Photodiode arrays with amplifiers S11865-64/-128/-256 S11866-64-02/-128-02 Photodiode arrays combined with signal processing IC The S11865/S11866 series are Si photodiode arrays combined with a signal processing IC chip. X-ray tolerance has been improved compared to the previous products (S8865/S8866 series). The signal processing IC chip is formed by CMOS process and incorporates a timing generator, shift register, charge amplifier array, clamp circuit and hold circuit, making the external circuit configuration simple. A long, narrow image sensor can also be configured by arranging multiple arrays in a row. For Xray detection applications, types with phosphor sheet affixed on the photosensitive area are also available. As the dedicated driver circuit, the C9118 series (sold separately) is provided (this circuit does not support the S11865-256). Features Applications Data rate: 1 MHz max. Long and narrow line sensors Element pitch: 5 types available S11865-64: 0.8 mm pitch × 64 ch S11865-128: 0.4 mm pitch × 128 ch S11865-256: 0.2 mm pitch × 256 ch S11866-64-02: 1.6 mm pitch × 64 ch S11866-128-02: 0.8 mm pitch × 128 ch Line sensors for X-ray detection 5 V power supply operation Simultaneous integration by using a charge amplifier array Sequential readout with a shift register Low dark current due to zero-bias photodiode operation Integrated clamp circuit allows low noise and wide dynamic range Integrated timing generator allows operation at two different pulse timings Types with phosphor sheet affixed on the photosensitive area are available for X-ray detection (S11865-64G/-128G/-256G, S11866-64G-02/-128G-02) Structure Parameter Symbol*1 Element pitch P Element width W Element height H Number of elements Effective photosensitive area length Board material - S11865-64 0.8 0.7 0.8 64 51.2 S11865-128 0.4 0.3 0.6 128 51.2 S11865-256 0.2 0.1 0.3 256 51.2 Glass epoxy S11866-64-02 S11866-128-02 1.6 0.8 1.5 0.7 1.6 0.8 64 128 102.4 102.4 Unit mm mm mm mm - *1: Refer to following figure. H Enlarged drawing of photosensitive area Photodiode W P KMPDC0072EA www.hamamatsu.com 1 Photodiode arrays with amplifiers S11865-64/-128/-256, S11866-64-02/-128-02 Absolute maximum ratings (Ta=25 °C, unless otherwise noted) Parameter Supply voltage Reference voltage Photodiode voltage Gain selection terminal voltage Master/slave selection voltage Clock pulse voltage Reset pulse voltage External start pulse voltage Operating temperature*2 Storage temperature*2 Symbol Vdd Vref Vpd Vgain Vms V(CLK) V(RESET) V(EXTSP) Topr Tstg Value -0.3 to +6 -0.3 to +6 -0.3 to +6 -0.3 to +6 -0.3 to +6 -0.3 to +6 -0.3 to +6 -0.3 to +6 -5 to +60 -10 to +70 Unit V V V V V V V V °C °C *2: No condensation Note: Exceeding the absolute maximum ratings even momentarily may cause a drop in product quality. Always be sure to use the product within the absolute maximum ratings. Recommended terminal voltage (Ta=25 °C) Parameter Supply voltage Reference voltage Photodiode voltage High gain Low gain High level*3 Master/slave selection voltage Low level*4 High level Clock pulse voltage Low level High level Reset pulse voltage Low level High level External start pulse voltage Low level Gain selection terminal voltage Symbol Vdd Vref Vpd Vgain Vms V(CLK) V(RESET) V(EXTSP) Min. 4.75 4 Vdd - 0.25 0 Vdd - 0.25 0 3.3 0 3.3 0 Vdd - 0.25 0 Typ. 5 4.5 Vref Vdd Vdd Vdd Vdd Vdd - Max. 5.25 4.6 Vdd + 0.25 0.4 Vdd + 0.25 0.4 Vdd + 0.25 0.4 Vdd + 0.25 0.4 Vdd + 0.25 0.4 Unit V V V V V V V V V V V V V Max. 4000 