±150°/s Single Chip Yaw Rate Gyro with Signal Conditioning ADXRS150 FEATURES GENERAL DESCRIPTION Complete rate gyroscope on a single chip Z-axis (yaw rate) response High vibration rejection over wide frequency 0.05°/s/√Hz noise 2000 g powered shock operation Self-test on digital command Temperature sensor output Precision voltage reference output Absolute rate output for precision applications 5 V single-supply operation Ultrasmall and light (< 0.15 cc, < 0.5 gram) The ADXRS150 is a complete angular rate sensor (gyroscope) that uses Analog Devices’ surface-micromachining process to make a functionally complete and low cost angular rate sensor integrated with all of the required electronics on one chip. The manufacturing technique for this device is the same high volume BIMOS process used for high reliability automotive airbag accelerometers. The output signal, RATEOUT (1B, 2A), is a voltage proportional to the angular rate about the axis normal to the top surface of the package (see Figure 2). A single external resistor can be used to lower the scale factor. An external capacitor is used to set the bandwidth. Other external capacitors are required for operation (see Figure 21). APPLICATIONS GPS navigation systems Vehicle stability control Inertial measurement units Guidance and control Platform stabilization A precision reference and a temperature output are also provided for compensation techniques. Two digital self-test inputs electromechanically excite the sensor to test the operation of both sensors and the signal conditioning circuits. The ADXRS150 is available in a 7 mm × 7 mm × 3 mm BGA surface-mount package. FUNCTIONAL BLOCK DIAGRAM + 5V – 100nF 3A ST1 5G 4G SELF TEST SUMJ 1C CMID AGND 2G 1F AVCC ST2 COUT 100nF 1D ROUT CORIOLIS SIGNAL CHANNEL RSEN2 RSEN1 180kΩ 1% π DEMOD RATE SENSOR ≈9kΩ ±35% ≈9kΩ ±35% 1B 2A RESONATOR LOOP 1E 2.5V REF RATEOUT 2.5V PTAT 3G TEMP 12V CHARGE PUMP/REG. PDD 4A CP2 ADXRS150 5A 22nF 7E 6G 7F PGND CP1 6A 7D 7C 7B CP4 CP3 CP5 47nF 100nF 22nF Figure 1. Rev. A Information furnished by Analog Devices is believed to be accurate and reliable. However, no responsibility is assumed by Analog Devices for its use, nor for any infringements of patents or other rights of third parties that may result from its use. Specifications subject to change without notice. No license is granted by implication or otherwise under any patent or patent rights of Analog Devices. Trademarks and registered trademarks are the property of their respective companies. One Technology Way, P.O. Box 9106, Norwood, MA 02062-9106, U.S.A. Tel: 781.329.4700 www.analog.com Fax: 781.326.8703 © 2003 Analog Devices, Inc. All rights reserved. ADXRS150 TABLE OF CONTENTS ADXRS150—Specifications ............................................................ 3 Temperature Output and Calibration.........................................9 Absolute Maximum Ratings............................................................ 4 Using the ADXRS150 with a Supply-Ratiometric ADC ..........9 Rate Sensitive Axis........................................................................ 4 Null Adjustment ............................................................................9 Typical Performance Characteristics ............................................. 5 Self-Test Function .........................................................................9 Theory of Operation ........................................................................ 