FUJI EDS3-132C

COMPACT TYPE GAS ANALYZER
DATA SHEET
ZSVS
OVERVIEW
The compact type gas analyzer with built-in pump and filter
is intended for heat treat furnace, plant cultivation, and research-purpose chemical analysis. With the gas extractor,
either simplified measurement probe (non-fixed type) or continuous measurement probe (fixed type) is selectable at
option. Since a high-sensitivity single-beam mass flow controller is adopted for the infrared sensor, long-term stability
and maintainability are excellent.
FEATURES
1. Gas concentrations of 4 components measurable simultaneously and continuously (Note).Concentrations of max.
3 gas components among CO2, CO and CH4 are continuously measurable with the infrared sensor, and that of
O2 is continuously measurable with galvanic cell type
oxygen sensor.
2. Standard with 3-range analyzer
Measurement can be performed over a broad range using the range selector key.
3. Compact type small and easy to use.
The compact body with built-in pump and membrane filter
is easy to carry and install.
Operation is easier because operation keys and display
unit are all gathered in the analyzing block.
4. A rich variety of standard functions incorporated.
Max. 8-channel outputs are allowed including instantaneous concentration value, O2-corrected value, O2-corrected moving average value and CP calculation value
outputs.
(Note) For continuous measurement, the standard requirements for sample gas (shown on page 3) need to be
met, and zero/span calibrations and membrane filter
replacement are required periodically.
SPECIFICATIONS
Standard Specifications
• Measuring system:
CO2, CO and CH4; Non-dispersive infrared absorption method with single light
source and single beam (single beam
method)
O2; Galvanic cell method
• Measurable component and min./max. measuring range:
CO2; 0 to 200 ppm / 0 to 100 %
CO; 0 to 200 ppm / 0 to 100 %
CH4; 0 to 1000 ppm / 0 to 100 %
O2; 0 to 5 % / 0 to 25 %
Max. 4 components measurable including O2
• Number of measuring ranges:
3 ranges
• Max. range ratio 1:5
• Warm-up time: 30 min after power-on
Provided with count-down timer indicating function.
• Analog output: In up to 8 channels.
4 to 20 mA DC or 0 to 1 V DC (linear)
Non-isolated output
Allowable load; 4 to 20 mA DC, 550Ω or
less
0 to 1 V DC, 100 kΩ or
more
• Instantaneous value output of each gas
component
• Instantaneous value output after O2 correction (when provided with O2 analyzer)
• Average value output after O2 correction (when provided with O2 analyzer)
• CP calculation value output (when provided with CO2 analyzer)
* The channel numbers of indicated value
and output value correspond to each
other one by one.
* An exclusive 25-pin cable is standardequipped.
• Communication output:
RS-232C Modbus protocol
* Use a commercially available product
(D-sub 9-pin cable).
This product is not explosion-proof. When handling dangerous gas, adequate attention shall be paid.
EDS3-132c
Date
Apr. 1, 2011
ZSVS
• Indicated values:
Digital 4-digit indication (by LCD with back
light)
• Instantaneous values of respective gas
components
• Instantaneous values after O2 correction
(when provided with O2 analyzer)
• Average value after O2 correction (when
provided with O2 analyzer)
• CP calculation value display (when provided with CO2 analyzer)
* The channel numbers of indicated value
and output value correspond to each
other one by one.
• Power supply: Rated voltage;
100 to 115 V AC or 200 to 240 V AC
Working voltage;
85 to 132 V AC or 180 to 264 V AC
* Depending on customer’s code selection.
Rated frequency; 50/60 Hz
Max. rated power; 150 VA
Inlet; Class 1 type conforming with EN60320
• Operating conditions:
Ambient temperature; 0 to 40˚C
Ambient humidity; 90% RH or less
* Condensation unallowable
• Storage conditions:
Ambient temperature; -20 to 60˚C
Ambient humidity; 95% RH or less
* Condensation unallowable.
• External dimensions (H × W × D mm):
211 × 365 × 527
• Weight:
Approx. 12 kg
• Finish color:
Cover; White pearl mica
Base; Medium gray metallic
• Enclosure design:
Casing made of steel plates for indoor
installation.
