Agilent B1500A Programming Guide

Agilent B1500A
Semiconductor Device
Analyzer
Programming Guide
Agilent Technologies
Notices
© Agilent Technologies 2005, 2006
Warranty
No part of this manual may be reproduced in
any form or by any means (including electronic storage and retrieval or translation
into a foreign language) without prior agreement and written consent from Agilent
Technologies, Inc. as governed by United
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The material contained in this document is provided “as is,” and is subject to being changed, without notice,
in future editions. Further, to the maximum extent permitted by applicable
law, Agilent disclaims all warranties,
either express or implied, with regard
to this manual and any information
contained herein, including but not
limited to the implied warranties of
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liable for errors or for incidental or
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Manual Part Number
B1500-90011
Edition
Edition 1, August 2005
Edition 2, April 2006
Agilent Technologies, Inc.
395 Page Mill Road
Palo Alto, CA 94303 USA
Technology Licenses
The hardware and/or software described in
this document are furnished under a license
and may be used or copied only in accordance with the terms of such license.
Restricted Rights Legend
If software is for use in the performance of a
U.S. Government prime contract or subcontract, Software is delivered and licensed as
“Commercial computer software” as
defined in DFAR 252.227-7014 (June 1995),
or as a “commercial item” as defined in FAR
2.101(a) or as “Restricted computer software” as defined in FAR 52.227-19 (June
1987) or any equivalent agency regulation or
contract clause. Use, duplication or disclosure of Software is subject to Agilent Technologies’ standard commercial license
terms, and non-DOD Departments and
Agencies of the U.S. Government will
receive no greater than Restricted Rights as
defined in FAR 52.227-19(c)(1-2) (June
1987). U.S. Government users will receive
no greater than Limited Rights as defined in
FAR 52.227-14 (June 1987) or DFAR
252.227-7015 (b)(2) (November 1995), as
applicable in any technical data.
In This Manual
This manual provides the information to control the Agilent B1500 via GPIB
interface using an external computer, and consists of the following chapters:
•
“Programming Basics”
This chapter provides basic information to control the Agilent B1500.
•
“Remote Mode Functions”
This chapter explains the functions of the Agilent B1500 in the remote mode.
•
“Programming Examples”
This chapter lists the GPIB commands and explains the programming examples
for each measurement mode or function. The examples have been written in the
Microsoft Visual Basic .NET or the HP BASIC language.
•
“Command Reference”
This chapter provides the complete reference of the GPIB commands of the
Agilent B1500.
•
“Error Messages”
This chapter lists the error codes, and explains them.
Microsoft, Windows, and Visual Basic are registered trademarks of Microsoft Corporation. All other trademarks are the
property of their respective owners.
Contents
1. Programming Basics
Before Starting . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-3
About Examples . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-4
Getting Started . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-5
To Reset the Agilent B1500 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-6
To Read Query Response . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-6
To Perform Self-Test . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-6
To Perform Self-Calibration . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-6
To Perform Diagnostics . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-7
To Enable Source/Measurement Channels . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-7
To Select the Measurement Mode . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-8
To Force Voltage/Current . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-9
To Set the SMU Integration Time . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-11
To Set the Measurement Range . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-12
To Pause Command Execution. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-13
To Start Measurement. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-13
To Force 0 V . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-13
To Disable Source/Measurement Channels . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-14
To Control ASU . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-14
To Control SCUU . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-15
To Read Error Code/Message. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-16
To Read Spot Measurement Data . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-16
To Read Sweep Measurement Data . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-17
To Read Time Stamp Data . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-18
To Perform High Speed Spot Measurement. . . . . . . . . . . . . . . . . . . . . . . . . . . 1-19
Command Input Format . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-20
Header. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-20
Numeric Data . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-21
Terminator . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-22
Special Terminator . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-22
Agilent B1500 Programming Guide, Edition 2
Contents
Separator . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-22
Data Output Format . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
Conventions . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
ASCII Data Output Format . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
Binary Data Output Format . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
1-23
1-23
1-24
1-33
GPIB Interface Capability . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-50
Status Byte . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-51
Programming Tips . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
To Confirm the Operation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
To Confirm the Command Completion . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
To Disable the Auto Calibration . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
To Optimize the Measurement Range . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
To Optimize the Integration Time . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
To Disable the ADC Zero Function . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
To Optimize the Source/Measurement Wait Time . . . . . . . . . . . . . . . . . . . . . .
To Use the Internal Program Memory . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
To Get Time Data with the Best Resolution . . . . . . . . . . . . . . . . . . . . . . . . . .
To Use Sweep Source as a Constant Source . . . . . . . . . . . . . . . . . . . . . . . . . .
To Start Measurements Simultaneously. . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
To Perform Quasi-Sampling Measurement . . . . . . . . . . . . . . . . . . . . . . . . . . .
To Interrupt Command Execution . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
To Use Programs for Agilent 4142B . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
To Use Programs for Agilent 4155/4156 . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
To Use Programs for Agilent E5260/E5270 . . . . . . . . . . . . . . . . . . . . . . . . . .
1-53
1-54
1-54
1-54
1-55
1-55
1-55
1-56
1-57
1-57
1-57
1-57
1-58
1-58
1-59
1-60
1-62
2. Remote Mode Functions
Measurement Modes . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
Spot Measurements . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
Pulsed Spot Measurements . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
Staircase Sweep Measurements . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
2-3
2-4
2-5
2-6
Agilent B1500 Programming Guide, Edition 2
Contents
Multi Channel Sweep Measurements. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-8
Pulsed Sweep Measurements . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-10
Staircase Sweep with Pulsed Bias Measurements . . . . . . . . . . . . . . . . . . . . . . 2-12
Quasi-Pulsed Spot Measurements . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-15
Binary Search Measurements . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-17
Linear Search Measurements . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-19
Sampling Measurement . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-21
Spot C Measurement . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-23
CV Sweep Measurement . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-24
Synchronous Output. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-26
Automatic Abort Function . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-28
Parallel Measurement Function . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-29
To Enable Parallel Measurement . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-29
To Set Measurement Channels . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-29
Program Memory . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-30
Using Program Memory . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-30
Digital I/O Port. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-33
Accessories . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-34
Digital I/O Internal Circuit . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-35
Trigger Function. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-36
Trigger Input. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-37
Trigger Output . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-39
Using Trigger Function . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-41
Trig In/Out Internal Circuit . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-47
Initial Settings . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-48
3. Programming Examples
Programming Basics for Visual Basic .NET Users . . . . . . . . . . . . . . . . . . . . . . . . 3-4
To Create Your Project Template . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-4
Agilent B1500 Programming Guide, Edition 2
Contents
To Create Measurement Program. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-5
High-Speed Spot Measurements . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-9
Spot Measurements . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-12
Pulsed Spot Measurements . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-15
Staircase Sweep Measurements . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-18
Pulsed Sweep Measurements . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-28
Staircase Sweep with Pulsed Bias Measurements . . . . . . . . . . . . . . . . . . . . . . . 3-32
Quasi Pulsed Spot Measurements . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-36
Linear Search Measurements. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-39
Binary Search Measurements . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-42
Multi Channel Sweep Measurements . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-45
Sampling Measurements . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-49
High-Speed Spot C Measurement . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-54
Spot C Measurements . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-60
CV Sweep Measurements . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-64
Using Program Memory . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-69
Tips to use program memory . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-70
Using Trigger Function . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-75
Reading Time Stamp Data . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-87
Reading Binary Output Data . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-88
Using Programs for 4142B . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-91
Using Programs for 4155B/4156B/4155C/4156C. . . . . . . . . . . . . . . . . . . . . . . . 3-93
4. Command Reference
Agilent B1500 Programming Guide, Edition 2
Contents
Command Summary . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-3
Command Parameters . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-10
Command Reference . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-18
AAD . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-19
AB . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-20
ACH . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-22
ACT . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-23
ACV . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-24
ADJ. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-24
ADJ? . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-25
AIT . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-26
AV. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-28
AZ . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-30
BC . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-30
BDM . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-31
BDT . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-31
BDV . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-32
BGI . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-33
BGV . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-35
BSI . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-37
BSM . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-38
BSSI . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-41
BSSV . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-42
BST. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-43
BSV . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-44
BSVM. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-45
CA . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-46
*CAL? . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-47
CL . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-48
CLCORR . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-49
CM . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-49
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Contents
CMM . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
CN . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
CORR? . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
CORRL . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
CORRL?. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
CORRST . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
CORRST? . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
DCORR . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
DCORR? . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
DCV . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
DI . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
DIAG? . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
DO . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
DV . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
DZ . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
EMG? . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
END . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
ERC . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
ERM . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
ERR? . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
ERS?. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
FC. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
FL . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
FMT . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
*IDN? . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
IMP. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
IN . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
LGI . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
LGV . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
LMN. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
LOP? . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
*LRN? . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
4-50
4-51
4-53
4-54
4-54
4-55
4-55
4-56
4-57
4-58
4-59
4-60
4-61
4-62
4-63
4-64
4-64
4-65
4-66
4-67
4-68
4-69
4-69
4-70
4-72
4-73
4-74
4-75
4-76
4-77
4-78
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Contents
LSI . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-85
LSM . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-86
LSSI . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-87
LSSV . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-88
LST? . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-89
LSTM . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-91
LSV . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-92
LSVM . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-93
MCC . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-93
MI . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-94
ML . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-95
MM . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-96
MSC . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-98
MT . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-99
MV . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-101
NUB? . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-102
*OPC?. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-102
OS . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-103
OSX . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-103
PA . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-104
PAD . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-105
PAX . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-106
PI . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-107
PT . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-108
PV . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-109
PWI . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-110
PWV . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-111
RC. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-112
RCV . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-113
RI . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-114
RM . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-115
*RST . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-116
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RU . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
RV . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
RZ . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
SAL . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
SAP . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
SAR . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
SCR . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
*SRE . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
*SRE? . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
SSL. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
SSP . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
SSR. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
ST . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
*STB? . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
TACV . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
TC. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
TDCV. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
TDI . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
TDV . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
TGMO . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
TGP . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
TGPC . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
TGSI. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
TGSO . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
TGXO. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
TI . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
TM . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
TSC . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
TSQ . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
TSR . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
*TST? . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
TTC . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
4-116
4-117
4-118
4-119
4-120
4-121
4-121
4-122
4-123
4-124
4-125
4-127
4-128
4-129
4-130
4-131
4-132
4-133
4-134
4-135
4-136
4-138
4-139
4-140
4-140
4-141
4-142
4-143
4-144
4-144
4-145
4-146
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Contents
TTI . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-147
TTV . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-148
TV. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-149
UNT? . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-149
VAR . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-150
VAR? . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-150
WAT . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-151
WDCV . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-153
WI . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-154
WM . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-156
WMDCV . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-157
WNU? . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-158
WNX. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-159
WS . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-162
WSI. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-163
WSV . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-165
WSX . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-167
WT . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-168
WTDCV . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-170
WV . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-171
WZ? . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-173
XE . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-174
5. Error Messages
Error Codes . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-3
Operation Error. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-3
Self-test/Calibration Error . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-14
Agilent B1500 Programming Guide, Edition 2
Contents
Agilent B1500 Programming Guide, Edition 2
1
Programming Basics
Programming Basics
This chapter describes basic information to control the Agilent B1500, and contains
the following sections:
•
“Before Starting”
•
“Getting Started”
•
“Command Input Format”
•
“Data Output Format”
•
“GPIB Interface Capability”
•
“Status Byte”
•
“Programming Tips”
1-2
Agilent B1500 Programming Guide, Edition 2
Programming Basics
Before Starting
Before Starting
Before starting the programming using the Agilent FLEX command, perform
following.
1. If the EasyEXPERT software is running, terminate it as shown below:
a. Select the menu function File > Exit on the EasyEXPERT main window.
b. Click [x] at the upper right corner of the Start EasyEXPERT button.
2. Select All Programs > Agilent IO Libraries Suite > Agilent Connection Expert
from the Start menu. The Agilent Connection Expert window appears.
3. At the Instrument I/O on this PC area, highlight GPIB0, and click the Change
Properties... button. The Agilent 82350 PCI GPIB Interface - GPIB0 window
appears.
4. Set the GPIB Address value to the number (ex: 17) as you want.
5. Remove the check from the System Controller box.
6. Remove the check from the Auto-discover instruments connected to this
interface box.
7. Click the OK button on the Agilent 82350 PCI GPIB Interface - GPIB0 window.
8. On the Reboot Required dialog box, click the Reboot Now button, and reboot
the B1500A.
NOTE
Start EasyEXPERT Button
Leave the Start EasyEXPERT button on the B1500A screen. The button must be
displayed on the screen or minimized to the Windows task bar. The Start
EasyEXPERT service must be run to control the Agilent B1500A from an external
computer.
Agilent B1500 Programming Guide, Edition 2
1-3
Programming Basics
Before Starting
About Examples
In this section, command execution examples are written in HP BASIC. See the
following instructions for your guidance.
1. Use the ASSIGN statement to assign the I/O path for controlling instruments.
In the next example, the select code of the external computer is 7 and the GPIB
address of the B1500 is 17.
10 ASSIGN @B1500 TO 717
2. Use the OUTPUT statement to send commands to instruments, as shown below.
OUTPUT @B1500;"*RST"
It is available to send multiple commands as shown below.
OUTPUT @B1500;"*CN;MM2,1"
3. Use the ENTER statement to get a query response or data from instruments.
1-4
Agilent B1500 Programming Guide, Edition 2
Programming Basics
Getting Started
Getting Started
This section explains the following basic operations. In this section, the HP BASIC
language is used for the examples.
•
“To Reset the Agilent B1500”
•
“To Read Query Response”
•
“To Perform Self-Test”
•
“To Perform Self-Calibration”
•
“To Perform Diagnostics”
•
“To Enable Source/Measurement Channels”
•
“To Select the Measurement Mode”
•
“To Force Voltage/Current”
•
“To Set the SMU Integration Time”
•
“To Set the Measurement Range”
•
“To Pause Command Execution”
•
“To Start Measurement”
•
“To Force 0 V”
•
“To Disable Source/Measurement Channels”
•
“To Control ASU”
•
“To Control SCUU”
•
“To Read Error Code/Message”
•
“To Read Spot Measurement Data”
•
“To Read Sweep Measurement Data”
•
“To Read Time Stamp Data”
•
“To Perform High Speed Spot Measurement”
Agilent B1500 Programming Guide, Edition 2
1-5
Programming Basics
Getting Started
To Reset the Agilent B1500
The B1500 returns to the initial settings by the *RST command.
Example
OUTPUT @B1500;"*RST"
For the initial settings, see “Initial Settings” on page 2-48.
To Read Query Response
If you enter a query command such as the *TST?, ERR? and so on, the B1500 puts
an ASCII format response to the query buffer that can store only one response. Read
the response as soon as possible after entering a query command.
Example
OUTPUT @B1500;"NUB?"
ENTER @B1500;A
This example returns the number of data stored in the data output buffer.
To Perform Self-Test
The B1500 starts the self-test by the *TST? command. The *TST? command also
returns the test result.
Example
OUTPUT @B1500;"*TST?"
ENTER @B1500;Code
IF Code<>0 THEN DISP "FAIL: SELF-TEST"
This example starts the self-test, and reads the test result code. For the test result
code, see “*TST?” on page 4-145.
To Perform Self-Calibration
The B1500 starts the self-calibration by the *CAL? command.
Example
OUTPUT @B1500;"*CAL?"
ENTER @B1500;Result
IF Result<>0 THEN DISP "FAIL: CALIBRATION"
This example starts the self-calibration, and reads the result, pass or fail. For details,
see “*CAL?” on page 4-47.
1-6
Agilent B1500 Programming Guide, Edition 2
Programming Basics
Getting Started
To Perform Diagnostics
The B1500 starts the diagnostics by the DIAG? command, and returns the result.
You must specify the diagnostics item by the command parameter. Available
parameter values are:
1: Trigger In/Out diagnostics
3: High voltage LED diagnostics
4: Digital I/O diagnostics
To perform diagnostics 1, connect a BNC cable between the Ext Trig In terminal
and the Ext Trig Out terminal before starting the diagnostics.
To perform diagnostics 4, disconnect any cable from the digital I/O port.
Example
OUTPUT @B1500;"DIAG? 1"
ENTER @B1500;Result
IF Result<>0 THEN DISP "FAIL: DIAGNOSTICS"
This example starts the Trigger In/Out diagnostics, and reads the result, pass or fail.
For details, see “DIAG?” on page 4-60.
To Enable Source/Measurement Channels
The measurement channels or source channels can be enabled by closing the output
switch. To close the switch, send the CN command. The B1500 closes the output
switch of the specified channels.
Example
OUTPUT @B1500;"CN 1"
This example enables channel 1 (the module installed in slot 1 of the B1500). If you
do not specify the channel, the CN command enables all channels.
Agilent B1500 Programming Guide, Edition 2
1-7
Programming Basics
Getting Started
To Select the Measurement Mode
The B1500 provides the following measurement modes. To select the measurement
mode, send the MM command. In the following table, the Mode No. means a
command parameter of the MM command.
Measurement Mode (measurement parameter)
Syntax
Mode No.
Spot Measurement (current or voltage)
1
Staircase Sweep Measurement (current or voltage)
2
Pulsed Spot Measurement (current or voltage)
3
Pulsed Sweep Measurement (current or voltage)
4
Staircase Sweep with Pulsed Bias Measurement (current or voltage)
5
Quasi-Pulsed Spot Measurement (current or voltage)
9
Sampling Measurement (current or voltage)
10
Linear Search Measurement (current or voltage)
14
Binary Search Measurement (current or voltage)
15
Multi Channel Sweep Measurement (current or voltage)
16
Spot C Measurement (impedance)
17
CV Sweep Measurement (impedance-voltage)
18
High Speed Spot Measurement (current, voltage, or impedance)
NA
MM Mode#[,Ch#[,Ch#] ... ]
where, Mode# specifies the Mode No., and Ch# specifies the measurement channel.
The available number of measurement channels depends on the measurement mode.
For details, see “MM” on page 4-96.
Example
OUTPUT @B1500;"MM 2,1"
This example sets the staircase sweep measurement, and assigns channel 1 (the
module installed in slot 1 of the B1500) as the measurement channel.
NOTE
The Mode No. is not assigned for the high speed spot measurement. See “To
Perform High Speed Spot Measurement” on page 1-19. The high speed spot
measurement does not need the MM command.
For the source output commands available for each measurement mode, see Table
1-1 on page 1-10.
1-8
Agilent B1500 Programming Guide, Edition 2
Programming Basics
Getting Started
To Force Voltage/Current
The B1500 provides the following commands to enable the voltage/current output.
For the commands available for each measurement mode, see Table 1-1.
Command
Description
DV
Applies DC voltage immediately.
DI
Applies DC current immediately.
WV
Sets the staircase sweep voltage source.
WSV
Sets the synchronous sweep voltage source.
WI
Sets the staircase sweep current source.
WSI
Sets the synchronous sweep current source.
PT
Set the timing parameters of the pulse source.
PV
Sets the pulsed voltage source.
PI
Sets the pulsed current source.
PWV
Sets the pulsed sweep voltage source.
PWI
Sets the pulsed sweep current source.
WNX
Sets a sweep source for the multi sweep measurement.
BDV
Sets the quasi-pulsed voltage source.
MV
For sampling measurement. Sets the DC voltage source.
MI
For sampling measurement. Sets the DC current source.
LSV
Sets the linear search voltage source.
LSSV
Sets the linear search synchronous voltage source.
LSI
Sets the linear search current source.
LSSI
Sets the linear search synchronous current source.
BSV
Sets the binary search voltage source.
BSSV
Sets the binary search synchronous voltage source.
BSI
Sets the binary search current source.
BSSI
Sets the binary search synchronous current source.
FC
For spot C/CV sweep measurement. Sets the output signal frequency of CMU.
ACV
For spot C/CV sweep measurement. Sets the output signal level of CMU.
DCV
For spot C measurement. Applies DC voltage immediately.
WDCV
For CV sweep measurement. Sets the DC voltage sweep source.
Agilent B1500 Programming Guide, Edition 2
1-9
Programming Basics
Getting Started
Table 1-1
Measurement Mode and Available Source Output Commands
Measurement Mode
Command
Spot Measurement
DV, DI
Staircase Sweep Measurement
DV, DI, and WV(/WSV) or WI(/WSI)
Pulsed Spot Measurement
DV, DI, and PV/PT or PI/PT
Pulsed Sweep Measurement
DV, DI, and
PWV/PT(/WSV) or PWI/PT(/WSI)
Staircase Sweep with Pulsed Bias
Measurement
DV, DI, and WV(/WSV) or WI(/WSI), and
PV/PT or PI/PT
Quasi-Pulsed Spot Measurement
DV, DI, BDV
Sampling Measurement
DV, DI, MV, MI
Linear Search Measurement
DV, DI, and LSV(/LSSV) or LSI(/LSSI)
Binary Search Measurement
DV, DI, and BSV(/BSSV) or BSI(/BSSI)
Multi Channel Sweep Measurement
DV, DI, WNX, and WV or WI
Spot C Measurement
DV, DI, ACV/FC, DCV
CV Sweep Measurement
DV, DI, ACV/FC, WDCV
High Speed Spot Measurement
DV, DI (current or voltage measurement)
DV, DI, ACV/FC, DCV (CV sweep/spot C
measurement)
The DV, DI, DCV, and ACV commands start to force the voltage or current
immediately when the command is executed. The other commands just set the
source channel condition, and the source channel starts the output by the start
trigger, such as the XE command. For more details of the commands, see Chapter 4,
“Command Reference.”
Example
OUTPUT @B1500;"DV 1,0,5"
This example just forces 5 V using channel 1 (the module installed in slot 1 of the
B1500) with auto ranging.
1-10
Agilent B1500 Programming Guide, Edition 2
Programming Basics
Getting Started
To Set the SMU Integration Time
To adjust the balance of the SMU’s measurement accuracy and speed, change the
integration time or the number of averaging samples of the A/D converter (ADC) by
using the AV command. The AV command is compatible with the AV command of
the Agilent 4142B.
For accurate and reliable measurement, set the integration time longer or set the
number of samples larger. For details about the integration time settings, see
Chapter 4, “Command Reference.”
The Agilent B1500 has the following two types of the A/D converter. Use the AAD
command to select the type of ADC, and use the AIT command to set the integration
time or the number of samples.
Type of ADC
High-speed ADC
Description
Effective for the high speed measurement. In the multi
channel sweep measurement mode (MM16), multiple
measurement channels can perform synchronous
measurements.
The number of averaging samples must be set by the
AIT or AV command.
High-resolution ADC
Effective for the accurate measurement. Cannot be used
for the pulsed measurement channel and the
simultaneous measurement channel.
The integration time must be set by the AIT command.
Example
The following example sets the number of samples to 10 for the high-speed A/D
converter.
OUTPUT @B1500;"AV 10,1"
The following example sets the power line cycle mode (PLC) for both the
high-speed ADC and the high-resolution ADC. And channel 1 uses the
high-resolution ADC and other channels use the high-speed ADC.
OUTPUT
OUTPUT
OUTPUT
OUTPUT
@B1500;"*RST"
@B1500;"AIT 0,2"
@B1500;"AIT 1,2"
@B1500;"AAD 1,1"
Agilent B1500 Programming Guide, Edition 2
1-11
Programming Basics
Getting Started
To Set the Measurement Range
To set the measurement range, send the following command:
Command
RI
TI, TTI
RV
Description
Sets the current measurement range. Available for the
current measurements that use the XE command. Not
available for the high speed spot measurement.
Sets the current measurement channel/range, and performs
the high speed spot measurement.
Sets the voltage measurement range. Available for the
voltage measurements that use the XE command. Not
available for the high speed spot measurement.
TV, TTV
Sets the voltage measurement channel/range, and performs
the high speed spot measurement.
RC
Sets the impedance measurement range. Available for the
CV sweep/spot C measurements.
TC, TTC
Sets the impedance measurement channel/range, and
performs the high speed spot measurement.
For the current measurement with the auto ranging mode, you can specify the
coverage of each measurement range. To specify the coverage, send the RM
command.
For details, see Chapter 4, “Command Reference.”
Example
This example sets the voltage measurement ranging mode of channel 1 to auto.
OUTPUT @B1500;"RV 1,0"
This example sets the current measurement ranging mode of channel 1 to auto, and
specifies coverage between 9 % and 90 % of the range value or between 90 mA and
180 mA for the 200 mA range.
OUTPUT @B1500;"RI 1,0"
OUTPUT @B1500;"RM 1,3,90"
1-12
Agilent B1500 Programming Guide, Edition 2
Programming Basics
Getting Started
To Pause Command Execution
To pause command execution until the specified wait time elapses, send the PA
command.
Example
OUTPUT @B1500;"PA 5"
If this command is sent, the B1500 waits 5 seconds before executing the next
command.
To Start Measurement
To start measurement other than the high speed spot measurement, send the XE
command.
Example
OUTPUT @B1500;"XE"
This starts the measurement specified by the MM command.
For the high speed spot measurement, see “To Perform High Speed Spot
Measurement” on page 1-19.
To Force 0 V
To force 0 V immediately, send the DZ command. The B1500 memorizes the
present source output settings of the specified channel, and changes the specified
channel output to 0 V. If you do not specify the channel, the DZ command function
is effective for all channels.
Example
OUTPUT @B1500;"DZ 1"
If this command is sent, the B1500 memorizes the current settings of channel 1 (the
module installed in slot 1 of the B1500), and changes channel 1 output to 0 V.
To restore the settings stored by the DZ command, send the RZ command. For
details, see Chapter 4, “Command Reference.”
Agilent B1500 Programming Guide, Edition 2
1-13
Programming Basics
Getting Started
To Disable Source/Measurement Channels
To disable the channels, send the CL command. The B1500 opens the output switch
of the specified channels. Opening the output switch disables the channel.
Example
OUTPUT @B1500;"CL 1"
This example disables channel 1 (the module installed in slot 1 of the B1500). If you
do not specify the channel, the CL command disables all channels.
To Control ASU
This function is available for the B1500 that is installed with the high resolution
SMU (HRSMU). Atto Sense and Switch Unit (ASU) has two inputs, SMU input for
the HRSMU and AUX input for the other instrument. And the ASU input to output
connection can be controlled by the following commands. When the B1500 is
turned on, the SMU input will be connected to the ASU output. However, the SMU
output switch will be off at this time.
Table 1-2
ASU Input Output Connection Control
Previous Connection
Command
Subsequent Connection
SMU side, Output on/off
SAP slot, 1
AUX side
SMU side, Output off
CN slot
SMU side, Output on
SAP slot, 0
AUX side
CN slot
SAP slot, 0
CL [slot]
SMU side, Output on
SMU side, Output off
CL [slot]
where, slot must be the slot number assigned to the slot that installs the HRSMU
connected to the ASU.
When the SMU side is connected to the ASU output, the source output on/off can be
controlled by the CN/CL command. And then the SAP slot, 1 command is used to
change the output connection to the AUX side. When the AUX side is connected,
the output of the instrument connected to the AUX input is appeared to the ASU
output immediately.
1-14
Agilent B1500 Programming Guide, Edition 2
Programming Basics
Getting Started
To Control SCUU
SCUU (SMU CMU Unify Unit) can be used with one capacitance measurement unit
(CMU) and two SMUs (MPSMU or HRSMU). The SCUU cannot be used with the
HPSMU or when only one SMU is connected. The SCUU input to output
connection can be controlled by the following commands. When the B1500 is
turned on, the SCUU input to output connection is not made (open).
Table 1-3
SCUU Input Output Connection Control
SCUU output connection after the command
Command
CMUH/Force1/Sense1
CMUL/Force2/Sense2
SSP slot, 1
Force1/Sense1
Open
SSP slot, 2
Open
Force2/Sense2
SSP slot, 3
Force1/Sense1
Force2/Sense2
SSP slot, 4
CMUH
CMUL
where, slot means the number assigned to the slot that installs the CMU.
Force1/Sense1 is connected to the SMU installed in the slot numbered slot-1.
Force2/Sense2 is connected to the SMU installed in the slot numbered slot-2. When
the SCUU input to output connection is made, the measurement unit output switch
will be automatically set to ON.
When the connection is changed from SMU to CMU, the SMU output will be set as
follows. The other setup parameters are not changed.
Output voltage
0V
Output range
100 V
Compliance
20 mA
Series resistance
OFF
When the connection is changed from CMU to SMU, the SMU output will be set as
follows. The other setup parameters are not changed.
Output voltage
0V
Output range
20 V
Compliance
100 μA
Series resistance
Condition before the connection is changed from SMU to CMU
Agilent B1500 Programming Guide, Edition 2
1-15
Programming Basics
Getting Started
To Read Error Code/Message
If any error occurs, the B1500 will not put the measurement data into the data output
buffer. Hence, confirm that no error has occurred before reading the measurement
data. To read the error code, enter the ERR? command, and to read the error
message, enter the EMG? command.
Example
OUTPUT @B1500;"ERR? 1"
ENTER @B1500;Code
IF Code<>0 THEN
OUTPUT @B1500;"EMG? ";Code
ENTER @B1500;Msg$
PRINT "ERROR: ";Msg$
ELSE
:
:
This example checks the error buffer, and prints the error message on the computer
screen if any error code is stored in the error buffer.
To Read Spot Measurement Data
After the spot measurements, the B1500 puts the measurement data into its output
data buffer. You can read the data as shown below. For the data output format, see
“Data Output Format” on page 1-23.
Example 1
For the HP BASIC users, use the ENTER statement. The example stores the header
information and the measurement data included in the ASCII data set by the FMT5
command into the Head$ and Mdata variables respectively.
ENTER @B1500 USING "#,3A,12D,X";Head$,Mdata
Example 2
For the Microsoft Visual Basic .NET with Agilent T&M Programmer’s Toolkit
users, use the Read, ReadList, UnbufferedRead methods and so on. The example
stores the header information and the measurement data included in the ASCII data
set by the FMT5 command into the head and mdata variables respectively.
ret_value = B1500.Read(True)
head = Left(ret_val, 3)
mdata = Val(Right(ret_val, 12))
1-16
Agilent B1500 Programming Guide, Edition 2
Programming Basics
Getting Started
To Read Sweep Measurement Data
For the sweep measurements, the measurement data will be put into the data output
buffer after every step measurement. You can read the data as shown below. For the
data output format, see “Data Output Format” on page 1-23.
•
To read data after sweep measurement
This way waits for the measurement completion by using the *OPC? command
after the XE command, and reads the sweep data (all step measurement data) at
once after the sweep measurement is completed.
Example:
B1500.WriteLine("FMT 5,0")
’terminator=comma
B1500.WriteLine("XE")
B1500.WriteLine("*OPC?")
rep = B1500.Read(True)
ret_val = B1500.ReadListAsStringArray() ’string array
For i = 0 To nop - 1
’nop=number of sweep steps
head = Left(ret_val(i), 3)
mdata = Val(Right(ret_val(i), 12))
ddata = "Data = " & mdata & ", Header = " & head
Console.WriteLine(ddata)
Next i
For the specific example, see Table 3-5 on page 3-19.
•
To read data after every step measurement
This way starts to read the data after the XE command. You do not need to wait
for the sweep measurement completion. So you can check the result data before
the sweep measurement is completed.
Example:
B1500.WriteLine("FMT 5,0")
’terminator=comma
B1500.TerminationCharacter = Chr(44)
’Chr(44)=comma
B1500.TerminationCharacterEnabled = True ’enables comma
B1500.WriteLine("XE")
For i = 0 To nop - 1
’nop=number of sweep steps
ret_val = B1500.Read(True)
’string
head = Left(ret_val, 3)
mdata = Val(Right(ret_val, 12))
ddata = "Data = " & mdata & ", Header = " & head
Console.WriteLine(ddata)
Next i
For the specific example, see Table 3-6 on page 3-22.
Agilent B1500 Programming Guide, Edition 2
1-17
Programming Basics
Getting Started
To Read Time Stamp Data
NOTE
This function is not available for the quasi-pulsed spot measurement (MM 9), search
measurement (MM 14 or 15), and the 4 byte binary data output (FMT 3 or 4).
To read the time data with the best resolution (100 μs), clear the timer every 100 s or
less (for FMT 1, 2, or 5), or 1000 s or less (for FMT 11, 12, 15, 21, 22, or 25).
The time stamp function records the time from timer reset (Time=0 s) to the start of
measurement. This function is enabled by the TSC command. The timer count is
cleared/reset by the TSR command.
For example, the output data in the staircase sweep measurement will be as follows:
Block1 [,Block2] . . . . <terminator>
BlockN (N: integer) = Time1,Data1 [,Time2,Data2] ... [,Source_data]
TimeN (N: integer) is the time from timer reset to the start of DataN measurement.
Without the TSC command, you can get the time data by the following commands:
•
TDV / TDI (for voltage/current output by using a SMU),
TDCV / TACV (for DC voltage/AC voltage output by using the MFCMU):
Starts source output, and returns the time data from timer reset (TSR command)
to the start of output.
Example:
•
OUTPUT @B1500;"TDV 1,0,20"
ENTER @B1500 USING "#,5X,13D,X";Time
PRINT "Time=";Time;"sec"
TTV / TTI (for voltage/current measurement by using a SMU),
TTC (for impedance measurement by using the MFCMU):
Executes high speed spot measurement, and returns the measurement data and
the time data from timer reset (TSR command) to the start of measurement.
Example:
•
OUTPUT @B1500;"TTV 1,0"
ENTER @B1500 USING "#,5X,13D,X";Time
ENTER @B1500 USING "#,5X,13D,X";Mdata
PRINT "Data=";Mdata;" at ";Time;"sec"
TSQ: Returns the time data from timer reset (TSR command) to this command.
Example:
1-18
OUTPUT @B1500;"TSR"
!Resets count
:
OUTPUT @B1500;"TSQ"
!Returns time data
ENTER @B1500 USING "#,5X,13D,X";Time
PRINT "Time=";Time;"sec"
Agilent B1500 Programming Guide, Edition 2
Programming Basics
Getting Started
To Perform High Speed Spot Measurement
The high speed spot measurement does not need the MM and XE commands to set
the measurement mode and start measurement. To start and perform the high speed
spot measurement immediately, send the TI command for current measurement, the
TV command for voltage measurement, or the TC command for impedance
measurement. The following example program measures current by using the TI
command, and displays the measurement result data on the computer screen.
Example
10
20
30
40
50
60
70
80
90
100
110
120
130
140
ASSIGN @B1500 TO 717
OUTPUT @B1500;"*RST"
OUTPUT @B1500;"FMT 5"
OUTPUT @B1500;"CN 1,2,3,4"
OUTPUT @B1500;"DV 1,0,0"
OUTPUT @B1500;"DV 2,0,0"
OUTPUT @B1500;"DV 3,0,2"
OUTPUT @B1500;"DV 4,0,5"
OUTPUT @B1500;"TI 4,0"
ENTER @B1500 USING "#,3A,12D,X";Head$,Data
PRINT Head$,Data
OUTPUT @B1500;"DZ"
OUTPUT @B1500;"CL"
END
Line
Number
Description
10
Assigns the I/O path to control the B1500.
20
Initializes the B1500.
30
Sets the data output format (ASCII with header and <,>).
40
Enables channels 1, 2, 3, and 4.
50 to 80
Forces the DC voltage. Channel 1 and 2 force 0 V, channel 3 forces
2 V, and channel 4 forces 5 V with auto ranging.
90
Performs the high speed spot measurement using channel 4 with
auto ranging.
100 to 110
Prints the header data and measurement data on the screen.
120
Forces 0 V. All channels force 0 V.
130
Disables all channels.
Agilent B1500 Programming Guide, Edition 2
1-19
Programming Basics
Command Input Format
Command Input Format
Agilent FLEX commands (GPIB commands for the Agilent B1500) are composed
of a header, numeric data, and terminator, as shown in the following syntax diagram.
B1500 Control Command Syntax Diagram
;
Separator
,
Header
Numeric Data
SP
SP
Terminator
SP
SP : Space
NOTE
Terminator
Terminator is necessary to enter the command to the Agilent B1500. For the
available terminators, see “Terminator” and “Special Terminator” on page 1-22.
Header
The header is the command name, always contains alpha characters, and is not
upper or lowercase sensitive. Some command names also contain an asterisk (*) or
question mark (?). The following figure shows the syntax diagram for a header.
Header Syntax Diagram
Alpha Character
(A to Z, a to z)
*
1-20
?
Agilent B1500 Programming Guide, Edition 2
Programming Basics
Command Input Format
Numeric Data
Numeric data are the command parameters. You can enter numeric data directly
after the header or insert spaces between the header and numeric data. Some
parameters require integer data. The following figure shows the syntax diagram for
numeric data.
Numeric Data Syntax Diagram
Integer Data
Fixed Point Data
Floating Point Data
The following 3 figures show the syntax diagrams for integer, fixed point, and
floating point data, respectively.
Integer Data Syntax Diagram
+
Digit
(0 to 9)
−
SP
SP
SP : Space
Fixed Point Data Syntax Diagram
+
SP
−
Digit
(0 to 9)
Digit
(0 to 9)
SP
SP : Space
Floating Point Data Syntax Diagram
SP
−
*1
+
+
Digit
(0 to 9)
Digit
(0 to 9)
E
e
Digit
(0 to 9)
−
SP
SP : Space
*1: Here must be 2 digits or less.
Agilent B1500 Programming Guide, Edition 2
1-21
Programming Basics
Command Input Format
Terminator
The terminator completes the GPIB command entry and starts command execution.
The following figure shows the terminator syntax diagram.
Terminator Syntax Diagram
CR
LF
LF
^
EOI
Special Terminator
If a semicolon (;) is inserted before the terminator, as shown in the following figure,
the preceding commands are not executed until the next command line is input and
another terminator is input, without a preceding semicolon. The command lines are
then executed together.
Special Terminator Syntax Diagram
;
CR
LF
LF
^
EOI
Separator
If you enter multiple commands, use semicolons (;) to separate the commands.
Spaces are allowed before and after the semicolons. Command execution starts
when the terminator is received, not when the semicolon is received. You can input
multiple commands of up to a total of 256 characters (including the terminator). If
you input more than 256 characters, the input buffer overflows, and an error is
indicated.
Use commas (,) to separate numeric data entries.
NOTE
Do not include the reset command (*RST) or the abort command (AB) in multiple
command strings (example: OUTPUT @B1500;”*RST;CN”). If you do, the other
commands in the string (example: CN) are not executed.
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Agilent B1500 Programming Guide, Edition 2
Programming Basics
Data Output Format
Data Output Format
Agilent B1500 provides the following data output formats:
•
“ASCII Data Output Format”
The B1500 supports the ASCII data format that is the common format for the
instruments that support the Agilent FLEX command mode.
•
“Binary Data Output Format”
The B1500 supports the 4 bytes binary data format that is the common format
for the instruments that support the Agilent FLEX command mode. The B1500
also supports the dedicated 8 bytes binary format. The binary format enables
faster data transfer time than ASCII format. You need to calculate the data to get
the measurement result.
To select the data output format, use the FMT command. See “FMT” on page 4-70.
For the query response, the returned data is always stored in the query buffer in
ASCII format, regardless of the FMT command setting.
A minimum of 17×1001×2 (34034) measurement data can be stored in the data
output buffer.
Conventions
The following conventions are used in this section.
Data
Output data that the B1500 sends after a measurement.
[Data]
Optional output data sent when there are multiple output data
items.
For example, source data will be sent with measurement data
after the staircase sweep measurements when the source data
output is enabled by the FMT command.
<terminator>
Terminator.
<CR/LF^EOI> (two bytes) or <,> (one byte) for ASCII data.
<CR/LF^EOI> (two bytes) or <^EOI> (0 byte) for binary data.
You can select by using the FMT command.
Agilent B1500 Programming Guide, Edition 2
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Programming Basics
Data Output Format
ASCII Data Output Format
This section describes the ASCII data output format, and the elements of the data.
•
“Time Stamp”
•
“Data Format”
•
“Data Elements”
Time Stamp
NOTE
Time stamp function is not available for the high speed spot, quasi-pulsed spot
(MM9), and search (MM14 and MM15) measurements.
The B1500 can record the time when the measurement is started, and sends the time
data (Time). This function is enabled by the TSC command. The time data will be
sent just before the measurement data. For example, in the staircase sweep
measurements, the data will be as shown below.
Block1 [,Block2] . . . . <terminator>
where, BlockN (N: integer) = Time1,Data1 [,Time2,Data2] ... [,Source_data], then
TimeN (N: integer) is the time from timer reset to the start of DataN measurement.
The timer count is cleared/reset by the TSR command (Time=0).
Data Format
The data output format depends on the measurement mode as shown below.
High Speed Spot
Data <terminator>
(by TI or TV command)
Time,Data <terminator>
(by TTI or TTV command)
Data1,Data2 <terminator>
(by TC command)
Time,Data1,Data2 <terminator>
(by TTC command)
Data is the value measured by the channel you specify in the command. Time is the
time from timer reset to the start of measurement. Data1 and Data2 are the primary
parameter and the secondary parameter (ex: Cp and G) measured by the CMU. They
are selected by the IMP command.
Spot
Data1 [,Data2] . . . . <terminator>
DataN (N: integer) is the value measured by a channel. The order of Data is defined
by the MM command.
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Agilent B1500 Programming Guide, Edition 2
Programming Basics
Data Output Format
Pulsed Spot,
Data <terminator>
Quasi-Pulsed Spot
Data is the value measured by the channel you specify by using the MM command.
Staircase Sweep,
Multi Channel
Sweep
Block1 [,Block2] . . . . <terminator>
Block1 is the block of data measured at the first sweep point. Block2 is the block of
data measured at the second sweep point. where Block consists of the following
data:
Data1 [,Data2] . . . . [,Source_data]
DataN (N: integer) is the value measured by a channel. The order of Data is defined
by the MM command. Source_data is the sweep source output value. It is sent if the
data output is enabled by the FMT command.
Pulsed Sweep,
Staircase Sweep
with Pulsed Bias
Block1 [,Block2] . . . . <terminator>
Block1 is the block of data measured at the first sweep point. Block2 is the block of
data measured at the second sweep point. where Block consists of the following
data:
Data [,Source_data]
Data is the value measured by the channel you specify by using the MM command.
Source_data is the sweep source output value. It is sent if the data output is enabled
by the FMT command.
Sampling
Block1 [,Block2] . . . . <terminator>
Block1 is the block of the data measured at the first sampling point.
Block2 is the block of the data measured at the second sampling point.
where Block consists of the following data:
[Sampling_no,] Data1 [,Data2] . . . .
Sampling_no is the sampling point index, and is returned by entering the FMT
command with mode<>0. This value depends on the sampling interval setting and
the measurement time. If the measurement time is shorter than the sampling
interval, Sampling_no will be N of BlockN (N: 1, 2, 3 . . . ).
DataN (N: integer) is the data measured by one unit. The order of Data is specified
by the MM command. Sampling_no and Data values can be discarded when the
range changing is occurred while the measurement with auto or limited auto
ranging.
Agilent B1500 Programming Guide, Edition 2
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Programming Basics
Data Output Format
If the measurement time is longer than the sampling interval, Sampling_no is not N
of BlockN. For example, if the measurement time is longer than the sampling
interval and shorter than twice the sampling interval, then the Sampling_no is 2 for
Block1, and 4 for Block2. In general, the measurement time depends on the
measurement value and the A/D converter settings.
Linear Search,
Binary Search
Spot C
Data_search [,Data_sense]<terminator>
This is the data at the measurement point closest to the search target. Data_search is
the value forced by the search output channel. Data_sense is the value measured by
the search monitor channel. It is sent if data output is enabled by the BSVM
command for the binary search, or the LSVM command for the linear search.
Data1,Data2 [,Osc_level,Dc_bias] <terminator>
Data1 and Data2 are the primary parameter and the secondary parameter (ex: Cp
and G). They are selected by the IMP command. See Table 4-8 on page 4-16. And
Osc_level and Dc_bias are the monitor values of the oscillator level (AC signal
level) and the DC bias respectively. They are sent if the data output is enabled by the
LMN command.
CV Sweep
Block1 [,Block2] . . . . <terminator>
Block1 is the block of data measured at the first sweep point. Block2 is the block of
data measured at the second sweep point. where Block consists of the following
data:
Data1,Data2 [,Osc_level,Dc_bias][,Source_data]
Data1 and Data2 are the primary parameter and the secondary parameter (ex: Cp
and G). They are selected by the IMP command. See Table 4-8 on page 4-16. And
Osc_level and Dc_bias are the monitor values of the oscillator level (AC signal
level) and the DC bias respectively. They are sent if the data output is enabled by the
LMN command. Source_data is the DC bias output value. It is sent if the data output
is enabled by the FMT command.
TDI, TDV, TSQ,
TACV, TDCV
command
Time <terminator>
Time is the time from timer reset to the start of output.
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Agilent B1500 Programming Guide, Edition 2
Programming Basics
Data Output Format
Data Elements
The data (Data, Source_data, Time, Sampling_no, Data_search, Data_sense,
Osc_level, and Dc_bias) are the string as shown below.
Data
ABCDDDDDDDDDDDD
FMT command
FMT1 or FMT5
ABCDDDDDDDDDDDDD
FMT11 or FMT15
EEEFGDDDDDDDDDDDDD
FMT21 or FMT25
DDDDDDDDDDDD
DDDDDDDDDDDDD
FMT2
FMT12 or FMT22
The data elements depends on the FMT command setting. Details of the elements
are described on the following pages.
A:
Status. One character.
B:
Channel number. One character.
C:
Data type. One character.
D:
Data. Twelve digits or 13 digits.
E:
Status. Three digits.
F:
Channel number. One character.
G:
Data type. One character.
Agilent B1500 Programming Guide, Edition 2
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Programming Basics
Data Output Format
A
Status. One character.
•
Status for Source_data:
Priority of appearance is W<E.
A
•
Explanation
W
Data is for the first or intermediate sweep step.
E
Data is for the last sweep step.
Status for measurement data: See Table 1-4 on page 1-29.
For SMU, the priority of appearance is as follows:
B
•
For the quasi-pulsed spot measurement: N<T<C<V<X<G or S
•
For other measurement: N<G<S<T<C<V<X
Channel number of the measurement/source channel. One character.
B
Explanation
B
Explanation
A
Channel 1
F
Channel 6
B
Channel 2
G
Channel 7
C
Channel 3
H
Channel 8
D
Channel 4
I
Channel 9
E
Channel 5
J
Channel 10
C
Data type. One character. See Table 1-5 on page 1-30.
D
Measurement data, output data, time data, or sampling index. Twelve or 13 digits
depends on FMT setting, which may be one of the following:
•
sn.nnnnnEsnn or sn.nnnnnnEsnn
•
snn.nnnnEsnn or snn.nnnnnEsnn
•
snnn.nnnEsnn or snnn.nnnnEsnn
where,
s: Sign, + or -.
n: Digit, 0 to 9.
E: Exponent symbol.
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Agilent B1500 Programming Guide, Edition 2
Programming Basics
Data Output Format
Table 1-4
Status for Measurement Data
A
Explanation
N
No status error occurred.
T
Another channel reached its compliance setting.
C
This channel reached its compliance setting.
V
Measurement data is over the measurement range. Or the sweep
measurement was aborted by the automatic stop function or power
compliance. D will be 199.999E+99 (no meaning).
X
One or more channels are oscillating. Or source output did not settle
before measurement.a
G
For linear or binary search measurement, the target value was not found
within the search range. Returns the source output value.
For quasi-pulsed spot measurement, the detection time was over the limit
(3 s for Short mode, 12 s for Long mode).b
S
For linear or binary search measurement, the search measurement was
stopped. Returns the source output value. See status of Data_sense.
For quasi-pulsed spot measurement, output slew rate was too slow to
perform the settling detection.c Or quasi-pulsed source channel reached
the current compliance before the source output voltage changed 10 V
from the start voltage.d
U
CMU is in the NULL loop unbalance condition.
D
CMU is in the IV amplifier saturation condition.
a. Make the wait time or delay time longer. Or make the current compliance larger. For pulsed measurement, make the pulse width longer, or
make the pulse base value closer to the pulse peak value. For current
output by limited auto ranging, make the output range lower.
b. Make the current compliance or start voltage larger. Or set the detection
interval to Long. If this status occurs with the Long mode, perform the
spot measurement.
c. Make the current compliance larger. Or set the detection interval to
Long. If this status occurs with the Long mode, perform the spot measurement or pulsed spot measurement.
d. Perform the pulsed spot measurement or spot measurement.
Agilent B1500 Programming Guide, Edition 2
1-29
Programming Basics
Data Output Format
Table 1-5
Data Type
C
E
Explanation
V
Voltage (V)
I
Current (A)
Z
Impedance, resistance, or reactance (Ω)
Y
Admittance, conductance, or susceptance (S)
C
Capacitance (F)
L
Inductance (H)
R
Phase (degree or radian)
F
Frequency (Hz)
X
Sampling index
T
Time (second)
Status. Three digits. Ignore status for the Time value.
•
Status for Source_data: Priority of appearance is W<E.
EEE
•
Explanation
W
Data is for the first or intermediate sweep step.
E
Data is for the last sweep step.
Status for measurement data:
For SMU status, see Table 1-6 on page 1-31.
For CMU status, see Table 1-7 on page 1-31.
If multiple status conditions are found, the sum of the EEE values is returned.
For example, if an A/D converter overflow occurred, and an SMU was
oscillating during the measurements, the returned EEE value is 3 (=1+2).
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Agilent B1500 Programming Guide, Edition 2
Programming Basics
Data Output Format
Table 1-6
SMU Status
EEE
Table 1-7
Explanation
1
A/D converter overflowed.
2
One or more units are oscillating.
4
Another unit reached its compliance setting.
8
This unit reached its compliance setting.
16
Target value was not found within the search range.
32
Search measurement was automatically stopped.
64
Invalid data is returned. D is not used.
128
EOD (End of Data).
CMU Status
EEE
Explanation
1
A/D converter overflowed.
2
CMU is in the NULL loop unbalance condition.
4
CMU is in the IV amplifier saturation condition.
8
Not assigned.
16
Not assigned.
32
Not assigned.
64
Invalid data is returned. D is not used.
128
EOD (End of Data).
Agilent B1500 Programming Guide, Edition 2
1-31
Programming Basics
Data Output Format
F
Channel number of the source/measurement module. One character.
G
F
Explanation
F
Explanation
A
Channel 1
F
Channel 6
B
Channel 2
G
Channel 7
C
Channel 3
H
Channel 8
D
Channel 4
I
Channel 9
E
Channel 5
J
Channel 10
V
Ground unit (GNDU)
Z
Status code for extraneous data in the channel. TSQ
command response or invalid data is returned.
Data type. One character.
G
Explanation
G
V
Voltage measurement value (V)
v
Voltage output value (V)
I
Current measurement value (A)
i
Current output value (A)
X
Sampling index
f
Frequency (Hz)
T
Time data (second)
z
invalid data
C
Capacitance (F)
L
Inductance (H)
D
Dissipation factor
Q
Quality factor
P
Phase (degree)
R
Phase (radian)
Z
Impedance, resistance, or reactance (Ω)
Y
Admittance, conductance, or susceptance (S)
1-32
Explanation
Agilent B1500 Programming Guide, Edition 2
Programming Basics
Data Output Format
Binary Data Output Format
This section describes the binary data output format, and the elements of the data.
•
“Data Resolution”
•
“Time Stamp”
•
“Data Format”
•
“4 Bytes Data Elements”
•
“8 Bytes Data Elements”
Data Resolution
The 4 bytes binary data format provides the following data resolution. To use this
data format, enter the FMT3 or FMT4 command. The resolution of the SMU
measurement value will be larger than the measurement resolution of the B1500’s
high resolution A/D converter. For Range value, see “4 Bytes Data Elements” on
page 1-37.
•
SMU measurement value (voltage or current): Range / 50000
•
SMU output value (voltage or current): Range / 20000
•
CMU measurement value (resistance or reactance): Range / 212
•
CMU measurement value (conductance or susceptance): 1 / (Range × 212)
•
CMU oscillator level monitor value (Vac), DC bias monitor value (Vdc),
frequency (Hz): Range / 50000
•
CMU DC bias output value: 2 mV
The 8 bytes binary data format provides the following data resolution. To use this
data format, enter the FMT13 or FMT14 command. For Range value, see “8 Bytes
Data Elements” on page 1-43.
•
SMU measurement/output value (voltage or current): Range / 1000000
•
CMU measurement value (resistance or reactance): Range / 224
•
CMU measurement value (conductance or susceptance): 1 / (Range × 224)
•
CMU oscillator level monitor value (Vac), DC bias monitor value (Vdc),
frequency (Hz): Range / 1000000
•
CMU DC bias output value: 1 mV
Agilent B1500 Programming Guide, Edition 2
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Programming Basics
Data Output Format
Time Stamp
NOTE
Time stamp function is not available for the 4 bytes binary data format (FMT3 or
FMT4), the high speed spot, quasi-pulsed spot (MM9), and search (MM14 and
MM15) measurements.
The B1500 can record the time when the measurement is started, and sends the time
data (Time). This function is enabled by the TSC command. The time data will be
sent just before the measurement data. For example, in the staircase sweep
measurements, the data will be as shown below.
Block1 [Block2] . . . . <terminator>
where, BlockN (N: integer) = Time1 Data1 [Time2 Data2] ... [Source_data], then
TimeN (N: integer) is the time from timer reset to the start of DataN measurement.
The timer count is cleared/reset by the TSR command (Time=0).
Data Format
The data output format depends on the measurement mode as shown below.
High Speed Spot
Data <terminator>
(by TI or TV command)
Time Data <terminator>
(by TTI or TTV command)
Data1 Data2 <terminator>
(by TC command)
Time Data1 Data2 <terminator>
(by TTC command)
Data is the value measured by the channel you specify in the command. Time is the
time from timer reset to the start of measurement. Data1 and Data2 are R (Ω) and X
(Ω), or G (S) and B (S) respectively measured by the CMU. They will be
automatically selected by the B1500, and will be a couple without data overflow.
Time is available for the 8 bytes binary data format (FMT13 or FMT14) and not
available for the 4 bytes binary data format (FMT3 or FMT4)
Spot
Data1 [Data2] . . . . <terminator>
DataN (N: integer) is the value measured by a channel. The order of Data is defined
by the MM command.
Pulsed Spot,
Data <terminator>
Quasi-Pulsed Spot
Data is the value measured by the channel you specify by using the MM command.
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Agilent B1500 Programming Guide, Edition 2
Programming Basics
Data Output Format
Staircase Sweep,
Multi Channel
Sweep
Block1 [Block2] . . . . <terminator>
Block1 is the block of data measured at the first sweep point. Block2 is the block of
data measured at the second sweep point. where Block consists of the following
data:
Data1 [Data2] . . . . [Source_data]
DataN (N: integer) is the value measured by a channel. The order of Data is defined
by the MM command. Source_data is the sweep source output value. It is sent if the
data output is enabled by the FMT command.
Pulsed Sweep,
Staircase Sweep
with Pulsed Bias
Block1 [Block2] . . . . <terminator>
Block1 is the block of data measured at the first sweep point. Block2 is the block of
data measured at the second sweep point. where Block consists of the following
data:
Data [Source_data]
Data is the value measured by the channel you specify by using the MM command.
Source_data is the sweep source output value. It is sent if the data output is enabled
by the FMT command.
Sampling
Available for the 8 bytes binary data format (FMT13 or FMT14).
Block1 [Block2] . . . . <terminator>
Block1 is the block of the data measured at the first sampling point.
Block2 is the block of the data measured at the second sampling point.
where Block consists of the following data:
[Sampling_no] Data1 [Data2] . . . .
Sampling_no is the sampling point index, and is returned by entering the FMT
command with mode<>0. This value depends on the sampling interval setting and
the measurement time. If the measurement time is shorter than the sampling
interval, Sampling_no will be N of BlockN (N: 1, 2, 3 . . . ).
DataN (N: integer) is the data measured by one unit. The order of Data is specified
by the MM command. Sampling_no and Data values can be discarded when the
range changing is occurred while the measurement with auto or limited auto
ranging.
Agilent B1500 Programming Guide, Edition 2
1-35
Programming Basics
Data Output Format
If the measurement time is longer than the sampling interval, Sampling_no is not N
of BlockN. For example, if the measurement time is longer than the sampling
interval and shorter than twice the sampling interval, then the Sampling_no is 2 for
Block1, and 4 for Block2. In general, the measurement time depends on the
measurement value and the A/D converter settings.
Linear Search,
Binary Search
Data_search [Data_sense]<terminator>
Spot C
Data1 Data2 [Osc_level Dc_bias]<terminator>
This is the data at the measurement point closest to the search target. Data_search is
the value forced by the search output channel. Data_sense is the value measured by
the search monitor channel. It is sent if data output is enabled by the BSVM
command for the binary search, or the LSVM command for the linear search.
Data1 and Data2 are R (Ω) and X (Ω), or G (S) and B (S) respectively. They will be
automatically selected by the B1500, and will be a couple without data overflow.
And Osc_level and Dc_bias are the monitor values of the oscillator level (AC signal
level) and the DC bias respectively. They are sent if the data output is enabled by the
LMN command.
CV Sweep
Block1 [,Block2] . . . . <terminator>
Block1 is the block of data measured at the first sweep point. Block2 is the block of
data measured at the second sweep point. where Block consists of the following
data:
Data1 Data2 [Osc_level Dc_bias] [Source_data]
Data1 and Data2 are R (Ω) and X (Ω), or G (S) and B (S) respectively. They will be
automatically selected by the B1500, and will be a couple without data overflow.
And Osc_level and Dc_bias are the monitor values of the oscillator level (AC signal
level) and the DC bias respectively. They are sent if the data output is enabled by the
LMN command. Source_data is the DC bias output value. It is sent if the data output
is enabled by the FMT command.
TDI, TDV, TSQ,
TACV, TDCV
command
Available for the 8 bytes binary data format (FMT13 or FMT14).
Time <terminator>
Time is the time from timer reset to the start of output.
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Agilent B1500 Programming Guide, Edition 2
Programming Basics
Data Output Format
4 Bytes Data Elements
To use the 4 bytes binary data format, enter the FMT3 or FMT4 command.
The data (Data, Source_data, Sampling_no, Data_search, Data_sense, Osc_level,
and Dc_bias) will be sent as the binary value shown in Figure 1-1.
Figure 1-1
4 Bytes Binary Data Output Format
Byte 1
Byte 2
Byte 3
Byte 4
7 6 5 4 3 2 1 0 7 6 5 4 3 2 1 0 7 6 5 4 3 2 1 0 7 6 5 4 3 2 1 0
A B
C
D
E
F
A:
Type. One bit.
B:
Parameter. One bit.
C:
Range. Five bits. Range value used to calculate the data.
D:
Data count. 17 bits.
E:
Status. Three bits.
F:
Channel number. Five bits.
These data elements are described in the following pages.
Agilent B1500 Programming Guide, Edition 2
1-37
Programming Basics
Data Output Format
A
Type. One bit.
A
B
Explanation
0
Data other than measurement data.
1
Measurement data.
Parameter. One bit.
C
B
for SMU data
for CMU data
0
Voltage data
Resistance or reactance
1
Current data
Conductance or susceptance
Range. Five bits. Range value used to calculate the data.
for SMU data
C
Range
for CMU data
C
Range
01000 (8)
0.5 V or 1 pA
00000 (0)
1Ω
01001 (9)
5 V or 10 pA
00001 (1)
10 Ω
01010 (10)
100 pA
00010 (2)
100 Ω
01011 (11)
2 V or 1 nA
00011 (3)
1 kΩ, 8 Vdc, or 1 kHz
01100 (12)
20 V or 10 nA
00100 (4)
10 kΩ, 16 mVac, 12 Vdc, or 10 kHz
01101 (13)
40 V or 100 nA
00101 (5)
100 kΩ, 32 mVac, 25 Vdc, or 100 kHz
01110 (14)
100 V or 1 μA
00110 (6)
1 MΩ, 64 mVac, or 1 MHz
01111 (15)
200 V or 10 μA
00111 (7)
10 MΩ, 125 mVac, or 100 Vdc
10000 (16)
100 μA
01000 (8)
100 MΩ or 250 mVac
10001 (17)
1 mA
01001 (9)
1 GΩ
10010 (18)
10 mA
01010 (10)
10 GΩ
10011 (19)
100 mA
01011 (11)
100 GΩ
10100 (20)
1A
11111 (31)
Invalid data is returned.
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Programming Basics
Data Output Format
D (SMU data)
Data count. This value is expressed in 17-bit binary data. The measurement data and
the source data can be calculated by the following formula.
Measurement data = Count × Range / 50000
Source data = Count × Range / 20000
where, Count is the D value, and Range is the measurement range or output range
given by C.
For the decimal value of C, the Range value of current data will be 10^(C-20) A.
If the top bit of D is 0, Count is positive and equal to the value given by the
following 16 bits.
If the top bit of D is 1, Count is negative. Calculate Count by subtracting 65536
(10000000000000000 in binary) from the value given by the following 16 bits.
Example:
If the output binary data is:
11010110000100111000100000000001
then,
Type:
Measurement data (A=1)
Parameter:
Current (B=1)
Range:
1 nA=10^(11-20) A (C=01011 in binary, C=11 in decimal)
Count:
5000 (D=00001001110001000)
Status:
Normal condition (E=000)
Channel:
SMU1 (channel number 1) (F=00001)
Measurement data = 5000 × 1E–9 / 5E+4 = 100 pA
NOTE
B=1 and C=10100 means that HPSMU used 1 A range or MPSMU used 200 mA
range. Then use Range=1 to calculate the data for both HPSMU and MPSMU.
Range=0.2 is not available even if the range value is 200 mA.
Agilent B1500 Programming Guide, Edition 2
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Programming Basics
Data Output Format
D (CMU data)
Data count. This value is expressed in 17-bit binary data. The measurement data and
the output data can be calculated by the following formula.
Resistance or reactance = Count × Range / 212
Conductance or susceptance = Count / (212 × Range)
OSC level monitor value = Count × Range / 50000
DC bias monitor value = Count × Range / 50000
DC bias output value = Count / 500
Output signal frequency = Count × Range / 50000
where, Count is the D value, and Range is the measurement range or output range
given by C.
For the decimal value of C, the Range value of resistance, reactance, conductance,
and susceptance data will be 10^C Ω.
If the top bit of D is 0, Count is positive and equal to the value given by the
following 16 bits.
If the top bit of D is 1, Count is negative. Calculate Count by subtracting 65536
(10000000000000000 in binary) from the value given by the following 16 bits.
Example:
If the output binary data is:
10001000000011111010000000001000
then,
Type:
Measurement data (A=1)
Parameter:
Resistance (or reactance) (B=0)
Range:
10 kΩ =10^4 (C=00100 in binary, C=4 in decimal)
Count:
4000 (D=00000111110100000)
Status:
Normal condition (E=000)
Channel:
8 (F=01000)
Measurement data = 4000 × 10000 / 212 = 9.76 kΩ
1-40
Agilent B1500 Programming Guide, Edition 2
Programming Basics
Data Output Format
E
Status. Three bits.
•
Status for Source_data:
Priority of appearance is 001<010.
E
•
Explanation
001
Data is for the first or intermediate sweep step.
010
Data is for the last sweep step.
Status for measurement data. See Table 1-8.
For SMU, the priority of appearance is as follows:
F
•
For the quasi-pulsed spot measurement: 0<1<2<3<4<6 or 7
•
For other measurement: 0<6<7<1<2<3<4
Channel number of the measurement/source channel. Five bits.
F
Explanation
00001 (1)
Channel 1.
00010 (2)
Channel 2.
00011 (3)
Channel 3.
00100 (4)
Channel 4.
00101 (5)
Channel 5.
00110 (6)
Channel 6.
00111 (7)
Channel 7.
01000 (8)
Channel 8.
01001 (9)
Channel 9.
01010 (10)
Channel 10.
11111 (31)
Invalid data is returned.
Agilent B1500 Programming Guide, Edition 2
1-41
Programming Basics
Data Output Format
Table 1-8
Status for Measurement Data
E
Explanation
000 (0)
No status error occurred.
001 (1)
For SMU: Another channel reached its compliance setting.
For CMU: CMU is in the NULL loop unbalance condition.
010 (2)
For SMU: This channel reached its compliance setting.
For CMU: CMU is in the IV amplifier saturation condition.
011 (3)
Measurement data is over the measurement range. Or the sweep
measurement was aborted by the automatic stop function or power
compliance. Meaningless value will be returned to D.
100 (4)
For SMU: One or more channels are oscillating. Or source output did
not settle before measurement.a
110 (6)
For linear or binary search measurement, the target value was not
found within the search range. Returns the source output value.
For quasi-pulsed spot measurement, the detection time was over the
limit (3 s for Short mode, 12 s for Long mode).b
111 (7)
For linear or binary search measurement, the search measurement was
stopped. Returns the source output value. See status of Data_sense.
For quasi-pulsed spot measurement, output slew rate was too slow to
perform the settling detection.c Or quasi-pulsed source channel
reached the current compliance before the source output voltage
changed 10 V from the start voltage.d
a. Make the wait time or delay time longer. Or make the current compliance larger. For pulsed measurement, make the pulse width longer, or
make the pulse base value closer to the pulse peak value. For current
output by limited auto ranging, make the output range lower.
b. Make the current compliance or start voltage larger. Or set the detection
interval to Long. If this status occurs with the Long mode, perform the
spot measurement.
c. Make the current compliance larger. Or set the detection interval to
Long. If this status occurs with the Long mode, perform the spot measurement or pulsed spot measurement.
d. Perform the pulsed spot measurement or spot measurement.
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Agilent B1500 Programming Guide, Edition 2
Programming Basics
Data Output Format
8 Bytes Data Elements
To use the 8 bytes binary data format, enter the FMT13 or FMT14 command.
The data (Data, Source_data, Sampling_no, Data_search, Data_sense, Osc_level,
and Dc_bias) will be sent as the binary value shown in Figure 1-2. The format of the
time data (Time) will be different from the others.
Figure 1-2
8 Bytes Binary Data Output Format
For measurement data and source data:
Byte 2
Byte 4
Byte 6
Byte 8
Byte 1
Byte 3
Byte 5
Byte 7
7 6 5 4 3 2 1 0 7 6 5 4 3 2 1 0 7 6 5 4 3 2 1 0 7 6 5 4 3 2 1 0 7 6 5 4 3 2 1 0 7 6 5 4 3 2 1 0 7 6 5 4 3 2 1 0 7 6 5 4 3 2 1 0
C
G
A
E
F
B
D
For time data:
Byte 1
Byte 2
Byte 3
Byte 4
Byte 5
Byte 6
Byte 7
Byte 8
7 6 5 4 3 2 1 0 7 6 5 4 3 2 1 0 7 6 5 4 3 2 1 0 7 6 5 4 3 2 1 0 7 6 5 4 3 2 1 0 7 6 5 4 3 2 1 0 7 6 5 4 3 2 1 0 7 6 5 4 3 2 1 0
B
F
H
A
A:
Type. One bit.
B:
Parameter. Seven bits.
C:
Range. One byte. Range value used to calculate the data.
D:
Data count. Four bytes.
E:
Status. One byte.
F:
Channel number. Five bits.
G:
A/D converter. Three bits.
H:
Time data count. Six bytes.
These data elements are described in the following pages.
Agilent B1500 Programming Guide, Edition 2
1-43
Programming Basics
Data Output Format
A
Type. One bit.
A
B
Explanation
0
Data other than measurement data.
1
Measurement data.
Parameter. Seven bits.
B
1-44
Explanation
0000000 (0)
SMU voltage measurement or output data (V)
0000001 (1)
SMU current measurement or output data (A)
0000011 (3)
Time data (second)
0000110 (6)
Sampling index
0000111 (7)
CMU output signal frequency data (Hz)
0001001 (9)
CMU DC bias output data (Vdc)
0001010 (10)
CMU oscillator level monitor data (Vac)
0001011 (11)
CMU DC bias monitor data (Vdc)
0001100 (12)
CMU resistance measurement data (Ω)
0001101 (13)
CMU reactance measurement data (Ω)
0001110 (14)
CMU conductance measurement data (S)
0001111 (15)
CMU susceptance measurement data (S)
Agilent B1500 Programming Guide, Edition 2
Programming Basics
Data Output Format
C
Range. One byte. Range value used to calculate the data.
for SMU data
C
Range
for CMU data
C
Range
00001000 (8)
0.5 V or 1 pA
00000000 (0)
1Ω
00001001 (9)
5 V or 10 pA
00000001 (1)
10 Ω
00001010 (10)
100 pA
00000010 (2)
100 Ω
00001011 (11)
2 V or 1 nA
00000011 (3)
1 kΩ, 8 Vdc, or 1 kHz
00001100 (12)
20 V or 10 nA
00000100 (4)
10 kΩ, 16 mVac, 12 Vdc, or 10 kHz
00001101 (13)
40 V or 100 nA
00000101 (5)
100 kΩ, 32 mVac, 25 Vdc, or 100 kHz
00001110 (14)
100 V or 1 μA
00000110 (6)
1 MΩ, 64 mVac, or 1 MHz
00001111 (15)
200 V or 10 μA
00000111 (7)
10 MΩ, 125 mVac, or 100 Vdc
00010000 (16)
100 μA
00001000 (8)
100 MΩ or 250 mVac
00010001 (17)
1 mA
00001001 (9)
1 GΩ
00010010 (18)
10 mA
00001010 (10)
10 GΩ
00010011 (19)
100 mA
00001011 (11)
100 GΩ
00010100 (20)
1A
00011111 (31)
Invalid data is returned.
Agilent B1500 Programming Guide, Edition 2
1-45
Programming Basics
Data Output Format
D
Data count. This value is expressed in 4 bytes binary data. The measurement data
and the output data can be calculated by the following formula.
Resistance or reactance = Count × Range / 224
Conductance or susceptance = Count / (224 × Range)
DC bias output value = Count / 1000
Data other than the above parameters = Count × Range / 1000000
where, Count is the D value, and Range is the measurement range or output range
given by C.
For the decimal value of C, the Range value of current data will be 10^(C-20) A, and
the Range value of resistance, reactance, conductance, and susceptance data will be
10^C Ω.
If the top bit of D is 0, Count is positive and equal to the value given by the
following 31 bits.
If the top bit of D is 1, Count is negative. Calculate Count by subtracting
2147483648 (10000000000000000000000000000000 in binary) from the value
given by the following 31 bits.
Example:
If the output binary data is:
1000000100001011000000000000000110000110101000000000000000000001
then,
Type:
Measurement data (A=1)
Parameter:
Current (B=0000001)
Range:
1 nA=10^(11-20) A (C=01011 in binary, C=11 in decimal)
Count:
100000 (D=00000000000000011000011010100000)
Status:
Normal condition (E=00000000)
ADC:
High speed ADC (G=000)
Channel:
SMU1 (channel number 1) (F=00001)
Measurement data = 100000 × 1E–9/1E+6 = 100 pA
NOTE
B=0000001 and C=00010100 means that HPSMU used 1 A range or MPSMU used
200 mA range. Then use Range=1 to calculate the data for both HPSMU and
MPSMU. Range=0.2 is not available even if the range value is 200 mA.
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Agilent B1500 Programming Guide, Edition 2
Programming Basics
Data Output Format
E
Status. One byte. Meaningless for the Time data.
•
Status for Source_data:
Priority of appearance is 001<010.
E
•
Explanation
00000001
Data is for the first or intermediate sweep step.
00000010
Data is for the last sweep step.
Status for measurement data. See Table 1-9.
For SMU, the priority of appearance is as follows:
F
•
For the quasi-pulsed spot measurement: 0<1<2<4<8<16 or 32
•
For other measurement: 0<16<32<1<2<4<8
Channel number of the measurement/source channel. Five bits.
F
Explanation
00001 (1)
Channel 1.
00010 (2)
Channel 2.
00011 (3)
Channel 3.
00100 (4)
Channel 4.
00101 (5)
Channel 5.
00110 (6)
Channel 6.
00111 (7)
Channel 7.
01000 (8)
Channel 8.
01001 (9)
Channel 9.
01010 (10)
Channel 10.
11010 (26)
Status code for extraneous data in the channel. TSQ command
response or invalid data is returned.
11111 (31)
Invalid data is returned.
Agilent B1500 Programming Guide, Edition 2
1-47
Programming Basics
Data Output Format
Table 1-9
Status for Measurement Data
E
Explanation
00000000 (0)
No status error occurred.
00000001 (1)
Measurement data is over the measurement range. Or the sweep
measurement was aborted by the automatic stop function or power
compliance. Meaningless value will be returned to D.
00000010 (2)
For SMU: One or more channels are oscillating. Or source output did
not settle before measurement.a
For CMU: CMU is in the NULL loop unbalance condition.
00000100 (4)
For SMU: Another channel reached its compliance setting.
For CMU: CMU is in the IV amplifier saturation condition.
00001000 (8)
For SMU: This channel reached its compliance setting.
00010000 (16)
For linear or binary search measurement, the target value was not
found within the search range. Returns the source output value.
For quasi-pulsed spot measurement, the detection time was over the
limit (3 s for Short mode, 12 s for Long mode).b
00100000 (32)
For linear or binary search measurement, the search measurement was
stopped. Returns the source output value. See status of Data_sense.
