Datasheet

FAST DECAY PHOSPHOR
J13550-09D / J12782-09D
For electron beam detection,
High speed and long life phosphor
FEATURES
●High speed decay time
(J13550-09D: 3.5 ns / J12782-09D: 12 ns)
●Long life
●High brightness efficiency
APPLICATIONS
●Semiconductor inspection instruments
●SEM (Scanning electron microscopy)
●Mass spectrometry *
●General electron detection
*This is used in combination with a conversion dynode
or MCP when detecting ions.
SPECIFICATIONS
GENERAL
J13550-09D
Parameter
Effective diameter
Detection energy range (Electron beam) 1
Decay time (90 % to 10 %)
Peak emission wavelength range
Operating ambient temperature
Storage temperature
Storage humidity 2
J12782-09D
Unit
mm
keV
ns
nm
°C
°C
%
8.6
6 to 15
3.5
Typ.
12
390 to 440
+5 to +45
-10 to +50
Below 70
1Lower detection energy range is available upon request.
2No condensation
Figure 1: Decay time characteristics
120
Figure 2: Phosphor life characteristics
TPMZB0002EC
120
TPMZB0003EB
ELECTRON BEAM ACCELARATING VOLTAGE: 12 kV
INPUT CURRENT: 15 nA/mm dia.
100
RELATIVE OUTPUT (%)
RELATIVE OUTPUT (%)
100
J12782-09D
80
J13550-09D
60
40
20
0
-15
80
60
40
20
-10
-5
0
5
10
TIME (ns)
15
20
25
30
0
0.001
0.01
0.1
CHARGE (C/cm2)
Subject to local technical requirements and regulations, availability of products included in this promotional material may vary. Please consult with our sales office.
Information furnished by HAMAMATSU is believed to be reliable. However, no responsibility is assumed for possible inaccuracies or omissions. Specifications are
subject to change without notice. No patent rights are granted to any of the circuits described herein. ©2016 Hamamatsu Photonics K.K.
1
FAST DECAY PHOSPHOR J13550-09D / J12782-09D
Figure 3: Spectral emission characteristics
120
Figure 4: Relative fluorescence intensity
(measurement data example)
TPMZB0004EB
3
RELATIVE INTENSITY (a.u.)
RELATIVE INTENSITY (%)
100
80
60
40
20
0
200
300
400
500
600
700
800
TPMZB0025EA
J12782-09D
2
J13550-09D
1
0
300
WAVELENGTH (nm)
400
500
600
WAVELENGTH (nm)
Figure 5: Dimensional outline (Unit: mm)
ELECTRODE: ALUMINUM
PHOSPHOR
SUBSTRATE
ELECTRON
BEAM
8.6
LIGHT
0.43 ± 0.03
9.0* ± 0.1
* Custom assembly of light guide or vacuum flange is available upon request.
TPMZA0002EC
HAMAMATSU PHOTONICS K.K.
www.hamamatsu.com
HAMAMATSU PHOTONICS K.K., Electron Tube Division
314-5, Shimokanzo, Iwata City, Shizuoka Pref., 438-0193, Japan, Telephone: (81)539/62-5248, Fax: (81)539/62-2205
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Italy: Hamamatsu Photonics Italia S.r.l.: Strada della Moia, 1 int. 6, 20020 Arese (Milano), Italy, Telephone: (39)02-93581733, Fax: (39)02-93581741 E-mail: [email protected]
TPMZ1021E02
China: Hamamatsu Photonics (China) Co., Ltd.: B1201 Jiaming Center, No.27 Dongsanhuan Beilu, Chaoyang District, Beijing 100020, China, Telephone: (86)10-6586-6006, Fax: (86)10-6586-2866 E-mail: [email protected]
Taiwan: Hamamatsu Photonics Taiwan Co., Ltd.: 8F-3, No.158, Section2, Gongdao 5th Road, East District, Hsinchu, 300, Taiwan R.O.C. Telephone: (886)03-659-0080, Fax: (886)07-811-7238 E-mail: [email protected]
MAY 2016 IP