0x90A0) 49024 (0xBF80) 61024 (0xEE60) 40000 30000 Differential pressure conversion formula: DP = (Op - 1024) / 60000 x 100 - 50 DP = Differential pressure, OP = Output 20000 10000 0 -50 -30 -10 10 30 Differential pressure (Pa) 50 D6F-PH5050AD3 70000 Output (count) 60000 50000 Differential pressure (Pa) -500 -300 -100 0 100 300 500 Output (Hex) 1024 (0x0400) 11024 (0x2B10) 13024 (0x32E0) 16024 (0x3E98) 21024 (0x5220) 31024 (0x7930) 61024 (0xEE60) 40000 30000 Differential pressure conversion formula: DP = (Op - 1024) / 60000 x 1000 - 500 DP = Differential pressure, OP = Output 20000 10000 0 -500 -300 -100 100 300 Differential pressure (Pa) 500 Note: Measurement conditions: Power supply voltage of 3.3 ± 0.1 VDC, ambient temperature of 25 ± 5°C, and ambient humidity of 25% to 75%. Flow Rate (sccm) Relation Between Pressure and Flow Rate Electrical Connection VCC 50 40 30 20 10 0 -10 -20 -30 -40 -50 Sensor (slave) pull-up resistor 2.2kΩ SDA Master GND VCC 3.3V SCL -600 -400 -200 0 200 400 600 pull-up resistor 2.2kΩ Pressure (Pa) VCC ■ Communication Method I2C Slave / Address: HEX: 0x6C BIN: 110_1100 (7bit) Fast Mode 400kHz Master/Slave Speed mode Signals SCL SDA 2 MEMS Differential Pressure Sensor Serial Clock Data Signal D6F-PH Dimensions (unit: mm) 1.2 3.1 4:SCL 3 7.2 4 2 1 Hi --- pressure --- Low D6F-PH@@@@AD@ ABCDEF OMRON 3:VCC 2:GND 22 1:SDA 4 2- 4.9 2- 4 2-through hole 2 10 6.5 12 10.5 2- 3.7 4 5 8.5 2-R2 Pin header : 830-80-004-30-001101 4- 0.48 4-2 18 7.05 Low-pressure side 3.37 4-through hole 0.8 5.25 High-pressure side 16.5 16.5 26 20 10 2-through hole 2.2 3-2 2-through hole 2 Recommendation size for pin header installation (tolerances : ±0.1) Precautions !WARNING The D6F is built for use with general-purpose devices. In cases such as those described below, where safety is required, implement measures to ensure the safety of the system and all devices, such as fail-safe designs, redundancy designs, and regular maintenance. !CAUTION Make sure that the power to all equipment is turned OFF before you install the Sensor. Installing the Sensor while the power supply is ON may result in electrical shock or abnormal operation. • Safety devices for ensuring safety for persons • Transportation equipment control and Automotive control (such as applications to stop operation) • Aviation and space equipment • Nuclear power equipment Do not use the D6F for applications in which D6F operation would directly affect human life. MEMS Differential Pressure Sensor D6F-PH 3 ■ Correct Use Fluids, Tubes, and Sensor Installation Operating Environment All Models Do not use the Sensor in the following locations: (1) Use clean fluids. Dust and mist can affect the characteristics of the Sensor or damage the Sensor. Install a filter and mist separator on the upstream tube. (Not required for the D6F-W@A1, D6F-P and D6F-PH.) • Locations directly subject to heat radiated from heating equipment (2) Do not use combustible gases (e.g., hydrogen), corrosive gases (e.g., chlorine, sulfur, acidic, or alkali gas), or other non-approved fluids. They may damage the Sensor. • Locations subject to intense temperature changes (3) The performance specifications that are given for the D6F do not apply if any fluids other than the specified applicable fluid are used. • Locations subject to excessive vibration or shock (4) Foreign matter in the tubes that are connected to the Sensor may damage the Sensor. Prevent any foreign matter from entering the tubes after the Sensor is removed from its packaging. • Locations subject to water or oil • Locations subject to direct sunlight • Locations subject to icing or condensation Countermeasures against Noise Noise may make it impossible to obtain correct measurements. Consider the following countermeasures. (5) Attach the tubes so that fluid flows only in the direction designated by the “Hi/Low” pressure markings on the Sensor. Correct measurements cannot be obtained if the fluid flows in the wrong direction. • Allow as much space as possible between the Sensor and devices that generate high frequencies (such as high-frequency welders and high-frequency sewing machines) or surges. (6) We recommend that you install the tubes horizontally. If the tubes are not installed horizontally, an error of ±1% FS or higher may result. (This does not apply to the D6F-03A3.) • Attach surge absorbers or noise filters to