For quasi-pulsed spot measurement, output slew rate was too slow to
perform the settling detection.c Or quasi-pulsed source channel
reached the current compliance before the source output voltage
changed 10 V from the start voltage.d
a. Make the wait time or delay time longer. Or make the current compliance
larger. For pulsed measurement, make the pulse width longer, or make the pulse
base value closer to the pulse peak value. For current output by limited auto
ranging, make the output range lower.
b. Make the current compliance or start voltage larger. Or set the detection interval to Long. If this status occurs with the Long mode, perform the spot measurement.
c. Make the current compliance larger. Or set the detection interval to Long. If
this status occurs with the Long mode, perform the spot measurement or pulsed
spot measurement.
d. Perform the pulsed spot measurement or spot measurement.
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Agilent B1500 Programming Guide, Edition 2
Programming Basics
Data Output Format
G
A/D converter. Three bits.
G
H
Explanation
000 (0)
SMU High Speed ADC
001 (1)
SMU High Resolution ADC
010 (2)
CMU ADC
Data count for the time data. This value is expressed in 6 bytes binary data. The time
data can be calculated by the following formula.
Time = Count / 1000000
where, Count is the decimal value of H.
Example:
If the output binary data is:
0000001100000000000000000000000000000001100001101010000000000001
then,
Type:
Data other than the measurement data (A=0)
Parameter:
Time (B=0000011)
Count:
100000 (H=
000000000000000000000000000000011000011010100000)
Channel:
SMU1 (channel number 1) (F=00001)
Time data = 100000 / 1000000 = 0.1 second
Agilent B1500 Programming Guide, Edition 2
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Programming Basics
GPIB Interface Capability
GPIB Interface Capability
The following table lists the GPIB capabilities and functions of the Agilent B1500.
These functions provide the means for an instrument to receive, process, and
transmit, commands, data, and status over the GPIB bus.
Interface Function
Code
Description
Source Handshake
SH1
Complete capability
Acceptor Handshake
AH1
Complete capability
Talker
T6
Basic Talker: YES
Serial Poll: YES
Talk Only Mode: NO
Unaddress if MLA (my listen address): YES
Listener
L4
Basic Listener: YES
Unaddress if MTA (my talk address): YES
Listen Only Mode: NO
Service Request
SR1
Complete capability
Remote/Local
RL1
Complete capability (with local lockout)
Parallel Poll
PP0
No capability
Device Clear
DC1
Complete capability
Device Trigger
DT1
Complete capability
Controller Function
C0
No capability
Driver Electronics
E1
Open Collector
The B1500 responds to the following HP BASIC statements:
•
ABORT (IFC)
•
CLEAR (DCL or SDC. same as AB command)
•
LOCAL (GTL)
•
LOCAL LOCKOUT (LL0)
•
REMOTE
•
SPOLL (Serial Poll)
•
TRIGGER (GET. same as XE command)
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Agilent B1500 Programming Guide, Edition 2
Programming Basics
Status Byte
Status Byte
Status byte bits are turned off or on (0 or 1) to represent the instrument operation
status. When you execute a serial poll, an external computer (controller) reads the
contents of the status byte, and responds accordingly. When an unmasked status bit
is set to “1”, the instrument sends an SRQ to the controller, causing the controller to
perform an interrupt service routine.
Bit
Decimal
Value
0
1
Description
Data ready
Indicates whether the output buffer is empty. If an unread
data or query response exists, this bit is set to “1”. It is set
to “0” when all the stored data has been transferred to the
controller, or when the B1500 receives a *RST, BC, FMT,
or device clear command.
1
2
Wait
Indicates whether the instrument is in the wait status. This
bit is set to “1” when the B1500 has been set to the wait
state by the PA, WS, PAX, or WSX command. It is set to
“0” when the waiting condition is complete, or when the
B1500 receives a *RST or device clear command.
2
4
Not applicable. This bit is always set to “0”.
3
8
Interlock open
If the interlock circuit is open, and a voltage output or
voltage compliance setup value exceeds ±42 V, this bit is
set to “1” . It is set to “0” when the B1500 receives a serial
poll, *RST, or device clear command.
4
16
Set ready
If the B1500 receives a GPIB command or a trigger signal,
this bit is set to “0”. It is set to “1” when its operation is
completed. This bit is also set to “0” when the self-test or
calibration is started by front panel operation, and set to
“1” when it is completed.
Agilent B1500 Programming Guide, Edition 2
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Programming Basics
Status Byte
Bit
Decimal
Value
5
32
Description
Error
Indicates whether any error has occurred. If an error
occurred, this bit is set to “1”. It is set to “0” when the
B1500 receives a serial poll, *RST, ERR?, CA, *TST?,
*CAL?, DIAG? or device clear command.
6
64
RQS (You cannot mask this bit.)
Indicates whether an SRQ (Service Request) has occurred.
This bit is set to “1” whenever any other unmasked bit is
set to “1”. This causes the B1500 to send an SRQ to the
controller. It is set to “0” when the B1500 receives a serial
poll, *RST, or device clear command.
7
128
Not applicable. This bit is always set to “0”.
The status byte register can be read with either a serial poll or the *STB? query
command. Serial poll is a low-level GPIB command that can be executed by the
SPOLL command in HP BASIC, for example Status=SPOLL(@B1500).
In general, use serial polling (not *STB?) inside interrupt service routines. Use
*STB? in other cases (not in interrupt service routine) when you want to know the
value of the Status Byte.
NOTE
If Bit 3 and Bit 5 are masked, they are not set to “0” by a serial poll. Also, if these
bits are masked, set to “1”, and then unmasked, a serial poll does not set them to “0”.
After a masked bit is set to “1”, removing the mask does not set Bit 6 to “1”. That is,
the B1500 does not send an SRQ to the controller. Therefore, if you remove a mask
from a bit, it is usually best to do it at the beginning of the program.
1-52
Agilent B1500 Programming Guide, Edition 2
Programming Basics
Programming Tips
Programming Tips
This section provides the following additional information on creating measurement
programs. It is useful for checking the operation status, improving the measurement
speed, and so on.
•
“To Confirm the Operation”
•
“To Confirm the Command Completion”
•
“To Disable the Auto Calibration”
•
“To Optimize the Measurement Range”
•
“To Optimize the Integration Time”
•
“To Disable the ADC Zero Function”
•
“To Optimize the Source/Measurement Wait Time”
•
“To Use the Internal Program Memory”
•
“To Get Time Data with the Best Resolution”
•
“To Use Sweep Source as a Constant Source”
•
“To Start Measurements Simultaneously”
•
“To Interrupt Command Execution”
•
“To Use Programs for Agilent 4142B”
•
“To Use Programs for Agilent 4155/4156”
•
“To Use Programs for Agilent E5260/E5270”
Agilent B1500 Programming Guide, Edition 2
1-53
Programming Basics
Programming Tips
To Confirm the Operation
To complete the measurement program, you can insert statements to check the
B1500 operation status as shown below. This example starts the measurement,
checks the status caused by the statements before the ERR? command, reads and
displays the measurement data without errors, or displays an error message when an
error occurs.
OUTPUT @B1500;"XE"
OUTPUT @B1500;"ERR? 1"
ENTER @B1500;Code
IF Code=0 THEN
ENTER @B1500 USING "#,3X,12D,X";Mdata
PRINT "I(A)=";Mdata
ELSE
OUTPUT @B1500;"EMG? ";Code
ENTER @B1500;Msg$
PRINT "ERROR: ";Msg$
END IF
To Confirm the Command Completion
To check the completion of the previous command execution, use the *OPC? query
command. Entering the *OPC command before sending a command to other
equipment serves to delay its operation until the B1500 has completed its operation.
The *OPC? command is useful to control equipments sequentially.
For example, the following program segment waits until the B1500 completes the
DI command execution, and sends the XYZ command to equipment identified by
@Address.
OUTPUT @B1500;"DI";1,0,1.0E-10,1
OUTPUT @B1500;"*OPC?"
ENTER @B1500; A$
OUTPUT @Address;"XYZ"
To Disable the Auto Calibration
The auto calibration function triggers self-calibration automatically every 30
minutes after measurement. When the function is enabled, open the measurement
terminals frequently because calibration requires open terminals.
If you execute automatic measurements as a batch job that might leave the device
connected for over 30 minutes after the measurements, disable auto calibration.
Otherwise, the calibration might not be performed properly, or unexpected output
might appear at the measurement terminals, and it could even damage the device. To
disable auto calibration, send the CM 0 command.
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Agilent B1500 Programming Guide, Edition 2
Programming Basics
Programming Tips
To Optimize the Measurement Range
The most effective way to improve measurement speed is to reduce the number of
range changes. The limited auto ranging mode is more effective than the auto
ranging mode. The fixed range mode is the most effective.
Check the typical value of the measurement data, select the optimum range, and
perform measurement using the fixed range mode.
To Optimize the Integration Time
For best reliability and repeatability of the measurement data, the integration time or
the number of averaging samples of the A/D converter must be increased. This
increases the measurement time.
A long integration time and numerous samples are required for low current/ voltage
measurements. However, the values can be decreased for medium or high
current/voltage measurements. Enter the following commands:
AV
Sets the number of averaging samples of the A/D converter. This
command is compatible with the AV command of the Agilent 4142B.
AAD
Selects the type of the A/D converter (high-speed ADC or
high-resolution ADC).
AIT
Sets the integration time of the high-resolution ADC or the number of
averaging samples of the high-speed ADC. The AIT command covers
the function of the AV command. The last command setting is available
for the measurement.
For more information regarding these commands, see Chapter 4, “Command
Reference.”
To Disable the ADC Zero Function
This information is effective only when the high resolution A/D converter is used
for the measurement. If measurement speed is given top priority or is more
important than reliability, disable the ADC zero function by sending the AZ 0
command. This roughly halves integration time.
NOTE
The ADC zero function is the function to cancel offset of the high resolution ADC.
This function is especially effective for low voltage measurements.
Agilent B1500 Programming Guide, Edition 2
1-55
Programming Basics
Programming Tips
To Optimize the Source/Measurement Wait Time
If measurement speed is given top priority or is more important than reliability, set
the wait time shorter by using the WAT command. The source wait time is the time
the source channel always waits before changing the source output value. The
measurement wait time is the time the measurement channel always waits before
starting measurement. The time is given by the following formula:
wait time = initial wait time × A+B
where, initial wait time is the time the B1500 automatically sets and you cannot
change. The initial source wait time is not the same as the initial measurement wait
time. A and B are the command parameters of the WAT command.
The wait time settings are effective for all modules.
Figure 1-3
Source/Measurement Wait Time
Measurement wait time
Source wait time
Delay time
: Measurement
Hold time
Step delay time
Time
NOTE
The wait time can be ignored if it is shorter than the delay time.
It is not easy to determine the best wait time. If you specify it too short, the
measurement may start before device characteristics stable. If too long, time will be
wasted.
The initial wait time may be too short for measurements of high capacitance or slow
response devices. Then set the wait time longer.
For measurements of low capacitance or fast response devices, if measurement
speed has top priority or is more important than reliability and accuracy, set the wait
time shorter.
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Agilent B1500 Programming Guide, Edition 2
Programming Basics
Programming Tips
To Use the Internal Program Memory
If your program repeats the setup and measurement for a number of devices, use the
internal program memory. For these measurements, using the internal program
memory reduces the command transfer time, and improves the program execution
speed.
You can enter a maximum of 2,000 programs (total 40,000 commands) into the
internal program memory. See Chapter 2, “Remote Mode Functions.”
To Get Time Data with the Best Resolution
To read the time data with the best resolution (100 μs), the timer must be cleared
within the following interval:
•
100 sec or less (for FMT1, 2, or 5 data output format)
•
1000 sec or less (for FMT 11, 12, 15, 21, 22, or 25 data output format)
Send the TSR command to clear the timer.
To Use Sweep Source as a Constant Source
The following setup enables sweep source to force a constant current or voltage.
•
Sweep start value = Sweep stop value (for WI, WV, or WNX).
Also, setting number of sweep steps to 1 enables to perform a spot measurement.
To Start Measurements Simultaneously
Spot measurement, staircase sweep measurement, and multi channel sweep
measurement enable to use multiple measurement channels. Then the measurement
channels perform measurement in the order defined in the MM command. However,
the measurement channels with the following setup start measurements
simultaneously.
NOTE
•
To set the multi channel sweep measurement mode (MM 16).
•
To set the measurement ranging mode to fixed (for RI or RV).
•
To use the high-speed ADC (use AV).
Measurement setup is independent from source output setup. So, this simultaneous
measurement cannot be broken by the source output setup. Any setting of the output
ranging mode is effective for the simultaneous measurement.
Agilent B1500 Programming Guide, Edition 2
1-57
Programming Basics
Programming Tips
To Perform Quasi-Sampling Measurement
The following setup enables to perform a quasi-sampling measurement. Then the
sampling interval will be sum of delay time and step delay time.
•
Sets the sweep measurement mode (MM 2 or MM 16).
•
Sweep start value = Sweep stop value (for WI, WV, or WNX).
•
Sets hold time, delay time, and step delay time (WT).
Delay
Step delay
Voltage or current
Hold
Start value, Stop value
Previous value
Sampling interval = Delay + Step delay
Measurement trigger (e.g. XE)
: Measurement
To Interrupt Command Execution
The B1500 executes commands in the received order. However, only the following
commands can interrupt the command execution.
Table 1-10
Interrupt Commands
Command
Description
AV
Changes the number of averaging samples during the
measurement.
AIT
Changes the A/D converter setting of the SMU during the
measurement.
ACT
Changes the A/D converter setting of the MFCMU during the
measurement.
AB
Aborts the command execution.
*RST
Resets the B1500 during the command execution.
XE
If the B1500 has been set to the wait status by the PA or PAX
command, the XE command can be used to release the wait
status. For details, see Chapter 4, “Command Reference.”
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Agilent B1500 Programming Guide, Edition 2
Programming Basics
Programming Tips
To Use Programs for Agilent 4142B
Agilent B1500 supports most of the commands and the data output format supported
by the Agilent 4142B Modular DC Source/Monitor. To reuse the programs created
for the Agilent 4142B, confirm the following and modify the programs if necessary.
•
To remove all unsupported commands
Some commands are not supported owing to differences in the modules
supported by each instrument. See Table 1-11 that shows the commands not
supported by the B1500. Do not use these commands.
Perform the linear search or binary search measurement as a substitute for the
analog search measurement that needs the analog feedback unit (AFU).
Use a source/monitor unit (SMU) instead of the voltage source/voltage monitor
unit (VS/VMU). Note that the SMU cannot perform the differential voltage
measurements.
•
FL command
The initial setting of the FL command is different. It is ON for the Agilent
4142B, and OFF for the B1500.
Add the FL1 command to use the filter.
•
AV command
This command is used to set the A/D converter of the B1500.
To set the high resolution ADC installed in the B1500, use the AAD and AIT
commands.
•
*TST? command
Use 11 to specify the B1500 mainframe instead of 9 that indicates the 4142B
mainframe.
Table 1-11
Modules and Commands Unsupported
Plug-in Module
Commands
Analog Feedback Unit
ASM, AT, ASV, AIV, AVI
High Current Unit
PDM, PDI, PDV
High Voltage Unit
POL
Voltage Source/Voltage Monitor Unit
VM
Agilent B1500 Programming Guide, Edition 2
1-59
Programming Basics
Programming Tips
To Use Programs for Agilent 4155/4156
Agilent B1500 supports commands similar to the FLEX command of the Agilent
4155B/4156B/4155C/4156C Parameter Analyzer. However, not all command sets
are fully compatible. To reuse the programs created for the Agilent 4155/4156, the
following modifications are required.
•
To remove all unsupported commands
Table 1-12 shows the commands not supported by the B1500. You cannot use
these commands. The SCPI commands and 4145 syntax commands are not
supported neither.
The B1500 does not need the US and :PAGE commands that are necessary to
change the control mode of the Agilent 4155/4156.
•
To check and correct the command syntax
Even if the command name is the same, the available parameters and values may
be different. Check and correct the command parameters.
•
To change the FMT command parameter
Use the FMT 21, FMT 22, or FMT 25 command that sets the data output format
compatible with the 4155/4156 ASCII format.
•
To delete RMD?
The B1500 does not need the RMD? command that is necessary to put the
measurement data into the output data buffer of the Agilent 4155/4156.
•
FL command
The initial setting of the FL command is different. It is ON for the Agilent
4155/4156, and OFF for the B1500.
Add the FL1 command to use the filter.
•
AV command
This command is used to set the A/D converter of the B1500.
To set the high resolution ADC installed in the B1500, use the AAD and AIT
commands.
•
To replace TI?/TV?/TTI?/TTV? with TI/TV/TTI/TTV respectively
•
To replace WM with LSM for the linear search measurement
•
To replace TSQ? with TSQ
1-60
Agilent B1500 Programming Guide, Edition 2
Programming Basics
Programming Tips
•
Table 1-12
If you reuse the built-in IBASIC programs:
•
Change the GPIB address.
•
Remove the statements to use the built-in flexible disk drive.
4155/4156 FLEX Commands Unsupported
Category
Command
Control mode
:PAGE, US, US42
Measurement mode
VM, VMD
Staircase/pulsed sweep source setup
ESC
Sampling source setup
MP
Quasi-static CV measurement setup
QSL, QSM, QSR, QST, QSV, QSZ,
QSZ?
PGU control
POR, SPG, SPP, SRP
Stress source setup
STC, STI, STM, STP, STT, STV
Integration time
SIT, SLI
Measurement execution
TI?, TTI?, TTV?, TV?
Time stamp
TSQ?
Output data
RMD?
Abort/pause/wait
*WAI
Zero offset cancel
GOC, SOC
SMU/PGU selector
SSP
R-box
RBC
External trigger
STG
Network operation
CLOSE, OPEN, PRN, RD?, SDSK, SPL,
SPR, WR
Status byte
*CLS, *ESE(?), *ESR?
Query
CMD?, *OPT?, :SYST:ERR?
Agilent B1500 Programming Guide, Edition 2
1-61
Programming Basics
Programming Tips
To Use Programs for Agilent E5260/E5270
Agilent B1500 supports most of the commands and the data output format supported
by the Agilent E5260/E5270 Series of Parametric Measurement Solutions. To reuse
the programs created for the Agilent E5260/E5270, confirm the following and
modify the programs if necessary.
•
To remove all unsupported commands
Some commands are not supported owing to differences in the mainframe. See
Table 1-13 that shows the commands not supported by the B1500. The
commands will not cause errors because the B1500 will ignore these commands.
However remove these commands to reduce the load.
•
*CAL?, RCV, *TST? command
Use 11 to specify the B1500 mainframe instead of 9 that indicates the
E5260/E5270 mainframe.
•
DIAG? command
The B1500 does not support the front panel key test and the beeper test. So, do
not use the parameter item=2 and 5.
Table 1-13
E5260/E5270 FLEX Commands Unsupported
Category
Command
Display Control
RED, DFM, SPA, MPA, SCH, MCH
Keyboard Control
KLC
1-62
Agilent B1500 Programming Guide, Edition 2
2
Remote Mode Functions
Remote Mode Functions
This chapter describes the functions of the Agilent B1500 in the remote mode, and
the initial settings.
NOTE
•
“Measurement Modes”
•
“Synchronous Output”
•
“Automatic Abort Function”
•
“Parallel Measurement Function”
•
“Program Memory”
•
“Digital I/O Port”
•
“Trigger Function”
•
“Initial Settings”
Synchronous Output
You can use synchronous output that will be synchronized to the output of the
primary sweep or search source. The output is available for the following
measurement modes:
•
“Staircase Sweep Measurements”
•
“Pulsed Sweep Measurements”
•
“Staircase Sweep with Pulsed Bias Measurements”
•
“Binary Search Measurements”
•
“Linear Search Measurements”
The synchronous source supports the output mode (voltage or current) same as the
primary source, and does not support the pulsed output.
2-2
Agilent B1500 Programming Guide, Edition 2
Remote Mode Functions
Measurement Modes
Measurement Modes
The Agilent B1500 provides the following measurement modes.
NOTE
•
“Spot Measurements”
•
“Pulsed Spot Measurements”
•
“Staircase Sweep Measurements”
•
“Multi Channel Sweep Measurements”
•
“Pulsed Sweep Measurements”
•
“Staircase Sweep with Pulsed Bias Measurements”
•
“Quasi-Pulsed Spot Measurements”
•
“Binary Search Measurements”
•
“Linear Search Measurements”
•
“Sampling Measurement”
•
“Spot C Measurement”
•
“CV Sweep Measurement”
About Search Measurements
The B1500 supports search measurement to find a point on an I-V curve where a
specified condition is satisfied. For example, it searches for a breakdown voltage or
threshold voltage at a specified current.
Search measurements are performed by one or two SMUs. For two SMUs, one is the
search channel, and the other is a sense channel. When one SMU is used, it serves as
both search and sense channel.
Basically, the search channel forces voltage or current until the search stop condition
is satisfied.
Agilent B1500 Programming Guide, Edition 2
2-3
Remote Mode Functions
Measurement Modes
Spot Measurements
Spot measurement is performed as shown below. The measurement channel
performs one point measurement.
Figure 2-1
Spot Measurements
Voltage or current
: Measurement
Channel 1 output
Setup value
Previous value
Measurement time
Voltage or current
Channel 2 output
Setup value
Previous value
Time
DV/DI
DV/DI
Measurement trigger (e.g. XE)
1. The source channel starts output by the DV or DI command. Multiple channels
can be set.
2. The measurement channel starts measurement by a trigger, such as the XE
command. If the trigger is received during the settling time of the source
channels, measurement starts after the settling time.
If you use multiple measurement channels, the channels perform measurement
in the order defined in the MM command.
3. After measurement, the source channels continue the source output.
For 0 V output, enter the DZ command that is used to memorize the present
settings of the channel and change the output to 0 V.
NOTE
The DV command is used to force voltage, and the DI command is used to force
current.
2-4
Agilent B1500 Programming Guide, Edition 2
Remote Mode Functions
Measurement Modes
Pulsed Spot Measurements
Pulsed spot measurement is performed as shown below. The measurement channel
performs one point measurement while the source channel is forcing a pulse.
Figure 2-2
Pulsed Spot Measurements
Voltage or current
: Measurement
PT/PV/PI
Trigger (e.g. XE)
Trigger
Pulse value
Previous value
Base value
Time
Hold time
Pulse width
Hold time
Pulse period
Pulse period
1. The pulse source channel sets output by the PT command and the PV or PI
command. Only one channel can be used for the pulse source.
2. The pulse source channel starts output by a trigger, such as the XE command.
3. The measurement channel starts measurement as shown in Figure 2-2.
The channel performs measurement so that the pulse width and pulse period are
kept (the integration time setting is ignored). Only one channel can be used for
measurement.
4. After measurement, the pulse source channel forces the pulse base value.
If the next trigger occurs within the pulse period, and if the rest of the pulse
period is longer than the hold time as shown in Figure 2-2, the pulse source
waits for the rest, then starts the pulse output immediately. If the rest of the pulse
period is shorter than the hold time, the pulse source waits for the hold time
since the last trigger, then starts the pulse output.
For 0 V output, enter the DZ command that is used to memorize the present
settings of the channel and change the output to 0 V.
NOTE
The PT command sets the pulse timing parameters, such as pulse width and pulse
period. The PV command sets voltage pulse, and the PI command sets current pulse.
Agilent B1500 Programming Guide, Edition 2
2-5
Remote Mode Functions
Measurement Modes
Staircase Sweep Measurements
Staircase sweep measurement is performed as shown below. The source channel
forces staircase sweep voltage or current, and the measurement channel performs
one point measurement at each sweep step.
Figure 2-3
Staircase Sweep Measurements
Voltage or current
Step delay time
Stop value
: Measurement
WT/WM/WV/WI
Trigger (e.g. XE)
Step delay time
Previous value
Delay time
Start value
Hold time
Delay time
Time
1. The staircase sweep source sets output by the WT, WM, and WV or WI
commands. Only one channel can be used for the sweep source.
2. The sweep source starts output by a trigger, such as the XE command.
3. After the hold time, the sweep source waits for the delay time.
4. After the delay time, the measurement channel starts measurement.
If you use multiple measurement channels, the channels perform measurement
in the order defined in the MM command.
5. After measurement, the sweep source waits for the rest of the step delay time if
it is set, and the sweep source changes the output value.
6. The B1500 repeats 4 and 5 for all sweep steps.
7. After the sweep measurement, the sweep source forces the start or stop value, as
specified by the WM command, and keeps it.
For 0 V output, enter the DZ command that is used to memorize the present
settings of the channel and change the output to 0 V.
2-6
Agilent B1500 Programming Guide, Edition 2
Remote Mode Functions
Measurement Modes
NOTE
The WT command sets the hold time, delay time, and step delay time. The WM
command sets the automatic abort function and the output after measurement. The
WV command sets the sweep voltage, and the WI command sets the sweep current.
The start and stop values must have the same polarity for log sweep.
To Use
Synchronous
Sweep Source
One more channel can be set up as a sweep source that has the output synchronized
with the staircase sweep. Refer to “Synchronous Output” on page 2-26. After the
measurement, the synchronous sweep source forces the start or stop value, as
specified by the WM command, and keeps it.
Figure 2-4
Synchronous Sweep
Voltage or current
Stop value
WT/WM/WV/WI
Trigger (e.g. XE)
Previous value
Primary sweep
Start value
Voltage or current
Stop value
WSV/WSI
Previous value
Synchronous sweep
Start value
Time
NOTE
The WSV command sets the sweep voltage, and the WSI command sets the sweep
current. You can use the same output mode (voltage or current) as the primary
sweep. The start and stop values must have the same polarity for log sweep.
To Stop Sweep
Output
An automatic abort function is available. Refer to “Automatic Abort Function” on
page 2-28.
Even if the automatic abort function is disabled, the B1500 automatically stops
measurement if power compliance is enabled for the sweep source and the power
compliance or an automatic abort condition is detected.
Agilent B1500 Programming Guide, Edition 2
2-7
Remote Mode Functions
Measurement Modes
Multi Channel Sweep Measurements
Multi channel sweep measurement is performed as shown below. The source
channel forces staircase sweep voltage or current, and the measurement channel
performs one point measurement at each sweep step. Up to ten channels can be used
for both sweep output and measurement. Both voltage output mode and current
output mode are available for the sweep sources regardless of the output mode of the
primary sweep source.
Figure 2-5
Multi Channel Sweep Measurements using High-Resolution A/D Converter
Voltage or current
Stop value
Step delay time
WT/WM/WV/WI
: Measurement
Trigger (e.g. XE)
Step delay time
Previous value
Start value
Delay time
Voltage or current
Stop value
WNX
Previous value
Start value
Primary sweep source
Hold time
Delay time
Second sweep source
Voltage or current
Stop value
WNX
Previous value
Start value
Eighth sweep source
Time
1. The primary sweep source sets output by the WV or WI commands. And the nth
(n=2 to 10) sweep source sets output by the WNX command.
2. The sweep sources simultaneously start output by a trigger, such as the XE
command. However, if a sweep source sets power compliance or forces
logarithmic sweep current, the sweep sources start output in the order specified
by the n value. Then the first output is forced by the channel set by the WI or
WV command.
3. After the hold time, the sweep sources wait for the delay time.
4. After the delay time, the measurement channel starts measurement. If you use
multiple measurement channels, the channels that use the fixed measurement
ranging mode start measurement simultaneously, then other channels perform
measurement in the order defined in the MM command.
Note that the high-resolution ADC cannot perform simultaneous measurement.
2-8
Agilent B1500 Programming Guide, Edition 2
Remote Mode Functions
Measurement Modes
5. After measurement, the sweep source waits for the rest of the step delay time if
it is set, and the sweep source changes the output value.
6. The B1500 repeats 4 and 5 for all sweep steps.
7. After the sweep measurement, the sweep sources force the start or stop value, as
specified by the WM command, and keep it.
For 0 V output, enter the DZ command that is used to memorize the present
settings of the channel and change the output to 0 V.
NOTE
The WT command sets the hold time, delay time, and step delay time. The WM
command sets the automatic abort function and the output after measurement. The
WV/WI command sets the output of the first sweep source, and the WNX command
sets the output of the nth (n=2 to 10) sweep source. The start and stop values must
have the same polarity for log sweep.
To Stop Sweep
Output
An automatic abort function is available. Refer to “Automatic Abort Function” on
page 2-28.
Even if the automatic abort function is disabled, the B1500 automatically stops
measurement if power compliance is enabled for the sweep source and the power
compliance or an automatic abort condition is detected.
Agilent B1500 Programming Guide, Edition 2
2-9
Remote Mode Functions
Measurement Modes
Pulsed Sweep Measurements
Pulsed sweep measurement is performed as shown below. The source channel forces
pulsed sweep voltage or current, and the measurement channel performs one point
measurement at each sweep step.
Figure 2-6
Pulsed Sweep Measurements
Voltage or current
Stop value
PT/WM/PWV/PWI
Trigger (e.g. XE)
Pulse width
Start value
Hold time
: Measurement
Previous value
Pulse base value
Pulse period
Pulse period
Pulse period
Time
1. The pulsed sweep source sets output by the PT, WM, and PWV or PWI
commands. Only one channel can be used for the pulsed sweep source.
2. The pulsed sweep source starts output by a trigger, such as the XE command.
3. After the hold time, the measurement channel starts measurement as shown in
Figure 2-6. The channel performs measurement so that the pulse width and pulse
period are kept (the integration time setting is ignored). Only one channel can be
used for measurement.
4. After measurement, the pulsed sweep source forces the pulse base value, and
waits for the rest of the pulse period. Then the pulsed sweep source changes the
output value.
5. The B1500 repeats 3 and 4 for all sweep steps.
6. After the pulsed sweep measurement, the pulsed sweep source forces the pulse
base value, and keeps it.
For 0 V output, enter the DZ command that is used to memorize the present
settings of the channel and change the output to 0 V.
2-10
Agilent B1500 Programming Guide, Edition 2
Remote Mode Functions
Measurement Modes
NOTE
The PT command sets the hold time, pulse width, and pulse period. The WM
command sets the automatic abort function and the output after measurement. The
PWV sets the pulsed sweep voltage, and the PWI sets the pulsed sweep current. The
start, stop, and pulse base values must have the same polarity for log sweep.
To Use
Synchronous
Sweep Source
One more channel can be set up as a staircase sweep source that has the output
synchronized with the pulsed sweep. Refer to “Synchronous Output” on page 2-26.
After the measurement, the synchronous sweep source forces the start value, and
keeps it.
Figure 2-7
Synchronous Sweep
Voltage or current
Stop value
PT/WM/PWV/PWI
Trigger (e.g. XE)
Start value
Previous value
Pulse base value
Pulsed sweep
Voltage or current
Stop value
WSV/WSI
Previous value
Start value
Synchronous sweep
Time
NOTE
The WSV command sets the sweep voltage, and the WSI command sets the sweep
current. You can use the same output mode (voltage or current) as the pulsed sweep.
The start and stop values must have the same polarity for log sweep.
To Stop Sweep
Output
An automatic abort function is available. Refer to “Automatic Abort Function” on
page 2-28.
Even if the automatic abort function is disabled, the B1500 automatically stops
measurement if power compliance is enabled for the sweep source and the power
compliance or an automatic abort condition is detected.
Agilent B1500 Programming Guide, Edition 2
2-11
Remote Mode Functions
Measurement Modes
Staircase Sweep with Pulsed Bias Measurements
Staircase sweep with pulsed bias measurement is performed as shown below. The
source channel forces staircase sweep voltage or current, the pulse channel forces
pulsed bias, and the measurement channel performs one point measurement at each
sweep step.
Figure 2-8
Staircase Sweep with Pulsed Bias Measurements
Voltage or current
Stop value
WM/WV/WI
Trigger (e.g. XE)
Previous value
Staircase sweep
Start value
Voltage or current
Pulse width
: Measurement
PT/PV/PI
Pulse peak value
Previous value
Pulse base value
Pulsed bias
Hold time
Pulse period
Time
1. The staircase sweep source sets output by the WM, and WV or WI commands.
Only one channel can be used for the sweep source.
2. The pulsed source sets output by the PT, and PV or PI commands. Only one
channel can be used for the pulsed source.
3. The source channels start output by a trigger, such as the XE command.
4. After the hold time, the measurement channel starts measurement as shown in
Figure 2-8. The channel performs measurement so that the pulse width and pulse
period are kept (the integration time setting is ignored). Only one channel can be
used for measurement.
5. After the measurement, the sweep source changes the output value. Then the
pulsed source forces the pulse base value, and waits for the rest of the pulse
period until the next pulse output.
6. The B1500 repeats 4 and 5 for all sweep steps.
2-12
Agilent B1500 Programming Guide, Edition 2
Remote Mode Functions
Measurement Modes
7. After the sweep measurement, the pulsed source forces the pulse base value, and
the sweep source forces the start or stop value, as specified by the WM
command, and keeps it.
For 0 V output, enter the DZ command that is used to memorize the present
settings of the channel and change the output to 0 V.
NOTE
The WM command sets the automatic abort function and the output after
measurement. The WV command sets the sweep voltage, and the WI command sets
the sweep current. The start and stop values must have the same polarity for log
sweep.
The PT command sets the pulse timing parameters, such as pulse width and pulse
period. The PV command sets the voltage pulse, and the PI command sets current
pulse.
To Use
Synchronous
Sweep Source
One more channel can be set up as a sweep source that has the output synchronized
with the staircase sweep. Refer to “Synchronous Output” on page 2-26.
Figure 2-9
Synchronous Sweep
After the measurement, the synchronous sweep source forces the start or stop value,
as specified by the WM command, and keeps it.
Voltage or current
Stop value
WT/WM/WV/WI
Trigger (e.g. XE)
Previous value
Primary sweep
Start value
Voltage or current
Stop value
WSV/WSI
Previous value
Synchronous sweep
Start value
Agilent B1500 Programming Guide, Edition 2
Time
2-13
Remote Mode Functions
Measurement Modes
NOTE
The WSV command sets the sweep voltage, and the WSI command sets the sweep
current. You can use the same output mode (voltage or current) as the primary
sweep. The start and stop values must have the same polarity for log sweep.
To Stop Sweep
Output
An automatic abort function is available. Refer to “Automatic Abort Function” on
page 2-28.
Even if the automatic abort function is disabled, the B1500 automatically stops
measurement if power compliance is enabled for the sweep source and the power
compliance or an automatic abort condition is detected.
2-14
Agilent B1500 Programming Guide, Edition 2
Remote Mode Functions
Measurement Modes
Quasi-Pulsed Spot Measurements
Quasi-pulsed spot measurement is performed as shown below. The measurement
channel performs one point measurement while the source channel forces a
quasi-pulse voltage. This measurement mode can minimize the output time of the
measurement voltage. So it is effective for the breakdown voltage measurement and
the reliability test.
Figure 2-10
Quasi-Pulsed Spot Measurements
Voltage
The X value is the voltage when the settling detection is stopped.
X value
: Measurement
BDT/BDM/BDV
Trigger (e.g. XE)
Delay
time
Previous value
Start value
Hold time
Measurement time
Settling detection time
Time
1. The quasi-pulse source channel sets output by the BDT, BDM, and BDV
commands. Only one channel can be used for the quasi-pulse source.
2. The quasi-pulse source starts output by a trigger, such as the XE command.
3. After the hold time, the quasi-pulse source starts the voltage transition to the
stop value (settling detection time). Also, it performs voltage measurement
(settling detection) in the interval set by the BDM command. The voltage
transition and settling detection continue until the output voltage slew rate
becomes half of the rate when settling detection started. The slew rate depends
on the cabling and the characteristics of the device. You cannot define it directly.
In normal operation, the slew rate will be slower in the following conditions:
NOTE
•
When the quasi-pulse source applies voltage close to the stop value.
•
When the quasi-pulse source reaches its current compliance due to the
breakdown condition of the device under test.
If the slew rate was too slow when settling detection started or if the settling
detection time was too long, an error occurs and the source returns its output to the
start value immediately. See “BDM” on page 4-31.
Agilent B1500 Programming Guide, Edition 2
2-15
Remote Mode Functions
Measurement Modes
4. After the settling detection stops, the quasi-pulse source keeps the output.
5. After the delay time, the measurement channel starts measurement.
Only one channel can be used for measurement.
6. After measurement, the quasi-pulse source immediately returns the output to the
start value and keeps it.
For 0 V output, enter the DZ command that is used to memorize the present
settings of the channel and change the output to 0 V.
NOTE
If there is noise or skew on the output voltage, settling detection might stop at an
unexpected voltage.
NOTE
The BDT command sets the hold time and delay time, and the BDM command sets
the settling detection interval and measurement mode (voltage or current); the BDV
command sets the output. Also |start-stop| must be 10 V or more.
2-16
Agilent B1500 Programming Guide, Edition 2
Remote Mode Functions
Measurement Modes
Binary Search Measurements
Binary search measurement is performed as shown below. The source channel
forces voltage or current, and the measurement channel performs one point
measurement. The B1500 repeats this until the search stop condition is satisfied, and
returns the source’s last output value. The last measurement data is also returned if it
is set by the BSVM command.
Figure 2-11
Binary Search Measurements
Voltage or current
Stop
BSM, BST, and
BSV or BSI
-D/2
-D/8
-D/16
Search stopped
Delay time
(1) Normal output
Hold time
+D/32
+D/4
+D/64
Trigger
Delay time
Start
Stop
(2) Cautious output
BSM, BST, and
BSV or BSI
Delay time
-D/8
-D/16
Search stopped
Delay time
Hold time
+D/4
+D/32
+D/64
Trigger
Start
+D/2
: Measurement
D = | Stop - Start |
Time
1. The search source sets output by the BSM, BST, and BSV or BSI commands.
Only one channel can be used for the search source.
2. The search source starts output by a trigger, such as the XE command.
3. After the hold time, the measurement channel waits for the delay time, and starts
measurement as shown in Figure 2-11. The measurement channel can be set by
the BGI or BGV command. Only one channel can be used for measurement.
4. After measurement, the search source changes the output value. The output
value depends on the output control mode, normal or cautious, selected by the
BSM command. See Figure 2-11.
Agilent B1500 Programming Guide, Edition 2
2-17
Remote Mode Functions
Measurement Modes
5. The B1500 repeats 3 and 4 until the search stop condition is satisfied. The search
stop condition is one of the following conditions selected by the BGI or BGV
command.
•
Measured value = Search target value ± limit
•
Number of measurement points > limit
6. After the search measurement, the search source forces the start value, the stop
value, or the last output value, as specified by the BSM command, and keeps it.
For 0 V output, enter the DZ command that is used to memorize the present
settings of the channel and change the output to 0 V.
NOTE
The BSM command sets the search control mode, the automatic abort function, and
the output after search. The BST command sets the hold time and delay time. The
BSV/BSI command sets the search output, and the BGI/BGV command sets the
measurement channel.
To Use
Synchronous
Output Channel
You can use the synchronous output channel that provides the output synchronized
with the search source. Refer to “Synchronous Output” on page 2-26. After
measurement, the synchronous channel forces the start+offset, stop+offset, or the
last output value, as specified by the BSM command, and keeps it.
Figure 2-12
Synchronous Output
Voltage or current
BSM, BST, and BSV/BSSV or BSI/BSSI
Trigger (e.g. XE)
Offset
Synchronous search source
Stop value
Offset
Offset
Primary search source
Start value
Previous value
NOTE
Time
The BSSV/BSSI command sets the synchronous output. You can use the same
output mode (voltage or current) as the search source. All output values must be
covered by the output range of the search source.
2-18
Agilent B1500 Programming Guide, Edition 2
Remote Mode Functions
Measurement Modes
Linear Search Measurements
Linear search measurement is performed as shown below. The source channel
sweeps voltage or current, and the measurement channel performs one point
measurement at each sweep step. The B1500 stops sweep and measurement when
the search stop condition is satisfied, and returns the source’s last output value. The
last measurement data is also returned if it is set by the LSVM command.
Figure 2-13
Linear Search Measurements
Voltage or current
Stop value
: Measurement
LSM, LSTM, and LSV or LSI
Trigger (e.g. XE)
Delay time
Search stopped
Delay time
Hold time
Previous value
Start value
Time
1. The search source sets output by the LSM, LSTM, and LSV or LSI commands.
Only one channel can be used for the search source.
2. The search source starts output by a trigger, such as the XE command.
3. After the hold time, the measurement channel waits for the delay time, and starts
measurement as shown in Figure 2-13. The measurement channel can be set by
the LGI or LGV command. Only one channel can be used for the measurement.
4. After measurement, the search source changes the output value.
5. The B1500 repeats 3 and 4 until the search stop condition is satisfied. The search
stop condition is one of the following conditions selected by the LGV or LGI
command.
•
Measured value is over the search target value.
•
Measured value breaks the search target value.
6. After the search measurement, the search source forces the start value, the stop
value, or the last output value, as specified by the LSM command, and keeps it.
For 0 V output, enter the DZ command that is used to memorize the present
settings of the channel and change the output to 0 V.
Agilent B1500 Programming Guide, Edition 2
2-19
Remote Mode Functions
Measurement Modes
NOTE
The LSM command sets the automatic abort function and the output after search.
The LSTM command sets the hold time and delay time. The LSV/LSI command
sets the search output, and the LGI/LGV command sets the measurement channel.
To Use
Synchronous
Output Channel
You can use the synchronous output channel that provides output synchronized with
the search source. Refer to “Synchronous Output” on page 2-26.
Figure 2-14
Synchronous Output
After measurement, the synchronous channel forces the start+offset, stop+offset, or
the last output value, as specified by the LSM command, and keeps it.
Voltage or current
LSM, LSTM, and LSV/LSSV or LSI/LSSI
Offset
Trigger (e.g. XE)
Stop value
Synchronous search source
Offset
Offset
Previous value
Primary search source
Start value
NOTE
Time
The LSSV/LSSI command sets the synchronous output. You can use the same
output mode (voltage or current) as the search source. All output values must be
covered by the output range of the search source.
2-20
Agilent B1500 Programming Guide, Edition 2
Remote Mode Functions
Measurement Modes
Sampling Measurement
Sampling measurement is performed as shown below. The sampling operation is
performed in the specified sampling interval until the number of measurement result
data reaches to the specified number of measurement data.
Figure 2-15
Sampling Measurements
Voltage or current
: Measurement
Channel 1 output
Setup value
Previous value
Sampling interval
DV/DI
Voltage or current
Bias hold time
Measurement time
Base hold time
Bias value
MT/MSC/MT
/MV/MI
Channel 2 output
Previous value
Base value
Measurement trigger (e.g. XE)
Time
1. The sampling condition is set by the MT, MSC, and ML commands.
2. The synchronous source channels are set by the MV/MI commands. The
channels will start output by a trigger, such as the XE command. Each channel
controls the output simultaneously.
3. The source channels set by the DI/DV commands will start output at the timing
of the DI/DV command execution.
4. The synchronous source channels start the base value output by a trigger, such as
the XE command.
5. After the base hold time, the synchronous source channels change the output to
the bias value. The channels keep the value until the end of the sampling
measurement.
6. And after the bias hold time, the measurement channels start measurement for
the first sampling point. The measurement channels perform the measurement in
series by the order set to the MM command.
Agilent B1500 Programming Guide, Edition 2
2-21
Remote Mode Functions
Measurement Modes
7. After that, the following operation is repeated with the specified time interval.
•
Measurement channels start measurement if they are ready to measure.
•
Measurement channels keep the condition if they are busy.
This operation is repeated until the number of measurement result data reaches
to the specified number of measurement data.
For the linear sampling with interval < 2 ms, if the total measurement time runs
over the specified time interval × number, the sampling measurement will be
stopped even if the number of measurement result data is less than the specified
number.
For the log sampling, the B1500A holds only the data that can be plotted on the
log scale in the same distance as close as possible. Only the held data is counted
in the number of measurement result data.
8. After the sampling measurement, the synchronous source channel set by the
MI/MV command forces the base or bias value specified by the MSC command.
9. The source channel set by the DV or DI command continues the source output.
For 0 V output, enter the DZ command that is used to memorize the present
settings of the channel and change the output to 0 V.
NOTE
The MT command sets the bias hold time, sampling interval, number of samples,
and base hold time.
The MSC command sets the automatic abort function and the output after
measurement.
The ML command sets the linear sampling mode or the log sampling mode.
The MV and MI commands set the synchronous voltage source and current source
respectively.
The MCC command clears the MV and MI command setting.
To Stop Output
An automatic abort function is available. Refer to “Automatic Abort Function” on
page 2-28.
2-22
Agilent B1500 Programming Guide, Edition 2
Remote Mode Functions
Measurement Modes
Spot C Measurement
Spot capacitance measurement is performed as shown below. The CMU
(capacitance measurement unit) applies DC bias with AC signal, and performs one
point measurement.
Before performing the measurement, select the measurement parameters by using
the IMP command. And select the output data by using the LMN command.
Figure 2-16
Spot C Measurements
Voltage
: Measurement
Measurement time
FC/ACV
CMU output
Setup value
Previous value
DCV
Time
Measurement trigger (e.g. XE)
1. The CMU starts AC signal output by the FC and ACV commands.
2. The CMU starts DC bias output by the DCV command.
3. The CMU performs measurement by a trigger, such as the XE command. If the
trigger is received during the settling time, the measurement starts after the time.
4. After the measurement, the CMU continue the DC bias output with AC signal.
For 0 V output, enter the DZ command that is used to memorize the present
settings of the channel and change the CMU output to 0 V for both AC and DC.
NOTE
The FC command sets the AC signal frequency.
The ACV command specifies the oscillator level, and applies the AC voltage.
The DCV command applies the DC bias.
If the SCUU (SMU CMU Unify Unit) is connected to the 1 CMU and 2
MPSMUs/HRSMUs correctly, the source module is automatically selected by the
DC bias setting. The CMU is selected if it is ±25 V or less (setting resolution: 0.001
V), or the SMU is selected if it is greater than ±25 V (setting resolution: 0.005 V).
Agilent B1500 Programming Guide, Edition 2
2-23
Remote Mode Functions
Measurement Modes
CV Sweep Measurement
CV sweep measurement is performed as shown below. The CMU (capacitance
measurement unit) applies DC bias with AC signal, and performs one point
measurement at each sweep step.
Before performing the measurement, select the measurement parameters by using
the IMP command. And select the output data by using the LMN command.
Figure 2-17
CV Sweep Measurements
Voltage
Step delay time
Stop value
: Measurement
FC/ACV/WTDCV/WMDCV/WDCV
Trigger (e.g. XE)
Step delay time
Previous value
Delay time
Start value
Hold time
Delay time
Time
1. The CMU starts AC signal output by the FC and ACV commands.
2. The staircase sweep voltage source sets output by the WTDCV, WMDCV, and
WDCV commands. Only the CMU can be specified for these commands.
3. The sweep source starts output by a trigger, such as the XE command.
4. After the hold time, the sweep source waits for the delay time.
5. After the delay time, the CMU starts measurement.
6. After measurement, the sweep source waits for the rest of the step delay time if
it is set, and the sweep source changes the output value.
7. The B1500 repeats 5 and 6 for all sweep steps.
8. After the sweep measurement, the sweep source forces the start or stop value, as
specified by the WMDCV command, and keeps it. The CMU also keeps the AC
signal output.
For 0 V output, enter the DZ command that is used to memorize the present
settings of the channel and change the CMU output to 0 V for both AC and DC.
2-24
Agilent B1500 Programming Guide, Edition 2
Remote Mode Functions
Measurement Modes
NOTE
The FC command sets the AC signal frequency.
The ACV command specifies the oscillator level, and applies the AC voltage.
The WTDCV command sets the hold time, delay time, and step delay time.
The WMDCV command sets the automatic abort function and the output after
measurement.
The WDCV command sets the sweep voltage. The start and stop values must have
the same polarity for log sweep.
If the SCUU (SMU CMU Unify Unit) is connected to the 1 CMU and 2
MPSMUs/HRSMUs correctly, the source module is automatically selected by the
sweep range (from start to stop). The CMU is selected if it is ±25 V or less (setting
resolution: 0.001 V), or the SMU is selected if it is greater than ±25 V (setting
resolution: 0.005 V).
To Stop Sweep
Output
An automatic abort function is available. Refer to “Automatic Abort Function” on
page 2-28.
Agilent B1500 Programming Guide, Edition 2
2-25
Remote Mode Functions
Synchronous Output
Synchronous Output
You can use synchronous output that will be synchronized to the output of the
primary sweep or search source. See Figure 2-18 and Figure 2-19. Synchronous
output is available for the following measurement modes and set by the following
commands:
Measurement Mode
Command
“Staircase Sweep Measurements”
WSI or WSV
“Pulsed Sweep Measurements”
WSI or WSV
“Staircase Sweep with Pulsed Bias Measurements”
WSI or WSV
“Binary Search Measurements”
BSSI or BSSV
“Linear Search Measurements”
LSSI or LSSV
The synchronous source supports the same output mode (voltage or current) as the
primary source, and does not support pulsed output.
Parameters
The following parameters are used to set up a synchronous output. For details of the
commands, refer to Chapter 4, “Command Reference.”
•
For the WSI and WSV commands:
start
Synchronous sweep start value.
stop
Synchronous sweep stop value.
The start and stop values must have the same polarity for logarithmic sweep.
•
For the BSSI, BSSV, LSSI, and LSSV commands:
offset
Offset value from the search source output.
polarity
Polarity (+ or -) of the synchronous source output.
Synchronous output is given by one of the following formulas:
•
Synchronous output = primary source output + offset
•
Synchronous output = -1× primary source output + offset
All output values must be covered by the output range of the search source.
2-26
Agilent B1500 Programming Guide, Edition 2
Remote Mode Functions
Synchronous Output
Figure 2-18
Synchronous Sweep Output Example for Staircase Sweep
Voltage or current
Stop value
WT/WM/WV/WI
Trigger (e.g. XE)
Previous value
Primary sweep
Start value
Voltage or current
Stop value
WSV/WSI
Previous value
Synchronous sweep
Start value
Figure 2-19
Time
Synchronous Output Example for Binary Search
Voltage or current
BSM, BST, and BSV/BSSV or BSI/BSSI
Trigger (e.g. XE)
Offset
Synchronous search source
Stop value
Offset
Offset
Primary search source
Start value
Previous value
Agilent B1500 Programming Guide, Edition 2
Time
2-27
Remote Mode Functions
Automatic Abort Function
Automatic Abort Function
The automatic abort function stops measurement (increasing or decreasing source
output value) when one of the following conditions occurs. This function is useful to
reduce sweep time and to prevent damage to the device during measurement.
•
The output reaches voltage compliance or current compliance
•
A measurement value exceeds the specified measurement range
•
An SMU oscillates, or an error is caused in the CMU
The automatic abort function is enabled by using the WM, WMDCV, BSM, LSM,
or MSC command. This function is available for the following measurement modes:
•
WM: Staircase sweep, staircase sweep with pulsed bias, multi channel sweep,
and pulsed sweep measurements
•
WMDCV: CV sweep measurement
•
BSM: Binary search measurement
•
LSM: Linear search measurement
•
MSC: Sampling measurement
When abort occurs After measurement is aborted, the source forces the following value. And then the
dummy data (199.999E+99) is returned for measurement points not reached.
Output after
measurement
NOTE
•
Start value (for sweep source and search output source)
•
Pulse base value (for pulsed source and pulsed sweep source)
•
Base value (for synchronous source of sampling measurement)
You can specify the post measurement condition for normal measurement end. The
source output value can be one of the following values. The setting is not effective
for the pulsed sweep measurement.
•
Sweep measurement: Start value or stop value
•
Search measurement: Start value, stop value, or last output value
•
Sampling measurement: Base value or bias value
Even if the post measurement value is set, the source forces the start value if output
is stopped by the automatic abort function, power compliance, or AB command.
2-28
Agilent B1500 Programming Guide, Edition 2
Remote Mode Functions
Parallel Measurement Function
Parallel Measurement Function
The following measurement modes enable the parallel measurement (simultaneous
measurement) by using the multiple measurement channels.
•
Spot measurement (MM 1,chnum,chnum, . . . ,chnum)
•
Staircase sweep measurement (MM 2,chnum,chnum, . . . ,chnum)
where, chnum is the slot number where the measurement channel (SMU) has been
installed. 1 to 10 (integer) are available.
To Enable Parallel Measurement
Execute the following command to enable the parallel measurement function.
PAD 1
To Set Measurement Channels
The following conditions must be satisfied for the measurement channels to perform
the parallel measurements.
•
Use the high speed A/D converter
AAD chnum,0 command
•
Use the fixed ranging for the measurement
RI chnum,range command (for current measurement)
RV chnum,range command (for voltage measurement)
Enter the negative value for range to use the fixed ranging.
Agilent B1500 Programming Guide, Edition 2
2-29
Remote Mode Functions
Program Memory
Program Memory
The program memory is a volatile memory that is used to store command strings
temporarily. The Agilent B1500 has a built-in program memory that can store 2,000
programs maximum, and a total of 40,000 commands.
The program memory can eliminate several processes in the program execution,
such as transferring commands, checking command syntax, and converting
commands to the internal codes. Thus, using the program memory speeds up
program execution. If frequently used command strings are stored in the program
memory, GPIB/computer activity is minimized.
Using Program Memory
You can store, execute, read, and delete programs in the program memory as shown
below. For details on each command, refer to Chapter 4, “Command Reference.”
To store programs Send the ST and END commands to store a program. The following procedure
stores a program (program number n) in the program memory. A multiple command
string is also available.
1. OUTPUT @B1500;”ST n”
where, n is the program number for the program now stored in the program
memory. The value must be an integer, 1 to 2000.
2. OUTPUT @B1500;”XXXX”
where, XXXX must be the command you want to store in the program memory.
Repeat this until all required commands are stored.
Table 2-1 lists the invalid commands for the program memory.
3. OUTPUT @B1500;”END”
NOTE
The program must be complete and free of errors.
An error occurs if the program memory overflows while a program is being stored.
If you store a new program using an existing program number, the old program is
deleted and the new program is stored.
2-30
Agilent B1500 Programming Guide, Edition 2
Remote Mode Functions
Program Memory
To call programs
from a memory
program
A memory program can invoke another memory program by storing the DO or RU
command in the memory program. Up to eight levels of nesting are available. The
first level is always the DO or RU command sent by the external computer.
To execute
programs
Send the RU or DO command to execute the memory program.
•
OUTPUT @B1500;”RU 1,5”
This example executes the programs numbered 1 through 5 sequentially. These
programs must be stored in the memory.
•
OUTPUT @B1500;”DO 1,2,3,4,5”
This example executes programs 1, 2, 3, 4, and 5 in this order. These programs
must be stored in the memory. A maximum of eight numbers can be specified.
To use variables
You can use variables in the memory programs. To enter the value to the variable,
send the VAR command. If the variable is referred by multiple programs or
commands, set or change the value carefully so that the program works fine without
errors. Format of the variable is %tn (t: integer I or real R, n: integer, 1 to 99).
In the following example, the first line stores a program (program 99) which uses
the %I50 variable. The second line enters 2 to %I50, and executes the program 99.
OUTPUT @B1500;”ST99;CN%I50;DV%I50,0,2;TI%I50;CL%I50;END”
OUTPUT @B1500;”VAR0,50,2;DO99”
To read programs
To read the program numbers of the memory programs, send the LST? command
without a command parameter.
To read the contents of a memory program, send the LST? command with the
program number as shown below. Up to 3000 commands can be read by one
command execution.
OUTPUT @B1500;”LST? 100”
To delete
programs
To delete all memory programs, send the SCR command without a parameter.
To delete a memory program, send the SCR command with the program number as
shown below.
OUTPUT @B1500;”SCR 100”
NOTE
Turning off the instrument also clears the program memory. The device clear and
*RST commands do not clear the program memory.
Agilent B1500 Programming Guide, Edition 2
2-31
Remote Mode Functions
Program Memory
Table 2-1
Invalid Commands for Program Memory
Category
GPIB Command
Reset
*RST
Diagnostics
DIAG?
Self-test
*TST?
Self Calibration
CA
*CAL?
CM
Abort
AB
Channel Control
RCV
WZ?
Program Memory
ST
END
SCR
VAR?
LST?
16 bit Control Port
ERS?
Query
ERR?
EMG?
*IDN?
LOP?
*LRN?
NUB?
*OPC?
UNT?
WNU?
Status Byte
*SRE?
*STB?
2-32
Agilent B1500 Programming Guide, Edition 2
Remote Mode Functions
Digital I/O Port
Digital I/O Port
The digital I/O port is used for the trigger input/output terminals or an interface to
control an external relay circuit and so on. For the trigger input/output, refer to
“Trigger Function”. For another usage, the following commands are available:
ERM
Changes the digital I/O port assignments.
ERS?
Returns the digital I/O port status.
ERC
Changes the output status of the digital I/O port
Connector type of the digital I/O port is D-Sub 25-pin. The pin assignment is shown
in Table 2-2. In the initial setting, all port forces TTL high level (approx. 2.4 V. TTL
low is approx. 0.8 V). The above commands are available for non trigger ports from
DIO 1 to DIO 16.
Table 2-2
Digital I/O Pin Assignment
Description
Pin Number
Description
GND
25
13
GND
Do not use
24
12
Do not use
Do not use
23
11
Do not use
DIO 15 (bit 15)
22
10
DIO 16 (bit 16)
DIO 13 (bit 13)
21
9
DIO 14 (bit 14)
DIO 11 (bit 11)
20
8
DIO 12 (bit 12)
DIO 9 (bit 9)
19
7
DIO 10 (bit 10)
DIO 7 (bit 7)
18
6
DIO 8 (bit 8)
DIO 5 (bit 5)
17
5
DIO 6 (bit 6)
DIO 3 (bit 3)
16
4
DIO 4 (bit 4)
DIO 1 (bit 1)
15
3
DIO 2 (bit 2)
Do not use
14
2
Do not use
1
Do not use
Agilent B1500 Programming Guide, Edition 2
2-33
Remote Mode Functions
Digital I/O Port
Accessories
The following accessories are available to connect the Digital I/O port.
•
Agilent 16493G Digital I/O connection cable
Used to connect the Digital I/O port to a D-Sub (f) 25-pin connector. This cable
should be connected between two B1500s, or between the B1500 and the
N1253A-200 BNC box. Cable length depends on the following option items:
16493G-001: Approx. 1.5 m
16493G-002: Approx. 3 m
•
Agilent N1253A-100 Digital I/O T-cable
Used to connect the Digital I/O port to a D-Sub (f) 25-pin connector and a
D-Sub (m) 25-pin connector. This cable must be used to connect three or more
B1500s. Cable length is as following:
•
D-Sub (m) to D-Sub (m): Approx. 1.5 m
Both connectors should be connected to the Digital I/O ports.
•
D-Sub (m) to D-Sub (f): Approx. 30 cm
The D-Sub (f) connector should be connected to the additional N1253A-100
or the 16493G cable to connect the third or following B1500.
•
Agilent N1253A-200 Digital I/O BNC box
Used to convert the D-Sub connector to the BNC connectors. Only the DIO 1 to
DIO 8 are connected to the BNC (f) connectors individually. To use the BNC
box, connect the 16493G cable between the Digital I/O port and the BNC box.
Figure 2-20
Accessories for Digital I/O Port
16493G
N1253A-100
N1253A-200
2-34
D-Sub (m)
D-Sub (m)
D-Sub (m)
D-Sub (m)
D-Sub (f)
D-Sub (f)
BNC (f) x 8
Agilent B1500 Programming Guide, Edition 2
Remote Mode Functions
Digital I/O Port
Digital I/O Internal Circuit
The following figure shows the input/output circuits internally connected to each
port/pin of the Digital I/O connector.
Figure 2-21
Digital I/O Internal Circuit
Vcc
R1
R2
to input control
to DSUB pins
from output control
Q1
Agilent B1500 Programming Guide, Edition 2
Vcc=5 V
R1=1 kohm
R2=100 ohm
Q1: Vce(sat)=0.3 V
2-35
Remote Mode Functions
Trigger Function
Trigger Function
The Agilent B1500 can be synchronized with other equipment, such as capacitance
meters, voltmeters, ammeters, probers, handlers and so on, by using the following
terminals:
•
Ext Trig In
BNC connector. Only for trigger input (to receive trigger).
•
Ext Trig Out
BNC connector. Only for trigger output (to send trigger).
•
Digital I/O
D-Sub 25-pin connector. Sixteen paths are available for the trigger port. Each
path can be used for either input or output. For the pin assignment and
accessories, refer to “Digital I/O Port”.
Figure 2-22 shows a connection example of the B1500 and another device.
Figure 2-22
Connecting Trigger Input/Output
In
Out
Other device
in
out
Example connection
13
out
in 1
Agilent E5270
In
Out
Ext Trig
NOTE
25
14
Digital I/O
To use the digital I/O port for the trigger input/output port, send the TGP command.
DIO 1 to DIO 16 can be used for the trigger input/output port. See Table 2-2.
2-36
Agilent B1500 Programming Guide, Edition 2
Remote Mode Functions
Trigger Function
Trigger Input
A trigger input operation example is shown in Figure 2-23. Measurement or source
output can be started by the input trigger sent through the port specified by the TGP
command. See Table 2-3.
Figure 2-23
Trigger Input Example, Staircase Sweep Measurement, Negative Logic
Start Measurement
TGP t,1,p,1
Start Step Measurement
TGP t,1,p,3
Start Step Output Setup
Case 1
TGP t,1,p,2
Case 2
Delay time or more
Case 1: With trigger for
first sweep step
Hold time (Case 2)
or more (Case 1)
Case 2: With trigger for
output after sweep
: Measurement
Measurement trigger delay
Initial Settings
The following functions are available in the initial settings:
•
Trigger port: Ext Trig In
•
Trigger type: Start Measurement (type 1)
•
Commands for the trigger wait: WS, TM3, or PA with TM3
Input Trigger
The B1500 responds to the input trigger (minimum pulse width 10 μs) that changes
the signal level from high (approx. 2.4 V) to low (approx. 0.8 V). This is negative
logic. You can change it to positive logic by using the third parameter of the TGP
command.
Measurement
Trigger Delay
Delay time from a trigger input to starting a step measurement. The delay time is
available for the Start Step Measurement trigger (type 3). You can set the delay time
value by using the WT command (WTDCV for the CV sweep measurement).
Agilent B1500 Programming Guide, Edition 2
2-37
Remote Mode Functions
Trigger Function
PA/PAX/WS/WSX
Commands
The commands put the B1500 in the trigger wait state. The B1500 can recover from
the wait state if an external trigger is sent to a trigger input port. You can use the
commands regardless of the trigger type.
If you use the PA or PAX command to put the B1500 in the trigger wait state, send
the TM3 command before the PA or PAX command.
Table 2-3
Type of Trigger Input
Commanda
Type
B1500 Operation by Input Trigger
1
Starts the measurement specified by the MM command.
TGP t,1,p,1
TM3
2
The sweep source starts to set the sweep step output.
TGP t,1,p,2
TGSI m
The pulse source starts to set the pulsed output.
This trigger type is available for the staircase sweep,
pulsed spot, pulsed sweep, staircase sweep with pulsed
bias, multi channel sweep, and CV sweep measurement.
3
Waits for the measurement trigger delay, and starts the
sweep step measurement.
TGP t,1,p,3
This trigger type is available for the staircase sweep,
multi channel sweep, and CV sweep measurement.
a. t selects trigger input terminal, Ext Trig In or a digital I/O path.
p selects positive or negative logic of the trigger.
m selects Case 1 or Case 2 of the trigger type 2 (see Figure 2-23).
2-38
Agilent B1500 Programming Guide, Edition 2
Remote Mode Functions
Trigger Function
Trigger Output
A trigger output operation example is shown in Figure 2-24. When the measurement
or source output setup is completed, the output trigger is sent through the port
specified by the TGP command. See Table 2-4.
Figure 2-24
Trigger Output Example, Staircase Sweep Measurement, Negative Logic
Step delay time
Delay time
Hold time
Source trigger delay
: Measurement
XE
Measurement Completion
TGP t,2,p,1
Gate trigger TGP t,2,p,3
Step Measurement Completion
TGP t,2,p,2
Step Output Setup Completion
Source trigger delay
TGP t,2,p,1
Initial Settings
Measurement Completion
Edge trigger TGP t,2,p,3
Step Measurement Completion
TGP t,2,p,2
Step Output Setup Completion
The following functions are available in the initial settings:
•
Trigger port: Ext Trig Out
•
Trigger type: Measurement Completion (type 1)
•
Commands for the trigger output: OS
Output Trigger
An edge trigger or a gate trigger will be sent when an operation is completed (see
Figure 2-25). Initially, the negative edge trigger is sent.
Source Trigger
Delay
Delay time from when the source output setup is completed until an edge trigger is
sent or a gate trigger level is returned. The delay time is available for the Step
Output Setup Completion trigger (type 2). You can set the delay time value by using
the WT command (WTDCV for the CV sweep measurement).
OS/OSX
Commands
The command is used to send a trigger immediately from a trigger output terminal.
You can use the commands regardless of the trigger type.
Agilent B1500 Programming Guide, Edition 2
2-39
Remote Mode Functions
Trigger Function
Using Multiple
Channels
If you use the multiple measurement channels, an edge trigger will be sent or a gate
trigger level will be returned when the measurement is completed by all channels.
For the multi channel sweep measurement, an edge trigger will be sent or a gate
trigger level will be returned when the source output setup is completed by all
channels, or when the measurement is completed by all channels.
Figure 2-25
Output Trigger
Operation start or OS or OSX
Operation complete or OS or OSX
High
(Approx. 2.4 V)
Gate trigger
Low
(Approx. 0.8 V)
Edge trigger
Negative logic
Table 2-4
High
(Approx. 2.4 V)
Approx. 10us
Positive logic
Low
(Approx. 0.8 V)
Type of Trigger Output
Commanda
Type
Timing of Trigger Output by B1500
1
When the measurement specified by the MM command
is completed.
TGP t,2,p,1
TGXO m
TM3
2
When the source trigger delay time elapses after the
sweep step output setup or pulse output setup is
completed.
TGP t,2,p,2
TGSO m
Available for the staircase sweep, pulsed spot, pulsed
sweep, staircase sweep with pulsed bias, multi channel
sweep, and CV sweep measurement.
3
When the measurement is completed at each sweep step
for the staircase sweep, multi channel sweep, and CV
sweep measurement.
TGP t,2,p,3
TGMO m
a. t selects the trigger output terminal, Ext Trig Out or a digital I/O.
p selects positive or negative logic. m selects edge or gate trigger.
2-40
Agilent B1500 Programming Guide, Edition 2
Remote Mode Functions
Trigger Function
Using Trigger Function
•
“To Make Wait State Using PA/PAX”
•
“To Make Wait State Using WS/WSX”
•
“To Send Trigger Using OS/OSX”
•
“To Receive Measurement Trigger”
•
“To Specify Trigger Port and Receive Trigger”
•
“To Control Measurement Timing Using External Trigger”
To Make Wait State Using PA/PAX
The PA or PAX command puts the B1500 into a wait state. The B1500 can be
recovered from the wait state when the specified wait time elapses, or when an event
selected by the TM command occurs. Then the B1500 executes the commands
following the PA/PAX command. The event only releases the wait state set by the
PA/PAX command.
The wait time parameter is available for the PA/PAX command. If you specify the
wait time, the wait state continues until the time elapses or until the event occurs.
Available value: -99.9999 to 99.9999 s, in 100 μs resolution.
If you set a negative value, the wait state is kept until the event occurs.
You can select the event by using the TM command. If you want to use an external
trigger as the event, enter the TM3 command. Then the PA/PAX command waits for
the XE command execution, or:
•
PA waits for a trigger sent to the Ext Trig In terminal.
•
PAX waits for a trigger sent to the specified terminal.
In the initial setting, negative logic is available. To change it to positive, send the
TGP command.
NOTE
The TM command is used to select the event effective for starting measurement, or
releasing the wait time set by the PA or PAX command. Enter the TM command
before the PA or PAX command.
Agilent B1500 Programming Guide, Edition 2
2-41
Remote Mode Functions
Trigger Function
To Make Wait State Using WS/WSX
The WS or WSX command puts the B1500 into a wait state. The B1500 can be
recovered from the wait state by an external trigger. Then the B1500 executes the
commands following the WS/WSX command. The external trigger only releases the
wait state set by the WS/WSX command.
•
WS waits for a trigger sent to the Ext Trig In terminal.
•
WSX waits for a trigger sent to the specified terminal.
In the initial setting, the negative logic is available. To change it to the positive, send
the TGP command.
If you want to end a wait state before receiving an external trigger, enter the AB or
*RST command, or use the device clear (HP BASIC CLEAR statement) if any other
commands have already been entered.
NOTE
For easy programming, do not enter the TM command, or use the TM1, TM2, or
TM4 event mode. The TM3 event mode will complicate programming.
To Send Trigger Using OS/OSX
To trigger an external device from the B1500, use the OS or OSX command.
•
OS sends an edge trigger to the Ext Trig Out terminal.
•
OSX sends a trigger to the specified terminal.
In the initial setting, negative logic is available. To change it to positive, send the
TGP command.
Enter the WS/WSX command immediately after the OS/OSX command. Then the
B1500 triggers an external device to start its operation by the OS/OSX, and waits for
an operation complete trigger from the external equipment. This scenario ensures
that the B1500 and external equipment operations do not overlap.
Agilent E5270
WS Wait state
start
Operation
OS WS Wait state
end
Wait state
start
Time
External device
2-42
Operation
Operation
Agilent B1500 Programming Guide, Edition 2
Remote Mode Functions
Trigger Function
To Receive Measurement Trigger
To use an external trigger just for starting measurement, instead of the XE
command, perform the next step. This is not effective for the high speed spot
measurement.
1. Connect a BNC cable between the Ext Trig In connector and a trigger output
connector of an external device.
2. Create a control program. Then the TM3 command and HP BASIC ENTER
statement should be entered as shown in the following example:
:
OUTPUT @B1500;”MM1”
! Sets spot measurement mode
:
! Sets measurement condition
:
OUTPUT @B1500;”TM3”
! Uses external trigger
ENTER @B1500 USING ”#,3X,12D,2X”;M_data
:
3. Execute the control program.
The B1500 sets the measurement conditions, and waits for an external trigger
(negative trigger) sent to the Ext Trig In connector.
When the trigger is received, the B1500 starts measurement. When
measurement is completed, the B1500 sends a negative edge trigger to the Ext
Trig Out connector, and puts the measurement data in the data output buffer.
Ext Trig In
Ext Trig Out
NOTE
Start measurement
Measurement completion
The HP BASIC ENTER statement pauses program execution until measurement
data is put in the data buffer, reads the data from the buffer, and then continues
program execution.
Agilent B1500 Programming Guide, Edition 2
2-43
Remote Mode Functions
Trigger Function
To Specify Trigger Port and Receive Trigger
To use an external trigger just for starting measurement, instead of the XE
command, perform the next step. This is not effective for the high speed spot
measurement.
This example specifies the trigger input/output ports and uses the gate trigger for the
output trigger.
1. Connect a BNC cable between the Ext Trig In connector and a trigger output
connector of an external device.
2. Create a control program. Then the TM3 and TGP commands and HP BASIC
ENTER statement should be entered as shown in the following example:
:
OUTPUT @B1500;”MM1”
! Sets spot measurement mode
:
! Sets measurement condition
:
OUTPUT @B1500;”TM3”
! Uses external trigger
OUTPUT @B1500;”TGP -1,1,1,1”
! Sets trigger input
OUTPUT @B1500;”TGP -2,2,1,1”
! Sets trigger output
OUTPUT @B1500;”TGXO 2”
! Enables gate trigger
ENTER @B1500 USING ”#,3X,12D,2X”;M_data
:
3. Execute the control program.
The B1500 sets the measurement conditions, and waits for an external trigger
(positive trigger) sent to the Ext Trig In connector.
When the trigger is received, the B1500 starts measurement and sends a positive
gate trigger to the Ext Trig Out connector. When measurement is completed, the
B1500 returns the gate trigger level to logical low, and puts the measurement
data in the data output buffer.
Ext Trig In
Ext Trig Out
NOTE
Start measurement
Measurement completion
The HP BASIC ENTER statement pauses program execution until measurement
data is put in the data buffer, reads the data from the buffer, and then continues
program execution.
2-44
Agilent B1500 Programming Guide, Edition 2
Remote Mode Functions
Trigger Function
To Control Measurement Timing Using External Trigger
Multiple trigger terminals will be used to control measurement timing. Refer to the
following example that controls the staircase sweep measurement timing.
The example below uses the following triggers and terminals:
Trigger Name or Trigger Type
Start Measurement
Terminal
TGP Command a
Ext Trig In
TGP -1,1,2,1
Start Step Measurement
DIO 2
TGP 2,1,2,3
Start Step Output Setup
DIO 1
TGP 1,1,2,2
Measurement Completion
Ext Trig Out
TGP -2,2,2,1
Step Measurement Completion
DIO 12
TGP 12,2,2,3
Step Output Setup Completion
DIO 11
TGP 11,2,2,2
a. Parameters mean the port number, trigger input/output, positive/negative logic, and trigger type in this order from left.
Example
This example uses the negative edge trigger (set by the TGP and
TGXO/TGMO/TGSO commands), and the Case 1 Start Step Output Setup trigger
(set by the TGSI command). The WT command sets the hold time, delay time, step
delay time, source trigger delay time, and the measurement trigger delay time.