8 Continuous Self-Test.....................................................................9 Supply and Common Considerations ....................................... 8 Acceleration Sensitivity ............................................................. 10 Setting Bandwidth ........................................................................ 8 Pin Configurations And Functional Descriptions ..................... 11 Increasing Measurement Range ................................................. 9 Outline Dimensions ....................................................................... 12 REVISION HISTORY Revision A 1/03—Data Sheet Changed from REV. 0 to REV. A Edit to Figure 5.................................................................................. 5 Rev. A | Page 2 of 12 ADXRS150 ADXRS150—SPECIFICATIONS Table 1. @TA = 25°C, VS = 5 V, Bandwidth = 80 Hz (COUT = 0.01 µF), Angular Rate = 0°/s, Unless Otherwise Noted. Parameter SENSITIVITY Dynamic Range2 Initial Over Temperature3 Nonlinearity Voltage Sensitivity NULL Initial Null Null Drift over Temperature3 Turn-On Time Linear Acceleration Effect Voltage Sensitivity NOISE PERFORMANCE Rate Noise Density FREQUENCY RESPONSE 3 db Bandwidth4 (User Selectable) Sensor Resonant Frequency SELF TEST ST1 RATEOUT Response5 ST2 RATEOUT Response5 Logic “1” Input Voltage Logic “0” Input Voltage Input Impedance TEMPERATURE SENSOR VOUT at 298°K Max Current Load on Pin Scale Factor OUTPUT DRIVE CAPABILITY Output Voltage Swing Capacitive Load Drive 2.5 V REFERENCE Voltage Value Load Drive to Ground Load Regulation Power Supply Rejection Temperature Drift3 POWER SUPPLY Operating Voltage Range Quiescent Supply Current TEMPERATURE RANGE Specified Performance Grade A Conditions Clockwise Rotation Is Positive Output Full-Scale Range over Specifications Range @25°C VCC = 4.75 V to 5.25 V Best Fit Straight Line VCC = 4.75 V to 5.25 V Min1 ±150 11.25 11.25 ADXRS150ABG Typ Max1 12.5 13.75 13.75 0.1 0.7 2.50 Unit °/s mV/°/s mV/°/s % of FS %/V Delta from 25°C Power on to ±½°/s of Final Any Axis VCC = 4.75 V to 5.25 V 35 0.2 1 V mV ms °/s/g °/s/V @25°C 0.05 °/s/√Hz 22 nF as Comp Cap (See Applications section) 40 14 Hz kHz ST1 Pin from Logic “0” to “1,” –40°C to +85°C ST2 Pin from Logic “0” to “1,” –40°C to +85°C Standard High Logic Level Definition Standard Low Logic Level Definition To Common ±300 –400 +400 3.3 –660 +660 –1000 +1000 1.7 50 2.50 Source to Common Proportional to Absolute Temperature IOUT = ±100 µA 50 8.4 0.25 1000 V µA mV/°K VS – 0.25 V pF 2.45 2.5 200 5.0 1.0 5.0 2.55 V µA mV/mA mV/V mV 4.75 5.00 6.0 5.25 8.0 V mA +85 °C Source 0 < IOUT < 200 µA 4.75 VS to 5.25 VS Delta from 25°C –40 1 mV mV V V kΩ All min and max specifications are guaranteed. Typical specifications are not tested or guaranteed. Dynamic range is the maximum full-scale measurement range possible, including output swing range, initial offset, sensitivity, offset drift, and sensitivity drift at 5 V supplies. 3 Specification refers to the maximum extent of this parameter as a worst-case value at TMIN or TMAX. 4 Frequency at which response is 3 dB down from dc response with specified compensation capacitor value. Internal pole forming resistor is 180 kΩ. See Setting Bandwidth section. 5 Self-test response varies with temperature. Refer to the Self-Test Function section for details. 