MCP ASSEMBLY F2223-21SH This MCP assembly is a suitable detector for an electron or ion beam in SEM, SIM or Lithography. It is possible to detect some signal from a sample with high sensitivity, that can be performed with the compactness and the center hole of this assembly. It allows to set this assembly at close position to the sample and gives better efficiency in the beam detection. TMCPF0020 FEATURES APPLICATIONS ●High Sensitivity ●High S/N Ratio ●Wide Dynamic Range ●Center Hole for Beam Line ●Compact and Lightweight ●Scanning Electron Microscopy ●Scanning Ion Microscopy ●Electron Lithography ●Mask Aligner ●Electron Beam Measuring System ●Ion Scattering Spectroscopy SPECIFICATIONS GENERAL Parameter Assembly Outer Size Effective Area Height (Max.) MCP Channel Diameter Number of MCPs MCP Center Dead Area Value 56.5 27.0 8.6 12 2 8 Unit mm mm mm µm — mm 2 0.5 0.5 3 1.3 × 10-4 +10 to +40 300 10 1.3 × 10-4 kV kV kV kV Pa °C °C Hours Pa RATINGS MCP Supply Voltage (Max.) MCP-Out to Anode Supply Voltage (Max.) Mesh to MCP-In Supply Voltage Anode to Substrate Supply Voltage Operating Vacuum Condition (Max.) Ambient Temperature Baking Temperature Baking Time Vacuum Condition for Baking (Max.) TYPICAL ELECTRICAL CHARACTERISTICS (Supply Voltage: 2 kV, Vacuum: 1.3 × 10-4 Pa, Operating Ambient Temperature: +25 °C) Gain at 1.8 kV (Min.) Plate Resistance Maximum Linear Output Dark Current 1 × 106 20 to 40 7 % of strip current under uniform input into whole MCP effective area 20 — MΩ / MCP — pA· cm-2 Subject to local technical requirements and regulations, availability of products included in this promotional material may vary. Please consult with our sales office. Information furnished by HAMAMATSU is believed to be reliable. However, no responsibility is assumed for possible inaccuracies or omissions. Specifications are subject to change without notice. No patent rights are granted to any of the circuits described herein. ©2006 Hamamatsu Photonics K.K. MCP ASSEMBLY F2223-21SH GAIN CHARACTERISTIC 108 CONSTRUCTION AND APPLICATION EXAMPLE TMCPB0003EA ANODE MCP (2-STAGE) 107 MESH 106 GAIN SECONDARY ELECTRON ( REFLECTING ELECTRON ) SAMPLE TMCPC0001EA 105 WIRING POTENTIAL EXAMPLE MESH ................................................ +200 V MCP-IN ............................................. +500 V MCP-OUT ........................................ +2300 V ANODE ............................................ +2400 V CENTER PIPE AND SUBSTRATE ........ GND SAMPLE ................................................ GND 104 103 1 1.5 2 * This is an example potential to detect secondary electrons. For other applications, please consult to our sales office. SUPPLY VOLTAGE (kV) DIMENSIONAL OUTLINES (Unit: mm) 4- 2.6 PCD* 50.8 MESH LEAD MCP-IN LEAD (SUS-NM) MCP-OUT LEAD (SUS-NM) ANODE LEAD 4 27 EFFECTIVE AREA 41 56.5 MESH 8 DEAD SPACE SUBSTRATE (SUS304) MCP (2-STAGE) 8.6 CENTER PIPE (INNER DIA. 4) SINGLE ANODE * PCD (Pitch Circle Diameter) TMCPA0002EE WEB SITE www.hamamatsu.com HAMAMATSU PHOTONICS K.K., Electron Tube Division 314-5, Shimokanzo, Iwata City, Shizuoka Pref., 438-0193, Japan, Telephone: (81)539/62-5248, Fax: (81)539/62-2205 U.S.A.: Hamamatsu Corporation: 360 Foothill Road, P. O. Box 6910, Bridgewater. N.J. 08807-0910, U.S.A., Telephone: (1)908-231-0960, Fax: (1)908-231-1218 E-mail: [email protected] Germany: Hamamatsu Photonics Deutschland GmbH: Arzbergerstr. 10, D-82211 Herrsching am Ammersee, Germany, Telephone: (49)8152-375-0, Fax: (49)8152-2658 E-mail: [email protected] France: Hamamatsu Photonics France S.A.R.L.: 19, Rue du Saule Trapu, Parc du Moulin de Massy, 91882 Massy Cedex, France, Telephone: (33)1 69 53 71 00, Fax: (33)1 69 53 71 10 E-mail: [email protected] United Kingdom: Hamamatsu Photonics UK Limited: 2 Howard Court, 10 Tewin Road Welwyn Garden City Hertfordshire AL7 1BW, United Kingdom, Telephone: 44-(0)1707-294888, Fax: 44(0)1707-325777 E-mail: [email protected] North Europe: Hamamatsu Photonics Norden AB: Smidesvägen 12, SE-171-41 SOLNA, Sweden, Telephone: (46)8-509-031-00, Fax: (46)8-509-031-01 E-mail: [email protected] TMCP1001E03 Italy: Hamamatsu Photonics Italia: S.R.L.: Strada della Moia, 1/E, 20020 Arese, (Milano), Italy, Telephone: (39)02-935 81 733, Fax: (39)02-935 81 741 E-mail: [email protected] OCT. 2006 IP