MLX90210 Pressure Sensor IC Features and Benefits 0 -1.0 Bar Range Compact Design High Long Term Stability Low Cost Applications Medical Instrumentation (Blood Pressure) Consumer Appliances Sports Equipment Pressure Difference and Flow monitoring Ordering Information Part No. MLX90210 MLX90210 Temperature Suffix C C Functional Diagram 1 VEXC+ 2 VOUT+ 15 VEXC- Package CA UD Temperature Range -0C to 70C Commercial -0C to 70C Commercial Description The MLX90210 is a discrete micromachined pressure sensor IC suitable for pressure ranges between 0 to 1.0 Bar. The pressure medium must be dry and non-corrosive, such as air. The 90210 is packaged in a plastic/ceramic package, (CA) or can be ordered as unpackaged die (UD) The principal of the circuit is a piezoresistive bridge which is realized in silicon through a special micromachine process. As pressure is applied to the bridge, a differential voltage change is seen across the VOUT pins, while a bias voltage is applied to the VEXC pins. The MLX90210 is a versatile pressure sensor solution which can be directly interfaced with other Melexis ICs such as the MLX90308, which provides amplification, signal conditioning as well as the bias current to supply the sensor itself. 16 VOUT- MLX902xx Name of Sensor MLX90210 Pressure Sensor IC Rev Y.X 1 Page 22/Aug/98 Rev 1.0 Page 1 12/January/01 MLX90210 Pressure Sensor IC MLX90210 Electrical Specifications DC Operating Parameters TA = 25C, VDD = 5V (note 3), Pressure = 1.0 Bar full scale. Parameter Min Typ Excitation voltage Max Units 0 5 12 V Zero Pressure Offset VOFF -30 0 +30 mV Sensitivity S 14 22 30 mV/V/bar TC of the Sensitivity (1) TC S -0.17 -0.001 -0.26 °C -1 Bridge Resistance RBR 12 14 16 kOhm 2 Bar Burst pressure Operating Temp 0 70 °C Storage Temp (2) -55 150 °C MLX90210 Mechanical Dimensions (4) Membrane Size 0.81mm X 0.81mm Chip Thickness 0.61mm Chip Size 1.90mm X 1.90mm Notes: 1) 2) 3) 4) Temperature range refers to operation and deposit in an inert environment Temperature range refers to operation and depos it in an inert environment To prevent measurement errors, measure above 3V VDD in impulse mode Tolerance of 10% unless otherwise specified. MLX90210 Pressure Sensor IC Page 2 Rev 1.0 12/January/01 MLX90210 Pressure Sensor IC “CA” Package Dimensions Top view Bottom view 0.170 0.300 0.030 0.250 sq 2 0.050 diam 0.030 diam 0.08 1 8 16 9 0.075 15 diam 0.028 0.060 0.300 0.085 0.340 Note: 1) All dimensions in inches. 0.025 0.122 Cross section For the latest version of this document, Go to our website at: www.melexis.com Or for additional information contact Melexis Direct: Melexis France Tour Arago, 5 rue Bellini, 92806 Puteaux-La-Défense, France. Phone: +33 1 47 78 11 34 Fax: +33 1 47 78 06 35 E-mail: [email protected] Italy USA Melexis Inc. 41 Locke Road, Concord, NH 03301 Phone: +1 603 223 2362 E-mail: sales_usa@melexi s.com France Fax: +1 603 223 9614 United Kingdom Silicon Concepts PCB Lynchborough Road, Hampshire GU30 7SB, United Kingdom Phone: +44 1428 751 617 Fax: +44 1428 751 603 E-mail: [email protected] Germany Am Seestern 8, 40547 Düsseldorf, Germany Phone: +49 211 5360212 Fax: +49 211 5360250 E-mail: [email protected] MLX902xx Name of Sensor MLX90210 Pressure Sensor IC Dimacred IRL Via Papa Giovanni XXIII no. 25, 20046 Biassono, Italy Phone: +39 039 249 4856 Fax: +39 039 491773 E-mail: [email protected] Japan Satori Electric Co., LTD 1-14-10 Shiba, Minato-Ku, Tokyo, Japan Phone: +81 3 3452 7171 Fax: +81 3 3769 2197 E-mail: [email protected] Taiwan Beechwood Int’l Taiwan Co. Room 8, 17F, No. 189, Taipei, Taiwan Phone: +886 2 2739 3322 E-mail: [email protected] Rev Y.X 3 Page Fax: +886 2 2739 3090 22/Aug/98 Rev 1.0 Page 3 12/January/01