E UL ODRcj ctric M e l R ji E Fu PDG 1 2 3 4 5 6 7 8 9 10 11 12 13 2 - P DG 1 14 15 - YY Y 5 1 1 6 1 2 M3.5 7 A C D E DC1 5V 1 2 2 2 Pt100 JPt100 A B AC100V DC24V 9 240V DC20V AC85V 30V 264V 50/ 60Hz 10 R R L 12 Y M A S 3 4 T T 13 Y C CD-ROM 1 2 3 4 5 2 0.00 K Pt JPt 100.00 0.0 400.0 0.0 150.0 DC1 5V 90 1 45 6 2 3 CE 45 6 7 8 San Disk 2 3 7 8 90 1 , FLT SV R L CC-M MENU FLT SV R e r e r PV SV SO DO7 (PV) PV1 (KPV) R B1 B2 B3 SOH – (SO) PV2 SL AO1 SOL SO2 SH (SO2) AO2 R (SV) AO4 L (R-REQ) DO8 (H) DO9 (L) DO10 (FLT-DO) FLT KPV (R-ACK) AO3 DI8 FLT KPV KPV=√ PV PV CUT KPV PV SL SH Output (Y) (X02, Y02) (X01, Y01) (X03, Y03) (X16, Y16) (X15, Y15) (X04, Y04) Input (X) ≥ ≥ ≥ ≥ ≥ ≥ 0A IN1 OUT1 H-CUT L-CUT • • VPD 11 I+1 B 12 I-1 A 13 Io1 b 14 I+2 B 15 I-2 A 16 Io2 b 1 2 Rcj Rcj FLT 31 51 AO1 DO1 32 52 AO2 DI1 33 53 AO3 DI2 34 54 AO4 VST2 35 55 AO5 T1 36 56 SC T2 37 57 SC T COM DO1 23 MI+3 1 32 24V ( ) DO2 24 DI1 13 33 MI-3 2 DO3 25 DI2 14 34 MI+4 3 DO4 26 DI3 15 MI-4 4 DO5 27 DI4 16 AO1 5 51 DO6 28 DI5 17 AO2 6 52 DO7 29 DI6 18 AI1 7 71 DO8 30 DI7 19 AI2 8 72 DO9 31 DI8 20 AI3 9 73 DO10 32 DI9 21 AI4 10 74 DI10 22 SC 56,57,76 24V VPD 33 82 PCD 34 62 PCD 11 PCD 12 62 AI1 71 AI2 72 AI3 73 AI4 74 AI5 75 SC 76 MI+1 77 58 MOD+ SC MI-1 59 MODMI+2 60 VST MI-2 61 PC VP 62 PCD VPD G 63 L/+ 64 N/- 78 79 80 81 82 83 AC100V 240V DC24V DIO 24V 24V 24V VPD PCD T COM DIO 24V 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 AI1 SC AI2 AI3 SC AI4 AI5 SC AI6 SC VP PC DI9 DI10 DO9 DO10 MOD+ MOD- PCD COM VPD PCD VPD Rcj 2 22 MI+2 23 MI-2 24 MI+3 25 MI-3 26 MI+4 27 MI-4 28 DO6 29 DO7 30 DO8 31 DIO-COM 32 DI6 PCD 33 DI7 34 DIO-COM 35 DI8 36 OPT+ 37 OPT38 COM I+2 b 39 Io2 A 40 41 Rcj2 I-2 B 42 VPD Rcj 1 G N/- L/+ AC100V - + DC24V 240V 43 MI+1 44 MI-1 45 AO1 46 SC 47 AO2 48 AO3 49 SC 50 AO4 51 FLT 52 DO1 53 DO2 54 DO3 55 DO4 56 DO5 57 DI1 58 DIO-COM PCD 59 DI2 60 DI3 61 DIO-COM 62 DI4 63 DI5 b 64 I+1 A 65 Io1 66 Rcj1 I-1 B 67 90° to 45° ˚F mm mm m mm m MPa mm cm m µF µsec F mm sec m min m h km µSv / h mH µ m k cps Ωcm H Sv / h C nGy / h mΩ µGy / h Ω Ωcm Ω Ωcm Ω µS / cm µ lm µm g/ Ω JIS IEC Ω JIS DI10 DO10 AI6 AO5 De fault MENU 2/3 PARAMETER – – R B1 B2 B3 SH SL PH PL S0 S0_L DPH CUT TF SVPR S0PR LOOP1 CONSTANT PASSWORD 0000 1 2 3 SV SV PV PV S0 S0 PV PV SV S0 MENU2/3 100.00 0.00 0.00 0.00 125.00%FS -25.00%FS 125.00%FS -25.00%FS 125.00 -25.00 100.00 -0.00 0.00 0.00%FS 0.00 – MENU2/3 