• Gas-contacting part materials:
Gas inlet/outlet; Polypropylene
Sample cell; SUS304/neoprene rubber
Transparent window: CaF2
Internal pipes: Toalon tube/Teflon tube
• Gas inlet/outlet:φ6/ φ3 hose end
• Purge gas flow rate:
1 L/min (to be purged as required)
Standard Functions
• Zero gas flow time:
Z180 to 999 sec (settable in 1-sec step)
• Auto indication off:
Indication automatically turns off when
no key is operated for the determined
period of time in the standby status.
Light off time; OFF/ON (1 to 30 min)
(settable in 1-min step)
• Output holding:At calibration during measurement, output holds the value just before the calibration according to hold setting. In the
standby status, output will not be held.
Indication will not be held either.
Hold setting; OFF/ON
• Key lock:
None of the set values can be changed
when key lock is turned ON.
This is helpful for reducing operation errors and wrong inputs.
2
• Instrument/calibration error indication:
When the instrument or calibration is
abnormal, an error number is indicated
to help analysis of the error.
• O2 correction: Conversion of measured NOx, SO2 and
CO gas concentrations into values at standard O2 concentration
Calculating equation;
C=
21–On
× Cs
21–Os
C; Sample gas concentration after O 2
correction
Cs; Measured concentration of sample
gas
Os; Measured O2 concentration
On; Standard O2 concentration for conversion (settable within 0 to 19%)
The result of conversion is indicated and
output in a signal simultaneously.
* An Os value of 20% or more is taken as
20% for calculation.
• Averaging after O2 correction;
The result of O2 correction is subjected
to moving average for the determined
period of time. And the result of averaging is indicated and output in a signal simultaneously.
Average value will be taken at a cycle of
30 sec. (Indication and output are updated
every 30 sec.)
• Resetting of output average value:
Indication and output of average value are
cleared in response to resetting.
* Effective only when average value selection is specified in CODE SYMBOLS.
• CP calculation: The carbon potential of carburizing furnace and conversion furnace are calculated using furnace temperature (fixed
input value) and CO concentration value
(fixed or measured value) while referring
to CO2 measured value.
Calculation equation;
2
CP= CPS×(PCO)
K1×PCO2
where,
CPS ; Saturated carbon concentration
(partial pressure)
850˚C)
0.0028t–1.30 (800˚C
950˚C)
0.0030t–1.47 (850˚C
1000˚C)
0.0034t–1.85 (950˚C
t
; Furnace temperature
PCO ; CO concentration value (partial
pressure)
PCO2 ; CO 2 concentration value (partial
pressure)
K1 ; Constant K1=10 (9.06–15966/T)
T
; Rankine temperature
(tx9/5+32+46˚)
Options
Performance
Repeatability: Within ± 0.5% of full scale
Linearity:
Within ± 2% of full scale
Zero drift:
Within ± 1% of full scale/day
Span drift:
Within ± 1% of full scale/day
Response time: 90% response time: Within 50 sec Galvanic cell type O2 analyzer: Within 3 min
• Other gases' influence:
•
•
•
•
•
Sample CO2 analyzer
CO analyzer
O2 analyzer CH4 analyzer
Interfer- component/
ence comporange
200ppm max 500ppm min 200ppm max 500ppm min All ranges All ranges
nent concentration
NO
1000ppm
Within ±2%
Within ±2%
Within ±2% Within ±2%
SO2
1000ppm
Within ±2%
Within ±2%
Within ±2% Within ±2%
-
-
Within ±3% Within ±3% Within ±2% Within ±5%
CO2
15%
CO
1000ppm
Within ±2%
-
CH4
1000ppm
Within ±2%
Within ±2%
Within ±2%
NH3
50ppm
Within ±2%
Within ±2%
Within ±2% Within ±2%
-
Within ±2% Within ±2%
-
H2O 2˚C saturatio Within ±3% Within ±2% Within ±3% Within ±2% Within ±2% Within ±2%
Standard Requirements for Sample Gas
0.5 L/min ± 0.2 L/min
0 to 40˚C at inlet of sampling gas
10 to 70˚C at tip of non-fixed type probe
(available at option)
70 to 400˚C at tip of fixed type probe (available at option)
Pressure:
0 to 2 kPa (Gas shall be discharged into
atmospheric air.)
Dust:
10 mg/Nm3 or less
Mist:
Unallowable
Corrosive gas: HCl 10 ppm or less
Others Unallowable
Standard gas for calibration:
Zero gas; N2 or clean air
However, clean air cannot be
used if CO2 and O2 are included
in sample gas components.
Span gas; Concentration limited within 90
to 100% of the range of each
sample gas component.
