FMA Series

FMA Series
Mass flow sensors for gases
FEATURES
· Ranges 0...1000 sccm1 and 0...6 slpm2
· Actual mass flow sensing
· 1...5 V output
· Manifold mount/O-ring sealed
· Sensortechnics PRO services
· RoHS compliant
MEDIA COMPATIBILITY
To be used with dry gases only
The FMA series is NOT designed for liquid
flow and will be damaged by liquid flow through
the sensor
SPECIFICATIONS
ELECTRICAL CONNECTION
Maximum ratings
Supply voltage3
8 to 15 V
typ. 10 ±0.01 V
Power consumption
FMAL001DU
FMAL006DU
60 mW
75 mW
Output load
NPN (Sinking)
PNP (Sourcing)
10 mA
20 mA
P1
P2
1 2 3
Temperature limits
Operating
Storage
-25 to 85°C
-40 to 90°C
Mechanical shock
100 g (5 drops, 6 axes)
Pin 1: Vout
Pin 2: +V s
Pin 3: GND
Note:
1
sccm denotes standard cubic centimeters per minute, 1000 sccm = 1 slpm
2
slpm denotes standard liters per minute, which is a flow measurement referenced to standard conditions of 0°C, 1 bar, 50% RH.
3
Output voltage is ratiometric to supply voltage
E / 11724 / D
1/5
www.sensortechnics.com
FMA Series
Mass flow sensors for gases
FLOW SENSOR CHARACTERISTICS4
(VS = 10 ±0.01 V, TA = 25°C)
Part no.
Flow range
(full scale)
Max. flow
ch an g e5
Output voltage
@ trim point
FMAL001DU
1000 sccm1
5.0 l/sec
5 ±0.15 V @ 1000 sccm1
FMAL006DU
6 SLPM2
5.0 l/sec
5 ±0.15 V @ 6 SLPM2
PERFORMANCE CHARACTERISTICS
(VS = 10 ±0.01 V, TA = 25°C)
Characteristics
Zero offset
Min.
Typ.
Max.
Unit
0.95
1.0
1.05
V
Repeatability and hysteresis
FMAL001DU
±0.5
(combined)
FMAL006DU
±1.0
Ratiometricity error3
Temperature effects6
% reading
±0.3
Offset
-25 to 85 °C
Span
-25 to 25 °C
±0.025
V
FMAL001DU
-5.0
FMAL006DU
-6.0
FMAL001DU
6.0
FMAL006DU
6.0
% reading
25 to 85 °C
Response time
Common mode pressure
1.0
3.0
FMAL001DU
150
FMAL006DU
25
ms
p si
Notes:
1
sccm denotes standard cubic centimeters per minute, 1000 sccm = 1 slpm
2
SLPM denotes standard liters per minute, which is a flow measurement referenced to standard conditions of 0°C, 1 bar, 50% RH.
3
Output voltage is ratiometric to supply voltage
4
A 5 micron filter is recommended for all devices.
5
Maximum allowable rate of flow change to prevent damage.
6
Shift is relative to 25 °C.
E / 11724 / D
2/5
www.sensortechnics.com
FMA Series
Mass flow sensors for gases
FLOW SPECIFICATIONS
(VS = 10 ±0.01 V, TA = 25°C)
FMAL001DU
FMAL006DU
Press.
(mbar)
Flow
(sccm)7
Nom.
(VDC)
Tol.
(± VDC)
Press.
(mbar)
Flow
(slpm)7
2.23
1000
5.00
0.15
20.0
6
5.00
0.15
1.87
900
4.97
0.16
14.7
5
4.89
0.20
1.52
800
4.89
0.17
9.07
4
4.70
0.25
1.16
700
4.78
0.18
6.40
3
4.40
0.35
0.94
600
4.63
0.19
3.35
2
3.80
0.30
0.71
500
4.43
0.20
1.17
1
3.10
0.30
0.50
400
4.15
0.21
0.00
0
1.00
0.05
0.33
300
3.76
0.19
0.19
200
3.23
0.17
0.08
100
2.49
0.14
0.00
0
1.00
0.05
Nom.
(VDC)
Tol.
(± VDC)
Note:
7
Devices are calibrated in mass flow. Tolerance values apply to calibration type only.
OUTPUT VS. FLOW CURVES
FMAL001DU
FMAL006DU
E / 11724 / D
3/5
www.sensortechnics.com
FMA Series
Mass flow sensors for gases
OUTLINE DRAWING
30.5
(1.20)
27.7
(1.09)
14.0
(0.55)
32.2
(1.19)
3 2 1
7.62
(0.30)
2.5
(0.10)
0.64
(0.025)
34.0
(1.34)
17.3
(0.68)
3.0
(0.12)
4.8
(0.19)
10.9 8.4
(0.43) (0.33)
Ø 6.2
(Ø 0.24)
Ø 3.0
(Ø 0.12)
Ø 3.51
(Ø 0.138)
2.54
(0.10)
7.9
(0.31)
12.7
(0.50)
Ø 2.0
(Ø 0.08)
P2
P1
1 2 3
Pin 1: Vout
Pin 2: +V s
Pin 3: GND
third angle projection
mass: approx. 11 g
dimensions in mm (inches)
Note 1: Positiv flow direction is defined as proceeding from port 1 (P1) to port 2 (P2) and results
in positive output.
Note 2: Viton O-rings for manifold mounting are included in delivery.
E / 11724 / D
4/5
www.sensortechnics.com
FMA Series
Mass flow sensors for gases
GAS CORRECTION FACTORS8
Gas type
Correction factor (approx.)
0.59
0.79,10
0.95
1.0
1.0
1.0
1.0
1.0
1.1
1.1
1.35
1.35
1.35
Helium (He)
Hydrogen (H2)
Argon (Ar)
Nitrogen (N2)
Oxygen (O2)
Ai r
Nitric oxide (NO)
Carbon monoxide (CO)
Methane (CH4)
Ammonia (NH3)
Nitrous oxide (N2O)
Nitrogen dioxide (NO2)
Carbon dioxide (CO2)
Notes:
8
Gas correction factors are referenced to nitrogen (N2) as calibration gas type. Approximate gas correction factors are provided
as guidelines only. Individual gas types may perform differently at temperature extremes and varying flow rates.
9
When sensing Hydrogen (H2) or Helium (He) it may be necessary to power the mass flow sensor using increased supply voltage:
Hydrogen typ. 12 V, Helium typ. 15 V
10
Hydrogen (H2) flow measurement requires the use of a special sensor. These devices provide normal operation when sensing
hydrogen flow and are designated with an "H" at the end of the order number.
ORDERING INFORMATION - AVAILABLE LISTINGS
Note:
Preferred listings are highlighted in grey
Flow range
Dry gas
Hydrogen gas10
1 0 0 0 sccm
FMAL001DU
FMAL001HU
6 S LP M
FMAL006DU
---
Sensortechnics PRO services:
· Extended warranty period of 2 years
· Improved performance characteristics
· Custom product modifications and adaptations even for small quantities
· Advanced logistics models for supply inventory and short delivery times
· Technical support through application engineers on the phone or at your site
· Fastest possible technical response for design and QA engineers
... plus other services on request
Sensortechnics reserves the right to make changes to any products herein. Sensortechnics does not assume any liability arising out of the
application or use of any product or circuit described herein, neither does it convey any license under its patent rights nor the rights of others.
E / 11724 / D
5/5
www.sensortechnics.com