14678 7568 3844 - Unit kHz *3: Parallel *4: Serial at 2nd or later stages Electrical characteristics [Ta=25 °C, Vdd=5 V, V(CLK)=V(RESET)=5 V] Parameter Clock pulse frequency*5 S11865-64, S11866-64-02 Line rate*6 S11865-128, S11866-128-02 S11865-256 Output impedance S11865-64, S11866-64-02 S11865-128, S11866-128-02 Current consumption S11865-256 High gain Charge amp feedback capacitance Low gain Symbol f(CLK) LR Zo I Cf Min. 40 - Typ. 3 16 30 60 0.5 1 lines/s kΩ mA pF *5: Video data rate is 1/4 of clock pulse frequency f(CLK). *6: The values depend on the clock pulse frequency. 2 Photodiode arrays with amplifiers S11865-64/-128/-256, S11866-64-02/-128-02 Electrical and optical characteristics [Ta=25 °C, Vdd=5 V, V(CLK)=V(RESET)=5 V, Vgain=5 V (High gain), 0 V (Low gain)] S11865-64/-128/-256 Parameter Spectral response range Peak sensitivity wavelength High gain Dark output voltage*7 Low gain Saturation output voltage High gain Saturation exposure*8 Low gain High gain Photosensitivity Low gain Photoresponse nonuniformity*9 High gain Noise*10 Low gain Output offset voltage*11 Symbol λ λp Vd Vsat Esat S PRNU N Vo S11865-64 Typ. Max. 200 to 1000 720 0.01 0.2 0.005 0.1 3.0 3.5 0.8 1.0 1.6 2.0 3520 4400 1760 2200 ±10 1.3 2.0 0.7 1.1 Vref Min. S11865-128 Typ. Max. 200 to 1000 720 0.01 0.2 0.005 0.1 3.0 3.5 2.4 3.0 4.8 6.0 1200 1500 600 750 ±10 1.0 1.5 0.6 0.9 Vref Min. S11865-256 Typ. Max. 200 to 1000 720 0.01 0.2 0.005 0.1 3.0 3.5 15 19 30 37.5 200 250 100 125 ±10 0.8 1.2 0.5 0.75 Vref - Min. Unit nm nm mV V mlx · s V/lx · s % mV rms V S11866-64-02/-128-02 Parameter Symbol S11866-64-02 Typ. 200 to 1000 720 0.01 0.005 3 3.5 0.2 0.4 14400 18000 7200 9000 2.0 1.1 Vref Min. Max. S11866-128-02 Typ. 200 to 1000 720 0.01 0.005 3 3.5 0.8 1.6 3520 4400 1760 2200 1.3 0.7 Vref Min. Max. Unit Spectral response range λ nm Peak sensitivity wavelength λp nm High gain 0.2 0.2 Dark output voltage*7 Vd mV Low gain 0.1 0.1 Saturation output voltage Vsat V High gain 0.25 1.0 Esat mlx · s Saturation exposure*8 Low gain 0.5 2.0 High gain Photosensitivity S V/lx · s Low gain 9 PRNU ±10 ±10 % Photoresponse nonuniformity* High gain 3.0 2.0 Noise*10 N mV rms Low gain 1.7 1.1 Vo V Output offset voltage*11 *7: Integration time Ts=1 ms *8: Measured with a 2856 K tungsten lamp. *9: Photoresponse nonuniformity (PRNU) is the output nonuniformity that occurs when the photosensitive area is uniformly illuminated by light which is approx. 50% of the saturation level. PRNU is defined as follows: PRNU = ∆X/X × 100 [%] X: average output of all elements, ∆X: difference between X and the maximum or minimum output, whichever is larger. *10: Measured with a video data rate of 50 kHz and Ts=1 ms in dark state. *11: Video output is negative-going output with respect to the output offset voltage. 3 Photodiode arrays with amplifiers S11865-64/-128/-256, S11866-64-02/-128-02 Output waveform of one element Dark state Saturation output voltage Vsat=3.5 V typ. 1 V/div. Output offset voltage Vref=4.5 V typ. 1 V typ. Saturation state GND Trigger 10 V/div. GND CLK GND 100 ns/div. Spectral response (typical example) Silicone resin coating (Ta=25 °C) 0.5 0.4 Photosensitivity (A/W) 0.4 Photosensitivity (A/W) (Ta=25 °C) 0.5 0.3 0.2 0.1 0.3 0.2 0.1 0 200 300 400 500 600 700 800 900 1000 1100 1200 0 200 300 400 500 600 700 800 900 1000 1100 1200 Wavelength (nm) Wavelength (nm) KMPDB0220EB KMPDB0421EA When the fluorescent screen is attached, the spectral response becomes smooth due to the effects of the adhesive resin. 