Unusable at concentrations
beyond 100%.
• Flow rate:
• Temperature:
•
•
•
•
•
• Gas extractor: Used for aspirating sample gas.
Non-fixed type; Since this type is used
for intermittent measurement, it cannot be fixed.
Material;
SUS304/polypropylene
Fixed type; Used for continuous measurement. Flange 5K25A FF
Sampling pipe length selectable among 300, 400, 600 and
800mm
Material; SUS316
• Sample inlet tube:
Used for delivering gas from the extractor to sampling block.
Shape;
φ6/φ4 × 5 m or φ6/φ4 × 10 m
Material; Teflon
Installation Requirements
• Selection of a place which does not receive direct sunlight, rain, wind nor radiation from hot substances.
If such a place cannot be found, a roof or cover should be
prepared for protection.
• Avoidance of a place under heavy vibration
• Selection of a place where atmospheric air is clean
• Discharge of exhaust gas into atmospheric air at a safe
location
• Avoidance of use in an explosion-proof area
Scope of Delivery
• Gas analyzer system
• Standard accessories (Refer to the table at top Following
table.)
• Instruction manual
Items to be Prepared Separately
• Standard gas (ZBM) and pressure regulator (ZBD)
• Recorder (when necessary, Fuji's product type PHR)
Standard Accessories
Name
Tubular fuse (2A)(for analyzing block)
Quantity
2 pcs
Power cord (for domestic use, for 100/115V AC) (2m) × 2 Either one
pair
Power cord (for North American use, for 100/115V AC) (2m) × 2 * Depending on
code
Power cord (for European use, for 200/220V AC) (2m) × 2 customer's
selection.
Grounding cable (5m)
1 cables
Output signal cable (1m)
1 cable
Filter paper (glass fiber) for membrane filter
5 sheets
Connection tube (5m)
1 tube
Instruction manual (in Japanese or English)
1 copy
Note) Standard accessories include consumables for 6 months.
3
ZSVS
Spare Parts for 1-Year Measurement
Name
Quantity Ordering No.
Filter paper (glass fiber) for membrane
filter
1 pc
(25 sheets) TK700735P2
Large O-ring for membrane filter
1 pc 8553765
Small O-ring for membrane filter
1 pc TK733572P1
Diaphragm unit for pump
1 unit TK713248P1
Specify the ordering No. and the quantity when placing an order.
Other
• A galvanic cell type oxygen sensor has a service life of
about 18 months from the date of its delivery. Periodic
replacement is recommended.
Replacement part ordering No. : TK7M3502C1
Principle Diagram of Infrared Type Measurement (CO2, CO, CH4)
Front expansion chamber
Gas inlet
Infrared-ray
light source
Gas outlet
Rear expansion
chamber
Detector
Motor
Mass flow
sensor
Measurement cell
Chopper
Indication
Preamplifier
Signal processing
block
Output
Principle Diagram of Galvanic Cell Type Measurement (O2)
Resistor
Thermistor
Electrolyte
Negative electrode
Positive electrode
4
Diaphragm
CODE SYMBOLS
1 2 3 4 5 6 7 8
Description
Digit
4
< Specification >
Analyzing block
5
< Sample components (CO2, CO, CH4) >
1-component analyzer
CO
CO2
CH4
2-component analyzer (1st component + 2nd component)
CO2+CO
CH4+CO
CO2+CH4
3-component analyzer (1st component + 2nd component + 3rd component)
CH4+(CO2+CO)
With out
Other
6
< Sample component (O2) and measuring range >
Galvanic cell type oxygen analyzer/0 to 5%/10%/25%
With out
8
< Revision code >
9
< Power supply >
For domestic use 100 to 115V AC, 50/60Hz
For European use 200 to 240V AC, 50/60Hz
For North American use 100 to 115V AC, 50/60Hz
10 < Measuring range (1st component) >
0 to 200ppm/500ppm/1000ppm
0 to 500ppm/1000ppm/2000ppm
0 to 1000ppm/2000ppm/5000ppm
0 to 2000ppm/5000ppm/1%
0 to 5000ppm/1%/2%
0 to 1%/2%/5%
0 to 2%/5%/10%
0 to 5%/10%/20%
0 to 10%/20%/50%
0 to 20%/50%/100%
With out
11 < Measuring range (2nd component) >
0 to 200ppm/500ppm/1000ppm
0 to 500ppm/1000ppm/2000ppm
0 to 1000ppm/2000ppm/5000ppm
0 to 2000ppm/5000ppm/1%
0 to 5000ppm/1%/2%
0 to 1%/2%/5%
0 to 2%/5%/10%
0 to 5%/10%/20%
0 to 10%/20%/50%
0 to 20%/50%/100%
With out
12 < Measuring range (3rd component) >
0 to 200ppm/500ppm/1000ppm
0 to 500ppm/1000ppm/2000ppm
0 to 1000ppm/2000ppm/5000ppm
0 to 2000ppm/5000ppm/1%
0 to 5000ppm/1%/2%
0 to 1%/2%/5%
0 to 2%/5%/10%
0 to 5%/10%/20%
0 to 10%/20%/50%
0 to 20%/50%/100%
With out
note
ZSVS
9 10 11 12 13
Y1
Y
14 15 16 17 18 19 20
Y
Digit No.