:
OUTPUT @B1500;”MM2”
! Sets staircase sweep measurement mode
:
! Sets measurement condition
:
OUTPUT @B1500;”TM3”
!Uses external trigger
OUTPUT @B1500;”TGP -1,1,2,1” !Start Measurement trigger
OUTPUT @B1500;”TGP 2,1,2,3” !Start Step Measurement trigger
OUTPUT @B1500;”TGP 1,1,2,2” !Start Step Output Setup trigger
OUTPUT @B1500;”TGP -2,2,2,1” !Measurement Completion trigger
OUTPUT @B1500;”TGP 12,2,2,3” !Step Measurement Completion trigger
OUTPUT @B1500;”TGP 11,2,2,2” !Step Output Setup Completion trigger
OUTPUT @B1500;”TGXO 1”
!1:Edge trigger
OUTPUT @B1500;”TGMO 1”
!1:Edge trigger
OUTPUT @B1500;”TGSO 1”
!1:Edge trigger
OUTPUT @B1500;”TGSI 1”
!1:Case 1
OUTPUT @B1500;”WT”;Hold,Delay,Sdelay,Tdelay,Mdelay
:
FOR N=1 TO No_step
ENTER @B1500 USING ”#,3X,12D,2X”;M_data
PRINT ”DATA”;N;”=”;M_data
NEXT N
:
Agilent B1500 Programming Guide, Edition 2
2-45
Remote Mode Functions
Trigger Function
Figure 2-26
Trigger Input/Output Example, Staircase Sweep, Negative Logic
Start Measurement
Start Step Measurement
Start Step Output Setup (Case1)
Step delay time or more
Delay time or more
Hold time
: Measurement
Measurement trigger delay
Measurement Completion
Step Measurement Completion
Source trigger delay
Step Output Setup Completion
The B1500 sets the measurement conditions, sets the trigger ports, and waits for a
Start Measurement trigger.
By the Start Measurement trigger, the B1500 starts the staircase sweep
measurement.
By the Start Step Output Setup trigger, the B1500 waits until the source trigger delay
elapses, and sends the Step Output Setup Completion trigger. If the trigger is
received during the hold time, the B1500 performs this after the hold time.
By the Start Step Measurement trigger, the B1500 waits until the measurement
trigger delay elapses, executes a step measurement, and sends the Step Measurement
Completion trigger. If the trigger is received during the delay time, the B1500
performs this after the delay time.
By the next Start Step Output Setup trigger, the B1500 changes the source output
value, and waits until the source trigger delay elapses, and sends the Step Output
Setup Completion trigger. If the trigger is received during the step delay time, the
B1500 performs this after the step delay time.
After the staircase sweep measurement, the B1500 sends the Step Measurement
Completion trigger and the Measurement Completion trigger, and puts the
measurement data in the data output buffer.
2-46
Agilent B1500 Programming Guide, Edition 2
Remote Mode Functions
Trigger Function
Trig In/Out Internal Circuit
The following figures show the trigger input/output circuits internally connected to
the Trig In/Out connectors.
Figure 2-27
Trigger Input Internal Circuit
Vcc
R2
to trigger
input control
from Trig In (BNC)
R1
C1
Figure 2-28
Vcc=5 V
R1=220 ohm
R2=10 kohm
C1=1000 pF
Trigger Output Internal Circuit
Vcc
R1
from trigger
output control
to Trig Out (BNC)
74ABT245 or
equivalent
C1
Agilent B1500 Programming Guide, Edition 2
Vcc=5 V
R1=150 ohm
C1=1000 pF
2-47
Remote Mode Functions
Initial Settings
Initial Settings
Agilent B1500 is initialized by turning the B1500 on, the *RST command, or the
device clear. Initial settings of the B1500 are shown in the following tables. Table
2-8 fits into one page, and lists all initial settings.
Table 2-5
Mainframe Settings
Initial Setting
Setup Item
Commands
Auto calibration
off
CM
Trigger mode
XE, TV, TI, or GET
TM
Trigger port
Ext Trig In
Start Measurement
trigger input
TGP
Ext Trig Out
Measurement
Completion trigger
output
TGP
Digital I/O
cleared
TGP
Trigger delay time
0s
WT, PT
Trigger condition of
Start Step Output Setup trigger
with trigger for first sweep step
TGSI
Type of output trigger
edge trigger
TGXO, TGSO, TGMO
Digital I/O port
output for all port
ERM
Program memory
cleared a
SCR
Value of internal variable (%In, %Rn)
0
VAR
Data output format
ASCII with header, CR/LF^EOI
FMT
Data output buffer
cleared
BC
Status byte
Only bit 6 is enabled.
*SRE
Error code register
cleared
ERR?
a. Program memory is not cleared by the *RST command or the device clear.
2-48
Agilent B1500 Programming Guide, Edition 2
Remote Mode Functions
Initial Settings
Table 2-6
SMU Settings
Setup Item
Initial Setting
Commands
Output switch
open
CN, CL
Filter
off
FL
Series resistor
off
SSR
ASU path/1 pA auto range/indicator
SMU side/disable/enable
SAP/SAR/SAL
Current measurement range
with pulse
compliance range
RI
without pulse
auto
with pulse
compliance range
without pulse
auto
Voltage measurement range
RV
A/D converter
high speed ADC
AAD
ADC integration time
high speed ADC: auto, non parallel
AIT, PAD
high resolution ADC: auto
AIT
ADC zero function
off
AZ
AV command parameter
number=1, mode=0
AV
Sweep source parameters
cleared
WV, WSV, WI, WSI
Pulse source parameters
cleared
PV, PI
Pulse sweep source parameters
cleared
PWV, PWI
Search source parameters
cleared
BSV, BSSV, BSI,
BSSI, LSV, LSSV,
LSI, LSSV
Search monitor parameters
cleared
BGV, BGI, LGV,
LGI
Search measurement data
source output value only
BSVM, LSVM
Quasi-pulse source parameters
cleared
BDV
Quasi-pulsed spot measurement mode
voltage
BDM
Quasi-pulse settling detection interval
short
BDM
Sampling source
cleared
MI, MV
Sampling interval, sampling point
2 ms, 1000 points
MT
Agilent B1500 Programming Guide, Edition 2
2-49
Remote Mode Functions
Initial Settings
Setup Item
Initial Setting
Commands
Automatic abort function
off
Output after measurement
start value (base value for MSC)
Hold time
0s
Delay time
0s
Step delay time
0s
WT
Trigger delay time
0s
WT, PT
Pulse width
0.001 s
PT
Pulse period
0.01 s
PT
Table 2-7
WM, BSM, LSM,
MSC
WT, PT, BDT, BST,
LSTM
CMU Settings
Initial Setting
Setup Item
Commands
SCUU path/indicator
open/enable
SSP/SSL
Measurement parameter
Cp-G
IMP
Measurement range
auto
RC
ADC integration time
auto
ACT
Open/short/load correction
off
OPEN/SHOR/LOAD
Phase compensation mode
auto
ADJ
AC signal
0 V, 1 kHz
ACV, FC
Sweep source parameters
cleared
WDCV
Automatic abort function
off
WMDCV
Output after measurement
start value
WMDCV
Hold time
0s
WTDCV
Delay time
0s
WTDCV
Step delay time
0s
WTDCV
Trigger delay time
0s
WTDCV
2-50
Agilent B1500 Programming Guide, Edition 2
Remote Mode Functions
Initial Settings
Table 2-8
Initial Settings
Setup Item
Initial Setting
Auto calibration
SMU output switch
SMU filter/series resistor
ASU path/1 pA auto range/indicator
SCUU path/indicator
SMU current measurement range
off
open
off/off
SMU side/disable/enable
open/enable
with pulse
compliance range
without pulse auto
SMU voltage measurement range
with pulse
compliance range
without pulse auto
SMU A/D converter
high speed ADC
SMU ADC Integration time
high speed ADC: auto, non parallel
high resolution ADC: auto
SMU ADC zero function
off
SMU AV command parameter
number=1, mode=0
CMU measurement parameter
Cp-G
CMU measurement range
auto
CMU ADC integration time
auto
CMU correction/compensation
Open/Short/Load: off/off/off, Phase compensation: auto
CMU AC signal
0 V, 1 kHz
Sweep source parameters
cleared
Pulse source parameters
cleared
Pulse sweep source parameters
cleared
Search source parameters
cleared
Search monitor parameters
cleared
Search measurement data
source output value only
Quasi-pulse source parameters
cleared
Quasi-pulsed spot measurement mode voltage
Quasi-pulse settling detection interval short
Sampling source
cleared
Sampling interval, sampling point
2 ms, 1000 points
Automatic abort function
off
Output after measurement
start value (base value for MSC)
Pulse width
0.001 s
Pulse period
0.01 s
Hold time
0s
Delay time
0s
Step delay time
0s
Trigger delay time
0s
Trigger mode
XE, TV, TI, or GET
Trigger port
Ext Trig In
Start Measurement trigger input
Ext Trig Out
Measurement Completion trigger output
Digital I/O
cleared
Trigger condition of
with trigger for first sweep step
Start Step Output Setup trigger
Type of output trigger
edge trigger
Digital I/O port
output for all port
Program memory
cleared. Not cleared by *RST command or device clear.
Value of internal variable (%In, %Rn) 0
Data output format
ASCII with header, CR/LF^EOI
Data output buffer
cleared
Status byte
Only bit 6 is enabled.
Error code register
cleared
Commands
CM
CN, CL
FL/SSR
SAP/SAR/SAL
SSP/SSL
RI
RV
AAD
AIT, PAD
AIT
AZ
AV
IMP
RC
ACT
OPEN/SHOR/LOAD, ADJ
ACV
WV, WSV, WI, WSI, WDCV
PV, PI
PWV, PWI
BSV, BSSV, BSI, BSSI, LSV, LSSV, LSI, LSSV
BGV, BGI, LGV, LGI
BSVM, LSVM
BDV
BDM
BDM
MI, MV
MT
WM, BSM, LSM, WMDCV, MSC
WM, BSM, LSM, WMDCV, MSC
PT
PT
WT, PT, BDT, BST, LSTM, WTDCV, MT
WT, PT, BDT, BST, LSTM, WTDCV
WT, WTDCV
WT, PT, WTDCV
TM
TGP
TGP
TGP
TGSI
TGXO, TGSO, TGMO
ERM
SCR
VAR
FMT
BC
*SRE
ERR?
Agilent B1500 Programming Guide, Edition 2
2-51
Remote Mode Functions
Initial Settings
2-52
Agilent B1500 Programming Guide, Edition 2
3
Programming Examples
Programming Examples
This chapter lists the Agilent FLEX commands (GPIB commands for the Agilent
B1500) and explains the programming example for each measurement mode. This
chapter contains the following sections.
•
“Programming Basics for Visual Basic .NET Users”
•
“High-Speed Spot Measurements”
•
“Spot Measurements”
•
“Pulsed Spot Measurements”
•
“Staircase Sweep Measurements”
•
“Pulsed Sweep Measurements”
•
“Staircase Sweep with Pulsed Bias Measurements”
•
“Quasi Pulsed Spot Measurements”
•
“Linear Search Measurements”
•
“Binary Search Measurements”
•
“Multi Channel Sweep Measurements”
•
“Sampling Measurements”
•
“High-Speed Spot C Measurement”
•
“Spot C Measurements”
•
“CV Sweep Measurements”
•
“Using Program Memory”
•
“Using Trigger Function”
•
“Reading Time Stamp Data”
•
“Reading Binary Output Data”
•
“Using Programs for 4142B”
•
“Using Programs for 4155B/4156B/4155C/4156C”
3-2
Agilent B1500 Programming Guide, Edition 2
Programming Examples
Refer to Chapter 4, “Command Reference,” for the command syntax and
descriptions of the Agilent B1500 FLEX commands.
The following command conventions are used in this chapter.
NOTE
command
Required command for measurement execution.
[command]
Optional command for measurement execution.
parameter
Required command parameter. A value or variable must be
specified.
[parameter]
Optional command parameter. A value may be specified.
About Example Program Code
Example programs described in this section have been written in the Microsoft
Visual Basic .NET or the HP BASIC language. Most of the examples written in the
Visual Basic .NET are provided as a subprogram that can be run with the project
template shown in Table 3-1. To run the program, insert the example subprogram or
your subprogram instead of the perform_meas subprogram in the template.
NOTE
To Start Program
If you create the measurement program by using the example code shown in Table
3-1, the program can be run by clicking the Run button on the Visual Basic main
window. Then a message box will appear. After that, click OK to continue.
NOTE
After the Automatic Measurement
After the automatic measurements, open the measurement terminals or disconnect
the device under test from the measurement terminals. If you leave the connection
with the device, the device may be damaged by unexpected operations.
Do not leave the connection over 30 minutes after measurement if the auto
calibration is set to ON. Then, the Agilent B1500 performs the self-calibration
automatically every 30 minutes after measurement. The calibration requires to open
the measurement terminals.
To disable the auto calibration, enter the CM 0 command.
Agilent B1500 Programming Guide, Edition 2
3-3
Programming Examples
Programming Basics for Visual Basic .NET Users
Programming Basics for Visual Basic .NET Users
This section provides the basic information for programming of the automatic
measurement using the Agilent B1500, Agilent T&M Programmer’s Toolkit, and
Microsoft Visual Basic .NET.
•
“To Create Your Project Template”
•
“To Create Measurement Program”
To Create Your Project Template
Before starting programming, create your project template, and keep it as your
reference. It will remove the conventional task in the future programming. This
section explains how to create a project template.
Step 1. Connect instrument (e.g. Agilent B1500) to computer via GPIB.
Step 2. Launch Visual Basic .NET and create a new project. The project type must be
Agilent T&M Toolkit Projects.
Follow the Agilent T&M Toolkit New Project Wizard to create the project. For the
output type selection, select the Console Application. For the library selections,
select top four libraries at least (Agilent.TMFramework,
Agilent.TMFramework.DataAnalysis, Agilent.TMFramework.DataVisualization,
and Agilent.TMFramework.InstrumentIO).
Step 3. Click T&M Toolkit > Instrument Explorer to open Agilent Instrument Explorer. On
the explorer, click Find Instrument icon to detect the instrument automatically. Then
the instrument names will be appeared on the Agilent Instrument Explorer window
(e.g. AG B1500 (::17) below GPIB0).
Step 4. Open a module (e.g. Module1.vb) in the project. And enter a program code as
template. See Table 3-1 for example.
Step 5. Save the project as your template (e.g. \test\my_temp).
3-4
Agilent B1500 Programming Guide, Edition 2
Programming Examples
Programming Basics for Visual Basic .NET Users
To Create Measurement Program
Create the measurement program as shown below. The following procedure needs
your project template. If the procedure does not fit your programming environment,
arrange it to suit your environment.
Step 1. Plan the automatic measurements. Then decide the following items:
•
Measurement devices
Discrete, packaged, on-wafer, and so on.
•
Parameters/characteristics to be measured
hFE, Vth, sheet resistance, and so on.
•
Measurement method
Spot measurement, staircase sweep measurement, and so on.
Step 2. Make a copy of your project template (e.g. \test\my_temp to \test\dev_a\my_temp).
Step 3. Rename the copy (e.g. \test\dev_a\my_temp to \test\dev_a\spot_id).
Step 4. Launch Visual Basic .NET.
Step 5. Open the project (e.g. \test\dev_a\spot_id).
Step 6. Open the module that contains the template code as shown in Table 3-1. On the code
window, complete the perform_meas subprogram.
Step 7. Insert the code to display, store, or calculate data into the subprogram.
Step 8. Save the project (e.g. \test\dev_a\spot_id).
Agilent B1500 Programming Guide, Edition 2
3-5
Programming Examples
Programming Basics for Visual Basic .NET Users
Table 3-1
Imports
Imports
Imports
Imports
Example Template Program Code for Visual Basic .NET
Agilent.TMFramework
Agilent.TMFramework.DataAnalysis
Agilent.TMFramework.DataVisualization
Agilent.TMFramework.InstrumentIO
Module Module1
Sub Main()
Dim B1500 As New DirectIO("GPIB0::17::INSTR")
B1500.WriteLine("*RST")
MsgBox("Click OK to start measurement.", vbOKOnly, "")
Console.WriteLine("Measurement in progress. . ." & Chr(10))
Dim t() As Integer = {1, 2, 4, 6} ’SMU1, SMU2, SMU4, SMU6
Dim term As String = t(0) & "," & t(1) & "," & t(2) & "," & t(3)
B1500.WriteLine("CN " & term)
perform_meas(B1500, t)
B1500.WriteLine("CL")
B1500.Close()
MsgBox("Click OK to stop the program.", vbOKOnly, "")
Console.WriteLine("Measurement completed." & Chr(10))
End Sub
Line
’8
’21
Description
1 to 4
These lines are necessary for the Agilent instrument control programming.
8 to 21
Main subprogram establishes the connection with the Agilent B1500, resets the B1500,
opens a message box to confirm the start of measurement, and pauses program execution
until OK is clicked on the message box. By clicking OK, the program displays a message on
the console window, enables the SMUs, and calls the perform_meas subprogram that will be
used to perform measurement.
After the measurement, the program disables all SMUs, disables the connection with the
B1500, and opens a message box to confirm the end of the program. Finally, by clicking OK
on the message box, the program displays a message on the console window.
9
13 to 14
The above example is for the B1500 of the GPIB address 17 on the interface GPIB0.
“GPIB0” is the VISA name. Confirm your GPIB settings, and set them properly.
The above example uses the SMUs installed in the B1500 slots 1, 2, 4, and 6. Change the
slot numbers for matching your configuration.
3-6
Agilent B1500 Programming Guide, Edition 2
Programming Examples
Programming Basics for Visual Basic .NET Users
Sub perform_meas(ByVal B1500 As DirectIO, ByVal t() As Integer)
Dim i As Integer = 0
Dim j As Integer = 0
Dim nop1 As Integer = 1
Dim nop2 As Integer = 1
Dim data(nop2 - 1, nop1 - 1) As String
Dim value As String = "Enter data header"
Dim fname As String = "C:\enter_file_name.txt"
Dim title As String = "Measurement Result"
Dim msg As String = "No error."
Dim err As String = "0"
’23
’ insert measurement program code
B1500.WriteLine("ERR? 1") : err = B1500.Read(True)
If err <> 0 Then B1500.WriteLine("DZ") : GoTo Check_err
B1500.WriteLine("DZ")
save_data(fname, title, value, data, nop1, nop2, B1500, t)
Exit Sub
Check_err:
B1500.WriteLine("EMG? " & err) : msg = B1500.Read(True)
MsgBox("Instrument error: " & err & Chr(10) & msg, vbOKOnly, "")
End Sub
Line
23
24 to 33
’47
Description
Beginning of the perform_meas subprogram.
Declares variables used in this program template. The values are dummy. You must
change the values to match your program. If you find unnecessary variables, delete
them.
i and j: Variables used to specify the element of the data array.
nop1 and nop2: Number of measurement steps. Also used to declare the data array.
data: String data array used to store the measurement result data.
val: String data variable to store the header (first line) of the displayed data.
fname: Full path name of the measurement result data file.
title: Title of the message box used to display the measurement result data.
msg and err: Variables used to store an error message and an error code.
35
The line is placed as dummy. Remove the line and insert your program code to control
the instruments and perform measurement.
37 to 38
Checks if the instrument causes an error, and goes to Check_err if an error is detected.
40 to 41
Applies 0 V from all channels and calls the save_data subprogram (lines 49 to 71).
44 to 46
Opens a message box to display error message if an error is detected.
47
End of the perform_meas subprogram.
Agilent B1500 Programming Guide, Edition 2
3-7
Programming Examples
Programming Basics for Visual Basic .NET Users
Sub save_data(ByVal fname As String, ByVal title As String, ByVal value As
String, ByVal data(,) As String, ByVal nop1 As Integer, ByVal nop2 As Integer,
ByVal B1500 As DirectIO, ByVal t() As Integer)
’49
Dim i As Integer = 0
Dim j As Integer = 0
FileOpen(1, fname, OpenMode.Output, OpenAccess.Write, OpenShare.LockReadWrite)
Print(1, value)
For j = 0 To nop2 - 1
For i = 0 To nop1 - 1
Print(1, data(j, i))
Next i
Next j
FileClose(1)
Dim rbx As Integer
For j = 0 To nop2 - 1
For i = 0 To nop1 - 1
value = value & data(j, i)
Next i
Next j
value = value & Chr(10) & Chr(10) & "Data save completed."
value = value & Chr(10) & Chr(10) & "Do you want to perform measurement again?"
rbx = MsgBox(value, vbYesNo, title)
If rbx = vbYes Then perform_meas(B1500, t)
End Sub
’71
End Module
Line
Description
49 to 71
Save_data subprogram saves measurement result data into a file specified by the fname
variable and displays the data and a message on a message box. If Yes is clicked on the
message box, calls the perform_meas subprogram again. If No is clicked, returns to the
perform_meas subprogram.
3-8
Agilent B1500 Programming Guide, Edition 2
Programming Examples
High-Speed Spot Measurements
High-Speed Spot Measurements
To perform high-speed spot measurements, use the following commands.
Function
Command
Parameters
Enables channels
CN
[chnum ... [,chnum] ... ]
Disables channels
CL
[chnum ... [,chnum] ... ]
Sets filter ON/OFF
[FL]
mode[,chnum ... [,chnum] ... ]
Sets series resistor ON/OFF
[SSR]
chnum,mode
Sets integration time
(Agilent B1500 can use
AAD/AIT instead of AV.)
[AV]
number[,mode]
[AAD]
chnum[,type]
[AIT]
type,mode[,N]
Forces constant voltage
DV
Forces constant current
DI
chnum,range,output
[,comp[,polarity[,crange]]]
Performs current measurement
TI
chnum[,range]
TTI
chnum[,range]
TV
chnum[,range]
TTV
chnum[,range]
Performs voltage measurement
Resets the time stamp
TSR
Returns the time stamp at this
time
TSQ
You can use the above commands regardless of the measurement mode (MM
command settings). The TTI/TTV command returns the time data and the
measurement data.
Agilent B1500 Programming Guide, Edition 2
3-9
Programming Examples
High-Speed Spot Measurements
A program example of a high-speed spot measurement is shown below. This
example measures MOSFET drain current. This program uses the TTI command to
measure the current and read the time stamp data.
Table 3-2
High-Speed Spot Measurement Example
Sub perform_meas(ByVal B1500 As DirectIO, ByVal t() As Integer)
Dim i As Integer = 0
Dim j As Integer = 0
Dim nop1 As Integer = 1
Dim nop2 As Integer = 1
Dim data(nop2 - 1, nop1 - 1) As String
Dim value As String = "Id (mA), Status, Meas Time (msec)"
Dim fname As String = "C:\Agilent\data\ex1.txt"
Dim title As String = "Measurement Result"
Dim msg As String = "No error."
Dim err As String = "0"
Dim
Dim
Dim
Dim
Dim
Dim
vd As Double = 0.5
vg As Double = 0.5
idcomp As Double = 0.05
igcomp As Double = 0.01
orng As Integer = 0
mrng As Integer = 0
’13
B1500.WriteLine("FMT 1")
B1500.WriteLine("AV 10,1")
’ sets number of samples for 1 data
B1500.WriteLine("FL 0")
’ sets filter off
B1500.WriteLine("DV " & t(3) & ",0,0,0.1")
’out= 0 V, comp= 0.1 A
B1500.WriteLine("DV " & t(2) & ",0,0,0.1")
’out= 0 V, comp= 0.1 A
B1500.WriteLine("DV " & t(1) & "," & orng & "," & vg & "," & igcomp)
B1500.WriteLine("DV " & t(0) & "," & orng & "," & vd & "," & idcomp)
B1500.WriteLine("ERR? 1") : err = B1500.Read(True)
If err <> 0 Then B1500.WriteLine("DZ") : GoTo Check_err
Line
’1
’20
’23
Description
2 to 11
Declares variables used through the project. And sets the proper values.
13 to 18
Declares variables and sets the value.
20 to 22
Sets the data output format and A/D converter. Also sets the SMU filter off.
23 to 28
Applies voltage to device and checks if an error occurred. If an error is detected, forces
0 V and goes to Check_err.
3-10
Agilent B1500 Programming Guide, Edition 2
Programming Examples
High-Speed Spot Measurements
B1500.WriteLine("TSR")
’30
B1500.WriteLine("TTI " & t(0) & "," & mrng)
B1500.WriteLine("TSQ")
Dim ret_val As String() = B1500.ReadListAsStringArray()
Dim tend As String() = B1500.ReadListAsStringArray()
ret_val(0) = Right(ret_val(0), 12)
tend(0) = Right(tend(0), 12)
Dim mtime As Double = Val(tend(0)) - Val(ret_val(0))
Dim status As String = Left(ret_val(1), 3)
ret_val(1) = Right(ret_val(1), 12)
Dim meas As Double = Val(ret_val(1))
data(j, i) = Chr(13) & Chr(10) & meas * 1000 & ", " & status & ", " & mtime *
1000
B1500.WriteLine("DZ")
save_data(fname, title, value, data, nop1, nop2, B1500, t)
Exit Sub
Check_err:
B1500.WriteLine("EMG? " & err) : msg = B1500.Read(True)
MsgBox("Instrument error: " & err & Chr(10) & msg, vbOKOnly, "")
End Sub
’43
’47
Line
Description
30 to 41
Resets time stamp and performs the high-speed spot measurement. And stores the
returned data into the ret_val string array variable. Finally, stores the measured data into
the data array.
43 to 45
Applies 0 V from all channels. And transfers the data stored in the data variable to the
save_data subprogram (see Table 3-1). And the subprogram will save the data into the
C:\Agilent\data\ex1.txt file (CSV) and displays the data on a message box.
48 to 49
Displays a message box to show an error message if the error is detected.
Measurement
Result Example
Id (mA), Status, Meas Time (msec)
3.8435, NAI, 1.1
Data save completed.
Do you want to perform measurement again?
Agilent B1500 Programming Guide, Edition 2
3-11
Programming Examples
Spot Measurements
Spot Measurements
To perform spot measurements, use the following commands.
Function
NOTE
Command
Parameters
Enables channels
CN
[chnum ... [,chnum] ... ]
Disables channels
CL
[chnum ... [,chnum] ... ]
Sets filter ON/OFF
[FL]
mode[,chnum ... [,chnum] ... ]
Sets series resistor ON/OFF
[SSR]
chnum,mode
Sets integration time
(Agilent B1500 can use
AAD/AIT instead of AV.)
[AV]
number[,mode]
[AAD]
chnum[,type]
[AIT]
type,mode[,N]
Forces constant voltage
DV
Forces constant current
DI
chnum,range,output
[,comp[,polarity[,crange]]]
Sets voltage measurement
range
[RV]
chnum,range
Sets current measurement
range
[RI]
chnum,range
[RM]
chnum,mode[,rate]
Sets measurement mode
MM
1,chnum[,chnum ... [,chnum] ... ]
Sets SMU operation mode
[CMM]
chnum,mode
Executes measurement
XE
If you use multiple measurement channels, the channels start measurement in the
order defined in the MM command.
3-12
Agilent B1500 Programming Guide, Edition 2
Programming Examples
Spot Measurements
A program example of a spot measurement is shown below. This example measures
MOSFET drain current.
Table 3-3
Spot Measurement Example
Sub perform_meas(ByVal B1500 As DirectIO, ByVal t() As Integer)
Dim i As Integer = 0
Dim j As Integer = 0
Dim nop1 As Integer = 1
Dim nop2 As Integer = 1
Dim data(nop2 - 1, nop1 - 1) As String
Dim value As String = "Id (mA), Time (sec), Status"
Dim fname As String = "C:\Agilent\data\ex2.txt"
Dim title As String = "Measurement Result"
Dim msg As String = "No error."
Dim err As String = "0"
Dim vd As Double = 0.5
Dim vg As Double = 0.5
Dim idcomp As Double = 0.05
Dim igcomp As Double = 0.01
Dim orng As Integer = 0
Dim mrng As Integer = 0
B1500.WriteLine("FMT 1")
B1500.WriteLine("TSC 1")
’ enables time stamp output
B1500.WriteLine("AV 10,1")
’ sets number of samples for 1 data
B1500.WriteLine("FL 0")
’ sets filter off
B1500.WriteLine("DV " & t(3) & ",0,0,0.1")
’out= 0 V, comp= 0.1 A
B1500.WriteLine("DV " & t(2) & ",0,0,0.1")
’out= 0 V, comp= 0.1 A
B1500.WriteLine("DV " & t(1) & "," & orng & "," & vg & "," & igcomp)
B1500.WriteLine("DV " & t(0) & "," & orng & "," & vd & "," & idcomp)
B1500.WriteLine("MM 1," & t(0))
’1: spot measurement
B1500.WriteLine("CMM " & t(0) & ",1") ’1: compliance side measurement
B1500.WriteLine("RI " & t(0) & "," & mrng)
B1500.WriteLine("ERR? 1") : err = B1500.Read(True)
If err <> 0 Then B1500.WriteLine("DZ") : GoTo Check_err
Line
’1
’13
’19
’23
’30
Description
2 to 11
Declares variables used through the project. And sets the proper values.
13 to 18
Declares variables and sets the value.
19 to 22
Sets the data output format, time stamp data output mode, and A/D converter. Also sets
the SMU filter off.
23 to 26
Applies voltage to device.
27 to 29
Sets the measurement mode, channel measurement mode, and measurement range.
30 to 31
Checks if an error occurred. If an error is detected, forces 0 V and goes to Check_err.
Agilent B1500 Programming Guide, Edition 2
3-13
Programming Examples
Spot Measurements
B1500.WriteLine("TSR")
’33
B1500.WriteLine("XE")
B1500.WriteLine("TSQ")
Dim ret_val As String() = B1500.ReadListAsStringArray()
Dim tend As String() = B1500.ReadListAsStringArray()
ret_val(0) = Right(ret_val(0), 12)
tend(0) = Right(tend(0), 12)
Dim mtime As Double = Val(tend(0)) - Val(ret_val(0))
Dim status As String = Left(ret_val(1), 3)
ret_val(1) = Right(ret_val(1), 12)
Dim meas As Double = Val(ret_val(1))
data(j, i) = Chr(13) & Chr(10) & meas * 1000 & ", " & status & ", " & mtime *
1000
B1500.WriteLine("DZ")
save_data(fname, title, value, data, nop1, nop2, B1500, t)
Exit Sub
Check_err:
B1500.WriteLine("EMG? " & err) : msg = B1500.Read(True)
MsgBox("Instrument error: " & err & Chr(10) & msg, vbOKOnly, "")
End Sub
Line
’46
’50
Description
33 to 44
Resets time stamp and performs the spot measurement. And stores the returned data
into the ret_val string array variable. Finally, stores the measured data into the data
array.
46 to 48
Applies 0 V from all channels. And transfers the data stored in the data variable to the
save_data subprogram (see Table 3-1). And the subprogram will save the data into the
C:\Agilent\data\ex2.txt file (CSV) and displays the data on a message box.
51 to 52
Displays a message box to show an error message if the error is detected.
Measurement
Result Example
Id (mA), Status, Meas Time (msec)
3.8425, NAI, 1.1
Data save completed.
Do you want to perform measurement again?
3-14
Agilent B1500 Programming Guide, Edition 2
Programming Examples
Pulsed Spot Measurements
Pulsed Spot Measurements
To perform pulsed spot measurements, use the following commands.
Function
NOTE
Command
Parameters
Enables channels
CN
[chnum ... [,chnum] ... ]
Disables channels
CL
[chnum ... [,chnum] ... ]
Sets filter ON/OFF
[FL]
mode[,chnum ... [,chnum] ... ]
Sets series resistor ON/OFF
[SSR]
chnum,mode
Forces constant voltage
DV
Forces constant current
DI
chnum,range,output
[,comp[,polarity[,crange]]]
Sets pulse timing parameters
PT
hold,width[,period [,tdelay]]
Forces pulse voltage
PV
chnum,range,base,pulse[,comp]
Forces pulse current
PI
chnum,range,base,pulse [,comp]
Sets voltage measurement
range
[RV]
chnum,range
Sets current measurement
range
[RI]
chnum,range
[RM]
chnum,mode[,rate]
Sets measurement mode
MM
3,chnum
Sets SMU operation mode
[CMM]
chnum,mode
Executes measurement
XE
Measurement channel performs measurement so that the pulse width and pulse
period are kept. The integration time is automatically set by the instrument, and you
cannot change. For the Agilent B1500, note that the high-resolution ADC cannot be
used for the pulsed measurements. The AAD/AIT/AV/WT command settings are
ignored.
Agilent B1500 Programming Guide, Edition 2
3-15
Programming Examples
Pulsed Spot Measurements
A program example of a pulsed spot measurement is shown below. This example
measures MOSFET drain current.
Table 3-4
Pulsed Spot Measurement Example
Sub perform_meas(ByVal B1500 As DirectIO, ByVal t() As Integer)
Dim i As Integer = 0
Dim j As Integer = 0
Dim nop1 As Integer = 1
Dim nop2 As Integer = 1
Dim data(nop2 - 1, nop1 - 1) As String
Dim value As String = "Id (mA), Time (sec), Status"
Dim fname As String = "C:\Agilent\data\ex3.txt"
Dim title As String = "Measurement Result"
Dim msg As String = "No error."
Dim err As String = "0"
’1
Dim vd As Double = 0.5
’13
Dim vg As Double = 0.5
Dim idcomp As Double = 0.05
Dim igcomp As Double = 0.01
Dim orng As Integer = 0
Dim mrng As Integer = 0
B1500.WriteLine("FMT 1")
’19
B1500.WriteLine("TSC 1")
’ enables time stamp output
B1500.WriteLine("FL 1")
’ sets filter on
B1500.WriteLine("DV " & t(3) & ",0,0,0.1")
’out= 0 V, comp= 0.1 A
’22
B1500.WriteLine("DV " & t(2) & ",0,0,0.1")
’out= 0 V, comp= 0.1 A
Dim g_pt As String = "0.1,0.01,0.02"
’hold, width, period in sec
B1500.WriteLine("PT " & g_pt)
Dim v0 As Double = 0
’0 V: pulse base voltage
B1500.WriteLine("PV " & t(1) & "," & orng & "," & v0 & "," & vg & "," & igcomp)
B1500.WriteLine("DV " & t(0) & "," & orng & "," & vd & "," & idcomp)
B1500.WriteLine("MM 3," & t(0))
’3: pulsed spot measurement
B1500.WriteLine("CMM " & t(0) & ",1") ’1: compliance side measurement
B1500.WriteLine("RI " & t(0) & "," & mrng)
B1500.WriteLine("ERR? 1") : err = B1500.Read(True)
’32
If err <> 0 Then B1500.WriteLine("DZ") : GoTo Check_err
Line
Description
2 to 11
Declares variables used through the project. And sets the proper values.
13 to 18
Declares variables and sets the value.
19 to 21
Sets the data output format, time stamp data output mode, and SMU filter.
22 to 28
Applies DC voltage to device, and sets the voltage pulse source.
29 to 31
Sets the measurement mode, channel measurement mode, and measurement range.
32 to 33
Checks if an error occurred. If an error is detected, forces 0 V and goes to Check_err.
3-16
Agilent B1500 Programming Guide, Edition 2
Programming Examples
Pulsed Spot Measurements
B1500.WriteLine("TSR")
’35
B1500.WriteLine("XE")
B1500.WriteLine("TSQ")
Dim ret_val As String() = B1500.ReadListAsStringArray()
Dim tend As String() = B1500.ReadListAsStringArray()
ret_val(0) = Right(ret_val(0), 12)
tend(0) = Right(tend(0), 12)
Dim mtime As Double = Val(tend(0)) - Val(ret_val(0))
Dim status As String = Left(ret_val(1), 3)
ret_val(1) = Right(ret_val(1), 12)
Dim meas As Double = Val(ret_val(1))
data(j, i) = Chr(13) & Chr(10) & meas * 1000 & ", " & status & ", " & mtime *
1000
B1500.WriteLine("DZ")
save_data(fname, title, value, data, nop1, nop2, B1500, t)
Exit Sub
Check_err:
B1500.WriteLine("EMG? " & err) : msg = B1500.Read(True)
MsgBox("Instrument error: " & err & Chr(10) & msg, vbOKOnly, "")
End Sub
’48
’52
Line
Description
35 to 46
Resets time stamp and performs the pulsed spot measurement. And stores the returned
data into the ret_val string array variable. Finally, stores the measured data into the data
array.
48 to 50
Applies 0 V from all channels. And transfers the data stored in the data variable to the
save_data subprogram (see Table 3-1). And the subprogram will save the data into the
C:\Agilent\data\ex3.txt file (CSV) and displays the data on a message box.
53 to 54
Displays a message box to show an error message if the error is detected.
Measurement
Result Example
Id (mA), Status, Meas Time (msec)
3.825, NAI, 0.799999999999995
Data save completed.
Do you want to perform measurement again?
Agilent B1500 Programming Guide, Edition 2
3-17
Programming Examples
Staircase Sweep Measurements
Staircase Sweep Measurements
To perform staircase sweep measurements, use the following commands.
Function
Command
Parameters
Enables channels
CN
[chnum ... [,chnum] ... ]
Disables channels
CL
[chnum ... [,chnum] ... ]
Sets filter ON/OFF
[FL]
mode[,chnum ... [,chnum] ... ]
Sets series resistor ON/OFF
[SSR]
chnum,mode
Sets integration time
(Agilent B1500 can use
AAD/AIT instead of AV.)
[AV]
number[,mode]
[AAD]
chnum[,type]
[AIT]
type,mode[,N]
Sets sweep source timing
parameter
[WT]
hold,delay
[,sdelay[,tdelay[,mdelay]]]
Sets auto abort function
[WM]
abort[,post]
Sets voltage sweep source
WV
Sets current sweep source
WI
chnum,mode,range,start,stop,step
[,comp[,Pcomp]]
Sets synchronous sweep
source a
[WSV]
Forces constant voltage
DV
Forces constant current
DI
chnum,range,output
[,comp[,polarity[,crange]]]
Sets voltage measurement
range
[RV]
chnum,range
Sets current measurement
range
[RI]
chnum,range
[RM]
chnum,mode[,rate]
Sets measurement mode
MM
2,chnum[,chnum ... [,chnum] ... ]
Sets SMU operation mode
[CMM]
chnum,mode
Executes measurement
XE
[WSI]
chnum,range,start,stop
[,comp[,Pcomp]]
a. The WSV/WSI command must be entered after the WV/WI command.
NOTE
If you use multiple measurement channels, the channels start measurement in the
order defined in the MM command.
3-18
Agilent B1500 Programming Guide, Edition 2
Programming Examples
Staircase Sweep Measurements
A program example of a staircase sweep measurement is shown below. This
example measures MOSFET Id-Vd characteristics.
Table 3-5
Staircase Sweep Measurement Example 1
Sub perform_meas(ByVal B1500 As DirectIO, ByVal t() As Integer)
Dim i As Integer = 0
Dim j As Integer = 0
Dim nop1 As Integer = 11
Dim nop2 As Integer = 3
Dim data(nop2 - 1, nop1 - 1) As String
Dim value As String = "Vg (V), Vd (V), Id (mA), Time (sec), Status"
Dim fname As String = "C:\Agilent\data\ex4.txt"
Dim title As String = "Measurement Result"
Dim msg As String = "No error."
Dim err As String = "0"
Dim vd1 As Double = 0
Dim vd2 As Double = 3
Dim idcomp As Double = 0.05
Dim vg1 As Double = 1
Dim vg2 As Double = 3
Dim igcomp As Double = 0.01
Dim vg As Double = vg1
’secondary sweep output value
Dim d_vg As Double = 0
’secondary sweep step value (delta)
If nop2 <> 1 Then d_vg = (vg2 - vg1) / (nop2 - 1)
Dim hold As Double = 0
Dim delay As Double = 0
Dim s_delay As Double = 0
Dim p_comp As Double = 0.3
Dim rep As Integer = nop1
Dim ret_val As String()
Dim data1 As String
Dim data2 As String
Dim data3 As String
Dim sc(nop1) As Double
Dim md(nop1) As Double
Dim st(nop1) As String
Dim tm(nop1) As Double
B1500.WriteLine("FMT 1,1")
’ ASCII<CRLF EOI> w/sweep source data
B1500.WriteLine("TSC 1")
’ enables time stamp output
B1500.WriteLine("AV 10,1")
’ sets number of samples for 1 data
B1500.WriteLine("FL 0")
’ sets filter off
Line
’1
’13
’27
’35
Description
2 to 11
Declares variables used through the project. And sets the proper values.
13 to 26
Declares variables used to set the source output, and sets the value.
27 to 34
Declares variables used to read the measurement data.
35 to 38
Sets the data output format, time stamp data output mode, and A/D converter. Also sets
the SMU filter off.
Agilent B1500 Programming Guide, Edition 2
3-19
Programming Examples
Staircase Sweep Measurements
B1500.WriteLine("DV " & t(3) & ",0,0,0.1")
’out= 0 V, comp= 0.1 A
B1500.WriteLine("DV " & t(2) & ",0,0,0.1")
’out= 0 V, comp= 0.1 A
B1500.WriteLine("MM 2," & t(0))
’2: staircase sweep measurement
B1500.WriteLine("CMM " & t(0) & ",1") ’1: compliance side measurement
B1500.WriteLine("RI " & t(0) & ",0")
’0: auto ranging
B1500.WriteLine("WT " & hold & "," & delay & "," & s_delay)
B1500.WriteLine("WM 2,1")
’ stops at any abnormal
B1500.WriteLine("ERR? 1") : err = B1500.Read(True)
If err <> 0 Then B1500.WriteLine("DZ") : GoTo Check_err
’40
For j = 0 To nop2 - 1
’50
B1500.WriteLine("WV " & t(0) & ",1,0," & vd1 & "," & vd2 & "," & nop1 & ","
& idcomp & "," & p_comp)
B1500.WriteLine("DV " & t(1) & ",0," & vg & "," & igcomp)
B1500.WriteLine("TSR")
B1500.WriteLine("XE")
B1500.WriteLine("*OPC?")
rep = B1500.Read(True)
B1500.WriteLine("ERR? 1") : err = B1500.Read(True)
If err <> 0 Then B1500.WriteLine("DZ") : GoTo Check_err
B1500.WriteLine("NUB?"): rep = B1500.Read(True)
’59
If rep <> nop1 * 3 Then B1500.WriteLine("DZ") : GoTo Check_nop
ret_val = B1500.ReadListAsStringArray()
For i = 0 To nop1 - 1
data1 = ret_val(i * 3)
data2 = ret_val(i * 3 + 1)
data3 = ret_val(i * 3 + 2)
data1 = Right(data1, 12) : tm(i) = Val(data1)
st(i) = Left(data2, 3)
data2 = Right(data2, 12) : md(i) = Val(data2)
data3 = Right(data3, 12) : sc(i) = Val(data3)
data(j, i) = Chr(13) & Chr(10) & vg & ", " & sc(i) & ", " & md(i) * 1000
& ", " & tm(i) & ", " & st(i)
Next i
vg = vg + d_vg
Next j
’74
Line
Description
40 to 44
Applies voltage to device. And sets the measurement mode, channel measurement
mode, and measurement range.
45 to 48
Sets the timing parameters and sweep mode of the staircase sweep source. And checks
if an error occurred. If an error is detected, forces 0 V and goes to Check_err.
50 to 74
Sets the sweep source, applies voltage to device, resets time stamp, and performs the
staircase sweep measurement. And stores the returned data into the ret_val string array
variable. Finally, stores the measured data into the data array.
59 to 60
Checks number of returned data. If it is not correct, forces 0 V and goes to Check_nop.
71
Stores the measured data into the data array.
3-20
Agilent B1500 Programming Guide, Edition 2
Programming Examples
Staircase Sweep Measurements
B1500.WriteLine("DZ")
save_data(fname, title, value, data, nop1, nop2, B1500, t)
Exit Sub
Check_err:
B1500.WriteLine("EMG? " & err) : msg = B1500.Read(True)
MsgBox("Instrument error: " & err & Chr(10) & msg, vbOKOnly, "")
Exit Sub
Check_nop:
MsgBox("No. of data: " & rep & " (not " & nop1 * 3 & ")", vbOKOnly, "")
End Sub
’76
’80
’86
Line
Description
76 to 78
Applies 0 V from all channels. And transfers the data stored in the data variable to the
save_data subprogram (see Table 3-1). And the subprogram will save the data into the
C:\Agilent\data\ex4.txt file (CSV) and displays the data on a message box.
81 to 82
Displays a message box to show an error message if the error is detected.
86
Measurement
Result Example
Displays a message box to show an error message if the number of returned data is not
correct.
Vg
1,
1,
1,
1,
1,
1,
1,
1,
1,
1,
1,
2,
2,
2,
2,
2,
2,
2,
2,
2,
2,
2,
3,
3,
3,
3,
3,
3,
3,
3,
3,
3,
3,
(V), Vd (V), Id (mA), Time (sec), Status
0, 0.0020335, 0.0166, NAI
0.3, 3.0515, 0.0229, NAI
0.6, 5.6325, 0.0243, NAI
0.9, 7.7845, 0.0257, NAI
1.2, 9.6155, 0.0272, NAI
1.5, 11.2055, 0.0283, NAI
1.8, 12.63, 0.0316, NAI
2.1, 13.9, 0.033, NAI
2.4, 15.05, 0.034, NAI
2.7, 16.095, 0.0353, NAI
3, 17.045, 0.0363, NAI
0, 0.0025305, 0.016, NAI
0.3, 4.0265, 0.022, NAI
0.6, 7.635, 0.0236, NAI
0.9, 10.804, 0.0251, NAI
1.2, 13.565, 0.0281, NAI
1.5, 15.945, 0.0294, NAI
1.8, 18.01, 0.0305, NAI
2.1, 19.825, 0.0317, NAI
2.4, 21.445, 0.033, NAI
2.7, 22.915, 0.0341, NAI
3, 24.235, 0.0354, NAI
0, 0.0028565, 0.016, NAI
0.3, 4.8745, 0.0228, NAI
0.6, 9.3705, 0.0243, NAI
0.9, 13.445, 0.0278, NAI
1.2, 17.12, 0.0292, NAI
1.5, 20.37, 0.0302, NAI
1.8, 23.24, 0.0315, NAI
2.1, 25.75, 0.0326, NAI
2.4, 27.98, 0.0339, NAI
2.7, 29.96, 0.0352, NAI
3, 31.73, 0.0362, NAI
Data save completed.
Do you want to perform measurement again?
Agilent B1500 Programming Guide, Edition 2
3-21
Programming Examples
Staircase Sweep Measurements
The following program performs the same measurement as the previous program
(Table 3-5). This program starts to read measurement data before the sweep
measurement is completed.
Table 3-6
Staircase Sweep Measurement Example 2
Sub perform_meas(ByVal B1500 As DirectIO, ByVal t() As Integer)
Dim i As Integer = 0
Dim j As Integer = 0
Dim nop1 As Integer = 11
Dim nop2 As Integer = 3
Dim data(nop2 - 1, nop1 - 1) As String
Dim value As String = "Vg (V), Vd (V), Id (mA), Time (sec), Status"
Dim fname As String = "C:\Agilent\data\ex4r.txt"
Dim title As String = "Measurement Result"
Dim msg As String = "No error."
Dim err As String = "0"
’1
Dim vd1 As Double = 0
Dim vd2 As Double = 3
Dim idcomp As Double = 0.05
Dim vg1 As Double = 1
Dim vg2 As Double = 3
Dim igcomp As Double = 0.01
Dim vg As Double = vg1
’secondary sweep output value
Dim d_vg As Double = 0
’secondary sweep step value (delta)
If nop2 <> 1 Then d_vg = (vg2 - vg1) / (nop2 - 1)
Dim hold As Double = 0
Dim delay As Double = 0
Dim s_delay As Double = 0
Dim p_comp As Double = 0.3
’13
B1500.WriteLine("FMT 5,1")
’ ASCII comma w/sweep source data
B1500.WriteLine("TSC 1")
’ enables time stamp output
B1500.WriteLine("AV 10,1")
’ sets number of samples for 1 data
B1500.WriteLine("FL 0")
’ sets filter off
B1500.WriteLine("DV " & t(3) & ",0,0,0.1")
’out= 0 V, comp= 0.1 A
B1500.WriteLine("DV " & t(2) & ",0,0,0.1")
’out= 0 V, comp= 0.1 A
B1500.WriteLine("MM 2," & t(0))
’2: staircase sweep measurement
B1500.WriteLine("CMM " & t(0) & ",1") ’1: compliance side measurement
B1500.WriteLine("RI " & t(0) & ",0")
’0: auto ranging
B1500.WriteLine("WT " & hold & "," & delay & "," & s_delay)
B1500.WriteLine("WM 2,1")
’ stops at any abnormal
B1500.WriteLine("ERR? 1") : err = B1500.Read(True)
If err <> 0 Then B1500.WriteLine("DZ") : GoTo Check_err
’27
Line
1 to 25
27
28 to 39
’39
Description
Declares variables and set the value. Almost same as the previous program. Only the
fname value is different.
Sets the data output format. A comma will be sent as the data terminator.
Sets the measurement condition. Same as the lines 36 to 48 of the previous program.
3-22
Agilent B1500 Programming Guide, Edition 2
Programming Examples
Staircase Sweep Measurements
Dim ret_val As String : Dim status As String : Dim chan As String
Dim type As String : Dim rdata As Double : Dim tdata As Double
Dim sdata As Double : Dim mdata As Double : Dim mstat As String
Dim disp_data As String : Dim k As Integer = 0
B1500.TerminationCharacter = Chr(44)
’terminator=comma
B1500.TerminationCharacterEnabled = True
’41
’45
For j = 0 To nop2 - 1
’48
B1500.WriteLine("WV " & t(0) & ",1,0," & vd1 & "," & vd2 & "," & nop1 & ","
& idcomp & "," & p_comp)
B1500.WriteLine("DV " & t(1) & ",0" & "," & vg & "," & igcomp)
B1500.WriteLine("TSR")
B1500.WriteLine("XE")
For i = 0 To nop1 - 1
For k = 0 To 2
’54
ret_val = B1500.Read(True)
status = Left(ret_val, 1)
’status
chan = Mid(ret_val, 2, 1)
’channel
type = Mid(ret_val, 3, 1)
’data type
rdata = Val(Right(ret_val, 12)) ’data
If type = "T" Then tdata = rdata
’time data
If type = "I" Then mdata = rdata : mstat = status ’meas data, status
If type = "V" Then sdata = rdata
’source data
Next k
If mstat <> "N" Then B1500.WriteLine("DZ") : GoTo Check_err
’64
disp_data = "Vg = " & vg & " (V), "
disp_data = disp_data & "Vd = " & sdata & " (V), "
disp_data = disp_data & "Id = " & mdata * 1000 & " (mA), "
disp_data = disp_data & "Time = " & tdata & " (sec), "
disp_data = disp_data & "Status = " & mstat
Console.WriteLine(disp_data)
data(j, i) = Chr(13) & Chr(10) & vg & ", " & sdata & ", " & mdata * 1000
& ", " & tdata & ", " & mstat
Next i
vg = vg + d_vg
Next j
’74
Line
Description
41 to 44
Declares the variables used to read and save the measurement data.
45 to 46
Declares that a comma is the data terminator needed to read data, and enables it.
49 to 52
Sets the sweep source, applies voltage to device, resets time stamp, and triggers the
staircase sweep measurement. Same as the lines 51 to 54 of the previous program.
54 to 63
Reads data and picks up the status, channel, data type, and data. And stores the time
data, measurement data, and source data into the variables, tdata, mdata, and sdata.
64
65 to 71
Checks the status of the measurement channel. And applies 0 V and goes to Check_err
if an error is detected.
Displays the data on the console window. And stores the data into the data array.
Agilent B1500 Programming Guide, Edition 2
3-23
Programming Examples
Staircase Sweep Measurements
B1500.WriteLine("DZ")
save_data(fname, title, value, data, nop1, nop2, B1500, t)
Exit Sub
Check_err:
B1500.WriteLine("EMG? " & err) : msg = B1500.Read(True)
MsgBox("Instrument error: " & err & Chr(10) & msg, vbOKOnly, "")
Exit Sub
Check_nop:
MsgBox("No. of data: " & rep & " (not " & nop1 * 3 & ")", vbOKOnly, "")
End Sub
’76
’80
’86
Line
Description
76 to 78
Applies 0 V from all channels. And transfers the data stored in the data variable to the
save_data subprogram (see Table 3-1). And the subprogram will save the data into the
C:\Agilent\data\ex4r.txt file (CSV) and displays the data on a message box.
81 to 82
Displays a message box to show an error message if the error is detected.
86
Measurement
Result Example
Displays a message box to show an error message if the number of returned data is not
correct.
Vg
1,
1,
1,
1,
1,
1,
1,
1,
1,
1,
1,
2,
2,
2,
2,
2,
2,
2,
2,
2,
2,
2,
3,
3,
3,
3,
3,
3,
3,
3,
3,
3,
3,
(V), Vd (V), Id (mA), Time (sec), Status
0, 0.0020335, 0.0166, NAI
0.3, 3.0515, 0.0229, NAI
0.6, 5.6325, 0.0243, NAI
0.9, 7.7845, 0.0257, NAI
1.2, 9.6155, 0.0272, NAI
1.5, 11.2055, 0.0283, NAI
1.8, 12.63, 0.0316, NAI
2.1, 13.9, 0.033, NAI
2.4, 15.05, 0.034, NAI
2.7, 16.095, 0.0353, NAI
3, 17.045, 0.0363, NAI
0, 0.0025305, 0.016, NAI
0.3, 4.0265, 0.022, NAI
0.6, 7.635, 0.0236, NAI
0.9, 10.804, 0.0251, NAI
1.2, 13.565, 0.0281, NAI
1.5, 15.945, 0.0294, NAI
1.8, 18.01, 0.0305, NAI
2.1, 19.825, 0.0317, NAI
2.4, 21.445, 0.033, NAI
2.7, 22.915, 0.0341, NAI
3, 24.235, 0.0354, NAI
0, 0.0028565, 0.016, NAI
0.3, 4.8745, 0.0228, NAI
0.6, 9.3705, 0.0243, NAI
0.9, 13.445, 0.0278, NAI
1.2, 17.12, 0.0292, NAI
1.5, 20.37, 0.0302, NAI
1.8, 23.24, 0.0315, NAI
2.1, 25.75, 0.0326, NAI
2.4, 27.98, 0.0339, NAI
2.7, 29.96, 0.0352, NAI
3, 31.73, 0.0362, NAI
Data save completed.
Do you want to perform measurement again?
3-24
Agilent B1500 Programming Guide, Edition 2
Programming Examples
Staircase Sweep Measurements
The following program example executes the synchronous sweep measurement
using two sweep sources. This example measures MOSFET Id-Vg characteristics.
Table 3-7
Staircase Sweep Measurement Example 3
Sub perform_meas(ByVal B1500 As DirectIO, ByVal t() As Integer)
Dim i As Integer = 0
Dim j As Integer = 0
Dim nop1 As Integer = 11
Dim nop2 As Integer = 1
Dim data(nop2 - 1, nop1 - 1) As String
Dim value As String = "Vg (V), Id (mA), Time (sec), Status"
Dim fname As String = "C:\Agilent\data\ex5.txt"
Dim title As String = "Measurement Result"
Dim msg As String = "No error."
Dim err As String = "0"
Dim vd1 As Double = 0
Dim vd2 As Double = 2
Dim idcomp As Double = 0.05
Dim pd_comp As Double = 0.1
Dim vg1 As Double = vd1
Dim vg2 As Double = vd2
Dim igcomp As Double = 0.01
Dim pg_comp As Double = 0.05
Dim hold As Double = 0
Dim delay As Double = 0
Dim s_delay As Double = 0
Dim rep As Integer = nop1
Dim ret_val As String()
Dim data1 As String
Dim data2 As String
Dim data3 As String
Dim sc(nop1) As Double
Dim md(nop1) As Double
Dim st(nop1) As String
Dim tm(nop1) As Double
B1500.WriteLine("FMT 1,1")
B1500.WriteLine("TSC 1")
B1500.WriteLine("AV 10,1")
B1500.WriteLine("FL 0")
Line
’1
’13
’25
’
’
’
’
ASCII<CRLF EOI> w/sweep source data
enables time stamp output
sets number of samples for 1 data
sets filter off
’33
Description
2 to 11
Declares variables used through the project. And sets the proper values.
13 to 24
Declares variables used to set the source output, and sets the value.
25 to 32
Declares variables used to read the measurement data.
33 to 36
Sets the data output format, time stamp data output mode, and A/D converter. Also sets
the SMU filter off.
Agilent B1500 Programming Guide, Edition 2
3-25
Programming Examples
Staircase Sweep Measurements
B1500.WriteLine("DV " & t(3) & ",0,0,0.1")
’out= 0 V, comp= 0.1 A
B1500.WriteLine("DV " & t(2) & ",0,0,0.1")
’out= 0 V, comp= 0.1 A
B1500.WriteLine("MM 2," & t(0))
’2: staircase sweep measurement
B1500.WriteLine("CMM " & t(0) & ",1") ’1: compliance side measurement
B1500.WriteLine("RI " & t(0) & ",0")
’0: auto ranging
B1500.WriteLine("WT " & hold & "," & delay & "," & s_delay)
B1500.WriteLine("WM 2,1")
’ stops at any abnormal
B1500.WriteLine("ERR? 1") : err = B1500.Read(True)
If err <> 0 Then B1500.WriteLine("DZ") : GoTo Check_err
’38
B1500.WriteLine("WV " & t(0) & ",1,0," & vd1 & "," & vd2 & "," & nop1 & "," &
idcomp & "," & pd_comp)
B1500.WriteLine("WSV " & t(1) & ",0," & vg1 & "," & vg2 & "," & igcomp & "," &
pg_comp)
B1500.WriteLine("TSR")
B1500.WriteLine("XE")
B1500.WriteLine("*OPC?") : rep = B1500.Read(True)
B1500.WriteLine("ERR? 1") : err = B1500.Read(True)
If err <> 0 Then B1500.WriteLine("DZ") : GoTo Check_err
B1500.WriteLine("NUB?") : rep = B1500.Read(True)
’55
If rep <> nop1 * 3 Then B1500.WriteLine("DZ") : GoTo Check_nop
ret_val = B1500.ReadListAsStringArray()
For i = 0 To nop1 - 1
data1 = ret_val(i * 3)
data2 = ret_val(i * 3 + 1)
data3 = ret_val(i * 3 + 2)
data1 = Right(data1, 12) : tm(i) = Val(data1)
st(i) = Left(data2, 3)
data2 = Right(data2, 12) : md(i) = Val(data2)
data3 = Right(data3, 12) : sc(i) = Val(data3)
data(j, i) = Chr(13) & Chr(10) & sc(i) & ", " & md(i) * 1000 & ", " & tm(i)
& ", " & st(i)
Next i
’68
Line
Description
38 to 42
Applies voltage to device. And sets the measurement mode, channel measurement
mode, and measurement range.
43 to 46
Sets the timing parameters and sweep mode of the staircase sweep source. And checks
if an error occurred. If an error is detected, forces 0 V and goes to Check_err.
48 to 68
Sets the sweep sources, applies voltage to device, resets time stamp, and performs the
staircase sweep measurement. And stores the returned data into the ret_val string array
variable. Finally, stores the measured data into the data array.
55 to 56
Checks number of returned data. If it is not correct, forces 0 V and goes to Check_nop.
67
Stores the measured data into the data array.
3-26
Agilent B1500 Programming Guide, Edition 2
Programming Examples
Staircase Sweep Measurements
B1500.WriteLine("DZ")
save_data(fname, title, value, data, nop1, nop2, B1500, t)
Exit Sub
Check_err:
B1500.WriteLine("EMG? " & err) : msg = B1500.Read(True)
MsgBox("Instrument error: " & err & Chr(10) & msg, vbOKOnly, "")
Exit Sub
Check_nop:
MsgBox("No. of data: " & rep & " (not " & nop1 * 3 & ")", vbOKOnly, "")
End Sub
’70
’74
’80
Line
Description
70 to 72
Applies 0 V from all channels. And transfers the data stored in the data variable to the
save_data subprogram (see Table 3-1). And the subprogram will save the data into the
C:\Agilent\data\ex5.txt file (CSV) and displays the data on a message box.
75 to 76
Displays a message box to show an error message if the error is detected.
80
Measurement
Result Example
Displays a message box to show an error message if the number of returned data is not
correct.
Vg (V), Id (mA), Time (sec), Status
0, 9.8235E-05, 0.0199, NAI
0.2, 1.464, 0.0292, NAI
0.4, 3.035, 0.0366, NAI
0.6, 4.7175, 0.0441, NAI
0.8, 6.511, 0.0515, NAI
1, 8.4075, 0.059, NAI
1.2, 10.41, 0.0636, NAI
1.4, 12.49, 0.0654, NAI
1.6, 14.665, 0.0671, NAI
1.8, 16.915, 0.0689, NAI
2, 19.235, 0.0707, NAI
Data save completed.
Do you want to perform measurement again?
Agilent B1500 Programming Guide, Edition 2
3-27
Programming Examples
Pulsed Sweep Measurements
Pulsed Sweep Measurements
To perform pulsed sweep measurements, use the following commands.
Function
Command
Parameters
Enables channels
CN
[chnum ... [,chnum] ... ]
Disables channels
CL
[chnum ... [,chnum] ... ]
Sets filter ON/OFF
[FL]
mode[,chnum ... [,chnum] ... ]
Sets series resistor ON/OFF
[SSR]
chnum,mode
Sets pulse timing parameters
PT
hold,width,period [,tdelay]
Sets auto abort function
[WM]
abort[,post]
Sets pulsed sweep source
PWV
chnum,mode,range,base,start,
stop, step[,comp]
PWI
Sets synchronous sweep source a
[WSV]
[WSI]
chnum,range,start,stop
[,comp[,Pcomp]]
Forces constant voltage
DV
chnum,range,output
[,comp[,polarity[,crange]]]
Forces constant current
DI
Sets voltage measurement range
[RV]
chnum,range
Sets current measurement range
[RI]
chnum,range
[RM]
chnum,mode[,rate]
Sets measurement mode
MM
4,chnum
Sets SMU operation mode
[CMM]
chnum,mode
Executes measurement
XE
a. The WSV/WSI command must be entered after the PWV/PWI command.
NOTE
Measurement channel performs measurement so that the pulse width and pulse
period are kept. The integration time is automatically set by the instrument, and you
cannot change. For the Agilent B1500, note that the high-resolution ADC cannot be
used for the pulsed measurements. The AAD/AIT/AV/WT command settings are
ignored.
3-28
Agilent B1500 Programming Guide, Edition 2
Programming Examples
Pulsed Sweep Measurements
A program example of a pulsed sweep measurement is shown below. This example
measures the bipolar transistor Ic-Vc characteristics.
Table 3-8
Pulsed Sweep Measurement Example
Sub perform_meas(ByVal B1500 As DirectIO, ByVal t() As Integer)
Dim i As Integer = 0
Dim j As Integer = 0
Dim nop1 As Integer = 11
Dim nop2 As Integer = 3
Dim data(nop2 - 1, nop1 - 1) As String
Dim value As String = "Ib (uA), Vc (V), Ic (mA), Time (sec), Status"
Dim fname As String = "C:\Agilent\data\ex6.txt"
Dim title As String = "Measurement Result"
Dim msg As String = "No error."
Dim err As String = "0"
Dim v0 As Double = 0
Dim vc1 As Double = 0
Dim vc2 As Double = 3
Dim iccomp As Double = 0.05
Dim ib1 As Double = 0.00005
Dim ib2 As Double = 0.00015
Dim vbcomp As Double = 5
Dim ib As Double = ib1
’secondary sweep output value
Dim d_ib As Double = 0
’secondary sweep step value (delta)
If nop2 <> 1 Then d_ib = (ib2 - ib1) / (nop2 - 1)
Dim hold As Double = 0
Dim delay As Double = 0
Dim s_delay As Double = 0
Dim rep As Integer = nop1
Dim ret_val As String()
Dim data1 As String
Dim data2 As String
Dim data3 As String
Dim sc(nop1) As Double
Dim md(nop1) As Double
Dim st(nop1) As String
Dim tm(nop1) As Double
B1500.WriteLine("FMT 1,1")
B1500.WriteLine("TSC 1")
B1500.WriteLine("FL 1")
Line
’ ASCII<CRLF EOI> w/sweep source data
’ enables time stamp output
’ sets filter on
’1
’13
’27
’36
Description
2 to 11
Declares variables used through the project. And sets the proper values.
13 to 26
Declares variables used to set the source output, and sets the value.
27 to 34
Declares variables used to read the measurement data.
36 to 38
Sets the data output format, time stamp data output mode, and SMU filter.
Agilent B1500 Programming Guide, Edition 2
3-29
Programming Examples
Pulsed Sweep Measurements
B1500.WriteLine("CL " & t(3))
B1500.WriteLine("DV " & t(0) & ",0,0,0.1")
’out= 0 V, comp= 0.1 A
Dim b_pt As String = "0.1,0.01,0.02"
’hold, width, period in sec
B1500.WriteLine("PT " & b_pt)
B1500.WriteLine("MM 4," & t(2))
’4: pulsed sweep measurement
B1500.WriteLine("CMM " & t(2) & ",1") ’1: compliance side measurement
B1500.WriteLine("RI " & t(2) & ",0")
’0: auto ranging
B1500.WriteLine("WM 2,1")
’ stops at any abnormal
B1500.WriteLine("ERR? 1") : err = B1500.Read(True)
If err <> 0 Then B1500.WriteLine("DZ") : GoTo Check_err
For j = 0 To nop2 - 1
B1500.WriteLine("PWV " & t(2) & ",1,0," & v0 & "," & vc1 & "," & vc2 &
& nop1 & "," & iccomp)
B1500.WriteLine("DI " & t(1) & ",0," & ib & "," & vbcomp)
B1500.WriteLine("TSR")
B1500.WriteLine("XE")
B1500.WriteLine("*OPC?") : rep = B1500.Read(True)
B1500.WriteLine("ERR? 1") : err = B1500.Read(True)
If err <> 0 Then B1500.WriteLine("DZ") : GoTo Check_err
B1500.WriteLine("NUB?") : rep = B1500.Read(True)
If rep <> nop1 * 3 Then B1500.WriteLine("DZ") : GoTo Check_nop
ret_val = B1500.ReadListAsStringArray()
For i = 0 To nop1 - 1
data1 = ret_val(i * 3)
data2 = ret_val(i * 3 + 1)
data3 = ret_val(i * 3 + 2)
data1 = Right(data1, 12) : tm(i) = Val(data1)
st(i) = Left(data2, 3)
data2 = Right(data2, 12) : md(i) = Val(data2)
data3 = Right(data3, 12) : sc(i) = Val(data3)
data(j, i) = Chr(13) & Chr(10) & ib * 1000000 & ", " & sc(i) & ",
md(i) * 1000 & ", " & tm(i) & ", " & st(i)
Next i
ib = ib + d_ib
Next j
Line
40
’40
’47
’51
","
’59
" &
’73
Description
Disables SMU assigned to t(3) that is not needed.
41 to 47
Applies voltage to device. And sets the pulse timing parameters, measurement mode,
channel measurement mode, measurement range, and sweep mode.
49 to 50
Checks if an error occurred. If an error is detected, forces 0 V and goes to Check_err.
51 to 73
Sets the pulsed sweep source, applies voltage to device, resets time stamp, and
performs the pulsed sweep measurement. And stores the returned data into the ret_val
string array variable. Finally, stores the measured data into the data array.
59 to 60
Checks number of returned data. If it is not correct, forces 0 V and goes to Check_nop.
3-30
Agilent B1500 Programming Guide, Edition 2
Programming Examples
Pulsed Sweep Measurements
B1500.WriteLine("DZ")
save_data(fname, title, value, data, nop1, nop2, B1500, t)
Exit Sub
Check_err:
B1500.WriteLine("EMG? " & err) : msg = B1500.Read(True)
MsgBox("Instrument error: " & err & Chr(10) & msg, vbOKOnly, "")
Exit Sub
Check_nop:
MsgBox("No. of data: " & rep & " (not " & nop1 * 3 & ")", vbOKOnly, "")
End Sub
’75
’79
’85
Line
Description
75 to 77
Applies 0 V from all channels. And transfers the data stored in the data variable to the
save_data subprogram (see Table 3-1). And the subprogram will save the data into the
C:\Agilent\data\ex6.txt file (CSV) and displays the data on a message box.
80 to 81
Displays a message box to show an error message if the error is detected.
85
Measurement
Result Example
Displays a message box to show an error message if the number of returned data is not
correct.
Ib (uA), Vc (V), Ic (mA), Time (sec), Status
50, 0, -0.055, 0.1161, NDI
50, 0.3, 8.98, 0.1361, NDI
50, 0.6, 9.745, 0.1561, NDI
50, 0.9, 9.77, 0.1761, NDI
50, 1.2, 9.84, 0.1961, NDI
50, 1.5, 9.87, 0.2161, NDI
50, 1.8, 9.895, 0.2361, NDI
50, 2.1, 9.96, 0.2561, NDI
50, 2.4, 9.94, 0.2761, NDI
50, 2.7, 9.955, 0.2961, NDI
50, 3, 9.98, 0.3161, NDI
100, 0, -0.1, 0.1129, NDI
100, 0.3, 15.76, 0.1329, NDI
100, 0.6, 18.2, 0.1529, NDI
100, 0.9, 18.86, 0.1729, NDI
100, 1.2, 18.99, 0.1929, NDI
100, 1.5, 19.105, 0.2129, NDI
100, 1.8, 19.17, 0.2329, NDI
100, 2.1, 19.2, 0.2529, NDI
100, 2.4, 19.27, 0.2729, NDI
100, 2.7, 19.33, 0.2929, NDI
100, 3, 19.395, 0.3129, NDI
150, 0, -0.15, 0.1139, NDI
150, 0.3, 21.055, 0.1339, NDI
150, 0.6, 24.625, 0.1539, NDI
150, 0.9, 26.595, 0.1739, NDI
150, 1.2, 27.38, 0.1939, NDI
150, 1.5, 27.625, 0.2139, NDI
150, 1.8, 27.785, 0.2339, NDI
150, 2.1, 27.915, 0.2539, NDI
150, 2.4, 28.07, 0.2739, NDI
150, 2.7, 28.18, 0.2939, NDI
150, 3, 28.275, 0.3139, NDI
Data save completed.
Do you want to perform measurement again?
Agilent B1500 Programming Guide, Edition 2
3-31
Programming Examples
Staircase Sweep with Pulsed Bias Measurements
Staircase Sweep with Pulsed Bias Measurements
To perform staircase sweep with pulsed bias measurements, use the following
commands.
Function
Command
Parameters
Enables channels
CN
[chnum ... [,chnum] ... ]
Disables channels
CL
[chnum ... [,chnum] ... ]
Sets filter ON/OFF
[FL]
mode[,chnum ... [,chnum] ... ]
Sets series resistor ON/OFF
[SSR]
chnum,mode
Sets auto abort function
[WM]
abort[,post]
Sets voltage sweep source
WV
Sets current sweep source
WI
chnum,mode,range,start,stop,
step[,comp[,Pcomp]]
Sets synchronous sweep
source a
[WSV]
[WSI]
chnum,range,start,stop
[,comp[,Pcomp]]
Sets pulse timing parameters
PT
hold,width,period [,tdelay]
Forces pulse voltage
PV
chnum,range,base,pulse[,comp]
Forces pulse current
PI
chnum,range,base,pulse [,comp]
Forces constant voltage
DV
Forces constant current
DI
chnum,range,output
[,comp[,polarity[,crange]]]
Sets voltage measurement
range
[RV]
chnum,range
Sets current measurement
range
[RI]
chnum,range
[RM]
chnum,mode[,rate]
Sets measurement mode
MM
5,chnum
Sets SMU operation mode
[CMM]
chnum,mode
Executes measurement
XE
a. The WSV/WSI command must be entered after the WV/WI command.
NOTE
Measurement channel performs measurement so that the pulse width and pulse
period are kept. The integration time is automatically set by the instrument, and you
cannot change. For the Agilent B1500, note that the high-resolution ADC cannot be
used for the pulsed measurements. The AAD/AIT/AV/WT command settings are
ignored.
3-32
Agilent B1500 Programming Guide, Edition 2
Programming Examples
Staircase Sweep with Pulsed Bias Measurements
A program example of a staircase sweep with pulsed bias measurement is shown
below. This example measures the bipolar transistor Ic-Vc characteristics.
Table 3-9
Staircase Sweep with Pulsed Bias Measurement Example
Sub perform_meas(ByVal B1500 As DirectIO, ByVal t() As Integer)
Dim i As Integer = 0
Dim j As Integer = 0
Dim nop1 As Integer = 11
Dim nop2 As Integer = 3
Dim data(nop2 - 1, nop1 - 1) As String
Dim value As String = "Ib (uA), Vc (V), Ic (mA), Time (sec), Status"
Dim fname As String = "C:\Agilent\data\ex7.txt"
Dim title As String = "Measurement Result"
Dim msg As String = "No error."
Dim err As String = "0"
Dim vc1 As Double = 0
Dim vc2 As Double = 3
Dim iccomp As Double = 0.05
Dim pccomp As Double = 0.2
Dim i0 As Double = 0
Dim ib1 As Double = 0.00005
Dim ib2 As Double = 0.00015
Dim vbcomp As Double = 5
Dim ib As Double = ib1
’secondary sweep output value
Dim d_ib As Double = 0
’secondary sweep step value (delta)
If nop2 <> 1 Then d_ib = (ib2 - ib1) / (nop2 - 1)
Dim hold As Double = 0
Dim delay As Double = 0
Dim s_delay As Double = 0
Dim rep As Integer = nop1
Dim ret_val As String()
Dim data1 As String
Dim data2 As String
Dim data3 As String
Dim sc(nop1) As Double
Dim md(nop1) As Double
Dim st(nop1) As String
Dim tm(nop1) As Double
B1500.WriteLine("FMT 1,1")
B1500.WriteLine("TSC 1")
B1500.WriteLine("FL 1")
Line
’ ASCII<CRLF EOI> w/sweep source data
’ enables time stamp output
’ sets filter on
’1
’12
’27
’36
Description
2 to 11
Declares variables used through the project. And sets the proper values.