2 Rev. A | Page 3 of 12 ADXRS150 ABSOLUTE MAXIMUM RATINGS Table 2. ADXRS150 Absolute Maximum Ratings Parameter Acceleration (Any Axis, Unpowered, 0.5 ms) Acceleration (Any Axis, Powered, 0.5 ms) +VS Output Short-Circuit Duration (Any Pin to Common) Operating Temperature Range Storage Temperature Rate Sensitive Axis Rating 2000 g 2000 g –0.3 V to +6.0 V This is a Z-axis rate-sensing device that is also called a yaw-rate sensing device. It produces a positive going output voltage for clockwise rotation about the axis normal to the package top, i.e., clockwise when looking down at the package lid. Indefininte –55°C to +125°C –65°C to +150°C Stresses above those listed under Absolute Maximum Ratings may cause permanent damage to the device. This is a stress rating only and functional operation of the device at these or any other condition s above those indicated in the operational section of this specification is not implied. Exposure to absolute maximum rating conditions for extended periods may affect device reliability. Applications requiring more than 200 cycles to MIL-STD-883 Method 1010 Condition B (–55°C to +125°C) require underfill or other means to achieve this requirement. Drops onto hard surfaces can cause shocks of greater than 2000 g and exceed the absolute maximum rating of the device. Care should be exercised in handling to avoid damage. Rev. A | Page 4 of 12 RATEOUT RATE AXIS VCC = 5V LONGITUDINAL AXIS 4.75V 2.5V 7 A1 ABCDEFG LATERAL AXIS RATE IN 1 0.25V GND Figure 2. RATEOUT Signal Increases with Clockwise Rotation ADXRS150 TYPICAL PERFORMANCE CHARACTERISTICS NO PRIOR WARMUP, 0.6Hz SAMPLING 4.5 2.570 4.0 2.565 3.5 2.560 RATEOUT – V RATEOUT – V 3.0 2.5 2.0 1.5 1.0 2.555 2.550 2.545 0.5 0.0 –0.05 2.540 0.00 0.05 0.10 TIME – Sec 0.15 0.20 0.25 0 Figure 3. Rate Sensing Start-Up Time 90 TIME – Sec 150 120 180 Figure 6. Null Settling Time 0.07 2.570 0.06 2.565 0.05 2.560 0.04 2.555 °/s RATEOUT – V 60 30 0.03 2.550 0.02 2.545 0.01 0 2.540 0 600 1200 1800 TIME – Sec 2400 3000 10 TIME – Sec 1 3600 Figure 4. Null Stability for 1 Hour 100 Figure 7. Root Allan Variance vs. Averaging Time 2.5040 3.4 3.2 2.5035 3.0 V2.5 – V VTEMP – V 2.5030 2.8 2.6 2.4 2.5025 2.5020 2.2 2.5015 2.0 2.5010 1.8 –55 –30 –5 45 20 TEMPERATURE – °C 70 –40 –30 –20 –10 95 0 10 20 30 40 TEMPERATURE – °C 50 60 70 Figure 8. 2.5 V Voltage Reference vs. Temperature Figure 5. Temperature Sensor Output Rev. A | Page 5 of 12 80 ADXRS150 ADXRS150 @ BW = 40 Hz, Typical Vibration Characteristics, 10 g Flat Band, 20 Hz to 2 kHz PACKAGE LATERAL AXIS (0.5s Average) 2.500 2.490 2.490 RATEOUT – V RATEOUT – V PACKAGE LATERAL AXIS (1/60 SEC SAMPLE RATE) 2.500 2.480 2.470 2.460 0g 2.480 10g 2.470 2.460 2.450 2.450 0 5 TIME – Sec 10 5 TIME – Sec 0 Figure 9. 10 g Random Vibration in Package-Lateral Axis Orientation Figure 12. 10 g Random Vibration in Package-Lateral Axis Orientation PACKAGE LONGITUDINAL AXIS (1/60 SEC SAMPLING RATE) PACKAGE LONGITUDINAL AXIS (0.5s Average) 2.500 2.500 2.490 2.490 RATEOUT – V RATEOUT – V 10 2.480 2.470 2.460 10g 2.480 0g 2.470 2.460 2.450 2.450 0 5 TIME – Sec 10 5 TIME – Sec 0 Figure 10. 10 g Random Vibration in Package-Longitudinal Axis Orientation 10 Figure 13. 10 g Random Vibration in Package-Longitudinal Axis Orientation RATE AXIS (1/60 SEC SAMPLING RATE) RATE AXIS (0.5s Average) 2.500 2.500 2.490 2.490 RATEOUT – V RATEOUT – V 10g 2.480 2.470 2.460 2.480 0g 2.470 2.460 2.450 0 5 TIME – Sec 10 2.450 0 Figure 11. 10 g Random Vibration in Rate Axis Orientation 5 TIME – Sec 10 Figure 14. 