0.25um Copper Wire Qualification and X flag to Solid Fla

AEC-Q100G Qual Report
Objective: 0.25um Copper
Freescale PN: See below
Part Name:
Wire Qualification and X flag to Solid Flag Conversion for FSL-KLM-FM at FSL-ATMC-FAB
Customer Name(s): Varies
PN(s): Varies
Plan or Results:
Revision # & Date:
Refer below
Technology:
Package: Refer below
Design Engr: Not applicable
Fab / Assembly /
Final Test Sites: FSL-ATMC-Fab/ FSL-KLM-FM/ FSL-KLM -FM
Maskset#:
Rev#: Refer below
(Signature/Date shown below
may be electronic)
GAO Approval (for Lim Jasmine-B18239
DIM/BOM results) 9 May 2014
Signature & Date:
GAO(Global Assembly Aperation) Engr: Poh-Leng Eu-R38158, Lim Jasmine-B18239
Die Size (in mm)
W x L Refer below
Part Operating
Temp. Grade:
QUARTZ Tracking #: Refer below
Product Engr: Refer below
Nurazah Ahmad- R63712
NPI PRQE Approval Signature & Date: 9 May 2014
NPI PRQE: Nurazah Ahmad- R63712
LOT A (144LQFP)
8EMHA21URY00
-40C to 125C
Grade 1
LOT B (144LQFP)
8EMHA21URW00
LOT C (144LQFP)
8EMHA21URX00
CAB Approval 13100530M
Signature & Date: 9 May 2014
Trace/DateCode:
LOT D (80
QFP)8EMHA21URZ0
0
Trace/DateCode:
Customer Approval
Signature & Date: May be N/A
TESTS HIGHLIGHTED IN YELLOW WILL BE PERFORMED FOR THIS STUDY
This testing is performed by Freescale Reliability Lab (KLM-RAL LAB) unless otherwise noted in the Comments.
Device Name: Bluefin_AUTO
Technology Code: E025AFXQ
Maskset: 0M23S Die Size (mm): 6.630 X 6.410
Package code/ dimension: 8259, 144 20x20 LQFP 1.4P0.5
Device Temperature: ­40C to 125C
PE: Tan Wei Ming­B37999/ Mohd Tarmizi Suhaib­B48012
Quartz ID: 225213
Device Name: Bluefin_AUTO
Technology Code: E025AFXQ
Maskset: 0M23S
Die Size (mm): 6.630 X 6.410
Package code/ dimension: 6019/ 80 14x14 QFP
Device Temperature: ­40C to 125C
PE: Tan Wei Ming­B37999/ Mohd Tarmizi Suhaib­B48012
Quartz ID: 225243
GROUP A - ACCELERATED ENVIRONMENTAL STRESS TESTS
Stress Test
Reference
JESD22A113
J-STD-020
Test Conditions
End Point Requirements
Minimum Sample
Size
# of Lots
Total Units
including
spares
Results
Lot ID-(#Rej/SS)
NA=Not Applicable
Preconditioning (PC) :
PC required for SMDs only.
MSL 3 @ 260°C, +5/-0°C
TEST @ RH
All surface mount devices prior to THB, HAST, AC, UHST, TC, PC+PTC and as
required per test conditions.
JESD22A101
A110
Highly Accelerated Stress Test
(HAST):
PC before HAST (for SMDs only):
Required
HAST = 110°C/85% for 264hrs
Bias = Max Vdd
Timed RO of 48hrs. MAX
TEST @ RH
77
0
0
Pass
JESD22A102
A118
Unbiased HAST (UHST):
PC before UHST (for SMDs only):
Required
UHST = 110°C/85%RH for 264hrs
Timed RO of 48hrs. MAX
TEST @ R
77
3
231
77
3
231
Comments or Generic Data
Lot A: 0/ 154
Lot B: 0/154
Lot C: 0/154
End Point Requirements
TEST @ RH
Minimum Sample Size
# of Lots
Total Units
including
spares
All surface mount devices prior to THB, HAST, AC, UHST, TC,
PC+PTC and as required per test conditions.