12 to 26
Declares variables used to set the source output, and sets the value.
27 to 34
Declares variables used to read the measurement data.
36 to 38
Sets the data output format, time stamp data output mode, and A/D converter. Also sets
the SMU filter on.
Agilent B1500 Programming Guide, Edition 2
3-33
Programming Examples
Staircase Sweep with Pulsed Bias Measurements
B1500.WriteLine("CL " & t(3))
B1500.WriteLine("DV " & t(0) & ",0,0,0.1")
’out= 0 V, comp= 0.1 A
Dim b_pt As String = "0.1,0.01,0.02"
’hold, width, period in sec
B1500.WriteLine("PT " & b_pt)
B1500.WriteLine("MM 5," & t(2))
’5: sweep with pulsed bias
B1500.WriteLine("CMM " & t(2) & ",1") ’1: compliance side measurement
B1500.WriteLine("RI " & t(2) & ",0")
’0: auto ranging
B1500.WriteLine("WM 2,1")
’ stops at any abnormal
’40
’47
B1500.WriteLine("ERR? 1") : err = B1500.Read(True)
If err <> 0 Then B1500.WriteLine("DZ") : GoTo Check_err
For j = 0 To nop2 - 1
’51
B1500.WriteLine("WV " & t(2) & ",1,0," & vc1 & "," & vc2 & "," & nop1 & ","
& iccomp & "," & pccomp)
B1500.WriteLine("PI " & t(1) & ",0," & i0 & "," & ib & "," & vbcomp)
B1500.WriteLine("TSR")
B1500.WriteLine("XE")
B1500.WriteLine("*OPC?") : rep = B1500.Read(True)
B1500.WriteLine("ERR? 1") : err = B1500.Read(True)
If err <> 0 Then B1500.WriteLine("DZ") : GoTo Check_err
B1500.WriteLine("NUB?") : rep = B1500.Read(True)
’59
If rep <> nop1 * 3 Then B1500.WriteLine("DZ") : GoTo Check_nop
ret_val = B1500.ReadListAsStringArray()
For i = 0 To nop1 - 1
data1 = ret_val(i * 3)
data2 = ret_val(i * 3 + 1)
data3 = ret_val(i * 3 + 2)
data1 = Right(data1, 12) : tm(i) = Val(data1)
st(i) = Left(data2, 3)
data2 = Right(data2, 12) : md(i) = Val(data2)
data3 = Right(data3, 12) : sc(i) = Val(data3)
data(j, i) = Chr(13) & Chr(10) & ib * 1000000 & ", " & sc(i) & ", " &
md(i) * 1000 & ", " & tm(i) & ", " & st(i)
Next i
ib = ib + d_ib
Next j
’73
Line
40
Description
Disables SMU assigned to t(3) that is not needed.
41 to 47
Applies voltage to device. And sets the pulse timing parameters, measurement mode,
channel measurement mode, measurement range, and sweep mode.
49 to 50
Checks if an error occurred. If an error is detected, forces 0 V and goes to Check_err.
51 to 73
Sets the sweep source and the pulsed bias source, resets time stamp, and performs the
staircase sweep with pulsed bias measurement. And stores the returned data into the
ret_val string array variable. Finally, stores the measured data into the data array.
59 to 60
Checks number of returned data. If it is not correct, forces 0 V and goes to Check_nop.
3-34
Agilent B1500 Programming Guide, Edition 2
Programming Examples
Staircase Sweep with Pulsed Bias Measurements
B1500.WriteLine("DZ")
save_data(fname, title, value, data, nop1, nop2, B1500, t)
Exit Sub
Check_err:
B1500.WriteLine("EMG? " & err) : msg = B1500.Read(True)
MsgBox("Instrument error: " & err & Chr(10) & msg, vbOKOnly, "")
Exit Sub
Check_nop:
MsgBox("No. of data: " & rep & " (not " & nop1 * 3 & ")", vbOKOnly, "")
End Sub
’75
’79
’85
Line
Description
75 to 77
Applies 0 V from all channels. And transfers the data stored in the data variable to the
save_data subprogram (see Table 3-1). And the subprogram will save the data into the
C:\Agilent\data\ex7.txt file (CSV) and displays the data on a message box.
80 to 81
Displays a message box to show an error message if the error is detected.
85
Measurement
Result Example
Displays a message box to show an error message if the number of returned data is not
correct.
Ib (uA), Vc (V), Ic (mA), Time (sec), Status
50, 0, -0.05, 0.119, NDI
50, 0.3, 8.97, 0.139, NDI
50, 0.6, 9.725, 0.159, NDI
50, 0.9, 9.775, 0.179, NDI
50, 1.2, 9.815, 0.199, NDI
50, 1.5, 9.845, 0.219, NDI
50, 1.8, 9.87, 0.239, NDI
50, 2.1, 9.89, 0.259, NDI
50, 2.4, 9.92, 0.279, NDI
50, 2.7, 9.91, 0.299, NDI
50, 3, 9.965, 0.319, NDI
100, 0, -0.1, 0.113, NDI
100, 0.3, 15.73, 0.133, NDI
100, 0.6, 18.185, 0.153, NDI
100, 0.9, 18.8, 0.173, NDI
100, 1.2, 18.945, 0.193, NDI
100, 1.5, 19.025, 0.213, NDI
100, 1.8, 19.13, 0.233, NDI
100, 2.1, 19.175, 0.253, NDI
100, 2.4, 19.22, 0.273, NDI
100, 2.7, 19.315, 0.293, NDI
100, 3, 19.355, 0.313, NDI
150, 0, -0.15, 0.1162, NDI
150, 0.3, 21.04, 0.1362, NDI
150, 0.6, 24.6, 0.1562, NDI
150, 0.9, 26.575, 0.1762, NDI
150, 1.2, 27.335, 0.1962, NDI
150, 1.5, 27.565, 0.2162, NDI
150, 1.8, 27.745, 0.2362, NDI
150, 2.1, 27.835, 0.2562, NDI
150, 2.4, 28, 0.2762, NDI
150, 2.7, 28.1, 0.2962, NDI
150, 3, 28.165, 0.3162, NDI
Data save completed.
Do you want to perform measurement again?
Agilent B1500 Programming Guide, Edition 2
3-35
Programming Examples
Quasi Pulsed Spot Measurements
Quasi Pulsed Spot Measurements
To perform quasi-pulsed spot measurements, use the following commands.
Function
Command
Parameters
Enables channels
CN
[chnum ... [,chnum] ... ]
Disables channels
CL
[chnum ... [,chnum] ... ]
Sets filter ON/OFF
[FL]
mode[,chnum ... [,chnum] ... ]
Sets series resistor ON/OFF
[SSR]
chnum,mode
Sets integration time
(Agilent B1500 can use
AAD/AIT instead of AV.)
[AV]
number[,mode]
[AAD]
chnum[,type]
[AIT]
type,mode[,N]
Sets detection interval
[BDM]
interval[,mode]
Sets timing parameters
[BDT]
hold,delay
Sets quasi-pulsed source
BDV
chnum,range,start,stop[,comp]
Forces constant voltage
DV
Forces constant current
DI
chnum,range,output
[,comp[,polarity[,crange]]]
Sets voltage measurement range
[RV]
chnum,range
Sets current measurement range
[RI]
chnum,range
[RM]
chnum,mode[,rate]
Sets measurement mode
MM
9[,chnum]
Sets SMU operation mode
[CMM]
chnum,mode
Executes measurement
XE
3-36
Agilent B1500 Programming Guide, Edition 2
Programming Examples
Quasi Pulsed Spot Measurements
A program example of a spot measurement is shown below. This measures the
breakdown voltage of bipolar transistor.
Table 3-10
Quasi Pulsed Spot Measurement Example
Sub perform_meas(ByVal B1500 As DirectIO, ByVal t() As Integer)
Dim i As Integer = 0
Dim j As Integer = 0
Dim nop1 As Integer = 1
Dim nop2 As Integer = 1
Dim data(nop2 - 1, nop1 - 1) As String
Dim value As String = "BVceo (V), Status"
Dim fname As String = "C:\Agilent\data\ex8.txt"
Dim title As String = "Measurement Result"
Dim msg As String = "No error."
Dim err As String = "0"
Dim
Dim
Dim
Dim
Dim
Dim
Dim
Dim
vc1 As Double = 0
vc2 As Double = 100
iccomp As Double = 0.005
hold As Double = 0
delay As Double = 0
interval As Double = 0
mmode As Double = 0
mrng As Integer = 0
’1
’13
B1500.WriteLine("FMT 1")
’22
B1500.WriteLine("CL " & t(1) & "," & t(3))
B1500.WriteLine("MM 9," & t(2))
B1500.WriteLine("BDT " & hold & "," & delay)
B1500.WriteLine("BDM " & interval & "," & mmode)
B1500.WriteLine("BDV " & t(2) & "," & mrng & "," & vc1 & "," & vc2 & "," &
iccomp)
B1500.WriteLine("DV " & t(0) & ",0,0,0.1")
’out= 0 V, comp= 0.1 A
’28
B1500.WriteLine("XE")
B1500.WriteLine("ERR? 1") : err = B1500.Read(True)
If err <> 0 Then B1500.WriteLine("DZ") : GoTo Check_err
Line
Description
2 to 11
Declares variables used through the project. And sets the proper values.
13 to 20
Declares variables, and sets the value.
22 to 23
Sets the data output format. And disables SMUs assigned to t(1) and t(3) that are not
needed.
24 to 27
Sets the measurement mode, measurement timing parameters, measurement
conditions, and source output conditions.
28 to 31
Applies voltage to device, and performs the quasi pulsed spot measurement. And
checks if an error occurred. If an error is detected, forces 0 V and goes to Check_err.
Agilent B1500 Programming Guide, Edition 2
3-37
Programming Examples
Quasi Pulsed Spot Measurements
Dim data1 As String = B1500.Read(True)
Dim status As String = Left(data1, 3)
data1 = Right(data1, 12)
Dim meas As Double = Val(data1)
data(j, i) = Chr(13) & Chr(10) & meas & ", " & status
’33
B1500.WriteLine("DZ")
save_data(fname, title, value, data, nop1, nop2, B1500, t)
Exit Sub
’39
Check_err:
B1500.WriteLine("EMG? " & err) : msg = B1500.Read(True)
MsgBox("Instrument error: " & err & Chr(10) & msg, vbOKOnly, "")
Exit Sub
’43
End Sub
Line
Description
33 to 37
Reads the returned data and stores it into the data1 string variable. Finally, stores the
measured data into the data array.
39 to 41
Applies 0 V from all channels. And transfers the data stored in the data variable to the
save_data subprogram (see Table 3-1). And the subprogram will save the data into the
C:\Agilent\data\ex8.txt file (CSV) and displays the data on a message box.
43 to 46
Displays a message box to show an error message if the error is detected.
Measurement
Result Example
BVceo (V), Status
55.87, CDV
Data save completed.
Do you want to perform measurement again?
3-38
Agilent B1500 Programming Guide, Edition 2
Programming Examples
Linear Search Measurements
Linear Search Measurements
To perform linear search measurements, use the following commands.
Function
Command
Parameters
Enables channels
CN
[chnum ... [,chnum] ... ]
Disables channels
CL
[chnum ... [,chnum] ... ]
Sets filter ON/OFF
[FL]
mode[,chnum ... [,chnum] ... ]
Sets series resistor ON/OFF
[SSR]
chnum,mode
Sets integration time
(Agilent B1500 can use
AAD/AIT instead of AV.)
[AV]
number[,mode]
[AAD]
chnum[,type]
[AIT]
type,mode[,N]
Sets measurement mode
MM
14
Selects output data
[LSVM]
output_data
Sets timing parameters
[LSTM]
hold,delay
Sets auto abort function
[LSM]
abort[,post]
Sets current search or
voltage search condition
LGI or
LGV
chnum,mode,range,target
Sets voltage source or
current source
LSV or
LSI
chnum,range,start,stop,step
[,comp]
Sets synchronous voltage
source or current source
[LSSV] or
[LSSI]
chnum,polarity,offset[,comp]
Forces constant voltage
DV
Forces constant current
DI
chnum,range,output
[,comp[,polarity[,crange]]]
Executes measurement
XE
The LSV and LSI commands clear the previous source settings.
Send the LSI command before sending the LSSI command.
Send the LSV command before sending the LSSV command.
The LSI/LSSV commands or LSV/LSSI commands cannot be used together.
Agilent B1500 Programming Guide, Edition 2
3-39
Programming Examples
Linear Search Measurements
A program example of a linear search measurement is shown below. This example
measures the MOSFET threshold voltage.
Table 3-11
Linear Search Measurement Example
Sub perform_meas(ByVal B1500 As DirectIO, ByVal t() As Integer)
Dim i As Integer = 0
Dim j As Integer = 0
Dim nop1 As Integer = 1
Dim nop2 As Integer = 1
Dim data(nop2 - 1, nop1 - 1) As String
Dim value As String = "Vth (mV), Id (uA), Status"
Dim fname As String = "C:\Agilent\data\ex9.txt"
Dim title As String = "Measurement Result"
Dim msg As String = "No error."
Dim err As String = "0"
Dim
Dim
Dim
Dim
Dim
Dim
Dim
Dim
Dim
Dim
Dim
Dim
Dim
vd1 As Double = 0
vd2 As Double = 3
vdel As Double = 0.01
idcomp As Double = 0.01
igcomp As Double = 0.01
orng As Integer = 12
mrng As Integer = 13
hold As Double = 0
delay As Double = 0
judge As Integer = 1
tgt As Double = 0.001
posneg As Integer = 1
offset As Double = 0
’1
’13
’12: 20 V limited auto ranging
’13: 100 nA limited auto ranging
’
’
’
’
1: result>=target
target current
1: positive
offset voltage
B1500.WriteLine("FMT 1")
’27
B1500.WriteLine("MM 14")
’ linear search measurement
B1500.WriteLine("LSM 2,3") ’ stops at any abnormal
B1500.WriteLine("LSVM 1")
’ returns search data and sense data
B1500.WriteLine("LSTM " & hold & "," & delay)
B1500.WriteLine("LGI " & t(0) & "," & judge & "," & mrng & "," & tgt)
B1500.WriteLine("LSV " & t(0) & "," & orng & "," & vd1 & "," & vd2 & "," & vdel
& "," & idcomp)
B1500.WriteLine("LSSV " & t(1) & "," & posneg & "," & offset & "," & igcomp)
Line
Description
2 to 11
Declares variables used through the project. And sets the proper values.
13 to 25
Declares variables, and sets the value.
27 to 28
Sets the data output format and the measurement mode.
29 to 32
Sets the linear search measurement conditions.
33 to 34
Sets the linear search sources, primary source and synchronous source.
3-40
Agilent B1500 Programming Guide, Edition 2
Programming Examples
Linear Search Measurements
B1500.WriteLine("DV " & t(3) & ",0,0,0.1")
’out= 0 V, comp= 0.1 A
B1500.WriteLine("DV " & t(2) & ",0,0,0.1")
’out= 0 V, comp= 0.1 A
B1500.WriteLine("XE")
B1500.WriteLine("ERR? 1") : err = B1500.Read(True)
If err <> 0 Then B1500.WriteLine("DZ") : GoTo Check_err
’36
Dim ret_val As String() = B1500.ReadListAsStringArray()
Dim data1 As String = ret_val(0)
Dim data2 As String = ret_val(1)
data1 = Right(data1, 12)
Dim dsearch As Double = Val(data1)
Dim status As String = Left(data2, 3)
data2 = Right(data2, 12)
Dim dsense As Double = Val(data2)
’42
data(j, i) = Chr(13) & Chr(10) & dsearch * 1000 & ", " & dsense * 1000000 & ",
" & status
B1500.WriteLine("DZ")
save_data(fname, title, value, data, nop1, nop2, B1500, t)
Exit Sub
Check_err:
B1500.WriteLine("EMG? " & err) : msg = B1500.Read(True)
MsgBox("Instrument error: " & err & Chr(10) & msg, vbOKOnly, "")
Exit Sub
’53
’57
End Sub
Line
Description
36 to 40
Applies voltage to device, and performs the linear search measurement. And checks if
an error occurred. If an error is detected, forces 0 V and goes to Check_err.
42 to 51
Reads the returned data and stores it into the ret_val string array variable. Finally, stores
the measured data into the data array.
53 to 55
Applies 0 V from all channels. And transfers the data stored in the data variable to the
save_data subprogram (see Table 3-1). And the subprogram will save the data into the
C:\Agilent\data\ex9.txt file (CSV) and displays the data on a message box.
57 to 60
Displays a message box to show an error message if the error is detected.
Measurement
Result Example
Vth (mV), Id (uA), Status
140, 1013.85, NAI
Data save completed.
Do you want to perform measurement again?
Agilent B1500 Programming Guide, Edition 2
3-41
Programming Examples
Binary Search Measurements
Binary Search Measurements
To perform binary search measurements, use the following commands.
Function
Command
Parameters
Enables channels
CN
[chnum ... [,chnum] ... ]
Disables channels
CL
[chnum ... [,chnum] ... ]
Sets filter ON/OFF
[FL]
mode[,chnum ... [,chnum] ... ]
Sets series resistor ON/OFF
[SSR]
chnum,mode
Sets integration time
(Agilent B1500 can use
AAD/AIT instead of AV.)
[AV]
number[,mode]
[AAD]
chnum[,type]
[AIT]
type,mode[,N]
Sets measurement mode
MM
15
Selects output data
[BSVM]
output_data
Sets timing parameters
[BST]
hold,delay
Sets source control mode
BSM
mode,abort[,post]
Sets current search or
voltage search condition
BGI or
BGV
chnum,mode,condition,range,
target
Sets voltage source or
current source
BSV or
BSI
chnum,range,start,stop[,comp]
Sets synchronous voltage
source or current source
[BSSV] or
[BSSI]
chnum,polarity,offset[,comp]
Forces constant voltage
DV
Forces constant current
DI
chnum,range,output
[,comp[,polarity[,crange]]]
Executes measurement
XE
The BSV and BSI commands clear the previous source settings.
Send the BSI command before sending the BSSI command.
Send the BSV command before sending the BSSV command.
The BSI/BSSV commands or BSV/BSSI commands cannot be used together.
3-42
Agilent B1500 Programming Guide, Edition 2
Programming Examples
Binary Search Measurements
A program example of a binary search measurement is shown below. This example
measures the MOSFET threshold voltage.
Table 3-12
Binary Search Measurement Example
Sub perform_meas(ByVal B1500 As DirectIO, ByVal t() As Integer)
Dim i As Integer = 0
Dim j As Integer = 0
Dim nop1 As Integer = 1
Dim nop2 As Integer = 1
Dim data(nop2 - 1, nop1 - 1) As String
Dim value As String = "Vth (mV), Id (uA), Status"
Dim fname As String = "C:\Agilent\data\ex10.txt"
Dim title As String = "Measurement Result"
Dim msg As String = "No error."
Dim err As String = "0"
Dim
Dim
Dim
Dim
Dim
Dim
Dim
Dim
Dim
Dim
Dim
Dim
Dim
vd1 As Double = 0
vd2 As Double = 3
idcomp As Double = 0.01
igcomp As Double = 0.01
orng As Integer = 12
mrng As Integer = 13
hold As Double = 0
delay As Double = 0
mode As Integer = 0
judge As Double = 0.000001
tgt As Double = 0.001
posneg As Integer = 1
offset As Double = 0
’1
’13
’12: 20 V limited auto ranging
’13: 100 nA limited auto ranging
’
’
’
’
’
0: limit, 1: repeat
limit value in A
target current
1: positive
offset voltage
B1500.WriteLine("FMT 1")
’27
B1500.WriteLine("MM 15")
’ binary search measurement
B1500.WriteLine("BSM 1,1")
’ cautious mode, abort off
B1500.WriteLine("BSVM 1")
’ returns search data and sense data
B1500.WriteLine("BST " & hold & "," & delay)
B1500.WriteLine("BGI " & t(0) & "," & mode & "," & judge & "," & mrng & "," &
tgt)
B1500.WriteLine("BSV " & t(0) & "," & orng & "," & vd1 & "," & vd2 & "," &
idcomp)
B1500.WriteLine("BSSV " & t(1) & "," & posneg & "," & offset & "," & igcomp)
Line
Description
2 to 11
Declares variables used through the project. And sets the proper values.
13 to 25
Declares variables, and sets the value.
27 to 28
Sets the data output format and the measurement mode.
29 to 32
Sets the binary search measurement conditions.
33 to 34
Sets the binary search sources, primary source and synchronous source.
Agilent B1500 Programming Guide, Edition 2
3-43
Programming Examples
Binary Search Measurements
B1500.WriteLine("DV " & t(3) & ",0,0,0.1")
’out= 0 V, comp= 0.1 A
B1500.WriteLine("DV " & t(2) & ",0,0,0.1")
’out= 0 V, comp= 0.1 A
B1500.WriteLine("XE")
B1500.WriteLine("ERR? 1") : err = B1500.Read(True)
If err <> 0 Then B1500.WriteLine("DZ") : GoTo Check_err
’36
Dim ret_val As String() = B1500.ReadListAsStringArray()
Dim data1 As String = ret_val(0)
Dim data2 As String = ret_val(1)
data1 = Right(data1, 12)
Dim dsearch As Double = Val(data1)
Dim status As String = Left(data2, 3)
data2 = Right(data2, 12)
Dim dsense As Double = Val(data2)
’42
data(j, i) = Chr(13) & Chr(10) & dsearch * 1000 & ", " & dsense * 1000000 & ",
" & status
B1500.WriteLine("DZ")
save_data(fname, title, value, data, nop1, nop2, B1500, t)
Exit Sub
Check_err:
B1500.WriteLine("EMG? " & err) : msg = B1500.Read(True)
MsgBox("Instrument error: " & err & Chr(10) & msg, vbOKOnly, "")
Exit Sub
’53
’57
End Sub
Line
Description
36 to 40
Applies voltage to device, and performs the binary search measurement. And checks if
an error occurred. If an error is detected, forces 0 V and goes to Check_err.
42 to 51
Reads the returned data and stores it into the ret_val string array variable. Finally, stores
the measured data into the data array.
53 to 55
Applies 0 V from all channels. And transfers the data stored in the data variable to the
save_data subprogram (see Table 3-1). And the subprogram will save the data into the
C:\Agilent\data\ex10.txt file (CSV) and displays the data on a message box.
57 to 60
Displays a message box to show an error message if the error is detected.
Measurement
Result Example
Vth (mV), Id (uA), Status
139, 999.15, NAI
Data save completed.
Do you want to perform measurement again?
3-44
Agilent B1500 Programming Guide, Edition 2
Programming Examples
Multi Channel Sweep Measurements
Multi Channel Sweep Measurements
To perform multi channel sweep measurements, use the following commands.
Function
Command
Parameters
Enables channels
CN
[chnum ... [,chnum] ... ]
Disables channels
CL
[chnum ... [,chnum] ... ]
Sets filter ON/OFF
[FL]
mode[,chnum ... [,chnum] ... ]
Sets series resistor ON/OFF
[SSR]
chnum,mode
Sets integration time
(Agilent B1500 can use
AAD/AIT instead of AV.)
[AV]
number[,mode]
[AAD]
chnum[,type]
[AIT]
type,mode[,N]
Sets sweep source timing
parameter
[WT]
hold,delay
[,sdelay[,tdelay[,mdelay]]]
Sets auto abort function
[WM]
abort[,post]
Sets voltage sweep source
WV
Sets current sweep source
WI
chnum,mode,range,start,stop,step
[,comp[,Pcomp]]
Sets synchronous sweep
source a
WNX
N,chnum,mode,range,start,stop
[,comp[,Pcomp]]
Forces constant voltage
DV
Forces constant current
DI
chnum,range,output
[,comp[,polarity[,crange]]]
Sets voltage measurement
range
[RV]
chnum,range
Sets current measurement
range
[RI]
chnum,range
[RM]
chnum,mode[,rate]
Sets measurement mode
MM
16,chnum[,chnum ... [,chnum] ... ]
Sets SMU operation mode
[CMM]
chnum,mode
Executes measurement
XE
a. The WNX command must be entered after the WV/WI command.
Agilent B1500 Programming Guide, Edition 2
3-45
Programming Examples
Multi Channel Sweep Measurements
NOTE
Sweep sources simultaneously start output by a trigger such as the XE command.
However, if a sweep source sets power compliance or forces logarithmic sweep
current, the sweep sources start output in the order specified by the WNX’s N value.
Then the first output is forced by the channel set by the WI or WV command.
If you use multiple measurement channels, the channels that use the fixed ranging
mode start measurement simultaneously, then other channels start measurement in
the order defined in the MM command. For the Agilent B1500, note that the
high-resolution ADC cannot perform simultaneous measurement.
A program example of a multi channel sweep measurement is shown below. This
example measures the bipolar transistor Ib-Vb and Ic-Vb characteristics.
Table 3-13
Multi Channel Sweep Measurement Example
Sub perform_meas(ByVal B1500 As DirectIO, ByVal t() As Integer)
’1
Dim i As Integer = 0
Dim j As Integer = 0
Dim nop1 As Integer = 11
Dim nop2 As Integer = 1
Dim data(nop2 - 1, nop1 - 1) As String
Dim value As String = "Vb (V), Ib (uA), Tb (sec), Stat_b, Ic (mA), Tc (sec),
Stat_c"
Dim fname As String = "C:\Agilent\data\ex11.txt"
Dim title As String = "Measurement Result"
Dim msg As String = "No error."
Dim err As String = "0"
Dim
Dim
Dim
Dim
Dim
Dim
Dim
Dim
Dim
vc As Double = 3
vb1 As Double = 0.3
vb2 As Double = 0.8
ibcomp As Double = 0.001
pbcomp As Double = 0.001
hold As Double = 0
delay As Double = 0
s_delay As Double = 0
rep As Integer = nop1
’13
Dim
Dim
Dim
Dim
Dim
Dim
ret_val As String()
data1 As String
data2 As String
data3 As String
data4 As String
data5 As String
’23
Line
Description
2 to 11
Declares variables used through the project. And sets the proper values.
13 to 21
Declares variables used to set the source output, and sets the value.
23 to 28
Declares variables used to read the measurement data.
3-46
Agilent B1500 Programming Guide, Edition 2
Programming Examples
Multi Channel Sweep Measurements
Dim
Dim
Dim
Dim
Dim
Dim
Dim
sc(nop1) As Double
md1(nop1) As Double
st1(nop1) As String
tm1(nop1) As Double
md2(nop1) As Double
st2(nop1) As String
tm2(nop1) As Double
’30
B1500.WriteLine("FMT 1,1")
’ ASCII<CRLF EOI> w/sweep source data
B1500.WriteLine("TSC 1")
’ enables time stamp output
B1500.WriteLine("AV 10,1")
’ sets number of samples for 1 data
B1500.WriteLine("FL 1")
’ sets filter on
B1500.WriteLine("MM 16," & t(1) & "," & t(2)) ’16: multi-ch sweep
B1500.WriteLine("CMM" & t(1) & ",1")
’1: compliance side measurement
B1500.WriteLine("CMM" & t(2) & ",1")
’1: compliance side measurement
B1500.WriteLine("RI" & t(1) & ",-17")
’-17: 1 mA fixed range
B1500.WriteLine("RI" & t(2) & ",-19")
’-19: 100 mA fixed range
B1500.WriteLine("WT" & hold & "," & delay & "," & s_delay)
B1500.WriteLine("WM 2,1")
’ stops at any abnormal
B1500.WriteLine("ERR? 1") : err = B1500.Read(True)
If err <> 0 Then B1500.WriteLine("DZ") : GoTo Check_err
’38
B1500.WriteLine("WV" & t(1) & ",1,0," & vb1 & "," & vb2 & "," & nop1 & "," &
ibcomp & "," & pbcomp)
’52
B1500.WriteLine("DV" & t(2) & ",0," & vc & ",0.1")
B1500.WriteLine("DV" & t(0) & ",0,0,0.1") ’out= 0 V, comp= 0.1 A
B1500.WriteLine("TSR")
B1500.WriteLine("XE")
B1500.WriteLine("*OPC?") : rep = B1500.Read(True)
’57
B1500.WriteLine("ERR? 1") : err = B1500.Read(True)
If err <> 0 Then B1500.WriteLine("DZ") : GoTo Check_err
B1500.WriteLine("NUB?") : rep = B1500.Read(True)
If rep <> nop1 * 5 Then B1500.WriteLine("DZ") : GoTo Check_nop
ret_val = B1500.ReadListAsStringArray()
’62
Line
Description
30 to 36
Declares variables used to read the measurement data.
38 to 50
Sets the data output format, time stamp data output mode, A/D converter, SMU filter,
measurement mode, channel measurement mode, and measurement range. Also sets
the timing parameters and sweep mode of the staircase sweep source. And checks if an
error occurred. If an error is detected, forces 0 V and goes to Check_err.
52 to 56
Sets the sweep sources, applies voltage to device, resets time stamp, and performs the
multi channel sweep measurement.
57 to 61
Waits until the measurement is completed, and checks if an error occurred. If an error is
detected, forces 0 V and goes to Check_err. Also checks number of returned data. If it
is not correct, forces 0 V and goes to Check_nop.
62
Stores the returned data into the ret_val string array variable.
Agilent B1500 Programming Guide, Edition 2
3-47
Programming Examples
Multi Channel Sweep Measurements
For i = 0 To nop1 - 1
’64
data1 = ret_val(i * 5)
data2 = ret_val(i * 5 + 1)
data3 = ret_val(i * 5 + 2)
data4 = ret_val(i * 5 + 3)
data5 = ret_val(i * 5 + 4)
data1 = Right(data1, 12) : tm1(i) = Val(data1)
st1(i) = Left(data2, 3)
data2 = Right(data2, 12) : md1(i) = Val(data2)
data3 = Right(data1, 12) : tm2(i) = Val(data3)
st2(i) = Left(data4, 3)
data4 = Right(data4, 12) : md2(i) = Val(data4)
data5 = Right(data5, 12) : sc(i) = Val(data5)
data(j, i) = Chr(13) & Chr(10) & sc(i) & ", " & md1(i) * 1000000 & ", " &
tm1(i) & ", " & st1(i) & ", " & md2(i) * 1000 & ", " & tm2(i) & ", " & st2(i)
Next i
B1500.WriteLine("DZ")
save_data(fname, title, value, data, nop1, nop2, B1500, t)
Exit Sub
Check_err:
B1500.WriteLine("EMG? " & err) : msg = B1500.Read(True)
MsgBox("Instrument error: " & err & Chr(10) & msg, vbOKOnly, "")
Exit Sub
Check_nop:
MsgBox("No. of data: " & rep & " (not " & nop1 * 3 & ")", vbOKOnly, "")
End Sub
Line
’80
’84
’90
Description
64 to 78
Picks the measurement data out and stores it into the data array.
80 to 82
Applies 0 V from all channels and transfers the data stored in the data variable to the
save_data subprogram (see Table 3-1). And the subprogram will save the data into the
C:\Agilent\data\ex11.txt file (CSV) and displays the data on a message box.
84 to 90
Displays a message box to show an error message if the error is detected. Also displays
a message box to show an error message if the number of returned data is not correct.
Measurement
Result Example
Vb (V), Ib (uA), Tb (sec), Stat_b, Ic (mA), Tc (sec), Stat_c
0.3, 0.05, 0.0046, NBI, 0, 0.0046, NDI
0.35, 0.05, 0.0076, NBI, 0, 0.0076, NDI
0.4, 0.05, 0.0106, NBI, 0, 0.0106, NDI
0.45, 0.05, 0.0135, NBI, 0, 0.0135, NDI
0.5, 0.05, 0.0165, NBI, 0, 0.0165, NDI
0.55, 0.1, 0.0195, NBI, 0.01, 0.0195, NDI
0.6, 0.45, 0.0224, NBI, 0.085, 0.0224, NDI
0.65, 2.95, 0.0254, NBI, 0.58, 0.0254, NDI
0.7, 18.45, 0.0284, NBI, 3.72, 0.0284, NDI
0.75, 90.85, 0.0313, NBI, 17.635, 0.0313, NDI
0.8, 290.5, 0.0343, NBI, 50.15, 0.0343, NDI
Data save completed.
Do you want to perform measurement again?
3-48
Agilent B1500 Programming Guide, Edition 2
Programming Examples
Sampling Measurements
Sampling Measurements
To make sampling measurements, use the following commands.
Function
Command
Parameters
Enables Measurement Units
CN
[chnum ... [,chnum] ... ]
Disables Measurement Units
CL
[chnum ... [,chnum] ... ]
Sets Filter ON/OFF
[FL]
mode[,chnum ... [,chnum] ... ]
Sets series resistor ON/OFF
[SSR]
chnum,mode
Sets integration time
(Agilent B1500 can use
AAD/AIT instead of AV.)
[AV]
number[,mode]
[AAD]
chnum[,type]
[AIT]
type,mode[,N]
Sets sampling mode
[ML]
mode
Sets timing parameters
MT
h_bias,interval,points[,h_base]
Sets constant voltage source
MV
ch,range,base,bias[,comp]
Sets constant current source
MI
Clears sampling source setup
[MCC]
[ch[,ch ... [,ch[,ch]] ... ]]
Sets automatic abort function
[MSC]
abort[,post]
Forces constant voltage
[DV]
Forces constant current
[DI]
chnum,range,output
[,comp[,Pcomp]]
Sets voltage measurement range
[RV]
chnum,range
Sets current measurement range
[RI]
chnum,range
[RM]
chnum,mode[,rate]
Sets measurement mode
MM
10,chnum[,chnum ..[,chnum] ..]
Sets SMU measurement mode
[CMM]
chnum,mode
Executes measurement
XE
Agilent B1500 Programming Guide, Edition 2
3-49
Programming Examples
Sampling Measurements
Table 3-14 explains example subprogram that performs linear sampling
measurement. This example measures current that flows to resistors R1 and R2, and
then calculates the resistance.
Table 3-14
Sampling Measurement Example
Sub perform_meas(ByVal B1500 As DirectIO, ByVal t() As Integer)
Dim i As Integer = 0
Dim j As Integer = 0
Dim nop1 As Integer = 30
Dim nop2 As Integer = 1
Dim data(nop2, nop1) As String
Dim value As String = "Index, I1 (mA), R1 (ohm), St1, I2 (mA), R2 (ohm), St2"
Dim fname As String = "C:\Agilent\data\ex12.txt"
Dim title As String = "Sampling Measurement Result"
Dim msg As String = "No error."
Dim err As Integer = 0
Dim
Dim
Dim
Dim
Dim
Dim
Dim
Dim
Dim
Dim
Dim
Dim
Dim
Dim
Dim
Dim
Dim
Dim
Dim
Dim
Dim
Dim
base As Double = 0
bias As Double = 0.1
icomp As Double = 0.1
vlout As Double = 0
ilcomp As Double = 0.1
base_h As Double = 0
bias_h As Double = 0.1
interval As Double = 0.05
mch() As Integer = {t(1), t(2), 0}
range() As Double = {0, 0}
rep As Integer = nop1
ret_val As String()
data1 As String
data2 As String
data3 As String
id(nop1) As Double
d1(nop1) As Double
d2(nop1) As Double
r1(nop1) As Double
r2(nop1) As Double
s1(nop1) As String
s2(nop1) As String
Line
’1
’13
’23
’34
Description
2 to 11
Declares variables used through the project. And sets the proper values.
13 to 22
Declares variables used to set the source output, and sets the value.
23 to 34
Declares variables used to read the measurement data.
3-50
Agilent B1500 Programming Guide, Edition 2
Programming Examples
Sampling Measurements
B1500.WriteLine("FMT 1,1")
B1500.WriteLine("FL 1")
’ sets filter on for all channel
B1500.WriteLine("AAD " & t(1) & ", 1") ’ sets high resolution ADC for t(1)
B1500.WriteLine("AAD " & t(2) & ", 1") ’ sets high resolution ADC for t(2)
B1500.WriteLine("AIT 1,1,2")
’ sets number of averaging samples
B1500.WriteLine("AZ 0")
’ sets auto zero off
’36
B1500.WriteLine("MT " & bias_h & "," & interval & "," & nop1 & "," & base_h)
B1500.WriteLine("MV " & t(1) & ",0," & base & "," & bias & "," & icomp)
’t(1): SMU2 --> High1
B1500.WriteLine("MV " & t(2) & ",0," & base & "," & bias & "," & icomp)
’t(2): SMU4 --> High2
B1500.WriteLine("ERR? 1") : err = B1500.Read(True)
If err <> 0 Then B1500.WriteLine("DZ") : GoTo Check_err
’43
B1500.WriteLine("DV " & t(0) & ",0," & vlout & "," & ilcomp & ", 0")
’t(0): SMU1 --> Low
B1500.WriteLine("MM 10," & mch(0) & "," & mch(1))
B1500.WriteLine("RI " & mch(0) & "," & range(0))
B1500.WriteLine("RI " & mch(1) & "," & range(1))
B1500.WriteLine("TSR")
B1500.WriteLine("XE")
B1500.WriteLine("*OPC?") : rep = B1500.Read(True)
B1500.WriteLine("ERR? 1") : err = B1500.Read(True)
If err <> 0 Then B1500.WriteLine("DZ") : GoTo Check_err
B1500.WriteLine("NUB?") : rep = B1500.Read(True)
If rep <> nop1 * 3 Then B1500.WriteLine("DZ") : GoTo Check_nop
’51
Line
36
37 to 40
41
’56
’59
’61
Description
Sets the data output format. The source output data will be also returned.
Sets the SMU filter and the A/D converter integration time.
Sets the SMU auto zero function off.
43 to 49
Sets the sampling timing parameters and the constant voltage sources. And checks if an
error occurred. If an error is detected, forces 0 V and goes to Check_err.
51 to 55
Applies 0 V to the device low terminal, sets the sampling measurement mode, and sets
the current measurement range.
56 to 58
Resets the time stamp, and perform the sampling measurement.
59 to 60
Forces 0 V and goes to Check_err if an error is detected.
61 to 62
Forces 0 V and goes to Check_nop if the number of returned data is not correct (nop1).
Agilent B1500 Programming Guide, Edition 2
3-51
Programming Examples
Sampling Measurements
ret_val = B1500.ReadListAsStringArray()
’64
For i = 0 To nop1 - 1
data1 = ret_val(i * 3)
data2 = ret_val(i * 3 + 1)
data3 = ret_val(i * 3 + 2)
s1(i) = Left(data2, 3)
s2(i) = Left(data3, 3)
data1 = Right(data1, 12) : id(i) = Val(data1)
data2 = Right(data2, 12) : d1(i) = Val(data2)
data3 = Right(data3, 12) : d2(i) = Val(data3)
r1(i) = Math.Round(bias / d1(i), 3)
r2(i) = Math.Round(bias / d2(i), 3)
data(j, i) = Chr(13) & Chr(10) & id(i) & ", " & d1(i) * 1000 & ", " & r1(i) &
", " & s1(i) & ", " & d2(i) * 1000 & ", " & r2(i) & ", " & s2(i)
Next i
B1500.WriteLine("DZ")
save_data(fname, title, value, data, nop1, nop2, B1500, t)
Exit Sub
’79
Check_err:
B1500.WriteLine("EMG? " & err) : msg = B1500.Read(True)
MsgBox("Instrument error: " & err & Chr(10) & msg, vbOKOnly, "")
Exit Sub
’83
Check_nop:
MsgBox("No. of data: " & rep & " (not " & nop1 * 3 & ")", vbOKOnly, "")
End Sub
’88
Line
Description
64 to 77
Reads the returned data and stores it into the ret_val string array variable. Finally, stores
the measured data into the data array.
79 to 81
Applies 0 V from all channels. And transfers the data stored in the data variable to the
save_data subprogram (see Table 3-1). And the subprogram will save the data into the
C:\Agilent\data\ex12.txt file (CSV) and displays the data on a message box.
83 to 86
Displays a message box to show an error message if the error is detected.
88 to 90
Displays a message box to show an error message if the number of returned data is not
correct (nop1).
3-52
Agilent B1500 Programming Guide, Edition 2
Programming Examples
Sampling Measurements
Measurement
Result Example
Index, I1 (mA), R1 (ohm), St1, I2 (mA), R2 (ohm), St2
1, 10.41, 9.606, NBI, 9.465, 10.565, NDI
2, 10.41, 9.606, NBI, 9.465, 10.565, NDI
3, 10.41, 9.606, NBI, 9.466, 10.564, NDI
4, 10.41, 9.606, NBI, 9.464, 10.566, NDI
5, 10.41, 9.606, NBI, 9.465, 10.565, NDI
6, 10.42, 9.597, NBI, 9.465, 10.565, NDI
7, 10.41, 9.606, NBI, 9.462, 10.569, NDI
8, 10.41, 9.606, NBI, 9.463, 10.567, NDI
9, 10.41, 9.606, NBI, 9.464, 10.566, NDI
10, 10.41, 9.606, NBI, 9.465, 10.565, NDI
11, 10.41, 9.606, NBI, 9.468, 10.562, NDI
12, 10.41, 9.606, NBI, 9.464, 10.566, NDI
13, 10.41, 9.606, NBI, 9.467, 10.563, NDI
14, 10.41, 9.606, NBI, 9.464, 10.566, NDI
15, 10.41, 9.606, NBI, 9.466, 10.564, NDI
16, 10.41, 9.606, NBI, 9.466, 10.564, NDI
17, 10.41, 9.606, NBI, 9.468, 10.562, NDI
18, 10.41, 9.606, NBI, 9.465, 10.565, NDI
19, 10.42, 9.597, NBI, 9.465, 10.565, NDI
20, 10.41, 9.606, NBI, 9.467, 10.563, NDI
21, 10.41, 9.606, NBI, 9.466, 10.564, NDI
22, 10.41, 9.606, NBI, 9.466, 10.564, NDI
23, 10.4, 9.615, NBI, 9.466, 10.564, NDI
24, 10.41, 9.606, NBI, 9.466, 10.564, NDI
25, 10.41, 9.606, NBI, 9.466, 10.564, NDI
26, 10.41, 9.606, NBI, 9.467, 10.563, NDI
27, 10.41, 9.606, NBI, 9.466, 10.564, NDI
28, 10.41, 9.606, NBI, 9.467, 10.563, NDI
29, 10.41, 9.606, NBI, 9.467, 10.563, NDI
30, 10.4, 9.615, NBI, 9.468, 10.562, NDI
Data save completed.
Do you want to perform measurement again?
Agilent B1500 Programming Guide, Edition 2
3-53
Programming Examples
High-Speed Spot C Measurement
High-Speed Spot C Measurement
To perform high-speed spot C measurements, use the following commands.
Function
Command
Parameters
Enables channels
CN
[chnum ... [,chnum] ... ]
Disables channels
CL
[chnum ... [,chnum] ... ]
Sets SMU filter ON/OFF
[FL]
mode[,chnum ... [,chnum] ... ]
Sets SMU series resistor ON/OFF
[SSR]
chnum,mode
Disables SCUU status indicator
[SSL]
chnum,mode
Controls SCUU input-output path
[SSP]
chnum,path
Sets MFCMU A/D converter
[ACT]
mode[,N]
Sets MFCMU measurement mode
[IMP]
mode
Sets AC/DC voltage monitor ON/OFF
[LMN]
mode
Sets MFCMU output frequency
FC
chnum,freq
Forces AC voltage by using MFCMU
ACV
chnum,ac_level
Forces DC voltage by using MFCMU
DCV
chnum,voltage
Forces DC voltage by using SMU
[DV]
Forces DC current by using SMU
[DI]
chnum,range,output
[,comp[,polarity[,crange]]]
Performs capacitance measurement
TC
chnum,mode[,range]
TTC
chnum,mode[,range]
Resets the time stamp
TSR
Returns the time stamp at this time
TSQ
You can use the above commands regardless of the measurement mode (MM
command settings). The TTC command returns the time data and the measurement
data.
3-54
Agilent B1500 Programming Guide, Edition 2
Programming Examples
High-Speed Spot C Measurement
A program example of a high-speed spot capacitance measurement is shown below.
This example measures MOSFET gate-substrate capacitance by using the multi
frequency capacitance measurement unit (MFCMU) and a SMU/CMU unify unit
(SCUU). This program uses the TTC command.
Before performing the capacitance (impedance) measurement, you need to perform
the phase compensation and data correction. See “Data Correction” on page 3-59.
Table 3-15
High-Speed Spot C Measurement Example
Sub perform_meas(ByVal B1500 As DirectIO, ByVal t() As Integer)
’1
Dim i As Integer = 0
Dim j As Integer = 0
Dim nop1 As Integer = 2
Dim nop2 As Integer = 1
Dim data(nop2, nop1) As String
Dim value As String = "Cp (pF), C_st, G (uS), G_st, OSC (mV), Osc_st, DC (V),
Dc_st, Time (s)"
Dim fname As String = "C:\Agilent\data\ex13.txt"
Dim title As String = "Measurement Result"
Dim msg As String = "No error."
Dim err As String = "0"
Dim
Dim
Dim
Dim
Dim
Dim
Dim
Dim
Dim
Dim
Dim
Dim
Dim
Dim
freq As Double = 1000000
ref_cp As Double = 0
ref_g As Double = 0
osc_level As Double = 0.03
dc_bias As Double = -5
range As Integer = 0
ret_val As String()
tend As String()
md(nop1) As Double
st(nop1) As String
mon(nop1) As Double
st_mon(nop1) As String
mt As Double
stime As Double
’13
B1500.WriteLine("FMT 1")
’28
B1500.WriteLine("DV " & t(0) & ",0,0,0.1,0")
B1500.WriteLine("DV " & t(2) & ",0,0,0.1,0")
Line
’t(0): SMU1 --> drain
’t(2): SMU4 --> source
Description
2 to 11
Declares variables used through the project. And sets the proper values.
13 to 26
Declares variables and sets the value.
28
30 to 31
Sets the data output format.
Applies 0 V to the drain and source terminals.
Agilent B1500 Programming Guide, Edition 2
3-55
Programming Examples
High-Speed Spot C Measurement
Dim cmu_ch As Integer = 10
B1500.WriteLine("CN " & cmu_ch)
B1500.WriteLine("SSP " & cmu_ch & ", 4")
B1500.WriteLine("ACT 0, 2")
’CMU: ch10
’CMUH --> gate, CMUL --> substrate
’SCUU connection to CMU
’CMU integration, auto, 2 samples
Dim rbx As Integer
rbx = MsgBox("Do you want to perform Phase compensation?", vbYesNo, "")
If rbx = vbYes Then
MsgBox("Open measurement terminal. Then click OK.", vbOKOnly, "")
Console.WriteLine("Wait a minute . . ." & Chr(10))
B1500.Timeout = 60000
’B1500 timeout = 60 seconds
B1500.WriteLine("ADJ " & cmu_ch & ",1")
B1500.WriteLine("ADJ? " & cmu_ch) : err = B1500.Read(True)
If err <> 0 Then B1500.WriteLine("ERR? 1") : err = B1500.Read(True) :
B1500.WriteLine("DZ") : GoTo Check_err
End If
B1500.WriteLine("FC " & cmu_ch & "," & freq)
B1500.WriteLine("ACV " & cmu_ch & "," & osc_level)
rbx = MsgBox("Do you want to perform Open correction?", vbYesNo, "")
If rbx = vbYes Then
B1500.WriteLine("CLCORR " & cmu_ch & ",2")
MsgBox("Open measurement terminal. Then click OK.", vbOKOnly, "")
Console.WriteLine("Wait a minute . . ." & Chr(10))
B1500.WriteLine("DCORR " & cmu_ch & ",1,100," & ref_cp & "," & ref_g)
B1500.WriteLine("CORR? " & cmu_ch & ",1") : err = B1500.Read(True)
If err <> 0 Then B1500.WriteLine("ERR? 1") : err = B1500.Read(True) :
B1500.WriteLine("DZ") : GoTo Check_err
B1500.WriteLine("CORRST " & cmu_ch & ",1,1")
’open correction ON
B1500.WriteLine("CORRST " & cmu_ch & ",2,0")
’short correction OFF
B1500.WriteLine("CORRST " & cmu_ch & ",3,0")
’load correction OFF
End If
MsgBox("Connect DUT.
Line
’33
’38
’49
’52
’63
Then click OK.", vbOKOnly, "")
Description
33 to 36
Defines the channel number of the MFCMU, enables the MFCMU, makes the SCUU
connection path, and sets the A/D converter of the MFCMU.
38 to 47
Displays a message box that asks if you perform the phase compensation. If you click
Yes, the phase compensation will be performed. It will take about 30 seconds.
49 to 50
Sets the frequency and the oscillator level of the MFCMU output signal.
52 to 63
Displays a message box that asks if you perform the open correction. If you click Yes,
the open correction will be performed. It does not need a long time. The short
correction and the load correction are not performed in this example.
65
Displays a message box that asks you to connect the device to the measurement
terminal. Then the CMUH and CMUL must be connected to the gate terminal and the
substrate terminal respectively.
3-56
Agilent B1500 Programming Guide, Edition 2
Programming Examples
High-Speed Spot C Measurement
B1500.WriteLine("DCV " & cmu_ch & "," & dc_bias)
’Forces DC bias
’66
B1500.WriteLine("IMP 100")
’Sets MFCMU measurement mode
B1500.WriteLine("LMN 1")
’AC/DC monitor data output ON
B1500.WriteLine("ERR? 1") : err = B1500.Read(True)
If err <> 0 Then B1500.WriteLine("DZ") : GoTo Check_err
B1500.WriteLine("TSR")
’Resets time stamp
B1500.WriteLine("TTC " & cmu_ch & "," & range)
’High speed spot C measurement
B1500.WriteLine("TSQ")
’Returns time data
ret_val = B1500.ReadListAsStringArray()
’75
tend = B1500.ReadListAsStringArray()
Dim data1 As String
data1 = tend(0)
data1 = Right(data1, 12) : stime = Val(data1)
data1 = ret_val(0)
data1 = Right(data1, 12) : mt = Val(data1) : mt = stime - mt ’Measurement time
data1 = ret_val(1) : st(0) = Left(data1, 3)
data1 = Right(data1, 12) : md(0) = Val(data1)
data1 = ret_val(2) : st(1) = Left(data1, 3)
data1 = Right(data1, 12) : md(1) = Val(data1)
data1 = ret_val(3) : st_mon(0) = Left(data1, 3)
data1 = Right(data1, 12) : mon(0) = Val(data1)
data1 = ret_val(4) : st_mon(1) = Left(data1, 3)
data1 = Right(data1, 12) : mon(1) = Val(data1)
data(j, i) = Chr(13) & Chr(10) & md(0) * 1000000000000.0 & "," & st(0) & "," &
md(1) * 1000000.0 & "," & st(1)
data(j, i) = data(j, i) & "," & mon(0) * 1000 & "," & st_mon(0) & "," & mon(1) &
"," & st_mon(1) & "," & mt
B1500.WriteLine("DZ")
save_data(fname, title, value, data, nop1, nop2, B1500, t)
Exit Sub
Check_err:
B1500.WriteLine("EMG? " & err) : msg = B1500.Read(True)
MsgBox("Instrument error: " & err & Chr(10) & msg, vbOKOnly, "")
Exit Sub
’93
’97
End Sub
Line
Description
66 to 73
Sets the measurement condition, resets the time stamp, and performs the high-speed
spot C measurement.
75 to 91
Stores the returned data into the ret_val string array variable. Finally, stores the
measured data into the data array.
93 to 95
Applies 0 V from all channels. And transfers the data stored in the data variable to the
save_data subprogram (see Table 3-1). And the subprogram will save the data into the
C:\Agilent\data\ex13.txt file (CSV) and displays the data on a message box.
97 to 100
Displays a message box to show an error message if the error is detected.
Agilent B1500 Programming Guide, Edition 2
3-57
Programming Examples
High-Speed Spot C Measurement
Measurement
Result Example
Cp (pF), C_st, G (uS), G_st, OSC (mV), Osc_st, DC (V), Dc_st, Time
(s)
4.96641,NJC,26.1348,NJY,28.7814,NJV,4.7239,NJV,0.0146
Data save completed.
Do you want to perform measurement again?
Table 3-16
Phase Compensation and Data Correction Commands for MFCMU
Function
Command
Parameters
Sets the phase compensation
mode, auto or manual
ADJ
slot,mode
Performs phase
compensation data
measurement
ADJ?
slot
Clears the frequency list for
data correction
CLCORR
slot,mode
Adds the specified frequency
to the frequency list
CORRL
slot,freq
Returns the frequency
defined in the frequency list
CORRL?
slot[,index]
Sets the reference value of
open/short/load standard
DCORR
slot,corr,mode,primary,secondary
Returns the reference value
of the specified standard
DCORR?
slot,corr
Performs the specified
correction (open, short, or
load) data measurement
CORR?
slot,corr
Sets the specified correction
ON or OFF
CORRST
slot,corr,state
Returns the status ON or
OFF of the specified
correction
CORRST?
slot,corr
3-58
Agilent B1500 Programming Guide, Edition 2
Programming Examples
High-Speed Spot C Measurement
Data Correction
Table 3-16 lists the Agilent B1500A FLEX commands used for the phase
compensation and the open/short/load correction. Before performing the
capacitance (impedance) measurement, perform the phase compensation to adjust
the phase zero, and perform the corrections you desire.
NOTE
Before executing CORR? command
•
Execute DCORR command to set the calibration value or reference value of the
open/short/load standard.
•
Execute CLCORRL and CORRL commands to define the MFCMU output
frequency for the data correction.
•
Execute ACV command to set the AC signal level.
These setups must be done before executing the CORR? command.
•
Phase Compensation
1. Open the measurement terminals at the end of the device side.
2. Execute ADJ command to set the compensation mode to manual.
3. Execute ADJ? command to perform phase compensation data measurement.
This operation will take about 30 seconds.
•
Open Correction
1. Connect the open standard. Or open the measurement terminals at the end of
the device side.
2. Execute CORR? command to perform open correction data measurement.
3. Execute CORRST command to set the open correction ON.
•
Short Correction
1. Connect the short standard. Or connect the measurement terminals together
at the end of the device side.
2. Execute CORR? command to perform short correction data measurement.
3. Execute CORRST command to set the short correction ON.
•
Load Correction
1. Connect the load standard.
2. Execute CORR? command to perform load correction data measurement.
3. Execute CORRST command to set the load correction ON.
Agilent B1500 Programming Guide, Edition 2
3-59
Programming Examples
Spot C Measurements
Spot C Measurements
To perform capacitance spot measurements, use the following commands.
Function
Measurement
Result Example
Command
Parameters
Enables channels
CN
[chnum ... [,chnum] ... ]
Disables channels
CL
[chnum ... [,chnum] ... ]
Sets SMU filter ON/OFF
[FL]
mode[,chnum ... [,chnum] ... ]
Sets SMU series resistor ON/OFF
[SSR]
chnum,mode
Disables SCUU status indicator
[SSL]
chnum,mode
Controls SCUU input-output path
[SSP]
chnum,path
Sets MFCMU A/D converter
[ACT]
mode[,N]
Sets MFCMU measurement mode
[IMP]
mode
Sets AC/DC voltage monitor ON/OFF
[LMN]
mode
Sets MFCMU output frequency
FC
chnum,freq
Forces AC voltage by using MFCMU
ACV
chnum,ac_level
Forces DC voltage by using MFCMU
DCV
chnum,voltage
Forces DC voltage by using SMU
[DV]
Forces DC current by using SMU
[DI]
chnum,range,output
[,comp[,polarity[,crange]]]
Sets MFCMU measurement range
[RC]
chnum,mode[,range]
Sets measurement mode
MM
17,chnum
Executes measurement
XE
Cp (pF), C_st, G (uS), G_st, OSC (mV), Osc_st, DC (V), Dc_st, Time
(s)
4.96981,NJC,26.1577,NJY,28.7737,NJV,4.72556,NJV,0.0259
Data save completed.
Do you want to perform measurement again?
3-60
Agilent B1500 Programming Guide, Edition 2
Programming Examples
Spot C Measurements
Table 3-17 explains example subprogram that performs capacitance spot
measurement. This example measures MOSFET gate-substrate capacitance by using
the multi frequency capacitance measurement unit (MFCMU) and a SMU/CMU
unify unit (SCUU).
Before performing the capacitance (impedance) measurement, you need to perform
the phase compensation and data correction. See “Data Correction” on page 3-59.
Table 3-17
Spot C Measurement Example
Sub perform_meas(ByVal B1500 As DirectIO, ByVal t() As Integer)
’1
Dim i As Integer = 0
Dim j As Integer = 0
Dim nop1 As Integer = 2
Dim nop2 As Integer = 1
Dim data(nop2, nop1) As String
Dim value As String = "Cp (pF), C_st, G (uS), G_st, OSC (mV), Osc_st, DC (V),
Dc_st, Time (s)"
Dim fname As String = "C:\Agilent\data\ex14.txt"
Dim title As String = "Measurement Result"
Dim msg As String = "No error."
Dim err As String = "0"
Dim
Dim
Dim
Dim
Dim
Dim
Dim
Dim
Dim
Dim
Dim
Dim
freq As Double = 1000000
ref_cp As Double = 0
ref_g As Double = 0
osc_level As Double = 0.03
dc_bias As Double = -5
range As Integer = 0
ret_val As String()
md(nop1) As Double
st(nop1) As String
mon(nop1) As Double
st_mon(nop1) As String
mt As Double
’13
B1500.WriteLine("FMT 1")
B1500.WriteLine("TSC 1")
B1500.WriteLine("DV " & t(0) & ",0,0,0.1,0")
B1500.WriteLine("DV " & t(2) & ",0,0,0.1,0")
Line
’26
’enables time stamp output
’t(0): SMU1 --> drain
’t(2): SMU4 --> source
Description
2 to 11
Declares variables used through the project. And sets the proper values.
13 to 24
Declares variables and sets the value.
26 to 27
Sets the data output format. And enables the time stamp output.
28 to 29
Applies 0 V to the drain and source terminals.
Agilent B1500 Programming Guide, Edition 2
3-61
Programming Examples
Spot C Measurements
Dim cmu_ch As Integer = 10
B1500.WriteLine("CN " & cmu_ch)
B1500.WriteLine("SSP " & cmu_ch & ", 4")
B1500.WriteLine("ACT 0, 2")
’CMU: ch10
’CMUH --> gate, CMUL --> substrate
’SCUU connection to CMU
’CMU integration, auto, 2 samples
Dim rbx As Integer
rbx = MsgBox("Do you want to perform Phase compensation?", vbYesNo, "")
If rbx = vbYes Then
MsgBox("Open measurement terminal. Then click OK.", vbOKOnly, "")
Console.WriteLine("Wait a minute . . ." & Chr(10))
B1500.Timeout = 60000
’B1500 timeout = 60 seconds
B1500.WriteLine("ADJ " & cmu_ch & ",1")
B1500.WriteLine("ADJ? " & cmu_ch) : err = B1500.Read(True)
If err <> 0 Then B1500.WriteLine("ERR? 1") : err = B1500.Read(True) :
B1500.WriteLine("DZ") : GoTo Check_err
End If
B1500.WriteLine("FC " & cmu_ch & "," & freq)
B1500.WriteLine("ACV " & cmu_ch & "," & osc_level)
rbx = MsgBox("Do you want to perform Open correction?", vbYesNo, "")
If rbx = vbYes Then
B1500.WriteLine("CLCORR " & cmu_ch & ",2")
MsgBox("Open measurement terminal. Then click OK.", vbOKOnly, "")
Console.WriteLine("Wait a minute . . ." & Chr(10))
B1500.WriteLine("DCORR " & cmu_ch & ",1,100," & ref_cp & "," & ref_g)
B1500.WriteLine("CORR? " & cmu_ch & ",1") : err = B1500.Read(True)
If err <> 0 Then B1500.WriteLine("ERR? 1") : err = B1500.Read(True) :
B1500.WriteLine("DZ") : GoTo Check_err
B1500.WriteLine("CORRST " & cmu_ch & ",1,1")
’open correction ON
B1500.WriteLine("CORRST " & cmu_ch & ",2,0")
’short correction OFF
B1500.WriteLine("CORRST " & cmu_ch & ",3,0")
’load correction OFF
End If
MsgBox("Connect DUT.
Line
’31
’36
’47
’50
’61
Then click OK.", vbOKOnly, "")
Description
31 to 34
Defines the channel number of the MFCMU, enables the MFCMU, makes the SCUU
connection path, and sets the A/D converter of the MFCMU.
36 to 45
Displays a message box that asks if you perform the phase compensation. If you click
Yes, the phase compensation will be performed. It will take about 30 seconds.
47 to 48
Sets the frequency and the oscillator level of the MFCMU output signal.
50 to 61
Displays a message box that asks if you perform the open correction. If you click Yes,
the open correction will be performed. It does not need a long time. The short
correction and the load correction are not performed in this example.
63
Displays a message box that asks you to connect the device to the measurement
terminal. Then the CMUH and CMUL must be connected to the gate terminal and the
substrate terminal respectively.
3-62
Agilent B1500 Programming Guide, Edition 2
Programming Examples
Spot C Measurements
B1500.WriteLine("DCV " & cmu_ch & "," & dc_bias)
’Forces DC bias
’64
B1500.WriteLine("MM 17," & cmu_ch)
’Sets measurement mode
B1500.WriteLine("IMP 100")
’Sets MFCMU measurement mode
B1500.WriteLine("LMN 1")
’AC/DC monitor data output ON
B1500.WriteLine("RC " & cmu_ch & "," & range)
’Sets measurement range
B1500.WriteLine("ERR? 1") : err = B1500.Read(True)
If err <> 0 Then B1500.WriteLine("DZ") : GoTo Check_err
B1500.WriteLine("TSR")
’Resets time stamp
B1500.WriteLine("XE")
’Performs spot C measurement
B1500.WriteLine("*OPC?") : err = B1500.Read(True)
B1500.WriteLine("ERR? 1") : err = B1500.Read(True)
If err <> 0 Then B1500.WriteLine("DZ") : GoTo Check_err
ret_val = B1500.ReadListAsStringArray()
Dim data1 As String
data1 = ret_val(0)
data1 = Right(data1, 12) : mt = Val(data1)
data1 = ret_val(1) : st(0) = Left(data1, 3)
data1 = Right(data1, 12) : md(0) = Val(data1)
data1 = ret_val(2) : st(1) = Left(data1, 3)
data1 = Right(data1, 12) : md(1) = Val(data1)
data1 = ret_val(3) : st_mon(0) = Left(data1, 3)
data1 = Right(data1, 12) : mon(0) = Val(data1)
data1 = ret_val(4) : st_mon(1) = Left(data1, 3)
data1 = Right(data1, 12) : mon(1) = Val(data1)
data(j, i) = Chr(13) & Chr(10) & md(0) * 1000000000000.0 & "," & st(0)
data(j, i) = data(j, i) & "," & md(1) * 1000000.0 & "," & st(1)
data(j, i) = data(j, i) & "," & mon(0) * 1000 & "," & st_mon(0)
data(j, i) = data(j, i) & "," & mon(1) & "," & st_mon(1) & "," & mt
’77
B1500.WriteLine("DZ")
save_data(fname, title, value, data, nop1, nop2, B1500, t)
Exit Sub
’94
Check_err:
B1500.WriteLine("EMG? " & err) : msg = B1500.Read(True)
MsgBox("Instrument error: " & err & Chr(10) & msg, vbOKOnly, "")
Exit Sub
End Sub
’98
Line
Description
64 to 75
Sets the measurement condition, resets the time stamp, and performs the measurement.
And checks if an error occurred. If an error is detected, forces 0 V and goes to Check_err.
77 to 92
Stores the returned data into the ret_val string array variable. Finally, stores the measured
data into the data array.
94 to 96
Applies 0 V from all channels. And transfers the data stored in the data variable to the
save_data subprogram (see Table 3-1). And the subprogram will save the data into the
C:\Agilent\data\ex14.txt file (CSV) and displays the data on a message box.
98 to 101
Displays a message box to show an error message if the error is detected.
Agilent B1500 Programming Guide, Edition 2
3-63
Programming Examples
CV Sweep Measurements
CV Sweep Measurements
To perform capacitance-voltage (CV) sweep measurements, use the following
commands.
Function
Command
Parameters
Enables channels
CN
[chnum ... [,chnum] ... ]
Disables channels
CL
[chnum ... [,chnum] ... ]
Sets SMU filter ON/OFF
[FL]
mode[,chnum ... [,chnum] ... ]
Sets SMU series resistor ON/OFF
[SSR]
chnum,mode
Disables SCUU status indicator
[SSL]
chnum,mode
Controls SCUU input-output path
[SSP]
chnum,path
Sets MFCMU A/D converter
[ACT]
mode[,N]
Sets MFCMU measurement mode
[IMP]
mode
Sets AC/DC voltage monitor
ON/OFF
[LMN]
mode
Sets MFCMU output frequency
FC
chnum,freq
Forces AC voltage by using MFCMU
ACV
chnum,level
Sets CV sweep timing parameter
WTDCV
hold,delay
[,sdelay[,tdelay[,mdelay]]]
Sets auto abort function
[WMDCV]
abort[,post]
Sets voltage sweep source
WDCV
chnum,mode,start,stop,step
Forces constant voltage
[DV]
Forces constant current
[DI]
chnum,range,output
[,comp[,polarity[,crange]]]
Sets MFCMU measurement range
[RC]
chnum,mode[,range]
Sets measurement mode
MM
18,chnum
Executes measurement
XE
3-64
Agilent B1500 Programming Guide, Edition 2
Programming Examples
CV Sweep Measurements
Table 3-18 explains example subprogram that performs capacitance-voltage (CV)
sweep measurement. This example measures MOSFET gate-substrate capacitance
by using the multi frequency capacitance measurement unit (MFCMU) and a
SMU/CMU unify unit (SCUU).
Before performing the capacitance (impedance) measurement, you need to perform
the phase compensation and data correction. See “Data Correction” on page 3-59.
Table 3-18
CV Sweep Measurement Example
Sub perform_meas(ByVal B1500 As DirectIO, ByVal t() As Integer)
’1
Dim i As Integer = 0
Dim j As Integer = 0
Dim nop1 As Integer = 21
Dim nop2 As Integer = 1
Dim data(nop2, nop1) As String
Dim value As String = "Vg (V), Cp (pF), C_st, G (uS), G_st, OSC (mV), Osc_st, DC
(V), Dc_st, Time (s)"
Dim fname As String = "C:\Agilent\data\ex15.txt"
Dim title As String = "CV Sweep Measurement Result"
Dim msg As String = "No error."
Dim err As String = "0"
Dim freq As Double = 1000000
’12
Dim ref_cp As Double = 0
Dim ref_g As Double = 0
Dim osc_level As Double = 0.03
Dim vg1 As Double = -5
Dim vg2 As Double = 5
Dim hold As Double = 0
Dim delay As Double = 0
Dim s_delay As Double = 0
Dim range As Integer = 0
Dim rep As Integer = nop1
Dim sc(nop1) As Double
Dim md(nop1 * 2) As Double
Dim st(nop1 * 2) As String
Dim mon(nop1 * 2) As Double
Dim st_mon(nop1 * 2) As String
Dim tm(nop1) As Double
Dim ret_val As String()
B1500.WriteLine("FMT 1,1")
B1500.WriteLine("TSC 1")
B1500.WriteLine("DV " & t(0) & ",0,0,0.1,0")
B1500.WriteLine("DV " & t(2) & ",0,0,0.1,0")
Line
’31
’enables time stamp output
’t(0): SMU1 --> drain
’t(2): SMU4 --> source
Description
2 to 11
Declares variables used through the project. And sets the proper values.
12 to 29
Declares variables and sets the value.
31 to 32
Sets the data output format (data with source data). And enables the time stamp output.
33 to 34
Applies 0 V to the drain and source terminals.
Agilent B1500 Programming Guide, Edition 2
3-65
Programming Examples
CV Sweep Measurements
Dim cmu_ch As Integer = 10
B1500.WriteLine("CN " & cmu_ch)
B1500.WriteLine("SSP " & cmu_ch & ", 4")
B1500.WriteLine("ACT 0, 2")
’CMU: ch10
’CMUH --> gate, CMUL --> substrate
’SCUU connection to CMU
’CMU integration, auto, 2 samples
Dim rbx As Integer
rbx = MsgBox("Do you want to perform Phase compensation?", vbYesNo, "")
If rbx = vbYes Then
MsgBox("Open measurement terminal. Then click OK.", vbOKOnly, "")
Console.WriteLine("Wait a minute . . ." & Chr(10))
B1500.Timeout = 60000
’B1500 timeout = 60 seconds
B1500.WriteLine("ADJ " & cmu_ch & ",1")
B1500.WriteLine("ADJ? " & cmu_ch) : err = B1500.Read(True)
If err <> 0 Then B1500.WriteLine("ERR? 1") : err = B1500.Read(True) :
B1500.WriteLine("DZ") : GoTo Check_err
End If
B1500.WriteLine("FC " & cmu_ch & "," & freq)
B1500.WriteLine("ACV " & cmu_ch & "," & osc_level)
rbx = MsgBox("Do you want to perform Open correction?", vbYesNo, "")
If rbx = vbYes Then
B1500.WriteLine("CLCORR " & cmu_ch & ",2")
MsgBox("Open measurement terminal. Then click OK.", vbOKOnly, "")
Console.WriteLine("Wait a minute . . ." & Chr(10))
B1500.WriteLine("DCORR " & cmu_ch & ",1,100," & ref_cp & "," & ref_g)
B1500.WriteLine("CORR? " & cmu_ch & ",1") : err = B1500.Read(True)
If err <> 0 Then B1500.WriteLine("ERR? 1") : err = B1500.Read(True) :
B1500.WriteLine("DZ") : GoTo Check_err
B1500.WriteLine("CORRST " & cmu_ch & ",1,1")
’open correction ON
B1500.WriteLine("CORRST " & cmu_ch & ",2,0")
’short correction OFF
B1500.WriteLine("CORRST " & cmu_ch & ",3,0")
’load correction OFF
End If
MsgBox("Connect DUT.
Line
’36
’41
’52
’55
’66
Then click OK.", vbOKOnly, "")
Description
36 to 39
Defines the channel number of the MFCMU, enables the MFCMU, makes the SCUU
connection path, and sets the A/D converter of the MFCMU.
41 to 50
Displays a message box that asks if you perform the phase compensation. If you click
Yes, the phase compensation will be performed. It will take about 30 seconds.
52 to 53
Sets the frequency and the oscillator level of the MFCMU output signal.
55 to 66
Displays a message box that asks if you perform the open correction. If you click Yes,
the open correction will be performed. It does not need a long time. The short
correction and the load correction are not performed in this example.
68
Displays a message box that asks you to connect the device to the measurement
terminal. Then the CMUH and CMUL must be connected to the gate terminal and the
substrate terminal respectively.
3-66
Agilent B1500 Programming Guide, Edition 2
Programming Examples
CV Sweep Measurements
B1500.WriteLine("WMDCV 2, 1")
’69
B1500.WriteLine("WTDCV " & hold & "," & delay & "," & s_delay)
B1500.WriteLine("WDCV " & cmu_ch & ",1," & vg1 & "," & vg2 & "," & nop1)
B1500.WriteLine("MM 18," & cmu_ch)
’Sets measurement mode
’72
B1500.WriteLine("IMP 100")
’Sets MFCMU measurement mode
B1500.WriteLine("LMN 1")
’AC/DC monitor data output ON
B1500.WriteLine("RC " & cmu_ch & "," & range)
’Sets measurement range
B1500.WriteLine("ERR? 1") : err = B1500.Read(True)
If err <> 0 Then B1500.WriteLine("DZ") : GoTo Check_err
B1500.WriteLine("TSR")
’Resets time stamp
B1500.WriteLine("XE")
’Performs CV Sweep measurement
B1500.WriteLine("*OPC?") : rep = B1500.Read(True)
’80
B1500.WriteLine("ERR? 1") : err = B1500.Read(True)
If err <> 0 Then B1500.WriteLine("DZ") : GoTo Check_err
B1500.WriteLine("NUB?") : rep = B1500.Read(True)
If rep <> nop1 * 6 Then B1500.WriteLine("DZ") : GoTo Check_nop
ret_val =
Dim data1
For i = 0
data1 =
data1 =
data1 =
data1 =
data1 =
data1 =
data1 =
data1 =
data1 =
data1 =
data(j,
data(j,
data(j,
data(j,
data(j,
data(j,
Next i
B1500.ReadListAsStringArray()
’86
As String
To nop1 - 1
ret_val(i * 6) : data1 = Right(data1, 12) : tm(i) = Val(data1)
ret_val(i * 6 + 1) : st(i * 2) = Left(data1, 3)
Right(data1, 12) : md(i * 2) = Val(data1)
ret_val(i * 6 + 2) : st(i * 2 + 1) = Left(data1, 3)
Right(data1, 12) : md(i * 2 + 1) = Val(data1)
ret_val(i * 6 + 3) : st_mon(i * 2) = Left(data1, 3)
Right(data1, 12) : mon(i * 2) = Val(data1)
ret_val(i * 6 + 4) : st_mon(i * 2 + 1) = Left(data1, 3)
Right(data1, 12) : mon(i * 2 + 1) = Val(data1)
ret_val(i * 6 + 5) : data1 = Right(data1, 12) : sc(i) = Val(data1)
i) = Chr(13) & Chr(10) & sc(i) & "," & md(i * 2) * 1000000000000.0
i) = data(j, i) & "," & st(i * 2)
i) = data(j, i) & "," & md(i * 2 + 1) * 1000000.0 & "," & st(i * 2 + 1)
i) = data(j, i) & "," & mon(i * 2) * 1000 & "," & st_mon(i * 2)
i) = data(j, i) & "," & mon(i * 2 + 1) & "," & st_mon(i * 2 + 1)
i) = data(j, i) & "," & tm(i)
’105
Line
Description
69
Sets the automatic abort function to ON, and sets the post measurement output value to vg1.
