HAMAMATSU L1314

WATER-COOLED TYPE
DEUTERIUM LAMPS
L1314, L1835
High Intensity, 150 W Type,
Vacuum UV (from 115 nm) Light Source - L1835
The L1314 and L1835 are water-cooled 150 W deuterium lamps that
deliver a radiant intensity 3 to 4 times higher than standard 30 W deuterium lamps. The lamp bulb is enclosed in a cylindrical metal jacket
specially designed for water cooling. The L1314 has a synthetic silica
window for an efficient emission of UV radiation, and the L1835 employs a MgF2 (magnesium fluoride) window which even allows emitting vacuum UV radiation. Select the lamp that matches wavelengths
required by your application. Vacuum flanges are also available as options in the L1835 for easy mounting to a vacuum chamber.
APPLICATIONS
GENERAL
Parameter
L1314
L1835
160 to 400
115 to 400
Spectral Distribution
Synthetic silica
MgF2
Window Material
2.5
Aperture Size
Water cooling A
Cooling Method
720
950
Weight (Approx.)
No
Yes
Installation to Vacuum Port
Unit
nm
—
mm dia.
—
g
—
RECOMMENDED OPERATING CONDITION / CHARACTERISTICS (at 25 °C)
Parameter
Heater Voltage (DC, AC)
Warm-up Heater Current (DC, AC)
Warm-up Time
Heater Voltage (DC)
Operation Heater Current (DC)
Discharge Starting Voltage (DC)
Anode Current
Tube Drop Voltage (DC)
Output
Drift (Max.)
Stability Fluctuation (Max.)
Water Flow Rate
Estimated Life
NOTE: ATypes L1314 and L1835 cannot be
operated without cooling water passing
through them. Care should be taken that
the lamp is positioned properly so that
the two nozzles are aligned vertically,
with the water flowing into the jacket at
the bottom nozzle and leaving the jacket
at the top nozzle. If this arrangement is
not observed, there is a danger of
damaging the lamp due to overheating.
Value
10 ± 1
1.2
20
5
1
500
1.2
120 ± 10
±1.0
0.5
1.5
300
Unit
V
A Typ.
s
V
A Typ.
V Min.
A
V
%/h
% p-p
L/min
h
Flow of cooling water
OUTLET
U P
INLET
TLSOC0016EC
TLSOF0140
Figure 1: Spectral Distribution
L1314: UV range
RADIANT INTENSITY (µW/cm2.nm) at 30cm
SPECIFICATIONS
▲Left: L1835 Right: L1314
1.2
TLSOB0055EB
1.0
L1314
0.5
0.1
30 W TYPE
0.05
0.01
160
200
240
280
320
360
400
WAVELENGTH (nm)
L1835: Vacuum UV range
TLSOB0054EB
100
RELATIVE OUTPUT INTENSITY (%)
●Spectrophotometer, Fluorescence Spectrophotometer
●Removal of static electricity from the semiconductor wafer
●PID (Photo Ionization Detector)
●Solar Simulator
●Optical CVD
●Optical Chemical Reaction
●Excitation Light Source
160.8
80
125.4
60
121.6
40
20
0
110
120
130
140
150
160
WAVELENGTH (nm)
Subject to local technical requirements and regulations, availability of products included in this promotional material may vary. Please consult with our sales office.
Information furnished by HAMAMATSU is believed to be reliable. However, no responsibility is assumed for possible inaccuracies or omissions. Specifications are
subject to change without notice. No patent rights are granted to any of the circuits described herein. ©2006 Hamamatsu Photonics K.K.
170
WATER-COOLED TYPE
DEUTERIUM LAMPS L1314, L1835
Figure 2: Dimensional Outline
50.8
L1314
50.8
48
L1835
25.4
42
25.4
ARC
POINT
IC
1
2
4
3
HEATER
40
ANODE
192
8
CATHODE
11
CATHODE
PIN CONNECTION
( Connector : Miyama
Elec . MC-032 )
ANODE
50
25
25
95
85
150
8
110
80
ARC
POINT
4
3
HEATER
PIN CONNECTION
( Connector : Miyama
Elec . MC-032 )
TLSOA0027EC
11
* L1314 cannot be used with the vacuum chamber.
The main body might be damaged when using it by mistake.