of code
S
B
D
E
G
H
J
note 2
S
Y
Z
1
Y
1
note 3
1
2
3
note 4
note 2
note 4
note 2
note 4
note 2
A
B
C
D
E
F
G
H
J
K
Y
A
B
C
D
E
F
G
H
J
K
Y
A
B
C
D
E
F
G
H
J
K
Y
5
ZSVS
1 2 3 4 5 6 7 8
Description
Digit
14 < Output >
0 to 1 V DC, non-isolated
4 to 20 mA DC, non-isolated
15 < Output type >
Instantaneous value after O2 correction
Average value after O2 correction
CP calculation value
With out
17 < Language >
Japanese
English
18 < Gas extractor >
Non-fixed type (for intermittent measurement)
Fixed type (for continuous measurement), flange 5K25A, L = 300 mm
Fixed type (for continuous measurement), flange 5K25A, L = 400 mm
Fixed type (for continuous measurement), flange 5K25A, L = 600 mm
Fixed type (for continuous measurement), flange 5K25A, L = 800 mm
With out
19 < Sample inlet tube >
5m×φ6/φ4, Teflon
10m×φ6/φ4, Teflon
20m×φ6/φ4, Teflon
With out
20 < Adjustment >
Standard adjustment
Adjustment for heat treatment furnace
Other
Note 1)
Note 2)
Note 3)
note
ZSV
Y1
9 10 11 12 13
14 15 16 17 18 19 20
Y
Y
1
2
note 5,7
note 10
note 6
0
1
2
Y
1
2
1
2
3
4
5
Y
note 8
A
B
C
Y
note 9
A
B
Z
A parenthesized sample component stands for the 2nd optical system.
Specify code Y when only O2 analyzer is needed.
Between "1", "2" and "3" of the 9th digit, the rated voltage and plug shape of the attached power cord are different.
“1”: For domestic use, rated voltage 125V AC (PSE), plug shape North American type
“2”: For European use, rated voltage 250V AC (ECC), plug shape European type
“3”: For North American use, rated voltage 125V AC (UL), plug shape North American type
Note 4) For possible combinations of sample component and measuring range, refer to the following tables
(on pages 8 and 9).
Note 5) Specify this code when "1" or "2" is specified at the 6th digit.
Note 6) When "Y" is specified at the 6th digit, "Y" should also be specified at the 15th digit.
Note 7) The kind of output after O2 correction will be added to all target components only when an analyzer for NOx,
SO2 and CO is specified.
Note 8) Sample inlet tube should be connected within 20 m.
Note 9) Calibration curve varies with gas components contained in sample gas.
"A ; standard adjustment" stands for adjustment in N2 balance.
"B ; adjustment for heat treatment furnace" is applied to CO analyzer and CO2 analyzer.
CO2 analyzer: CO2 range gas + 25% CO + 31% H2/N2
CO analyzer: CO range gas + 5% CO2 + 31% H2/N2
When "Z; other" is specified, a gas composition table should be attached.
Note 10) Can be manufactured only when “ CO2 analyzer” is selected for the 5th digit.
6
Digit No.
of code
Tables of Sample Component and Measuring Range - Availability Check Tables Table 1: 1-Component Analyzer (CO2, CO, CH4)
Sample component CO2 analyzer
Range
CO analyzer
CH4 analyzer
D
B
E
A
0 to 200/500/1000ppm
○
○
−
B
0 to 500/1000/2000ppm
○
○
−
C 0 to 1000/2000/5000ppm
○
○
○
D
0 to 2000/5000ppm/1%
○
○
○
E
0 to 5000ppm/1/2%
○
○
○
F
0 to 1/2/5%
○
○
○
G
0 to 2/5/10%
○
○
○
H
0 to 5/10/20%
○
○
○
J
0 to 10/20/50%
○
○
○
K
0 to 20/50/100%
○
○
○
○:Product available
Table 2: 2-Component Analyzer (CO2 analyzer + CO analyzer)
CO analyzer range
Range values are the same as those of CO2 analyzer.