70
Sets the CV sweep timing parameters.
71
Sets the CV sweep DC bias output.
72 to 79
Sets the measurement condition, resets the time stamp, and performs the measurement.
80 to 84
Waits until the measurement is completed. After that, if an error is detected, forces 0 V and
goes to Check_err. Also if the number of returned data is not correct, forces 0 V and goes to
Check_nop.
86 to 105
Stores the returned data into the ret_val string array variable. Finally, stores the measured
data into the data array.
Agilent B1500 Programming Guide, Edition 2
3-67
Programming Examples
CV Sweep Measurements
B1500.WriteLine("DZ")
save_data(fname, title, value, data, nop1, nop2, B1500, t)
Exit Sub
’107
Check_err:
B1500.WriteLine("EMG? " & err) : msg = B1500.Read(True)
MsgBox("Instrument error: " & err & Chr(10) & msg, vbOKOnly, "")
Exit Sub
’111
Check_nop:
MsgBox("No. of data: " & rep & " (not " & nop1 * 6 & ")", vbOKOnly, "")
’116
End Sub
Line
Description
107 to 109
Applies 0 V from all channels. And transfers the data stored in the data variable to the
save_data subprogram (see Table 3-1). And the subprogram will save the data into the
C:\Agilent\data\ex15.txt file (CSV) and displays the data on a message box.
111 to 114
Displays a message box to show an error message if the error is detected.
116 to 117
Displays a message box to show an error message if the number of returned data is not
correct.
Measurement
Result Example
Vg (V), Cp (pF), C_st, G (uS), G_st, OSC (mV), Osc_st, DC (V),
Dc_st, Time (s)
-5,4.96677,NJC,26.155,NJY,28.7732,NJV,-4.72468,NJV,0.0547
-4.5,4.66524,NJC,26.3993,NJY,28.6384,NJV,-4.2384,NJV,0.0884
-4,4.2986,NJC,26.2738,NJY,28.4891,NJV,-3.75442,NJV,0.1228
-3.5,3.88182,NJC,25.5785,NJY,28.3222,NJV,-3.27358,NJV,0.1535
-3,3.43272,NJC,24.1992,NJY,28.1426,NJV,-2.79417,NJV,0.1878
-2.5,2.99286,NJC,21.9946,NJY,27.9503,NJV,-2.31792,NJV,0.2294
-2,2.57856,NJC,18.7458,NJY,27.7505,NJV,-1.84498,NJV,0.2709
-1.5,2.20793,NJC,14.2867,NJY,27.5502,NJV,-1.37609,NJV,0.3125
-1,1.92563,NJC,7.57546,NJY,27.3772,NJV,-0.91155,NJV,0.3541
-0.5,1.79915,NJC,-1.83967,NJY,27.494,NJV,-0.45241,NJV,0.3957
0,1.77613,NJC,-2.50329,NJY,27.4588,NJV,0.0041,NJV,0.4375
0.5,1.78246,NJC,-2.73976,NJY,27.488,NJV,0.46025,NJV,0.4789
1,1.7831,NJC,-2.66401,NJY,27.6511,NJV,0.92066,NJV,0.5205
1.5,1.78149,NJC,-2.52984,NJY,27.8257,NJV,1.38437,NJV,0.5621
2,1.77384,NJC,-2.39091,NJY,27.9928,NJV,1.85152,NJV,0.6037
2.5,1.77054,NJC,-2.22722,NJY,28.1473,NJV,2.32111,NJV,0.6453
3,1.76359,NJC,-2.03388,NJY,28.283,NJV,2.79339,NJV,0.6867
3.5,1.75959,NJC,-1.58516,NJY,28.3958,NJV,3.26736,NJV,0.7281
4,1.75883,NJC,-0.542666,NJY,28.481,NJV,3.74189,NJV,0.7697
4.5,1.73431,NJC,1.73765,NJY,28.5416,NJV,4.2182,NJV,0.8113
5,1.60909,NJC,6.23405,NJY,28.5737,NJV,4.69593,NJV,0.8529
Data save completed.
Do you want to perform measurement again?
3-68
Agilent B1500 Programming Guide, Edition 2
Programming Examples
Using Program Memory
Using Program Memory
The program memory can store approximately 2,000 programs or 40,000
commands. Storing programs and executing them will improve the program
execution speed. The following commands are available to use program memory.
Command
ST and END
Function and Syntax
Stores the program in the memory.
ST pnum;command[ ... [;command] ..];END
or
ST pnum
[command]
:
[command]
END
[SCR]
Scratches the program.
SCR [pnum]
[LST?]
Gets a catalog of program numbers or a specific program listing
(up to 3000 commands).
LST? [pnum[,index[,size]]]
DO
Executes specified programs.
DO pnum[,pnum ... [,pnum] ...]
RU
Executes programs sequentially.
RU start,stop
[PA]
Pauses command execution or internal memory program
execution.
PA [wait]
[VAR]
Defines an internal memory variable, and sets the value.
VAR Type,N,Value
[VAR?]
Reads the value of the internal memory variable.
VAR? Type,N
Agilent B1500 Programming Guide, Edition 2
3-69
Programming Examples
Using Program Memory
Table 3-19 and Table 3-20 show the example program that uses the internal program
memory, and does the following:
•
stores a high-speed spot measurement program in the memory 1, and displays it.
•
stores a pulsed spot measurement program in the memory 2, and displays it.
•
executes the internal memory program 1 and 2.
•
displays the measurement results on the console window.
The example program shown in Table 3-20 uses the internal variables available for
the internal program memory. The program code is given as the replaceable code of
the lines 13 to 39 shown in Table 3-19. To run the program, delete the lines 13 to 39
from the program of Table 3-19, and insert the program lines 1 to 37 of Table 3-20.
Also insert Table 3-20’s lines 39 to 49 between Table 3-19’s lines 53 and 54. The
code shown in Table 3-20 cannot run by itself.
NOTE
Running example programs in this section
To run the programs, the project template (Table 3-1) is not needed. To run the
program of Table 3-20, see the above paragraph.
Tips to use program memory
1. Completes program:
Before storing the program in the program memory, verify that the program is
complete and free of errors. Command parameter check will be performed when
the program is executed.
If the program being stored makes changes to the present measurement setup,
verify that these changes are correct and compatible with the present setup.
2. For the invalid commands in the internal memory program, refer to Table 2-1 on
page 2-32.
3-70
Agilent B1500 Programming Guide, Edition 2
Programming Examples
Using Program Memory
Table 3-19
Imports
Imports
Imports
Imports
Program Memory Programming Example 1
Agilent.TMFramework
Agilent.TMFramework.DataAnalysis
Agilent.TMFramework.DataVisualization
Agilent.TMFramework.InstrumentIO
Module Module1
Sub Main()
Dim B1500 As New DirectIO("GPIB0::17::INSTR")
B1500.WriteLine("*RST")
Dim fmt As Integer = 1 : B1500.WriteLine("FMT" & fmt)
Dim t() As Integer = {1, 2, 4, 6} ’SMU1, SMU2, SMU4, SMU6
Dim
Dim
Dim
Dim
’1
’8
’11
v0 As Double = 0 : Dim vd As Double = 1 : Dim idcomp As Double = 0.1
vg As Double = 0.8 : Dim igcomp As Double = 0.05
orng As Integer = 0 : Dim mrng As Integer = 0 : Dim hold As Double = 0.1
width As Double = 0.01 : Dim period As Double = 0.02
Dim mem As Integer = 1
B1500.WriteLine("ST" & Mem)
B1500.WriteLine("DV" & t(3)
B1500.WriteLine("DV" & t(2)
B1500.WriteLine("DV" & t(1)
B1500.WriteLine("DV" & t(0)
B1500.WriteLine("TI" & t(0)
B1500.WriteLine("END")
display_mem(B1500, mem)
’18
&
&
&
&
&
",0,0,0.1")
",0,0,0.1")
"," & orng & "," & vg & "," & igcomp)
"," & orng & "," & vd & "," & idcomp)
"," & mrng)
mem = 2
’28
B1500.WriteLine("ST" & Mem)
B1500.WriteLine("PT" & hold & "," & width & "," & period)
B1500.WriteLine("DV" & t(3) & ",0,0,0.1")
B1500.WriteLine("DV" & t(2) & ",0,0,0.1")
B1500.WriteLine("PV" & t(1) & "," & orng & "," & v0 & "," & vg & "," & igcomp)
B1500.WriteLine("DV" & t(0) & "," & orng & "," & vd & "," & idcomp)
B1500.WriteLine("MM3," & t(0))
B1500.WriteLine("RI" & t(0) & "," & mrng)
B1500.WriteLine("XE")
B1500.WriteLine("END")
display_mem(B1500, mem)
’39
Line
Description
1 to 4
These lines are necessary for the Agilent instrument control programming.
8 to 11
Establishes the connection with the Agilent B1500, resets the B1500, and sets the data
output format. Also declares the SMUs used for measurement.
13 to 16
Declares variables used to set measurement conditions and sets the value.
18 to 26
Stores program in the internal memory 1, and displays it on the console window.
28 to 39
Stores program in the internal memory 2, and displays it on the console window.
Agilent B1500 Programming Guide, Edition 2
3-71
Programming Examples
Using Program Memory
Dim term As String = t(0) & "," & t(1) & "," & t(2) & "," & t(3)
’41
B1500.WriteLine("CN" & term)
Dim i As Integer : Dim ret As Integer : Dim msg As String
Dim value As String : Dim status As String : Dim meas As Double
For i = 1 To 2
B1500.WriteLine("DO" & i)
B1500.WriteLine("*OPC?") : ret = B1500.Read(True)
B1500.WriteLine("ERR? 1") : ret = B1500.Read(True)
If ret <> 0 Then B1500.WriteLine("DZ") : GoTo Check_err
value = B1500.Read(True) : status = Left(value, 3)
value = Right(value, 12) : meas = Val(value)
Console.WriteLine("Memory " & i & ": Id = " & meas & " (A), Status = " &
status & Chr(10))
Next
B1500.WriteLine("DZ")
’54
B1500.WriteLine("CL")
B1500.Close()
Exit Sub
Check_err:
B1500.WriteLine("EMG? " & ret) : msg = B1500.Read(True)
MsgBox("Instrument error: " & ret & Chr(10) & msg, vbOKOnly, "")
Exit Sub
End Sub
’59
Sub display_mem(ByVal B1500 As DirectIO, ByVal mem As Integer)
B1500.WriteLine("LST?" & mem)
Dim prog_list As String = B1500.Read(True)
Console.WriteLine("Memory " & mem & ":")
Console.WriteLine(prog_list & Chr(10))
End Sub
’65
End Module
Line
Description
41 to 53
Enables SMUs and performs the measurement. After that, checks if an error occurred.
If an error is detected, forces 0 V and goes to Check_err. Also reads the measured data
and displays it on the console window.
54 to 57
Applies 0 V from all channels, disables SMUs, and closes the connection with the
Agilent B1500.
59 to 63
Displays a message box to show an error message if the error is detected.
65 to 70
Reads the program lists stored in the internal program memory, and displays it on the
console window.
Measurement
Result Example
Memory 1: Id = 0.021945 (A), Status = NAI
Memory 2: Id = 0.022095 (A), Status = NAI
Press any key to continue
3-72
Agilent B1500 Programming Guide, Edition 2
Programming Examples
Using Program Memory
Table 3-20
Program Memory Programming Example 2
B1500.WriteLine("VAR0,0," & t(0))
B1500.WriteLine("VAR0,1," & t(1))
B1500.WriteLine("VAR0,2," & t(2))
B1500.WriteLine("VAR0,3," & t(3))
B1500.WriteLine("VAR0,4,0")
B1500.WriteLine("VAR0,5,0")
B1500.WriteLine("VAR1,0,1")
B1500.WriteLine("VAR1,1,0.8")
B1500.WriteLine("VAR1,2,0.1")
B1500.WriteLine("VAR1,3,0.05")
B1500.WriteLine("VAR1,4,0")
B1500.WriteLine("VAR1,5,0.1")
B1500.WriteLine("VAR1,6,0.01")
B1500.WriteLine("VAR1,7,0.02")
’%I0=t(0)
’%I1=t(1)
’%I2=t(2)
’%I3=t(3)
’%I4=mrng=0
’%I5=orng=0
’%R0=vd=1
’%R1=vg=0.8
’%R2=idcomp=0.1
’%R3=igcomp=0.05
’%R4=v0=0
’%R5=hold=0.1
’%R6=width=0.01
’%R7=period=0.02
’1
Dim mem As Integer = 1
B1500.WriteLine("ST" & mem)
B1500.WriteLine("DV %I3,0,0,0.1")
B1500.WriteLine("DV %I2,0,0,0.1")
B1500.WriteLine("DV %I1,%I5,%R1,%R3")
B1500.WriteLine("DV %I0,%I5,%R0,%R2")
B1500.WriteLine("TI %I0,%I4")
B1500.WriteLine("END")
display_mem(B1500, mem)
’16
mem = 2
B1500.WriteLine("ST" & mem)
B1500.WriteLine("PT %R5,%R6,%R7")
B1500.WriteLine("DV %I3,0,0,0.1")
B1500.WriteLine("DV %I2,0,0,0.1")
B1500.WriteLine("PV %I1,%I5,%R4,%R1,%R3")
B1500.WriteLine("DV %I0,%I5,%R0,%R2")
B1500.WriteLine("MM3,%I0")
B1500.WriteLine("RI %I0,%I4")
B1500.WriteLine("XE")
B1500.WriteLine("END")
display_mem(B1500, mem)
’26
’37
Line
Description
1 to 14
Declares variables used to set measurement conditions and sets the value. To run the
program, replace the code with the lines 13 to 16 of the program shown in Table 3-19.
16 to 24
Stores program in the internal memory 1, and displays it on the console window. To run
the program, replace the code with the lines 18 to 26 of the program shown in Table
3-19.
26 to 37
Stores program in the internal memory 2, and displays it on the console window. To run
the program, replace the code with the lines 28 to 39 of the program shown in Table
3-19.
Agilent B1500 Programming Guide, Edition 2
3-73
Programming Examples
Using Program Memory
’changes vd and vg and performs measurement again
’39
B1500.WriteLine("VAR1,0,3") ’%R0=vd=3
For i = 1 To 2
B1500.WriteLine("DO" & i)
B1500.WriteLine("*OPC?") : ret = B1500.Read(True)
B1500.WriteLine("ERR? 1") : ret = B1500.Read(True)
If ret <> 0 Then B1500.WriteLine("DZ") : GoTo Check_err
value = B1500.Read(True) : status = Left(value, 3)
value = Right(value, 12) : meas = Val(value)
Console.WriteLine("Memory " & i & ": Id = " & meas & " (A), Status = " &
status & Chr(10))
Next
’49
Line
Description
39 to 49
Changes the value of the internal variable %R0, and performs measurement again. Can
be inserted between line 53 and line 54 of the program shown in Table 3-19.
Measurement
Result Example
Memory 1: Id = 0.021955 (A), Status = NAI
Memory 2: Id = 0.021975 (A), Status = NAI
Memory 1: Id = 0.023085 (A), Status = NAI
Memory 2: Id = 0.023335 (A), Status = NAI
Press any key to continue
3-74
Agilent B1500 Programming Guide, Edition 2
Programming Examples
Using Trigger Function
Using Trigger Function
The Agilent B1500 can be equipped with eight trigger ports that will be used for
different purpose individually. The Agilent B1500 can synchronize the operation
with other equipment by using the trigger function. For details about the trigger
input/output operation, see “Trigger Function” on page 2-36. The following
commands are available for the trigger function.
Command
TGP
Function and Syntax
Sets the trigger port for the specified terminal.
TGP port,terminal,polarity[,type]
TGPC
Clears the trigger setting of the specified ports.
TGPC [port ... [,port] ... ]
TGSI
Selects the sweep step first or last that ignores the Start Step
Output Setup trigger input set by the TGP port,1,polarity,2
command.
TGSI mode
TGSO
Selects the trigger type, edge or gate, for the Step Output Setup
Completion trigger output set by the TGP port,2,polarity,2
command.
TGSO mode
TGXO
Selects the trigger type, edge or gate, for the Measurement
Completion trigger output set by the TGP port,2,polarity,1
command.
TGXO mode
TGMO
Selects the trigger type, edge or gate, for the Step Measurement
Completion trigger output set by the TGP port,2,polarity,3
command.
TGMO mode
TM3
Enables the trigger set by the TGP port,terminal,polarity,1
command.
Agilent B1500 Programming Guide, Edition 2
3-75
Programming Examples
Using Trigger Function
The following commands are also available to send a trigger or wait for an external
trigger input. Refer to “Using Trigger Function” on page 2-41.
Command
OS
Function and Syntax
Causes the Agilent B1500 to send a trigger signal from the Ext
Trig Out terminal.
OS
OSX a
Causes the Agilent B1500 to send a trigger signal from the
specified port.
OSX port[,level]
WS
Enters a wait state until the Agilent B1500 receives an external
trigger via the Ext Trig In terminal.
WS [mode]
WSX a
Enters a wait state until the Agilent B1500 receives an external
trigger via the specified port.
WSX port[,mode]
PA
Pauses command execution or internal memory program
execution until the specified wait time has elapsed, or until a
trigger is received from the Ext Trig In terminal if the TM3
command has been entered.
PA [wait]
PAX a
Pauses command execution or internal memory program
execution until the specified wait time has elapsed, or until a
trigger is received from the specified port if the TM3 command
has been entered.
PAX port[,wait]
TGP
Sets trigger port to the specified terminal.
TGP port,terminal,polarity[,type]
TM3
Uses an external trigger to release the PA/PAX command state or
to start measurement when the B1500 is not in the PA/PAX/
WS/WSX command state.
a. Enter the TGP command to set the trigger port.
3-76
Agilent B1500 Programming Guide, Edition 2
Programming Examples
Using Trigger Function
Programming examples using the trigger function are explained below. The
examples use a couple within the available couples of the Agilent B1500A and the
Agilent E5260/E5270 series. In this section, they are assigned as Unit1 (address
717) and Unit2 (address 722).
NOTE
To run the programs shown in this section, you do not need the example code shown
in Table 3-1 (template of a project).
The following program performs a MOSFET drain current measurement. Unit2
applies voltage to the source and substrate terminals. Unit1 applies voltage to the
gate and drain terminals, and measures the drain current. Before running the
program, connect a BNC cable between the following terminals.
•
Table 3-21
Imports
Imports
Imports
Imports
Unit2’s Ext Trig Out to Unit1’s Ext Trig In
Trigger Programming Example 1
Agilent.TMFramework
Agilent.TMFramework.DataAnalysis
Agilent.TMFramework.DataVisualization
Agilent.TMFramework.InstrumentIO
’1
Module Module1
Sub Main()
Dim unit1 As New DirectIO("GPIB0::17::INSTR")
Dim unit2 As New DirectIO("GPIB0::22::INSTR")
unit1.WriteLine("*RST")
unit2.WriteLine("*RST")
MsgBox("Click OK to start measurement.", vbOKOnly, "")
Console.WriteLine("Measurement in progress. . ." & Chr(10))
Dim t() As Integer = {1, 2, 1, 2}
’unit1[1,2], unit2[1,2]
Dim term1 As String = t(0) & "," & t(1)
Dim term2 As String = t(2) & "," & t(3)
unit1.WriteLine("CN" & term1)
unit2.WriteLine("CN" & term2)
perform_meas(unit1, unit2, t)
Line
’8
’20
Description
1 to 4
These lines are necessary for the Agilent instrument control programming.
8 to 20
Main subprogram establishes the connection with Unit1 and Unit2, resets them, opens a
message box to confirm the start of measurement, and pauses program execution until OK is
clicked on the message box. By clicking OK, the program displays a message on the console
window, enables the SMUs (in the slots 1 and 2 of both Unit1 and Unit2), and calls the
perform_meas subprogram that will be used to perform measurement.
Agilent B1500 Programming Guide, Edition 2
3-77
Programming Examples
Using Trigger Function
unit1.WriteLine("CL")
unit2.WriteLine("CL")
unit1.Close()
unit2.Close()
MsgBox("Click OK to stop the program.", vbOKOnly, "")
Console.WriteLine("Measurement completed." & Chr(10))
End Sub
’22
’28
Sub perform_meas(ByVal unit1 As DirectIO, ByVal unit2 As DirectIO, ByVal t() As
Integer)
’30
Dim i As Integer = 0
Dim j As Integer = 0
Dim nop1 As Integer = 1
Dim nop2 As Integer = 1
Dim data(nop2 - 1, nop1 - 1) As String
Dim value As String = "Id (mA), Status"
Dim fname As String = "C:\Agilent\data\ex20.txt"
Dim title As String = "Measurement Result"
Dim msg As String = "No error."
Dim err As String = "0"
Dim vg As Double = 0.8 : Dim igcomp As Double = 0.05
Dim vd As Double = 2.5 : Dim vs As Double = 0 : Dim icomp As Double = 0.1
Dim ret As Integer
’42
unit1.WriteLine("FMT 1")
unit1.WriteLine("TM 1")
unit1.WriteLine("AV -1")
unit1.WriteLine("MM 1," & t(0))
unit2.WriteLine("DV" & t(3) & ",0,"
unit2.WriteLine("DV" & t(2) & ",0,"
unit1.WriteLine("DV" & t(0) & ",0,"
unit1.WriteLine("DV" & t(1) & ",0,"
’46
&
&
&
&
vs
vs
vd
vg
&
&
&
&
","
","
","
","
&
&
&
&
icomp)
icomp)
icomp)
igcomp)
’sub
’souce
’drain
’gate
’50
’53
Line
Description
22 to 28
After the measurement, the program disables all SMUs, closes the connection with Unit1 and
Unit2, and opens a message box to confirm the end of the program. Finally, by clicking OK
on the message box, the program displays a message on the console window.
31 to 40
Declares variables used through the project. And sets the proper values.
42 to 44
Declares variables used to perform measurement, and sets the value.
46 to 49
Sets the data output format, trigger mode, A/D converter, and measurement mode.
50 to 51
Unit2 applies voltage to the source and substrate terminals of a device.
52 to 53
Unit1 applies voltage to the gate and drain terminals of a device.
3-78
Agilent B1500 Programming Guide, Edition 2
Programming Examples
Using Trigger Function
unit1.WriteLine("WS 2")
unit1.WriteLine("XE")
unit2.WriteLine("OS")
’55
’unit1.WriteLine("TM 3")
’unit1.WriteLine("*OPC?") : ret = unit1.Read(True)
’unit2.WriteLine("OS")
’unit1.WriteLine("PA")
’unit2.WriteLine("OS")
’unit1.WriteLine("XE")
’59
unit1.WriteLine("*OPC?") : ret = unit1.Read(True)
unit1.WriteLine("ERR? 1") : err = unit1.Read(True)
If err <> 0 Then unit1.WriteLine("DZ") : GoTo Check_err
’66
Dim ret_val As String() = unit1.ReadListAsStringArray()
Dim data1 As String = ret_val(0)
Dim status As String = Left(data1, 3)
data1 = Right(data1, 12)
Dim meas As Double = Val(data1)
’70
’61
data(j, i) = Chr(13) & Chr(10) & meas * 1000 & ", " & status
unit1.WriteLine("DZ")
save_data(fname, title, value, data, nop1, nop2, unit1, unit2, t)
Exit Sub
’78
Line
Description
55 to 57
Unit1 waits for a trigger sent to the Ext Trig In terminal, and starts measurement by receiving
a trigger sent by Unit2.
59 to 61
The lines can be replaced with 55 to 57.
Delete ’ at the top of the lines 59 to 61, and delete lines 55 to 57, then run the program.
Unit1 will start measurement when a trigger is received via the Ext Trig In terminal.
62 to 64
The lines can be replaced with 55 to 57.
Delete ’ at the top of the lines 59 to 64, and delete lines 55 to 57, and 61, then run the program.
Unit1 will start measurement when a trigger is received via the Ext Trig In terminal.
66 to 68
Waits for the operation complete and checks if an error occurred. If an error is detected, forces
0 V and goes to Check_err.
70 to 76
Reads measurement data and stores it into the data array.
78 to 80
Applies 0 V from all channels and transfers the data stored in the data variable to the
save_data subprogram. And the subprogram will save the data into the
C:\Agilent\data\ex20.txt file (CSV) and displays the data on a message box.
Agilent B1500 Programming Guide, Edition 2
3-79
Programming Examples
Using Trigger Function
Check_err:
unit1.WriteLine("EMG? " & err) : msg = unit1.Read(True)
MsgBox("Instrument error: " & err & Chr(10) & msg, vbOKOnly, "")
Exit Sub
’82
End Sub
’87
Sub save_data(ByVal fname As String, ByVal title As String, ByVal value As String,
ByVal data(,) As String, ByVal nop1 As Integer, ByVal nop2 As Integer, ByVal unit1
As DirectIO, ByVal unit2 As DirectIO, ByVal t() As Integer)
’89
Dim i As Integer = 0
Dim j As Integer = 0
FileOpen(1, fname, OpenMode.Output, OpenAccess.Write, OpenShare.LockReadWrite)
Print(1, value)
For j = 0 To nop2 - 1
’Print(1, Chr(13) & Chr(10) & "Unit" & j + 1)
’95
For i = 0 To nop1 - 1
Print(1, data(j, i))
Next i
Next j
FileClose(1)
Dim rbx As Integer
For j = 0 To nop2 - 1
’value = value & Chr(10) & "Unit" & j + 1
’104
For i = 0 To nop1 - 1
value = value & data(j, i)
Next i
Next j
value = value & Chr(10) & Chr(10) & "Data save completed."
value = value & Chr(10) & Chr(10) & "Do you want to perform measurement again?"
rbx = MsgBox(value, vbYesNo, title)
If rbx = vbYes Then perform_meas(unit1, unit2, t)
End Sub
’113
End Module
Line
Description
82 to 85
Displays a message box to show an error message if the error is detected.
89 to 113
Save_data subprogram saves measurement result data into a file specified by the fname
variable and displays the data and a message on a message box. If Yes is clicked on the
message box, calls the perform_meas subprogram again. If No is clicked, returns to the
perform_meas subprogram.
Measurement
Result Example
Id (mA), Status
22.475, NAI
Data save completed.
Do you want to perform measurement again?
3-80
Agilent B1500 Programming Guide, Edition 2
Programming Examples
Using Trigger Function
The following program performs I-V measurement of two-terminal devices. Each
unit measures a different device simultaneously. Before running the program,
connect a BNC cable between the following terminals.
•
Unit1’s Ext Trig Out to Unit2’s Ext Trig In
•
Unit2’s Ext Trig Out to Unit1’s Ext Trig In
NOTE
The program needs the example code shown in Table 3-21 to run. Delete apostrophe
(’) at the beginning of the lines 95 and 104 shown in Table 3-21. And delete the lines
30 to 87 shown in Table 3-21, and insert the code shown in Table 3-22 into there.
Table 3-22
Trigger Programming Example 2
Sub perform_meas(ByVal unit1 As DirectIO, ByVal unit2 As DirectIO, ByVal t() As
Integer)
’1
Dim i As Integer = 0
Dim j As Integer = 0
Dim nop1 As Integer = 5
Dim nop2 As Integer = 2
Dim data(nop2 - 1, nop1 - 1) As String
Dim value As String = "I (mA), Time (msec), Status"
Dim fname As String = "C:\Agilent\data\ex21.txt"
Dim title As String = "Measurement Result"
Dim msg As String = "No error."
Dim err As String = "0"
Dim v1 As Double = 0.1 : Dim v2 As Double = 0.5
’12
Dim vs As Double = 0 : Dim icomp As Double = 0.1
Dim ret As Integer
unit1.WriteLine("FMT 1")
unit1.WriteLine("AV -1")
unit1.WriteLine("WT 0, 0.01")
unit1.WriteLine("TM 3")
’18
unit1.WriteLine("TGP -1, 1, 2, 1")
unit1.WriteLine("TGP -2, 2, 2, 3")
unit1.WriteLine("TGMO 1")
’21
Line
Description
1 to 11
Declares variables used in the Main of Table 3-21. And sets the proper values.
12 to 14
Declares variables used to perform measurement, and sets the value.
15 to 17
Unit1 sets the data output format, A/D converter, and sweep delay time.
18 to 19
Unit1 sets the Start Measurement trigger input for the Ext Trig In terminal.
20 to 21
Unit1 sets the Step Measurement Completion trigger output for the Ext Trig Out terminal.
Agilent B1500 Programming Guide, Edition 2
3-81
Programming Examples
Using Trigger Function
unit1.WriteLine("DV" & t(1) & ",0," & vs & "," & icomp)
’22
unit1.WriteLine("WV" & t(0) & ",1,0," & v1 & "," & v2 & "," & nop1 & "," & icomp)
unit1.WriteLine("MM 2," & t(0))
unit1.WriteLine("TSC 1")
unit2.WriteLine("FMT 1")
’27
unit2.WriteLine("AV -1")
unit2.WriteLine("WT 0, 0.01")
unit2.WriteLine("TM 3")
’30
unit2.WriteLine("TGP -2, 2, 2, 1")
unit2.WriteLine("TGXO 2")
unit2.WriteLine("TGP -1, 1, 2, 2")
unit2.WriteLine("TGSI 2")
’34
unit2.WriteLine("DV" & t(3) & ",0," & vs & "," & icomp)
unit2.WriteLine("WV" & t(2) & ",1,0," & v1 & "," & v2 & "," & nop1 & "," & icomp)
unit2.WriteLine("MM 2," & t(2))
unit2.WriteLine("TSC 1")
unit1.WriteLine("TSR") : unit2.WriteLine("TSR")
unit2.WriteLine("XE")
unit1.WriteLine("*OPC?") : ret = unit1.Read(True)
’42
unit1.WriteLine("ERR? 1") : err = unit1.Read(True)
If err <> 0 Then unit1.WriteLine("DZ") : unit2.WriteLine("DZ") : GoTo Check_err
unit2.WriteLine("ERR? 1") : err = unit1.Read(True)
If err <> 0 Then unit1.WriteLine("DZ") : unit2.WriteLine("DZ") : GoTo Check_err
Line
Description
22 to 25
Unit1 applies voltage to device, and sets the sweep source, the measurement mode, and the
time stamp data output.
27 to 29
Unit2 sets the data output format, A/D converter, and sweep delay time.
30 to 32
Unit2 sets the Measurement Completion trigger output for the Ext Trig Out terminal, and
specifies the gate trigger. Unit1 will start measurement when this trigger is sent to its Ext
Trig In terminal.
33 to 34
Unit2 sets the Start Step Output Setup trigger input for the Ext Trig In terminal. Unit2 will
start step output setup when the Step Measurement Completion trigger is sent by Unit1.
35 to 38
Unit2 applies voltage to device, and sets the sweep source, the measurement mode, and the
time stamp data output.
39
Resets the time stamp.
40
Unit2 starts measurement, and sends a gate trigger to the Ext Trig Out terminal. Then Unit1
starts measurement.
42 to 46
Waits for the operation complete and checks if an error occurred. If an error is detected,
forces 0 V and goes to Check_err.
3-82
Agilent B1500 Programming Guide, Edition 2
Programming Examples
Using Trigger Function
Dim ret_val1() As String = unit1.ReadListAsStringArray()
Dim ret_val2() As String = unit2.ReadListAsStringArray()
’48
Dim data0 As String : Dim data1 As String : Dim time As String
Dim status As String : Dim meas As Double
For i = 0 To nop1 - 1
data0 = ret_val1(i * 2)
data1 = ret_val1(i * 2 + 1)
data0 = Right(data0, 12) : time = Val(data0)
status = Left(data1, 3)
data1 = Right(data1, 12) : meas = Val(data1)
data(0, i) = Chr(13) & Chr(10) & meas * 1000 & ", " & time * 1000 & ", " & status
Next i
For i = 0 To nop1 - 1
data0 = ret_val2(i * 2)
data1 = ret_val2(i * 2 + 1)
data0 = Right(data0, 12) : time = Val(data0)
status = Left(data1, 3)
data1 = Right(data1, 12) : meas = Val(data1)
data(1, i) = Chr(13) & Chr(10) & meas * 1000 & ", " & time * 1000 & ", " & status
Next i
’68
unit1.WriteLine("DZ") : unit2.WriteLine("DZ")
save_data(fname, title, value, data, nop1, nop2, unit1, unit2, t)
Exit Sub
Check_err:
unit1.WriteLine("EMG? " & err) : msg = unit1.Read(True)
MsgBox("Instrument error: " & err & Chr(10) & msg, vbOKOnly, "")
Exit Sub
’73
End Sub
Line
Description
48 to 68
Reads measurement data and stores it into the data array.
69 to 71
Applies 0 V from all channels and transfers the data stored in the data variable to the
save_data subprogram. And the subprogram will save the data into the
C:\Agilent\data\ex21.txt file (CSV) and displays the data on a message box.
73 to 76
Displays a message box to show an error message if the error is detected.
Measurement
Result Example
I (mA), Time (msec), Status
Unit1
11.345, 18.8, NDI
22.685, 50, NDI
34.035, 81.2, NDI
45.385, 112.4, NDI
56.73, 143.5, NDI
Unit2
10.98, 13.6, NAI
21.98, 47.1, NAI
32.98, 78.2, NAI
43.965, 109.6, NAI
54.965, 140.7, NAI
Agilent B1500 Programming Guide, Edition 2
3-83
Programming Examples
Using Trigger Function
This is a program written in the HP BASIC language, and performs the following.
1. Sets the Agilent B1500 for the bipolar transistor Ib-Ic measurement
2. Triggers a sweep measurement
3. Performs a step measurement and sends the Step Measurement Completion
output gate trigger
4. Waits for the Start Step Output Setup input trigger
5. Displays a measurement data (Ic)
6. Repeats 3 to 5 the number of times specified by Ib_num
7. Disables the Agilent B1500 channel output
This is a part of the program used to synchronize the Agilent B1500 operation with
the other instrument. However this program does not include the program code to
control the instrument. So add the program code to control it before running the
program. For the timing of the trigger, refer to the comments in the following
program listing.
10
20
30
40
50
60
70
80
90
100
110
120
130
140
150
160
ASSIGN @B1500 TO 717
OPTION BASE 1
INTEGER Collector,Base,Ib_num,Vc_num
!
Collector=2
Base=1
Ib_start=.0001
Ib_stop=.001
Ib_num=10
Ib_step=(Ib_stop-Ib_start)/(Ib_num-1)
Vb_comp=1
Vc=2.5
Ic_comp=.1
!
!Other instrument should be initialized and set up.
!
Line No.
Description
10
Assigns the I/O path to control the B1500.
50 to 130
Sets the value of the variables for source setup and so on.
140 to 160
Add program lines to perform initialization and measurement
setup of the other instrument.
3-84
Agilent B1500 Programming Guide, Edition 2
Programming Examples
Using Trigger Function
170
180
190
200
210
220
230
240
250
260
270
280
290
300
310
OUTPUT @B1500;"FMT 5"
! ASCII w/header<,>
OUTPUT @B1500;"AV -1"
! Averaging=1PLC
OUTPUT @B1500;"WT 0,.01"
! Hold Time, Delay Time
OUTPUT @B1500;"CN";Collector,Base
OUTPUT @B1500;"TGP -2,2,2,3" ! StepMeasEndTrg Output
OUTPUT @B1500;"TGMO 2"
! Gate Trigger
OUTPUT @B1500;"TGP -1,1,2,2" ! StartStepSetupTrg Input
OUTPUT @B1500;"TGSI 2" ! Ignore TRG for 1st step setup
OUTPUT @B1500;"DV";Collector,0,Vc,Ic_comp
OUTPUT @B1500;"WI";Base,1,0,Ib_start,Ib_stop,Ib_num,Vb_comp
OUTPUT @B1500;"MM";2,Collector
!
!Other instrument must be set to the measurement ready and
!trigger wait condition.
!
Line No.
Description
170
Specifies the data output format.
180
Sets the number of averaging samples of the ADC.
190
Sets the hold time and delay time.
200
Enables the source/measurement channels.
210 to 220
Sets the Step Measurement Completion trigger output for the Ext
Trig Out terminal, and specifies the gate trigger.
230 to 240
Sets the Start Step Output Setup trigger input for the Ext Trig In
terminal, also disables the input trigger for the first sweep step.
250
Forces voltage.
260
Sets the staircase sweep source.
270
Sets the measurement mode and the measurement channel.
280 to 310
To synchronize the Agilent B1500 operation with the operation of
the other instrument, add program lines to set it to the
measurement ready and trigger wait condition.
Agilent B1500 Programming Guide, Edition 2
3-85
Programming Examples
Using Trigger Function
320
330
340
350
360
370
380
390
400
410
420
430
440
450
460
470
480
490
500
510
520
530
540
550
OUTPUT @B1500;"XE"
!
!B1500 starts measurement. Then B1500 sends negative gate
!trigger to the other instrument.
!Then the instrument should start measurement.
!
FOR I=1 TO Ib_num
ENTER @B1500 USING "#,3X,12D,X";Ic
PRINT "Ic= ";Ic*1000;" [mA]"
!
!Measurement data of the other instrument should be read.
!And the data should be displayed.
!
!The instrument must be set to the measurement ready and
!trigger wait condition.
!
!The instrument must send trigger to B1500. B1500 will
!start a step source output by the trigger, and perform
!a step measurement.
!
NEXT I
!
OUTPUT @B1500;"CL"
END
Line No.
Description
320
Starts sweep measurement, and performs a step measurement.
When the Agilent B1500 starts a step measurement, it sends a
negative gate trigger. Then the other instrument should start
measurement.
390 to 400
Reads the measurement data, and displays the measurement data.
410 to 510
To synchronize the Agilent B1500 operation with the operation of
other instrument, add program lines to do following:
•
To read and display the data measured by the instrument
•
To set it to the measurement ready and trigger wait condition
•
To send a trigger from the instrument
When the Agilent B1500 receives the trigger, it starts a step
measurement and sends negative gate trigger.
520
Repeats 390 to 510 the number of times specified by Ib_num.
540
Disables the source/measurement channels.
3-86
Agilent B1500 Programming Guide, Edition 2
Programming Examples
Reading Time Stamp Data
Reading Time Stamp Data
Time stamp function outputs a time data with a measurement result data. For
example of reading the time stamp data, see programs in the previous sections.
NOTE
This function is not available for binary data output format (FMT 3 and 4).
This function is not available for the quasi-pulsed spot measurement (MM 9) and
the search measurement (MM 14 and 15).
To read the time data with the best resolution (100 μs), reset the time stamp
every 100 sec or less for the FMT 1, 2, or 5 data output format, or
every 1000 sec or less for the FMT 11, 12, 15, 21, 22, or 25 data output format.
Enter the MM command to define the measurement mode and enter the TSC
command to set the time stamp function ON. You can get the time data with the
measurement data. The time data is the time from timer reset to the start of
measurement. To clear/reset the time stamp, enter the TSR command.
Function
Sets the time stamp function
Command
TSC
Parameters
onoff
The following commands returns the time data regardless of the TSC command
setting. The time data is the time from when the time stamp is cleared until the
following command is entered.
Function
Command
Parameters
Forces DC voltage from SMU
TDV
chnum,range,output[,Icomp]
Forces DC current from SMU
TDI
chnum,range,output[,Vcomp]
Forces DC bias from CMU
TDCV
chnum,output
Forces AC signal from CMU
TACV
chnum,output
Performs high speed spot current measurement
TTI
chnum,range
Performs high speed spot voltage measurement
TTV
chnum,range
Performs high speed spot C measurement
TTC
chnum,mode[,range]
Just returns the time data
TSQ
Agilent B1500 Programming Guide, Edition 2
3-87
Programming Examples
Reading Binary Output Data
Reading Binary Output Data
This section provides the example to read binary data. The following program
example:
1. executes high-speed spot measurements
2. reads the measurement data in binary data format
3. rearranges the data and calculates the measured data
4. prints the measured data on the screen
NOTE
Data resolution
The resolution of binary data is as shown below.
•
Measurement data: Measurement range / 50000
•
Output data: Output range / 20000
Note that the resolution of the measurement data is larger than the resolution of the
high resolution A/D converter.
Measurement
Result Example
Id (mA), Status
status = 0
type = 1
mode = 1
channel = 1
sign = 0
range = 0.01
count = 19075
3.815, 0
Data save completed.
Do you want to perform measurement again?
3-88
Agilent B1500 Programming Guide, Edition 2
Programming Examples
Reading Binary Output Data
Table 3-23
High-Speed Spot Measurement Example to read binary data
Sub perform_meas(ByVal B1500 As DirectIO, ByVal t() As Integer)
Dim i As Integer = 0
Dim j As Integer = 0
Dim nop1 As Integer = 1
Dim nop2 As Integer = 1
Dim data(nop2 - 1, nop1 - 1) As String
Dim value As String = "Id (mA), Status"
Dim fname As String = "C:\Agilent\data\ex30.txt"
Dim title As String = "Measurement Result"
Dim msg As String = "No error."
Dim err As String = "0"
Dim
Dim
Dim
Dim
Dim
Dim
vd As Double = 0.5
vg As Double = 0.5
idcomp As Double = 0.05
igcomp As Double = 0.01
orng As Integer = 0
mrng As Integer = 0
’1
’13
B1500.WriteLine("FMT 3")
B1500.WriteLine("AV 10,1")
’ sets number of samples for 1 data
B1500.WriteLine("FL 0")
’ sets filter off
B1500.WriteLine("DV " & t(3) & ",0,0,0.1")
’out= 0 V, comp= 0.1 A
B1500.WriteLine("DV " & t(2) & ",0,0,0.1")
’out= 0 V, comp= 0.1 A
B1500.WriteLine("DV " & t(1) & "," & orng & "," & vg & "," & igcomp)
B1500.WriteLine("DV " & t(0) & "," & orng & "," & vd & "," & idcomp)
B1500.WriteLine("ERR? 1") : err = B1500.Read(True)
If err <> 0 Then B1500.WriteLine("DZ") : GoTo Check_err
B1500.WriteLine("TI " & t(0) & "," & mrng)
Dim dat() As Byte = B1500.UnbufferedRead(4)
’20
’23
’28
’31
Dim status As Integer = dat(3) And 224 : status = status / 32 ’224=128+64+32
If status <> 0 Then B1500.WriteLine("DZ") : GoTo Check_err
Dim type As Integer = dat(0) And 128 : type = type / 128 ’0:source, 1:meas
Dim mode As Integer = dat(0) And 64 : mode = mode / 64
’0:voltage, 1:current
Dim sign As Integer = dat(0) And 1
’0:positive, 1:negative
Dim rng As Integer = dat(0) And 62 : rng = rng / 2
’62=32+16+8+4+2
Dim count As Integer = dat(1) * 256 + dat(2)
Dim chan As Integer = dat(3) And 31
’31=16+8+4+2+1
If sign = 1 Then count = count - 65536 ’65536 = 10000000000000000 (17 bits)
Line
Description
2 to 11
Declares variables used through the project. And sets the proper values.
13 to 18
Declares variables and sets the value.
20 to 22
Sets the data output format and A/D converter. Also sets the SMU filter off.
23 to 26
Applies voltage to device.
28 to 29
Checks if an error occurred. If an error is detected, forces 0 V and goes to Check_err.
30 to 31
Performs the high-speed spot measurement. And stores the returned binary data (four
bytes) into the dat array variable.
33 to 41
Picks up the elements, status, type, mode, sign, rng, count, and chan, included in the
returned binary data.
Agilent B1500 Programming Guide, Edition 2
3-89
Programming Examples
Reading Binary Output Data
Dim range As Double
If mode = 1 Then
’ current range
range = 10 ^ (rng - 20)
If rng = 20 Then
B1500.WriteLine("UNT? 1")
Dim unt As String = B1500.Read
Dim mdl(8) As String : Dim c As String
Dim a As Integer : Dim b As Integer = 0 : Dim d As Integer = 0
For a = 1 To Len(unt)
c = Mid(unt, a, 1)
If c = "," Then mdl(d) = Mid(unt, b + 1, a - b - 1) : d = d + 1
If c = ";" Then b = a
Next
If mdl(chan) = "E5291A" Then range = 0.2
End If
Else
’ voltage range
If rng = 8 Then range = 0.5
If rng = 9 Then range = 5
If rng = 11 Then range = 2
If rng = 12 Then range = 20
If rng = 13 Then range = 40
If rng = 14 Then range = 100
If rng = 15 Then range = 200
End If
’value
’value
’value
’value
’value
’value
’value
=
=
=
=
=
=
=
value
value
value
value
value
value
value
&
&
&
&
&
&
&
Chr(13)
Chr(13)
Chr(13)
Chr(13)
Chr(13)
Chr(13)
Chr(13)
&
&
&
&
&
&
&
Chr(10)
Chr(10)
Chr(10)
Chr(10)
Chr(10)
Chr(10)
Chr(10)
&
&
&
&
&
&
&
"status = " & status
"type = " & type
"mode = " & mode
"channel = " & chan
"sign = " & sign
"range = " & range
"count = " & count & Chr(13) & Chr(10)
’43
’66
’68
Dim meas As Double
If type = 0 Then meas = count * range / 20000 ’source data
If type = 1 Then meas = count * range / 50000 ’measurement data
’76
data(j, i) = Chr(13) & Chr(10) & meas * 1000 & ", " & status
’80
B1500.WriteLine("DZ")
save_data(fname, title, value, data, nop1, nop2, B1500, t)
Exit Sub
’82
Check_err:
B1500.WriteLine("EMG? " & err) : msg = B1500.Read(True)
MsgBox("Instrument error: " & err & Chr(10) & msg, vbOKOnly, "")
Exit Sub
’86
End Sub
Line
Description
43 to 66
Checks the measurement range or output range setting.
68 to 74
If you want to display and save the binary data elements, delete ’ at the top of the lines.
76 to 80
Calculates the measurement data or source output data. And, stores the data into the
data array.
82 to 84
Applies 0 V from all channels. And transfers the data stored in the data variable to the
save_data subprogram (see Table 3-1). And the subprogram will save the data into the
C:\Agilent\data\ex30.txt file (CSV) and displays the data on a message box.
86 to 89
Displays a message box to show an error message if the error is detected.
3-90
Agilent B1500 Programming Guide, Edition 2
Programming Examples
Using Programs for 4142B
Using Programs for 4142B
This section describes the program modification example to use a program created
for the Agilent 4142B Modular DC Source/Monitor. To use the program:
1. change the GPIB address, if necessary.
2. enter the ACH command to translate the channel numbers, if necessary.
3. remove the unsupported command, or replace it with the command supported by
the B1500.
For more information, refer to “To Use Programs for Agilent 4142B” on page 1-59.
The following program examples show a modified measurement program, which
performs a high-speed spot measurement.
The original 4142B program:
10
20
30
40
50
60
70
80
90
100
110
120
130
140
150
160
170
180
ASSIGN @Hp4142 TO 717
INTEGER G_ch,D_ch,S_ch
!
!
G_ch=2
D_ch=3
S_ch=4
!Source:
!Gate:
!Drain:
!Substrate:
GNDU
HPSMU (SLOT2)
MPSMU (SLOT3)
MPSMU (SLOT4)
!
OUTPUT @Hp4142;"FMT5"
OUTPUT @Hp4142;"CN";D_ch,G_ch,S_ch
OUTPUT @Hp4142;"DV";S_ch;",0,0,.1"
OUTPUT @Hp4142;"DV";G_ch;",0,3,.01"
OUTPUT @Hp4142;"DV";D_ch;",0,5,.1"
OUTPUT @Hp4142;"TI";D_ch;",0"
ENTER @Hp4142 USING "#,3X,12D,X";Mdata
PRINT "Id(A)=";Mdata
OUTPUT @Hp4142;"CL"
END
Line No.
Description
10
Assigns the I/O path to control the 4142B.
90
Specifies the data output format.
100 to 130
Enables the source/measurement channels, and forces voltage.
140 to 180
Executes the measurement, reads and displays the measurement
data, and disables channels.
Agilent B1500 Programming Guide, Edition 2
3-91
Programming Examples
Using Programs for 4142B
The program modified to control the B1500:
10
20
21
30
40
50
60
70
80
81
82
83
84
85
90
100
110
120
130
140
150
160
170
180
ASSIGN @Hp4142 TO 717
!<<<<
INTEGER G_ch,D_ch,S_ch
INTEGER Sub
!<<<<
!
!
!Source:
GNDU
G_ch=2 !Gate:
HPSMU (SLOT2)
D_ch=3 !Drain:
MPSMU (SLOT3)
S_ch=4 !Substrate: MPSMU (SLOT4)
!
Sub=5
!<<<<
OUTPUT @Hp4142;"ACH";Sub,S_ch
!<<<<
OUTPUT @Hp4142;"*OPC?"
!<<<<
ENTER @Hp4142;A
!<<<<
!
OUTPUT @Hp4142;"FMT5"
OUTPUT @Hp4142;"CN";D_ch,G_ch,S_ch
OUTPUT @Hp4142;"DV";S_ch;",0,0,.1"
OUTPUT @Hp4142;"DV";G_ch;",0,3,.01"
OUTPUT @Hp4142;"DV";D_ch;",0,5,.1"
OUTPUT @Hp4142;"TI";D_ch;",0"
ENTER @Hp4142 USING "#,3X,12D,X";Mdata
PRINT "Id(A)=";Mdata
OUTPUT @Hp4142;"CL"
END
Line No.
Note
10
Change GPIB address, if necessary.
21, 81
Add program lines if the module configuration is different from the
4142B. This example adds the variable Sub, and uses the SMU in
slot 5 instead of slot 4 for substrate.
82 to 84
Add program line to set the channel map. This example transfers the
Sub value to the variable S_ch used in the original program.
3-92
Agilent B1500 Programming Guide, Edition 2
Programming Examples
Using Programs for 4155B/4156B/4155C/4156C
Using Programs for 4155B/4156B/4155C/4156C
This section describes the program modification example to use a FLEX command
program created for the Agilent 4155B/4156B/4155C/4156C Parameter Analyzer.
To use the program:
1. change the GPIB address, if necessary.
2. enter the ACH command to translate the channel numbers, if necessary.
3. change the FMT command parameter value to use the data output format
compatible with the 4155/4156 output data, or change the program lines to read
the measurement data.
4. remove the US command.
5. remove the RMD? command.
6. remove the unsupported command, or replace the command with the
corresponding command supported by the B1500.
For more information, refer to “To Use Programs for Agilent 4155/4156” on page
1-60.
The following program examples show a modified measurement program, which
performs a high-speed spot measurement.
Agilent B1500 Programming Guide, Edition 2
3-93
Programming Examples
Using Programs for 4155B/4156B/4155C/4156C
The original 4156C program:
10
20
30
40
50
60
70
80
90
100
110
120
130
140
150
160
170
180
190
200
210
ASSIGN @Hp415x TO 717
INTEGER G_ch,D_ch,S_ch,B_ch
!
S_ch
G_ch=2
D_ch=3
B_ch=4
!Source:
!Gate:
!Drain:
!Substrate:
SMU1
SMU2
SMU3
SMU4
!
OUTPUT @Hp415x;"US"
OUTPUT @Hp415x;"FMT 5"
OUTPUT @Hp415x;"CN ";D_ch,G_ch,S_ch,B_ch
OUTPUT @Hp415x;"DV ";S_ch;",0,0,.1"
OUTPUT @Hp415x;"DV ";B_ch;",0,0,.1"
OUTPUT @Hp415x;"DV ";G_ch;",0,3,.01"
OUTPUT @Hp415x;"DV ";D_ch;",0,5,.1"
OUTPUT @Hp415x;"TI ";D_ch;",0"
OUTPUT @Hp415x;"RMD? 1"
ENTER @Hp415x USING "#,5X,13D,X";Mdata
PRINT "Id(A)=";Mdata
OUTPUT @Hp415x;"CL"
END
Line No.
Description
10
Assigns the I/O path to control the 4155/4156.
90
Enters the FLEX command mode.
100
Specifies the data output format.
110 to 150
Enables the source/measurement channels, and forces voltage.
160 to 210
Executes the measurement, reads and displays the measurement
data, and disables channels.
3-94
Agilent B1500 Programming Guide, Edition 2
Programming Examples
Using Programs for 4155B/4156B/4155C/4156C
The program modified to control the B1500:
10
20
21
30
40
50
60
70
80
81
82
83
90
100
110
120
130
140
150
160
170
180
190
200
210
ASSIGN @Hp415x TO 717
INTEGER G_ch,D_ch,S_ch,B_ch
INTEGER Sub
!<<<<
!<<<<
!
! S_ch=1 !Source:
SMU1 <<<< replaced with GNDU
G_ch=2 !Gate:
SMU2
D_ch=3 !Drain:
SMU3
B_ch=4 !Substrate: SMU4
!
Sub=5
!<<<<
OUTPUT @Hp415x;"ACH ";Sub,B_ch
!<<<<
!
! OUTPUT @Hp415x;"US"
<<<<
OUTPUT @Hp415x;"FMT 25"
!<<<<
OUTPUT @Hp415x;"CN ";D_ch,G_ch,B_ch
!<<<<
! OUTPUT @Hp415x;"DV ";S_ch;",0,0,.1"
<<<<
OUTPUT @Hp415x;"DV ";B_ch;",0,0,.1"
OUTPUT @Hp415x;"DV ";G_ch;",0,3,.01"
OUTPUT @Hp415x;"DV ";D_ch;",0,5,.1"
OUTPUT @Hp415x;"TI ";D_ch;",0"
! OUTPUT @Hp415x;"RMD? 1"
<<<<
ENTER @Hp415x USING "#,5X,13D,X";Mdata
PRINT "Id(A)=";Mdata
OUTPUT @Hp415x;"CL"
END
Line No.
Note
10
Change GPIB address, if necessary.
21, 81
Add program lines if the module configuration is different from the
415x. This example adds the Sub variable, and uses the SMU in slot
5 instead of slot 4 for substrate.
82
Add program line to set the channel map. This example transfers the
Sub value to the variable B_ch used in the original program.
90
Remove the US command. This command is not required.
100
Change the FMT command parameter value.
40, 110,
120
This example uses the GNDU instead of the SMU1. So remove the
program lines that include the variable S_ch (SMU1).
170
Remove the RMD? command. This command is not required.
Agilent B1500 Programming Guide, Edition 2
3-95
Programming Examples
Using Programs for 4155B/4156B/4155C/4156C
3-96
Agilent B1500 Programming Guide, Edition 2
4
Command Reference
Command Reference
This chapter is the complete reference of the GPIB commands of the Agilent B1500:
NOTE
•
“Command Summary”
•
“Command Parameters”
•
“Command Reference”
Module model number and description
In this chapter, plug-in modules and accessory for the Agilent B1500 will be
expressed by the model number or the following abbreviation as shown below.
B1510A: HPSMU (high power SMU)
B1511A: MPSMU (medium power SMU)
B1517A: HRSMU (high resolution SMU)
E5288A: ASU (atto sense and switch unit)
B1520A: MFCMU (multi frequency capacitance measurement unit)
N1301A: SCUU (SMU CMU unify unit)
4-2
Agilent B1500 Programming Guide, Edition 2
Command Reference
Command Summary
The following table summarizes the GPIB commands.
Category
Command
Summary
Reset
*RST
Resets the B1500 to the initial settings.
Diagnostics
DIAG?
Performs diagnostics, and returns the result.
Self-test
*TST?
Performs the self-test, and returns the result.
RCV
Enables the channels that fail self-test.
CA
Performs self-calibration.
*CAL?
Performs self-calibration, and returns the result.
CM
Sets auto-calibration ON or OFF.
ADJ/ADJ?
Sets the phase compensation data.
CLCORR
Clears the frequency list for the correction data measurement.
SMU Self
Calibration
MFCMU
Data
Correction
CORRL / CORRL? adds or returns the frequency for the correction data measurement.
DCORR / DCORR? sets or returns the calibration/reference value of the standard.
CORR?
Performs the open/short/load correction data measurement.
CORRST / CORRST? sets or returns the open/short/load correction function ON/OFF.
Abort
AB
Aborts the present operation and subsequent command execution.
Pause/
Continue
PA/PAX
Pauses command execution or internal memory program execution, until
the specified wait time elapses or until an event specified by the TM
command is received.
TM
Sets the event to start measurement or to release the B1500 from the
paused status set by the PA or PAX command.
SAL
Disables the connection status indicator of the ASU.
SAP
Controls the input-output path of the ASU.
SCUU
Control
SSL
Disables the connection status indicator of the SCUU.
SSP
Controls the input-output path of the SCUU.
Series resistor
SSR
Sets the internal series resistor of the specified SMU to ON or OFF.
ASU Control
Agilent B1500 Programming Guide, Edition 2
4-3
Command Reference
Category
Command
Summary
Filter
FL
Sets the internal filter of the specified SMUs to ON or OFF.
SMU
Integration
Time and
Averaging
AV
Selects the number of samples for averaging of the A/D converter.
AAD
Selects the type of A/D converter, high-speed or high-resolution ADC.
AIT
Selects the number of samples for averaging or the integration time of the
ADC.
AZ
Enables or disables the ADC zero function.
FC
Sets the frequency for the AC voltage output. Used with ACV or TACV.
ACT
Sets the A/D converter of the MFCMU.
IMP
Specifies the impedance measurement parameters. For the ASCII data
output. Not available for FMT 3/4/13/14.
LMN
Enables or disables data output of the OSC level/DC bias monitor values.
ACH
Translates a channel number to another channel number.
CN
Enables the specified channels by setting the output switches to ON.
CL
Disables the specified channels by setting the output switches to OFF.
IN
Sets the specified channels to 0 V.
DZ
Stores the setup of the channels, and sets the output to 0 V.
RZ
Returns the channel to the settings that are stored by the DZ command
and clears the stored channel settings.
WAT
Sets the source wait time and the measurement wait time.
FMT
Specifies the measurement data output format and the data terminator.
BC
Clears the B1500 output data buffer that stores measurement data and/or
query command response data.
Timer Clear
TSR
Clears the timer count.
Time Stamp
TSC
Enables the time stamp function. This function is not available for the 4
bytes binary data format (FMT3 or FMT4), the high speed spot,
quasi-pulsed spot (MM9), and search (MM14 and MM15) measurements.
TSQ
Returns the time data from timer reset (TSR) to this command.
MFCMU
Setup
Channel
Control
Data Output
4-4
Agilent B1500 Programming Guide, Edition 2
Command Reference
Category
Source
Output
Command
DI
Forces DC current from the specified SMU.
DV
Forces DC voltage from the specified SMU.
FC
Sets the output signal frequency of the MFCMU.
ACV
Sets the output signal level of the MFCMU, and starts AC voltage output.
DCV
Forces DC voltage from the MFCMU.
TDI
Forces DC current (TDI) or voltage (TDV) from the specified SMU, and
returns the time data from timer reset to the start of output.
TDV
TACV
TDCV
High Speed
Spot
Measurement
Summary
TC
Forces AC (TACV) or DC (TDCV) voltage from the MFCMU, and
returns the time data from timer reset to the start of output.
Measures impedance (TC), current (TI), or voltage (TV), and returns the
measured data.
TI
TV
TTC
Measures impedance (TTC), current (TTI), or voltage (TTV), and returns
the measurement data and the time data from timer reset to the start of
measurement.
TTI
TTV
Measurement
Setup
CMM
Sets the SMU measurement operation mode.
PAD
Enables or disables the SMU parallel measurements. This is effective for
the spot (MM1), sweep (MM2), and sampling (MM10) measurements.
RC
Specifies the impedance (RC), current (RI), or voltage (RV) measurement
ranging mode for the measurement other than the high speed spot
measurement.
RI
RV
RM
Sets the range selection rule for the auto ranging current measurement.
SAR
Enables 1 pA range for the auto ranging operation.
Measurement
Mode
MM
Sets the measurement mode and measurement channels.
Measurement
Execution
XE
Performs measurements, and returns the measurement data; or recovers
from the paused state if the PA/PAX command has been sent. Not
available for the high speed spot measurement.
Agilent B1500 Programming Guide, Edition 2
4-5
Command Reference
Category
Staircase
Sweep
Source Setup
Command
Summary
WT
Sets the hold time, delay time, step delay time, and trigger delay time.
WI
Sets the staircase current sweep source.
WV
Sets the staircase voltage sweep source.
WM
Sets the automatic abort function.
Synchronous
Sweep
Source Setup
WSI
Sets the synchronous current sweep source used with the WI or PWI
command.
WSV
Sets the synchronous voltage sweep source used with the WV or PWV
command.
Multi channel
Sweep
Source Setup
WNX
Sets the synchronous current sweep source or synchronous voltage sweep
source used with the WI or WV command.
Pulsed
Source Setup
PT
Sets the hold time, pulse width, pulse period, and trigger delay time.
PI
Sets the pulsed current source.
PV
Sets the pulsed voltage source.
PT
Sets the hold time, pulse width, pulse period, and trigger delay time.
PWI
Sets the pulsed current sweep source.
PWV
Sets the pulsed voltage sweep source.
WM
Sets the automatic abort function.
MCC
Clears the settings of the constant sources defined by MI or MV.
MI
Sets the current source synchronized with the sampling measurement.
MSC
Sets the automatic abort function.
ML
Sets the sampling mode, linear or logarithm.
MT
Sets the timing parameters.
MV
Sets the voltage source synchronized with the sampling measurement.
BDM
Specifies the detection interval, and either voltage or current
measurement.
BDT
Specifies the hold time and delay time.
BDV
Sets the quasi-pulsed voltage source.
Pulsed Sweep
Source Setup
Sampling
Source Setup
Quasi-pulsed
Voltage
Source Setup
4-6
Agilent B1500 Programming Guide, Edition 2
Command Reference
Category
Binary
Search
Measurement
Setup
Linear Search
Measurement
Setup
CV Sweep
Source Setup
Digital I/O
port
Command
Summary
BSM
Sets the source output control mode and the automatic abort function.
BST
Specifies the hold time and delay time.
BSVM
Selects the data output mode.
BSI
Sets the current source channel.
BSSI
Sets the synchronous current source channel.
BGV
Sets the voltage monitor channel.
BSV
Sets the voltage source channel.
BSSV
Sets the synchronous voltage source channel.
BGI
Sets the current monitor channel.
LSTM
Specifies the hold time and delay time.
LSVM
Selects the data output mode.
LSI
Sets the current source channel.
LSSI
Sets the synchronous current source channel.
LGV
Sets the voltage monitor channel.
LSV
Sets the voltage source channel.
LSSV
Sets the synchronous voltage source channel.
LGI
Sets the current monitor channel.
LSM
Sets the automatic abort function.
WDCV
Sets the DC bias sweep source for the CV sweep measurement.
WMDCV
Sets the automatic abort function, also sets the post sweep condition.
WTDCV
Sets the hold time, delay time, step delay time, and trigger delay time.
ERM
Changes the digital I/O port assignments.
ERS?
Returns the digital I/O port status.
ERC
Changes the output status of the digital I/O port.
Agilent B1500 Programming Guide, Edition 2
4-7
Command Reference
Category
External
Trigger
Program
Memory
Command
Summary
TGP
Enables the trigger function for a terminal.
TGPC
Clears the trigger setting of the specified ports.
TGSI
Selects the sweep step first or last that ignores the Start Step Output Setup
trigger input set by the TGP port,1,polarity,2 command.
TGSO
Selects the trigger type, edge or gate, for the Step Output Setup
Completion trigger output set by the TGP port,2,polarity,2 command.
TGXO
Selects the trigger type, edge or gate, for the Measurement Completion
trigger output set by the TGP port,2,polarity,1 command.
TGMO
Selects the trigger type, edge or gate, for the Step Measurement
Completion trigger output set by the TGP port,2,polarity,3 command.
OS/OSX
Causes the B1500 to send a trigger signal from a trigger output terminal.
WS/WSX
Enters a wait state until the B1500 receives an external trigger via a
trigger input terminal.
TM3
Enables use of an external trigger to release the PA/PAX state, or to start
measurement if the B1500 has not been set to the PA/PAX/WS/WSX
state. Or enables trigger set by the TGP port,terminal,polarity,1.
ST
Used with END command to store a program in the internal program
memory. The ST command indicates the beginning of the program.
END
Used with the ST command to store a program in the internal program
memory. The END command indicates the end of the program.
SCR
Scratches the specified program from the internal program memory.
VAR
Sets the value to the variable used in an internal memory program.
VAR?
Returns the value set to the internal memory program variable.
LST?
Returns a catalog of internal memory programs or a specific program
listing (3000 commands maximum).
DO
Executes internal memory programs in the order specified.
RU
Executes internal memory programs sequentially.
4-8
Agilent B1500 Programming Guide, Edition 2
Command Reference
Category
Query
Status Byte
Command
Summary
ERR?
Returns error codes.
EMG?
Returns error message for the specified error code.
*IDN?
Returns the instrument model number and the ROM version number.
LOP?
Returns the operation status of all modules.
*LRN?
Returns channel settings or the B1500 command parameter settings.
NUB?
Returns the number of measurement data items in the output data buffer.
*OPC?
Starts to monitor pending operations, or asks the OPC bit setting.
UNT?
Returns the model and revision numbers of all modules.
WNU?
Returns the number of sweep steps specified by the sweep command.
WZ?
Returns 0 if all channel output is ± 2 V or less, or 1 if any channel applies
more than ± 2 V.
*SRE
Enables the specified bits of the status byte register.
*SRE?
Returns which bits of the status byte register are enabled.
*STB?
Returns the status byte setting.
Agilent B1500 Programming Guide, Edition 2
4-9
Command Reference
Command Parameters
The parameters used by several commands are explained in this section.
•
“Channel Number”
•
“SMU Voltage Measurement Ranging Type”
•
“SMU Current Measurement Ranging Type”
•
“SMU Voltage Output Ranging Type”
•
“SMU Current Output Ranging Type”
•
“SMU Voltage Source Setup Parameters for
DV/TDV/BDV/WV/WSV/WNX/PV/PWV/LSV/BSV/MV Commands”
•
“SMU Current Source Setup Parameters for
DI/TDI/WI/WSI/WNX/PI/PWI/LSI/BSI/MI Commands”
•
“MFCMU Measurement Parameters”
•
“MFCMU Measurement Range”
In the following tables, the command parameters are put in italics such as chnum.
Table 4-1
Channel Number
chnum
1, 2, 3, 4, 5, 6, 7,
8, 9, or 10
Available module and slot number a
MPSMU installed in the slot chnum.
HPSMUb installed in the slots chnum and chnum+1.
HRSMU installed in the slot chnum.
ASU connected to the HRSMU in the slot chnum.
MFCMU installed in the slot chnum.
SCUU connected to the MFCMU in the slot chnum.
a. Slot number 1 to 10 have been assigned to the bottom slot to the top slot
respectively.
b. HPSMU occupies two slots.
4-10
Agilent B1500 Programming Guide, Edition 2
Command Reference
Table 4-2
SMU Voltage Measurement Ranging Type
Ranging type
range a
for measurement mode
without pulse
0
Auto ranging
5, for MPSMU/HRSMU
0.5 V limited auto ranging
50, for MPSMU/HRSMU
5 V limited auto ranging
20 or 11
2 V limited auto ranging
200 or 12
20 V limited auto ranging
400 or 13
40 V limited auto ranging
1000 or 14
100 V limited auto ranging
2000 or 15, for HPSMU
200 V limited auto ranging
for measurement mode
that uses pulse
Measurement channel uses
the minimum range that
covers the compliance
value.
-5, for MPSMU/HRSMU
0.5 V range fixed
-50, for MPSMU/HRSMU
5 V range fixed
-20 or -11
2 V range fixed
-200 or -12
20 V range fixed
-400 or -13
40 V range fixed
-1000 or -14
100 V range fixed
-2000 or -15, for HPSMU
200 V range fixed
a. If the measurement channel forces voltage, the channel uses the voltage output range regardless
of the range value.
NOTE
Measurement Ranging (Auto and Limited auto)
The instrument automatically selects the minimum range that covers the
measurement value, and performs the measurement by using the range. For the
limited auto ranging, the instrument does not use the range lower than the specified
range value. For example, if you select the 100 nA limited auto ranging, the
instrument never uses the 10 nA range and below.
Agilent B1500 Programming Guide, Edition 2
4-11
Command Reference
Table 4-3
SMU Current Measurement Ranging Type
Ranging type
range a
for measurement mode
without pulse
0
Auto ranging
8, for HRSMU+ASU
1 pA limited auto ranging
9, for HRSMU
10 pA limited auto ranging
10, for HRSMU
100 pA limited auto ranging
11
1 nA limited auto ranging
12
10 nA limited auto ranging
13
100 nA limited auto ranging
14
1 μA limited auto ranging
15
10 μA limited auto ranging
16
100 μA limited auto ranging
17
1 mA limited auto ranging
18
10 mA limited auto ranging
19
100 mA limited auto ranging
20, for HPSMU
1 A limited auto ranging
-8, for HRSMU+ASU
for measurement mode
that uses pulse
Measurement channel uses
the minimum range that
covers the compliance
value.
1 pA range fixed
-9, for HRSMU
10 pA range fixed
-10, for HRSMU
100 pA range fixed
-11
1 nA range fixed
-12
10 nA range fixed
-13
100 nA range fixed
-14
1 μA range fixed
-15
10 μA range fixed
-16
100 μA range fixed
-17
1 mA range fixed
-18
10 mA range fixed
-19
100 mA range fixed
-20, for HPSMU
1 A range fixed
a. If the measurement channel forces current, the channel uses the current output range regardless
of the range value.
4-12
Agilent B1500 Programming Guide, Edition 2
Command Reference
Table 4-4
SMU Voltage Output Ranging Type
range or vrange
Table 4-5
Ranging type
0
Auto ranging
5
0.5 V limited auto ranging, for MPSMU/HRSMU
50
5 V limited auto ranging, for MPSMU/HRSMU
20 or 11
2 V limited auto ranging
200 or 12
20 V limited auto ranging
400 or 13
40 V limited auto ranging
1000 or 14
100 V limited auto ranging
2000 or 15
200 V limited auto ranging, for HPSMU
SMU Current Output Ranging Type
range or
irange
Ranging type
0
Auto ranging
8
1 pA limited auto ranging, for HRSMU+ASU, not available for pulsed output
9
10 pA limited auto ranging, for HRSMU, not available for pulsed output
10
100 pA limited auto ranging, for HRSMU, not available for pulsed output
11
1 nA limited auto ranging, not available for pulsed output
12
10 nA limited auto ranging
13
100 nA limited auto ranging
14
1 μA limited auto ranging
15
10 μA limited auto ranging
16
100 μA limited auto ranging
17
1 mA limited auto ranging
18
10 mA limited auto ranging
19
100 mA limited auto ranging
20
1 A limited auto ranging, for HPSMU
Agilent B1500 Programming Guide, Edition 2
4-13
Command Reference
NOTE
Output Ranging
The instrument automatically selects the minimum range that covers the output
value, and applies voltage or current by using the range. For the limited auto
ranging, the instrument does not use the range lower than the specified range value.
For example, if you select the 100 nA limited auto ranging, the instrument never
uses the 10 nA range and below.
