設定器 (連続出力形)

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PDF
1 2 3 4 5 6 7 8
9 10 11 12 13
2 -
PDF 1
14 15
- YY
Y
5
1
1
6
1
2
M3.5
7
A
C
D
E
DC1
5V
1
2
2
2
Pt100
JPt100
A
B
AC100V
DC24V
9
240V
DC20V
AC85V
30V
264V
50/ 60Hz
10
R
R
L
12
Y
M
A
S
3
4
T
T
13
Y
C
1
2
3
4
5
2
0.00
K
Pt
JPt
100.00
0.0 400.0
0.0 150.0
DC1
5V
7 8
San Disk
90 1
45 6
2 3
CE
45 6
2 3
7 8
90 1
,
FLT
SV
R
L
CC-M
MENU
FLT
SV
R
e
r
e
r
RS-485 (Modbus)
PV
SV
DO7
(KPV)
(PV) PV1
SH
R
PV2
SL
(KPV) AO3
(SV)
(SV) AO4
L
(R-REQ) DO8
R
(H) DO9
(L) DO10
(FLT-DO) FLT
KPV
(R-ACK) Di8
FLT
KPV
KPV=√ PV
PV
CUT
KPV
PV
Output (Y)
(X02, Y02)
(X01, Y01)
(X03, Y03)
(X16, Y16)
(X15, Y15)
(X04, Y04)
Input (X)
≥
≥
≥
≥
0A
IN1
OUT1
H-CUT
L-CUT
•
VPD
11
I+1
B
12
I-1
A
13
Io1
b
14
I+2 PCD
B
15
I-2
A
16
Io2
b
1
Rcj
2
Rcj
FLT
31
51 AO1
DO1
32
52 AO2
DI1
33
53 AO3
DI2
34
54 AO4
VST2
35
55 AO5
T1
36
56
SC
T2
37
57
SC
RS485
T
DO2 24
DI1 13
33
MI-3 2
DO3 25
DI2 14
34
MI+4 3
DO4 26
DI3 15
24V
MI+4 4
DI4 16
AO1 5
51
DO6 28
DI5 17
AO2 6
52
DO7 29
DI6 18
AI1 7
71
DO8 30
DI7 19
AI2 8
72
DO9 31
DI8 20
AI3 9
73
DI9 21
AI4 10
74
DI10 22
SC 11
56,57,76
PCD 12
62
24V
82
VPD 33
PCD 34
PCD
62
AI4 74
AI5 75
SC 76
MI+1 77
MI-1 78
( )
MI+2 79
60 VST
61
MI-2 80
PC
VP
62 PCD
DO5 27
DO10 32
AI3 73
59 MOD-
MI+3 1
32
AI2 72
58 MOD+ SC
(Modbus)
COM
DO1 23
AI1 71
63
G
64
N/-
81
24V
VPD 82
L/+ 83
AC100
240V
DC24V
DIO
24V
No.35, 36, 37, 77, 78, 79, 80
No.1, 2, 3, 4
24V
VPD
PCD
RS485
(Modbus)
T
COM
DIO
24V
1
2
3
4
5
6
7
8
9
10
11
12
13
14
15
16
17
18
19
20
21
AI1
SC
AI2
AI3
SC
AI4
AI5
SC
AI6
SC
VP
PC
DI9
DI10
DO9
DO10
MOD+
MOD- PCD
COM
VPD
PCD
VPD
Rcj
2
22
23
24
25
26
27
28
29
30
31
32
33
34
35
36
37
38
b 39
A 40
41
B 42
MI+2
MI-2
MI+3
MI-3
MI+4
MI-4
DO6
DO7
DO8
DIO-COM
DI6 PCD
DI7
DIO-COM
DI8
OPT+
OPTCOM
I+2
Io2
Rcj2
I-2
VPD
Rcj
1
43
44
45
46
47
48
49
50
51
52
53
54
55
56
57
58
59
60
61
62
63
b 64
A 65
66
B 67
MI+1
MI-1
AO1
SC
AO2
AO3
SC
AO4
FLT
DO1
DO2
DO3
DO4
DO5
DI1
DIO-COM
DI2
PCD
DI3
DIO-COM
DI4
DI5
I+1
Io1
Rcj1
I-1
G N/- L/+
AC100 240V
-
+ DC24V
No.22, 23, 24, 25, 26, 27, 36,
37, 38, 43, 44
90° to 45°
˚F
mm
mm
m
mm
m
MPa
mm
cm
m
µF
µsec
F
mm
sec
m
min
m
h
km
µSv / h
mH
µ
m
k
cps
Ωcm
H
Sv / h
C
nGy / h
mΩ
µGy / h
Ω
Ωcm
Ω
Ωcm
Ω
µS / cm µ
lm
µm
g/
Ω
JIS IEC
Ω
JIS
DI10
DO10
AI6
AO5
De fault
MENU 2/3
PARAMETER
–
–
SV-H
SV-L
PV-H
PV-L
DPH
CUT
TF
SVPR
LOOP1
CONSTANT
PASSWORD
0000
SV
SV
PV
PV
PV
PV
SV
MENU2/3
125.00%
-25.00%
125.00%FS
-25.00%FS
100.00
-0.01
0.0sec
0.00%FS
–
MENU2/3
CONSTANT
MENU2/3
LINEARIZER
CON1
0.00%
CON12
CON13
0.00%
CON24
CON25
LOOP1
0.00%
CON36
CON37
0.00%
CON48
LINEARIZER
–
LIN1
X1
X2
-25.00%
125.00%
X16
Y1
Y2
125.00%
-25.00%
125.00%
Y16
