Product family datasheet Microlithography lamps for Canon i-line systems __ June 8, 2016, 10:39:53 Microlithography lamps for Canon i-line systems © 2016, OSRAM GmbH. All rights reserved. Page 1 of 5 Product family datasheet Product line drawing Product line drawing Product line drawing Product line drawing Product line drawing Product line drawing __ June 8, 2016, 10:39:53 Microlithography lamps for Canon i-line systems © 2016, OSRAM GmbH. All rights reserved. Page 2 of 5 Product family datasheet Technical data Electrical data Dimensions & weight Product description Nominal current Nominal voltage HBO 1002 W/CEL 1) 16.0 A HBO 1500 W/CIEL Diameter Mountin g length 47.0 V 28.0 mm 157.0 mm 62.5 A 24.0 V 52.0 mm HBO 2001 W/CIEL 77.0 A 26.0 V DC 62.0 mm 307.00 mm 148.75 mm 4.5 mm 2500 h HBO 4500 W/CIL 2) 148 A 30.5 V DC 85.0 mm 330.00 mm 157.75 mm 7.0 mm 2250 h HBO 2002 W/MA 54.0 A 37.0 V 110 A 26.0 V HBO 2700 W/CIL 2) __ Type of current Lifespan DC Lifespan 2250 h 4) 4) 1000 h 9) 62.0 mm 307.00 mm 149.1 mm 4) 5.0 mm 2250 h Additional product data Burning position HBO 1002 W/CEL 1) Vertical 3) HBO 1500 W/CIEL Vertical 3) HBO 2001 W/CIEL Vertical 8) Forced 7) SF33.5/50 HBO 4500 W/CIL 2) Vertical 8) Forced 7) SFaX46-36/50 Vertical 3) Vertical 8) Forced 7) SF33.5/50 HBO 2700 W/CIL Electrode gap cold 2500 h Product description 2) Light center length (LCL) 62.0 mm Capabilities HBO 2002 W/MA Length with base excl. base pins/connection Cooling Base anode (standard designation) 5) 5) Base cathode (standard designation) SFa33.5-10/50 5) 6) SFa36-16/50 SFa33.5-14/50 6) 1) Also available with 1,500 h lifespan: HBO 1002 W/CL (4050300324005)/Obtainable in Europe, Singapore and Japan only through Canon/Lamp suitable for pulsed operation between 700…1000 W/Maximum permissible power 750 W for constant power operation 2) Lamp contains overpressure even in cold status - additional safety regulations, supplied with the lamps, have to be fulfilled. Please read Technical bulletin DO-SEM TB 004 carefully 3) Anode underneath 4) Distance from end of base to tip of anode or cathode (cold) 5) With cable connection (M 8) June 8, 2016, 10:39:53 Microlithography lamps for Canon i-line systems © 2016, OSRAM GmbH. All rights reserved. Page 3 of 5 Product family datasheet 6) With cable connection (M6) 7) Maximum permissible base temperature: 200 °C 8) Anode on top 9) Depending on operating mode __ June 8, 2016, 10:39:53 Microlithography lamps for Canon i-line systems © 2016, OSRAM GmbH. All rights reserved. Page 4 of 5 Product family datasheet Safety advice Because of their high luminance, UV radiation and high internal pressure (when hot) HBO lamps may only be operated in enclosed lamp casings specially constructed for the purpose. Mercury is released if the lamp breaks. Special safety precautions must be taken. More information is available on request or can be found in the leaflet included with the lamp or in the operating instructions. Application advice For more detailed application information and graphics please see product datasheet. Disclaimer Subject to change without notice. Errors and omission excepted. Always make sure to use the most recent release. __ June 8, 2016, 10:39:53 Microlithography lamps for Canon i-line systems © 2016, OSRAM GmbH. All rights reserved. Page 5 of 5