IC
1
2
TLSOA0028EC
OPTION (sold separately)
● POWER SUPPLY C3150
● VACUUM FLANGE E3444 SERIES (for L1835)
Since the L1835 vacuum UV deuterium lamp is often used while installed onto a vacuum chamber, Hamamatsu provides the E3444 series
vacuum flanges specially designed for this purpose. Among these, the
E3444-02 has a flange conforming to ICF114 specifications, allowing
easy installation onto most vacuum chamber ports. The E3444 series
also includes a general-purpose "N" flange and JIS (Japanese Industrial Standards) specification flange. Select the desired type depending
on the vacuum equipment to be used.
Dimensional Outline E3444-02 (Unit: mm)
8- 8.4
O-RING
TLSOA0053EA
SPECIFICATIONS
Type No. Sealing
Method
E3444
E3444-01 O-Ring
E3444-02
70 ± 0.3
Parameter
Description/Value
1.2 A
Output Current (DC)
120 V ± 25 V
Normal Operation (DC)
Output
250 V Typ.
No Load (DC)
Voltage
600 V peek
Trigger Voltage
±0.1 % Max.
Input Fluctuation (±10 %)
Load Fluctuation (normal operation range) ±0.1 % Max.
Output
±0.1 %/h Max.
Fluctuation Drift
0.1 % p-p Max.
Ripple
1.5 A Fuse
Over-load Protection
114
Anode output
Parameter
Description/Value
10 V, 1.2 A
Output Voltage for Warm-up (DC)
Approx. 30 s
Warm-up Time
5 V ± 0.5 V, 1.0 A
Output Voltage for Operation (DC)
±1.0 % or less
Input Fluctuation (±10 %)
2 A slow-blow or by electronic circuit
Over-load Protection
100 V / 118 V / 230 V (±10 %)
Input Source Voltage (AC)
Approx. 330 VA
Apparent Power
0 °C to 40 °C
Operating Ambient temperature
+5 °C to +35 °C
Performance Guaranteed Temperature
Forced air cooling
Cooling Method
Flow rate switch (1.5 L/min)
Cooling Water Detection Method
Less cooling water,
Protective Functions
excessive temperature in the C3150,
(LED on when malfunction)
short circuit, disconnection
215(W) × 125(H) × 265(D)
External Dimensions (mm)
Approx. 10 kg
Weight
P.C.D. 92.2
CHARACTERISTICS
Filament (heater) output
40
The C3150 power supply is specifically designed for water-cooled 150
W lamps. Various devices to provide stable light output are built into
this power supply. Protective functions such as a water flow rate monitor and lamp lighting monitor also ensure safe and correct operation.
Flange
Regular
JIS VF50
ICF114
Mount
Sealing Force
Flange
Retention
—
1.33 × 10-4 Pa L/s or less
JIS VG50
(1 × 10-6 Torr L/s)
ICF114
Attachment Reference
It is designed to be simply inserted
over the lamp housing.
VACUUM FLANGE
TLSOC0017EB
WEB SITE www.hamamatsu.com
HAMAMATSU PHOTONICS K.K., Electron Tube Division
314-5, Shimokanzo, Iwata City, Shizuoka Pref., 438-0193, Japan, Telephone: (81)539/62-5248, Fax: (81)539/62-2205
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France: Hamamatsu Photonics France S.A.R.L.: 19, Rue du Saule Trapu, Parc du Moulin de Massy, 91882 Massy Cedex, France, Telephone: (33)1 69 53 71 00, Fax: (33)1 69 53 71 10 E-mail: [email protected]
United Kingdom: Hamamatsu Photonics UK Limited: 2 Howard Court, 10 Tewin Road Welwyn Garden City Hertfordshire AL7 1BW, United Kingdom, Telephone: 44-(0)1707-294888, Fax: 44(0)1707-325777 E-mail: [email protected]
North Europe: Hamamatsu Photonics Norden AB: Smidesvägen 12, SE-171-41 SOLNA, Sweden, Telephone: (46)8-509-031-00, Fax: (46)8-509-031-01 E-mail: [email protected]
TLSO1012E03
Italy: Hamamatsu Photonics Italia: S.R.L.: Strada della Moia, 1/E, 20020 Arese, (Milano), Italy, Telephone: (39)02-935 81 733, Fax: (39)02-935 81 741 E-mail: [email protected]
JUL. 2006 IP