Table 4-6
SMU Voltage Source Setup Parameters for
DV/TDV/BDV/WV/WSV/WNX/PV/PWV/LSV/BSV/MV Commands
Output
range
(actually
used)
Setting
resolution
in V
0.5 V
25E-6
2V
voltage, start,
stop, base,
bias, or pulse
in V
Maximum Icomp value in A
HPSMU
MPSMU
HRSMU
0 to ± 0.5
NA
±100E-3
±100E-3
100E-6
0 to ± 2
±1
±100E-3
±100E-3
5V
250E-6
0 to ± 5
NA
±100E-3
±100E-3
20 V
1E-3
0 to ± 20
±1
±100E-3
±100E-3
40 V
2E-3
0 to ± 20
±500E-3
±100E-3
±100E-3
±50E-3
±50E-3
±100E-3
±100E-3
to ± 40
±50E-3
±50E-3
to ± 100
±20E-3
±20E-3
NA
NA
to ± 40
100 V
200 V
4-14
5E-3
10E-3
0 to ± 20
0 to ± 200
±125E-3
±50E-3
Agilent B1500 Programming Guide, Edition 2
Command Reference
Table 4-7
SMU Current Source Setup Parameters for
DI/TDI/WI/WSI/WNX/PI/PWI/LSI/BSI/MI Commands
Maximum Vcomp value in V
Output
range
(actually
used)
Setting
resolution
in A
current, start,
stop, base, bias,
or pulse in A
HPSMU
MPSMU
HRSMU
1 pA
1E-15
0 to ± 1.15 E-12
NA
NA
±100
10 pA
5E-15
0 to ± 11.5 E-12
±100
100 pA
5E-15
0 to ± 115 E-12
±100
1 nA
50E-15
0 to ± 1.15 E-9
±200
±100
±100
10 nA
500E-15
0 to ± 11.5 E-9
±200
±100
±100
100 nA
5E-12
0 to ± 115 E-9
±200
±100
±100
1 μA
50E-12
0 to ± 1.15E-6
±200
±100
±100
10 μA
500E-12
0 to ± 11.5E-6
±200
±100
±100
100 μA
5E-9
0 to ± 115E-6
±200
±100
±100
1 mA
50E-9
0 to ± 1.15E-3
±200
±100
±100
10 mA
500E-9
0 to ± 11.5E-3
±200
±100
±100
100 mA
5E-6
0 to ± 20E-3
±200
±100
±100
to ± 50E-3
±200
±40
±40
to ± 100E-3
±100
±20
±20
to ± 115E-3
±100
NA
NA
0 to ± 50E-3
±200
to ± 125E-3
±100
to ± 500E-3
±40
to ± 1
±20
1A
50E-6
Agilent B1500 Programming Guide, Edition 2
4-15
Command Reference
Table 4-8
MFCMU Measurement Parameters
mode
4-16
Primary Parameter
Secondary Parameter
1
R (resistance, Ω)
X (reactance, Ω)
2
G (conductance, S)
B (susceptance, S)
10
Z (impedance, Ω)
θ (phase, radian)
11
Z (impedance, Ω)
θ (phase, degree)
20
Y (admittance, S)
θ (phase, radian)
21
Y (admittance, S)
θ (phase, degree)
100
Cp (parallel capacitance, F)
G (conductance, S)
101
Cp (parallel capacitance, F)
D (dissipation factor)
102
Cp (parallel capacitance, F)
Q (quality factor)
103
Cp (parallel capacitance, F)
Rp (parallel resistance, Ω)
200
Cs (series capacitance, F)
Rs (series resistance, Ω)
201
Cs (series capacitance, F)
D (dissipation factor)
202
Cs (series capacitance, F)
Q (quality factor)
300
Lp (parallel inductance, H)
G (conductance, S)
301
Lp (parallel inductance, H)
D (dissipation factor)
302
Lp (parallel inductance, H)
Q (quality factor)
303
Lp (parallel inductance, H)
Rp (parallel resistance, Ω)
400
Ls (series inductance, H)
Rs (series resistance, Ω)
401
Ls (series inductance, H)
D (dissipation factor)
402
Ls (series inductance, H)
Q (quality factor)
Agilent B1500 Programming Guide, Edition 2
Command Reference
Table 4-9
MFCMU Measurement Range
Measurement range a
range
≤ 200 kHz
≤ 2 MHz
≤ 5 MHz
0 ≤ range < 100
50 Ω
50 Ω
50 Ω
100 ≤ range < 300
100 Ω
100 Ω
100 Ω
300 ≤ range < 1000
300 Ω
300 Ω
300 Ω
1000 ≤ range < 3000
1 kΩ
1 kΩ
1 kΩ
3000 ≤ range < 10000
3 kΩ
3 kΩ
3 kΩ
10000 ≤ range < 30000
10 kΩ
10 kΩ
30000 ≤ range < 100000
30 kΩ
30 kΩ
100000 ≤ range < 300000
100 kΩ
300000 ≤ range
300 kΩ
a. Available measurement ranges depend on the output signal frequency.
Agilent B1500 Programming Guide, Edition 2
4-17
Command Reference
Command Reference
This section contains detailed descriptions of all GPIB commands. The commands
are listed in alphabetical order. Each entry:
1. Defines one GPIB command
2. Describes the execution conditions, if any exist
3. Describes the syntax
4. Lists the parameters
5. Shows the query response after command execution, if there is a query
command
6. Explains any additional information
7. Provides examples
The following conventions are used in this section.
parameter
Required command parameters, for which you must substitute a
value or variable.
[parameter]
Optional command parameters, for which you may substitute a
value or omit it.
4-18
Agilent B1500 Programming Guide, Edition 2
Command Reference
AAD
AAD
This command is used to specify the A/D converter (ADC) type, high-speed or
high-resolution, for each measurement channel.
This command setting is ignored by the pulsed spot, pulsed sweep, and staircase
sweep with pulsed bias measurements.
Execution
Conditions
Enter the AIT command to set up the ADC.
Syntax
AAD chnum[,type]
Parameters
chnum :
Measurement channel number. The value must be slot number where
the SMU has been installed. Integer expression. 1 to 10. See Table 4-1
on page 4-10.
type :
Type of the A/D converter. Integer expression. 0 or 1.
Example
Statements
•
0: High-speed ADC (default setting). For high speed measurement.
•
1: High-resolution ADC. For high accurate measurement.
OUTPUT @B1500;"AAD 1,0"
OUTPUT @B1500;"AAD 1,1"
Agilent B1500 Programming Guide, Edition 2
4-19
Command Reference
AB
AB
The AB command aborts the present operation and subsequent command execution.
This command stops the operation now in progress, such as the measurement
execution, source setup changing, and so on. But this command does not change the
present condition. For example, if the B1500 just keeps to force the DC bias, the AB
command does not stop the DC bias output.
Syntax
AB
Conditions after
Execution
The AB command sets the B1500 as listed in the following table.
Operation before AB
Example
Statements
Setting after AB
Staircase sweep measurement
Sets specified start value.
Pulsed spot measurement
Sets specified base value.
Pulsed sweep measurement
Sets specified base value.
Staircase sweep with pulsed bias
measurement
Sets specified start value and base
value.
Quasi-pulsed spot measurement
Sets specified start value.
Sampling measurement
Sets specified base value.
Linear search measurement
Sets specified start value.
Binary search measurement
Sets specified start value.
Multi channel sweep measurement
Sets specified start value.
CV sweep measurement
Sets specified start value.
Self-test
Same as set by CL command.
Self-calibration
Same as set by CL command.
Wait state (PA/PAX/WS/WSX command)
Settings do not change.
Program execution (RU or DO command)
Settings do not change.
OUTPUT @B1500;"AB"
4-20
Agilent B1500 Programming Guide, Edition 2
Command Reference
AB
Remarks
If you start an operation that you may want to abort, do not send any command after
the command or command string that starts the operation. If you do, the AB
command cannot enter the command input buffer until the intervening command
execution starts, so the operation cannot be aborted. In this case, use the device clear
(HP BASIC CLEAR command) to end the operation.
If the AB command is entered in a command string, the other commands in the
string are not executed. For example, the CN command in the following command
string is not executed.
OUTPUT @B1500;"AB;CN"
During sweep measurement, if the B1500 receives the AB command, it returns only
the measurement data obtained before abort. Then the dummy data is not returned.
For the quasi-pulsed spot measurement, the B1500 cannot receive any command
during the settling detection. So the AB command cannot abort the operation, and it
will be performed after the settling detection.
Agilent B1500 Programming Guide, Edition 2
4-21
Command Reference
ACH
ACH
The ACH command translates the specified program channel number to the
specified actual channel number at the program execution. This command is useful
when you use a control program created for an instrument, such as the 4142B,
4155B/4155C/4156B/4156C/E5260/E5270, and B1500, that has a module
configuration different from the B1500 actually you use. After the ACH command,
enter the *OPC? command to confirm that the command execution is completed.
Syntax
ACH [actual[,program]]
Parameter
actual :
Channel number actually used for measurement instead of program.
The value must be slot number where the module has been installed.
Integer expression. 1 to 10. See Table 4-1 on page 4-10.
program : Channel number used in a program and will be replaced with actual.
Integer expression.
If you do not set program, this command is the same as ACH n,n.
If you do not set actual and program, all channel number mapping is cleared.
For parameter settings, you cannot use the variables set by the VAR command.
Remarks
The ACH commands must be put at the beginning of the program or before the
command line that includes a program channel number. In the program lines that
follow the ACH command, you must leave the program channel numbers. The
measurement data is returned as the data of the channel program, not actual.
Example
Statements
If you want to use channels 1 to 3 instead of channels 5 to 7 respectively, enter the
following statements. The measurement data is returned as the data of channel 5, not
channel 1.
OUTPUT @B1500;"ACH 1,5"
!uses ch1 instead of
OUTPUT @B1500;"ACH 2,6"
!
ch2
OUTPUT @B1500;"ACH 3,7"
!
ch3
OUTPUT @B1500;"*OPC?"
ENTER @B1500;A
!
OUTPUT @B1500;"CN 5,6,7"
!leave prog
!
|
OUTPUT @B1500;"DV 5,0,3"
!
|
OUTPUT @B1500;"DV 6,0,0"
!
|
OUTPUT @B1500;"DV 7,0,0"
!
|
!
|
OUTPUT @B1500;"TI 5,0"
!
|
ENTER @B1500 USING "#,3X,12D,X";Data!
|
PRINT "I=";Data
!
|
!
|
OUTPUT @B1500;"CL 5,6,7"
!
V
4-22
ch5
ch6
ch7
ch No.
Agilent B1500 Programming Guide, Edition 2
Command Reference
ACT
ACT
This command sets the number of averaging samples or the averaging time set to the
A/D converter of the MFCMU.
Syntax
ACT mode[,N]
Parameters
mode :
Averaging mode. Integer expression. 0 (initial setting) or 2.
•
0: Auto mode.
Defines the number of averaging samples given by the following
formula. Then initial averaging is the number of averaging samples
automatically set by the B1500 and you cannot change.
Number of averaging samples = N × initial averaging
•
2: Power line cycle (PLC) mode.
Defines the averaging time given by the following formula.
Averaging time = N / power line frequency
N:
Example
Statements
Coefficient used to define the number of averaging samples or the
averaging time. Integer expression.
•
For mode=0: 1 to 1023. Initial setting/default setting is 2.
•
For mode=2: 1 to 100. Initial setting/default setting is 1.
OUTPUT @B1500;"ACT 0,1"
OUTPUT @B1500;"ACT 2,2"
Agilent B1500 Programming Guide, Edition 2
4-23
Command Reference
ACV
ACV
This command sets the output signal level of the MFCMU, and starts the AC
voltage output. Output signal frequency is set by the FC command.
Execution
Conditions
The CN command has been executed for the specified channel.
Syntax
ACV chnum,voltage
Parameters
chnum :
Source channel number. The value must be slot number where the
MFCMU has been installed. Integer expression. 1 to 10. See Table 4-1
on page 4-10.
voltage :
Oscillator level of the output AC voltage (in V). Numeric expression.
0 mV (initial setting) to 250 mV, 1 mV step
Example
Statements
OUTPUT @B1500;"ACV 7,0.01"
ADJ
This command selects the phase compensation mode of the MFCMU. This
command initializes the MFCMU.
Syntax
ADJ slot,mode
Parameters
slot :
Slot number where the MFCMU has been installed. Integer expression.
1 to 10.
mode :
Phase compensation mode. Integer expression. 0 or 1.
0: Auto mode. Initial setting.
1: Manual mode.
For mode=0, the B1500 sets the compensation data automatically.
For mode=1, execute the ADJ? command to perform the phase
compensation and set the compensation data.
Example
Statements
OUTPUT @B1500;"ADJ 9,1"
4-24
Agilent B1500 Programming Guide, Edition 2
Command Reference
ADJ?
ADJ?
The ADJ? command performs the phase compensation of the MFCMU, and sets the
compensation data to the B1500. This command also returns the execution results.
This command resets the MFCMU.
Before executing this command, set the phase compensation mode to manual by
using the ADJ command. During this commnad, open the measurement terminals at
the end of the device side. This command execution will take about 30 seconds.
Syntax
ADJ? slot
Parameters
slot :
Query Response
results<CR/LF^EOI>
Slot number where the MFCMU has been installed. Integer expression.
1 to 10.
results returns the following value.
results
Example
Statements
Meaning
0
Passed. No failure detected.
1
Failed.
2
Aborted.
OUTPUT @B1500;"ADJ?"
ENTER @B1500;A
Agilent B1500 Programming Guide, Edition 2
4-25
Command Reference
AIT
AIT
This command is used to set the integration time or the number of averaging
samples of the A/D converter (ADC) for each ADC type.
This command setting is ignored by the pulsed spot, pulsed sweep, and staircase
sweep with pulsed bias measurements.
Execution
Conditions
Enter the AAD command to specify the ADC type for each measurement channel.
Syntax
AIT type,mode[,N]
Parameters
type :
A/D converter type. Integer expression.
0: High-speed A/D converter.
1: High-resolution A/D converter.
mode :
ADC operation mode. Integer expression. Initial setting is 0.
0: Auto mode.
1: Manual mode.
2: Power line cycle (PLC) mode.
N:
Example
Statements
Coefficient used to define the integration time or the number of
averaging samples. Integer expression. See Table 4-10.
OUTPUT @B1500;"AIT 0,2,1"
OUTPUT @B1500;"AIT 1,1,10"
4-26
Agilent B1500 Programming Guide, Edition 2
Command Reference
AIT
Table 4-10
Available Parameter Values
type
mode
N
0
0
Value that defines the number of averaging samples given by
the following formula. 1 to 1023. Default setting is 1.
Number of averaging samples = N × initial averaging
where initial averaging is the number of averaging samples
automatically set by Agilent B1500 and you cannot change.
1
Number of averaging samples. 1 to 1023. Default setting is 1.
2
Value that defines the number of averaging samples given by
the following formula. 1 to 100. Default setting is 1.
Number of averaging samples = N × 128
The Agilent B1500 gets 128 samples in a power line cycle,
repeats this for the times you specify, and performs averaging
to get the measurement data.
1
0
Value that defines the integration time given by the following
formula. 1 to 127. Default setting is 6.
Integration time = N × initial integration time
where initial integration time is the integration time
automatically set by Agilent B1500 and you cannot change.
1
Value that defines the integration time given by the following
formula. 1 to 127. Default setting is 3.
Integration time = N × 80 μsec
2
Value that defines the integration time given by the following
formula. 1 to 100. Default setting is 1.
Integration time = N / power line frequency
Agilent B1500 Programming Guide, Edition 2
4-27
Command Reference
AV
AV
This command sets the number of averaging samples of the A/D converter (ADC).
This command setting is ignored by the pulsed spot, pulsed sweep, and staircase
sweep with pulsed bias measurements.
Syntax
AV number[,mode]
Parameters
number :
1 to 1023, or −1 to −100. Initial setting is 1.
For positive number input, this value specifies the number of samples
depended on the mode value. See below.
For negative number input, this parameter specifies the number of
power line cycles (PLC) for one point measurement. The Agilent
B1500 gets 128 samples in 1 PLC. Ignore the mode parameter.
mode :
Averaging mode. Integer expression. This parameter is meaningless for
negative number.
0: Auto mode (default setting).
Number of samples = number × initial number
1: Manual mode.
Number of samples = number
where initial number means the number of samples the Agilent B1500
automatically sets and you cannot change. For voltage measurement,
initial number=1. For current measurement, see Table 4-11.
If you select the manual mode, number must be initial number or more
to satisfy the specifications.
Example
Statements
OUTPUT @B1500;"AV 10"
OUTPUT @B1500;"AV -50"
OUTPUT @B1500;"AV 100,1"
4-28
Agilent B1500 Programming Guide, Edition 2
Command Reference
AV
Table 4-11
Initial Number for Current Measurement
Current Measurement
Range
Voltage Output Range a
to 40 V
100 V
200 V
to 10 μA
4
10
25
100 μA to 1 A
1
1
1
a. For measurement channels that force current, this is the minimum range
that covers the voltage compliance value.
Agilent B1500 Programming Guide, Edition 2
4-29
Command Reference
AZ
AZ
This command is used to enable or disable the ADC zero function that is the
function to cancel offset of the high-resolution A/D converter. This function is
especially effective for low voltage measurements. Power on, *RST command, and
device clear disable the function.
This command is effective for the high-resolution A/D converter, not effective for
the high-speed A/D converter.
Syntax
AZ mode
Parameters
mode :
Mode ON or OFF.
0: OFF. Disables the function. Initial setting.
1: ON. Enables the function.
Remarks
Set the function to OFF in cases that the measurement speed is more important than
the measurement accuracy. This roughly halves the integration time.
Example
Statements
OUTPUT @B1500;"AZ 0"
BC
The BC command clears the output data buffer that stores measurement data and
query command response data. This command does not change the measurement
settings.
NOTE
Multi command statement is not allowed for this command.
Syntax
BC
Example
Statements
OUTPUT @B1500;"BC"
4-30
Agilent B1500 Programming Guide, Edition 2
Command Reference
BDM
BDM
The BDM command specifies the settling detection interval and the measurement
mode; voltage or current, for the quasi-pulsed measurements.
Syntax
BDM interval[,mode]
Parameters
interval :
Settling detection interval. Numeric expression.
0: Short. Initial setting.
1: Long. For measurements of the devices that have the stray
capacitance, or the measurements with the compliance less than 1 μA
mode :
Measurement mode. Numeric expression.
0: Voltage measurement mode. Default setting.
1: Current measurement mode.
Remarks
The following conditions must be true to perform the measurement successfully:
When interval=0: A > 1 V/ms and B ≤ 3 s
When interval=1: A > 0.1 V/ms and B ≤ 12 s
where A means the slew rate when source output sweep was started, and B means
the settling detection time. See “Quasi-Pulsed Spot Measurements” on page 2-15.
These values depend on the conditions of cabling and device characteristics. And
you cannot specify the values directly.
Example
Statements
OUTPUT @B1500;"BDM 0,1"
BDT
The BDT command specifies the hold time and delay time for the quasi-pulsed
measurements.
Syntax
BDT hold,delay
Parameters
hold :
Hold time (in sec). Numeric expression.
0 to 655.35 s, 0.01 s resolution. Initial setting is 0.
delay :
Delay time (in sec). Numeric expression.
0 to 6.5535 s, 0.0001 s resolution. Initial setting is 0.
Example
Statements
OUTPUT @B1500;"BDT 0.1,1E-3"
Agilent B1500 Programming Guide, Edition 2
4-31
Command Reference
BDV
BDV
The BDV command specifies the quasi-pulsed voltage source and its parameters.
If the output voltage is greater than ±42 V, the interlock circuit must be shorted.
Syntax
BDV chnum,range,start,stop[,Icomp]
Parameters
chnum :
Source channel number. The value must be slot number where the SMU
has been installed. Integer expression. 1 to 10. See Table 4-1 on page
4-10.
range :
Ranging type for quasi-pulsed source. Integer expression. The output
range will be set to the minimum range that covers both start and stop
values. For the limited auto ranging, the instrument never uses the
range less than the specified range. See Table 4-4 on page 4-13.
start, stop : Start or stop voltage (in V). Numeric expression. See Table 4-6 on page
4-14.
0 to ±100 for MPSMU/HRSMU, or 0 to ±200 for HPSMU
|start - stop| must be 10 V or more.
Icomp :
Current compliance (in A). Numeric expression. See Table 4-6 on page
4-14.
If you do not set Icomp, the previous value is used.
The compliance polarity is automatically set to the same polarity as the
stop value, regardless of the specified Icomp value. If stop=0, the
polarity is positive.
Remarks
Example
Statements
The time forcing the stop value will be approximately 1.5 ms to 1.8 ms with the
following settings:
•
BDM, BDT command parameters: interval=0, mode=0, delay=0
•
AV or AAD/AIT command parameters: initial setting
OUTPUT @B1500;"BDV 1,0,0,100,0.01"
4-32
Agilent B1500 Programming Guide, Edition 2
Command Reference
BGI
BGI
The BGI command sets the current monitor channel for the binary search
measurement (MM15). This command setting clears, and is cleared by, the BGV
command setting.
This command ignores the RI command setting.
Syntax
BGI chnum,mode,condition,range,target
Parameters
chnum :
Search monitor channel number. The value must be slot number where
the SMU has been installed. Integer expression. 1 to 10. See Table 4-1
on page 4-10.
mode,
condition : Search mode (0: limit mode or 1: repeat mode) and search stop
condition. The meaning of condition depends on the mode setting:
mode
condition
0
Limit value for the search target (target). The search stops
when the monitor data reaches target ± condition.
Numeric expression. Positive value. in A.
Setting resolution: range/20000. where range means the
measurement range actually used for the measurement.
1
Repeat count. The search stops when the repeat count of the
operation that changes the source output value is over the
specified value. Numeric expression. 1 to 16.
range :
Measurement ranging type. Integer expression. The measurement range
will be set to the minimum range that covers the target value. For the
limited auto ranging, the instrument never uses the range less than the
specified range. See Table 4-3 on page 4-12.
target :
Search target current (in A). Numeric expression.
0 to ±0.1 for MPSMU/HRSMU, or 0 to ±1 for HPSMU
Example
Statements
OUTPUT @B1500;"BGI 1,0,1E-8,14,1E-6"
See Also
“BSM”
Agilent B1500 Programming Guide, Edition 2
4-33
Command Reference
BGI
Remarks
In the limit search mode, if search cannot find the search target and the following
two conditions are satisfied, the B1500 repeats the binary search between the last
source value and the source start value.
•
target is between the data at source start value and the last measurement data.
•
target is between the data at source stop value and the data at:
source value = | stop − start | / 2.
If the search cannot find the search target and the following two conditions are
satisfied, the B1500 repeats the binary search between the last source value and the
source stop value.
•
target is between the data at source stop value and the last measurement data.
•
target is between the data at source start value and the data at:
source value = | stop − start | / 2.
4-34
Agilent B1500 Programming Guide, Edition 2
Command Reference
BGV
BGV
The BGV command specifies the voltage monitor channel and its search parameters
for the binary search measurement (MM15). This command setting clears, and is
cleared by, the BGI command setting.
This command ignores the RV command setting.
Syntax
BGV chnum,mode,condition,range,target
Parameters
chnum :
Search monitor channel number. The value must be slot number where
the SMU has been installed. Integer expression. 1 to 10. See Table 4-1
on page 4-10.
mode,
condition : Search mode (0: limit mode or 1: repeat mode) and search stop
condition. The meaning of condition depends on the mode setting:
mode
condition
0
Limit value for the search target (target). The search stops
when the monitor data reaches target ± condition.
Numeric expression. Positive value. in V.
Setting resolution: range/20000. where range means the
measurement range actually used for the measurement.
1
Repeat count. The search stops when the repeat count of the
operation that changes the source output value is over the
specified value. Numeric expression. 1 to 16.
range :
Measurement ranging type. Integer expression. The measurement range
will be set to the minimum range that covers the target value. For the
limited auto ranging, the instrument never uses the range less than the
specified range. See Table 4-2 on page 4-11.
target :
Search target voltage (in V). Numeric expression.
0 to ±100 for MPSMU/HRSMU, or 0 to ±200 for HPSMU
Example
Statements
OUTPUT @B1500;"BGV 1,0,0.1,12,5"
See Also
“BSM”
Agilent B1500 Programming Guide, Edition 2
4-35
Command Reference
BGV
Remarks
In the limit search mode, if search cannot find the search target and the following
two conditions are satisfied, the B1500 repeats the binary search between the last
source value and the source start value.
•
target is between the data at source start value and the last measurement data.
•
target is between the data at source stop value and the data at:
source value = | stop − start | / 2.
If the search cannot find the search target and the following two conditions are
satisfied, the B1500 repeats the binary search between the last source value and the
source stop value.
•
target is between the data at source stop value and the last measurement data.
•
target is between the data at source start value and the data at:
source value = | stop − start | / 2.
4-36
Agilent B1500 Programming Guide, Edition 2
Command Reference
BSI
BSI
The BSI command sets the current search source for the binary search measurement
(MM15). After search stops, the search channel forces the value specified by the
BSM command.
This command clears the BSV, BSSI, and BSSV command settings.
This command setting is cleared by the BSV command.
If Vcomp value is greater than ±42 V, the interlock circuit must be shorted.
Syntax
BSI chnum,range,start,stop[,Vcomp]
Parameters
chnum :
Search source channel number. The value must be slot number where
the SMU has been installed. Integer expression. 1 to 10. See Table 4-1
on page 4-10.
range :
Output ranging type. Integer expression. The output range will be set to
the minimum range that covers both start and stop values. For the
limited auto ranging, the instrument never uses the range less than the
specified range. See Table 4-5 on page 4-13.
start, stop : Search start or stop current (in A). Numeric expression. See Table 4-7
on page 4-15. The start and stop must have different values.
0 to ±0.1 for MPSMU/HRSMU, or 0 to ±1 for HPSMU
Vcomp :
Example
Statements
Voltage compliance value (in V). Numeric expression. See Table 4-7 on
page 4-15. If you do not specify Vcomp, the previous value is set.
OUTPUT @B1500;"BSI 1,0,1E-12,1E-6,10"
Agilent B1500 Programming Guide, Edition 2
4-37
Command Reference
BSM
BSM
The BSM command specifies the search source control mode in the binary search
measurement (MM15), and enables or disables the automatic abort function. The
automatic abort function stops the search operation when one of the following
conditions occurs:
•
Compliance on the measurement channel
•
Compliance on the non-measurement channel
•
Overflow on the AD converter
•
Oscillation on any channel
This command also sets the post search condition for the binary search sources.
After the search measurement is normally completed, the binary search sources
force the value specified by the post parameter.
If the search operation is stopped by the automatic abort function, the binary search
sources force the start value after search.
Syntax
BSM mode,abort[,post]
Parameters
mode :
Source output control mode, 0 (normal mode) or 1 (cautious mode).
If you do not enter this command, the normal mode is set. See Figure
4-1.
abort :
Automatic abort function. Integer expression.
1: Disables the function. Initial setting.
2: Enables the function.
post :
Source output value after the search operation is normally completed.
Integer expression.
1: Start value. Initial setting.
2: Stop value.
3: Output value when the search target value is get.
If this parameter is not set, the search source forces the start value.
Example
Statements
OUTPUT @B1500;"BSM 1,2,3"
4-38
Agilent B1500 Programming Guide, Edition 2
Command Reference
BSM
Figure 4-1
Binary Search Source Output Control Mode
Voltage or current
Stop
BSM, BST, and
BSV or BSI
-D/2
-D/8
-D/16
Search stopped
Delay time
(1) Normal output
Hold time
+D/64
+D/32
+D/4
Trigger
Delay time
Start
Stop
(2) Cautious output
BSM, BST, and
BSV or BSI
Delay time
-D/8
-D/16
Search stopped
Delay time
Hold time
+D/4
+D/32
+D/64
Trigger
Start
+D/2
: Measurement
D = | Stop - Start |
Time
Normal mode
The operation of the normal mode is explained below:
1. The source channel forces the Start value, and the monitor channel executes a
measurement.
2. The source channel forces the Stop value, and the monitor channel executes a
measurement.
If the search target value is out of the range between the measured value at the
Start value and the measured value at the Stop value, the search stops.
3. The source channel forces the Stop-D/2 value (or Stop+D/2 if Start>Stop), and
the monitor channel executes a measurement.
If the search stop condition is not satisfied, the measured data is used to decide
the direction (+ or –) of the next output change. The value of the change is
always half of the previous change.
4. Repeats the output change and measurement until the search stop condition is
satisfied.
For information on the search stop condition, see “BGI” or “BGV”. If the output
change value is less than the setting resolution, the search stops.
Agilent B1500 Programming Guide, Edition 2
4-39
Command Reference
BSM
Cautious mode
The operation of the cautious mode is explained below:
1. The source channel forces the Start value, and the monitor channel executes a
measurement.
2. The source channel forces the Start+D/2 value (or Start-D/2 if Start>Stop), and
the monitor channel executes a measurement.
If the search stop condition is not satisfied, the measured data is used to decide
the direction (+ or –) of the next output change. The value of the change is
always half of the previous change.
3. Repeats the output change and measurement until the search stop condition is
satisfied.
For information on the search stop condition, see “BGI” or “BGV”. If the output
change value is less than the setting resolution, the search stops.
4-40
Agilent B1500 Programming Guide, Edition 2
Command Reference
BSSI
BSSI
The BSSI command sets the synchronous current source for the binary search
measurement (MM15). The synchronous source output will be:
Synchronous source output = polarity × BSI source output + offset
where BSI source output means the output set by the BSI command.
This command setting is cleared by the BSV/BSI command.
Execution
Conditions
The BSI command must be sent before sending this command.
Syntax
BSSI chnum,polarity,offset[,Vcomp]
Parameters
chnum :
Synchronous source channel number. The value must be slot number
where the SMU has been installed. Integer expression. 1 to 10. See
Table 4-1 on page 4-10.
polarity :
Polarity of the BSSI output for the BSI output.
0: Negative. BSSI output = −BSI output + offset
1: Positive. BSSI output = BSI output + offset
offset :
Offset current (in A). Numeric expression.
0 to ±0.1 for MPSMU/HRSMU, or 0 to ±1 for HPSMU
Both primary and synchronous search sources will use the same output
range. So check the output range set to the BSI command to determine
the synchronous source outputs.
Vcomp :
Voltage compliance value (in V). Numeric expression. If you do not
specify Vcomp, the previous value is set.
Example
Statements
OUTPUT @B1500;"BSSI 1,0,1E-6,10"
See Also
Refer to Table 4-7 on page 4-15 for the source output value, output range, and the
available compliance values.
Agilent B1500 Programming Guide, Edition 2
4-41
Command Reference
BSSV
BSSV
The BSSV command sets the synchronous voltage source for the binary search
measurement (MM15). The synchronous source output will be:
Synchronous source output = polarity × BSV source output + offset
where BSV source output means the output set by the BSV command.
This command setting is cleared by the BSI/BSV command.
Execution
Conditions
The BSV command must be sent before sending this command.
Syntax
BSSV chnum,polarity,offset[,Icomp]
Parameters
chnum :
Synchronous source channel number. The value must be slot number
where the SMU has been installed. Integer expression. 1 to 10. See
Table 4-1 on page 4-10.
polarity :
Polarity of the BSSV output for the BSV output.
0: Negative. BSSV output = −BSV output + offset
1: Positive. BSSV output = BSV output + offset
offset :
Offset voltage (in V). Numeric expression.
0 to ±100 for MPSMU/HRSMU, or 0 to ±200 for HPSMU
Both primary and synchronous search sources will use the same output
range. So check the output range set to the BSV command to determine
the synchronous source outputs.
Icomp :
Current compliance value (in A). Numeric expression. If you do not
specify Icomp, the previous value is set. Zero amps (0 A) is not a valid
value for the Icomp parameter.
Example
Statements
OUTPUT @B1500;"BSSV 1,0,5,1E-6"
See Also
Refer to Table 4-6 on page 4-14 for the source output value, output range, and the
available compliance values.
4-42
Agilent B1500 Programming Guide, Edition 2
Command Reference
BST
BST
The BST command sets the hold time and delay time for the binary search
measurement (MM15). If you do not enter this command, all parameters are set to 0.
Syntax
BST hold,delay
Parameters
hold :
Hold time (in seconds) that is the wait time after starting the search
measurement and before starting the delay time for the first search
point. Numeric expression.
0 to 655.35 sec. 0.01 sec resolution.
delay :
Delay time (in seconds) that is the wait time after starting to force a step
output value and before starting a step measurement. Numeric
expression.
0 to 65.535 sec. 0.0001 sec resolution.
Example
Statements
OUTPUT @B1500;"BST 5,0.1"
Agilent B1500 Programming Guide, Edition 2
4-43
Command Reference
BSV
BSV
The BSV command sets the voltage search source for the binary search
measurement (MM15). After search stops, the search channel forces the value
specified by the BSM command.
This command clears the BSI, BSSI, and BSSV command settings.
This command setting is cleared by the BSI command.
If the output voltage is greater than ±42 V, the interlock circuit must be shorted.
Syntax
BSV chnum,range,start,stop[,Icomp]
Parameters
chnum :
Search source channel number. The value must be slot number where
the SMU has been installed. Integer expression. 1 to 10. See Table 4-1
on page 4-10.
range :
Output ranging type. Integer expression. The output range will be set to
the minimum range that covers both start and stop values. For the
limited auto ranging, the instrument never uses the range less than the
specified range. See Table 4-4 on page 4-13.
start, stop : Search start or stop voltage (in V). Numeric expression. See Table 4-6
on page 4-14. The start and stop parameters must have different values.
0 to ±100 for MPSMU/HRSMU, or 0 to ±200 for HPSMU
Icomp :
Example
Statements
Current compliance value (in A). Numeric expression. See Table 4-6 on
page 4-14. If you do not specify Icomp, the previous value is set. Zero
amps (0 A) is not allowed for Icomp.
OUTPUT @B1500;"BSV 1,0,0,20,1E-6"
4-44
Agilent B1500 Programming Guide, Edition 2
Command Reference
BSVM
BSVM
The BSVM command selects the data output mode for the binary search
measurement (MM15).
Syntax
BSVM mode
Parameters
mode :
Data output mode. Integer expression.
0 : Returns Data_search only (initial setting).
1 : Returns Data_search and Data_sense.
Data_search is the value forced by the search output channel set by BSI or BSV.
Data_sense is the value measured by the monitor channel set by BGI or BGV.
For data output format, refer to “Data Output Format” on page 1-23.
Example
Statements
OUTPUT @B1500;"BSVM 1"
Agilent B1500 Programming Guide, Edition 2
4-45
Command Reference
CA
CA
The CA command performs the self-calibration of the specified modules (SMU).
Failed modules are disabled, and can only be enabled by the RCV command.
After the CA command, enter the *OPC? command to confirm that the command
execution is completed.
Execution
Conditions
No SMU may be in the high voltage state (forcing more than ±42 V, or voltage
compliance set to more than ±42 V).
Before starting the calibration, open the measurement terminals.
Syntax
CA [slotnum]
Parameters
slotnum :
Slot number of the slot that installs the module to perform the
self-calibration. Integer expression. 1 to 10.
If you do not specify slotnum, this command performs the self-calibration for the
mainframe and all modules.
If slotnum specifies the slot that installs no module, this command causes an error.
Example
Statements
OUTPUT @B1500;"CA"
OUTPUT @B1500;"*OPC?"
ENTER @B1500;A
4-46
Agilent B1500 Programming Guide, Edition 2
Command Reference
*CAL?
*CAL?
The CAL? query command performs the self-calibration of the specified modules
(SMU), and returns the results.
Failed modules are disabled, and can only be enabled by the RCV command.
After the *CAL? command, read the results soon.
Execution
Conditions
No SMU may be in the high voltage state (forcing more than ±42 V, or voltage
compliance set to more than ±42 V).
Before starting the calibration, open the measurement terminals.
Syntax
*CAL? [slotnum]
Parameters
slotnum :
Slot number of the slot that installs the module to perform the
self-calibration. Integer expression. 0 to 11.
0: All modules and mainframe. Default setting.
1 to 10: Module installed in the slot specified by slotnum.
11: Mainframe.
If slotnum specifies the slot that installs no module, this command causes an error.
Query Response
results<CR/LF^EOI>
results returns the sum of the following values corresponding to the failures.
Example
Statements
results
Description
results
Description
0
Passed. No failure detected.
32
Slot 6 module failed.
1
Slot 1 module failed.
64
Slot 7 module failed.
2
Slot 2 module failed.
128
Slot 8 module failed.
4
Slot 3 module failed.
256
Slot 9 module failed.
8
Slot 4 module failed.
512
Slot 10 module failed.
16
Slot 5 module failed.
1024
Mainframe failed.
OUTPUT @B1500;"*CAL?"
ENTER @B1500;A
Agilent B1500 Programming Guide, Edition 2
4-47
Command Reference
CL
CL
The CL command disables the specified channels.
Execution
Conditions
No channel may be in the high voltage state (forcing more than ±42 V, or voltage
compliance set to more than ±42 V). However, if you do not specify chnum for CL
command, there are no restrictions on the execution conditions.
Syntax
CL [chnum[,chnum...[,chnum]...]]
A maximum of ten channels can be set.
Parameters
chnum :
Channel number. The value must be slot number where the module has
been installed. Integer expression. 1 to 10. See Table 4-1 on page 4-10.
If you specify multiple chnums, the channels will be disabled in the specified order.
If you do not specify chnum, all channels will be disabled in the order from higher to
lower voltage output range or measurement range.
Remarks
The CL command sets the specified SMU/MFCMU to the following conditions:
SMU setup parameter
Value
MFCMU setup parameter
Value
Output switch
OFF
DC bias
0V
Source mode
Voltage
AC level
0V
Output voltage
0V
Output signal frequency
1 kHz
V range
20 V
Measurement range
50 Ω
I compliance
100 μA
I range
100 μA
Filter
OFF
Series resistor
Not changed
After this command, there is no additional power consumption for the idle state.
Example
Statements
OUTPUT @B1500;"CL"
OUTPUT @B1500;"CL 1,2,3,5"
4-48
Agilent B1500 Programming Guide, Edition 2
Command Reference
CLCORR
CLCORR
This command disables the open/short/load correction function and clears the
frequency list for the correction data measurement. The correction data will be
invalid after this command.
Syntax
CLCORR slot,mode
Parameters
slot :
Slot number where the MFCMU has been installed. Integer expression.
1 to 10.
mode :
Command option. Integer expression. 1 or 2.
1: Just clears the frequency list.
2: Clears the frequency list and sets the default frequencies, 1 k, 2 k,
5 k, 10 k, 20 k, 50 k, 100 k, 200 k, 500 k, 1 M, 2 M, and 5 MHz.
Example
Statements
OUTPUT @B1500;"CLCORR 9,1"
CM
The CM command sets the SMU auto-calibration function to ON or OFF. If the
following two conditions are satisfied, the B1500 automatically calibrates all
modules every 30 minutes.
•
Auto-calibration is ON.
•
For all SMUs, the output switch has been OFF for 30 minutes.
Syntax
CM mode
Parameters
mode :
Auto-calibration ON or OFF. Integer expression.
0: OFF (initial setting)
1: ON
Remarks
Before starting the calibration, open the measurement terminals.
If the auto-calibration is enabled, do not forget to open the measurement terminals
after measurements.
Example
Statements
OUTPUT @B1500;"CM 0"
OUTPUT @B1500;"CM 1"
Agilent B1500 Programming Guide, Edition 2
4-49
Command Reference
CMM
CMM
The CMM command sets the SMU measurement operation mode. This command is
not available for the high speed spot measurement.
Syntax
CMM chnum,mode
Parameters
chnum :
Channel number. The value must be slot number where the SMU has
been installed. Integer expression. 1 to 10. See Table 4-1 on page 4-10.
mode :
SMU measurement operation mode. Integer expression.
•
0: Compliance side measurement (initial setting).
•
1: SMU always performs current measurement.
•
2: SMU always performs voltage measurement.
•
3: Force side measurement.
If mode=0, SMU measures current when it forces voltage, or measures voltage when
it forces current.
If mode=3, SMU measures current when it forces current, or measures voltage when
it forces voltage.
The mode setting is kept until the mode is changed by this command. If you want to
return it to the initial setting, enter the CMM command with mode=0.
Example
Statements
OUTPUT @B1500;"CMM 1,1"
4-50
Agilent B1500 Programming Guide, Edition 2
Command Reference
CN
CN
This command enables the specified channels.
WARNING
THIS COMMAND ENABLES SMU TO FORCE DANGEROUS VOLTAGES.
WHEN THE CHANNEL IS NOT IN USE, SET THE OUTPUT SWITCH TO
"OFF" WHENEVER POSSIBLE.
Execution
Conditions
No channel may be in the high voltage state (forcing more than ±42 V, or voltage
compliance set to more than ±42 V).
Syntax
CN [chnum[,chnum...[,chnum]...]]
A maximum of ten channels can be set.
Parameters
chnum :
Channel number. The value must be slot number where the module has
been installed. Integer expression. 1 to 10. See Table 4-1 on page 4-10.
If the output switch of the specified SMU is already set to ON, no action is
performed by this command.
If you do not specify chnum, all channels will be enabled in the order from lower to
higher slot number.
If you specify multiple chnums, the channels will be enabled in the specified order.
If you specify the HRSMU connected to the ASU, this command enables the
HRSMU and connects the path to the ASU output.
If you specify a SMU connected to the SCUU, this command enables the SMU and
connects the path to the SCUU output.
If you specify the MFCMU connected to the SCUU, this command enables the
MFCMU and connects the path to the SCUU output.
If you specify both MFCMU and SMU connected to the SCUU, this command
causes an error.
If you enter the CN command without chnum parameter to the B1500A installed
with the SCUU, this command enables the SMUs except for the SMUs connected to
the SCUU, enables the MFCMU, and connects the path to the SCUU output.
Agilent B1500 Programming Guide, Edition 2
4-51
Command Reference
CN
Remarks
The CN command sets the specified SMU/MFCMU to the following conditions:
SMU setup parameter
Value
MFCMU setup parameter
Value
Output switch
ON
DC bias
0V
Source mode
Voltage
AC level
0V
Output voltage
0V
Output signal frequency
1 kHz
V range
20 V
Measurement range
50 Ω
I compliance
100 μA
I range
100 μA
Filter
Not changed
Series resistor
Not changed
After this command, there is no additional power consumption for the idle state.
Example
Statements
OUTPUT @B1500;"CN"
OUTPUT @B1500;"CN 1,2,3,5"
4-52
Agilent B1500 Programming Guide, Edition 2
Command Reference
CORR?
CORR?
This command performs the open, short. or load correction data measurement.
Before executing this command, set the oscillator level of the MFCMU output
signal by using the ACV command.
If you use the correction standard, execute the DCORR command before this
command. The calibration value or the reference value of the standard must be
defined before executing this command.
Execution
Conditions
To measure the open correction data, connect the open standard that has the
calibration value or reference value, or open the measurement terminals at the end of
the device side.
To measure the short correction data, connect the short standard that has the
calibration value or reference value, or connect the measurement terminals together
at the end of the device side.
To measure the load correction data, connect the load standard that has the
calibration value or reference value.
Syntax
CORR? slot,corr
Parameters
slot :
Slot number where the MFCMU has been installed. Integer
expression. 1 to 10.
corr :
Correction data to measure. Integer expression. 1, 2, or 3.
1: Open correction data
2: Short correction data
3: Load correction data
Query Response
result <CR/LF^EOI>
0: Correction data measurement completed successfully.
1: Correction data measurement failed.
2: Correction data measurement aborted.
Example
Statements
OUTPUT @B1500;"CORR? 9,3"
ENTER @B1500;Result
Agilent B1500 Programming Guide, Edition 2
4-53
Command Reference
CORRL
CORRL
This command disables the open/short/load correction function and adds the
specified frequency to the frequency list for the correction data measurement. The
correction data will be invalid after this command.
Syntax
CORRL slot,freq
Parameters
slot :
Slot number where the MFCMU has been installed. Integer expression.
1 to 10.
freq :
Frequency to be added. Numeric expression. in Hz.
Example
Statements
OUTPUT @B1500;"CORRL 9,3000000"
CORRL?
This command returns the frequency stored in the frequency list for the correction
data measurement.
Syntax
CORRL? slot[,index]
Parameters
slot :
Slot number where the MFCMU has been installed. Integer expression.
1 to 10.
index :
Index number of the list. Integer expression.
Query Response
•
CORRL? slot returns:
number_of_frequencies <CR/LF^EOI>
This value is the number of frequencies stored in the list.
•
CORRL? slot,index returns:
frequency <CR/LF^EOI>
This value is the frequency corresponding to the specified index.
Example
Statements
OUTPUT @B1500;"CLCORR 9,2"
OUTPUT @B1500;"CORRL? 9"
ENTER @B1500;Number
OUTPUT @B1500;"CORRL? 9,4"
ENTER @B1500;Freq
This example returns Number=12 and Freq=10000.
4-54
Agilent B1500 Programming Guide, Edition 2
Command Reference
CORRST
CORRST
This command enables or disables the open/short/load correction function.
Before setting a function to ON, perform the corresponding correction data
measurement by using the CORR? command.
Syntax
CORRST slot,corr,state
Parameters
slot :
Slot number where the MFCMU has been installed. Integer
expression. 1 to 10.
corr :
Correction mode. Integer expression. 1, 2, or 3.
1: Open correction
2: Short correction
3: Load correction
state :
Correction function state. Integer expression. 0 (correction OFF) or
1 (correction ON).
CORRST?
This command returns the open/short/load correction function ON or OFF.
Syntax
CORRST? slot,corr
Parameters
slot :
Slot number where the MFCMU has been installed. Integer
expression. 1 to 10.
corr :
Correction mode. Integer expression. 1, 2, or 3.
1: Open correction
2: Short correction
3: Load correction
Query Response
status <CR/LF^EOI>
0: Disable (correction OFF)
1: Enable (correction ON)
Example
Statements
OUTPUT @B1500;"CORRST 9,3,1"
OUTPUT @B1500;"CORRST? 9,3"
ENTER @B1500;Status
The above example returns Status=1.
Agilent B1500 Programming Guide, Edition 2
4-55
Command Reference
DCORR
DCORR
This command disables the open/short/load correction function and defines the
calibration value or the reference value of the open/short/load standard. The
correction data will be invalid after this command.
Syntax
DCORR slot,corr,mode,primary,secondary
Parameters
slot :
Slot number where the MFCMU has been installed. Integer
expression. 1 to 10.
corr :
Correction mode. Integer expression. 1, 2, or 3.
1: Open correction
2: Short correction
3: Load correction
mode :
Measurement mode. Integer expression. 100 or 400.
100: Cp-G (for open correction)
400: Ls-Rs (for short or load correction)
primary :
Primary reference value of the standard. Numeric expression.
Cp value for the open standard. in F.
Ls value for the short or load standard. in H.
secondary :
Secondary reference value of the standard. Numeric expression.
G value for the open standard. in S.
Rs value for the short or load standard. in Ω.
Example
Statements
OUTPUT @B1500;"DCORR 9,3,400,0.00001,49.8765"
4-56
Agilent B1500 Programming Guide, Edition 2
Command Reference
DCORR?
DCORR?
This command returns the calibration value or the reference value of the
open/short/load standard.
Syntax
DCORR? slot,corr
Parameters
slot :
Slot number where the MFCMU has been installed. Integer
expression. 1 to 10.
corr :
Correction mode. Integer expression. 1, 2, or 3.
1: Open correction
2: Short correction
3: Load correction
Query Response
mode,primary,secondary <CR/LF^EOI>
mode :
Measurement mode. Integer expression. 100 or 400.
100: Cp-G (for open correction)
400: Ls-Rs (for short or load correction)
primary :
Primary reference value of the standard. Numeric expression.
Cp value for the open standard. in F.
Ls value for the short or load standard. in H.
secondary :
Secondary reference value of the standard. Numeric expression.
G value for the open standard. in S.
Rs value for the short or load standard. in Ω.
Example
Statements
OUTPUT @B1500;"DCORR 9,3,400,0.00001,49.8765"
OUTPUT @B1500;"DCORR? 9,3"
ENTER @B1500;Mode,Primary,Secondary
This example returns Mode=400, Priamry=0.00001, Secondary=49.8765.
Agilent B1500 Programming Guide, Edition 2
4-57
Command Reference
DCV
DCV
This command forces DC bias (voltage, up to ±25 V) from the MFCMU. When the
SCUU (SMU CMU unify unit) is connected, output up to ±100 V is available by
using the SMU that can be connected to the Force1/Sense1 terminals.
Execution
Conditions
The CN command has been executed for the specified channel.
If you want to apply DC voltage over ±25 V, the SCUU must be connected correctly.
The SCUU can be used with the MFCMU and two SMUs (MPSMU or HRSMU).
The SCUU cannot be used if the HPSMU is connected to the SCUU or if the
number of SMUs connected to the SCUU is only one.
If the output voltage is greater than ±42 V, the interlock circuit must be shorted.
Syntax
DCV chnum,voltage
Parameters
chnum :
Source channel number. The value must be slot number where the
MFCMU has been installed. Integer expression. 1 to 10. See Table 4-1
on page 4-10.
voltage :
DC voltage (in V). Numeric expression.
0 (initial setting) to ±100 V
With the SCUU, the source module is automatically selected by the
setting value. The MFCMU is used if voltage is below ±25 V (setting
resolution: 0.001 V), or the SMU is used if voltage is greater than
±25 V (setting resolution: 0.005 V).
The SMU will operate with the 100 V limited auto ranging and 20 mA
compliance settings.
Example
Statements
OUTPUT @B1500;"DCV 7,1"
4-58
Agilent B1500 Programming Guide, Edition 2
Command Reference
DI
DI
The DI command forces DC current from the specified SMU.
Execution
Conditions
The CN command has been executed for the specified channel.
Syntax
DI chnum,irange,current[,Vcomp[,comp_polarity[,vrange]]]
Parameters
chnum :
Source channel number. The value must be slot number where the SMU
has been installed. Integer expression. 1 to 10. See Table 4-1 on page
4-10.
irange :
Ranging type for current output. Integer expression. The output range
will be set to the minimum range that covers current value. For the
limited auto ranging, the instrument never uses the range less than the
specified range. See Table 4-5 on page 4-13.
current :
Output current value (in A). Numeric expression. See Table 4-7 on page
4-15.
If Vcomp value is greater than ±42 V, the interlock circuit must be shorted.
0 to ±0.1 for MPSMU/HRSMU, or 0 to ±1 for HPSMU
Vcomp :
comp_
polarity :
Voltage compliance value (in V). Numeric expression. See Table 4-7 on
page 4-15. If you do not specify this parameter, Vcomp is set to the
previous setting.
Polarity of voltage compliance. Integer expression.
0: Auto mode (default setting). The compliance polarity is
automatically set to the same polarity as current, regardless of the
specified Vcomp. If current=0 A, the polarity is set to positive.
1: Manual mode. Uses the polarity of Vcomp you specified.
vrange :
Example
Statements
Voltage compliance ranging type. Integer expression. The compliance
range will be set to the minimum range that covers Vcomp value. For
the limited auto ranging, the instrument never uses the range less than
the specified range. See Table 4-4 on page 4-13.
OUTPUT @B1500;"DI 1,0,1E-6"
OUTPUT @B1500;"DI 3,14,5E-7,20,0,0"
Agilent B1500 Programming Guide, Edition 2
4-59
Command Reference
DIAG?
DIAG?
The DIAG? command starts the diagnostics, and returns the results.
Before starting the diagnostics, refer to Remarks below.
After the DIAG? command, read the results soon.
Syntax
DIAG? item[,pause]
Parameters
item :
Diagnostics item. Integer expression. 1 to 5.
item
pause :
Query Response
Description
1
Trigger In/Out diagnostics.
3
High voltage LED diagnostics.
4
Digital I/O diagnostics.
Place holder to keep the compatibility with the FLEX command of
other instruments.
result <CR/LF^EOI>
0: Passed.
1: Failed.
2: Aborted.
Remarks
•
Before executing DIAG? 1 (trigger in/out diagnostics), connect a BNC cable
between the Ext Trig In and Out connectors.
•
After executing DIAG? 3 (high voltage LED diagnostics), confirm the status of
LED. Then enter the AB command. result returns 2.
If the LED does not blink, the B1500 must be repaired.
•
Example
Statements
Before executing DIAG? 4 (digital I/O diagnostics), disconnect any cable from
the digital I/O port.
OUTPUT @B1500;"DIAG? 1"
ENTER @B1500;A
4-60
Agilent B1500 Programming Guide, Edition 2
Command Reference
DO
DO
The DO command executes the B1500 internal memory programs (up to 8
programs) in the order specified.
Execution
Conditions
The specified programs have been stored by using the ST and END commands.
Syntax
DO pnum[,pnum[,pnum[,pnum[,pnum[,pnum[,pnum[,pnum]]]]]]]
Parameters
pnum :
Example
Statements
OUTPUT @B1500;"DO 1,2,3,4,5,6,7,8"
OUTPUT @B1500;"DO 98,99"
Internal memory program number. Numeric expression. 1 to 2000.
Agilent B1500 Programming Guide, Edition 2
4-61
Command Reference
DV
DV
The DV command forces DC voltage from the specified SMU.
Execution
Conditions
The CN command has been executed for the specified channel.
Syntax
DV chnum,vrange,voltage[,Icomp[,comp_polarity[,irange]]
Parameters
chnum :
Source channel number. The value must be slot number where the SMU
has been installed. Integer expression. 1 to 10. See Table 4-1 on page
4-10.
vrange :
Ranging type for voltage output. Integer expression. The output range
will be set to the minimum range that covers voltage value. For the
limited auto ranging, the instrument never uses the range less than the
specified range. See Table 4-4 on page 4-13.
voltage :
Output voltage value (in V). Numeric expression. See Table 4-6 on
page 4-14.
If the output voltage is greater than ±42 V, the interlock circuit must be shorted.
0 to ±100 for MPSMU/HRSMU, or 0 to ±200 for HPSMU
Icomp :
comp_
polarity :
Current compliance value (in A). Numeric expression. See Table 4-6 on
page 4-14. If you do not set Icomp, the previous value is used. 0 A is
not allowed for Icomp.
Polarity of current compliance. Integer expression.
0: Auto mode (default setting). The compliance polarity is
automatically set to the same polarity as voltage, regardless of the
specified Icomp. If voltage=0 V, the polarity is set to positive.
1: Manual mode. Uses the polarity of Icomp you specified.
irange :
Example
Statements
Current compliance ranging type. Integer expression. The compliance
range will be set to the minimum range that covers Icomp value. For the
limited auto ranging, the instrument never uses the range less than the
specified range. See Table 4-5 on page 4-13.
OUTPUT @B1500;"DV 1,0,20,1E-6,0,15"
OUTPUT @B1500;"DV 2,12,10"
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Agilent B1500 Programming Guide, Edition 2
Command Reference
DZ
DZ
The DZ command stores the settings (V/I output values, V/I output ranges, V/I
compliance values, and so on) of the specified channels, and sets the channels to 0
V. The settings can be recovered by using the RZ command. The stored settings are
cleared by using a device clear (HP BASIC CLEAR) command, *RST, RZ, CL, CA,
or *TST?.
Syntax
DZ [chnum[,chnum...[,chnum]...]]
A maximum of ten channels can be set.
Parameters
chnum :
Channel number. The value must be slot number where the module has
been installed. Integer expression. 1 to 10. See Table 4-1 on page 4-10.
If you specify multiple chnums, the channel outputs will be set to 0 V in the
specified order.
If you do not specify chnum, all channels with the output switch ON will be set to 0
V, in order from higher to lower voltage output range or measurement range.
Remarks
The DZ command sets the specified SMU/MFCMU to the following conditions:
SMU setup parameter
Value
MFCMU setup parameter
Value
Source mode
Voltage
DC bias
0V
Output voltage
0V
AC level
0V
V range
Not changed
Output signal frequency
Not changed
I compliance
See next table
Measurement range
50 Ω
I range
See next table
Filter
Not changed
Series resistor
Not changed
Previous range a
I Range
I Compliance
1 nA to 100 μA
same as previous range
range value
over 100 μA
100 μA
100 μA
a. Range value that was set before the DZ command.
Example
Statements
OUTPUT @B1500;"DZ 1,2,3"
Agilent B1500 Programming Guide, Edition 2
4-63
Command Reference
EMG?
EMG?
The EMG? query command returns error message corresponding to the specified
error code.
Syntax
EMG? errcode
Parameters
errcode :
Query Response
Error message <CR/LF^EOI>
Error code returned by the ERR? command. Numeric expression.
For the error codes and error messages, refer to Chapter 5, “Error Messages.”
Example
Statements
OUTPUT @B1500;"EMG? 100"
ENTER @B1500;A$
END
The END command is used with the ST command to store a program in the internal
program memory. See “ST” on page 4-128.
Syntax
END
Example
Statements
OUTPUT @B1500;"ST1;CN1;DV1,0,5,1E-4;TI1,0;CL1"
OUTPUT @B1500;"END"
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Agilent B1500 Programming Guide, Edition 2
Command Reference
ERC
ERC
The ERC command changes the output status of the digital I/O port. This command
does not change the status of the trigger ports and the input ports set by the ERM
command.
The *RST command or the device clear sets the digital I/O port (total 16 paths) to
the output port, and sets the port output level to TTL high.
Syntax
ERC mode,value[,rule]
Parameters
mode :
Control mode. Integer expression. Set mode to 2.
2: Controls the digital I/O port.
If you set 1 that is effective for the Agilent 4142B, an error occurs.
value :
Decimal value of the output status bit pattern. Integer expression. 0 to
65535. The bit pattern must comply with the following rule:
Bit value 0: TTL high level (approx. 2.4 V)
Bit value 1: TTL low level (approx. 0.8 V)
rule :
Example
Statements
Place holder to keep the same syntax as the ERC command of the
Agilent 4142B. Input value is ignored.
If you want to set TTL low level for the output ports of the digital I/O port bit 0 to 7,
enter the following command.
OUTPUT @B1500;"ERC 2,255"
where the decimal value 255 means binary bit pattern 0000000011111111. This
command does not change the status of the trigger ports and the input ports.
See Also
“ERM” and “ERS?”
Agilent B1500 Programming Guide, Edition 2
4-65
Command Reference
ERM
ERM
The ERM command changes the input/output assignments of the digital I/O port
(total 16 paths). This command does not change the trigger port assignments and
settings.
The *RST command or the device clear sets the digital I/O port to the output port,
and sets the port output level to TTL high.
Syntax
ERM iport
Parameters
iport :
Decimal value of the port setting. Integer expression. 0 to 65535.
The setting of each port must be designated by 0 or 1 that has the
following meaning:
0: Output port
1: Input port
Example
Statements
If you want to use the non-trigger ports of the digital I/O ports 0 to 7 as the input
port, enter the following statement.
OUTPUT @B1500;"ERM 255"
where the decimal value 255 means binary bit pattern 0000000011111111.
Remarks
The ERM command sets the port level to TTL high for all ports where the port
assignment is changed from output to input or from input to output.
The ERM command does not change the port assignment of the trigger ports.
See Also
“ERS?”
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Agilent B1500 Programming Guide, Edition 2
Command Reference
ERR?
ERR?
The ERR? query command returns error codes from the B1500 error register to the
output data buffer (query buffer).
This command clears the error register.
Syntax
ERR? [mode]
Parameters
mode :
Error code output mode. Integer expression. 0 (default setting) or 1.
0: Returns up to four error codes in order from their occurrence.
1: Returns one error code.
If you do not specify mode, the ERR? command returns four error codes (same as
mode=0).
Query Response
Error Code,Error Code,Error Code,Error Code <CR/LF^EOI>
or
Error Code <CR/LF^EOI>
For the error codes, refer to Chapter 5, “Error Messages.” If no error occurred, Error
Code is 0.
Example
Statements
OUTPUT @B1500;"ERR?"
ENTER @B1500;A$
OUTPUT @B1500;"ERR? 1"
ENTER @B1500;A
Agilent B1500 Programming Guide, Edition 2
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Command Reference
ERS?
ERS?
The ERS? command returns the status of the digital I/O port (16 paths).
Syntax
ERS?
Query Response
pattern <CR/LF^EOI>
pattern returns the decimal value of the port status.
The status of each port is designated by 0 or 1 that has the following meaning:
0: TTL high level (approx. 2.4 V)
1: TTL low level (approx. 0.8 V)
Example
Statements
OUTPUT @B1500;"ERS?"
ENTER @B1500;A
PRINT "Port Status=";A
For example, 255 (0000000011111111) is returned when the port 0 to 7 have been
set to the TTL low level and the port 8 to 15 have been set to the TTL high level.
See Also
“ERM”
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Agilent B1500 Programming Guide, Edition 2
Command Reference
FC
FC
This command sets the output signal frequency of the MFCMU.
Execution
Conditions
The CN command has been executed for the specified channel (MFCMU).
Syntax
FC chnum,freq
Parameters
chnum :
Source channel number. The value must be slot number where the
MFCMU has been installed. Integer expression. 1 to 10.
freq :
Frequency (in Hz). Numeric expression.
1000 (1 kHz, initial setting) to 5000000 (5 MHz)
Setting resolution: 1 mHz (1 kHz to), 10 mHz (10 kHz to),
0.1 Hz (100 kHz to), or 1 Hz (1 MHz to 5 MHz).
Example
Statements
OUTPUT @B1500;"FC 7,1000000"
FL
This command sets the connection mode of a SMU filter for each channel.
A filter is mounted on the SMU. It assures clean source output with no spikes or
overshooting.
Syntax
FL mode[,chnum[,chnum...[,chnum]...]]
A maximum of ten channels can be set.
Parameters
mode :
Status of the filter. Integer expression.
0: Disconnect (initial setting).
1: Connect.
chnum :
Channel number. The value must be slot number where the SMU has
been installed. Integer expression. 1 to 10. See Table 4-1 on page 4-10.
If you do not specify chnum, the FL command sets the same mode for all channels.
Example
Statements
OUTPUT @B1500;"FL"
OUTPUT @B1500;"FL 0,1,3,5"
Agilent B1500 Programming Guide, Edition 2
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Command Reference
FMT
FMT
This command clears the B1500 output data buffer, and specifies the data output
format. For details about data output format, see “Data Output Format” on page
1-23. Without this command, the data output format is same as the format by the
FMT1,0 command.
Query command output data is always stored in the query buffer in ASCII format,
regardless of this command.
NOTE
Multi command statement is not allowed for this command.
Syntax
FMT format[,mode]
Parameters
format :
Data output format. Integer expression. 1 to 5, 11 to 15, 21, 22, or 25.
See Table 4-13.
mode :
Data output mode. Integer expression. 0 to 10. See Table 4-12. Without
setting the mode value, only the measurement data is returned.
For the sampling measurement, the sampling point is returned when
mode<>0 is set.
Example
Statements
OUTPUT @B1500;"FMT 1"
OUTPUT @B1500;"FMT 2,1"
Table 4-12
FMT mode parameter
mode
Source data returned with measurement data
0
None (default setting). Only the measurement data is returned.
1
Data of the primary sweep source set by the WI/WV/PWI/PWV/
WDCV command.
2
Data of the synchronous sweep source set by the WSI/WSV
command.
2 to 10
For the multi channel sweep measurement:
Data of the synchronous sweep source set by the WNX command.
The mode value must be the sweep source number (2 to 10) you
want to get data. For the sweep source number, refer to “WNX” on
page 4-159.
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Agilent B1500 Programming Guide, Edition 2
Command Reference
FMT
Table 4-13
FMT format parameter
format
Data format
Terminator
1a
ASCII (12 digits data with header)
<CR/LF^EOI>
2a
ASCII (12 digits data without header)
<CR/LF^EOI>
3a
4 byte binary
<CR/LF^EOI>
4a
4 byte binary
<^EOI>
5a
ASCII (12 digits data with header)
,
11
ASCII (13 digits data with header)
<CR/LF^EOI>
12
ASCII (13 digits data without header) b
<CR/LF^EOI>
13
8 byte binary
<CR/LF^EOI>
14
8 byte binary
<^EOI>
15
ASCII (13 digits data with header)
,
21
ASCII (13 digits data with header) b
<CR/LF^EOI>
22
ASCII (13 digits data without header) b
<CR/LF^EOI>
25
ASCII (13 digits data with header) b
,
a. Compatible with the Agilent 4142B data output format.
b. Compatible with the Agilent 4155/4156 FLEX mode ASCII data.
12 digits data will be sn.nnnnnEsnn, snn.nnnnEsnn, or snnn.nnnEsnn.
13 digits data will be sn.nnnnnnEsnn, snn.nnnnnEsnn, or
snnn.nnnnEsnn.
where, s is + or -, E is exponent symbol, and n means one digit number.
NOTE
For the 4 byte binary data output format, the time stamp function is not available.
Refer to “Data Output Format” on page 1-23.
Agilent B1500 Programming Guide, Edition 2
4-71
Command Reference
*IDN?
*IDN?
The *IDN? query command returns the instrument model number and the firmware
revision number.
Syntax
*IDN?
Query Response
Agilent Technologies,model,0,revision <CR/LF^EOI>
Response
Explanation
model
B1500A
revision
Firmware revision number. Example: A.01.00
Example
Statements
OUTPUT @B1500;"*IDN?"
ENTER @B1500;A$
Example
Response
Agilent Technologies,B1500A,0,A.01.00
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Agilent B1500 Programming Guide, Edition 2
Command Reference
IMP
IMP
The IMP command specifies the parameter measured by the MFCMU. This
command is effective for the following commands and the following measurement
mode. The MFCMU can measure two parameters.
Execution
Conditions
•
TC command
•
TTC command
•
Spot C measurement (MM17)
•
CV sweep measurement (MM18)
This command is not effective for the binary data output format (FMT3, FMT4,
FMT13, and FMT14). Then one of the following couples will be measured. They
will be automatically selected by the B1500, and will be a couple without data
overflow.
•
R (resistance, Ω) and X (reactance, Ω)
•
G (conductance, S) and B (susceptance, S)
Syntax
IMP mode
Parameters
mode :
Measurement mode. 1 to 402. Integer expression. See Table 4-8 on
page 4-16.
Initial setting: mode=100 (Cp-G measurement)
Example
Statements
OUTPUT @B1500;"IMP 10"
Agilent B1500 Programming Guide, Edition 2
4-73
Command Reference
IN
IN
The IN command sets the specified channel to 0 V with an output range change.
Syntax
IN [chnum[,chnum...[,chnum]...]]
A maximum of ten channels can be set.
Parameters
chnum :
Channel number. The value must be slot number where the module has
been installed. Integer expression. 1 to 10. See Table 4-1 on page 4-10.
If you specify multiple chnums, the channel outputs will be set to 0 V in the
specified order.
If you do not specify chnum, all channel outputs will be set to 0 V in the order from
higher to lower voltage output range or measurement range.
Remarks
The IN command sets the specified SMU/MFCMU to the following conditions:
SMU setup parameter
Value
MFCMU setup parameter
Value
Source mode
Voltage
DC bias
0V
Output voltage
0V
AC level
0V
V range
20 V
Output signal frequency
1 kHz
I compliance
100 μA
Measurement range
50 Ω
I range
100 μA
Filter
Not changed
Series resistor
Not changed
After this command, there is no additional power consumption for the idle state.
Example
Statements
OUTPUT @B1500;"IN"
OUTPUT @B1500;"IN 1,2,3,5,6"
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Agilent B1500 Programming Guide, Edition 2
Command Reference
LGI
LGI
The LGI command sets the current monitor channel for the linear search
measurement (MM14). This command setting clears, and is cleared by, the LGV
command setting.
This command ignores the RI command setting.
Syntax
LGI chnum,mode,range,target
Parameters
chnum :
Search monitor channel number. The value must be slot number where
the SMU has been installed. Integer expression. 1 to 10. See Table 4-1
on page 4-10.
mode :
Search mode. Integer expression.
0 : If the measured value ≤ target, it is the search result data.
1 : If the measured value ≥ target, it is the search result data.
range :
Measurement ranging type. Integer expression. The measurement range
will be set to the minimum range that covers the target value. For the
limited auto ranging, the instrument never uses the range less than the
specified range. See Table 4-3 on page 4-12.
target:
Search target current (in A). Numeric expression.
0 to ±0.1 for MPSMU/HRSMU, or 0 to ±1 for HPSMU
Example
Statements
OUTPUT @B1500;"LGI 0,1,14,1E-6"
Agilent B1500 Programming Guide, Edition 2
4-75
Command Reference
LGV
LGV
The LGV command sets the voltage monitor channel for the linear search
measurement (MM14). This command setting clears, and is cleared by, the LGI
command setting.
This command ignores the RV command setting.
Syntax
LGV chnum,mode,range,target
Parameters
chnum :
Search monitor channel number. The value must be slot number where
the SMU has been installed. Integer expression. 1 to 10. See Table 4-1
on page 4-10.
mode :
Search mode. Integer expression.
0 : If the measured value ≤ target, it is the search result data.
1 : If the measured value ≥ target, it is the search result data.
range :
Measurement ranging type. Integer expression. The measurement range
will be set to the minimum range that covers the target value. For the
limited auto ranging, the instrument never uses the range less than the
specified range. See Table 4-2 on page 4-11.
target :
Search target voltage (in V). Numeric expression.
0 to ±100 for MPSMU/HRSMU, or 0 to ±200 for HPSMU
Example
Statements
OUTPUT @B1500;"LGV 1,2,12,3"
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Agilent B1500 Programming Guide, Edition 2
Command Reference
LMN
LMN
The LMN command enables or disables the data output of the AC voltage and DC
voltage monitor values.
Execution
Conditions
The measurement mode must be the spot C measurement mode (MM17) or the CV
sweep measurement mode (MM18).
Syntax
LMN mode
Parameters
mode :
Data output mode. Integer expression. 0 or 1.
1: Disables the data output. Initial setting.
2: Enables the data output.
Example
Statements
OUTPUT @B1500;"LMN 1"
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Command Reference
LOP?
LOP?
The LOP? query command returns the operation status of all modules and stores the
results in the output data buffer (query buffer).
Syntax
LOP?
Query Response
LOP stat1,stat2,stat3,stat4,stat5,stat6,stat7,stat8,stat9,stat10 <CR/LF^EOI>
The variables stat1 to stat10 will indicate the status of the module installed in the
slot 1 to 10 respectively, and will be the two-digit status code shown in the following
table. For the HPSMU that occupies two slots, two variables will be returned. Then
the first one is always 00, and the last one indicates the module status. For example,
LOP00,11,00,00,00,00,00,00,00,00 will be returned when only the
HPSMU installed in the slot 1-2 is used and is in the voltage compliance condition.
Status
code
Example
Statements
Description
00
No module is installed, or the output switch is OFF.
01
SMU forces voltage, and does not reach current compliance.
02
SMU forces positive current, and does not reach voltage compliance.
03
SMU forces negative current, and does not reach voltage compliance.
10
Not applicable.
11
SMU reaches voltage compliance.
12
SMU reaches positive current compliance.
13
SMU reaches negative current compliance.
20
SMU is oscillating.
30
Not applicable.
40
MFCMU applies DC bias.
51
MFCMU is in the NULL loop unbalance condition.
52
MFCMU is in the IV amplifier saturation condition.
OUTPUT @B1500;"LOP?"
ENTER @B1500;A$
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Agilent B1500 Programming Guide, Edition 2
Command Reference
*LRN?
*LRN?
The *LRN? (learn) query command returns the B1500 command parameter settings.
Syntax
*LRN? type
Example
Statements
DIM A$[200]
OUTPUT @B1500;"*LRN? 1"
ENTER @B1500;A$
Parameters and
Query Response
type :
This parameter selects the type of query response. Available values are
0 to 110, but some numbers are not used. See below. Integer expression.
A description and the query response of each type is described below.
0:
Returns the output switch ON/OFF status:
CN[chnum[,chnum . . . [,chnum] . . . ]]<CR/LF^EOI>
where chnum is the channel number for the channel whose output
switch is set to ON.
If no output switches are ON, the query response is:
CL<CR/LF^EOI>
1 to 10:
Returns the source status of SMU or CMU.
The type parameter corresponds to slot number where the module is
installed.
For the SMU when the output switch is ON, the query response is:
DV chnum,range,voltage[,Icomp[,comp polarity[,irange]]]
<CR/LF^EOI>
or
DI chnum,range,current[,Vcomp[,comp polarity[,vrange]]]
<CR/LF^EOI>
where range is the present setting of the output range.
For the SMU when the output switch is OFF, the query response is:
CL chnum <CR/LF^EOI>
For the CMU, the query response is:
DCV chnum,voltage;ACV chnum,voltage;FC chnum,frequency
<CR/LF^EOI>
Agilent B1500 Programming Guide, Edition 2
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Command Reference
*LRN?
30 :
Returns the filter ON/OFF status:
FL0 [off ch[,off ch . . . [,off ch] . . . ];
FL1 [on ch[,on ch . . . [,on ch] . . ] <CR/LF^EOI>
If all modules are Filter OFF, the query response is:
FL0<CR/LF^EOI>
If all modules are Filter ON, the query response is:
FL1<CR/LF^EOI>
31 :
Returns the parameter values of the TM, AV, CM, FMT, and MM
commands:
TM trigger mode;AV number[,mode];CM auto calibration mode;
FMT output data format,output data mode
[;MM measurement mode[,chnum[,chnum...[,chnum]...]]]
<CR/LF^EOI>
32 :
Returns the measurement ranging status:
RI chnum,Irange;RV chnum,Vrange
[;RI chnum,Irange;RV chnum,Vrange] . . . .
[;RI chnum,Irange;RV chnum,Vrange]<CR/LF^EOI>
33 :
Returns the staircase sweep measurement settings:
WM automatic sweep abort function,output after sweep;
WT hold time,delay time[,step delay time[,S trig delay[,M trig delay]]]
[;WV chnum,mode,range,start,stop,nop[,Icomp [,pcomp]]] or
[;WI chnum,mode,range,start,stop,nop[,Vcomp[,pcomp]]]
[;WSV chnum,range,start,stop[,Icomp[,pcomp]]] or
[;WSI chnum,range,start,stop[,Vcomp[,pcomp]]]<CR/LF^EOI>
34 :
Returns the pulsed source settings:
PT hold time,pulse width[,pulse period[,trig delay]]
[;PV chnum,output range,base voltage,pulse voltage [,Icomp]] or
[;PI chnum,output range,base current,pulse current [,Vcomp]]
[;PWV chnum,mode,range,base,start,stop,nop[,Icomp]] or
[;PWI chnum,mode,range,base,start,stop,nop[,Vcomp]]<CR/LF^EOI>
37 :
Returns the quasi-pulsed source settings:
BDM detection interval[,mode];
BDT hold time,delay time
[;BDV chnum,range,start,stop[,Icomp]]<CR/LF^EOI>
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Agilent B1500 Programming Guide, Edition 2
Command Reference
*LRN?
38 :
Returns the digital I/O port information:
ERM input pin;ERC2,value <CR/LF^EOI>
40 :
Returns channel mapping information:
If multiple channel numbers are translated to another numbers.
ACH actual,program[;ACH actual,program] . . . .
[;ACH actual,program]<CR/LF^EOI>
If no channel number is defined by the ACH command.
ACH<CR/LF^EOI>
46 :
Returns SMU measurement operation mode settings:
CMM chnum,mode[;CMM chnum,mode] . . . .