10 g Random Vibration in Rate Axis Orientation Rev. A | Page 6 of 12 ADXRS150 Behavior under Various Shock Test Conditions Figure 15. Shock Test 100 g, 5 ms in Lateral Axis (40 Hz) Figure 18. Shock Test 100 g, 5 ms in Longitudinal Axis (40 Hz) Figure 16. Hi-g Shock Test in Lateral Axis (40 Hz) Figure 19. Hi-g Shock Test, Lateral Axis, 10× Time Base (40 Hz) Figure 17. Hi-g Shock in Rate Axis (40 Hz) Figure 20. Hi-g Shock, Rate Axis, BW Reduced to 8 Hz Rev. A | Page 7 of 12 ADXRS150 THEORY OF OPERATION The ADXRS150 operates on the principle of a resonator gyro. Two polysilicon sensing structures each contain a dither frame, which is electrostatically driven to resonance. This produces the necessary velocity element to produce a Coriolis force during angular rate. At two of the outer extremes of each frame, orthogonal to the dither motion, are movable fingers that are placed between fixed pickoff fingers to form a capacitive pickoff structure that senses Coriolis motion. The resulting signal is fed to a series of gain and demodulation stages that produce the electrical rate signal output. The dual-sensor design rejects external g-forces and vibration. Fabricating the sensor with the signal conditioning electronics preserves signal integrity in noisy environments. The electrostatic resonator requires 14 V to 16 V for operation. Since only 5 V is typically available in most applications, a charge pump is included on-chip. If an external 14 V to 16 V supply is available, the two capacitors on CP1–CP4 can be omitted and this supply can be connected to CP5 (Pin 7D) with a 100 nF decoupling capacitor in place of the 47 nF. and transients associated with digital circuit supplies may have adverse effects on device operation. Figure 21 shows the recommended connections for the ADXRS150 where both AVCC and PDD have a separate decoupling capacitor. These should be placed as close to their respective pins as possible before routing to the system analog supply. This will minimize the noise injected by the charge pump that uses the PDD supply. It is also recommended to place the charge pump capacitors connected to the CP1–CP4 pins as close to the part as possible. These capacitors are used to produce the on-chip high voltage supply switched at the dither frequency at approximately 14 kHz. Care should be taken to ensure that there is no more than 50 pF of stray capacitance between CP1–CP4 and ground. Surface-mount chip capacitors are suitable as long as they are rated for over 15 V. + 5V COUT 100nF 100nF AGND AVCC 3A After the demodulation stage there is a single-pole low-pass filter consisting of an internal 9 kΩ resistor (RSEN1) and an external user-supplied capacitor (CMID). A CMID capacitor of 100 nF sets a 400 Hz ±35% low-pass pole and is used to limit high frequency artifacts before final amplification. Bandwidth limit capacitor, COUT, sets the pass bandwidth (see Figure 22 and the Setting Bandwidth section). 2G ST1 5G SELF ST2 4G TEST CMID 1F 1D SUMJ RSEN2 π RATE SENSOR 1C ROUT 180kΩ 1% CORIOLIS SIGNAL CHANNEL RSEN1 DEMOD 1B RATE2A OUT ≈ 9k Ω ± 35% RESONATOR LOOP 1E 2.5V 2.5V REF PTAT 3G TEMP CHARGE PUMP/REG. 100nF 22nF - 12V PDD CP3 CP5 CP4 PDD 4A 5A PGND CP2 7E 6G 7F 6A 7B 7C PGND 7B 7C 7D 7E 7F ADXRS150 22nF 47nF 22nF 100nF 6G 6A 7D CP4 CP3 CP5 CP1 47nF CP1 5A Figure 22. Block Diagram with External Components 5G ST1 4G ST2 Setting Bandwidth 3G TEMP External capacitors CMID and COUT are used in combination with on-chip resistors to create two low-pass filters to limit the bandwidth of the ADXRS150’s rate response. The –3 dB frequency set by ROUT and COUT is: 22nF CP2 5V 4A 3A AVCC 100nF 2G 2A 1B 1C RATEOUT