Results
Lot ID-(#Rej/SS)
NA=Not Applicable
Comments or Generic Data
Lot D: 0/77
Generic Data:
BLUEFIN (M23S), 144LQFP 20x20, Q225426 =
0/462
Generic Data:
Kirin 2E (M23E), Q217394, LQFP 80 14x14:
0/154
MC9S08AC128 (N79A) Q210577, LQFP 80
14x14: 0/77
PC
Generic Data:
Kirin 2E (M23E), Q217394,
LQFP 80 14x14: 0/154
MC9S08AC128 (N79A)
Q210577, LQFP 80 14x14:
0/77
TEST @ RH
77
0
0
Pass
Lot A: 0/77
Lot B: 0/77
Lot C: 0/77
TEST @ R
77
0
0
Not required
Lot A: 0/77
Lot B: 0/77
Lot C: 0/77
TEST @ H
For AEC: WBP =/> 3 grams
77
1
77
Lot D: 0/77
HAST
UHST
JESD22A104
AEC Q100Appendix 3
TC
Temperature Cycle (TC):
TEST @ H
PC before TC (for SMDs only):
For AEC: WBP =/> 3 grams
Required
TC = -65°C to 150°C for 500 cycles.
For AEC only: WBP after TC on 5
devices from 1 lot; 2 bonds per
corner and one mid-bond per side
on each device. Record which pins
were used.
JESD22A105
TEST @ RH
Preconditioning plus Power
Temperature Cycle (PC+PTC):
(See AEC-Q100 for test applicability
criteria)
PC before PC+PTC (for SMDs only)
PC= MSL @ °C, +5/-0°C
PTC = °C to °C for 1000 cycles;
Bias =
JESD22A105
Power Temperature Cycle (PTC):
(See AEC-Q100 for test
applicability.)
PTC = °C to °C for 1000 cycles;
Bias =
JESD22A103
High Temperature Storage Life
(HTSL):
150°C for 1008 hrs
PC + PTC
PTC
Post TC500, WP: Pass, > 3 grams
Post TC500, WP: Pass, > 3 grams
22+3
SMD only
0
0
Not required
TEST @ RH
22+3
SMD only
0
0
Not required
TEST @ RH
23+3 SMDs;
45+3 non- SMD
0
0
Not required
TEST @ RH
23+3 SMDs;
45+3 non- SMD
0
0
Not required
TEST @ RH
77
1
77
TEST @ RH
77
0
0
Not required
Minimum Sample
Size
# of Lots
Total Units
including
spares
Minimum Sample Size
# of Lots
Total Units
including
spares
77
0
0
Not required
TEST @ RHC
77
0
0
Not required
TEST @ RH
800
1
800
Lot A: 0/800
TEST @ RH
800
0
0
Pass
TEST @ RHC
77
0
0
Not required
TEST @ RHC
77
0
0
Not required
Lot A: 0/77
Timed RO = 96hrs. MAX
HTSL
TEST GROUP B - ACCELERATED LIFETIME SIMULATION TESTS
Stress Test
Reference
JESD22A108
Test Conditions
End Point Requirements
High Temperature Operating Life TEST @ RHC
(HTOL):
AEC Ta = 125°C for 1000 hrs
Bias = Max Vdd
Results
Lot ID-(#Rej/SS)
NA=Not Applicable
Comments or Generic Data
End Point Requirements
Results
Lot ID-(#Rej/SS)
NA=Not Applicable
Comments or Generic Data
Devices incorporating NVM shall
receive 1X 'NVM endurance
preconditioning'(W/E cycling). Test
R, H, C after W/E cycling.
HTOL
Timed RO of 96hrs. MAX
AEC Q100-008
Early Life Failure Rate (ELFR):
AEC Ta = 125°C for 48 hrs
Bias = Max Vdd
Generic Data:
Bluefin (0M23S), Q225213, LQFP 144 20X20:
0/800
Devices incorporating NVM shall
receive 0.1X 'NVM endurance
preconditioning'(W/E cycling). Test
R, H, C after W/E cycling.
ELFR
Timed RO of 48 hrs MAX
AEC Q100-005
NVM Endurance, Data Retention,
and Operational Life (EDR):
150°C for 1008 hrs or 175°C for
504hrs
Devices incorporating NVM shall
receive 1X 'NVM endurance
preconditioning'(W/E cycling). Test
R, H, C after W/E cycling.
