Family data sheet

Product family datasheet
Microlithography lamps for Canon i-line systems
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June 8, 2016, 10:39:53
Microlithography lamps for Canon i-line systems
© 2016, OSRAM GmbH. All rights reserved.
Page 1 of 5
Product family datasheet
Product line drawing
Product line drawing
Product line drawing
Product line drawing
Product line drawing
Product line drawing
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June 8, 2016, 10:39:53
Microlithography lamps for Canon i-line systems
© 2016, OSRAM GmbH. All rights reserved.
Page 2 of 5
Product family datasheet
Technical data
Electrical data
Dimensions & weight
Product description
Nominal
current
Nominal
voltage
HBO 1002 W/CEL 1)
16.0 A
HBO 1500 W/CIEL
Diameter
Mountin
g length
47.0 V
28.0 mm
157.0
mm
62.5 A
24.0 V
52.0 mm
HBO 2001 W/CIEL
77.0 A
26.0 V
DC
62.0 mm
307.00 mm
148.75 mm
4.5 mm
2500 h
HBO 4500 W/CIL 2)
148 A
30.5 V
DC
85.0 mm
330.00 mm
157.75 mm
7.0 mm
2250 h
HBO 2002 W/MA
54.0 A
37.0 V
110 A
26.0 V
HBO 2700 W/CIL
2)
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Type of
current
Lifespan
DC
Lifespan
2250 h
4)
4)
1000 h 9)
62.0 mm
307.00 mm
149.1 mm
4)
5.0 mm
2250 h
Additional product data
Burning position
HBO 1002 W/CEL 1)
Vertical
3)
HBO 1500 W/CIEL
Vertical
3)
HBO 2001 W/CIEL
Vertical
8)
Forced
7)
SF33.5/50
HBO 4500 W/CIL 2)
Vertical
8)
Forced
7)
SFaX46-36/50
Vertical
3)
Vertical
8)
Forced
7)
SF33.5/50
HBO 2700 W/CIL
Electrode gap cold
2500 h
Product description
2)
Light
center
length
(LCL)
62.0 mm
Capabilities
HBO 2002 W/MA
Length with base
excl. base
pins/connection
Cooling
Base anode (standard
designation)
5)
5)
Base cathode (standard
designation)
SFa33.5-10/50
5)
6)
SFa36-16/50
SFa33.5-14/50
6)
1) Also available with 1,500 h lifespan: HBO 1002 W/CL (4050300324005)/Obtainable in Europe, Singapore and Japan only through Canon/Lamp suitable for pulsed operation between 700…1000 W/Maximum permissible power 750 W for constant power operation
2) Lamp contains overpressure even in cold status - additional safety regulations, supplied with the lamps, have to be fulfilled. Please read Technical bulletin DO-SEM TB 004 carefully
3) Anode underneath
4) Distance from end of base to tip of anode or cathode (cold)
5) With cable connection (M 8)
June 8, 2016, 10:39:53
Microlithography lamps for Canon i-line systems
© 2016, OSRAM GmbH. All rights reserved.
Page 3 of 5
Product family datasheet
6) With cable connection (M6)
7) Maximum permissible base temperature: 200 °C
8) Anode on top
9) Depending on operating mode
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June 8, 2016, 10:39:53
Microlithography lamps for Canon i-line systems
© 2016, OSRAM GmbH. All rights reserved.
Page 4 of 5
Product family datasheet
Safety advice
Because of their high luminance, UV radiation and high internal pressure (when hot) HBO lamps may only be operated in
enclosed lamp casings specially constructed for the purpose. Mercury is released if the lamp breaks. Special safety precautions
must be taken. More information is available on request or can be found in the leaflet included with the lamp or in the
operating instructions.
Application advice
For more detailed application information and graphics please see product datasheet.
Disclaimer
Subject to change without notice. Errors and omission excepted. Always make sure to use the most recent release.
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June 8, 2016, 10:39:53
Microlithography lamps for Canon i-line systems
© 2016, OSRAM GmbH. All rights reserved.
Page 5 of 5