ELECTROSTATIC REMOVER L12542 ELECTROSTATIC CHARGE REMOVER Ideal for eliminating electrostatic charges in a vacuum OVERVIEW The L12542 is a newly developed electrostatic charge remover that makes use of VUV (vacuum ultraviolet) light. Due to its wide irradiation angle about 3 times larger than our current VUV light source, the L12542 efficiently removes electrostatic charges over large areas in depressurized or vacuum environments. Up until now two or more VUV light sources were needed to neutralize electrostatic charges in large areas due to their limited irradiation angle. The L12542 solves this problem and efficiently neutralizes large areas in a vacuum. Left: Light source, Right: Power supply FEATURES ●Large irradiation (neutralizing) area ●Highly efficient ion generation in a vacuum ●No air flow needed ●No overshoot (generates no opposite-polarity static charges) ●No dust and electromagnetic noise emissions ●Long life Irradiating area about 9 times larger VACUUM CHAMBER WAFER VACUUM FLANGE ELECTROSTATIC CHUCK L12542 APPLICATIONS ●Dechucking of electrostatic chucks ●Semiconductor manufacturing equipment (vacuum process) ●LCD manufacturing equipment ●Organic EL manufacturing equipment ●Hard disk manufacturing equipment ●Film manufacturing equipment VACUUM CHAMBER VACUUM FLANGE WAFER ELECTROSTATIC CHUCK CONVENTIONAL TYPE TLSZC0015EB ELECTROSTATIC CHARGE REMOVAL EFFECT Neutralization time vs. distance 0.7 Measurement conditions Charged plate: 25 mm Charged voltage: 1 kV / 100 V Vacuum level: 1 × 10-2 Pa 4.5 NEUTRALIZATION TIME (s) Neutralization time vs. vacuum level TLSZB0113EA 4 3.5 3 Positive charged Negative charged 2.5 TLSZB0114EA Measurement conditions Charged plate: 25 mm Charged voltage: 1 kV / 100 V Distance between light source output window and charged plate: 300 mm 0.6 NEUTRALIZATION TIME (s) 5 2 1.5 1 0.5 Positive charged Negative charged 0.4 0.3 0.2 0.1 0.5 0 0 200 400 600 800 1000 1200 1400 0 0.0001 0.001 0.01 0.1 1 10 VACUUM LEVEL (Pa) DISTANCE BETWEEN LIGHT SOURCE OUTPUT WINDOW AND CHARGED PLATE (mm) SPECIFICATIONS ●GENERAL RATINGS Parameter Spectral distribution 1 Window material Cooling method Operating temperature range Storage temperature range Operating humidity range Storage humidity range Unit nm — — °C °C — — Description / Value 115 to 400 MgF2 Air cooling by cooling fan +10 to +40 0 to +60 Below 80 % (no condensation) Below 85 % (no condensation) 1The ionizer internal lamp emits intense ultraviolet rays harmful to the eyes and skin. Do not look directly at the emitted light and do not expose skin to light emission. ●RECOMMENDED OPERATING CONDITIONS AND CHARACTERISTICS (at 25 °C) Description / Value 25 ± 5 2000 (guaranteed) 500 (expected) 100 V to 240 V (100 V/200 V auto switching), single phase 50 Hz / 60 Hz 90 Parameter Warm-up time Light source service life 2 230 nm 160 nm Input voltage (AC) Power consumption (Max.) Unit s h — VA 2The life end is defined as the time when light output falls to 50% of its initial intensity value while operated under our measurement conditions. Note that the light output attenuation depends greatly on the environment of the vacuum equipment. * When ordering a replacement light source, please specify the type number "L12565". SPECTRAL DISTRIBUTION 100 DIRECTIVITY (LIGHT DISTRIBUTION) TLSOB0079EB RELATIVE IRRADIANCE (%) 100 RELATIVE IRRADIANCE (%) 80 80 60 40 60 30° 20° 20 10° 0 0° ANGLE 40 -20 -40 20 -60 0 100 -10° -20° -30° -80 120 140 160 180 200 220 240 400 -100 WAVELENGTH (nm) VUV IONIZER L12542 CONVENTIONAL TYPE TLSZB0105EB DIMENSIONAL OUTLINES (Unit: mm) ●LIGHT SOURCE (Weight: Approx. 