® Tylan FC260/FM360 Mass Flow Controllers and Flowmeters Designed to meet the exacting requirements of semiconductor processes and equipment, the Tylan FC260 and Tylan FM360 models are premium quality elastomer-sealed mass flow controllers and meter. These MFCs combine proven components and techniques with innovative concepts in both mechanical and electrical design. Excellent Performance Tylan FC260 qnd FM360 mass flow controllers and flowmeters accurately and reliably measure and control flow rates of gases up to 200 standard liters per minute without the need for pressure or temperature corrections. Product Features Attitude Insensitive Flow Sensor Product Benefits Eliminates air convection currents inside its case without sacrificing response speed. Can be mounted in any position without requiring zero adjustment. Superior Bypass Design to Operate under Laminar Flow Conditions Assures accuracy over the entire range of mass flow controller. Easily removed for range changes. Solid State Valve Assembly Constructed of Type 316 Stainless Steel Completely compatible with reactive and corrosive materials. Laminar Flow Eliminates the need for complex, interactive multi-point linearization during calibration Design eliminates internal dead volumes. P r o d u c t Process Values P r o f i l e Low cost mass flow controllers with long-term repeatability and performance Tylan FC260/FM360 MFCs and Flowmeters - Ordering Information FRONT VIEW SIDE VIEW H H1 S 150 PSIG MAX L L1 L2 (face of fittings) L3 0.164”-32 UNC-2B 0.25” DEEP, 2 PLACES W BOTTOM VIEW W1 FC-260/FM-360 Fittings H 2S in mm 4S in mm 4VCO in mm 4V in mm L5 L4 5.38 136.7 H1 4.00 101.6 W 1.00 25.4 W1 0.72 18.3 W2 0.14 3.56 W2 L 3.00 76.2 L1 L2 L3 3.82 97.0 4.38 111.3 4.94 125.5 3.82 97.0 4.44 112.7 5.03 127.8 - 4.55 115.6 - - 4.88 123.9 - L4 L5 S 2.72 69.1 0.14 3.56 0.50 12.7 L4 L5 S 3.55 90.1 0.35 8.9 0.575 14.6 L4 L5 S 4.00 101.6 0.62 15.75 0.585 14.8 FC-261/FM-361 L1 L2 L3 4S Fittings in mm H 5.16 131.0 5.78 146.8 6.36 161.5 4V in mm - 6.19 157.2 - 4VCO in mm - 5.86 148.8 - 6S in mm 5.17 131.3 5.90 149.8 6.48 164.5 6V in mm - 6.50 165.1 - 5.63 143.0 H1 4.25 108.0 W 1.25 31.8 W1 0.97 24.6 W2 0.14 3.56 L 4.25 108.0 FC-262/FM-362 Fittings H 4V in mm 6S in mm 6V in mm 6VCO in mm 7.13 181.1 H1 5.75 146.1 W 1.50 38.1 1.00 25.4 W2 0.25 6.35 L 5.255 133.5 L1 L2 L3 6.25 158.8 6.87 174.6 7.45 189.3 6.27 159.3 - 2S = 1/8-inch Swagelok® 6S = 3/8-inch Swagelok 4S = 1/4-inch Swagelok 6V = 3/8-inch VCR 4V = 1/4-inch VCR® 6VCO = 3/8-inch VCO 4VCO = 1/4-inch VCO® 2 W1 7.57 192.3 7.10 180.2 7.59 192.7 - Tylan FC260/FM360 MFCs and Flowmeters - Ordering Information Ordering Information Performance Gases Any gas with a known conversion factor Step Response Time 6 seconds (dependent on step request and conditions) Accuracy ± 1% of full scale ± 2% of full scale for the FC262 Linearity 0.5% of full scale Repeatability ± 0.2% of full scale Attitude Sensitivity Not sensitive Control Range 50:1 (100% - 2%) FC262 50:2 (100% - 4%) Mechanical Materials Type 316 Stainless Steel, Viton®, Kalrez®, or Neoprene Seals depending on gas application Leak Integrity 1 x 10-9 atm cc/sec He Full Scale Flow* Gas Model Flow Controllers Fitting FC260 *See specifications table for 2S = 1/8” Swagelok FC261 model-specific limits. 4S = 1/4” Swagelok FC262 Flow Meters 4VC0 = 1/4” VCO 4V = 1/4” VCR FM360 6S = 3/8” Swagelok FM361 6VC0 = 3/8” VCO FM362 6V = 3/8” VCR Electrical Analog Output 0 - 5 VDC (5 volts = full scale) Input Power Flow Controllers: + 15 VDC ± 4%, 25 mA max - 15 VDC ± 4%, 180 mA max Flow Meters: + 15 VDC ± 4%, 25 mA max - 15 VDC ± 4%, 25 mA max Power Consumption Flow Controllers: 4.0 watts maximum Flow Meters: 1.5 watts maximum Command Signal Flow Controllers: 0 - 5 VDC (2.5 k ohms max source impedance) 40-20 mA optional (contact Mykrolis) Minimum Load Resistance 2000 ohms Environmental Temperature Range 5 - 43° C (40 - 110° F) Temperature Coefficient ± 0.1%/° C Pressure Coefficient ± 0.007%/psi Note: In accordance with SEMI Standard E12-91, Standard Temperature is 0° C and Standard Pressure is 760 mm Hg (14.7 psia). Flow Controllers Model FC260 FC261 Full Scale Range 10 sccm - 5 slm 6 - 20 slm Pressure Drop 10 - 40 psid Gas Pressure Flow Meters FC262 FC360 30 - 200 slm 10 sccm - 5 slm 15 - 40 psid 20 - 40 psid FC362 6 - 20 slm 30 - 200 slm 0.5 psid at full scale flow 40 psig optimum 150 psid max 30 psig optimum 150 psid max FC361 500 psid max Gas Fittings 1/8” or 1/4” 1/4” 1/4” or 3/8” 1/8” or 1/4” 1/4” 1/4” or 3/8” Weight 500 gm (1.1 lb) 954 gm (2.1 lb) 2.77 kg (5.0 lb) 454 gm (1.0 lb) 907 gm (2.0 lb) 2.15 kg (4.75 lb) Consult our applications specialists with any questions. Tylan is a registered trademark of Mykrolis Corporation. Mykrolis and the Mykrolis logo are trademarks of Mykrolis Corporation. Kalrez and Viton are trademarks of DuPont Dow Elastomers, L.L.C. Swagelok is a trademark of Crawford Fitting Company. VCO and VCR are trademarks of Cajon Company. Legal/Trademarks: www.mykrolis.com/corporate.nsf/docs/legal Worldwide Offices: www.mykrolis.com/corporate.nsf/docs/worldwide UNITED STATES OF AMERICA (+1) 978-436-6500 Billerica, MA (+1) 972-359-4000 Allen, TX 3 EUROPE (+33) 4-76-35-73-50 ASIA (+65) 6 745-2422 Lit. No. PF1062ENUS Rev. A 18 April 2003 Printed in the U.S.A. © 1998-2003 Mykrolis Corporation. All rights reserved. JAPAN (+81) 3-5442-9718 Tokyo (+81) 92-471-8133 Kyushu (+81) 6-6390-0594 Osaka