SUMJ 1D 1E CMID 2.5V 1F AGND fOUT = 1/ (2 × π × ROUT × C OUT ) 100nF COUT = 22nF and can be well controlled since ROUT has been trimmed during manufacturing to be 180 kΩ ±1%. Any external resistor applied between the RATEOUT (1B, 2A) and SUMJ (1C, 2C) pins will result in: NOTE THAT INNER ROWS/COLUMNS OF PINS HAVE BEEN OMITTED FOR CLARITY BUT SHOULD BE CONNECTED IN THE APPLICATION. Figure 21. Example Application Circuit (Top View) Supply and Common Considerations ROUT = (180 kΩ × REXT )/ (180 kΩ + REXT ) Only power supplies used for supplying analog circuits are recommended for powering the ADXRS150. High frequency noise The –3 dB frequency is set by RSEN (the parallel combination Rev. A | Page 8 of 12 ADXRS150 of RSEN1 and RSEN2) at about 4.5 kΩ nominal, and CMID is less well controlled since RSEN1 and RSEN2 have been used to trim the rate sensitivity during manufacturing and have a ±35% tolerance. Its primary purpose is to limit the high frequency demodulation artifacts from saturating the final amplifier stage. Thus, this pole of nominally 400 Hz @ 0.1 µF need not be precise. Lower frequency is preferable, but its variability usually requires it to be about 10 times greater (in order to preserve phase integrity) than the well-controlled output pole. In general, both –3 dB filter frequencies should be set as low as possible to reduce the amplitude of these high frequency artifacts as well as to reduce the overall system noise. Increasing Measurement Range The full-scale measurement range of the ADXRS150 can be increased by placing an external resistor between the RATEOUT (1B, 2A) and SUMJ (1C, 2C) pins, which would parallel the internal ROUT resistor that is factory-trimmed to 180 kΩ. For example, a 330 kΩ external resistor will give approximately 8.1 mV/°/sec sensitivity and a commensurate ~50% increase in the full-scale range. This is effective for up to a 4× increase in the full-scale range (minimum value of the parallel resistor allowed is 45 kΩ). Beyond this amount of external sensitivity reduction, the internal circuitry headroom requirements prevent further increase in the linear full-scale output range. The drawbacks of modifying the full-scale range are the additional output null drift (as much as 2°/sec over temperature) and the readjustment of the initial null bias (see the Null Adjust section). changes within the 4.75 V to 5.25 V operating range. If the ADXRS150 is used with a supply-ratiometric ADC, the ADXRS150’s 2.5 V output can be converted and used to make corrections in software for the supply variations. Null Adjustment Null adjustment is possible by injecting a suitable current to SUMJ (1C, 2C). Adding a suitable resistor to either ground or the positive supply is a simple way of achieving this. The nominal 2.5 V null is for a symmetrical swing range at RATEOUT (1B, 2A). However, a nonsymmetric output swing may be suitable in some applications. Note that if a resistor is connected to the positive supply, supply disturbances may reflect some null instability. Digital supply noise should be avoided particularly in this case (see Supply and Common Considerations section). The resistor value to use is approximately: RNULL = ( 2.5 × 180 ,000 )/(VNULL0 – VNULL1 ) VNULL0 is the unadjusted zero rate output, and VNULL1 is the target null value. If the initial value is below the desired value, the resistor should terminate on common or ground. If it is above the desired value, the resistor should terminate on the 5 V supply. Values