4 Photodiode arrays with amplifiers S11865-64/-128/-256, S11866-64-02/-128-02 Output offset voltage vs. ambient temperature (measurement example) Dark output voltage vs. ambient temperature (typical example) 4.505 (Ts=1 ms) 1 4.504 Dark output voltage (mV) Output offset voltage (V) 4.503 4.502 4.501 4.500 4.499 4.498 0.1 0.01 4.497 4.496 4.495 0.001 0 10 20 30 40 50 60 Ambient temperature (°C) 0 10 20 30 40 50 60 Ambient temperature (°C) KMPDB0288EA KMPDB0289EB 5 Photodiode arrays with amplifiers S11865-64/-128/-256, S11866-64-02/-128-02 Block diagram S11865-64/-128, S11866-64-02/-128-02 RESET 1 CLK 2 EXTSP Vms Vdd GND 4 5 6 7 Timing generator 3 Trig Shift register 8 EOS 9 Video Vref 10 Hold circuit Vgain 11 Charge amp array Vpd 12 1 2 3 4 5 N-1 N Photodiode array KMPDC0153EA S11865-256 RESET 2, 15 EXTSP Vms Vdd GND 5, 18 6, 19 7, 20 8, 21 4, 17 Trig Timing generator CLK 3, 16 Shift register Charge amp array Vgain 12, 25 1, 13 14, 26 10, 23 Video Hold circuit Vref 11, 24 Vpd 9, 22 EOS 1 2 3 4 5 255 256 Photodiode array KMPDC0506EA 6 Photodiode arrays with amplifiers S11865-64/-128/-256, S11866-64-02/-128-02 Timing chart 1 2 3 16 17 18 19 20 21 22 23 24 25 26 27 28 29 30 1 2 3 CLK tpw(RESET1) RESET tpw(RESET2) 8 clocks 8 clocks Integration time Video output period 1 Video 2 3 n-1 n Trig EOS tf(CLK) tr(CLK) t2 tpw(CLK) t1 tpw(RESET1) tpw(RESET2) KMPD tf(RESET) tr(RESET) KMPDC0289EC Parameter Clock pulse width Clock pulse rise/fall times Reset pulse width 1 Reset pulse width 2 Reset pulse rise/fall times Clock pulse-reset pulse timing 1 Clock pulse-reset pulse timing 2 Symbol tpw(CLK) tr(CLK), tf(CLK) tpw(RESET1) tpw(RESET2) tr(RESET), tf(RESET) t1 t2 Min. 250 0 21 20 0 -20 -20 Typ. 20 20 0 0 Max. 25000 30 30 20 20 Unit ns ns CLK CLK ns ns ns 1. The internal timing circuit starts operation at the falling edge of CLK immediately after a RESET pulse goes Low. 2. When the falling edge of each CLK is counted as “1 clock”, the video signal of the 1st channel appears between “18.5 clocks and 20.5 clocks”. Subsequent video signals appear every 4 clocks. 3. The trigger pulse for the 1st channel rises at a timing of 19.5 clocks and then rises every 4 clocks. The rising edge of each trigger pulse is the recommended timing for data acquisition. 4. Signal charge integration time equals the High period of a RESET pulse. However, the charge integration does not start at the rise of a RESET pulse but starts at the 8th clock after the rise of the RESET pulse and ends at the 8th clock after the fall of the RESET pulse. After the RESET pulse next changes from High to Low, signals integrated within this period are sequentially read out as time-series signals by the shift register operation. The rise and fall of a RESET pulse must be synchronized with the rise of a CLK pulse, but the rise of a RESET pulse must be set outside the video output period. One cycle of RESET pulses cannot be set shorter than the time equal to “16.5 + 4 × N (number of elements)” clocks. 5. The video signal after an EOS signal output becomes a high impedance state, and the video output will be indefinite. 