[;CMM chnum,mode]<CR/LF^EOI>
47 :
Returns the sampling measurement settings:
MSC abort,post;MT h_bias,interval,number,h_base;ML mode
[;MV chnum,range,base,output,comp] or
[;MI chnum,range,base,output,comp]
:
<CR/LF^EOI>
50 :
Returns the linear search measurement settings:
LSM abort,post;LSTM hold,delay;LSVM mode
[;LGI chnum,mode,Irange,Itarget] or
[;LGV chnum,mode,Vrange,Vtarget]
[;LSV chnum,range,start,stop,step[,Icomp]] or
[;LSI chnum,range,start,stop,step[,Vcomp]]
[;LSSV chnum,polarity,offset[,Icomp]] or
[;LSSI chnum,polarity,offset[,Vcomp]]
<CR/LF^EOI>
51 :
Returns the binary search measurement settings:
BSM mode,past;BST hold,delay;BSVM mode
[;BGI chnum,mode,condition,Irange,Itarget] or
[;BGV chnum,mode,condition,Vrange,Vtarget]
[;BSV chnum,range,start,stop[,Icomp]] or
[;BSI chnum,range,start,stop[,Vcomp]]
[;BSSV chnum,polarity,offset[,Icomp]] or
[;BSSI chnum,polarity,offset[,Vcomp]]
<CR/LF^EOI>
Agilent B1500 Programming Guide, Edition 2
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Command Reference
*LRN?
53 :
Returns the SMU series resistor ON/OFF status:
SSR chnum,mode[;SSR chnum,mode] . . . .
[;SSR chnum,mode]<CR/LF^EOI>
54 :
Returns the auto ranging mode status:
RM chnum,mode[,rate][;RM chnum,mode[,rate]] . . . .
[;RM chnum,mode[,rate]]<CR/LF^EOI>
55 :
Returns the A/D converter settings:
AAD chnum,type[;AAD chnum,type] . . . .
[;AAD chnum,type]<CR/LF^EOI>
56 :
Returns the ADC averaging or integration time setting:
AIT0,mode,time;AIT1,mode,time;AZ mode<CR/LF^EOI>
57 :
Returns the source/measurement wait time settings:
WAT0,set_set;WAT1,set_meas<CR/LF^EOI>
58 :
Returns the trigger settings:
[TGP port,terminal,polarity,type]
[;TGP port,terminal,polarity,type] . . . .
[;TGP port,terminal,polarity,type]
TGSI mode;TGXO mode;TGSO mode;TGMO mode<CR/LF^EOI>
59 :
Returns the multi channel sweep source settings:
WNX n,chnum,mode,range,start,stop[,comp[,pcomp]]
[;WNX n,chnum,mode,range,start,stop[,comp[,pcomp]]] . . . .
[;WNX n,chnum,mode,range,start,stop[,comp[,pcomp]]]
<CR/LF^EOI>
If no multi channel sweep source is set, the query response is:
WNX<CR/LF^EOI>
60 :
Returns the time stamp setting:
TSC enable<CR/LF^EOI>
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Agilent B1500 Programming Guide, Edition 2
Command Reference
*LRN?
61 :
Returns the display settings:
RED enable;
KLC lock;
DFM format;
SPA1,param;
SPA2,param;
MPA param;
SCH chnum;
MCH chnum<CR/LF^EOI>
62 :
Returns the ASU connection path:
SAP chnum,path[;SAP chnum,path] . . . .
[;SAP chnum,path]<CR/LF^EOI>
63 :
Returns the 1 pA auto ranging operation mode:
SAR chnum,mode[;SAR chnum,mode] . . . .
[;SAR chnum,mode]<CR/LF^EOI>
64 :
Returns the operation mode of the ASU connection status indicator:
SAL chnum,mode[;SAL chnum,mode] . . . .
[;SAL chnum,mode]<CR/LF^EOI>
70 :
Returns the MFCMU measurement mode:
IMP mode<CR/LF^EOI>
71 :
Returns the MFCMU data output mode:
LMN mode<CR/LF^EOI>
72 :
Returns the MFCMU’s ADC setting:
ACT mode, number<CR/LF^EOI>
73 :
Returns the MFCMU measurement range:
RC chnum,mode,range<CR/LF^EOI>
80 :
Returns the operation mode of the SCUU connection status indicator:
SSL chnum,mode<CR/LF^EOI>
81 :
Returns the SCUU connection path:
SSP chnum,mode<CR/LF^EOI>
90 :
Returns the MFCMU adjustment mode setting:
ADJ chnum,mode<CR/LF^EOI>
Agilent B1500 Programming Guide, Edition 2
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Command Reference
*LRN?
100 :
Returns the CV sweep measurement settings:
WMDCV abort function[,output after sweep];
WTDCV hold,delay[,step delay[,S trig delay[,M trig delay]]]
[;WDCV chnum,mode,start,stop,nop]<CR/LF^EOI>
110 :
Returns the parallel measurement mode setting:
PAD mode<CR/LF^EOI>
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Agilent B1500 Programming Guide, Edition 2
Command Reference
LSI
LSI
The LSI command sets the current search source for the linear search measurement
(MM14). After search stops, the search channel forces the value specified by the
LSM command.
This command clears the LSV, LSSI, and LSSV command settings.
This command setting is cleared by the LSV command.
If Vcomp value is greater than ±42 V, the interlock circuit must be shorted.
Syntax
LSI chnum,range,start,stop,step[,Vcomp]
Parameters
chnum :
Search source channel number. The value must be slot number where
the SMU has been installed. Integer expression. 1 to 10. See Table 4-1
on page 4-10.
range :
Output ranging type. Integer expression. The output range will be set to
the minimum range that covers both start and stop values. For the
limited auto ranging, the instrument never uses the range less than the
specified range. See Table 4-5 on page 4-13.
start, stop : Search start or stop current (in A). Numeric expression. See Table 4-7
on page 4-15. The start and stop must have different values.
0 to ±0.1 for MPSMU/HRSMU, or 0 to ±1 for HPSMU
step:
Step current (in A). Numeric expression.
If start < stop, step must be positive, and if start > stop, step must be
negative. Maximum number of search steps is 1001.
Vcomp:
Example
Statements
Voltage compliance value (in V). Numeric expression. See Table 4-7 on
page 4-15. If you do not specify Vcomp, the previous value is set.
OUTPUT @B1500;"LSI 1,0,0,1E-6,1E-8,10"
Agilent B1500 Programming Guide, Edition 2
4-85
Command Reference
LSM
LSM
The LSM command enables or disables the automatic abort function for the linear
search measurement (MM14). The automatic abort function stops the search
operation when one of the following conditions occurs:
•
Compliance on the measurement channel
•
Compliance on the non-measurement channel
•
Overflow on the AD converter
•
Oscillation on any channel
This command also sets the post search condition for the linear search sources. After
the search measurement is normally completed, the linear search sources force the
value specified by the post parameter.
If the search operation is stopped by the automatic abort function, the linear search
sources force the start value after search.
Syntax
LSM abort[,post]
Parameters
abort :
Automatic abort function. Integer expression.
1: Disables the function. Initial setting.
2: Enables the function.
post :
Source output value after the search operation is normally completed.
Integer expression.
1: Start value. Initial setting.
2: Stop value.
3: Output value when the search target value is obtained.
If this parameter is not set, the search source forces the start value.
Example
Statements
OUTPUT @B1500;"LSM 2"
OUTPUT @B1500;"LSM 2,3"
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Agilent B1500 Programming Guide, Edition 2
Command Reference
LSSI
LSSI
The LSSI command sets the synchronous current source for the linear search
measurement (MM14). The synchronous source output will be:
Synchronous source output = polarity × LSI source output + offset
where the LSI source output is the output set by the LSI command.
This command setting is cleared by the LSV/LSI command.
Execution
Conditions
The LSI command must be entered before this command.
Syntax
LSSI chnum,polarity,offset[,Vcomp]
Parameters
chnum :
Synchronous source channel number. The value must be slot number
where the SMU has been installed. Integer expression. 1 to 10. See
Table 4-1 on page 4-10.
polarity:
Polarity of the LSSI output for the LSI output.
If Vcomp value is greater than ±42 V, the interlock circuit must be shorted.
0 (negative): LSSI output = −LSI output + offset
1 (positive): LSSI output = LSI output + offset
offset:
Offset current (in A). Numeric expression.
0 to ±0.1 for MPSMU/HRSMU, or 0 to ±1 for HPSMU
Both primary and synchronous search sources will use the same output
range. So check the output range set to the LSI command to determine
the synchronous source outputs.
Vcomp:
Voltage compliance value (in V). Numeric expression. If you do not
specify Vcomp, the previous value is set.
Example
Statements
OUTPUT @B1500;"LSSI 1,1,1E-6,5"
See Also
Refer to Table 4-7 on page 4-15 for the source output value, output range, and the
available compliance values.
Agilent B1500 Programming Guide, Edition 2
4-87
Command Reference
LSSV
LSSV
The LSSV command sets the synchronous voltage source for the linear search
measurement (MM14). The synchronous source output will be:
Synchronous source output = polarity × LSV source output + offset
where the LSV source output is the value set by the LSV command.
This command setting is cleared by the LSI/LSV command.
Execution
Conditions
The LSV command must be entered before this command.
Syntax
LSSV chnum,polarity,offset[,Icomp]
Parameters
chnum :
Synchronous source channel number. The value must be slot number
where the SMU has been installed. Integer expression. 1 to 10. See
Table 4-1 on page 4-10.
polarity:
Polarity of the LSSV output for the LSV output.
If the output voltage is greater than ±42 V, the interlock circuit must be shorted.
0 (negative): LSSV output = −LSV output + offset
1 (positive): LSSV output = LSV output + offset
offset:
Offset voltage (in V). Numeric expression.
0 to ±100 for MPSMU/HRSMU, or 0 to ±200 for HPSMU
Both primary and synchronous search sources will use the same output
range. So check the output range set to the LSV command to determine
the synchronous source outputs.
Icomp:
Current compliance value (in A). Numeric expression. If you do not
specify Icomp, the previous value is set. Zero amps (0 A) is not a valid
value for the Icomp parameter.
Example
Statements
OUTPUT @B1500;"LSSV 1,0,5,1E-6"
See Also
Refer to Table 4-6 on page 4-14 for the source output value, output range, and the
available compliance values.
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Agilent B1500 Programming Guide, Edition 2
Command Reference
LST?
LST?
The LST? query command stores a catalog of internal memory programs or a
specific program listing in the output data buffer (query buffer) of the B1500.
Syntax
LST? [pnum[,index[,size]]]
Parameters
pnum :
Memory program number. Numeric expression. 0 to 2000. If you do not
specify the value, 0 is set.
LST? 0 returns the catalog of the memory programs. This is same as the
LST? command results. Then index and size are not required.
index :
Command index that is the number of top command to read. Numeric
expression. If you do not specify the value, 1 is set.
index=1 specifies the first command stored in the memory program.
This command is always the ST command. And the last command is
always the END command. If the index value is greater than the
number of commands, the LST? returns the END only.
If you set index=0, the LST? returns the number of commands stored in
the memory program. For empty memory programs, the LST? returns 2
(ST and END).
size :
Number of commands to read. Numeric expression. 1 to 3000. If you
do not specify the value, 3000 is set.
If you set the value greater than the number of commands from the
command specified by index to the last command (END), the LST?
command stops operation after reading the END command.
Query Response
Response by LST? or LST? 0:
Number of programs[,pnum[,pnum ... [,pnum]...]]<CR/LF^EOI>
Response by LST? pnum[, index[, size]]:
ST pnum<CR/LF>
[saved command <CR/LF>]
[saved command <CR/LF>]
:
[saved command <CR/LF>]
END<CR/LF^EOI>
The LST? command reads the command specified by the index, reads the command
stored next, and repeats this operation until the size each of commands are read. If
you do not specify the index and size values, the LST? command reads the first
Agilent B1500 Programming Guide, Edition 2
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Command Reference
LST?
stored command (ST pnum) to the 3000th stored command. If the number of
commands are less than 3000, the LST? command reads the commands from ST to
END. See Example Statements that show an HP BASIC programming example.
Example
Statements
Example of LST? :
DIM A$[100]
OUTPUT @B1500;"LST?"
ENTER @B1500;A$
PRINT A$
Example of LST? pnum[, index[, size]] :
DIM A$[100]
P_num=1
!
OUTPUT @B1500;"LST?";P_num,0
ENTER @B1500;Num_c
Num_l=Num_c/3000
!
IF Num_c>3000 THEN
C_index=1
FOR I=1 TO INT(Num_l)
OUTPUT @B1500;"LST?";P_num,C_index
FOR N=1 TO 3000
ENTER @B1500;A$
PRINT A$
C_index=C_index+1
NEXT N
NEXT I
OUTPUT @B1500;"LST?";P_num,C_index
LOOP
ENTER @B1500;A$
PRINT A$
EXIT IF A$="END"
END LOOP
ELSE
OUTPUT @B1500;"LST?";P_num
LOOP
ENTER @B1500;A$
PRINT A$
EXIT IF A$="END"
END LOOP
END IF
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Agilent B1500 Programming Guide, Edition 2
Command Reference
LSTM
LSTM
The LSTM command sets the timing parameters for the linear search measurement
(MM14). If you do not enter this command, all parameters are set to 0.
Syntax
LSTM hold,delay
Parameters
hold :
Hold time (in seconds) that is the wait time after starting the search
measurement and before starting the delay time for the first search
point. Numeric expression.
0 to 655.35 sec. 0.01 sec resolution.
delay :
Delay time (in seconds) that is the wait time after starting to force a step
output value and before starting a step measurement. Numeric
expression.
0 to 65.535 sec. 0.0001 sec resolution.
Example
Statements
OUTPUT @B1500;"LSTM 5,0.1"
Agilent B1500 Programming Guide, Edition 2
4-91
Command Reference
LSV
LSV
The LSV command sets the voltage search source for the linear search measurement
(MM14). After search stops, the search channel forces the value specified by the
LSM command.
This command clears the LSI, LSSI, and LSSV command settings.
This command setting is cleared by the LSI command.
If the output voltage is greater than ±42 V, the interlock circuit must be shorted.
Syntax
LSV chnum,range,start,stop,step[,Icomp]
Parameters
chnum :
Search source channel number. The value must be slot number where
the SMU has been installed. Integer expression. 1 to 10. See Table 4-1
on page 4-10.
range :
Output ranging type. Integer expression. The output range will be set to
the minimum range that covers both start and stop values. Range
changing may cause 0 V output in a moment. For the limited auto
ranging, the instrument never uses the range less than the specified
range. See Table 4-4 on page 4-13.
start, stop : Search start or stop voltage (in V). Numeric expression. See Table 4-6
on page 4-14. The start and stop parameters must have different values.
0 to ±100 for MPSMU/HRSMU,
0 to ±200 for HPSMU
step :
Step voltage (in V). Numeric expression.
If start < stop, step must be positive, and if start > stop, step must be
negative. Maximum number of search steps is 1001.
Icomp:
Example
Statements
Current compliance value (in A). Numeric expression. See Table 4-6 on
page 4-14. If you do not specify Icomp, the previous value is set. Zero
amps (0 A) is not allowed for Icomp.
OUTPUT @B1500;"LSV 1,0,0,20,.5,1E-6"
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Agilent B1500 Programming Guide, Edition 2
Command Reference
LSVM
LSVM
The LSVM command selects the data output mode for the linear search
measurement (MM14).
Syntax
LSVM mode
Parameters
mode :
Data output mode. Integer expression. 0 (initial setting) or 1.
0 : Returns Data_search only.
1 : Returns Data_search and Data_sense.
Data_search is the value forced by the search output channel set by LSI or LSV.
Data_sense is the value measured by the search monitor channel set by LGI or LGV.
For data output format, refer to “Data Output Format” on page 1-23.
Example
Statements
OUTPUT @B1500;"LSVM 1"
MCC
The MCC command clears the settings of the channels defined by the MV or MI
command used for the sampling measurement (MM10).
Syntax
MCC [chnum[,chnum...[,chnum[,chnum]]...]]
A maximum of ten channels can be set.
Parameters
chnum :
Channel number of the unit to clear the settings. Integer expression.
1 to 10. See Table 4-1 on page 4-10.
If you do not specify chnum, the MCC command clears the settings of
all sampling channels.
Example
Statements
OUTPUT @B1500;"MCC"
OUTPUT @B1500;"MCC 1,2,3"
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Command Reference
MI
MI
The MI command sets the DC current source (SMU) for the sampling measurement
(MM10). This command setting clears, and is cleared by, the MV command setting.
The specified channel starts the base current output by the measurement trigger (XE
command and so on), and changes the output value to bias after the hold time
elapses. The hold time is set by the h_base parameter of the MT command.
When multiple channels are used, channel outputs start in the channel number order.
If the DI command is executed for this channel, the channel works as the DC current
source set by the DI command.
Execution
Conditions
If Vcomp value is greater than ±42 V, the interlock circuit must be shorted.
Syntax
MI chnum,irange,base,bias[,Vcomp]
Parameters
chnum :
Source channel number. The value must be slot number where the SMU
has been installed. Integer expression. 1 to 10. See Table 4-1 on page
4-10.
irange :
Ranging type. Integer expression. The output range will be set to the
minimum range that covers both base and bias values. For the limited
auto ranging, the instrument never uses the range less than the specified
range. See Table 4-5 on page 4-13.
base, bias : Base current and bias current (in A). Numeric expression. See Table 4-7
on page 4-15.
0 to ±0.1 for MPSMU/HRSMU, or 0 to ±1 for HPSMU
Vcomp :
Voltage compliance value (in V). Numeric expression. See Table 4-7 on
page 4-15. If you do not specify this parameter, Vcomp is set to the
previous setting.
Example
Statements
OUTPUT @B1500;"MI 1,18,0,5E-5,10"
See Also
“MT”, “MCC”, “MSC”
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Agilent B1500 Programming Guide, Edition 2
Command Reference
ML
ML
The ML command sets the sampling mode, linear or logarithmic. For the
logarithmic sampling, this command also specify the number of measurement data
to be returned.
If you do not execute this command, the last sampling mode is effective.
Initialization such as the *RST command sets the linear sampling mode.
Syntax
ML mode
Parameters
mode
Sampling mode, linear or logarithm.
1: linear sampling, initial setting.
2: logarithmic sampling, 10 data/decade.
3: logarithmic sampling, 25 data/decade.
4: logarithmic sampling, 50 data/decade.
5: logarithmic sampling, 100 data/decade.
6: logarithmic sampling, 250 data/decade.
7: logarithmic sampling, 500 data/decade.
Example
Statements
OUTPUT @B1500;"ML 2"
Agilent B1500 Programming Guide, Edition 2
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Command Reference
MM
MM
The MM command specifies the measurement mode and the channels used for
measurements. This command must be entered to specify the measurement mode.
For the high speed spot measurements, do not enter the MM command.
Syntax
•
mode= 1, 2, 10, or 16:
MM mode,chnum[,chnum[,chnum...[,chnum]...]]
A maximum of ten channels can be set.
•
mode= 3, 4, 5, 17, or 18:
•
mode= 14 or 15:
MM mode,chnum
MM mode
•
mode= 9:
MM mode[,chnum]
Parameters
Remarks
mode :
Measurement mode. Integer expression. 1 to 18. See Table 4-14.
chnum:
Measurement channel number. The value must be slot number where
the module has been installed. Integer expression. 1 to 10. See Table
4-1 on page 4-10.
The SMU operation mode is defined by the CMM command.
The measurement range is defined by the RI or RV command (except for mode=14
and 15), or the RC command (mode=17 or 18).
To execute the measurement, enter the XE command.
For mode=1, 2, or 10, if you use multiple measurement channels, the channels start
measurement in the order defined in the MM command.
For mode=16, if you use multiple measurement channels, the channels that use the
fixed ranging mode start measurement simultaneously, then other channels start
measurement in the order defined in the MM command. Note that the
high-resolution ADC cannot perform simultaneous measurement.
For mode=9, if you do not specify chnum, the B1500 uses the channel specified by
the BDV command to execute measurement.
For mode=9, 14, or 15, the time stamp function is not available. See “Data Output
Format” on page 1-23.
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Agilent B1500 Programming Guide, Edition 2
Command Reference
MM
Table 4-14
Measurement Mode
mode
Example
Statements
Measurement mode
Related source setup command
1
Spot
DI, DV
2
Staircase sweep
WI, WV, WT, WM, WSI, WSV
3
Pulsed spot
PI, PV, PT
4
Pulsed sweep
PWI, PWV, PT, WM, WSI, WSV
5
Staircase sweep with
pulsed bias
WI, WV, WM, WSI, WSV, PI, PV, PT
9
Quasi-pulsed spot
BDV, BDT, BDM
10
Sampling
MCC, MSC, ML, MT, MI, MV
14
Linear search
LSV, LSI, LGV, LGI, LSM, LSTM, LSSV,
LSSI, LSVM
15
Binary search
BSV, BSI, BGV, BGI, BSM, BST, BSSV,
BSSI, BSVM
16
Multi channel sweep
WI, WV, WT, WM, WNX
17
Spot C
FC, ACV, DCV
18
CV sweep
FC, ACV, WDCV, WMDCV, WTDCV
OUTPUT @B1500;"MM 1,1"
OUTPUT @B1500;"MM 2,1,3"
Agilent B1500 Programming Guide, Edition 2
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Command Reference
MSC
MSC
The MSC command enables or disables the automatic abort function for the
sampling measurement (MM10). The automatic abort function stops the
measurement when one of the following conditions occurs:
•
Compliance on the measurement channel
•
Compliance on the non-measurement channel
•
Overflow on the AD converter
•
Oscillation on any channel
This command also sets the post measurement condition for the sources. After the
measurement is normally completed, the voltage/current sources force the value
specified by the post parameter.
If the measurement is stopped by the automatic abort function, the voltage/current
sources force the base value.
Syntax
MSC abort[,post]
Parameters
abort :
Automatic abort function. Integer expression.
1: Disables the function. Initial setting.
2: Enables the function.
post :
Source output value after the measurement is normally completed.
Integer expression.
1: Base value.
2: Bias value. Initial setting.
If this parameter is not set, the sources force the base value.
Output Data
The B1500 returns the data measured before any abort condition is detected.
Dummy data 199.999E+99 will be returned for the data after abort.
Example
Statements
OUTPUT @B1500;"MSC 2"
OUTPUT @B1500;"MSC 2,2"
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Agilent B1500 Programming Guide, Edition 2
Command Reference
MT
MT
This command sets the timing parameters of the sampling measurement (MM10).
Syntax
MT h_bias,interval,number[,h_base]
Parameters
h_bias :
Time since the bias value output until the first sampling point. Numeric
expression. in seconds. 0 (initial setting) to 655.35 s, resolution 0.01 s.
The following values are also available for interval < 0.002 s. |h_bias|
will be the time since the sampling start until the bias value output.
-0.09 to -0.0001 s, resolution 0.0001 s.
interval :
Interval of the sampling. Numeric expression. in seconds.
0.002 (initial setting) to 65.535 s, 0.001 s resolution.
interval < 0.002 s in 0.00001 s resolution is also available for the linear
sampling. It must satisfy the following formula. See NOTE below.
interval ≥ 0.0001 + 0.00002 × (number of measurement channels-1)
number :
Number of samples. Integer expression. 1 to the following value.
For the linear sampling: 100001 / (number of measurement channels)
For the log sampling: 1 + (number of data for 11 decades)
h_base
NOTE
Hold time of the base value output until the bias value output. Numeric
expression. in seconds. 0 (initial setting) to 655.35 s, resolution 0.01 s.
If you set interval < 0.002 s
Sampling mode must be linear. This setting is not permitted for the log sampling.
All measurement channels must use the high speed A/D converter (ADC). This
setting is not permitted if a measurement channel uses the high resolution ADC.
If the multiple measurement channels are used, all channels perform measurements
in parallel.
If the measurement ranging mode is not the fixed mode, the measurement channels
automatically select the minimum range that covers compliance value set to the
channel.
If the measurement time is expected to be longer than interval, the measurement
channels automatically adjust the number of averaging samples (AIT or AV
command settings) to keep the sampling interval.
Agilent B1500 Programming Guide, Edition 2
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Command Reference
MT
Sampling
Operation
Sampling measurement will be started by a measurement trigger such as the XE
command or an external trigger, and performed as shown below. Before the
measurement trigger, the source channels set by the DI/DV commands will start
output at the timing of the DI/DV command execution.
1. By the measurement trigger, source channels set by the MI/MV commands start
the base value output. Each source channel controls the output simultaneously.
2. h_base seconds later, the source channels change the output to the bias value.
The channels keep the value until the end of the sampling measurement.
3. Another h_bias seconds later, the measurement channels start measurement for
the first sampling point. The measurement channels perform the measurement in
series by the order set to the MM command.
4. After that, the following operation is repeated with the specified time interval.
•
Measurement channels start measurement if they are ready to measure.
•
Measurement channels keep the condition if they are busy.
This operation is repeated until the number of measurement result data reaches
to the specified number of measurement data.
For the linear sampling with interval < 2 ms, if the total measurement time runs
over the specified time interval × number, the sampling measurement will be
stopped even if the number of measurement result data is less than the specified
number.
For the log sampling, the B1500A holds only the data that can be plotted on the
log scale in the same distance as close as possible. Only the held data is counted
in the number of measurement result data.
5. The sampling measurement is completed. And the source channel set by the
MI/MV command forces the base or bias value specified by the MSC command.
The source channel set by the DI/DV command keeps its output.
The index data (max. 2147483647) and the time data returned with the measurement
data will be as shown in the following formula. However, long measurement or busy
status may cause unexpected time data.
time data = t + h_bias + ( index data -1) × interval
Where, t is the time of the sampling measurement time origin, and is the time when
the output value is changed from base to bias.
Example
Statements
OUTPUT @B1500;"MT 0,0.0001,5000,0"
OUTPUT @B1500;"MT 0.01,0.001,101,0.1"
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Agilent B1500 Programming Guide, Edition 2
Command Reference
MV
MV
The MV command sets the DC voltage source (SMU) for the sampling
measurement (MM10). This command setting clears, and is cleared by, the MI
command setting.
The specified channel starts the base voltage output by the measurement trigger (XE
command and so on), and changes the output value to bias after the hold time
elapses. The hold time is set by the h_base parameter of the MT command.
When multiple channels are used, channel outputs start in the channel number order.
If the DV command is executed for this channel, the channel works as the DC
voltage source set by the DV command.
Execution
Conditions
If the output voltage is greater than ±42 V, the interlock circuit must be shorted.
Syntax
MV chnum,vrange,base,bias[,Icomp]
Parameters
chnum :
Source channel number. The value must be slot number where the SMU
has been installed. Integer expression. 1 to 10. See Table 4-1 on page
4-10.
vrange :
Ranging type. Integer expression. The output range will be set to the
minimum range that covers both base and bias values. For the limited
auto ranging, the instrument never uses the range less than the specified
range. See Table 4-4 on page 4-13.
base, bias : Base voltage and bias voltage (in V). Numeric expression. See Table
4-6 on page 4-14.
0 to ±100 for MPSMU/HRSMU, or 0 to ±200 for HPSMU
Icomp :
Current compliance value (in A). Numeric expression. See Table 4-6 on
page 4-14. If you do not set Icomp, the previous value is used. 0 A is
not allowed for Icomp.
Example
Statements
OUTPUT @B1500;"MV 1,12,0,5,1E-3"
See Also
“MT”, “MCC”, “MSC”
Agilent B1500 Programming Guide, Edition 2
4-101
Command Reference
NUB?
NUB?
The NUB? query command checks the number of measurement data in the output
data buffer, and stores the results in the output data buffer (query buffer).
Syntax
NUB?
Query Response
Number of measurement data<CR/LF^EOI>
Example
Statements
OUTPUT @B1500;"NUB?"
ENTER @B1500;A
*OPC?
The *OPC? command monitors the pending operations, and places ASCII character
1 into the output queue when all pending operations are completed. Also this
command sets/clears the operation complete (OPC) bit in the standard event status
register as follows:
•
If there are no pending operations, sets the OPC bit to 1.
•
If there are any pending operations, sets the OPC bit to 0.
The bit will be set to 1 when all pending operations are completed.
Syntax
*OPC?
Query Response
1<CR/LF^EOI>
No response will be returned until all pending operations are completed.
Example
Statements
OUTPUT @B1500;"*OPC?"
ENTER @B1500;A
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Agilent B1500 Programming Guide, Edition 2
Command Reference
OS
OS
The OS command causes the B1500 to send a edge trigger from the Ext Trig Out
terminal. To set the trigger logic (initial setting: negative), send the TGP command
for the Ext Trig Out terminal.
Syntax
OS
Example
Statements
OUTPUT @B1500;"OS"
OSX
The OSX command causes the B1500 to send a trigger from a trigger output
terminal specified by the port parameter. To set the trigger logic (initial setting:
negative), send the TGP command for the specified port.
Syntax
OSX port[,level]
Parameters
port :
External trigger output port number. Integer expression. -2, or 1 to 16.
-2: Ext Trig Out terminal.
1 to 16: Port 1 to 16 of the digital I/O terminal.
To use a digital I/O port, send the TGP command. The port value must
be same as the port value set to the TGP command.
level :
Trigger output level. Integer expression. 0, 1, or 2.
0: Logical low.
1: Logical high.
2: Edge trigger (default setting).
If level is not specified, the B1500 sends the edge trigger. For the gate
trigger output, send OSX port,1 when starting trigger output, and send
OSX port,0 when stopping trigger output.
Example
Statements
OUTPUT @B1500;"OSX 1,1"
OUTPUT @B1500;"TI";1
ENTER @B1500 USING "#,3X,12D,X";Idata
OUTPUT @B1500;"OSX 1,0"
See Also
“TGP” and “TGPC”
Agilent B1500 Programming Guide, Edition 2
4-103
Command Reference
PA
PA
The PA command pauses the command execution or internal memory program
execution, until the specified wait time elapses or until an event specified by the TM
command is received. The event set by the TM command only releases the paused
status. It does not start the measurement.
Syntax
PA [wait time]
Parameters
wait time : -99.9999 to 99.9999 seconds, with 100 μsec resolution. Numeric
expression. If wait time is not specified or negative wait time is set, the
paused status is kept until receiving an event specified by the TM
command.
Remarks
The TM3 command enables an external trigger from the Ext Trig In terminal as an
event used to break the pause state set by the PA command.
The B1500 counts the wait time independent of the source wait time and the
measurement wait time set by the WAT command. So the wait time can cover them
as shown in the following program example:
OUTPUT @B1500;"CN";1
OUTPUT @B1500;"WAT";1,0,1E-3 !Source Wait Time =1ms
OUTPUT @B1500;"WAT";2,0,1E-3 !Meas Wait Time =1ms
OUTPUT @B1500;"DV";1,0,5,1E-2
OUTPUT @B1500;"PA";1E-3
!Wait Time =1ms
OUTPUT @B1500;"TI";1
ENTER @B1500 USING "#,3X,12D,X";Idata
Example
Statements
OUTPUT @B1500;"PA 10"
See Also
“TM”
4-104
Agilent B1500 Programming Guide, Edition 2
Command Reference
PAD
PAD
Enables or disables parallel measurements by the multiple channels (SMU). This
command is effective for the measurement channels that use the high speed A/D
converter (ADC) and for the spot measurement (MM1), staircase sweep
measurement (MM2), or sampling measurement (MM10).
The parallel measurements are performed at first by using the measurement
channels that use the high speed ADC. And the other measurement channels
perform measurements in series as defined in the MM command by using the high
resolution ADC.
Syntax
PAD mode
Parameters
mode :
Example
Statements
OUTPUT @B1500;"PAD 1"
1 (enable) or 0 (disable, initial setting). Integer expression.
Agilent B1500 Programming Guide, Edition 2
4-105
Command Reference
PAX
PAX
The PAX command pauses the command execution or internal memory program
execution, until the specified wait time elapses or until an event specified by the TM
command is received. The event set by the TM command only releases the paused
status. It does not start the measurement.
Execution
Conditions
The port parameter is meaningful only for the event (trigger input) set by the TM3
command. Set 1 (dummy) for the event set by the TM1, TM2, or TM4 command.
Syntax
PAX port[,wait time]
Parameters
port :
External trigger input port number. Integer expression. -1, or 1 to 16.
-1: Ext Trig In terminal.
1 to 16: Port 1 to 16 of the digital I/O terminal.
To use a digital I/O port, send the TGP command. The port value must
be same as the port value set to the TGP command.
wait time : -99.9999 to 99.9999 seconds, with 100 μsec resolution. Numeric
expression.
If wait time is not specified or negative wait time is set, the paused
status is kept until receiving an event specified by the TM command.
Remarks
The TM3 command enables an external trigger from a trigger input terminal
specified by the port parameter as an event used to break the pause state set by the
PA command.
The B1500 counts the wait time independent of the source wait time and the
measurement wait time set by the WAT command. So the wait time can cover them
as shown in the following program example:
OUTPUT @B1500;"CN";1
OUTPUT @B1500;"WAT";1,0,1E-3 !Source Wait Time =1ms
OUTPUT @B1500;"WAT";2,0,1E-3 !Meas Wait Time =1ms
OUTPUT @B1500;"DV";1,0,5,1E-2
OUTPUT @B1500;"PAX";-1,1E-3
!Wait Time =1ms
OUTPUT @B1500;"TI";1
ENTER @B1500 USING "#,3X,12D,X";Idata
Example
Statements
OUTPUT @B1500;"PAX 1,10"
See Also
“TM”, “TGP”, and “TGPC”
4-106
Agilent B1500 Programming Guide, Edition 2
Command Reference
PI
PI
The PI command specifies the pulse current source and its parameters. This
command also clears, and is cleared by, the PV command setting.
In the staircase sweep with pulsed bias measurement mode (set by the MM 5
command), the output forced by the PI command synchronized with the staircase
sweep outputs forced by the WI or WV command.
Measurement channel performs measurement so that the pulse width and pulse
period are kept. The integration time is automatically set by the instrument, and you
cannot change. Note that the high-resolution ADC cannot be used for the pulsed
measurements. The AAD/AIT/AV/WT command settings are ignored.
If Vcomp value is greater than ±42 V, the interlock circuit must be shorted.
Syntax
PI chnum,irange,base,pulse[,Vcomp]
Parameters
chnum :
Pulsed source channel number. The value must be slot number where
the SMU has been installed. Integer expression. 1 to 10. See Table 4-1
on page 4-10.
irange:
Ranging type for pulse current output. Integer expression. The output
range will be set to the minimum range that covers both base and pulse
values. For the limited auto ranging, the instrument never uses the
range less than the specified range. See Table 4-5 on page 4-13.
base,
pulse :
Pulse base current or peak current (in A). Numeric expression. See
Table 4-7 on page 4-15. base and pulse must have the same polarity.
0 to ±0.1 for MPSMU/HRSMU, or 0 to ±1 for HPSMU
Vcomp:
Voltage compliance value (in V). Numeric expression. See Table 4-7 on
page 4-15. If Vcomp is not specified, the previous value is set.
Compliance polarity is automatically set to the same polarity as the
output value, regardless of the specified Vcomp. If the output value is 0,
the polarity is set to positive.
Example
Statements
OUTPUT @B1500;"PT 1,0.01"
OUTPUT @B1500;"PI 1,16,0,5E-5,5"
OUTPUT @B1500;"PT 1,0.01"
OUTPUT @B1500;"PI 3,0,0,5E-6"
Agilent B1500 Programming Guide, Edition 2
4-107
Command Reference
PT
PT
The PT command sets the hold time, pulse width, and pulse period for a pulse source
set by the PI, PV, PWI or PWV command. This command also sets the trigger delay
time. Measurement channel performs measurement so that the pulse width and pulse
period are kept. The integration time is automatically set by the instrument, and you
cannot change. Note that the high-resolution ADC cannot be used for the pulsed
measurements. The AAD/AIT/AV/WT command settings are ignored.
Syntax
For pulsed spot measurements:
PT hold,width[,period[,Tdelay]]
For pulsed sweep or staircase sweep with pulsed bias measurements:
PT hold,width,period[,Tdelay]
Parameters
hold :
Hold time (in seconds). Numeric expression.
0 to 655.35 sec. 0.01 sec resolution. Initial setting = 0.
width :
Pulse width (in seconds). Numeric expression.
0.5E− 3 to 2.0 sec. 1E− 4 sec resolution. Initial setting = 1E− 3 sec.
period :
Pulse period (in seconds). Numeric expression. 0, or 5E− 3 to 5.0 sec.
1E− 4 sec resolution. Initial or default setting = 10E− 3 sec.
Restrictions:
•
period ≥ width +2 msec (for width ≤ 100 ms)
•
period ≥ width +10 msec (for width > 100 ms)
If you set period =0, the B1500 automatically sets the pulse period to
5 msec (for width ≤ 3 ms), width +2 msec (for 3 ms < width ≤ 100 ms),
or width +10 msec (for width > 100 ms).
If you do not specify period, 0 sec is set.
Tdelay :
Trigger output delay time (in seconds). Numeric expression.
0 to width sec. 1E− 4 sec resolution. Default setting = 0.
This parameter is the time from pulse leading edge to timing of trigger
output from a trigger output terminal. If you do not specify Tdelay, 0
sec is set.
4-108
Agilent B1500 Programming Guide, Edition 2
Command Reference
PV
PV
The PV command specifies the pulsed voltage source and its parameters. This
command also clears, and is cleared by, the PI command setting.
In the staircase sweep with pulsed bias measurement mode (MM 5 command), the
output forced by the PV command synchronized with the staircase sweep outputs
forced by the WI or WV command.
Measurement channel performs measurement so that the pulse width and pulse
period are kept. The integration time is automatically set by the instrument, and you
cannot change. Note that the high-resolution ADC cannot be used for the pulsed
measurements. The AAD/AIT/AV/WT command settings are ignored.
If the output voltage is greater than ±42 V, the interlock circuit must be shorted.
Syntax
PV chnum,vrange,base,pulse[,Icomp]
Parameters
chnum :
Pulsed source channel number. The value must be slot number where
the SMU has been installed. Integer expression. 1 to 10. See Table 4-1
on page 4-10.
vrange:
Ranging type for the pulsed voltage output. Integer expression. The
output range will be set to the minimum range that covers both base
and pulse values. For the limited auto ranging, the instrument never
uses the range less than the specified range. See Table 4-4 on page 4-13.
base,
pulse :
Pulse base voltage or pulse peak voltage (in V). Numeric expression.
See Table 4-6 on page 4-14.
0 to ±100 for MPSMU/HRSMU, or 0 to ±200 for HPSMU
Icomp:
Current compliance value (in A). Numeric expression. See Table 4-6 on
page 4-14. If you do not set Icomp, the previous value is used.
Compliance polarity is automatically set to the same polarity as the
output value, regardless of the specified Icomp. If the output value is 0,
the polarity is set to positive.
Example
Statements
OUTPUT @B1500;"PT 1,0.01"
OUTPUT @B1500;"PV 1,12,0,5,1E-3"
OUTPUT @B1500;"PT 1,0.01"
OUTPUT @B1500;"PV 2,0,0,3"
Agilent B1500 Programming Guide, Edition 2
4-109
Command Reference
PWI
PWI
The PWI command specifies the pulsed sweep current source and its parameters.
This command clears the settings of the PWV, WSV and WSI commands.
The settings specified by this command are cleared by the PWV command.
Measurement channel performs measurement so that the pulse width and pulse
period are kept. The integration time is automatically set by the instrument, and you
cannot change. Note that the high-resolution ADC cannot be used for the pulsed
measurements. The AAD/AIT/AV/WT command settings are ignored.
Syntax
PWI chnum,mode,range,base,start,stop,step[,Vcomp]
Parameters
chnum :
Pulsed sweep source channel number. The value must be slot number
where the SMU has been installed. Integer expression. 1 to 10. See
Table 4-1 on page 4-10.
mode :
Sweep mode. Integer expression. 1 or 3.
1: Linear sweep (single stair, start to stop.)
3: Linear sweep (double stair, start to stop to start.)
range :
Ranging type for pulsed current sweep. Integer expression. The output
range will be set to the minimum range that covers base, start, and stop
values. For the limited auto ranging, the instrument never uses the
range less than the specified range. See Table 4-5 on page 4-13.
base, start,
stop :
Pulse base, start, or stop current (in A). Numeric expression. See Table
4-7 on page 4-15. base, start and stop must have the same polarity.
0 to ±0.1 for MPSMU/HRSMU, or 0 to ±1 for HPSMU
step :
Number of steps for pulsed sweep. Numeric expression. 1 to 1001.
Vcomp :
Voltage compliance (in V). Numeric expression. See Table 4-7 on page
4-15. If you do not specify Vcomp, the previous value is set. If Vcomp
value is greater than ±42 V, the interlock circuit must be shorted.
Compliance polarity is automatically set to the same polarity as the
output value, regardless of the specified Vcomp. If the output value is 0,
the polarity is set to positive.
Example
Statements
OUTPUT
OUTPUT
OUTPUT
OUTPUT
4-110
@B1500;"PT 1,0.01"
@B1500;"PWI 1,1,0,0,0,0.1,101"
@B1500;"PT 1,0.01"
@B1500;"PWI 2,3,13,0,1E-7,1E-2,100,10"
Agilent B1500 Programming Guide, Edition 2
Command Reference
PWV
PWV
The PWV command specifies the pulsed sweep voltage source and its parameters.
This command also clears the settings of the PWI, WSV and WSI commands.
The settings specified by this command are cleared by the PWI command.
Measurement channel performs measurement so that the pulse width and pulse
period are kept. The integration time is automatically set by the instrument, and you
cannot change. Note that the high-resolution ADC cannot be used for the pulsed
measurements. The AAD/AIT/AV/WT command settings are ignored.
Syntax
PWV chnum,mode,range,base,start,stop,step[,Icomp]
Parameters
chnum :
Pulsed sweep source channel number. The value must be slot number
where the SMU has been installed. Integer expression. 1 to 10. See
Table 4-1 on page 4-10.
mode :
Sweep mode. Integer expression. 1 or 3.
1: Linear sweep (single stair, start to stop.)
3: Linear sweep (double stair, start to stop to start.)
range:
Ranging type for pulsed voltage sweep. Integer expression. The output
range will be set to the minimum range that covers base, start, and stop
values. For the limited auto ranging, the instrument never uses the
range less than the specified range. See Table 4-4 on page 4-13.
base, start,
stop :
Pulse base, start, or stop voltage (in V). Numeric expression. See Table
4-6 on page 4-14. If the output voltage is greater than ±42 V, the
interlock circuit must be shorted.
0 to ±100 for MPSMU/HRSMU, or 0 to ±200 for HPSMU
step :
Number of steps for pulsed sweep. Numeric expression. 1 to 1001.
Icomp :
Current compliance (in A). Numeric expression. See Table 4-6 on page
4-14. If you do not specify Icomp, the previous value is set.
Compliance polarity is automatically set to the same polarity as the
output value, regardless of the specified Icomp. If the output value is 0,
the polarity is set to positive.
Example
Statements
OUTPUT
OUTPUT
OUTPUT
OUTPUT
@B1500;"PT 1,0.01"
@B1500;"PWV 1,1,0,0,0,10,101"
@B1500;"PT 1,0.01"
@B1500;"PWV 2,3,14,0,1,10,100,0.1"
Agilent B1500 Programming Guide, Edition 2
4-111
Command Reference
RC
RC
The RC command specifies the measurement range or the measurement ranging
type of the MFCMU. In the initial setting, the auto ranging is set. The range
changing occurs immediately after the trigger (that is, during the measurements).
For the high speed spot measurement, use the TC/TTC command.
The range setting is cleared by the CL, CA, IN, *TST?, *RST or a device clear (HP
BASIC CLEAR) command.
Syntax
RC chnum,mode[,range]
Parameters
chnum :
Measurement channel number. The value must be slot number where
the MFCMU has been installed. Integer expression. 1 to 10. See Table
4-1 on page 4-10.
mode :
Ranging mode. 0 (auto ranging. initial setting) or 2 (fixed range).
range :
Measurement range. Needs to set when mode=2. Integer (0 or more).
50 Ω, 100 Ω, 300 Ω, 1 kΩ, 3 kΩ, 10 kΩ, 30 kΩ, 100 kΩ, and 300 kΩ
are selectable. See Table 4-9 on page 4-17. Available measurement
ranges depend on the output signal frequency set by the FC command.
Example
Statements
OUTPUT @B1500;"RC 8,0"
OUTPUT @B1500;"RC 8,2,10000"
4-112
Agilent B1500 Programming Guide, Edition 2
Command Reference
RCV
RCV
The RCV command enables the modules that fail the self-test or self-calibration so
that it can receive commands again.
After the RCV command, enter the *OPC? command to confirm that the command
execution is completed.
This command should only be used for servicing the B1500.
Syntax
RCV [module]
Parameters
module :
Failed module to enable. Integer expression. 0 to 11.
0: All failed modules. Default setting.
1 to 10: Module installed in the slot specified by module.
11: Mainframe.
If module specifies the slot that installs no module, this command causes an error.
Example
Statements
OUTPUT @B1500;"RCV 1"
OUTPUT @B1500;"*OPC?"
ENTER @B1500;A
Agilent B1500 Programming Guide, Edition 2
4-113
Command Reference
RI
RI
The RI command specifies the current measurement range or ranging type. In the
initial setting, the auto ranging is set. The range changing occurs immediately after
the trigger (that is, during the measurements). Current measurement channel can be
decided by the CMM command setting and the channel output mode (voltage or
current).
For the high speed spot measurement, use the TI/TTI command.
The range setting is cleared by the CL, CA, IN, *TST?, *RST or a device clear (HP
BASIC CLEAR) command.
Syntax
RI chnum,range
Parameters
chnum :
Current measurement channel number. The value must be slot number
where the SMU has been installed. Integer expression. 1 to 10. See
Table 4-1 on page 4-10.
range :
Measurement range or ranging type. Integer expression. See Table 4-3
on page 4-12.
If you select the fixed range, the instrument performs measurement by using the
specified range.
For the auto or limited auto ranging, the measurement range will be set to the
minimum range that covers the measured values. However, the instrument never
uses the range less than the specified range for the limited auto ranging.
For the measurement mode that uses pulse source, if you select the auto or limited
auto ranging, the measurement channel uses the minimum range that covers the
compliance value or current output range.
Example
Statements
OUTPUT @B1500;"RI 1,0"
OUTPUT @B1500;"RI 2,-20"
4-114
Agilent B1500 Programming Guide, Edition 2
Command Reference
RM
RM
This command specifies the auto range operation for the current measurement.
Syntax
RM chnum,mode[,rate]
where the rate parameter is available for mode=2 or 3.
Parameters
chnum :
Current measurement channel number. The value must be slot number
where the SMU has been installed. Integer expression. 1 to 10. See
Table 4-1 on page 4-10.
mode :
Range changing operation mode. Integer expression. 1, 2 or 3.
mode
Description
1
Initial setting. If you set mode=1, do not set rate.
2
If measured data ≥ current1, the range changes up after
measurement.
3
If measured data ≤ current2, the range changes down
immediately, and if measured data ≥ current1, the range
changes up after measurement.
where current1 and current2 are given by the following formula:
current1 = measurement range × rate /100
current2 = measurement range × rate /1000
For example, if measurement range=10 mA and rate=90, these values
are as follows:
current1 = 9 mA
current2 = 0.9 mA
rate:
Example
Statements
Parameter used to calculate the current value. Numeric expression.
11 to 100. Default setting is 50.
OUTPUT @B1500;"RM 1,2"
OUTPUT @B1500;"RM 2,3,60"
Agilent B1500 Programming Guide, Edition 2
4-115
Command Reference
*RST
*RST
The *RST command resets the B1500 to the initial settings. This command does not
clear the program memory and the self-calibration data.
Syntax
*RST
Remarks
If you want to reset channels while a sweep measurement is being performed, you
must first send the AB command, then the *RST command.
Example
Statement
OUTPUT @B1500;"*RST"
RU
The RU command sequentially executes the internal memory programs.
Execution
Conditions
The specified programs have been stored by using the ST and END commands,
from the start program number through the stop program number.
Syntax
RU start,stop
Parameters
start :
Start program number. Numeric expression. 1 to 2000.
stop :
Stop program number. Numeric expression. 1 to 2000.
where stop value must be greater than or equal to the start value.
Example
Statements
OUTPUT @B1500;"RU 1,10"
OUTPUT @B1500;"RU 3,6"
4-116
Agilent B1500 Programming Guide, Edition 2
Command Reference
RV
RV
The RV command specifies the voltage measurement range or ranging type. In the
initial setting, the auto ranging is set. The range changing occurs immediately after
the trigger (that is, during the measurements). Voltage measurement channel can be
decided by the CMM command setting and the channel output mode (voltage or
current).
For the high speed spot measurement, use the TV/TTV command.
The range setting is cleared by the CL, CA, IN, *TST?, *RST or a device clear (HP
BASIC CLEAR) command.
Syntax
RV chnum,range
Parameters
chnum :
Voltage measurement channel number. The value must be slot number
where the SMU has been installed. Integer expression. 1 to 10. See
Table 4-1 on page 4-10.
range :
Measurement range or ranging type. Integer expression. See Table 4-2
on page 4-11.
If you select the fixed range, the instrument performs measurement by using the
specified range.
For the auto or limited auto ranging, the measurement range will be set to the
minimum range that covers the measured values. However, the instrument never
uses the range less than the specified range for the limited auto ranging.
For the measurement mode that uses pulse source, if you select the auto or limited
auto ranging, the measurement channel uses the minimum range that covers the
compliance value or voltage output range.
Example
Statements
OUTPUT @B1500;"RV 2,-15"
OUTPUT @B1500;"RV 1,12"
Agilent B1500 Programming Guide, Edition 2
4-117
Command Reference
RZ
RZ
The RZ command returns the channel to the settings that are stored by the DZ
command and clears the stored settings.
The DZ command stores the channel settings (V/I output values, V/I output ranges,
V/I compliance values, and so on), then sets the channel to 0 V.
Execution
Conditions
The DZ command has been executed for the specified channel. And the CL, CA,
*TST?, *RST or a device clear (HP BASIC CLEAR) command has not been
executed for the specified channel.
Syntax
RZ [chnum[,chnum...[,chnum]...]]
A maximum of ten channels can be set.
Parameters
chnum :
Channel number. The value must be slot number where the module has
been installed. Integer expression. 1 to 10. See Table 4-1 on page 4-10.
If you do not specify this parameter, this command returns the settings for all
channels that satisfy the conditions described in “Execution Conditions” above, in
the order that the DZ command stored them.
You can specify up to ten channels at once using the RZ command. The B1500
returns the stored settings in the order specified.
Example
Statements
OUTPUT @B1500;"RZ"
OUTPUT @B1500;"RZ 1,2,3"
4-118
Agilent B1500 Programming Guide, Edition 2
Command Reference
SAL
SAL
This function is available for the Agilent B1500 installed with the high resolution
SMU (HRSMU) and the atto sense and switch unit (ASU).
Disables or enables the connection status indicator (LED) of the ASU. This
command is effective for the specified channel.
Syntax
SAL chnum,mode
Parameters
chnum :
Slot number where the HRSMU has been installed. The ASU must be
connected to the HRSMU. Integer expression. 1 to 10.
mode :
0: Disables the indicator.
1: Enables the indicator. Default setting.
Example
Statements
OUTPUT @B1500;"SAL 1,0"
NOTE
To use ASU
Before turn the Agilent B1500 on, connect the ASU to the HRSMU properly. The
ASU will add the 1 pA range to the HRSMU. If you use other instrument such as the
capacitance meter, connect the instrument to the AUX input of the ASU. The ASU
provides the input selection function.
Remember that the series resistor in the HRSMU connected to the ASU cannot be
used.
Agilent B1500 Programming Guide, Edition 2
4-119
Command Reference
SAP
SAP
This function is available for the Agilent B1500 installed with the high resolution
SMU (HRSMU) and the atto sense and switch unit (ASU). This command is not
effective when the High Voltage indicator of the Agilent B1500 has been lighted.
Controls the connection path of the ASU. Switches the ASU input resource
(HRSMU or the instrument connected to the AUX input) to be connected to the
ASU output. This command is effective for the specified channel.
After the Agilent B1500 is turned on or the CL command is entered, the ASU output
will be connected to the SMU connector side, but the HRSMU will not be enabled
yet. After this command is entered with path=1, the HRSMU specified by chnum
cannot be used. After this command is entered with path=0 or the CN command is
entered, the HRSMU output will appear on the ASU output.Then the HRSMU
output will be 0 V.
Syntax
SAP chnum,path
Parameters
chnum :
Slot number where the HRSMU has been installed. The ASU must be
connected to the HRSMU. Integer expression. 1 to 10.
path :
Path connected to the ASU output. 0 or 1.
0: The ASU output will be connected to the SMU connector side.
1: The ASU output will be connected to the AUX connector side.
Example
Statements
OUTPUT @B1500;"SAP 1,1"
4-120
Agilent B1500 Programming Guide, Edition 2
Command Reference
SAR
SAR
This function is available for the Agilent B1500 installed with the high resolution
SMU (HRSMU) and the atto sense and switch unit (ASU).
Enables or disables the 1 pA range for the auto ranging operation. This command is
effective for the specified channel.
Syntax
SAR chnum,mode
Parameters
chnum :
Slot number where the HRSMU has been installed. The ASU must be
connected to the HRSMU. Integer expression. 1 to 10.
mode :
0: Enables 1 pA range for the auto ranging operation.
1: Disables 1 pA range for the auto ranging operation. Initial setting
Example
Statements
OUTPUT @B1500;"SAR 1,0"
NOTE
To use ASU
Before turn the Agilent B1500 on, connect the ASU to the HRSMU properly. The
ASU will add the 1 pA range to the HRSMU. Remember that the series resistor in
the HRSMU connected to the ASU cannot be used.
SCR
The SCR command scratches the specified program from the internal program
memory.
Syntax
SCR [pnum]
Parameters
pnum :
Example
Statements
OUTPUT @B1500;"SCR"
OUTPUT @B1500;"SCR 5"
Program number. Numeric expression. 1 to 2000.
If you do not specify this parameter, this command scratches all
programs stored in the internal program memory.
Agilent B1500 Programming Guide, Edition 2
4-121
Command Reference
*SRE
*SRE
The *SRE command enables the specified bits of the status byte register for SRQ
(service requests), and masks (disables) the bits that are not specified.
Syntax
*SRE bit
Parameters
bit :
Sum of the decimal values corresponding to the bits to be enabled.
Integer expression. 0 to 255. See the following table.
For example, to enable Bit 0 and 4 for the SRQ, the bit value must be
17 (1+16).
If bit=0, all bits, except for Bit 6, will be masked (disabled for the
SRQ). You cannot mask bit 6.
Example
Statements
Decimal Value
Bit Number
Description
1
Bit 0
data ready
2
Bit 1
wait
4
Bit 2
not used
8
Bit 3
interlock open
16
Bit 4
set ready
32
Bit 5
error
64
Bit 6
RQS
128
Bit 7
not used
OUTPUT @B1500;"*SRE 6"
OUTPUT @B1500;"*SRE 32"
4-122
Agilent B1500 Programming Guide, Edition 2
Command Reference
*SRE?
*SRE?
The *SRE? query command returns information about which bits of the status byte
register are enabled for the SRQ (service requests), and stores the results in the
output data buffer (query buffer).
Syntax
*SRE?
Query Response
enabled_bits<CR/LF^EOI>
enabled_bits are represented by the corresponding decimal values shown below.
Decimal Value
Bit Number
Description
1
Bit 0
data ready
2
Bit 1
wait
4
Bit 2
not used
8
Bit 3
interlock open
16
Bit 4
set ready
32
Bit 5
error
64
Bit 6
RQS
128
Bit 7
not used
For example, if Bit 0, 3, and 4 are enabled for the SRQ, 25 (1 + 8 + 16) will be
returned. If all bits, except for Bit 6, are masked, enabled_bits will be 0.
Example
Statements
OUTPUT @B1500;"*SRE?"
ENTER @B1500;A
Agilent B1500 Programming Guide, Edition 2
4-123
Command Reference
SSL
SSL
This function is available for the Agilent B1500 installed with the multi frequency
capacitance measurement unit (MFCMU) and the SMU CMU unify unit (SCUU).
To use the SCUU, connect it to the MFCMU and two SMUs (MPSMU or HRSMU)
correctly. The SCUU cannot be used with the HPSMU or when only one SMU is
connected.
Disables or enables the connection status indicator (LED) of the SCUU.
Syntax
SAL chnum,mode
Parameters
chnum :
Slot number where the MFCMU has been installed. Integer expression.
1 to 10.
mode :
0: Disables the indicator.
1: Enables the indicator. Initial setting.
Example
Statements
OUTPUT @B1500;"SSL 9,0"
NOTE
To use SCUU
Before turn the Agilent B1500 on, connect the SCUU to the MFCMU and two
MPSMU/HRSMUs properly. The SCUU is used to switch the module (SMU or
MFCMU) connected to the DUT.
4-124
Agilent B1500 Programming Guide, Edition 2
Command Reference
SSP
SSP
This function is available for the Agilent B1500 installed with the multi frequency
capacitance measurement unit (MFCMU) and the SMU CMU unify unit (SCUU).
To use the SCUU, connect it to the MFCMU and two SMUs (MPSMU or HRSMU)
correctly. The SCUU cannot be used with the HPSMU or when only one SMU is
connected.
Controls the connection path of the SCUU. Switches the SCUU input resource
(MFCMU or SMU) to be connected to the SCUU output.
When the B1500 is turned on, the SCUU input to output connection is not made
(open). When the SCUU input to output connection is made, the measurement unit
output switch will be automatically set to ON.
Syntax
SAP chnum,path
Parameters
chnum :
Slot number where the MFCMU has been installed. Integer expression.
1 to 10.
path :
Path connected to the SCUU output. 1 to 4. See Table 4-15.
Example
Statements
OUTPUT @B1500;"SSP 9,4"
Remarks
When the connection is changed from SMU to MFCMU, the SMU output will be set
as follows. The other setup parameters are not changed.
Output voltage
0V
Output range
100 V
Compliance
20 mA
Series resistance
OFF
When the connection is changed from MFCMU to SMU, the SMU output will be set
as follows. The other setup parameters are not changed.
Output voltage
0V
Output range
20 V
Compliance
100 μA
Series resistance
Condition before the connection is changed from SMU to
MFCMU
Agilent B1500 Programming Guide, Edition 2
4-125
Command Reference
SSP
Table 4-15
SCUU Input Output Connection Control
SCUU output connection after the command
Command
CMUH/Force1/Sense1
CMUL/Force2/Sense2
SSP slot, 1
Force1/Sense1
Open
SSP slot, 2
Open
Force2/Sense2
SSP slot, 3
Force1/Sense1
Force2/Sense2
SSP slot, 4
CMUH
CMUL
Force1/Sense1 is connected to the SMU installed in the slot numbered slot-1.
Force2/Sense2 is connected to the SMU installed in the slot numbered slot-2.
NOTE
To use SCUU
Before turn the Agilent B1500 on, connect the SCUU to the MFCMU and two
MPSMU/HRSMUs properly. The SCUU is used to switch the module (SMU or
MFCMU) connected to the DUT.
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Agilent B1500 Programming Guide, Edition 2
Command Reference
SSR
SSR
This command sets the connection mode of a SMU series resistor (approx. 1 MΩ)
for each channel.
If the output switch is opened, the SSR command just sets the mode, and the CN
command connects or disconnects the series resistor.
If the output switch is already closed, the SSR command connects the series resistor
to the SMU output. Then the output forces 0 V one moment.
A series resistor is mounted on each module. If you use a series resistor, the voltage
you set is applied to the near side of the series resistor. Thus, the voltage will be
divided by the series resistor and the device under test.
Execution
Conditions
The series resistor cannot be used for the measurements that use the high resolution
SMU (HRSMU) connected to the atto sense and switch unit (ASU) or the
measurements that use 1 A range of the high power SMU (HPSMU).
The channel must not be in the high voltage state (forcing more than ±42 V, or
voltage compliance set to more than ±42 V).
Syntax
SSR chnum,mode
Parameters
chnum :
Channel number. The value must be slot number where the SMU has
been installed. Integer expression. 1 to 10. See Table 4-1 on page 4-10.
mode :
Status of the series resistor. Integer expression.
0: Disconnect (initial setting).
1: Connect.
Example
Statements
OUTPUT @B1500;"SSR 1,1"
OUTPUT @B1500;"SSR 2,1"
Agilent B1500 Programming Guide, Edition 2
4-127
Command Reference
ST
ST
The ST command is used with the END command to store a program in the internal
program memory that can store 2,000 programs maximum, and a total of 40,000
commands.
The ST command indicates the start of the program, and assigns the program
number. If the assigned program number already exists, the B1500 deletes the old
program, and stores the new one.
The END command indicates the end of the program. If the END command is not
included, the B1500 stores the commands until the program memory is full.
Use the DO or RU command to execute stored programs.
Syntax
STpnum[;command[;command...[;command]...];END
or
ST pnum
[command]
[command]
:
:
[command]
END
Parameters
pnum :
Program number. Integer expression. 1 to 2000.
command :
Command stored in the internal program memory. Specify commands
according to normal syntax − no special syntax is necessary.
For the commands that cannot stored in the program memory, refer to Table 2-1 on
page 2-32.
Example
Statements
Example 1:
OUTPUT @B1500;"ST1;CN1;DV1,0,5,1E-4;TI1,0;CL1"
OUTPUT @B1500;"END"
Example 2:
OUTPUT
OUTPUT
OUTPUT
OUTPUT
OUTPUT
OUTPUT
4-128
@B1500;"ST 1"
@B1500;"CN 1"
@B1500;"DV 1,0,5,1E-4"
@B1500;"TI 1,0"
@B1500;"CL 1"
@B1500;"END"
Agilent B1500 Programming Guide, Edition 2
Command Reference
*STB?
*STB?
The *STB? query command stores the decimal representation of the status byte in
the output data buffer (query buffer).
The *STB? command is functionally identical to the SPOLL command of BASIC,
however this command does not clear the status byte (the SPOLL command clears
the status byte).
Syntax
*STB?
Query Response
status_byte<CR/LF^EOI>
status_byte value is a decimal number that indicates which bits of the status byte are
ON (“1”).
For example, if status_byte is 40 (8 + 32), then Bit 3 and 5 are set to 1.
Example
Statements
Decimal Value
Bit Number
Description
1
Bit 0
Data Ready
2
Bit 1
Wait
4
Bit 2
not used
8
Bit 3
Interlock Open
16
Bit 4
Set Ready
32
Bit 5
Error
64
Bit 6
RQS
128
Bit 7
not used
OUTPUT @B1500;"*STB?"
ENTER @B1500;A
Agilent B1500 Programming Guide, Edition 2
4-129
Command Reference
TACV
TACV
This command forces AC voltage from the MFCMU, and returns the time data from
timer reset to the start of output.
Execution
Conditions
The CN command has been executed for the specified channel.
The FC command has been executed to set the frequency of the AC voltage.
This command is not effective for the 4 byte binary data output format (FMT3 and
FMT4).
Syntax
TACV chnum,voltage
Parameters
chnum :
Source channel number. The value must be slot number where the
MFCMU has been installed. Integer expression. 1 to 10. See Table 4-1
on page 4-10.
voltage :
Oscillator level of the output AC voltage (in V). Numeric expression.
0 (initial setting) to 0.25 V, 0.001 V step
Remarks
To read the time data with the best resolution (100 μs), the timer must be cleared
every 100 sec or less for the FMT1, 2, or 5 data output format, or
every 1000 sec or less for the FMT 11, 12, 15, 21, 22, or 25 data output format.
Example
Statements
OUTPUT @B1500;"TACV 7,0.01"
ENTER @B1500 USING "#,5X,13D,X";Time
4-130
Agilent B1500 Programming Guide, Edition 2
Command Reference
TC
TC
The TC command performs the high speed spot measurement by using the
MFCMU, and returns the measurement data. The command starts a measurement
regardless of the trigger mode (TM command) and the measurement mode (MM
command).
The MFCMU measures the primary parameter and the secondary parameter (for
example, Cp and G). Use the IMP command to select the measurement parameters.
See “IMP” on page 4-73.
Execution
Conditions
CN command has been executed for the specified channel.
Syntax
TC chnum,mode[,range]
Parameters
chnum :
Measurement channel number. The value must be slot number where
the MFCMU has been installed. Integer expression. 1 to 10. See Table
4-1 on page 4-10.
mode :
Ranging mode. 0 (auto ranging. initial setting) or 2 (fixed range).
range :
Measurement range. Needs to set when mode=2. Integer (0 or more).
50 Ω, 100 Ω, 300 Ω, 1 kΩ, 3 kΩ, 10 kΩ, 30 kΩ, 100 kΩ, and 300 kΩ
are selectable. See Table 4-9 on page 4-17. Available measurement
ranges depend on the output signal frequency set by the FC command.
Example
Statements
IMP command has been executed.
OUTPUT @B1500;"TC 8,2,1000"
ENTER @B1500 USING "#,3X,12D,X";Cdata
ENTER @B1500 USING "#,3X,12D,X";Gdata
Agilent B1500 Programming Guide, Edition 2
4-131
Command Reference
TDCV
TDCV
Forces DC voltage from the MFCMU or the SMU connected to the Force1/Sense1
terminals of the SCUU (SMU CMU unify unit), and returns the time data from timer
reset to the start of output.
Execution
Conditions
The CN command has been executed for the specified channel (MFCMU).
If you want to apply DC voltage over ±25 V, the SCUU must be connected correctly.
The SCUU can be used with the MFCMU and two SMUs (MPSMU or HRSMU).
The SCUU cannot be used if the HPSMU is connected to the SCUU or if the
number of SMUs connected to the SCUU is only one.
This command is not effective for the 4 byte binary data output format (FMT3 and
FMT4).
Syntax
TDCV chnum,voltage
Parameters
chnum :
Source channel number. The value must be slot number where the
MFCMU has been installed. Integer expression. 1 to 10. See Table 4-1
on page 4-10.
voltage :
DC voltage (in V). Numeric expression.
0 (initial setting) to ±100 V
Source module is automatically selected by the setting value. The
MFCMU is selected if voltage is ±25 V or less (setting resolution:
0.001 V), or the SMU is selected if voltage is greater than ±25 V
(setting resolution: 0.005 V).
The SMU will operate with the 100 V limited auto ranging and 20 mA
compliance settings.
If the output voltage is greater than ±42 V, the interlock circuit must be
shorted.
Remarks
Example
Statements
To read the time data with the best resolution (100 μs), the timer must be cleared
every 100 sec or less for the FMT1, 2, or 5 data output format, or
every 1000 sec or less for the FMT 11, 12, 15, 21, 22, or 25 data output format.
OUTPUT @B1500;"TDCV 7,1"
ENTER @B1500 USING "#,5X,13D,X";Time
4-132
Agilent B1500 Programming Guide, Edition 2
Command Reference
TDI
TDI
Forces current and returns the time data from timer reset to the start of output. This
command is not effective for the 4 byte binary data output format (FMT3 and
FMT4).
Execution
Conditions
The CN command has been executed for the specified channel.
Syntax
TDI chnum,irange,current[,Vcomp[,polarity[,vrange]]]
Parameters
chnum :
Source channel number. The value must be slot number where the SMU
has been installed. 1 to 10 (integer). See Table 4-1 on page 4-10.
irange:
Ranging type for current output. Integer expression. The output range
will be set to the minimum range that covers current value. For the
limited auto ranging, the instrument never uses the range less than the
specified range. See Table 4-5 on page 4-13.
current:
Output current (in A). Numeric expression. See Table 4-7 on page 4-15.
If the voltage compliance is greater than ±42 V, the interlock circuit must be shorted.
0 to ±0.1 for MPSMU/HRSMU, or 0 to ±1 for HPSMU
Vcomp:
Voltage compliance value (in V). Numeric expression. See Table 4-7 on
page 4-15. If you do not specify this parameter, Vcomp is set to the
previous setting.
polarity:
Polarity of voltage compliance. Numeric expression.
0: Auto mode (default setting). The compliance polarity is
automatically set to the same polarity as current, regardless of the
specified Vcomp. If current=0 A, the polarity is set to positive.
1: Manual mode. Uses the polarity of Vcomp you specified.
vrange:
Voltage compliance ranging type. Integer expression. The compliance
range will be set to the minimum range that covers Vcomp value. For
the limited auto ranging, the instrument never uses the range less than
the specified range. See Table 4-4 on page 4-13.
Remarks
To read the time data with the best resolution (100 μs), the timer must be cleared
every 100 sec or less for the FMT1, 2, or 5 data output format, or
every 1000 sec or less for the FMT 11, 12, 15, 21, 22, or 25 data output format.
Example
Statements
OUTPUT @B1500;"TDI 1,0,1E-6"
ENTER @B1500 USING "#,5X,13D,X";Time
Agilent B1500 Programming Guide, Edition 2
4-133
Command Reference
TDV
TDV
Forces voltage and returns the time data from timer reset to the start of output. This
command is not effective for the 4 byte binary data output format (FMT3 and
FMT4).
Execution
Conditions
The CN command has been executed for the specified channel.
Syntax
TDV chnum,vrange,voltage[,Icomp[,polarity[,irange]]
Parameters
chnum :
Source channel number. The value must be slot number where the SMU
has been installed. 1 to 10 (integer). See Table 4-1 on page 4-10.
vrange:
Ranging type for voltage output. Integer expression. The output range
will be set to the minimum range that covers voltage value. For the
limited auto ranging, the instrument never uses the range less than the
specified range. See Table 4-4 on page 4-13.
voltage:
Output voltage (V). Numeric expression. See Table 4-6 on page 4-14.
If the output voltage is greater than ±42 V, the interlock circuit must be shorted.
0 to ±100 for MPSMU/HRSMU, or 0 to ±200 for HPSMU
Icomp:
Current compliance value (in A). Numeric expression. See Table 4-6 on
page 4-14. If you do not set Icomp, the previous value is used. 0 A is
not allowed for Icomp.
polarity:
Polarity of current compliance. Integer expression.
0: Auto mode (default setting). The compliance polarity is
automatically set to the same polarity as voltage, regardless of the
specified Icomp. If voltage=0 V, the polarity is set to positive.
1: Manual mode. Uses the polarity of Icomp you specified.
irange:
Current compliance ranging type. Integer expression. The compliance
range will be set to the minimum range that covers Icomp value. For the
limited auto ranging, the instrument never uses the range less than the
specified range. See Table 4-5 on page 4-13.
Remarks
To read the time data with the best resolution (100 μs), the timer must be cleared
every 100 sec or less for the FMT1, 2, or 5 data output format, or
every 1000 sec or less for the FMT 11, 12, 15, 21, 22, or 25 data output format.
Example
Statements
OUTPUT @B1500;"TDV 1,0,20,1E-6,0,15"
ENTER @B1500 USING "#,5X,13D,X";Time
4-134
Agilent B1500 Programming Guide, Edition 2
Command Reference
TGMO
TGMO
The TGMO command selects the edge trigger or the gate trigger for the Step
Measurement Completion trigger output set by the TGP port,2,polarity,3
command. See Figure 4-2.
This command is available for the staircase sweep, multi channel sweep, and CV
sweep measurements.
Syntax
TGMO mode
Parameters
mode :
Edge trigger or gate trigger. Integer expression.
1: Edge trigger (initial setting).
2: Gate trigger.
Example
Statements
OUTPUT @B1500;"TGMO 2"
See Also
“TGP” and “TGPC”
Figure 4-2
Trigger Output Example, Staircase Sweep Measurement, Negative Logic
Step delay time
Delay time
Hold time
Source trigger delay
: Measurement
XE
TGP t,2,p,1
Measurement Completion
Gate trigger TGP t,2,p,3
Step Measurement Completion
TGP t,2,p,2
Step Output Setup Completion
Source trigger delay
TGP t,2,p,1
Measurement Completion
Edge trigger TGP t,2,p,3
Step Measurement Completion
TGP t,2,p,2
Step Output Setup Completion
Agilent B1500 Programming Guide, Edition 2
4-135
Command Reference
TGP
TGP
The TGP command enables the trigger function for the terminal specified by the
port parameter. For the trigger function, refer to “Trigger Function” on page 2-36.
Syntax
TGP port,terminal,polarity[,type]
Parameters
port :
Trigger port number. Integer expression. -1, -2, or 1 to 16.
-1: Ext Trig In terminal.
-2: Ext Trig Out terminal.
1 to 16: Port 1 to 16 of the digital I/O terminal.
terminal : Terminal type. Integer expression. 1 or 2.
1: Trigger input. Not available for port=-2.
2: Trigger output. Not available for port=-1.
polarity :
Trigger logic. Integer expression. 1 or 2.
1: Positive logic.
2: Negative logic.
type :
Trigger type. Integer expression. 0, 1, 2, or 3. Selects the function of the
trigger port. See Table 4-16.
If this parameter is not specified, type is set to 0.
Remarks
The function of type=0 is effective for all trigger ports regardless of the type value.
Then the PA and WS commands are used for the Ext Trig In terminal, and the OS
command is used for the Ext Trig Out terminal. Also the PAX and WSX commands
are used for the trigger input ports set by the TGP command, and the OSX command
is used for the trigger output ports set by the TGP command.
type=1 to 3 is available for a port only. If you send the command with the same type
more than once, only the last command is effective. type=0 is set for another ports.
If you send the TGP command with terminal=1 and port=1 to 16, the signal level of
the trigger input terminal is set to physical high.
If you send the TGP command with terminal=2, the signal level of the trigger output
terminal is set to logical low.
4-136
Agilent B1500 Programming Guide, Edition 2
Command Reference
TGP
Table 4-16
Trigger Type
type
terminal
Description
0
1
When a trigger is received, the B1500 recovers from the wait state set by the PA,
PAX, WS, or WSX command.
