D6F-N2/-L2 MEMS Flow Sensor A Compact, High-accuracy Sensor That Measures Low Flow Rates. • High accuracy of ±3% FS. • Flow rates can be measured without being affected by temperature or pressure. RoHS Compliant Refer to the Common Precautions for the D6F Series on page 40. Ordering Information Output Voltage Characteristics MEMS Flow Sensor D6F-01N2-000 Natural gas (13A) LP gas Model 0 to 1 L/min D6F-01N2-000 0 to 2 L/min D6F-02N2-000 0 to 5 L/min D6F-05N2-000 0 to 2 L/min D6F-02L2-000 D6F-05N2-000 6.0 6.0 5.0 5.0 Output voltage (V) Flow rate range Output voltage (V) Applicable fluid 4.0 3.0 2.0 1.0 0.0 0.0 0.2 0.4 0.6 Flow rate (L/min) 0.8 4.0 3.0 2.0 1.0 0.0 0.0 1.0 1.0 2.0 3.0 Flow rate (L/min) 4.0 5.0 1.6 2.0 Accessory (included) Cable D6F-CABLE1 Connections D6F-01N2-000 D6F-02N2-000 D6F-05N2-000 D6F-02L2-000 Pin No. Connector D6F-02N2-000 D6F-02L2-000 6.0 6.0 5.0 5.0 Output voltage (V) Model Output voltage (V) Type 4.0 3.0 2.0 1.0 0.0 0.0 0.4 0.8 1.2 Flow rate (L/min) 1.6 2.0 4.0 3.0 2.0 1.0 0.0 0.0 0.4 0.8 1.2 Flow rate (L/min) D6F-01N2-000 1: Vcc 2: Vout 3: GND 53398 (Made by Molex Japan) Use the following connectors for connections to the D6F: Housing 51021 (Made by Molex Japan) Terminals 50079 (Made by Molex Japan) Wires AWG28 to AWG26 Flow rate L/min (normal) Output voltage V 0 1.00 ±0.12 0.2 0.4 0.6 0.8 1.0 1.90 ±0.12 2.81 ±0.12 3.64 ±0.12 4.37 ±0.12 5.00 ±0.12 0.4 0.8 1.2 1.6 2.0 2.20 ±0.12 3.20 ±0.12 3.98 ±0.12 4.55 ±0.12 5.00 ±0.12 1.0 2.0 3.0 4.0 5.0 2.91 ±0.12 3.92 ±0.12 4.47 ±0.12 4.79 ±0.12 5.00 ±0.12 0.4 0.8 1.2 1.6 2.0 3.02 ±0.08 3.95 ±0.08 4.47 ±0.08 4.79 ±0.08 5.00 ±0.12 D6F-02N2-000 Flow rate L/min (normal) Output voltage V 0 1.00 ±0.12 D6F-05N2-000 2: Vout 1: Vcc 3: GND Flow rate L/min (normal) Output voltage V 0 1.00 ±0.12 D6F-02L2-000 Enlarged View Flow rate L/min (normal) Output voltage V 0 1.00 ±0.30 Measurement conditions: Power supply voltage of 12±0.1 VDC, ambient temperature of 25±5°C, and ambient humidity of 35% to 75%. 10 D6F-N2/-L2 MEMS Flow Sensor Characteristics/Performance Model D6F-01N2-000 Flow Range (See note 1.) 0 to 1 L/min Calibration Gas (See note 2.) Natural gas (13A) Flow Port Type Rc 1/4 thread Electrical Connection Three-pin connector Power Supply 10.8 to 26.4 VDC D6F-02N2-000 D6F-05N2-000 0 to 2 L/min. 0 to 5 L/min Propane gas Current Consumption 15 mA max. with no load, with a Vcc of 12 to 24 VDC, and at 25°C Output Voltage 1 to 5 VDC (non-linear output, load resistance of 10 kΩ) Accuracy ±3% FS (25°C characteristic) Repeatability (See note 3.) ±0.2% FS Output Voltage (Max.) 5.7 VDC (Load resistance: 10 kΩ) ±2% to ±7.5% F.S. (25°C characteristic) ±0.3% FS Output Voltage (Min.) 0 VDC (Load resistance: 10 kΩ) Rated Power Supply Voltage 26.4 VDC Rated Output Voltage 6 VDC Case Aluminum alloy Degree of Protection IEC IP40 (Excluding tubing sections.) Withstand Pressure 200 kPa Pressure Drop (See note 3.) 0.017 kPa Operating Temperature (See note 4.) −10 to 60°C D6F-02L2-000 0 to 2 L/min. 0.033 kPa 0.10 kPa 0.14 kPa Operating Humidity (See note 4.) 35% to 85% Storage Temperature (See note 4.) −40 to 80°C Storage Humidity (See note 4.) 35% to 85% Temperature Characteristics ±3% FS for 25°C characteristic at −10 to 60°C Insulation Resistance Between Sensor outer cover and lead terminals: 20 MΩ min. (at 500 VDC) ±4% FS for 25°C characteristic at −10 to 60°C Dielectric Strength Between Sensor outer cover and lead terminals: 500 VAC, 50/60 Hz min. for 1 min (leakage current: 1 mA max.) Weight 35.3 g Note: 1. Note: 2. Note: 3. Note: 4. Volumetric flow rate at 0°C, 101.3 kPa. Dry gas. (must not contain large particles, e.g., dust, oil, or mist.) Reference (typical) With no condensation or icing. Dimensions (Unit: mm) D6F-01N2-000 D6F-02N2-000 D6F-05N2-000 D6F-02L2-000 Two, M3 holes with a depth of at least 5 mm 16.2 Mounting Hole Dimensions 16.2±0.05 Two, 3.5 dia. 37 62±0.5 (3.7) 37±0.05 (6) 21.6±0.5 10 3-17 10 Cable (included): D6F-CABLE1 200±35 22.1±0.5 100±15 Brown wire Black wire 8.85 1. Vcc 2. Vout Two, tapped threads 0.35 for Rc 1/4 pipe Blue wire 3. GND 11