CO2 analyzer range
A
B
C
D
E
F
G
H
J
K
A
0 to 200/500/1000ppm
○
○
−
−
−
−
−
−
−
−
B
0 to 500/1000/2000ppm
○
○
○
−
−
−
−
−
−
−
C 0 to 1000/2000/5000ppm
−
−
○
○
−
−
−
−
−
−
D
0 to 2000/5000ppm/1%
−
○
○
○
○
−
−
−
−
−
E
0 to 5000ppm/1/2%
−
○
○
○
○
○
○
○
−
−
F
0 to 1/2/5%
○
○
○
○
○
○
○
○
○
−
G
0 to 2/5/10%
○
○
○
○
○
○
○
○
○
○
H
0 to 5/10/20%
○
○
○
○
○
○
○
○
○
○
J
0 to 10/20/50%
−
○
○
○
○
○
○
○
○
○
K
0 to 20/50/100%
−
○
○
○
○
○
○
○
○
○
○:Product available
Table 3: 2-Component Analyzer (CH4 analyzer + CO analyzer)
CO analyzer range
Range values are the same as those of CH4 analyzer.
CH4 analyzer range
A
B
C
D
E
F
G
H
J
K
A
0 to 200/500/1000ppm
−
−
−
−
−
−
−
−
−
−
B
0 to 500/1000/2000ppm
−
−
−
−
−
−
−
−
−
−
C 0 to 1000/2000/5000ppm
−
−
−
−
−
−
−
−
−
−
D
0 to 2000/5000ppm/1%
−
−
−
−
−
−
−
−
−
−
E
0 to 5000ppm/1/2%
−
−
○
○
○
○
−
−
−
−
F
0 to 1/2/5%
−
−
○
○
○
○
○
○
−
−
G
0 to 2/5/10%
−
○
○
○
○
○
○
○
○
○
H
0 to 5/10/20%
−
○
○
○
○
○
○
○
○
○
J
0 to 10/20/50%
−
○
○
○
○
○
○
○
○
○
K
0 to 20/50/100%
−
○
○
○
○
○
○
○
○
○
○:Product available
Table 4: 2-Component Analyzer (CO2 analyzer + CH4 analyzer)
CH4 analyzer
range
Range values are the same as those of CO2 analyzer.
CO2 analyzer range
A
B
C
D
E
F
G
H
J
K
A
0∼200/500/1000ppm
−
−
−
−
−
−
−
−
−
−
B
0∼500/1000/2000ppm
−
−
−
−
−
−
−
−
−
−
C
0∼1000/2000/5000ppm
−
−
−
−
○
−
−
−
−
−
D
0∼2000/5000ppm/1%
−
−
−
○
○
○
−
−
−
−
E
0∼5000ppm/1/2%
−
−
−
○
○
○
○
−
−
−
F
0∼1/2/5%
−
−
−
○
○
○
○
○
−
−
G
0∼2/5/10%
−
−
−
○
○
○
○
○
○
−
H
0∼5/10/20%
−
−
−
○
○
○
○
○
○
○
J
0∼10/20/50%
−
−
−
○
○
○
○
○
○
○
K
0∼20/50/100%
−
−
−
○
○
○
○
○
○
○
○:Product available
• 3-component analyzer (CH4 analyzer + CO2 analyzer + CO analyzer);
Possible range in combination of Table 1 (CH4 analyzer) and Table 2 (CO2 analyzer + CO analyzer)
7
ZSVS
One optical line (1 to 3-component gas sampling system diagram): Type ZSVS
Gas extractor
FL
Exhaust
gas port
O2
analyzer
Measurement
cell
Calibration
gas inlet
Purge gas
port
Filter
Sample gas
inlet
M
P
Membrane
filter
Pump
Two optical lines (3 to 4-component gas sampling system diagram): Type ZSVS
Gas extractor
FL
O2
analyzer
Exhaust
gas port
Measurement
cell
Measurement
cell
Calibration
gas inlet
Purge gas
port
Filter
Sample gas
inlet
8
M
P
Membrane
filter
Pump
OUTLINE DIAGRAM (Unit : mm)
(1) Analyzing block
<Top view>
<Side view>
211
HANDLE
527
500
194
PORTABLE ANALYZER
365
<Front view>
FLOW CHECKER
DISPLAY
HEAT EXHAUST PORT
OPERATING UNIT
<Rear view>
OUTPUT CONNECTOR
MEMBRNE FILTER
PORTABLE ANALYZER
SYSTEM 1
EARTHING TERMINAL
RUBBUR FEEY
POWER SWITCH
COMMUNICATION CONNECTOR
FUSE
POWER SOCKET
PURGE GAS INLET φ6 HOSE END
EXHAUST GAS INLET φ6 HOSE END
CALIBRATION GAS INLET φ6 HOSE END
Weight Approx. 12kg
SAMPLE GAS INLET φ6 HOSE END
9
ZSVS
(2) External connection diagrams
Caution) Between male (P) and female (S) connectors, pin numbers are different.