X1
X2
125.00%
-25.00%
125.00%
X16
Y1
Y2
125.00%
-25.00%
125.00%
Y16
X1
X2
125.00%
-25.00%
125.00%
X16
Y1
Y2
125.00%
-25.00%
125.00%
Y16
X1
X2
125.00%
-25.00%
125.00%
X16
Y1
Y2
125.00%
-25.00%
125.00%
Y16
125.00%
LIN2
LOOP1
LIN3
LIN4
TREND SET
1/8
–
COMMAND
INTERVAL
LOG–TYPE
SAMPLING
Pen Tag1
Pen Tag2
Pen Tag3
Pen Tag4
Pen Data1
Pen Data2
Pen Data3
Pen Data4
Pen1 BASE
Pen1 FULL
Pen1 D. P
Pen1 UNIT
Pen2 BASE
Pen2 FULL
Pen2 D. P
Pen2 UNIT
Pen3 BASE
Pen3 FULL
Pen3 D. P
Pen3 UNIT
Pen4 BASE
Pen4 FULL
Pen4 D. P
Pen4 UNIT
8/8
ALARM SET
1CH
2CH
3CH
4CH
1CH
2CH
3CH
4CH
UNIT MAKE
ALARM SETTING
0
10000
2
PH. PL
–
Unit List
MENU2/3
0
10000
2
–
IC CARD
TREND SETTING
0
10000
2
LOOP1
CONTROL PANEL
CONTRAST SET
TIME SET
MENU2/3
RESET
30sec
FILL
POINT
Pen1
Pen2
Pen3
Pen4
0000
0000
0000
0000
0
10000
2
MENU2/3
year/month/day
hour/min/sec
CARD FORMAT
UNIT01
UNIT02
UNIT03
UNIT04
UNIT05
UNIT06
UNIT07
UNIT08
UNIT09
UNIT10
NONE
10
CONTROL PANEL
De fault
MENU 3/3
–
MENU3/3
SCC
FIX
PASSWORD
LOOP1
SYSTEM SETTING
SCC
FIX
OFF
READY
0000
RUN
RUN/STOP
–
MENU3/3
6
BASIC CYCLE
Di1. 2
Di3. 4
Di5. 6
Di7. 8
MENU2/3
MENU3/3
RESTART_SET
LP1 LATCH
ALARM
SYSTEM FLT LAT
SET
LP1 Oprt Lock
SETTING
LOCK
LP1 Mode Lock
FRONT
MODBUS
AI
CHECK
START
MODE
STATION ADR
BAUD RATE
PARITY
STOP BIT
STATION ADR
BAUD RATE
PARITY
STOP BIT
PV Ch1
PV Ch2
Ai Ch1
Ai Ch2
Ai Ch3
Ai Ch4
Ai Ch5
Ai Ch6
DAI Ch1
DAI Ch2
LOOP1
20
PI FULL STROKE 1
PI FULL STROKE 2
PI FULL STROKE 3
PI FULL STROKE 4
MENU2/3
MENU3/3
10 mas
300
300
300
300
0000
0000
180sec
ALARM LATCH
OFF
OFF
SV/MV
OFF
MODE
MODE
OFF
1
9600
NONE
1
1
19200
NONE
1
Ai
OFF
Ai
OPTION
OFF
L
SYSTEM SETTING
MODULE SETING
–
LOOP1
AO SETTING
AI SETTING
DIRECT SETTING
MENU3/3
TAG INPUT
BASE SCALE
FULL SCALE
DIMENSION
UNIT SETTING
TAG1-001
0
10000
2
%
CH1 RANGE
CH1 BASE
FULL
CH2 RANGE
CH1 BASE
FULL
CH3 RANGE
CH1 BASE
FULL
CH4 RANGE
CH1 BASE
FULL
CH5 RANGE
CH1 BASE
FULL
1-5V
0.00
100.00
1-5V
0.00
100.00
1-5V
0.00
100.00
1-5V
0.00
100.00
1-5V
0.00
100.00
PV1 RANGE
CH1 BASE
FULL
PV2 RANGE
CH1 BASE
FULL
CH1 RANGE
CH1 BASE
FULL
CH2 RANGE
CH1 BASE
FULL
CH3 RANGE
CH1 BASE
FULL
CH4 RANGE
CH1 BASE
FULL
CH5 RANGE
CH1 BASE
FULL
CH6 RANGE
CH1 BASE
FULL
1-5V
0.00
100.00
1-5V
0.00
100.00
1-5V
0.00
100.00
1-5V
0.00
100.00
1-5V
0.00
100.00
1-5V
0.00
100.00
1-5V
0.00
100.00
1-5V
0.00
100.00
INPUT TYPE
INPUT RANGE
RCJ ON OFF
INPUT TYPE
INPUT RANGE
RCJ ON OFF
0
0
OFF
0
0
OFF
–
–
–
CH1
CH2
RCJ ON/OFF
RCJ ON/OFF
CONFIGURATION
MENU3/3
CONFIGURATION
AO SETTING
MENU3/3
CONFIGURATION
AI SETTING
MENU3/3
CONFIGURATION
DIRECT SET
TREND JUMP
–
MENU3/3
1Loop
WAFER CONNECT
No.1
No.4
No.5
No.6
No.7
No.8
No.9
No.10
No.11
No.48
No.