530 g) 160 ± 4 42 ± 4 ARC POINT 78 ± 2 ( 26) 48.0 ± 0.1 60 19 VACUUM FLANGE MOUNT CONNECTOR (CONNECTION TO POWER SUPPLY) COOLING FAN TLSZA0031EB ●POWER SUPPLY (Weight: Approx. 1.8 kg) CONNECTOR (CONNECTION TO LIGHT SOURCE) EXTERNAL CONTROL TERMINALS TOP VIEW DEUTERIUM LAMP STATUS SIGNAL DEUTERIUM LAMP ON/OFF CONTROL COOLING FAN POWER SWITCH CONT DEUTERIUM LAMP POWER SUPPLY POWER POWER 90 OUTPUT LAMP LINE INPUT F1 : T 2A. 250V 117 200 FRONT VIEW SIDE VIEW REAR VIEW LIGHT SOURCE TO POWER SUPPLY CONNECTION CABLE LENGTH: 1800 ± 50 TLSZA0032EB RELATED PRODUCTS ■VACUUM FLANGE ●OVERVIEW Various vacuum flanges are available for the L12542 VUV ionizer. The E3444-02 mount flange meets ICF114 flange specifications and so easily attaches to ports of most vacuum equipment. We also provide other vacuum flanges including flanges made to JIS (Japanese Industrial Standards) specifications, so users can select the best flange that matches their vacuum vessel. ●SPECIFICATIONS Parameter Sealing method Flange Mount flange Seeling force retention E3444 Regular — 1.33 × 10-4 E3444-01 O-ring JIS VF50 JIS VG50 Pa L/s or less (1 × 10-6 Torr L/s) E3444-02 ICF114 ICF114 ●DIMENSIONAL OUTLINE (Unit: mm) 40 E3444 4- 8.4 10 O-RING 70.0 ± 0.3 P.C.D. 106 40 120 7 20 TLSOA0097EB 40 E3444-01 4- 10 10 O-RING 70.0 ± 0.3 P.C.D. 100 40 120 7 20 TLSOA0098EB 47.5 E3444-02 17.5 8- 8.4 O-RING 70.0 ± 0.3 114 P.C.D. 92.2 40 7 20 TLSOA0053EC Subject to local technical requirements and regulations, availability of products included in this promotional material may vary. Please consult with our sales office. Information furnished by HAMAMATSU is believed to be reliable. However, no responsibility is assumed for possible inaccuracies or omissions. Specifications are subject to change without notice. No patent rights are granted to any of the circuits described herein. ©2014 Hamamatsu Photonics K.K. HAMAMATSU PHOTONICS K.K. www.hamamatsu.com HAMAMATSU PHOTONICS K.K., Electron Tube Division 314-5, Shimokanzo, Iwata City, Shizuoka Pref., 438-0193, Japan, Telephone: (81)539/62-5248, Fax: (81)539/62-2205 U.S.A.: Hamamatsu Corporation: 360 Foothill Road, Bridgewater. N.J. 08807-0910, U.S.A., Telephone: (1)908-231-0960, Fax: (1)908-231-1218 E-mail: [email protected] Germany: Hamamatsu Photonics Deutschland GmbH: Arzbergerstr. 10, D-82211 Herrsching am Ammersee, Germany, Telephone: (49)8152-375-0, Fax: (49)8152-2658 E-mail: [email protected] France: Hamamatsu Photonics France S.A.R.L.: 19, Rue du Saule Trapu, Parc du Moulin de Massy, 91882 Massy Cedex, France, Telephone: (33)1 69 53 71 00, Fax: (33)1 69 53 71 10 E-mail: [email protected] United Kingdom: Hamamatsu Photonics UK Limited: 2 Howard Court, 10 Tewin Road, Welwyn Garden City, Hertfordshire AL7 1BW, United Kingdom, Telephone: (44)1707-294888, Fax: (44)1707-325777 E-mail: [email protected] North Europe: Hamamatsu Photonics Norden AB: Torshamnsgatan 35 SE-164 40 Kista, Sweden, Telephone: (46)8-509-031-00, Fax: (46)8-509-031-01 E-mail: [email protected] TLSZ1018E03 Italy: Hamamatsu Photonics Italia S.r.l.: Strada della Moia, 1 int. 6, 20020 Arese (Milano), Italy, Telephone: (39)02-93581733, Fax: (39)02-93581741 E-mail: [email protected] China: Hamamatsu Photonics (China) Co., Ltd.: B1201 Jiaming Center, No.27 Dongsanhuan Beilu, Chaoyang District, Beijing 100020, China, Telephone: (86)10-6586-6006, Fax: (86)10-6586-2866 E-mail: [email protected] NOV. 2014 IP