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by MPXM2102/D
SEMICONDUCTOR TECHNICAL DATA
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The MPXM2102 device is a silicon piezoresistive pressure sensors providing a highly
accurate and linear voltage output — directly proportional to the applied pressure. The
sensor is a single, monolithic silicon diaphragm with the strain gauge and a thin–film
resistor network integrated on–chip. The chip is laser trimmed for precise span and offset
calibration and temperature compensation.
Motorola Preferred Device
0 to 100 kPa (0 to 14.5 psi)
40 mV FULL SCALE SPAN
(TYPICAL)
Features
• Temperature Compensated Over 0°C to +85°C
• Unique Silicon Shear Stress Strain Gauge
• Easy to Use Tape & Reel
• Ratiometric to Supply Voltage
• Gauge Ported & Non Ported Options
Application Examples
• Pump/Motor Controllers
• Robotics
• Level Indicators
• Medical Diagnostics
• Pressure Switching
• Barometers
• Altimeters
CASE 1320A–02
MPAK, STYLE 1
CASE 1320A–02
MPAK, STYLE 2
Figure 1 shows a block diagram of the internal circuitry on the stand–alone pressure
sensor chip.
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Figure 1. Temperature Compensated Pressure Sensor Schematic
VOLTAGE OUTPUT versus APPLIED DIFFERENTIAL PRESSURE
The differential voltage output of the X–ducer is directly proportional to the differential
pressure applied.
The output voltage of the differential or gauge sensor increases with increasing
pressure applied to the pressure side (P1) relative to the vacuum side (P2). Similarly,
output voltage increases as increasing vacuum is applied to the vacuum side (P2)
relative to the pressure side (P1).
Preferred devices are Motorola recommended choices for future use and best overall value.
X–ducer is a trademark of Motorola, Inc.
REV 0
Motorola, Inc. 2000
1
Gnd
3
VS
2
+Vout
4
–Vout
MAXIMUM RATINGS
Rating
Overpressure(8)
(P1 > P2)
Symbol
Value
Unit
Pmax
200
kPa
Storage Temperature
Tstg
–40 to +125
°C
Operating Temperature
TA
–40 to +125
°C
OPERATING CHARACTERISTICS (VS = 10 Vdc, TA = 25°C unless otherwise noted, P1 > P2)
Characteristic
Pressure
Range(1)
Supply Voltage(2)
Supply Current
Symbol
Min
Typ
Max
Unit
POP
0
—
100
kPa
VS
—
10
16
Vdc
Io
—
6.0
—
mAdc
VFSS
38.5
40
41.5
mV
Voff
–1.0
–2.0
—
—
1.0
2.0
mV
∆V/∆P
—
0.4
—
mV/kPa
—
—
–0.6
–1.0
—
—
0.4
1.0
%VFSS
Pressure Hysteresis(5) (0 to 100 kPa)
—
—
±0.1
—
%VFSS
Temperature Hysteresis(5) (–40°C to +125°C)
—
—
±0.5
—
%VFSS
TCVFSS
–2.0
—
2.0
%VFSS
Full Scale Span(3)
Offset(4)
MPXM2102D/G Series
MPXM2102A Series
Sensitivity
Linearity(5)
MPXM2102D/G Series
MPXM2102A Series
Temperature Effect on Full Scale
Temperature Effect on
Span(5)
Offset(5)
TCVoff
–1.0
—
1.0
mV
Input Impedance
Zin
1000
—
2500
Ω
Output Impedance
Zout
1400
—
3000
Ω
Response Time(6) (10% to 90%)
tR
—
1.0
—
ms
Warm–Up
—
—
20
—
ms
Offset Stability(9)
—
—
±0.5
—
%VFSS
MECHANICAL CHARACTERISTICS
Characteristic
Weight
Common Mode Line
Pressure(7)
Symbol
Min
Typ
Max
Unit
—
—
TBD
—
Grams
—
—
—
TBD
kPa
NOTES:
1. 1.0 kPa (kiloPascal) equals 0.145 psi.
2. Device is ratiometric within this specified excitation range. Operating the device above the specified excitation range may induce additional
error due to device self–heating.
3. Full Scale Span (VFSS) is defined as the algebraic difference between the output voltage at full rated pressure and the output voltage at the
minimum rated pressure.
4. Offset (Voff) is defined as the output voltage at the minimum rated pressure.
5. Accuracy (error budget) consists of the following:
• Linearity:
Output deviation from a straight line relationship with pressure, using end point method, over the specified
pressure range.