2
The B1500 sends a trigger by the OS or OSX command.
1
Start measurement trigger
1a
When a trigger is received, the B1500 starts the measurement.
2
Measurement completion trigger
The B1500 sends a trigger after measurement.
2
1
Start step output setup trigger
When a trigger is received, the B1500 starts the output setup at each sweep step
or the pulsed output setup. This function is available for the staircase sweep,
multi channel sweep, pulsed spot, pulsed sweep, staircase sweep with pulsed
bias, and CV sweep measurements.
2
Step output setup completion trigger
The B1500 sends a trigger when the output setup is completed at each sweep step
or the pulsed output setup is completed. This function is available for the
staircase sweep, multi channel sweep, pulsed spot, pulsed sweep, staircase sweep
with pulsed bias, and CV sweep measurements.
3
1
Start step measurement trigger
When a trigger is received, the B1500 starts the measurement at each sweep step.
This function is available for the staircase sweep, multi channel sweep, and CV
sweep measurements.
2
Step measurement completion trigger
The B1500 sends a trigger after measurement at each sweep step. This function is
available for the staircase sweep, multi channel sweep, and CV sweep
measurements.
a. TM3 command must be entered to use this trigger type.
Example
Statements
OUTPUT @B1500;"TGP 1,1,1,2"
See Also
See Figure 4-2 on page 4-135 for a trigger output example and Figure 4-3 on page
4-139 for a trigger input example.
Agilent B1500 Programming Guide, Edition 2
4-137
Command Reference
TGPC
TGPC
The TGPC command clears the trigger setting of the specified ports.
Syntax
TGPC [port[,port...[,port]...]]
A maximum of 18 ports can be set. If no port is specified, the TGPC command
clears the setting of all ports; Ext Trig In, Ext Trig Out, and digital I/O ports 1 to 16.
Parameters
port :
Trigger port number. Integer expression. -1, -2, or 1 to 16.
-1: Ext Trig In terminal.
-2: Ext Trig Out terminal.
1 to 16: Port 1 to 16 of the digital I/O terminal.
Remarks
The TGPC command sets the trigger ports as shown below.
Ext Trig In
Same as after TGP -1,1,2,0 command execution.
Ext Trig Out
Same as after TGP -2,2,2,0 command execution.
Digital I/O Ports
No trigger function is available. The ERS? and ERC commands
are available for the port control.
This is not same as the condition set by the *RST command that sets the ports as
shown below.
Ext Trig In
Same as after TGP -1,1,2,1 command execution.
Ext Trig Out
Same as after TGP -2,2,2,1 command execution.
Digital I/O Ports
No trigger function is available. The ERS? and ERC commands
are available for the port control.
Example
Statements
OUTPUT @B1500;"TGPC -1,-2,1,2"
See Also
“TGP”
4-138
Agilent B1500 Programming Guide, Edition 2
Command Reference
TGSI
TGSI
The TGSI command selects Case 1 or Case 2 effective for the Start Step Output
Setup trigger input set by the TGP port,1,polarity,2 command.
This command is available for the staircase sweep, multi channel sweep, pulsed
spot, pulsed sweep, staircase sweep with pulsed bias, and CV sweep measurements.
Syntax
TGSI mode
Parameters
mode :
Case 1 or Case 2. Integer expression. See Figure 4-3.
1: Case 1 (initial setting).
2: Case 2.
Case 1 waits for a trigger for the first sweep step, and does not wait for a trigger for
the source output after sweep.
Case 2 does not wait for a trigger for the first sweep step, and waits for a trigger for
the source output after sweep.
Example
Statements
OUTPUT @B1500;"TGSI 2"
See Also
“TGP” and “TGPC”
Figure 4-3
Trigger Input Example, Staircase Sweep Measurement, Negative Logic
Start Measurement
TGP t,1,p,1
Start Step Measurement
TGP t,1,p,3
Start Step Output Setup
Case 1
TGP t,1,p,2
Case 2
Delay time or more
Case 1: With trigger for
first sweep step
Hold time (Case 2)
or more (Case 1)
Case 2: With trigger for
output after sweep
: Measurement
Measurement trigger delay
Agilent B1500 Programming Guide, Edition 2
4-139
Command Reference
TGSO
TGSO
The TGSO command selects the edge trigger or the gate trigger for the Step Output
Setup Completion trigger output set by the TGP port,2,polarity,2 command. See
Figure 4-2 on page 4-135
This command is available for the staircase sweep, multi channel sweep, pulsed
spot, pulsed sweep, staircase sweep with pulsed bias, and CV sweep measurements.
Syntax
TGSO mode
Parameters
mode :
Edge trigger or gate trigger. Integer expression.
1: Edge trigger (initial setting).
2: Gate trigger.
Example
Statements
OUTPUT @B1500;"TGSO 2"
See Also
“TGP” and “TGPC”
TGXO
The TGXO command selects the edge trigger or the gate trigger for the
Measurement Completion trigger output set by the TGP port,2,polarity,1
command. See Figure 4-2 on page 4-135
Syntax
TGXO mode
Parameters
mode :
Edge trigger or gate trigger. Integer expression.
1: Edge trigger (initial setting).
2: Gate trigger.
Example
Statements
OUTPUT @B1500;"TGXO 2"
See Also
“TGP” and “TGPC”
4-140
Agilent B1500 Programming Guide, Edition 2
Command Reference
TI
TI
The TI command performs the high speed spot measurement, and returns the
measurement data. The command starts a current measurement regardless of the
SMU operation mode, trigger mode (TM command), and measurement mode (MM
command).
Execution
Conditions
CN command has been executed for the specified channel.
Syntax
TI chnum[,range]
Parameters
chnum :
Measurement channel number. The value must be slot number where
the SMU has been installed. Integer expression. 1 to 10. See Table 4-1
on page 4-10.
range :
Measurement range or ranging type. Integer expression. See Table 4-3
on page 4-12.
If you select the fixed range, the instrument performs measurement by using the
specified range.
For the auto or limited auto ranging, the measurement range will be set to the
minimum range that covers the measured values. However, the instrument never
uses the range less than the specified range for the limited auto ranging.
If you do not specify the range parameter for voltage output channels, the channel
uses the minimum range that covers the compliance value.
The range parameter is meaningless for current output channels. The measurement
ranging type is always same as the output ranging type.
Example
Statements
OUTPUT @B1500;"TI 1"
ENTER @B1500 USING "#,3X,12D,X";Idata
Agilent B1500 Programming Guide, Edition 2
4-141
Command Reference
TM
TM
The TM command specifies how events are effective for the following actions:
•
Releasing the B1500 from the paused status set by the PA or PAX command
•
Starting the measurement except for high speed spot measurement (when the
B1500 is not in the paused status set by the PA, PAX, WS, or WSX command)
Syntax
TM mode
Parameters
mode :
Event mode. Integer expression. See below.
mode
Events
1
XE command and GPIB GET (Group Execute Trigger,
TRIGGER command in HP BASIC). Initial setting.
2
XE command
3
XE command and external trigger
4
XE command and MM command (automatic trigger after
the MM command execution)
To enable the trigger function set by the TGP port,terminal,polarity,1 command,
the mode value must be 3.
Remarks
In the TM3 event mode, if the B1500 is not in the wait status set by the PA, PAX,
WS, or WSX command, the B1500 can start the measurement by an external trigger
input. After measurement, the B1500 sends a trigger to a trigger output terminal. In
the initial setting, you can use the Ext Trig In and Out terminals. To use the digital
I/O port, enter the TGP command to set the trigger input or output terminal.
To set the trigger logic (initial setting: negative), send the TGP command for the
trigger input terminal.
Example
Statements
OUTPUT @B1500;"TM 1"
OUTPUT @B1500;"TM 3"
See Also
“PA”, “PAX”, “TGP”, “TGPC”, “WS”, and “WSX”
4-142
Agilent B1500 Programming Guide, Edition 2
Command Reference
TSC
TSC
The TSC command enables or disables the time stamp function.
Execution
Conditions
Time stamp function is not available for the following measurement modes:
•
Quasi-pulsed spot measurement (MM 9)
•
Linear search measurement (MM 14)
•
Binary search measurement (MM 15)
This command is not effective for the 4 byte binary data output format (FMT3 and
FMT4).
Syntax
TSC mode
Parameters
mode :
Time stamp function mode. Integer expression.
mode
Description
0
Disables the time stamp function. Initial setting.
1
Enables the time stamp function.
When the function is enabled, the B1500 returns the time data with the
measurement data. The time data is the time from timer reset to the start
of measurement. Refer to “Data Output Format” on page 1-23.
Remarks
To read the time data with the best resolution (100 μs), the timer must be cleared
every 100 sec or less for the FMT1, 2, or 5 data output format, or
every 1000 sec or less for the FMT 11, 12, 15, 21, 22, or 25 data output format.
Example
Statements
OUTPUT @B1500;"TSC 1"
Agilent B1500 Programming Guide, Edition 2
4-143
Command Reference
TSQ
TSQ
The TSQ command returns the time data from when the TSR command is sent until
this command is sent. The time data will be put in the data output buffer as same as
the measurement data.
This command is effective for all measurement modes, regardless of the TSC
setting.
This command is not effective for the 4 byte binary data output format (FMT3 and
FMT4).
Syntax
TSQ
Example
Statements
OUTPUT @B1500;"TSQ"
ENTER @B1500 USING "#,5X,13D,X";Time
PRINT "Time=";Time;"s"
TSR
The TSR command clears the timer count.
This command is effective for all measurement modes, regardless of the TSC
setting.
This command is not effective for the 4 byte binary data output format (FMT3 and
FMT4).
Syntax
TSR
Remarks
To read the time data with the best resolution (100 μs), the timer must be cleared
every 100 sec or less for the FMT1, 2, or 5 data output format, or
every 1000 sec or less for the FMT 11, 12, 15, 21, 22, or 25 data output format.
Example
Statements
OUTPUT @B1500;"TSR"
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Agilent B1500 Programming Guide, Edition 2
Command Reference
*TST?
*TST?
The *TST? query command performs the self-test and self-calibration, and returns
the execution results. After the *TST? command, read the results soon.
Execution
Conditions
No SMU may be in the high voltage state (forcing more than ±42 V, or voltage
compliance set to more than ±42 V).
Before the *TST? command, open the measurement terminals.
Syntax
*TST? [module[,option]]
Parameters
module :
Module to test. Integer expression. 0 (default setting) to 11.
0: All modules and mainframe.
1 to 10: Module installed in the slot specified by module.
11: Mainframe.
option :
Execution option. Integer expression. 0 or 1 (default setting).
0: Returns the latest pass/fail condition.
1: Performs the self-test and returns the result.
If module specifies the slot that installs no module, this command causes an error.
Query Response
results<CR/LF^EOI>
results returns the sum of the following values corresponding to the failures.
results
Description
results
Description
0
Passed. No failure detected.
32
Slot 6 module failed.
1
Slot 1 module failed.
64
Slot 7 module failed.
2
Slot 2 module failed.
128
Slot 8 module failed.
4
Slot 3 module failed.
256
Slot 9 module failed.
8
Slot 4 module failed.
512
Slot 10 module failed.
16
Slot 5 module failed.
1024
Mainframe failed.
Failed modules are disabled, and can only be enabled by the RCV command. To
recover the modules connected to the SCUU, recover CMU and SMU in this order.
Example
Statements
OUTPUT @B1500;"*TST?"
ENTER @B1500;A
Agilent B1500 Programming Guide, Edition 2
4-145
Command Reference
TTC
TTC
The TTC command performs the high speed spot measurement by using the
MFCMU, and returns the measurement data and the time data from timer reset to the
start of measurement. The command starts a current measurement regardless of the
trigger mode (TM command) and the measurement mode (MM command).
The MFCMU measures the primary parameter and the secondary parameter (for
example, Cp and G). Use the IMP command to select the measurement parameters.
See “IMP” on page 4-73.
Execution
Conditions
CN command has been executed for the specified channel.
IMP command has been executed.
This command is not effective for the 4 byte binary data output format (FMT3 and
FMT4).
Syntax
TTC chnum,mode[,range]
Parameters
chnum :
Measurement channel number. The value must be slot number where
the MFCMU has been installed. Integer expression. 1 to 10. See Table
4-1 on page 4-10.
mode :
Ranging mode. 0 (auto ranging. initial setting) or 2 (fixed range).
range :
Measurement range. Needs to set when mode=2. Integer (0 or more).
50 Ω, 100 Ω, 300 Ω, 1 kΩ, 3 kΩ, 10 kΩ, 30 kΩ, 100 kΩ, and 300 kΩ
are selectable. See Table 4-9 on page 4-17. Available measurement
ranges depend on the output signal frequency set by the FC command.
Remarks
To read the time data with the best resolution (100 μs), the timer must be cleared
every 100 sec or less for the FMT1, 2, or 5 data output format, or
every 1000 sec or less for the FMT 11, 12, 15, 21, 22, or 25 data output format.
Example
Statements
OUTPUT @B1500;"IMP 101"
OUTPUT @B1500;"TTC 8,2,1000"
ENTER @B1500 USING "#,5X,13D,X";Time
ENTER @B1500 USING "#,5X,13D,X";Cdata
ENTER @B1500 USING "#,5X,13D,X";Ddata
PRINT "Data=";Cdata*1000000;" uF, D=";Ddata;
", at ";Time;" s"
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Agilent B1500 Programming Guide, Edition 2
Command Reference
TTI
TTI
The TTI command performs the high speed spot measurement, and returns the
measurement data and the time data from timer reset to the start of measurement.
The command starts a current measurement regardless of the SMU operation mode,
trigger mode (TM command), and measurement mode (MM command).
Execution
Conditions
CN command has been executed for the specified channel.
Syntax
TTI chnum[,range]
Parameters
chnum :
Measurement channel number. The value must be slot number where
the SMU has been installed. Integer expression. 1 to 10. See Table 4-1
on page 4-10.
range :
Measurement range or ranging type. Integer expression. See Table 4-3
on page 4-12.
This command is not effective for the 4 byte binary data output format (FMT3 and
FMT4).
If you select the fixed range, the instrument performs measurement by using the
specified range.
For the auto or limited auto ranging, the measurement range will be set to the
minimum range that covers the measured values. However, the instrument never
uses the range less than the specified range for the limited auto ranging.
If you do not specify the range parameter for voltage output channels, the channel
uses the minimum range that covers the compliance value.
The range parameter is meaningless for current output channels. The measurement
ranging type is always same as the output ranging type.
Remarks
To read the time data with the best resolution (100 μs), the timer must be cleared
every 100 sec or less for the FMT1, 2, or 5 data output format, or
every 1000 sec or less for the FMT 11, 12, 15, 21, 22, or 25 data output format.
Example
Statements
OUTPUT @B1500;"TTI 1"
ENTER @B1500 USING "#,5X,13D,X";Time
ENTER @B1500 USING "#,5X,13D,X";Idata
PRINT "Data=";Idata*1000;"mA, at";Time;"s"
Agilent B1500 Programming Guide, Edition 2
4-147
Command Reference
TTV
TTV
The TTV command performs the high speed spot measurement, and returns the
measurement data and the time data from timer reset to the start of measurement.
The command starts a voltage measurement regardless of the SMU operation mode,
trigger mode (TM command), and measurement mode (MM command).
Execution
Conditions
CN command has been executed for the specified channel.
Syntax
TTV chnum[,range]
Parameters
chnum :
Measurement channel number. The value must be slot number where
the SMU has been installed. Integer expression. 1 to 10. See Table 4-1
on page 4-10.
range :
Measurement range or ranging type. Integer expression. See Table 4-2
on page 4-11.
This command is not effective for the 4 byte binary data output format (FMT3 and
FMT4).
If you select the fixed range, the instrument performs measurement by using the
specified range.
For the auto or limited auto ranging, the measurement range will be set to the
minimum range that covers the measured values. However, the instrument never
uses the range less than the specified range for the limited auto ranging.
If you do not specify the range parameter for current output channels, the channel
uses the minimum range that covers the compliance value.
The range parameter is meaningless for voltage output channels. The measurement
ranging type is always same as the output ranging type.
Remarks
To read the time data with the best resolution (100 μs), the timer must be cleared
every 100 sec or less for the FMT1, 2, or 5 data output format, or
every 1000 sec or less for the FMT 11, 12, 15, 21, 22, or 25 data output format.
Example
Statements
OUTPUT @B1500;"TTV 1"
ENTER @B1500 USING "#,5X,13D,X";Time
ENTER @B1500 USING "#,5X,13D,X";Vdata
PRINT "Data=";Vdata*1000;"mV, at";Time;"s"
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Agilent B1500 Programming Guide, Edition 2
Command Reference
TV
TV
The TV command performs the high speed spot measurement, and returns the
measurement data. The command starts a voltage measurement regardless of the
SMU operation mode, trigger mode (TM), and measurement mode (MM).
Execution
Conditions
CN command has been executed for the specified channel.
Syntax
TV chnum[,range]
Parameters
chnum :
Measurement channel number. The value must be slot number where
the SMU has been installed. Integer expression. 1 to 10. See Table 4-1.
range :
Measurement range or ranging type. Integer expression. See Table 4-2
on page 4-11.
If you select the fixed range, the instrument performs measurement by using the
specified range. For the auto or limited auto ranging, the measurement range will be
set to the minimum range that covers the measured values. However, the instrument
never uses the range less than the specified range for the limited auto ranging.
If you do not specify the range parameter for current output channels, the channel
uses the minimum range that covers the compliance value.
The range parameter is meaningless for voltage output channels. The measurement
ranging type is always same as the output ranging type.
Example
Statements
OUTPUT @B1500;"TV 1"
ENTER @B1500 USING "#,3X,12D,X";Vdata
UNT?
This command returns the model and revision numbers of mainframe and modules.
Syntax
UNT? [mode]
Parameters
mode :
Query Response
[FrameModel,FrameRevision;]Slot1Model,Slot1Revision; .......
Integer expression. 0 (returns information for all modules, default
setting) or 1 (returns information for mainframe and all modules).
Slot9Model,Slot9Revision;Slot10Model,Slot10Revision<CR/LF^EOI>
Example
Statements
DIM A$[50]
OUTPUT @B1500;"UNT?"
ENTER @B1500;A$
Agilent B1500 Programming Guide, Edition 2
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Command Reference
VAR
VAR
This command defines the Agilent B1500 internal variable, and sets the value. The
variable name is automatically assigned by using the parameters you specify.
Syntax
VAR type,n,value
Parameters
type :
Variable type. Integer expression. 0 or 1.
0: Integer variable. Variable name will be %In.
1: Real variable. Variable name will be %Rn.
n:
Number n added to the variable name. Integer expression. 0 to 99.
value :
Value entered in the variable. Numeric value. The value must be 6
digits or less. Available values are as follows:
For integer variables: -999999 to 999999
For real variables: -9999.9 to 9999.9
Example
Statements
OUTPUT @B1500;"ST1;CN1;DV1,0,%R99,1E-4;TI1,0"
OUTPUT @B1500;"END"
OUTPUT @B1500;"VAR 1,99,2.5"
This example sets 2.5 to the real variable %R99.
VAR?
Returns the value of the variable set by the VAR command.
Syntax
VAR? type,n
Parameters
type :
Variable type. Integer expression. 0 or 1.
0: Integer variable. For the variable %In.
1: Real variable. For the variable %Rn.
n:
Number n added to the variable name. Integer expression. 0 to 99.
Query Response
value<CR/LF^EOI>
Example
Statements
OUTPUT @B1500;"VAR? 1,99"
ENTER @B1500;A$
This example reads the %R99 real variable value.
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Agilent B1500 Programming Guide, Edition 2
Command Reference
WAT
WAT
This command sets the source wait time and the measurement wait time as shown in
Figure 4-4. The wait time is given by the following formula:
wait time = N × initial wait time + offset
where initial wait time is the time the Agilent B1500 initially sets and you cannot
change. The initial source wait time is not same as the initial measurement wait
time. The SMU wait time settings are effective for all SMUs.
Syntax
WAT type,N[,offset]
Parameters
type
Type of the wait time. Integer expression. 1 or 2.
1: SMU source wait time (before changing the output value).
2: SMU measurement wait time (before starting the measurement).
3: CMU measurement wait time (before starting the measurement).
N
Coefficient for initial wait time. Numeric expression.
0 to 10, resolution 0.1. Initial setting is 1.
offset
Offset for the wait time. Numeric expression.
0 to 1 sec, resolution 0.0001. Default setting is 0.
Example
Statements
OUTPUT @B1500;"WAT 1,.7"
OUTPUT @B1500;"WAT 2,0,.01"
Figure 4-4
Source/Measurement Wait Time
Measurement wait time
Source wait time
Delay time
Hold time
: Measurement
Step delay time
Time
NOTE
The wait time can be ignored if it is shorter than the delay time.
Agilent B1500 Programming Guide, Edition 2
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Command Reference
WAT
NOTE
It is not easy to determine the best wait time. If you specify it too short, the
measurement may start before device characteristics stable. If too long, time will be
wasted.
The initial wait time may be too short for measurements of high capacitance or slow
response devices. Then set the wait time longer.
For measurements of low capacitance or fast response devices, if measurement
speed has top priority or is more important than reliability and accuracy, set the wait
time shorter.
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Agilent B1500 Programming Guide, Edition 2
Command Reference
WDCV
WDCV
This command sets the staircase sweep voltage source used for the CV sweep
measurement (MM18). The sweep source will be the MFCMU, or the SMU that can
be connected to the Force1/Sense1 terminals of the SCUU (SMU CMU unify unit).
Execution
Conditions
The CN command has been executed for the specified channel.
If you want to apply DC voltage over ±25 V, the SCUU must be connected correctly.
The SCUU can be used with the MFCMU and two SMUs (MPSMU or HRSMU).
The SCUU cannot be used if the HPSMU is connected to the SCUU or if the
number of SMUs connected to the SCUU is only one.
If the output voltage is greater than ±42 V, the interlock circuit must be shorted.
Syntax
WDCV chnum,mode,start,stop,step
Parameters
chnum :
Source channel number. The value must be slot number where the
MFCMU has been installed. Integer expression. 1 to 10. See Table 4-1
on page 4-10.
mode :
Sweep mode. Integer expression.
1: Linear sweep (single stair, start to stop.)
2: Log sweep (single stair, start to stop.)
3: Linear sweep (double stair, start to stop to start.)
4: Log sweep (double stair, start to stop to start.)
start, stop : Start or stop voltage (in V). Numeric expression. start and stop must
have the same polarity for log sweep.
0 (initial setting) to ±100 V
With the SCUU, the source module is automatically selected by the
setting value. The MFCMU is used if the voltage from start to stop is
below ±25 V (setting resolution: 0.001 V), or the SMU is used if it is
greater than ±25 V (setting resolution: 0.005 V).
The SMU will operate with the 100 V limited auto ranging and 20 mA
compliance settings.
step :
Example
Statements
Number of steps for staircase sweep. Numeric expression. 1 to 1001.
OUTPUT @B1500;"WDCV 8,1,5,-5,101"
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Command Reference
WI
WI
The WI command specifies the staircase sweep current source and its parameters.
This command also clears the WV, WSV, WSI, and WNX command settings.
This command setting is cleared by the WV command.
Syntax
•
For Staircase Sweep Measurement:
WI chnum,mode,range,start,stop,step[,Vcomp[,Pcomp]]
•
For Staircase Sweep with Pulsed Bias Measurement:
WI chnum,mode,range,start,stop,step[,Vcomp]
Parameters
chnum :
Sweep source channel number. The value must be slot number where
the SMU has been installed. Integer expression. 1 to 10. See Table 4-1
on page 4-10.
mode :
Sweep mode. Integer expression. Only linear sweep (mode=1 or 3) is
available for the staircase sweep with pulsed bias.
1: Linear sweep (single stair, start to stop.)
2: Log sweep (single stair, start to stop.)
3: Linear sweep (double stair, start to stop to start.)
4: Log sweep (double stair, start to stop to start.)
range :
Ranging type for staircase sweep current output. Integer expression.
See Table 4-5 on page 4-13.
For the linear sweep, the B1500 uses the minimum range that covers
both start and stop values to force the staircase sweep current.
For the log sweep, the B1500 uses the minimum range that covers the
output value, and changes the output range dynamically.
For the limited auto ranging, the instrument never uses the range less
than the specified range.
start, stop : Start or stop current (in A). Numeric expression. See Table 4-7 on page
4-15. start and stop must have the same polarity for log sweep.
0 to ±0.1 for MPSMU/HRSMU, or 0 to ±1 for HPSMU
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Agilent B1500 Programming Guide, Edition 2
Command Reference
WI
step :
Number of steps for staircase sweep. Numeric expression. 1 to 1001.
Vcomp :
Voltage compliance (in V). Numeric expression. See Table 4-7.
If you do not set Vcomp, the previous value is used. If Vcomp value is
greater than ±42 V, the interlock circuit must be shorted.
Compliance polarity is automatically set to the same polarity as the
output value, regardless of the specified Vcomp. If the output value is 0,
the polarity is set to positive.
If you set Pcomp, the maximum Vcomp value for the module is
allowed, regardless of the output range setting.
For the log sweep and without Pcomp, set the value available for the
minimum range that covers start and stop values.
Pcomp :
Power compliance (in W). Numeric expression. Resolution: 0.001 W. If
the Pcomp value is not entered, the power compliance is not set.
0.001 to 2 for MPSMU/HRSMU, or 0.001 to 20 for HPSMU
Example
Statements
OUTPUT @B1500;"WI 1,1,11,0,0.1,100,10,1"
OUTPUT @B1500;"WI 2,2,15,1E−6,0.1,100"
Agilent B1500 Programming Guide, Edition 2
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Command Reference
WM
WM
The WM command enables or disables the automatic abort function for the staircase
sweep sources and the pulsed sweep source. The automatic abort function stops the
measurement when one of the following conditions occurs:
•
Compliance on the measurement channel
•
Compliance on the non-measurement channel
•
Overflow on the AD converter
•
Oscillation on any channel
This command also sets the post measurement condition for the sweep sources.
After the measurement is normally completed, the staircase sweep sources force the
value specified by the post parameter, and the pulsed sweep source forces the pulse
base value.
If the measurement is stopped by the automatic abort function, the staircase sweep
sources force the start value, and the pulsed sweep source forces the pulse base
value after sweep.
Syntax
WM abort[,post]
Parameters
abort :
Automatic abort function. Integer expression.
1: Disables the function. Initial setting.
2: Enables the function.
post :
Source output value after the measurement is normally completed.
Integer expression.
1: Start value. Initial setting.
2: Stop value.
If this parameter is not set, the sweep sources force the start value.
Output Data
The B1500 returns the data measured before an abort condition is detected. Dummy
data 199.999E+99 will be returned for the data after abort.
Example
Statements
OUTPUT @B1500;"WM 2"
OUTPUT @B1500;"WM 2,2"
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Agilent B1500 Programming Guide, Edition 2
Command Reference
WMDCV
WMDCV
This command enables or disables the automatic abort function for the CV sweep
measurement (MM18). The automatic abort function stops the measurement when
one of the following conditions occurs:
•
NULL loop unbalance condition
•
IV amplifier saturation condition
•
Overflow on the AD converter
This command also sets the post measurement condition for the source. After the
measurement is normally completed, the voltage source forces the value specified
by the post parameter.
If the measurement is stopped by the automatic abort function, the voltage source
forces the start value.
Syntax
WMDCV abort[,post]
Parameters
abort :
Automatic abort function. Integer expression.
1: Disables the function. Initial setting.
2: Enables the function.
post :
Source output value after the measurement is normally completed.
Integer expression.
1: Start value. Initial setting.
2: Stop value.
If this parameter is not set, the voltage source forces the start value.
Output Data
The B1500 returns the data measured before an abort condition is detected. Dummy
data 199.999E+99 will be returned for the data after abort.
Example
Statements
OUTPUT @B1500;"WMDCV 2"
OUTPUT @B1500;"WMDCV 2,2"
Agilent B1500 Programming Guide, Edition 2
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Command Reference
WNU?
WNU?
The WNU? query command returns the number of sweep steps specified by the
sweep command (WI, WV, PWI or PWV), and stores the results in the output data
buffer (query buffer).
Execution
Conditions
If you want to know the number of steps for a pulsed sweep, you must execute an
“MM 4” command before using this command, otherwise the number of steps for
the staircase sweep is reported.
Syntax
WNU?
Query Response
number of sweep steps<CR/LF^EOI>
Example
Statement
OUTPUT @B1500;"WNU?"
ENTER @B1500;A
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Agilent B1500 Programming Guide, Edition 2
Command Reference
WNX
WNX
The WNX command specifies the staircase sweep source (synchronous sweep
source) that will be synchronized with the staircase sweep source (primary sweep
source) set by the WI or WV command.
You can use the maximum of ten sweep sources. There is no restrictions for the
output mode (voltage or current) of the sweep sources. If the output voltage is
greater than ±42 V, the interlock circuit must be shorted.
Execution
Conditions
Available only for the multi channel sweep measurement (MM 16).
Syntax
WNX N,chnum,mode,range,start,stop[,comp[,Pcomp]]
Parameters
N:
Sweep source number. Integer expression. 2 to 10. Sweep sources start
output simultaneously or in number order. See Remarks below.
chnum :
Sweep source channel number. The value must be slot number where
the SMU has been installed. Integer expression. 1 to 10. See Table 4-1
on page 4-10.
mode :
Sweep source type. Integer expression. 1 or 2.
This command must be entered after the WI or WV command that clears the WNX
command setting.
1: Voltage sweep source.
2: Current sweep source.
Sweep mode, linear or log, is set by the WI or WV command.
range :
Ranging type for synchronous sweep output. Integer expression.
•
For voltage source (mode=1): See Table 4-4 on page 4-13.
The B1500 usually uses the minimum range that covers both start
and stop values to force the staircase sweep voltage. However, if
you set Pcomp and if the following formulas are true, the B1500
changes the output range dynamically (20 V range or above). Range
changing may cause 0 V output in a moment. For the limited auto
ranging, the instrument never uses the range less than the specified
range.
•
comp > maximum current for the output range
•
Pcomp/output value > maximum current for the output range
Agilent B1500 Programming Guide, Edition 2
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Command Reference
WNX
•
For current source (mode=2): See Table 4-5 on page 4-13.
For the linear sweep, the B1500 uses the minimum range that
covers both start and stop values to force the staircase sweep
current.
For the log sweep, the B1500 changes the output range
dynamically.
For the limited auto ranging, the instrument never uses the range
less than the specified range.
start, stop : Start or stop value (in V or A). Numeric expression.
•
For voltage source (mode=1): See Table 4-6 on page 4-14.
0 to ±100 for MPSMU/HRSMU, or 0 to ±200 for HPSMU
•
For current source (mode=2): See Table 4-7 on page 4-15.
0 to ±0.1 for MPSMU/HRSMU, or 0 to ±1 for HPSMU
start and stop must have the same polarity for log sweep.
Sweep mode, linear or log, and the number of sweep steps are set by the
WI or WV command.
comp :
Compliance (in A or V). Numeric expression. If you do not set comp,
the previous value is used.
If you set Pcomp, the maximum comp value for the module is allowed,
regardless of the output range setting.
Compliance polarity is automatically set to the same polarity as the
output value, regardless of the specified comp. If the output value is 0,
the polarity is set to positive.
•
For voltage source (mode=1): See Icomp in Table 4-6 on page 4-14.
•
For current source (mode=2): See Vcomp in Table 4-7 on page 4-15.
For the log sweep and without Pcomp, set the value available for
the minimum range that covers start and stop values.
Pcomp :
Power compliance (in W). Numeric expression. Resolution: 0.001 W. If
the Pcomp value is not entered, the power compliance is not set.
0.001 to 2 for MPSMU/HRSMU, or 0.001 to 20 for HPSMU
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Agilent B1500 Programming Guide, Edition 2
Command Reference
WNX
Remarks
To set multiple sweep sources, enter the WI or WV command at first, and enter the
WNX command once or more. Then the N value and the chnum value must be
unique for each WNX command. If you set the value used to the previous command,
the previous command setting is cleared, and the last command setting is effective.
Sweep sources simultaneously start output by a trigger such as the XE command.
However, if a sweep source sets power compliance or forces logarithmic sweep
current, the sweep sources start output in the order specified by the N value. Then
the first output is forced by the channel set by the WI or WV command.
If you use multiple measurement channels, the channels that use the high-speed A/D
converter with the fixed ranging mode start measurement simultaneously, then other
channels start measurement in the order defined in the MM command.
Example
Statements
OUTPUT @B1500;"WNX 2,3,1,12,0,3,1E-3,2E-3"
OUTPUT @B1500;"WNX 3,4,2,0,1E-3,1E-2,3"
Agilent B1500 Programming Guide, Edition 2
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Command Reference
WS
WS
The WS command causes the B1500 to enter a wait state until the B1500 receives an
external trigger from the Ext Trig In terminal. To set the trigger logic (initial setting:
negative), send the TGP command for the Ext Trig In terminal.
To end a wait state before the trigger, execute the AB or *RST command.
Syntax
WS [mode]
Parameters
mode :
Waiting mode. Integer expression. 1 or 2.
If this parameter is not specified, mode is set to 1.
mode
Remarks
Example
Statements
Description
1
Continues the operation if an external trigger was
already received. Otherwise, the B1500 immediately
goes into a wait state for an external trigger.
2
In any condition, the B1500 immediately goes into a
wait state for an external trigger.
The B1500 checks its trigger flag to confirm the present trigger status, received or
none. To clear the trigger flag:
•
Enter the *RST or device clear command (HP BASIC CLEAR statement).
•
Enter the TM3 command.
•
Enter the TM1, TM2, or TM4 command to change the mode from TM3.
•
Enter the OS command.
•
Trigger the B1500 to start measurement via the Ext Trig In terminal.
•
Trigger the B1500 to recover from wait state set by the WS command via the
Ext Trig In terminal.
OUTPUT @B1500;"WS 2"
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Agilent B1500 Programming Guide, Edition 2
Command Reference
WSI
WSI
The WSI command specifies the staircase sweep current source (synchronous sweep
source) that will be synchronized with the staircase sweep current source (primary
sweep source) set by the WI command, or the pulsed sweep current source (primary
sweep source) set by the PWI command.
Execution
Conditions
Available for the staircase sweep (MM 2), pulsed sweep (MM 4), or staircase sweep
with pulsed bias (MM5) measurement.
This command must be entered after the WI or PWI command that clears the WSI
command setting. The WV and PWV command also clears the WSI setting.
Syntax
WSI chnum,range,start,stop[,Vcomp[,Pcomp]]
Parameters
chnum :
Synchronous sweep source channel number. The value must be slot
number where the SMU has been installed. Integer expression. 1 to 10.
See Table 4-1 on page 4-10.
range :
Ranging type for synchronous sweep current output. Integer
expression. See Table 4-5 on page 4-13.
For the linear sweep, the B1500 uses the minimum range that covers
both start and stop values to force the staircase sweep current.
For the log sweep, the B1500 uses the minimum range that covers the
output value, and changes the output range dynamically.
Sweep mode, linear or log, is set by the WI or PWI command.
For the limited auto ranging, the instrument never uses the range less
than the specified range.
start, stop : Start or stop current (in A). Numeric expression. See Table 4-7 on page
4-15. start and stop must have the same polarity for log sweep. Sweep
mode, linear or log, and the number of sweep steps are set by the WI or
PWI command.
0 to ±0.1 for MPSMU/HRSMU, or 0 to ±1 for HPSMU
Agilent B1500 Programming Guide, Edition 2
4-163
Command Reference
WSI
Vcomp :
Voltage compliance (in V). Numeric expression. See Table 4-7 on page
4-15. If you do not set Vcomp, the previous value is used. If Vcomp
value is greater than ±42 V, the interlock circuit must be shorted.
Compliance polarity is automatically set to the same polarity as the
output value, regardless of the specified Vcomp. If the output value is 0,
the compliance polarity is positive.
If you set Pcomp, the maximum Vcomp value for the module is
allowed, regardless of the output range setting.
For the log sweep and without Pcomp, set the value available for the
minimum range that covers start and stop values.
Pcomp :
Power compliance (in W). Numeric expression. Resolution: 0.001 W. If
the Pcomp value is not entered, the power compliance is not set.
0.001 to 2 for MPSMU/HRSMU, or 0.001 to 20 for HPSMU
Example
Statements
OUTPUT @B1500;"WSI 1,16,0,4E-5"
OUTPUT @B1500;"WSI 2,0,1E-3,1E-2,5,5E-2"
4-164
Agilent B1500 Programming Guide, Edition 2
Command Reference
WSV
WSV
The WSV command specifies the staircase sweep voltage source (synchronous
sweep source) that will be synchronized with the staircase sweep voltage source
(primary sweep source) set by the WV command, or the pulsed sweep voltage
source (primary sweep source) set by the PWV command.
Execution
Conditions
Available for the staircase sweep (MM 2), pulsed sweep (MM 4), or staircase sweep
with pulsed bias (MM5) measurement.
This command must be entered after the WV or PWV command that clears the
WSV command setting. The WI and PWI command also clears the WSV setting.
Syntax
WSV chnum,range,start,stop[,Icomp[,Pcomp]]
Parameters
chnum :
Synchronous sweep source channel number. The value must be slot
number where the SMU has been installed. Integer expression. 1 to 10.
See Table 4-1 on page 4-10.
range :
Ranging type for synchronous sweep voltage output. Integer
expression. See Table 4-4 on page 4-13.
The B1500 usually uses the minimum range that covers both start and
stop values to force the staircase sweep voltage. However, if you set
Pcomp and if the following formulas are true, the B1500 changes the
output range dynamically (20 V range or above). Range changing may
cause 0 V output in a moment. For the limited auto ranging, the
instrument never uses the range less than the specified range.
•
Icomp > maximum current for the output range
•
Pcomp/output voltage > maximum current for the output range
start, stop : Start or stop voltage (in V). Numeric expression. See Table 4-6 on page
4-14. start and stop must have the same polarity for log sweep. Sweep
mode, linear or log, and the number of sweep steps are set by the WV
or PWV command. If the output voltage is greater than ±42 V, the
interlock circuit must be shorted.
0 to ±100 for MPSMU/HRSMU, or 0 to ±200 for HPSMU
Agilent B1500 Programming Guide, Edition 2
4-165
Command Reference
WSV
Icomp :
Current compliance (in A). Numeric expression. See Table 4-6 on page
4-14. If you do not set Icomp, the previous value is used.
Compliance polarity is automatically set to the same polarity as the
output value, regardless of the specified Icomp. If the output value is 0,
the compliance polarity is positive.
If you set Pcomp, the maximum Icomp value for the module is allowed,
regardless of the output range setting.
Pcomp :
Power compliance (in W). Numeric expression. Resolution: 0.001 W. If
the Pcomp value is not entered, the power compliance is not set.
0.001 to 2 for MPSMU/HRSMU, or 0.001 to 20 for HPSMU
Example
Statements
OUTPUT @B1500;"WSV 1,0,1,100,0.01,1"
OUTPUT @B1500;"WSV 2,12,0,10"
4-166
Agilent B1500 Programming Guide, Edition 2
Command Reference
WSX
WSX
The WSX command causes the B1500 to enter a wait state until the B1500 receives
an external trigger from a trigger input terminal specified by the port parameter. To
set the trigger logic (initial setting: negative), send the TGP command for the
specified terminal. To end a wait state before the trigger, execute the AB or *RST
command.
Syntax
WSX port[,mode]
Parameters
port :
External trigger input port number. Integer expression. -1, or 1 to 16.
-1: Ext Trig In terminal.
1 to 16: Port 1 to 16 of the digital I/O terminal.
To use a digital I/O port, send the TGP command. The port value must
be same as the port value set to the TGP command.
mode :
Remarks
Example
Statements
Waiting mode. Integer expression. 1 or 2.
If this parameter is not specified, mode is set to 1.
mode
Description
1
Continues the operation if an external trigger was already
received. Otherwise, the B1500 immediately goes into a
wait state for an external trigger.
2
In any condition, the B1500 immediately goes into a wait
state for an external trigger.
The B1500 checks its trigger flag to confirm the present trigger status, received or
none. To clear the trigger flag:
•
Enter the *RST or device clear command (HP BASIC CLEAR statement).
•
Enter the TM3 command.
•
Enter the TM1, TM2, or TM4 command to change the mode from TM3.
•
Enter the OS command.
•
Trigger the B1500 to start measurement via the trigger input terminal.
•
Trigger the B1500 to recover from wait state set by the WS command via the
trigger input terminal.
OUTPUT @B1500;"WSX 2"
Agilent B1500 Programming Guide, Edition 2
4-167
Command Reference
WT
WT
The WT command sets the hold time, delay time, and step delay time for the
staircase sweep or multi channel sweep measurement. This command is also used to
set the step source trigger delay time effective for the step output setup completion
trigger and the step measurement trigger delay time effective for the start step
measurement trigger. For the trigger function, refer to “Trigger Function” on page
2-36.
If you do not enter this command, all parameters are set to 0.
This command setting is ignored by the following measurement mode.
•
Pulsed spot measurements
•
Pulsed sweep measurements
•
Staircase sweep with pulsed bias measurements
Syntax
WT hold,delay[,Sdelay[,Tdelay[,Mdelay]]]
Parameters
hold :
Hold time (in seconds) that is the wait time after starting the sweep
measurement and before starting the delay time for the first step.
0 to 655.35, with 0.01 sec resolution. Numeric expression.
delay :
Delay time (in seconds) that is the wait time after starting to force a step
output and before starting a step measurement.
0 to 65.535, with 0.0001 sec resolution. Numeric expression.
Sdelay :
Step delay time (in seconds) that is the wait time after starting a step
measurement and before starting to force the next step output value.
0 to 1, with 0.0001 sec resolution. Numeric expression.
If this parameter is not set, Sdelay will be 0.
If Sdelay is shorter than the measurement time, the B1500 waits until
the measurement completes, then forces the next step output.
Tdelay :
Step source trigger delay time (in seconds) that is the wait time after
completing a step output setup and before sending a step output setup
completion trigger.
0 to delay, with 0.0001 sec resolution. Numeric expression.
If this parameter is not set, Tdelay will be 0.
4-168
Agilent B1500 Programming Guide, Edition 2
Command Reference
WT
Mdelay :
Step measurement trigger delay time (in seconds) that is the wait time
after receiving a start step measurement trigger and before starting a
step measurement.
0 to 65.535, with 0.0001 sec resolution. Numeric expression.
If this parameter is not set, Mdelay will be 0.
Example
Statements
OUTPUT @B1500;"WT 5,0.1,0.1,0.1,0.1"
OUTPUT @B1500;"WT 5,0.2"
Agilent B1500 Programming Guide, Edition 2
4-169
Command Reference
WTDCV
WTDCV
This command sets the hold time, delay time, and step delay time for the CV sweep
measurement (MM18). This command is also used to set the step source trigger
delay time effective for the step output setup completion trigger and the step
measurement trigger delay time effective for the start step measurement trigger. For
the trigger function, refer to “Trigger Function” on page 2-36. If you do not enter
this command, all parameters are set to 0.
Syntax
WTDCV hold,delay[,Sdelay[,Tdelay[,Mdelay]]]
Parameters
hold :
Hold time (in seconds) that is the wait time after starting measurement
and before starting delay time for the first step.
0 to 655.35, with 10 ms resolution. Numeric expression.
delay :
Delay time (in seconds) that is the wait time after starting to force a step
output and before starting a step measurement.
0 to 65.535, with 0.1 ms resolution. Numeric expression.
Sdelay :
Step delay time (in seconds) that is the wait time after starting a step
measurement and before starting to force the next step output.
0 to 1, with 0.1 ms resolution. Numeric expression.
If this parameter is not set, Sdelay will be 0.
If Sdelay is shorter than the measurement time, the B1500 waits until
the measurement completes, then forces the next step output.
Tdelay :
Step source trigger delay time (in seconds) that is the wait time after
completing a step output setup and before sending a step output setup
completion trigger.
0 to delay, with 0.1 ms resolution. Numeric expression.
If this parameter is not set, Tdelay will be 0.
Mdelay :
Step measurement trigger delay time (in seconds) that is the wait time
after receiving a start step measurement trigger and before starting a
step measurement.
0 to 65.535, with 0.1 ms resolution. Numeric expression.
If this parameter is not set, Mdelay will be 0.
Example
Statements
OUTPUT @B1500;"WTDCV 5,0.1,0.1,0.1,0.1"
OUTPUT @B1500;"WTDCV 5,0.2"
4-170
Agilent B1500 Programming Guide, Edition 2
Command Reference
WV
WV
The WV command specifies the staircase sweep voltage source and its parameters.
This command also clears the WI, WSI, WSV, and WNX command settings.
This command setting is cleared by the WI command. If the output voltage is greater
than ±42 V, the interlock circuit must be shorted.
Syntax
•
For Staircase Sweep Measurement:
WV chnum,mode,range,start,stop,step[,Icomp[,Pcomp]]
•
For Staircase Sweep with Pulsed Bias Measurement:
WV chnum,mode,range,start,stop,step[,Icomp]
Parameters
chnum :
Sweep source channel number. The value must be slot number where
the SMU has been installed. Integer expression. 1 to 10. See Table 4-1
on page 4-10.
mode :
Sweep mode. Integer expression. Only linear sweep (mode=1 or 3) is
available for the staircase sweep with pulsed bias.
1: Linear sweep (single stair, start to stop.)
2: Log sweep (single stair, start to stop.)
3: Linear sweep (double stair, start to stop to start.)
4: Log sweep (double stair, start to stop to start.)
range :
Ranging type for staircase sweep voltage output. Integer expression.
See Table 4-4 on page 4-13.
The B1500 usually uses the minimum range that covers both start and
stop values to force the staircase sweep voltage. However, if you set
Pcomp and if the following formulas are true, the B1500 uses the
minimum range that covers the output value, and changes the output
range dynamically (20 V range or above). Range changing may cause
0 V output in a moment. For the limited auto ranging, the instrument
never uses the range less than the specified range.
•
Icomp > maximum current for the output range
•
Pcomp/output voltage > maximum current for the output range
start, stop : Start or stop voltage (in V). Numeric expression. See Table 4-6 on page
4-14. start and stop must have the same polarity for log sweep.
0 to ±100 for MPSMU/HRSMU, or 0 to ±200 for HPSMU
Agilent B1500 Programming Guide, Edition 2
4-171
Command Reference
WV
step :
Number of steps for staircase sweep. Numeric expression. 1 to 1001.
Icomp :
Current compliance (in A). Numeric expression. See Table 4-6 on page
4-14. If you do not set Icomp, the previous value is used.
Compliance polarity is automatically set to the same polarity as the
output value, regardless of the specified Icomp. If the output value is 0,
the compliance polarity is positive.
If you set Pcomp, the maximum Icomp value for the module is allowed,
regardless of the output range setting.
Pcomp :
Power compliance (in W). Numeric expression. Resolution: 0.001 W. If
the Pcomp value is not entered, the power compliance is not set.
0.001 to 2 for MPSMU/HRSMU, or 0.001 to 20 for HPSMU
Example
Statements
OUTPUT @B1500;"WV 1,2,12,1E-6,10,100,0.1,1"
OUTPUT @B1500;"WV 2,1,0,0,20,101"
4-172
Agilent B1500 Programming Guide, Edition 2
Command Reference
WZ?
WZ?
This query command immediately confirms all channel output, and returns the
status 0 if it is within ±2 V or 1 if it is more than ±2 V.
Syntax
WZ? [timeout]
Parameters
timeout :
Timeout. Numeric expression.
0 to 655.35 sec, with 0.01 sec resolution.
With timeout parameter, this command waits until all channel output
becomes within ±2 V or until the specified timeout elapses, and returns
0 or 1.
The WZ? 0 command has the same effect as the WZ? command.
Query Response
state<CR/LF^EOI>
0: All channel output is within ±2 V.
1: Any output channel applies more than ±2 V.
Example
Statement
OUTPUT @B1500;"WZ? 5.0"
ENTER @B1500;A
Agilent B1500 Programming Guide, Edition 2
4-173
Command Reference
XE
XE
The XE command triggers the B1500 to start measurement, or causes the B1500 to
recover from the wait state set by the PA command. This command is not available
for the high-speed spot measurement.
NOTE
After measurement, the measurement data will be entered to the output data buffer.
For data output format, refer to “Data Output Format” on page 1-23.
Execution
Conditions
The following execution conditions are for you who use the XE command to start
measurement. There is no execution condition when you use the XE command to
recover from the wait state.
•
If any channel is set to the high voltage state (forcing more than ±42 V, or
voltage compliance set to more than ±42 V) after the trigger (XE), the interlock
terminal must be shorted.
•
The following commands must be entered before the XE command.
Measurement Mode
Commands
Spot
CN, MM, DV or DI
Staircase sweep
CN, MM, WV or WI
Pulsed spot
CN, MM, PV or PI
Pulsed sweep
CN, MM, PWV or PWI
Staircase sweep with pulsed bias
CN, MM, WV or WI, PV or PI
Quasi-pulsed spot
CN, MM, BDV
Sampling
CN, MM, MCC, ML, MT, MSC, MI, MV
Liner search
CN, MM, LSV or LSI, LGV or LGI
Binary search
CN, MM, BSV or BSI, BGV or BGI
Multi channel sweep
CN, MM, WI or WV, WNX
Spot C
CN, MM, IMP, FC, ACV, DCV
CV sweep
CN, MM, IMP, FC, ACV, WDCV
Syntax
XE
Example
Statement
OUTPUT @B1500;"XE"
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Agilent B1500 Programming Guide, Edition 2
5
Error Messages
Error Messages
This chapter explains the error code of the Agilent B1500.
•
“Error Codes”
If error occurs, find solutions in this section and solve problems. However, if
problems still remain, perform self-test.
If the Agilent B1500 fails self-test, contact your nearest Agilent Technologies
Service Center.
5-2
Agilent B1500 Programming Guide, Edition 2
Error Messages
Error Codes
Error Codes
If errors occur, error codes are stored in the error buffer. To read the error code,
execute the “ERR?” command. To read the error message, execute the “EMG?”
command.
The output of the error codes is in the order that they occurred, and the first four
error codes are stored in the buffer. If no errors occurred, ”0, 0, 0, 0” is returned.
Operation Error
100
Undefined GPIB command.
Send the correct command.
102
Incorrect numeric data syntax.
Correct the data syntax.
103
Incorrect terminator position.
Correct the command syntax. The number of parameters will be
incorrect.
104
Incorrect serial data syntax.
120
Incorrect parameter value.
Correct the parameter value.
121
Channel number must be 1 to 10.
Correct the channel number. The channel number must be 1 to 10 for
the Agilent B1500.
122
Number of channels must be corrected.
Check the MM, FL, CN, CL, IN, DZ, or RZ command, and correct the
number of channels.
123
Compliance must be set correctly.
Incorrect compliance value was set. Set the compliance value correctly.
124
Incorrect range value for this channel.
Check the range value available for the channel, and correct the range
value.
Agilent B1500 Programming Guide, Edition 2
5-3
Error Messages
Error Codes
125
Search goal value must be less than compliance value.
126
Pulse base and peak must be same polarity.
The polarity of the base and peak values must be the same in the PI
command. Also the polarity of the base, start, and stop values must be
the same in the PWI command.
130
Start and stop must be same polarity.
For a log sweep, the polarity of the start and stop values must be the
same in the WV, WI, WSV, WSI, or WNX command. Also, 0 is not
allowed for the start and stop values.
150
Command input buffer is full.
The Agilent B1500 can receive 256 characters maximum including the
terminator at one time.
151
This command is not allowed to this channel.
152
Cannot use failed module.
The channel number specifying the module failed the self-test or
calibration. Specify another module that passed the self-test or
calibration. For the service purpose, execute the RCV command to
enable the module.
153
No module for the specified channel.
Module is not installed in the slot specified by the channel number.
160
Incorrect ST execution.
The internal memory programming can be started by the ST command
and completed by the END command. Do not enter the ST command
between the ST command and the END command.
161
Incorrect END execution.
The internal memory programming can be started by the ST command
and completed by the END command. Do not send the END command
before starting the programming.
162
Incorrect command for program memory.
Specified command cannot be stored in the program memory. For the
incorrect commands, refer to Table 2-1 on page 2-32.
5-4
Agilent B1500 Programming Guide, Edition 2
Error Messages
Error Codes
170
Incorrect usage of internal variable.
The internal variable must be %In for integer data, or %Rn for real
data. where n is an integer, 0 to 99. Use %In for the integer type
command parameters; and use %Rn for the real type command
parameters. For the internal variables, refer to “VAR” on page 4-150.
171
Internal variable is not allowed.
The internal variables %In and %Rn are not available for the ACH,
VAR, and VAR? commands. Do not use the internal variables for the
commands.
200
Channel output switch must be ON.
To enter the specified command, set the channel output switch to ON.
201
Compliance must be set.
To change the source output mode (voltage or current), set the
compliance value.
202
Interlock circuit must be closed.
To set the output voltage or the voltage compliance to more than ±42 V
(high voltage state), close the interlock circuit. If the interlock circuit is
opened in the high voltage state, outputs of all units will be set to 0 V.
203
Cannot enable channel.
The channel output switch cannot be set to ON in the high voltage state.
Set the output voltage or the voltage compliance to ±42 V or less to set
the switch to ON.
204
Cannot disable channel.
The channel output switch cannot be set to OFF in the high voltage
state. Set the output voltage or the voltage compliance to ±42 V or less
to set the switch to OFF. Or send the CL command with no parameter to
set switches of all channels to OFF immediately.
205
DZ must be sent before RZ.
The RZ command is effective for the channels set to 0 V output by the
DZ command.
Agilent B1500 Programming Guide, Edition 2
5-5
Error Messages
Error Codes
206
Do not specify the channel recovered by RZ.
Specify the channels that have not been recovered yet by the RZ
command after the DZ command. The RZ command cannot be
executed if the specified channels include a channel that has already
been recovered by the RZ command.
210
Ext trigger could not start measurement.
External trigger cannot start measurement because of busy condition.
211
TM1 must be sent to use GET.
Send the TM1 command to use the GPIB GET command (TRIGGER
statement in HP BASIC).
212
Compliance must be set correctly.
Compliance was not set or an incorrect compliance value was set in the
DV, DI, PV, PI, PWV, PWI, TDV, TDI, LSV, LSI, LSSV, LSSI, BSV,
BSI, BSSV, or BSSI command. Set the compliance value correctly.
213
Cannot perform self-test or calibration.
Self-test and calibration cannot be performed in the high voltage state.
Set the output voltage or the voltage compliance to ±42 V or less to
perform the self-test or calibration.
214
Send MM before measurement trigger.
Before sending the measurement trigger, the MM command must be
sent to set the measurement mode.
217
Self-test is not defined for this module.
220
Send WV or WI to set primary sweep source.
Before triggering the staircase sweep measurement, triggering the
staircase sweep with pulsed bias measurement, or sending the WSV,
WSI, or WNX command to set the synchronous sweep source, send the
WV or WI command to set the primary sweep source.
221
Send PWV or PWI to set pulse sweep source.
Before triggering the pulsed sweep measurement, or sending the WSV
or WSI command to set the synchronous sweep source, send the PWV
or PWI command to set the pulse sweep source.
5-6
Agilent B1500 Programming Guide, Edition 2
Error Messages
Error Codes
222
Send PV or PI to set pulse source.
Before triggering the staircase sweep with pulsed bias measurement,
send the PV or PI command to set the pulse source.
223
Compliance must be set correctly.
Compliance was not set or an incorrect compliance value was set in the
WV, WI, WSV, WSI, WNX, or BDV command. Set the compliance
value correctly.
224
Sweep and sync output modes must be the same.
The primary sweep channel and the synchronous sweep channel must
be different, and they must be set to the same output mode (voltage or
current).
225
Send WSV, WSI, or WNX to get sync sweep data.
If you enable data output of the synchronous sweep source, do not
forget to set the synchronous sweep source by the WSV, WSI, or WNX
command. For data output, refer to “FMT” on page 4-70.
226
Set linear sweep for MM4 or MM5.
Only the linear sweep is available for the PWV or PWI command for
the pulsed sweep measurement (MM4) or the WV or WI command for
the staircase sweep with pulsed bias measurement (MM5).
227
Sweep measurement was aborted.
Sweep measurement was aborted by the automatic abort function or the
power compliance.
228
Pulse period is not set for pulse measurements.
230
Pulse source must be set.
To perform the pulsed spot measurement (MM3), send the PV or PI
command to set the pulse source.
231
Compliance must be set correctly.
Compliance was not set or an incorrect compliance value was set in the
PV, PI, PWV, or PWI command. Set the correct compliance value
effective for the pulse output.
238
Too large pulse width (max. 2 s).
The maximum value of the pulse width is 2 s. And the available value
depends on the pulse period value. Refer to “PT” on page 4-108.
Agilent B1500 Programming Guide, Edition 2
5-7
Error Messages
Error Codes
239
Pulse width must be 0.5 ms or more.
Set the pulse width to 0.5 ms or more. Refer to “PT” on page 4-108.
253
Program memory is full.
Maximum of 2000 programs or 40000 commands can be stored in the
program memory. Refer to “ST” on page 4-128.
254
Invalid input for a memory program.
The GPIB GET command (TRIGGER statement in HP BASIC) and an
external trigger input are not allowed in a memory program (between
the ST and END commands).
255
Maximum nesting level is eight.
Nesting (one program calling another) of a memory program must be
eight levels or less.
260
Data output buffer is full.
Maximum 34034 measurement data items can be stored in the data
output buffer.
270
Search source channel must be set.
Before triggering the search measurement or sending the LSSV, LSSI,
BSSV, or BSSI command to set the synchronous search source, send
the LSV, LSI, BSV, or BSI command to set the primary search source.
271
Search monitor channel must be set.
Before triggering the search measurement, send the LGV, LGI, BGV, or
BGI command to set the search monitor channel.
273
Search and sync output modes must be the same.
The primary search source channel and the synchronous source channel
must be different, and they must be set to the same output mode
(voltage or current).
274
Search sync source is overflow.
Set the search sources so that the same output range is set to both
primary and synchronous search sources.
275
Search target must be compliance value or less.
The search target value must be less than or equal to the compliance
value of the search monitor channel. Correct the search target value or
the compliance value.
5-8
Agilent B1500 Programming Guide, Edition 2
Error Messages
Error Codes
276
Start and stop must be different.
Set different values for the search start and stop values.
277
Step must be output resolution or more.
Set the search step value to the output resolution or more.
278
Search and sync channels must be different.
Set the search source and the synchronous source to different channels.
279
Search monitor mode must be compliance side.
Send the LGI/BGI command to set the voltage source search monitor
channel, or send the LGV/BGV command to set the current source
search monitor channel.
280
Send WDCV to set CV sweep source.
Before triggering the CV sweep measurement, send the WDCV
command to set the DC voltage sweep source.
281
Send PDCV to set CV pulse source.
Before triggering the pulsed spot C measurement, send the PDCV
command to set the pulsed voltage source.
282
Send PWDCV to set CV pulse sweep source.
Before triggering the pulsed CV measurement, send the PWDCV
command to set the pulsed voltage sweep source.
283
Set linear sweep for MM20.
Only the linear sweep is available for the PWDCV command for the
pulsed CV measurement (MM20).
284
Improper setting of CMU frequency and pulse width.
Pulse width value is out of the range for the CMU output signal
frequency. Set both frequency value and pulse width value properly.
290
Send WFC to set Cf sweep source.
Before triggering the Cf sweep measurement, send the WFC command
to set the frequency sweep source (oscillator).
301
Line power failure.
Agilent B1500 Programming Guide, Edition 2
5-9
Error Messages
Error Codes
303
Excess voltage in MPSMU.
Voltage that exceeds maximum voltage at the present current range was
detected by a MPSMU. All output switches were set to OFF.
304
Ground unit abuse is detected.
305
Excess current in HPSMU.
Current that exceeds maximum current at the present voltage range was
detected by a HPSMU. All output switches were set to OFF.
307
Unsupported module.
This module is not supported by this firmware version. Until you
update the firmware, use the Agilent B1500 with this module removed.
310
Interlock open operation error. Initialized.
Initialization was automatically performed because the B1500 failed to
set its output to 0 V when the interlock circuit was opened in the high
voltage condition. Any module may be defective. Perform self-test.
311
ASU control cable was connected/disconnected.
The B1500 must be turned off when the Atto Sense and Switch Unit
(ASU) is connected/disconnected.
312
SCUU control cable was connected/disconnected.
The B1500 must be turned off when the SMU CMU Unify Unit
(SCUU) is connected/disconnected.
320
Excess current in CMU.
Current that exceeds maximum current at the present voltage range was
detected by the CMU. The output switch was set to OFF.
321
This command is not available for CMU.
CMU was specified for the SMU dedicated command. Specify SMU.
322
This command is not available for SMU.
SMU was specified for the CMU dedicated command. Specify CMU.
323
Use SSP instead of CN for SCUU modules.
It is not necessary to specify the modules connected to the SMU CMU
Unify Unit (SCUU) in the CN command. The output switches will be
controlled by the SSP command.
5-10
Agilent B1500 Programming Guide, Edition 2
Error Messages
Error Codes
330
Turn on again to detect source channel.
SCUU might be disconnected/connected on the power on condition.
Restart the B1500 to detect and enable the channel.
331
Turn on again to detect synchronous channel.
SCUU might be disconnected/connected on the power on condition.
Restart the B1500 to detect and enable the channel.
332
Turn on again to detect measurement channel.
SCUU might be disconnected/connected on the power on condition.
Restart the B1500 to detect and enable the channel.
333
Turn on again to detect search source.
SCUU might be disconnected/connected on the power on condition.
Restart the B1500 to detect and enable the channel.
334
Turn on again to detect search sync source.
SCUU might be disconnected/connected on the power on condition.
Restart the B1500 to detect and enable the channel.
335
Turn on again to detect search monitor channel.
SCUU might be disconnected/connected on the power on condition.
Restart the B1500 to detect and enable the channel.
603
Sweep and pulse channels must be different.
Set the sweep source and the pulse source to different channels for the
staircase sweep with pulsed bias measurement (MM5).
610
Quasi-pulse source channel must be set.
Before triggering the quasi-pulsed spot measurement, send the BDV
command to set the quasi-pulse source.
620
TGP specified incorrect I/O port.
Specify trigger input for the Ext Trig In port, or trigger output for the
Ext Trig Out port by the TGP command. Refer to “TGP” on page
4-136.
621
Specify trigger input port for PAX/WSX.
No trigger input port was specified for the PAX or WSX command.
Specify the trigger input port, or set the port as the trigger input port.
Refer to “TGP” on page 4-136 to set trigger port.
Agilent B1500 Programming Guide, Edition 2
5-11
Error Messages
Error Codes
622
Specify trigger output port for OSX.
No trigger output port was specified for the OSX command. Specify the
trigger output port, or set the port as the trigger output port. Refer to
“TGP” on page 4-136 to set trigger port.
630
Incorrect polarity of search step value.
For the linear search measurement. The step value must be positive if
start<stop, or negative if start>stop.
631
Number of search steps must be 1001 or less.
For the linear search measurement. The number of search steps
between start and stop must be 1001 or less. This means the |step| value
must be |stop-start|/1001 or more.
632
Search measurement was aborted.
Search measurement was aborted by the automatic abort function.
640
Search limits must be range/20000 or more.
For the binary search measurement. The limit value for the search
target must be range/20000 or more. where range means the
measurement range actually used for the measurement.
650
Data format must be ASCII to get time data.
The time stamp function is not available for the binary data output
format. To use the time stamp function, set the data output format to
ASCII.
655
Cannot connect/disconnect series resistor.
The series resistor status cannot be changed in the high voltage state.
Set the output voltage or the voltage compliance to ±42 V or less to
connect or disconnect the series resistor.
656
Series resistor must be OFF for 1 A range.
The series resistor cannot be set to ON for the measurement channels or
the output channels that use 1 A range.
657
Series resistor cannot be used with ASU.
The series resistor is not available for the channel connected to the Atto
Sense and Switch Unit (ASU).
660
Sampling measurement was aborted.
Sampling measurement was aborted by the automatic abort function.
5-12
Agilent B1500 Programming Guide, Edition 2
Error Messages
Error Codes
661
Negative hold time is only valid for I/V-t linear sampling with interval
< 2 ms.
662
Sampling interval for I/V-t log sampling must be 2 ms or longer.
663
Number of samples does not have to exceed 100001.
670
Specified channel does not have ASU.
Specify the module that can be used with the ASU.
671
SSP is not available for this channel.
SSP command is available only for the CMU. Specify the slot number
that the CMU has been installed.
680
CMU correction mode must be manual.
To perform the CMU correction by using the ADJ? command, set the
CMU correction mode to manual by using the ADJ command.
681
CMU correction mode must be off.
682
Invalid standard is specified as CMU correction.
683
Frequency index is not available for CMU correction.
684
AC Voltage is 0mV.
685
CMU correction is not complete.
Agilent B1500 Programming Guide, Edition 2
5-13
Error Messages
Error Codes
Self-test/Calibration Error
When the Agilent B1500 fails the self-test or self-calibration, the Agilent B1500
returns the following error code and error message.
In the error code, N indicates the slot number. If the module is installed in slot 1, and
it fails the function test, the error code will be 1760.
700
CPU failed NVRAM read/write test.
701
CPU failed FPGA read/write test.
702
CPU failed H-RESOLN ADC end signal test.
703
CPU failed H-RESOLN ADC start signal test.
704
CPU failed emergency status signal test.
705
CPU failed SRQ status signal test.
706
CPU failed high voltage status signal test.
707
CPU failed low voltage status signal test.
708
CPU failed DAC settling status signal test.
709
CPU failed measure ready status signal test.
710
CPU failed set ready status signal test.
711
CPU failed measure end status signal test.
712
CPU failed measure trigger signal test.
713
CPU failed pulse trigger signal test.
714
CPU failed abort trigger signal test.
715
CPU failed DAC set trigger signal test.
720
H-RESOLN ADC is not installed.
721
H-RESOLN ADC failed ROM/RAM test.
722
H-RESOLN ADC failed B-COM offset DAC test.
723
H-RESOLN ADC failed sampling ADC test.
724
H-RESOLN ADC failed integrating ADC test.
725
H-RESOLN ADC failed bus function test.
740
GNDU failed calibration.
935
CMU FPGA version mismatch.
5-14
Agilent B1500 Programming Guide, Edition 2
Error Messages
Error Codes
N760
SMU failed function test.
N761
SMU failed VF/VM function test.
N762
SMU failed IF/IM function test.
N763
SMU failed loop status test.
N764
SMU failed temperature sensor test.
N765
SMU failed CMR amplifier calibration.
N766
SMU failed CMR amplifier adjustment.
N767
SMU failed CMR 100 V range full output test.
N768
SMU failed VF/VM calibration.
N769
SMU failed VM offset calibration.
N770
SMU failed VM gain calibration.
N771
SMU failed VF offset calibration.
N772
SMU failed VF gain calibration.
N773
SMU failed VF gain calibration at 20 V range.
N774
SMU failed VF filter offset calibration.
N775
SMU failed H-SPEED ADC self-calibration.
N776
SMU failed H-SPEED ADC VM offset calibration.
N777
SMU failed H-SPEED ADC VM gain calibration.
N778
SMU failed IF/IM calibration.
N779
SMU failed calibration bus test.
N780
SMU failed IM offset calibration.
N781
SMU failed IM gain calibration.
N782
SMU failed IF offset calibration.
N783
SMU failed IF gain calibration.
N784
SMU failed IDAC filter offset calibration.
N785
SMU failed oscillation detector test.
N786
SMU failed I bias test.
N787
SMU failed common mode rejection test.
Agilent B1500 Programming Guide, Edition 2
5-15
Error Messages
Error Codes
N789
SMU failed high voltage detector test.
N790
SMU failed zero voltage detector test.
N791
SMU failed V hold test.
N792
SMU failed V switch test.
N800
CMU failed NULL DC offset adjustment.
N801
CMU failed NULL DC offset measurement.
N802
CMU failed VRD DC offset adjustment.
N803
CMU failed VRD heterodyne offset adjustment.
N804
CMU failed NULL gain/phase adjustment.
N805
CMU failed MODEM offset adjustment.
N806
CMU failed relative Z adjustment.
N807
CMU failed Vch full scale measurement.
N808
CMU failed nominal gain measurement
N809
CMU failed extent range X3 adjustment.
N810
CMU failed range resistor 50ohm adjustment.
N811
CMU failed range resistor 1kohm adjustment.
N812
CMU failed range resistor 10kohm adjustment.
N813
CMU failed range resistor 100kohm adjustment.
N814
CMU failed relative Z calculation.
N820
CMU failed correction.
N830
CMU failed configuration test.
N831
SCUU failed SCUU configuration test.
N832
SCUU failed SMU configuration test.
N833
SCUU failed CMU configuration test.
N834
CMU failed digital function test.
N835
CMU failed CPLD test.
N836
CMU failed FPGA test.
N837
CMU failed EEPROM test.
5-16
Agilent B1500 Programming Guide, Edition 2
Error Messages
Error Codes
N838
CMU failed PLL1/PLL2 test.
N839
CMU failed PLL DET low state test.
N840
CMU failed PLL DET high state test.
N841
CMU failed PLL1 lock test
N842
CMU failed PLL2 lock test.
N843
CMU failed PLL2 lock test.
N844
CMU failed Hcur DC and VRD ADC test.
N845
CMU failed DC offset test.
N846
CMU failed DC bias 0V test.
N847
CMU failed DC bias -25V test.
N848
CMU failed DC bias +25V test.
N849
CMU failed PLL0 test.
N850
CMU failed PLL0 lock test.
N851
CMU failed PLL0 lock test.
N852
CMU failed DDS test.
N853
CMU failed DDS1 test.
N854
CMU failed DDS2 test.
N855
CMU failed VRD normalizer test.
N856
CMU failed RA1 test.
N857
CMU failed RA2 test.
N858
CMU failed ExR test.
N859
CMU failed R_LPF2 f1 test.
N860
CMU failed MODEM DAC test.
N861
CMU failed N_II_DAC test.
N862
CMU failed N_QI_DAC test.
N863
CMU failed N_IQ_DAC test.
N864
CMU failed N_QQ_DAC test.
N865
CMU failed TRD normalizer test.
Agilent B1500 Programming Guide, Edition 2
5-17
Error Messages
Error Codes
N866
CMU failed NA1 test.
N867
CMU failed NA2 test.
N868
CMU failed NA3 test.
N869
CMU failed N_LPF1 f2 test.
N870
CMU failed N_LPF1 f3 test.
N871
CMU failed N_LPF1 f4 test.
N872
CMU failed N_LPF1 f5 test.
N873
SCUU failed EEPROM test.
N874
SCUU failed output relay test.
N875
SCUU failed control test.
N876
SCUU failed CG2 test.
N877
SCUU failed LRL test.
N880
CMU failed Hcur AC and VRD Fm test.
N881
CMU failed SA/RA 32mV test.
N882
CMU failed SA/RA 64mV test.
N883
CMU failed SA/RA 125mV test.
N884
CMU failed SA/RA 250mV test.
N885
CMU failed ExR test.
N886
CMU failed Bias_chg test.
N887
CMU failed R_LPF2/R_HPF_vs test.
N888
CMU failed VRD IF test.
N889
CMU failed IRM local 0deg test.
N890
CMU failed IRM local 90deg test.
N891
CMU failed S_LPF1 f1 120kHz test.
N892
CMU failed S_LPF1 f2 500kHz test.
N893
CMU failed S_LPF1 f3 2MHz test.
N894
CMU failed S_LPF1 f4 5MHz test.
N895
CMU failed TRD MODEM test.
5-18
Agilent B1500 Programming Guide, Edition 2
Error Messages
Error Codes
N896
CMU failed VG local 90deg test.
N897
CMU failed VG local 0deg test.
N898
CMU failed NA4 test.
N899
CMU failed NA5 X1/4 test.
N900
CMU failed NA5 X1/8 test.
N901
CMU failed N_LPF2 f2 500kHz test.
N902
CMU failed N_LPF2 f3 5MHz test.
N903
CMU failed MODEM PSD test.
N904
CMU failed PSD 0deg test.
N905
CMU failed PSD 90deg test.
N906
CMU failed Rr/Rf 100ohm test.
N907
CMU failed Rr/Rf 1kohm test.
N908
CMU failed Rr/Rf 10kohm test.
N909
CMU failed Rr/Rf 100kohm test.
N910
CMU failed TRD IVAmp test.
N911
CMU failed N_HPF1/N_LPF1 10kHz test.
N912
CMU failed N_HPF1/N_LPF1 200kHz test.
N913
CMU failed N_HPF1/N_LPF1 1MHz test.
N914
CMU failed N_HPF1/N_LPF1 2MHz test.
N915
CMU failed N_HPF1/N_LPF1 5MHz test.
N916
CMU failed NA1 test.
N917
CMU failed NA2 test.
N918
CMU failed NA3 test.
N919
CMU failed IV saturation detector test.
N920
CMU failed normal status test.
N921
CMU failed normal status test.
N922
CMU failed IV saturation status test.
N923
CMU failed IV saturation status test.
Agilent B1500 Programming Guide, Edition 2
5-19
Error Messages
Error Codes
N924
CMU failed unbalance detector test.
N925
CMU failed normal status test.
N926
CMU failed normal status test.
N927
CMU failed unbalance status test.
N928
CMU failed unbalance status test.
N929
CMU failed over current detector test.
N930
CMU failed normal status test.
N931
CMU failed normal status test.
N932
CMU failed over current status test.
N933
CMU failed over current status test.
5-20
Agilent B1500 Programming Guide, Edition 2