Connect them properly with utmost care.
<Analog output>
On the analyzer side, a female connector (DB-25S-T-NR
made by Japan Aviation Electronics Industry) is attached.
For connection, the furnished cables (1 m)(DB-25P) should
be used.
13
1
25
14
Color of furnished cable Orange Red Brown Black White Gray Purple Blue Green Yellow Orange Red Brown
Pin name
Pin No.
Pin No.
CH7+ −CH6+
13
12
25
−CH5+
11
24
10
23
−CH4+
9
22
Pin name
8
21
−CH3+
7
20
6
19
5
18
4
17
−CH1+
3
16
2
15
1
14
−CH8+ −CH7
NC
Blue Green Yellow
Color of furnished cable
<Communication output>
On the analyzer side, a male connector (DE-9P-T-NR made
by Japan Aviation Electronics Industry) is attached.
For connection, commercially available cross cables (DE9S) should be used.
1
5
6
9
Pin name
NC
Pin No.
1
Pin No.
Pin name
10
−CH2+
RXD TXD
2
6
3
7
8
NC
GND
4
5
9
NC NC NC NC
OUTLINE DIAGRAM (Unit : mm)
(3) Power cord and signal cable
• Power cord for domestic and North American use (North American type), rated voltage 125V AC.
Note: The standards for domestic and North American use are different, but the shape is the same.
(2000)
• Power cord for European use (European type), rated voltage 250 V AC
(2000)
• Output cable
Output channel +CH1+CH5+CH6+CH7+CH8+CH4+CH2+CH3Connector
1
2
3
4
5
6
7
8
9
10 11 12 13 14 15 16
Cable color Brown Red Orange Yellow Green Blue Purple Gray White Black Brown Red Orange Yellow Green Blue
Purple
Gray
White
Black
Brown
Red
Orange
Yellow
Green
Blue
Brown
Red
Orange
Yellow
Green
Blue
(1000)
Details of area A
1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16
Area A
• Control input/output cable
11
ZSVS
OUTLINE DIAGRAM (Unit : mm)
(4) Non-fixed type gas extractor
(640)
(φ6)
Gas inlet
(14
(15
5)
.5)
Probe grip
Probe cap
Main materials of exhaust gas block: SUS304,
polypropylene, chloroprene rubber
Weight: 0.5 kg
φ6.5/φ4 hose band
(φ6
Specifications
φ4
4
Sampling pipe
0°)
20
(5) Fixed type gas extractor
(300)
(400)
(600)
(800)
10
33
(67)
Attached joint
Sampling pipe 15A
(φ21.7)
RC 1 /2
4-φ12
Gas inlet
Flange
JIS 5K 25A FF
28
φ75
φ12
φ6
Attached joint (for φ6 pipe connection)
95
φ4
R1/2
25
Specifications
Main materials of gas-contacting parts: SUS316, Teflon
Weight: 1 kg
Material : Teflon
Caution on Safety
*Before using this product, be sure to read its instruction manual in advance.
International Sales Div
Sales Group
Gate City Ohsaki, East Tower, 11-2, Osaki 1-chome,
Shinagawa-ku, Tokyo 141-0032, Japan
http://www.fujielectric.com
Phone: 81-3-5435-7280, 7281 Fax: 81-3-5435-7425
http://www.fjielectric.com/products/instruments/
Information in this catalog is subject to change without notice.
Printed in Japan