noise-generating devices that are near the Sensor (in particular, equipment with inductance, such as motors, transformers, solenoids, and magnetic coils). (7) Install the Sensor on a flat surface. Incorrect installation may damage the Sensor and make it impossible to obtain correct measurements. (It also helps to separate pipes and ducts, and to use shielded cables.) (8) After the Sensor is installed, check to confirm that it operates correctly. Power Supply (9) Do not drop the Sensor, remove the cover, or attempt to disassemble the Sensor in any way. • Do not directly solder power supply leads to the connector terminals. Use only the appropriate connectors. • Wire with the correct terminal names and polarities. Incorrect wiring will cause failure of internal components. • When using a commercially available switching regulator, ground the FG (frame ground) and G (ground) terminals. D6F-PH0025AD1, D6F-PH0505AD3, and D6F-PH5050AD3 (1) Depending on the ambient environment and installation location, dust, dirt, and other foreign matter may come inside the Sensor and block a part or all of the flow path or accumulate on internal components. This may result in the Sensor not being able to perform to the specifications given above. Always perform a pre-evaluation on your actual equipment and be aware of the possible problems that may occur before you use the Sensor with the actual equipment. (2) Attach all tubes so that the fluid flows only in the direction from the positive side (+) to the negative side (-). RoHS Directive The RoHS mark is displayed on the packing of products for which the six substances banned by the RoHS Directive have been abolished (both in processing and in the electronic components mounted to the PCBs). *RoHS marking may be terminated if it is later determined that parts that were previously treated as RoHS compliant are not compliant due to circumstances at the supplier of the parts. (3) For PCB-mounting, perform terminal soldering only after the Sensor is secured into place on the PCB. (4) Use M1.8 panhead screws or equivalent tapping screws to mount the Sensor, and tighten the screws to a maximum torque of 0.36 N·m. (5) The sensor output is minimally affected with the length of a tube. The error is less than 1% with a tube (ID:4mm) length up to 800mm. RoHS Compliance Criteria The following standards are used to determine RoHS compliance for the six banned substances. (Items to which the RoHS Directive is not applicable are not given.) • Lead: 1,000 ppm max. (6) Soldering • Hexavalent chromium: 1,000 ppm max. • Please solder properly • Mercury: 1,000 ppm max. • Do not use flow soldering • PBB: 1,000 ppm max. • Please solder after fixed on the circuit board by screw • Cadmium: 100 ppm max. • Please use a soldering iron Soldering condition • PBDE: 1,000 ppm max. Pressure: Max.100gf Temperature: 350 °C Time: Max.5s Gas Density and Atmospheric Pressure Change of gas density affects the sensor output. (7) About handling • The sensor is a precision device, and if large shock and load is applied, it may cause a failure or characteristic change. Please do not use the sensor which has experienced excessive shock to the terminals, a damaged cover, or has fallen. • The sensor shall only be handled in electrostatic discharge protected areas (EPA) under protected and controlled conditions. 4 MEMS Differential Pressure Sensor Change of atmospheric pressure is compensated by the following formula: Dpeff = Dp x (Pstd / Pamb) Dpeff: Effective differential pressure Dp: Differential pressure of the sensor output Pstd: Standard atmospheric pressure (1,013.25 hPa) Pamb: Actual ambient atmospheric pressure (hPa) D6F-PH MEMO MEMS Differential Pressure Sensor D6F-PH 5 All sales are subject to Omron Electronic Components LLC standard terms and conditions of sale, which can be found at http://www.components.omron.com/components/web/webfiles.nsf/sales_terms.html ALL DIMENSIONS SHOWN ARE IN MILLIMETERS. To convert millimeters into inches, multiply by 0.03937. To convert grams into ounces, multiply by 0.03527. OMRON ON-LINE OMRON ELECTRONIC COMPONENTS LLC Global - http://www.omron.com USA - http://www.components.omron.com 55 E. Commerce Drive, Suite B Schaumburg, IL 60173 847-882-2288 Cat. No. D6F-PH_E_ver.1 6 05/13 Specifications subject to change without notice MEMS Differential Pressure Sensor D6F-PH Printed in USA