7 Photodiode arrays with amplifiers S11865-64/-128/-256, S11866-64-02/-128-02 Dimensional outlines (unit: mm, tolerance unless otherwise noted: ±0.2) S11865-64/-128 +0.2 51.2 -0 1.27 (× 12) ɸ0.76 1.6 5.0 12 Photosensitive area 12.0 2.54 5.6 3.0 8.0* 40.0 1.6 (× 4) ɸ2.2 Photodiode 1 ch Direction of scan * Distance from board bottom to photosensitive area center Board: G10 glass epoxy Connector: PRECI-DIP DURTAL 800-10-012-20-001101 KMPDA0164EF S11865-256 +0.2 51.2-0 (× 26) 0.64 × 0.64 34.02 1 25 2 26 CMOS1 CMOS2 (× 4) ϕ2.2 Photosensitive area 2.28 6.9 6.0 2.54 6.6 17.0 2.54 40.0 Photodiode 1 ch 3.0 40.0 ± 0.15 10.0 P2.54 × 12 = 30.48 8.0* 25.0 ± 0.1 1 5.0 Signal processing IC chip 2.95 P2.54 × 11 = 27.94 1.6 Signal processing IC chip Direction of scan * Length from board bottom to photosensitive area center Board: G10 glass epoxy Connector: JAE (Japan Aviation Electronics lndustry, Limited) PS-26PE-D4LT1-PN1 KMPDA0191ED 8 Photodiode arrays with amplifiers S11865-64/-128/-256, S11866-64-02/-128-02 S11866-64-02/-128-02 +0.3 -0 1.27 P2.54 × 11 = 27.94 1.6 (× 12) ɸ0.76 5.0 1 2.95 Signal processing IC chip 5.0 102.4 12 11.2 3.0 A* 12.0 25.0 ± 0.1 2.54 80.0 Photodiode 1 ch Photosensitive area 1.6 (4 ×) ɸ2.2 Direction of scan Type no. A S11866-64-02 8.2 S11866-128-02 8.0 * Distance from board bottom to photosensitive area center Board: G10 glass epoxy Connector: PRECI-DIP DURTAL 800-10-012-20-001101 KMPDA0291EA Pin connections S11865-64/-128, S11866-64-02/-128-02 Pin no. 1 2 3 4 5 6 7 8 9 10 11 12 Symbol RESET CLK Trig EXTSP Vms Vdd GND EOS Video Vref Vgain Vpd Name Reset pulse Clock pulse Trigger pulse External start pulse Master/slave selection supply voltage Supply voltage Ground End of scan Video output Reference voltage Gain selection terminal voltage Photodiode voltage Note Pulse input Pulse input Positive-going pulse output Pulse input Voltage input Voltage input Negative-going pulse output Negative-going output with respect to Vref Voltage input Voltage input Voltage input S11865-256 Pin no. 1 2 3 4 5 6 7 8 9 10 11 12 13 CMOS1 Vpd RESET CLK Trig EXTSP Vms Vdd GND EOS Video Vref Vgain Vpd Pin no. 14 15 16 17 18 19 20 21 22 23 24 25 26 CMOS2 Vpd RESET CLK Trig EXTSP Vms Vdd GND EOS Video Vref Vgain Vpd Name Photodiode voltage Reset pulse Clock pulse Trigger pulse External start pulse Master/slave selection voltage Supply voltage Ground End of scan Video output Reference voltage Gain selection voltage Photodiode voltage Note Voltage input Pulse input Pulse input Positive-going pulse output Pulse input Voltage input Voltage input Negative-going pulse output Negative-going output from Vref Voltage input Voltage input Voltage input 9 Photodiode arrays with amplifiers S11865-64/-128/-256, S11866-64-02/-128-02 Gain selection terminal voltage setting Vdd: High gain (Cf=0.5 pF) GND: Low gain (Cf=1 pF) Setting for each readout method S11865-64/-128, S11866-64-02/-128-02 Set to A in the table below in most cases. To serially read out signals from two or more sensors linearly connected, set the 1st sensor to A and the 2nd or later sensors to B. The CLK and RESET pulses should be shared with each sensor and the video output terminal of each sensor connected together. Connection example (parallel readout) 12 Vpd 11 Vgain 10 Vref 9 Video 8 EOS 7 GND 6 Vdd 5 Vms 4 EXTSP Trig 3 Trig CLK 2 CLK RESET 1 RESET Vgain +4.5 V EOS 10 µF 0.1 µF +5 V - Video + High impedance amplifier KMPDC0288EB Setting Readout method A All stages of parallel readout, serial readout at 1st sensor B Serial readout at 2nd and later sensors Vms Vdd GND EXTSP Vdd Preceding sensor EOS should be input 10 Photodiode arrays with amplifiers S11865-64/-128/-256, S11866-64-02/-128-02 S11865-256 Signals of channels 1 through 126 are output from CMOS1, while signals of channels 129 through 256 are output from CMOS2. The following two readout methods are