FBA Series Mass flow sensors for gases FEATURES · Ranges 0...30 to 0...±1000 sccm1 · 1...5 V or 1...3.75 V output · Actual mass flow sensing · Sensortechnics PRO services MEDIA COMPATIBILITY To be used with dry gases only The FBA series is NOT designed for liquid flow and will be damaged by liquid flow through the sensor SPECIFICATIONS ELECTRICAL CONNECTION Maximum ratings Supply voltage2 Power consumption FBAL001DB all others 8 to 15 V typ. 10 ±0.01 V P2 typ. 100 mW typ. 50 mW, max. 60 mW Temperature limits Operating Storage -25 to 85°C -40 to 90°C Mechanical shock 100 g (5 drops, 6 axes) Note: 1 sccm denotes standard cubic centimeters per minute 2 Output voltage is ratiometric to supply voltage E / 11722 / A P1 1 2 3 Pin 1: Vout Pin 2: +V s Pin 3: GND 1/5 www.sensortechnics.com FBA Series Mass flow sensors for gases FLOW SENSOR CHARACTERISTICS3 (VS = 10 ±0.01 V, TA = 25°C) Output voltage @ trim point Part no. Flow range (full scale) Max. flow change4 FBAM200DU 2 0 0 sccm 5.0 l/sec FBAM030DU 3 0 sccm 5.0 l/sec F B A L001D U 1 0 0 0 sccm 5.0 l/sec 5 V @ 1 0 0 0 sccm F B A L001D B ±1000 sccm 5.0 l/sec 5 ±0.15 V 5 V @ 2 0 0 sccm 3.4 V @ 25 sccm PERFORMANCE CHARACTERISTICS (VS = 10 ±0.01 V, TA = 25°C) Characteristics Zero offset Repeatability and hysteresis Min. Typ. Max. FBAM200DU 0.95 1.0 1.05 FBAM030DU 0.90 1.0 1.10 F B A L001D U 0.90 1.0 1.10 F B A L001D B 2.95 3.0 3.05 FBAM200DU ±0.5 all others ±1.0 (combined) Temperature effects Offset Span -25 to 85 °C5 -25 to 25 °C 25 to 85 °C Response time FBAM030DU ±100 F B A L001D B ±50 all others ±25 -4.0 FBAM030DU ±5.0 FBAL001... -5.0 FBAM200DU 4.0 FBAM030DU ±5.0 FBAL001... 5.0 Common mode pressure 1.0 V % reading mV FBAM200DU 6 Unit % reading 3.0 ms 25 p si Notes: 3 A 5 micron filter is recommended for all devices. 4 Maximum allowable rate of flow change to prevent damage. 5 Shift is relative to 25 °C. 6 Initial warm-up time for signal conditioned circuitry is 1 minute max. E / 11722 / A 2/5 www.sensortechnics.com FBA Series Mass flow sensors for gases FLOW SPECIFICATIONS (VS = 10 ±0.01 V, TA = 25°C) FBAM200DU Press. (mbar) Flow (sccm)7 0.49 200 0.42 175 0.35 150 0.28 125 FBAM030DU FBAL001DU Tol. (± VDC) Press. (mbar) Flow (sccm)7 Nom. (VDC) Tol. (± VDC) 5.00 0.15 2.50 30 3.75 4.80 0.16 1.70 20 2.90 4.50 0.17 0.84 10 1.95 4.17 0.18 0.42 5 1.50 Nom. (VDC) Press. (mbar) Flow (sccm)7 0.70 3.40 1000 5.00 0.45 2.90 900 4.90 0.20 2.40 800 4.80 0.10 2.00 700 4.66 Nom. (VDC) FBAL001DB Press. (mbar) Flow (sccm)7 0.15 3.49 1000 5.00 0.15 0.16 2.42 800 4.82 0.18 0.17 1.59 650 4.67 0.20 0.18 0.83 400 4.42 0.20 Tol. (± VDC) Nom. (VDC) Tol. (± VDC) 0.21 100 3.75 0.19 0.34 4 1.40 0.08 1.60 600 4.42 0.19 0.31 200 3.96 0.15 0.14 75 3.27 0.19 0.26 3 1.30 0.08 1.20 500 4.18 0.20 0.00 0 3.00 0.05 0.09 50 2.67 0.17 0.17 2 1.20 0.07 0.80 400 3.82 0.21 -0.31 -200 2.03 0.18 0.04 25 1.90 0.13 0.08 1 1.10 0.06 0.54 