2” PATTERNED SAPPHIRE SUBSTRATE PTSSP500

PETERMANN-TECHNIK GmbH
Lechwiesenstr. 13
D-86899 Landsberg am Lech
Fon: +49/8191/305395
Fax: +49/8191/305397
www.petermann-technik.com
[email protected]
ISO 9001:2008
2” PATTERNED SAPPHIRE SUBSTRATE PTSSP500
FEATURES
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High reliability for low cost
Used for GaN Epitaxial
Designed for PSS process
Outstanding chemical resistance and mechanical strength
GENERAL DATA
TYPE
DIAMETER
THICKNESS
DIMENSIONS
PRIMARY FLAT LENGTH
EDGE CHAMFERING
SURFACE ORIENTATION M-axis
SURFACE ORIENTATION A-axis
ORIENTATION
PRIMARY FLAT ORIENTATION
A-axis
BOW
TTV
FLATNESS
LTV
FRONT SURFACE QUALITY
BACK SURFACE ROUGHNESS
SURFACE
CONDITION
CLEANNESS
DEFECTS
LASER MARK
MATERIAL QUALITY
PACKAGE
PTSSP500
50.8 ± 0.1 mm
430 ± 10 µm
16 ± 1 mm
45° (Can be customized)
0.2 ± 0.1°
0 ± 0.1°
0 ± 0.2°
-6 µm ≤ BOW ≤ 0 µm
≤4 µm
≤1 µm (5mm x 5mm)
Epitaxial ready (Ra≤2Å)
0.8 - 1.2 µm
Partical (Size > 0.3 µm) Number should be less
than 50
No crack, No pores, No scratch, No inclusions,
No twins
Can be customized
≥99.996% AL2O3
Mono-crystalline AL2O3
Wafers are packed in cleaned wafer cassettes
containing 25 wafers under clean room
environment
CRYSTALS
CERAMIC FILTERS
OSCILLATORS
SAW COMPONENTS
CERAMIC RESONATORS
Premium Quality by
PETERMANN-TECHNIK
Spec.01 • REV.00 • January 2014
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