Timed RO of 96hrs. MAX
EDR
TEST GROUP C - PACKAGE ASSEMBLY INTEGRITY TESTS
Stress Test
Minimum Sample
Size
# of Lots
Total Units
including
spares
Minimum Sample Size
# of Lots
Total Units
including
spares
AEC Q100-001
Wire Bond shear (WBS)
Cpk = or > 1.67
30 bonds
from minimum 5 units
3
15
Lot A: Cpk> 1.67
Lot B: Cpk> 1.67
Lot C: Cpk> 1.67
Cpk = or > 1.67
30 bonds
from minimum 5 units
1
5
Lot D: Cpk > 1.67
MilStd8832011
Wire Bond Pull (WBP):
Cond. C or D
Cpk = or > 1.67
30 bonds
from minimum 5 units
3
15
Lot A: Cpk> 1.67
Lot B: Cpk> 1.67
Lot C: Cpk> 1.67
Cpk = or > 1.67
30 bonds
from minimum 5 units
1
5
Lot D: Cpk > 1.67
15
2
30
17ARL10115D680: Pass
17ARL10115D683: Pass
>95% lead coverage of
critical areas
15
2
30
17ARL10006D603: Pass
17ARL10006D600: Pass
10
2
20
17ARL10115D680: Cpk > 1.67
17ARL10115D683: Cpk > 1.67
Cpk = or > 1.67
10
2
20
17ARL10006D603: Cpk >1.67
17ARL10006D600: Cpk > 1.67
Reference
Test Conditions
End Point Requirements
WBS
WBP
JESD22B102
Solderability (SD):
>95% lead coverage of critical areas
8hr.(1 hr. for Au-plated leads) Steam
age prior to test.
If production burn-in is done,
samples must also undergo burn-in
prior to SD.
JESD22B100
Physical Dimensions(PD):
PD per FSL 98A drawing
SD
Cpk = or > 1.67
Results
Lot ID-(#Rej/SS)
NA=Not Applicable
Comments or Generic Data
End Point Requirements
Results
Lot ID-(#Rej/SS)
NA=Not Applicable
Comments or Generic Data
PD
Dimensional (DIM):
GAO to verify PD results against
valid 98A drawing.
BOM Verification (BOM):
GAO to verify qual lot ERF BOM is
accurate.
DIM
&
BOM
AEC-Q100-010
SBS
JESD22B105
LI
DIM: Not applicable
BOM: Pass
Solder Ball Shear (SBS):
Cpk = or >1.67
Performed on all solder ball mounted
packages e.g. PBGA, Chip Scale,
Micro Lead Frame (but NOT Flip
Chip).
Two reflow cycles at MSL reflow
temperature before shear.
10
(5 balls from a min. of
10 devices)
0
Lead Integrity (LI):
Not required for surface mount
devices;
Only required for through-hole
devices.
5
(10 leads from each of
5 parts)
0
No lead breakage or cracks
0
DIM: Not applicable
BOM: Pass
For solder ball mounted
packages only; NOT for Flip
Chips.
0
Cpk = or >1.67
10
(5 balls from a min. of 10
devices)
0
0
No lead breakage or cracks
5
(10 leads from each of 5
parts)
0
0
Minimum Sample Size
# of Lots
Total Units
including
spares
For solder ball mounted packages only; NOT for
Flip Chips.
TEST GROUP D - DIE FABRICATION RELIABILITY TESTS
Stress Test
Reference
Test Conditions
End Point Requirements
Minimum Sample
Size
# of Lots
Total Units
including
spares
Results
Lot ID-(#Rej/SS)
NA=Not Applicable
Comments
End Point Requirements
Results
Lot ID-(#Rej/SS)
NA=Not Applicable
Comments
Electro Migration (EM)
The data, test method,
calculations and internal
criteria should be available to
the customer upon request for
new technologies.
The data, test method, calculations and internal
criteria should be available to the customer upon
request for new technologies.
Time Dependent Dielectric
Breakdown (TDDB)
The data, test method,
calculations and internal
criteria should be available to
the customer upon request for
new technologies.