300 3.41 0.19 -1.59 -600 1.35 0.25 0.00 0 1.00 0.05 0.00 0 1.00 0.05 0.31 200 2.96 0.17 -2.42 -800 1.15 0.30 0.12 100 2.30 0.14 -3.44 -1000 1.00 0.35 0.00 0 1.00 0.10 Note: 7 Devices are calibrated in mass flow. Tolerance values apply to calibration type only. OUTPUT VS. FLOW CURVES FBAM200DU FBAM030DU FBAL001DU FBAL001DB E / 11722 / A 3/5 www.sensortechnics.com FBA Series Mass flow sensors for gases OUTLINE DRAWING 7.60 (0.30) 6.3 (0.25) 2.8 (0.11) 1.40 (0.055) 2.9 (0.114) 1.8 (0.07) 5.1 (0.20) 8.3 (0.325) 54.4 (2.14) P1 8.4 (0.33) P2 31.5 (1.24) 23.6 (0.93) 2.8 (0.11) 1.0 (0.04) 1 2 3 0.6 (0.025) 1.52 (0.06) 2.5 (0.10) 5.1 (0.20) 4.1 (0.16) 7.4 (0.29) 23.9 (0.94) 30.5 (1.20) 12.7 (0.50) 15.5 (0.61) third angle projection mass: approx. 10.8 g dimensions in mm (inches) Note: Positiv flow direction is defined as proceeding from port 1 (P1) to port 2 (P2) and results in positive output. E / 11722 / A 4/5 www.sensortechnics.com FBA Series Mass flow sensors for gases GAS CORRECTION FACTORS8 Gas type Correction factor (approx.) Helium (He) Hydrogen (H2) Argon (Ar) Nitrogen (N2) Oxygen (O2) Ai r Nitric oxide (NO) Carbon monoxide (CO) Methane (CH4) Ammonia (NH3) Nitrous oxide (N2O) Nitrogen dioxide (NO2) Carbon dioxide (CO2) 0.59 0.79,10 0.95 1.0 1.0 1.0 1.0 1.0 1.1 1.1 1.35 1.35 1.35 Notes: 8 Gas correction factors are referenced to nitrogen (N2) as calibration gas type. Approximate gas correction factors are provided as guidelines only. Individual gas types may perform differently at temperature extremes and varying flow rates. 9 When sensing Hydrogen (H2) or Helium (He) it may be necessary to power the mass flow sensor using increased supply voltage: Hydrogen typ. 12 V, Helium typ. 15 V 10 Hydrogen (H2) flow measurement requires the use of a special sensor. These devices provide normal operation when sensing hydrogen flow and are designated with an "H" at the end of the order number. ORDERING INFORMATION - AVAILABLE LISTINGS Note: Preferred listings are highlighted in grey Flow range Dry gas 0...30 sccm FBAM030DU 0...200 sccm FBAM200DU 0...1000 sccm F B A L001D U 0...±1000 sccm F B A L001D B Sensortechnics PRO services: · Extended guarantee period of 2 years · Improved performance characteristics · Custom product modifications and adaptations even for small quantities · Advanced logistics models for supply inventory and short delivery times · Technical support through application engineers on the phone or at your site · Fastest possible technical response for design and QA engineers ... plus other services on request Sensortechnics reserves the right to make changes to any products herein. Sensortechnics does not assume any liability arising out of the application or use of any product or circuit described herein, neither does it convey any license under its patent rights nor the rights of others. E / 11722 / A 5/5 www.sensortechnics.com