1/8
–
MENU3/3
CODE
INPUT 1
INPUT 2
INPUT 3
CODE
INPUT 1
INPUT 2
INPUT 3
CODE
INPUT 1
INPUT 2
INPUT 3
CODE
INPUT 1
INPUT 2
INPUT 3
CODE
INPUT 1
INPUT 2
INPUT 3
CODE
INPUT 1
INPUT 2
INPUT 3
CODE
INPUT 1
INPUT 2
INPUT 3
CODE
INPUT 1
INPUT 2
INPUT 3
0000
0000
0000
0000
0067
0031
0a25
091e
008a
0a10
0881
091e
0067
0a14
0031
091e
0000
0000
0000
0000
000a
0030
0000
0000
0024
0a20
0a18
091e
0000
0000
0000
0000
CONFIGURATION
TREND JUMP
WAFER CONNECT
T-LINK SLV OUT
AO CONNECT
DO CONNECT
ALARM CONNECT
–
0000
0000
WN0.14
WN0.15
0000
0000
CH1
CH2
CH3
CH4
CH5
0000
0000
0a24
0a25
0000
CH01
CH02
CH03
CH04
CH05
CH06
CH07
CH08
CH09
CH10
0000
0000
0000
0000
0000
0000
091e
091a
0942
0943
–
–
–
PARM2
(2/2)
T-LINK WORD
WN0.00
WN0.01
MENU3/3
OUT CONNECT
T-LINK SLAVE
MENU3/3
OUT CONNECT
AO CONNECT
MENU3/3
OUT CONNECT
DO CONNECT
MENU3/3
PH-INH
PL-INH
DPH-INH
DPL-INH
R-ACK
PH
PL
DPH
DPL
–
MENU3/3
WORD MODE
SYUKUTAI
FTLS USE
FAULT CLEAR
WORD
FTLS
FAULT
OUT CONNECT
0000
0000
0000
0000
0097
16W-10
ON
NO
OFF
COMMUNICATION
T-Link MODE
W01
0000
0000
0030
W09
091E
0A25
0031
W05
0000
0000
0000
DO
AO
0A
67
0000
W02
091E
0A18
0A20
W10
091E
0881
0A10
W06
0000
0000
0000
A01
A02
A03(KPV)
A04(SV)
A05
DO1
DO2
DO3
DO4
DO5
DO6
DO7(LS)
DO8(R-REQ)
DO9(H)
DO10(L)
0A20
0A21
0A22
0A23
0A10
0A11
0A12
0A13
0A00
0A01
0A02
0A03
24
8A
0000
0000
0000
0A24
0A25
0000
0000
0000
0000
0000
0000
0000
091E
091A
0942
0943
0A24
0A25
0A26
0A27
0A14
0A15
0A16
0A17
0A04
0A05
0A06
0A07
W03
0000
0000
0000
W11
091E
0031
0A14
W07
0000
0000
0000
0000
67
0000
0A28
0A29
0A2A
0A2B
0A18
0A19
0A1A
0A1B
0A08
0A09
0A0A
0A0B
PH1-INH
PL1-INH
DPH1-INH
DPL1-INH
R-ACK
W04
0000
0000
0000
W12
0000
0000
0000
W08
0000
0000
0000
0000
0000
0000
0000
0000
0000
0000
0097
0A2C
0A2D
0A2E
0A2F
0A1C
0A1D
0A1E
0A1F
0A0C
0A0D
0A0E
0A0F