typically are in the 1 MΩ to 5 MΩ range. If an external resistor is used across RATEOUT and SUMJ, then the parallel equivalent value is substituted into the above equation. Note that the resistor value is an estimate since it assumes VCC = 5.0 V and VSUMJ = 2.5 V. Temperature Output and Calibration Self-Test Function It is common practice to temperature-calibrate gyros to improve their overall accuracy. The ADXRS150 has a temperature-proportional voltage output that provides input to such a calibration method. The voltage at TEMP (3F, 3G) is nominally 2.5 V at 27°C and has a PTAT (proportional to absolute temperature) characteristic of 8.4 mV/°C. Note that the TEMP output circuitry is limited to 50 µA source current. The ADXRS150 includes a self-test feature that actuates each of the sensing structures and associated electronics in the same manner as if subjected to angular rate. It is activated by standard logic high levels applied to inputs ST1 (5F, 5G), ST2 (4F, 4G), or both. ST1 will cause the voltage at RATEOUT to change about –0.66 V and ST2 will cause an opposite change of +0.66 V. The self-test response follows the viscosity temperature dependence of the package atmosphere, approximately 0.25%/°C. Using a 3-point calibration technique, it is possible to calibrate the ADXRS150’s null and sensitivity drift to an overall accuracy of nearly 300°/hour. An overall accuracy of 70°/hour or better is possible using more points. Limiting the bandwidth of the device reduces the flat-band noise during the calibration process, improving the measurement accuracy at each calibration point. Using the ADXRS150 with a SupplyRatiometric ADC The ADXRS150’s RATEOUT signal is nonratiometric, i.e., neither the null voltage nor the rate sensitivity is proportional to the supply. Instead they are nominally constant for dc supply Activating both ST1 and ST2 simultaneously is not damaging. Since ST1 and ST2 are not necessarily closely matched, actuating both simultaneously may result in an apparent null bias shift. Continuous Self-Test The one-chip integration of the ADXRS150 gives it higher reliability than is obtainable with any other high volume manufacturing method. Also, it is manufactured under a mature BIMOS process that has field-proven reliability. As an additional failure detection measure, power-on self-test can be performed. However, some applications may warrant continuous self-test while Rev. A | Page 9 of 12 ADXRS150 2.60 Acceleration Sensitivity 2.58 The sign convention used is that lateral acceleration is positive in the direction from Pin Column A to Pin Column G of the package. That is, a device has positive sensitivity if its voltage output increases when the row of Pins 2A–6A are tipped under the row of Pins 2G–6G in the earth’s gravity. RATEOUT – V sensing rate. Application notes outlining continuous self-test techniques are also available on the Analog Devices website. 2.56 2.54 2.52 There are two effects of concern, shifts in the static null and induced null noise. Scale factor is not significantly affected until the acceleration reaches several hundred m/s2. 