CONSTANT MENU2/3 LINEARIZER CON1 0.00% CON12 CON13 0.00% CON24 CON25 LOOP1 0.00% CON36 CON37 0.00% CON48 LINEARIZER – LIN1 X1 X2 -25.00% 125.00% X16 Y1 Y2 125.00% -25.00% 125.00% Y16 X1 X2 125.00% -25.00% 125.00% X16 Y1 Y2 125.00% -25.00% 125.00% Y16 X1 X2 125.00% -25.00% 125.00% X16 Y1 Y2 125.00% -25.00% 125.00% Y16 X1 X2 125.00% -25.00% 125.00% X16 Y1 Y2 125.00% -25.00% 125.00% Y16 125.00% LIN2 LOOP1 LIN3 LIN4 TREND SET 1/8 – COMMAND INTERVAL LOG–TYPE SAMPLING Pen Tag1 Pen Tag2 Pen Tag3 Pen Tag4 Pen Data1 Pen Data2 Pen Data3 Pen Data4 Pen1 BASE Pen1 FULL Pen1 D. P Pen1 UNIT Pen2 BASE Pen2 FULL Pen2 D. P Pen2 UNIT Pen3 BASE Pen3 FULL Pen3 D. P Pen3 UNIT Pen4 BASE Pen4 FULL Pen4 D. P Pen4 UNIT 8/8 ALARM SET 1CH 2CH 3CH 4CH 1CH 2CH 3CH 4CH UNIT MAKE ALARM SETTING 0 10000 2 PH. PL – Unit List MENU2/3 0 10000 2 – IC CARD TREND SETTING 0 10000 2 LOOP1 CONTROL PANEL CONTRAST SET TIME SET MENU2/3 RESET 30sec FILL POINT Pen1 Pen2 Pen3 Pen4 0000 0000 0000 0000 0 10000 2 MENU2/3 year/month/day hour/min/sec CARD FORMAT UNIT01 UNIT02 UNIT03 UNIT04 UNIT05 UNIT06 UNIT07 UNIT08 UNIT09 UNIT10 NONE 10 CONTROL PANEL De fault MENU 3/3 – MENU3/3 SCC FIX PASSWORD LOOP1 SYSTEM SETTING SCC FIX RUN/STOP – MENU3/3 6 BASIC CYCLE Di1. 2 Di3. 4 Di5. 6 Di7. 8 MENU2/3 MENU3/3 RESTART_SET LP1 LATCH ALARM LP1 S0 ALM INH SET SYSTEM FLT LAT LP1 Oprt Lock SETTING LOCK LP1 Mode Lock FRONT MODBUS AI CHECK MODULE SETING START MODE – LOOP1 AO SETTING OFF READY 0000 RUN STATION ADR BAUD RATE PARITY STOP BIT STATION ADR BAUD RATE PARITY STOP BIT PV Ch1 PV Ch2 Ai Ch1 Ai Ch2 Ai Ch3 Ai Ch4 Ai Ch5 Ai Ch6 DAI Ch1 DAI Ch2 LOOP1 20 PI FULL STROKE 1 PI FULL STROKE 2 PI FULL STROKE 3 PI FULL STROKE 4 MENU2/3 MENU3/3 ALARM LATCH S0 ALARM INH SV/MV SYSTEM SETTING 10 mas 300 300 300 300 0000 0000 180sec OFF OFF OFF OFF MODE MODE OFF 1 9600 NONE 1 1 19200 NONE 1 Ai OFF Ai OPTION OFF L MENU3/3 TAG INPUT PV BASE SCALE PV FULL SCALE PV DIMENSION SV BASE SCALE SV FULL SCALE SV DIMENSION UNIT SETTING TAG1-001 0 10000 2 0 10000 2 CH1 RANGE CH1 BASE FULL CH2 RANGE CH1 BASE FULL CH3 RANGE CH1 BASE FULL CH4 RANGE CH1 BASE FULL CH5 RANGE CH1 BASE FULL 1-5V 0.00 100.00 1-5V 0.00 100.00 1-5V 0.00 100.00 1-5V 0.00 100.00 1-5V 0.00 100.00 CONFIGURATION % – MENU3/3 CONFIGURATION AO SETTING AI SETTING DIRECT SETTING – – CH1 CH2 TREND JUMP PV1 RANGE CH1 BASE FULL PV2 RANGE CH1 BASE FULL CH1 RANGE CH1 BASE FULL CH2 