available. (1) Serial readout method CMOS1 and CMOS2 are connected in serial and the signals of channels 1 through 256 are sequentially read out from one output line. Set CMOS1 as in “A” in the table below, and set CMOS2 as in “B”. CMOS1 and CMOS2 should be connected to the same CLK and RESET lines, and their video output terminals to one line. (2) Parallel readout method 128 channel signals are output in parallel respectively from the output lines of CMOS1 and CMOS2. Set both CMOS1 and CMOS2 as in “A” in the table below. Connection examples · Serial readout method · Parallel readout method CMOS1 CMOS1 1 Vpd 1 Vpd RESET 2 RESET (1) RESET 2 RESET (1) CLK 3 CLK (1) CLK 3 CLK (1) 4 Trig (1) Trig (1) 4 Trig (1) 5 EXTSP (1) 5 EXTSP (1) 6 Vms (1) 6 Vms (1) Vdd 7 Vdd Vdd 7 Vdd GND 8 GND GND 8 GND 9 EOS (1) EOS (1) 10 Video (1) Video (1) 10 Video (1) Vref 11 Vref Vref 11 Vref Vgain 12 Vgain Vgain 12 Vgain 13 Vpd 13 Vpd CMOS2 14 Vpd Trig OR Logic IC 74HC32 9 EOS (1) CMOS2 15 RESET (2) 14 Vpd 16 CLK (2) 15 RESET (2) 17 Trig (2) 18 EXTSP (2) 16 CLK (2) Trig (2) 17 Trig (2) 19 Vms (2) 18 EXTSP (2) 20 Vdd 19 Vms (2) 21 GND 20 Vdd EOS 22 EOS (2) Video 23 Video (2) EOS (2) 22 EOS (2) 24 Vref Video (2) 23 Video (2) 21 GND 25 Vgain 24 Vref 26 Vpd 25 Vgain KMPDC0222EA 26 Vpd KMPDC0223EB Setting A B Vms Vdd GND EXTSP Vdd Preceding sensor EOS should be input 11 Photodiode arrays with amplifiers S11865-64/-128/-256, S11866-64-02/-128-02 Readout circuit Check that pulse signals meet the required pulse conditions before supplying them to the input terminals. Video output should be amplified by an operational amplifier that is connected close to the sensor. Precantions (1) The signal processing IC chip is protected against static electricity. However, in order to prevent possible damage to the IC chip, take electrostatic countermeasures such as grounding yourself, as well as workbench and tools. Also protect the IC chip from surge voltages from peripheral equipment. (2) Gold wires for wire bonding are very thin, so they easily break if subjected to mechanical stress. The signal processing IC chip and wire bonding section are covered with resin for protection. However, never touch these portions. Excessive force, if applied, may break the wires or cause malfunction. Blow air to remove dust or debris if it gets on the protective resin. Never wash them with solvent. Signals may not be obtained if dust or debris is left or a scratch is made on the protective resin, or the signal processing IC chip or photodiode array chip is nicked. (3) The photodiode array characteristics may deteriorate when operated at high humidity, so put it in a hermetically sealed enclosure or case. When installing the photodiode array on a board, be careful not to cause the board to warp. Related information www.hamamatsu.com/sp/ssd/doc_en.html Precautions ∙ Notice ∙ Image sensors/Precautions 12 Photodiode arrays with amplifiers S11865-64/-128/-256, S11866-64-02/-128-02 Driver circuit C9118 series (sold separately) The CMOS driver circuit is designed for S11865/S11866 series photodiode arrays with amplifier. The C9118 series operates a photodiode by just inputting two signals (M-CLK and M-RESET) and a signal +5 V supply. The C9118 is intended for single use or parallel connections, while the C9118-01 is suitable for cascade connections. Features Single power supply (+5 V) operation Operation with two input signals (M-CLK and M-RESET) Compact: 46 × 56 × 5.2 t mm Block diagram +Vcc S11865/ S11866 