The data, test method, calculations and internal
criteria should be available to the customer upon
request for new technologies.
Hot Carrier Injection (HCI)
The data, test method,
calculations and internal
criteria should be available to
the customer upon request for
new technologies.
The data, test method, calculations and internal
criteria should be available to the customer upon
request for new technologies.
Stress Migration (SM)
The data, test method,
calculations and internal
criteria should be available to
the customer upon request for
new technologies.
The data, test method, calculations and internal
criteria should be available to the customer upon
request for new technologies.
Negative Bias Temperature
Instability (NBTI)
The data, test method,
calculations and internal
criteria should be available to
the customer upon request for
new technologies.
The data, test method, calculations and internal
criteria should be available to the customer upon
request for new technologies.
EM
TDDB
HCI
SM
NBTI
TEST GROUP E - ELECTRICAL VERIFICATION TESTS
Stress Test
Reference
Test Conditions
End Point Requirements
Minimum Sample
Size
# of Lots
Total Units
including
spares
Results
Lot ID-(#Rej/SS)
NA=Not Applicable
Freescale 48A
Pre- and Post Functional /
Parametrics (TEST):
For AEC, test software shall meet
requirements of AEC-Q100-007.
Testing performed to the limits of
device specification in temperature
and limit value.
0 Fails
All
All
All
See Results Summary
ElectroStatic Discharge/
TEST @ RH
Human Body Model Classification 2KV min.
(HBM):
Test @ 500/1000/1500/2000 Volts
For AEC, see AEC-Q100-002 for
classification levels.
3 units per Voltage
level
1
12
Lot A:
500V: 0/3
1000V: 0/3
1500V: 0/3
2000V: 0/3
AEC-Q100-003
or JESD22
ElectroStatic Discharge/
Machine Model Classification
m(MM):
Test @ 200 Volts
For AEC, see AEC-Q100-003 for
classification levels.
TEST @ RH
200V only
3 units per Voltage
level
0
0
AEC-Q100-011
ElectroStatic Discharge/
Charged Device Model
Classification (CDM):
Test @ 250/500/750 Volts
For AEC, see AEC-Q100-011 for
classification levels.
Timed RO of 96hrs MAX.
TEST @ RH
All pins =/> 500V
For AEC, Corner pins =/> 750V;
3 units per Voltage
level
0
JESD78
plus
AEC-Q100004 for AEC
Latch-up (LU):
Test per JEDEC JESD78 with the
AEC-Q100-004 requirements for
AEC.
Ta= Maximum operating
temperature
Vsupply = Maximum operating
voltage
Electrical Distribution (ED)
TEST @ RH
6
30units
TEST
AEC-Q100-002 /
JESD22-A114E Jan 2007
HBM
MM
Comments or Generic Data
End Point Requirements
Minimum Sample Size
# of Lots
Total Units
including
spares
Results
Lot ID-(#Rej/SS)
NA=Not Applicable
Comments or Generic Data
This action refers to Final
Testing of all qualification
units.
0 Fails
All
All
All
See Results Summary
This action refers to Final Testing of all
qualification units.
TEST @ RH
2KV min.
3 units per Voltage level
0
0
Not required
Not required
TEST @ RH
200V only
3 units per Voltage level
0
0
Not required
0
Not required
TEST @ RH
All pins =/> 500V
For AEC, Corner pins =/>
750V;
3 units per Voltage level
0
0
Not required
0
0
Not required
TEST @ RH
6
0
0
Not required
1 +1
30 + 30
Pass
Cpk > 1.67
5 units
0
0
Not required
CDM
LU
AEC-Q100-009,
Freescale 48A spec
TEST @ RHC
For AEC,
Cpk target > 1.67
Comparision between Copper TEST @ RHC
Wire and Gold Wire
performance at T0.
For AEC,
Cpk target > 1.67
ED
FORMPPAP004XLS
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Freescale Rev T
Freescale PN: See below
Part Name:
Customer Name(s): Varies
PN(s): Varies
For AEC, AEC-Q100-007
Fault Grading (FG)
Plan or Results:
Revision # & Date:
FG shall be = or > 90% for qual units
FG%= No Change
FG
For AEC, AEC-Q003
Characterization (CHAR):
Ony performed on new technologies
and part families per AEC Q003.
