PETERMANN-TECHNIK GmbH Lechwiesenstr. 13 D-86899 Landsberg am Lech Fon: +49/8191/305395 Fax: +49/8191/305397 www.petermann-technik.com [email protected] ISO 9001:2008 2” PATTERNED SAPPHIRE SUBSTRATE PTSSP500 FEATURES High reliability for low cost Used for GaN Epitaxial Designed for PSS process Outstanding chemical resistance and mechanical strength GENERAL DATA TYPE DIAMETER THICKNESS DIMENSIONS PRIMARY FLAT LENGTH EDGE CHAMFERING SURFACE ORIENTATION M-axis SURFACE ORIENTATION A-axis ORIENTATION PRIMARY FLAT ORIENTATION A-axis BOW TTV FLATNESS LTV FRONT SURFACE QUALITY BACK SURFACE ROUGHNESS SURFACE CONDITION CLEANNESS DEFECTS LASER MARK MATERIAL QUALITY PACKAGE PTSSP500 50.8 ± 0.1 mm 430 ± 10 µm 16 ± 1 mm 45° (Can be customized) 0.2 ± 0.1° 0 ± 0.1° 0 ± 0.2° -6 µm ≤ BOW ≤ 0 µm ≤4 µm ≤1 µm (5mm x 5mm) Epitaxial ready (Ra≤2Å) 0.8 - 1.2 µm Partical (Size > 0.3 µm) Number should be less than 50 No crack, No pores, No scratch, No inclusions, No twins Can be customized ≥99.996% AL2O3 Mono-crystalline AL2O3 Wafers are packed in cleaned wafer cassettes containing 25 wafers under clean room environment CRYSTALS CERAMIC FILTERS OSCILLATORS SAW COMPONENTS CERAMIC RESONATORS Premium Quality by PETERMANN-TECHNIK Spec.01 • REV.00 • January 2014