WBA Series Mass flow sensors for gases FEATURES · Flow ranges 0...200 sccm, 0...±200 sccm, 0...1 slpm, 0...±1 slpm · Thermal mass flow sensing · 1...5 V linear output · RoHS and REACH compliant · Quality Management System according to ISO 13485:2003 and ISO 9001:2008 MEDIA COMPATIBILITY6 To be used with dry gases only. The WBA series is NOT designed for liquid flow and will be damaged by liquid flow through the sensor. SPECIFICATIONS ELECTRICAL CONNECTION Maximum ratings Supply voltage 8 ... 15 V Temperature limits Compensated Operating Storage -25 ... 85 °C -25 ... 85 °C -40 ... 125 °C Humidity limits (non-condensing) 0 ... 95 %RH Vibration1 20 g 2 Mechanical shock 30 g Pin 3 4 5 E / 11350 / G Connection +Vout +Vs GND 1/4 www.first-sensor.com www.sensortechnics.com WBA Series Mass flow sensors for gases FLOW SENSOR CHARACTERISTICS6 (VS = 10 ±0.01 V, TA = 20 °C, PAbs= 101.325 kPa) Part no. Max. flow ch an g e Pressure drop Max. Common mode pressure 5.0 slpm/sec 0.1 mbar @ 200 sccm 0.5 mbar @ 1 slpm 2 5 p si Flow range WBAM200DU... WBAM200DB... WBAL001DU... WBAL001DB... 0...200 sccm 0...±200 sccm 0...1 slpm 0...±1 slpm Note: sccm denotes standard cubic centimeters per minute. slpm denotes standard liter per minute. PERFORMANCE CHARACTERISTICS (VS = 10 ±0.01 V, TA = 20 °C, PAbs= 101.325 kPa, output signal is ratiometric to VS, media = air) Characteristics Min. Typ. 3 Accuracy Max. Unit ±(2.0 % of reading + 0.25 %FSO) Temperature effects (-25...85 °C)5 Offset Span WBAM200... WBAL001... Repeatability (incl. hysteresis) Offset long term stability (1 year) Noise level Current consumption (no load) Response time (t90) Warm-up time7 ±0.625 %FSS ±4 ±5 0.25 % of reading ±0.05 %FSS 0.1 12 5 70 10 mA ms Unidirectional devices Characteristics Zero offset Full scale span4 Full scale output Min. Typ. Max. Unit 0.99 3.91 1.00 4.00 5.00 1.01 4.09 V Min. Typ. Max. Unit 2.99 3.91 3.00 4.00 5.00 1.00 3.01 4.09 Bidirectional devices Characteristics Zero offset Full scale span4 Output at max. specified flow at min. specified flow V Note: The sensor’s performance is determined by intake flow conditions which depend on mounting and environmental effects. To ensure laminar flow through the sensor, it should be considered to insert a straight tube with a length 10 times the inner diameter of the pneumatic connector or a laminar flow element upstream of the sensor. Additionally, the WBA has to be mounted with both ports horizontally and pins downwards. E / 11350 / G 2/4 www.first-sensor.com www.sensortechnics.com WBA Series Mass flow sensors for gases OUTLINE DRAWING Note: Positive flow direction is defined as proceeding from P1 to P2 and results in positive output. third angle projection dimensions in mm E / 11350 / G 3/4 www.first-sensor.com www.sensortechnics.com WBA Series Mass flow sensors for gases GAS CORRECTION FACTORS8 Gas type Ai r Oxygen (O2) Nitrogen (N2) Argon (Ar) Hydrogen (H2) Carbon dioxide (CO2) Gas correction factor 1.0 1.0 1.0 1.18 * 0.67 * For Hydrogen applications, the actual H2 calibration is performed whenever possible. Specification notes: 1. 2. 3. 4. 5. 6. 7. 8. Sweep 20 to 2000 Hz, 8 min, 4 cycles per axis, MIL-STD-883E, Method 2007.2. 5 shocks, 3 axes, MIL-STD-883E, Method 2002.3. Accuracy is the combined error from offset and span calibration, linearity, hysteresis and repeatability. Full Scale Span (FSS) is the algebraic difference between the output signal for the highest and lowest specified flow. Shift is relative to 25°C. A 5 µm filter is recommended to protect the sensing element from dust particles which may be present in some applications. Warm-up time is the time from power on to the first stable reading. To obtain the real flow rates in a specific gas, multiply the readings from the sensor by the gas correction factor in the table. The factors are approximate and should be used as guidelines only. Sensor performance strongly depends on gas dynamics and has to be evaluated in the respective application. ORDERING INFORMATION Series Options WBA Flow range Gas Flow direction M200 200 sccm D* Dry air B Bidirectional L 001 U Unidirectional 1 slpm Grade H High Calibration 0 10 V (VS=8...15 V) * other calibration gases on request Example: WBA M200 D U H 0 First Sensor reserves the right to make changes to any products herein. First Sensor does not assume any liability arising out of the application or use of any product or circuit described herein, neither does it convey any license under its patent rights nor the rights of others. E / 11350 / G 4/4 www.first-sensor.com www.sensortechnics.com