• Temperature Hysteresis: Output deviation at any temperature within the operating temperature range, after the temperature is
cycled to and from the minimum or maximum operating temperature points, with zero differential pressure
applied.
• Pressure Hysteresis:
Output deviation at any pressure within the specified range, when this pressure is cycled to and from the
minimum or maximum rated pressure, at 25°C.
• TcSpan:
Output deviation at full rated pressure over the temperature range of 0 to 85°C, relative to 25°C.
• TcOffset:
Output deviation with minimum rated pressure applied, over the temperature range of 0 to 85°C, relative
to 25°C.
6. Response Time is defined as the time for the incremental change in the output to go from 10% to 90% of its final value when subjected to
a specified step change in pressure.
7. Common mode pressures beyond specified may result in leakage at the case–to–lead interface.
8. Exposure beyond these limits may cause permanent damage or degradation to the device.
9. Offset stability is the product’s output deviation when subjected to 1000 hours of Pulsed Pressure, Temperature Cycling with Bias Test.
2
Motorola Sensor Device Data
LINEARITY
Linearity refers to how well a transducer’s output follows
the equation: Vout = Voff + sensitivity x P over the operating
pressure range. There are two basic methods for calculating
nonlinearity: (1) end point straight line fit (see Figure 2) or (2)
a least squares best line fit. While a least squares fit gives
the “best case” linearity error (lower numerical value), the
calculations required are burdensome.
Conversely, an end point fit will give the “worst case” error
(often more desirable in error budget calculations) and the calculations are more straightforward for the user. Motorola’s
specified pressure sensor linearities are based on the end
point straight line method measured at the midrange pressure.
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Figure 2. Linearity Specification Comparison
ON–CHIP TEMPERATURE COMPENSATION and CALIBRATION
A silicone gel isolates the die surface and wire bonds from
the environment, while allowing the pressure signal to be
transmitted to the silicon diaphragm.
Figure 3 shows the minimum, maximum and typical output
characteristics of the MPXM2102 series at 25°C. The output
is directly proportional to the differential pressure and is essentially a straight line.
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Figure 3. Output versus Pressure Differential
ORDERING INFORMATION
Device Type
Motorola Sensor Device Data
Options
MPXM2102D
Non–ported
MPXM2102DT1
Non–ported, Tape and Reel
MPXM2102GS
Ported
MPXM2102GST1
Ported, Tape and Reel
MPXM2102A
Non–ported
MPXM2102AT1
Non–ported, Tape and Reel
MPXM2102AS
Ported
MPXM2102AST1
Ported, Tape and Reel
3
PACKAGE DIMENSIONS
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4
Motorola Sensor Device Data
NOTES
Motorola Sensor Device Data
5
NOTES
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Motorola Sensor Device Data
NOTES
Motorola Sensor Device Data
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Motorola reserves the right to make changes without further notice to any products herein. Motorola makes no warranty, representation or
guarantee regarding the suitability of its products for any particular purpose, nor does Motorola assume any liability arising out of the
application or use of any product or circuit, and specifically disclaims any and all liability, including without limitation consequential or incidental
damages. “Typical” parameters which may be provided in Motorola data sheets and/or specifications can and do vary in different applications
and actual performance may vary over time. All operating parameters, including “Typicals” must be validated for each customer application
by customer’s technical experts. Motorola does not convey any license under its patent rights nor the rights of others. Motorola products are
not designed, intended, or authorized for use as components in systems intended for surgical implant into the body, or other applications
intended to support or sustain life, or for any other application in which the failure of the Motorola product could create a situation where
personal injury or death may occur. Should Buyer purchase or use Motorola products for any such unintended or unauthorized application,
Buyer shall indemnify and hold Motorola and its officers, employees, subsidiaries, affiliates, and distributors harmless against all claims, costs,
damages, and expenses, and reasonable attorney fees arising out of, directly or indirectly, any claim of personal injury or death associated
with such unintended or unauthorized use, even if such claim alleges that Motorola was negligent regarding the design or manufacture of the
part. Motorola and
are registered trademarks of Motorola, Inc. Motorola, Inc. is an Equal Opportunity/Affirmative Action Employer.
MOTOROLA and the Stylized M Logo are registered in the US Patent & Trademark Office. All other product or service names are the property of their
respective owners.
Motorola, Inc. 2001
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Technical Information Center: 1–800–521–6274
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HOME PAGE: http://www.motorola.com/semiconductors/
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Motorola Sensor Device Data
MPXM2102/D