Refer below
Production Test requirement: FG shall be = or > 90% for
98% w/o Iddq
qual units
95% w/Iddq
100% TYPE2 faults detection
FG%= No Change
Not required
Production Test requirement:
98% w/o Iddq
95% w/Iddq
100% TYPE2 faults detection
Not required
CHAR
Identify the speed pattern that drifts TEST @ RHC
the most and create guardband if
needed. (Two rdpts - TimeZero and
final NBTI readpoint). Serialized
units.
1lot: 77
3lot: 25
0
6
0
Not required
TEST @ RHC
Not required
TEST @ R
1lot: 77
3lot: 25
0
6
0
Not required
NBTI
For AEC, AEC-Q100-006
Electro-Thermally Induced Gate
Leakage (GL):
155°C, 2.0 min, +400/-400 V
Per AEC Q100 Rev G, this test is
performed for information only.
Timed RO of 96 hrs MAX.
For all failures, perform unbiased
bake (4hrs/125°C, or 2hrs/150°C)
and retest; recovered units are GL
failures.
TEST @ R
0
0
Not required
GL (for information only)
BOM:
Logic Part
Fab/Mask set
WAFER TECH CD
Assembly Site
PACK DESCRIPTION
DIE SIZE(mmxmm)
MOLD COMPOUND
EPOXY DESCRIPTION
BLUEFIN
FSL-ATMC-FAB/ M23S
E025AFXQ
FSL-KLM-FM
144 20x20 LQFP
6.630 X 6.410
CEL-9200HF10M-CW
CRM-1064MBL
23um/ 0.9mil, Cu
Solid
BLUEFIN
FSL-ATMC-FAB/ M23S
E025AFXQ
FSL-KLM-FM
80 14x14 QFP
6.630 X 6.410
CEL-9200HF10M-CW
CRM-1064MBL
23um/ 0.9mil, Cu
Wire
Lead Frame Flag Type
Solid
Logic Part
Package Qualification
Generic Data
Fab/Mask set/Wafer Tech CD
Assembly Site
PACK DESCRIPTION
DIE SIZE(mmxmm)
MOLD COMPOUND
EPOXY DESCRIPTION
Wire Description
CAB
217316
S08AC128
TSMC3/ N79A/ E025FXXQ
FSL-KLM-FM
80LQFP 14x14
3.395 x 3.583
HITACHI 9200HF10M
CRM-1064MBL
25um/ 1.0mil, Cu
11443313M
217394
Quartz
KIRIN2E (MCF52230)
TSMC11/ M23E/ E025AFXQ
FSL-KLM-FM
LQFP 80 14x14
7.150 x 6.940
HITACHI 9200HF10M
CRM-1064MBL
25um/ 1.0mil, Cu
11443313M
Logic Part
Package Description/Code
Mask set
FAB
Wafer Tech
Die Size
Assembly Site
MOLD COMPOUND
Epoxy
DZ60
BLUEFIN_AUTO
BONITO
BONITO
RAZORFISH
RAZORFISH
YELLOWFIN_AUTO
YELLOWFIN_AUTO
YELLOWFIN_AUTO
BARRACUDA4
BARRACUDA4
GOLDFISH
KOI
MARLIN2
MARLIN2
STURGEON
STURGEON
TORPEDO
TORPEDO
100 14x14 LQFP/ 8264
M78G
M23S
M42E
M42E
M80F
M80F
M84E
M84E
M84E
L01Y
L01Y
M34C
M66G
L59W
L59W
M65G
M65G
M89C
M89C
FSL-ATMC-FAB
FSL-ATMC-FAB
FSL-ATMC-FAB
FSL-ATMC-FAB
FSL-ATMC-FAB
FSL-ATMC-FAB