RANGE CH1 BASE FULL CH3 RANGE CH1 BASE FULL CH4 RANGE CH1 BASE FULL CH5 RANGE CH1 BASE FULL CH6 RANGE CH1 BASE FULL 1-5V 0.00 100.00 1-5V 0.00 100.00 1-5V 0.00 100.00 1-5V 0.00 100.00 1-5V 0.00 100.00 1-5V 0.00 100.00 1-5V 0.00 100.00 1-5V 0.00 100.00 INPUT TYPE INPUT RANGE RCJ ON OFF INPUT TYPE INPUT RANGE RCJ ON OFF 0 0 OFF 0 0 OFF RCJ ON/OFF RCJ ON/OFF – MENU3/3 CONFIGURATION AI SETTING MENU3/3 CONFIGURATION DIRECT SET MENU3/3 1Loop No. 1/8 CONFIGURATION TREND JUMP WAFER CONNECT No.1 No.4 No.5 No.6 No.7 No.8 No.9 No.10 No.11 No.12 No.13 No.48 – MENU3/3 CODE INPUT 1 INPUT 2 INPUT 3 CODE INPUT 1 INPUT 2 INPUT 3 CODE INPUT 1 INPUT 2 INPUT 3 CODE INPUT 1 INPUT 2 INPUT 3 CODE INPUT 1 INPUT 2 INPUT 3 CODE INPUT 1 INPUT 2 INPUT 3 CODE INPUT 1 INPUT 2 INPUT 3 CODE INPUT 1 INPUT 2 INPUT 3 CODE INPUT 1 INPUT 2 INPUT 3 CODE INPUT 1 INPUT 2 INPUT 3 0000 0000 0000 0000 0067 0031 0a25 091e 008a 0a10 0881 091e 0067 0a14 0031 091e 0000 0000 0000 0000 000a 0030 0000 0000 0024 0a20 0a18 091e 0025 0a24 0a25 0000 00c3 0a28 0a28 0000 0000 0000 0000 0000 WAFER CONNECT T-LINK SLV OUT AO CONNECT DO CONNECT ALARM CONNECT – 0000 0000 WN0.14 WN0.15 0000 0000 CH1 CH2 CH3 CH4 CH5 0a28 0a2c 0a24 0a25 0000 CH01 CH02 CH03 CH04 CH05 CH06 CH07 CH08 CH09 CH10 0000 0000 0000 0000 0000 0000 091e 091a 0942 0943 – – – PARM2 (2/2) T-LINK WORD WN0.00 WN0.01 MENU3/3 OUT CONNECT T-LINK SLAVE MENU3/3 OUT CONNECT AO CONNECT MENU3/3 OUT CONNECT DO CONNECT MENU3/3 PH-INH PL-INH DPH-INH DPL-INH R-ACK PH PL DPH DPL – MENU3/3 WORD MODE SYUKUTAI FTLS USE FAULT CLEAR WORD FTLS FAULT OUT CONNECT 0000 0000 0000 0000 0097 16W-10 ON NO OFF COMMUNICATION T-Link MODE W01 0000 0000 0030 W09 091E 0A25 0031 W05 0000 0000 0000 DO AO 0A 67 0000 W02 091E 0A18 0A20 W10 091E 0881 0A10 W06 0000 0000 0000 A01(S0) A02(S02) A03(KPV) A04(SV) A05 DO1 DO2 DO3 DO4 DO5 DO6 DO7(LS) DO8(R-REQ) DO9(H) DO10(L) 0A20 0A21 0A22 0A23 0A10 0A11 0A12 0A13 0A00 0A01 0A02 0A03 24 8A 0A28 0A2C 0A24 0A25 0000 0000 0000 0000 0000 0000 0000 091E 091A 0942 0943 0000 0A24 0A25 0A26 0A27 0A14 0A15 0A16 0A17 0A04 0A05 0A06 0A07 W03 0000 0A25 0A24 W11 091E 0031 0A14 W07 0000 0000 0000 25 67 0000 0A28 0A29 0A2A 0A2B 0A18 0A19 0A1A 0A1B 0A08 0A09 0A0A 0A0B PH1-INH PL1-INH DPH1-INH DPL1-INH R-ACK W04 0000 0A28 0A28 W12 0000 0000 0000 W08 0000 0000 0000 C3 0000 0000 0000 0000 0000 0000 0097 0A2C 0A2D 0A2E 0A2F 0A1C 0A1D 0A1E 0A1F 0A0C 0A0D 0A0E 0A0F