series +Vcc SW1 CN1 CLK RESET Trig EOS EXTSP Vms Vg Vdd GND Video Vref Vp 1: TOP 2: END 1 +Vcc CN2 M-CLK M-RESET TRIGGER L-EOS IN-START GAIN +5 V GND VIDEO GND 2 Controller +Vcc +Vp VR1 SW2 CN3 +Vcc + +Vp + + + +Vcc REF M-CLK M-RESET TRIGGER L-EOS EXTSP2 GAIN +5 V GND VIDEO GND C9118-01 only KACCC0643EA 13 Photodiode arrays with amplifiers S11865-64/-128/-256, S11866-64-02/-128-02 Connection examples Single or parallel readout example (C9118) Cascade readout example (C9118-01) Simultaneous integration/output (effective for high-speed processing) Simultaneous integration/serial output (Simplifies external processing circuit) S11865/ S11866 series S11865/ S11866 series C9118 CN2 C9118-01 External controller CN2 External controller CN3 Scan direction S11865/ S11866 series S11865/ S11866 series C9118 CN2 Accessory cable C9118-01 External controller CN2 Scan direction CN3 S11865/ S11866 series C9118 CN2 S11865/ S11866 series External controller C9118-01 CN2 Scan direction Scan direction CN3 KACCC0644EA KACCC0645EA Information described in this material is current as of November, 2014. Product specifications are subject to change without prior notice due to improvements or other reasons. This document has been carefully prepared and the information contained is believed to be accurate. In rare cases, however, there may be inaccuracies such as text errors. Before using these products, always contact us for the delivery specification sheet to check the latest specifications. Type numbers of products listed in the delivery specification sheets or supplied as samples may have a suffix "(X)" which means preliminary specifications or a suffix "(Z)" which means developmental specifications. The product warranty is valid for one year after delivery and is limited to product repair or replacement for defects discovered and reported to us within that one year period. However, even if within the warranty period we accept absolutely no liability for any loss caused by natural disasters or improper product use. Copying or reprinting the contents described in this material in whole or in part is prohibited without our prior permission. www.hamamatsu.com HAMAMATSU PHOTONICS K.K., Solid State Division 1126-1 Ichino-cho, Higashi-ku, Hamamatsu City, 435-8558 Japan, Telephone: (81) 53-434-3311, Fax: (81) 53-434-5184 U.S.A.: Hamamatsu Corporation: 360 Foothill Road, Bridgewater, N.J. 08807, U.S.A., Telephone: (1) 908-231-0960, Fax: (1) 908-231-1218 Germany: Hamamatsu Photonics Deutschland GmbH: Arzbergerstr. 10, D-82211 Herrsching am Ammersee, Germany, Telephone: (49) 8152-375-0, Fax: (49) 8152-265-8 France: Hamamatsu Photonics France S.A.R.L.: 19, Rue du Saule Trapu, Parc du Moulin de Massy, 91882 Massy Cedex, France, Telephone: 33-(1) 69 53 71 00, Fax: 33-(1) 69 53 71 10 United Kingdom: Hamamatsu Photonics UK Limited: 2 Howard Court, 10 Tewin Road, Welwyn Garden City, Hertfordshire AL7 1BW, United Kingdom, Telephone: (44) 1707-294888, Fax: (44) 1707-325777 North Europe: Hamamatsu Photonics Norden AB: Torshamnsgatan 35 16440 Kista, Sweden, Telephone: (46) 8-509-031-00, Fax: (46) 8-509-031-01 Italy: Hamamatsu Photonics Italia S.r.l.: Strada della Moia, 1 int. 6, 20020 Arese (Milano), Italy, Telephone: (39) 02-93581733, Fax: (39) 02-93581741 China: Hamamatsu Photonics (China) Co., Ltd.: B1201, Jiaming Center, No.27 Dongsanhuan Beilu, Chaoyang District, Beijing 100020, China, Telephone: (86) 10-6586-6006, Fax: (86) 10-6586-2866 Cat. No. KMPD1134E04 Nov. 2014 DN 14