FSL-ATMC-FAB
FSL-ATMC-FAB
FSL-ATMC-FAB
FSL-ATMC-FAB
FSL-ATMC-FAB
FSL-ATMC-FAB
FSL-ATMC-FAB
FSL-ATMC-FAB
FSL-ATMC-FAB
FSL-ATMC-FAB
FSL-ATMC-FAB
FSL-ATMC-FAB
FSL-ATMC-FAB
E025FXXQ
E025AFXQ
E025AFX5
E025AFX5
E025AFX5
E025AFX5
E025AFX5
E025AFX5
E025AFX5
E025AFXT
E025AFXT
E025AFXQ
E025AFXT
E025AFXT
E025AFXT
E025AFXT
E025AFXT
E025AFXT
E025AFXT
3.922X3.982
6.630 X 6.410
4.452 X 4.122
4.452 X 4.122
5.932 X 6.175
5.932 X 6.175
5.292 X 5.102
5.292 X 5.102
5.292 X 5.102
5.506X5.974
5.506X5.974
3.906X3.189
4.234X4.234
5.181X5.427
5.181X5.427
4.713X4.280
4.713X4.280
4.400X4.700
4.400X4.700
FS-KLM-FM
FS-KLM-FM
FS-KLM-FM
FS-KLM-FM
FS-KLM-FM
FS-KLM-FM
FS-KLM-FM
FS-KLM-FM
FS-KLM-FM
FS-KLM-FM
FS-KLM-FM
FS-KLM-FM
FS-KLM-FM
FS-KLM-FM
FS-KLM-FM
FS-KLM-FM
FS-KLM-FM
FS-KLM-FM
FS-KLM-FM
CEL-9200HF10M-CW
CEL-9200HF10M-CW
CEL-9200HF10M-CW
CEL-9200HF10M-CW
CEL-9200HF10M-CW
CEL-9200HF10M-CW
CEL-9200HF10M-CW
CEL-9200HF10M-CW
CEL-9200HF10M-CW
CEL-9200HF10M-CW
CEL-9200HF10M-CW
CEL-9200HF10M-CW
CEL-9200HF10M-CW
CEL-9200HF10M-CW
CEL-9200HF10M-CW
CEL-9200HF10M-CW
CEL-9200HF10M-CW
CEL-9200HF10M-CW
CEL-9200HF10M-CW
CRM-1064MBL
CRM-1064MBL
CRM-1064MBL
CRM-1064MBL
CRM-1064MBL
CRM-1064MBL
CRM-1064MBL
CRM-1064MBL
CRM-1064MBL
CRM-1064MBL
CRM-1064MBL
CRM-1064MBL
CRM-1064MBL
CRM-1064MBL
CRM-1064MBL
CRM-1064MBL
CRM-1064MBL
CRM-1064MBL
CRM-1064MBL
Qualification By Similarity:
144 20x20 LQFP/ 8259
112 20x20 LQFP/ 8255
80 14x14 QFP/ 6019
112 20x20 LQFP/ 8255
144 20x20 LQFP/ 8259
112 20x20 LQFP/ 8255
144 20x20 LQFP/ 8259
80 14x14 QFP/ 6019
80 14x14 QFP/ 6019
112 20x20 LQFP/ 8255
80 14x14 QFP/ 6019
80 14x14 QFP/ 6019
80 14x14 QFP/ 6019
112 20x20 LQFP/ 8255
80 14x14 QFP/ 6019
112 20x20 LQFP/ 8255
80 14x14 QFP/ 6019
112 20x20 LQFP/ 8255
Revision
Date
Comments
Author
Rev 0
08-May-14
Final Qualification Report
Nurazah Ahmad
FORMPPAP004XLS
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Wire Description
23um/ 0.9mil, Cu
23um/ 0.9mil, Cu
23um/ 0.9mil, Cu
23um/ 0.9mil, Cu
23um/ 0.9mil, Cu
23um/ 0.9mil, Cu
23um/ 0.9mil, Cu
23um/ 0.9mil, Cu
23um/ 0.9mil, Cu
23um/ 0.9mil, Cu
23um/ 0.9mil, Cu
23um/ 0.9mil, Cu
23um/ 0.9mil, Cu
23um/ 0.9mil, Cu
23um/ 0.9mil, Cu
23um/ 0.9mil, Cu
23um/ 0.9mil, Cu
23um/ 0.9mil, Cu
23um/ 0.9mil, Cu
Freescale Rev T