2.50 0 Vibration rectification for frequencies up to 20 kHz is on the order of 0.00002(°/s)/(m/s2)2, is not significantly dependent on frequency, and has been verified up to 400 m/s2 rms. Away from the 14 kHz resonance the effect is not discernible, except for vibration frequencies within the angular rate pass band. This can be seen in Figure 9 to Figure 14 for the various sensor axes. The in-band effect can be seen in Figure 24. This is the result of the static g-sensitivity. The specimen used for Figure 24 had a g-sensitivity of 0.15°/s/g and its total in-band noise degraded from 3 mV rms to 5 mV rms for the specified vibration. The effect of broadband vibration up to 20 kHz is shown in Figure 23 and Figure 25. RATEOUT – V 2.56 10 2.58 STATIC 0.8mV rms 2.56 2.54 SHAKING 2.4mV rms 2.52 2.50 0 2 6 4 TIME – Seconds 8 10 Figure 25. Random Vibration (Lateral) 10 kHz to 20 kHz at 0.01 g/√Hz with 60 Hz Sampling and 0.5 Sec Averaging –60 –70 –80 RATEOUT – V 2.58 8 2.60 The output noise of the part falls away in accordance with the output low-pass filter and does not contain any “spikes” greater than 1% of the low frequency noise. A typical noise spectrum is shown in Figure 26. 2.60 6 4 TIME – Seconds Figure 24. Random Vibration (Lateral) 2 Hz to 40 Hz, 3.2 g rms RATEOUT – V Linear vibration spectral density near the 14 kHz sensor resonance translates into output noise. In order to have a significant effect, the vibration must be within the angular rate bandwidth (typically ±40 Hz of the resonance), so it takes considerable high frequency vibration to have any effect. 2 –90 –100 –110 –120 2.54 –130 0 2.52 2 6 4 TIME – Seconds 8 100 1000 FREQUENCY – Hz 10000 100000 Figure 26. Noise Spectral Density at RATEOUT –BW = 4Hz 2.50 0 10 10 Figure 23. Random Vibration (Lateral) 10 kHz to 20 kHz at 0.01 g/√Hz with 60 Hz Sampling and 0.5 Sec Averaging Rev. A | Page 10 of 12 ADXRS150 PIN CONFIGURATIONS AND FUNCTIONAL DESCRIPTIONS PGND PDD CP5 CP3 CP4 7 6 ST1 CP1 5 ST2 CP2 4 AVCC 3 TEMP 2 1 AGND G F 2.5V CMID E D RATEOUT SUMJ C B A Figure 27. BGA-32 (Bottom View) Table 3. Pin Function Descriptions—32-Lead BGA Pin No. 6D, 7D 6A, 7B 6C, 7C 5A, 5B 4A, 4B 3A, 3B 1B, 2A 1C, 2C 1D, 2D 1E, 2E 1F, 2G 3F, 3G 4F, 4G 5F, 5G 6G, 7F 6E, 7E Mnemonic CP5 CP4 CP3 CP1 CP2 AVCC RATEOUT SUMJ CMID 2.5V AGND TEMP ST2 ST1 PGND PDD Description HV Filter Capacitor—47 nF Charge Pump Capacitor—22 nF Charge Pump Capacitor—22 nF + Analog Supply Rate Signal Output Output Amp Summing Junction HF Filter Capacitor—100 nF 2.5 V Precision Reference Analog Supply Return Temperature Voltage Output Self-Test for Sensor 2 Self-Test for Sensor 1 Charge Pump Supply Return + Charge Pump Supply Rev. A | Page 11 of 12 ADXRS150 OUTLINE DIMENSIONS A1 CORNER INDEX AREA 7.00 BSC SQ 7 6 5 4 3 2 1 A A1 B C BOTTOM VIEW TOP VIEW D E F G 4.80 BSC DETAIL A DETAIL A 3.20 2.50 0.44 0.25 3.65 MAX 0.15 MAX COPLANARITY 0.60 SEATING 0.55 PLANE 0.50 BALL DIAMETER 0.80 BSC Figure 28. 32-Lead Chip Scale Ball Grid Array [CSPBGA] (BC-32) Dimensions shown in millimeters ESD CAUTION ESD (electrostatic discharge) sensitive device. Electrostatic charges as high as 4000 V readily accumulate on the human body and test equipment and can discharge without detection. Although this product features proprietary ESD protection circuitry, permanent damage may occur on devices subjected to high energy electrostatic discharges. Therefore, proper ESD precautions are recommended to avoid performance degradation or loss of functionality. Table 4. Ordering Guide ADXRS150 Products ADXRS150ABG ADXRS150ABG-Reel Temperature Package –40°C to +85°C –40°C to +85°C Package Description 32-Lead BGA 32-Lead BGA © 2003 Analog Devices, Inc. All rights reserved. Trademarks and registered trademarks are the property of their respective companies. Printed in the U.S.A. C03226-0-1/03(A) Rev. A | Page 12 of 12 Package Outline BC-32 BC-32